A liquid medicine recovery device

Abstract

The present invention discloses a liquid medicine recovery device, comprising a rotating table; liquid medicine tanks are distributed along the outer circumference of the rotating table, and an outflow outlet is provided at the bottom of the liquid medicine tank; a mounting frame is arranged below the liquid medicine tank, and a vertically arranged guide rail is provided on the mounting frame; an inner diverter hood is arranged between the rotating table and the liquid medicine tank, and can be actively lifted up and down in the guide rail by an inner driving part; an outer diverter hood is arranged between the inner diverter hood and the liquid medicine tank, and can be lifted up and down in the guide rail by an outer sliding part, and the outer sliding part is located above the inner driving part; two limiting parts are respectively arranged on both sides of the mounting frame; and a pushing component is arranged on both sides of the inner diverter hood. The present invention adds a lifting motor connected to the inner wind flow hood, and then cooperates with the pushing component and the limiting part, so that the inner diverter hood and the outer diverter hood can respectively form independent channels for liquid medicine recovery, thereby realizing independent recovery of two liquid medicines by a single driving force, with low cost, easy control and adjustment, compact structure, and small occupied area.

Description

Technical Field

[0001] The invention belongs to the technical field of wafer cleaning, and in particular relates to a recovery device for a chemical solution used in a wafer cleaning process. Background Art

[0002] In the wafer production process, wafer cleaning is essential for each workstation. Different workstations require different cleaning effects, and the types of chemicals used also vary depending on the process, especially for single-wafer cleaning and etching equipment.

[0003] In order to save costs, various expensive chemical liquids need to be recycled and reused. During the recycling process, multiple recycling mechanisms are required to separate them and then recycle them in batches. In the existing structure, an inner and outer double-layer diverter hood is usually set to separate the two different liquids. During the movement of the mechanism, the inner and outer diverter hoods are respectively controlled by multiple actuators to achieve up and down lifting. The actuators can be cylinders or electric modules. However, when using the cylinder, there are problems such as the asynchronous lifting of a single cylinder and the difficulty in adjusting the cylinder guide, which causes the diverter hood to break and deform. The electric module is more complicated to control during use, and the dual modules need to be controlled synchronously, with more controllers, complex electrical procedures, and higher costs. Therefore, the above two structures do not meet the existing needs, and are not conducive to the later maintenance of the equipment and the arrangement of other mechanisms. Summary of the Invention

[0004] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide a liquid medicine recovery device with low overall cost, easy control and debugging, and small occupied area.

[0005] To achieve the above object, the present invention adopts the following technical solution: a liquid medicine recovery device, comprising:

[0006] A rotating table having a positioning PIN for clamping a wafer;

[0007] A liquid medicine tank is distributed along the outer circumference of the rotating table, and a liquid outlet is provided at the bottom of the liquid medicine tank; a mounting frame is arranged below the liquid medicine tank, and a vertical guide rail is provided on the mounting frame;

[0008] An inner diverter hood is provided between the rotating platform and the liquid medicine tank, and the inner diverter hood can be actively raised and lowered in the guide rail by an inner driving unit to guide the liquid medicine to flow out along the direction of the inner diverter hood;

[0009] an outer diverter cover, disposed between the inner diverter cover and the liquid medicine tank, the outer diverter cover being capable of rising and falling within the guide rail via an outer sliding portion, for guiding the liquid medicine to flow out along the gap between the inner diverter cover and the outer diverter cover, wherein the outer sliding portion is located above the inner driving portion;

[0010] A limiting portion, wherein two limiting portions are respectively arranged on both sides of the mounting frame;

[0011] Pushing components are provided on both sides of the inner diverter cover and are arranged corresponding to the limiting parts;

[0012] When the inner driving part drives the inner diverter cover to rise along the guide rail, the inner driving part synchronously drives the outer sliding part to rise along the guide rail, and the outer sliding part drives the outer diverter cover to rise synchronously. When the upper surface of the inner diverter cover is higher than the position of the wafer, the sprayed liquid is guided by the inner diverter cover under the action of the centrifugal force of the wafer rotation and is recovered by the inner liquid outlet. At this time, the pushing component follows the inner diverter cover to rise and then pushes the limiting part to limit the lifting distance of the outer diverter cover on the guide rail.

[0013] When the inner driving part drives the inner diverter cover to descend along the guide rail, the inner diverter cover is reset, and the outer diverter cover descends to the lowest limit position of the limit part due to its own gravity. At this time, the wafer is located between the inner and outer diverter covers, and the sprayed liquid flows out along the gap between the inner and outer diverter covers under the action of the centrifugal force of the wafer rotation and is recovered through the outgoing liquid port;

[0014] When the recovery of the liquid medicine is completed, the internal driving part drives the internal diversion cover to rise again. At this time, the pushing component pushes the limiting part again to release the limiting part on the external diversion cover. Then the internal driving part drives the internal diversion cover to move downward, and the external diversion cover is reset due to its own gravity.

[0015] In one embodiment, the external liquid outlet and the internal liquid outlet are arranged adjacent to each other.

[0016] In one embodiment, the internal drive unit includes a lifting motor vertically arranged on the mounting frame; the lifting motor drives the inner slider located on the guide rail to move up and down; the inner slider is provided with an inner connecting plate distributed along the diameter direction of the medicine liquid tank, and the two ends of the upper surface of the inner connecting plate are provided with inner columns; the inner columns are connected to the inner diversion cover.

[0017] In one embodiment, the outer sliding portion includes an outer sliding block slidably arranged on the guide rail; the outer sliding block is provided with an outer connecting plate located on the upper surface of the inner connecting plate, and outer columns are provided at both ends of the upper surface of the outer connecting plate, and the outer columns are connected to the outer diversion cover.

[0018] In one embodiment, the pushing component includes a first push plate and a second push plate, the first push plate extends from one side of the internal driving part, and the extended end of the first push plate is provided with an inclined second push plate, so that when the pushing component rises, the second push plate can push the limiting part.

[0019] In one embodiment, the limiting portion includes a limiting plate and a telescopic assembly; the limiting plate is provided on the outer sliding portion, and a limiting slot is provided on the limiting plate; the telescopic assembly is provided on a side of the mounting frame; the telescopic assembly includes a first guide tube, a second guide tube, a limiting rod, a buckle, and a push rod;

[0020] The first guide tube and the second guide tube are vertically mounted on the mounting frame in sequence; the second guide tube has a first inner hole and a second inner hole coaxially arranged therein, and the diameter of the first inner hole is larger than the diameter of the second inner hole; an inner sleeve is provided on the inner wall of the second inner hole, and an end of the inner sleeve opposite to the first guide tube has an internal tooth profile, and an end of the inner sleeve opposite to the internal tooth profile has guide inner grooves equidistantly distributed along the circumferential direction of the inner wall of the inner sleeve, and the guide inner grooves are provided through the end toward the internal tooth profile;

[0021] The limiting rod is inserted from the first guide tube and abuts against the end surface of the second inner hole, and a spring is sleeved on the side of the limiting rod facing the second inner hole;

[0022] The buckle is inserted from one end of the inner sleeve and connected to the limit rod, so that the spring on the limit rod is in a compressed state; a plurality of buckle guide strips are provided on the circumference of the end of the buckle opposite to the limit rod, and the end surface of the buckle guide strip opposite to the limit rod has an oblique tooth shape; wherein, the buckle guide strip is limited in the guide inner groove;

[0023] A push rod is provided between the buckle and the inner sleeve and is sleeved on the buckle; the push rod is sleeved on one side end face of the buckle and is provided with a push rod tooth shape, and the push rod tooth shape is away from the buckle guide strip; the rear end of the push rod tooth shape is provided with a plurality of push rod guide strips distributed along the circumference of the push rod; the push rod guide strip is limited in the guide inner groove and is arranged opposite to the buckle guide strip.

[0024] In one embodiment, the number of the snap guide strips is four.

[0025] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art:

[0026] The liquid medicine recovery equipment of the present invention drives the outer air vent hood and the inner air vent hood to rise synchronously by a lifting motor until the inner air vent hood is higher than the position of the wafer for spraying the first liquid medicine, and the liquid medicine is recovered through the inner liquid outlet communicated with the inner air vent hood, and the outer air vent hood is limited by the limiting part; when it is necessary to spray the second liquid medicine, the lifting motor drives the inner air vent hood to descend, and the outer air vent hood moves to the lowest position of the limiting part under the action of its own gravity. At this time, the wafer is between the outer diversion hood and the inner air vent hood, so that the liquid medicine can flow into the outer liquid outlet through the gap between the outer air vent hood and the inner air vent hood and then be discharged, so that the liquid medicine can be recovered through different channels under different liquid medicine spraying conditions. The overall structure is compact, and a single driving motor can lift the inner and outer air vents up and down and limit the position of the outer air vent hood, so as to realize independent recovery of different liquid medicines. The overall occupied area is small, which is beneficial to the later maintenance of the equipment and the arrangement of other mechanisms. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The technical solution of the present invention will be further described below with reference to the accompanying drawings:

[0028] Figure 1 A schematic diagram of the three-dimensional structure of an embodiment of the present invention;

[0029] Figure 2 for Figure 1 Schematic diagram from another perspective;

[0030] Figure 3 for Figure 1 Schematic diagram from another perspective;

[0031] Figure 4 A side view of an embodiment of the present invention;

[0032] Figure 5 for Figure 4 Internal cross-sectional view of

[0033] Figure 6 This is a schematic diagram of the use status of an embodiment of the present invention;

[0034] Figure 7 for Figure 6 Internal cross-sectional view of

[0035] Figure 8 This is a schematic diagram of another usage state of an embodiment of the present invention;

[0036] Figure 9 for Figure 8 Internal cross-sectional view of

[0037] Figure 10 This is a schematic diagram of the three-dimensional structure of the telescopic component in one embodiment of the present invention;

[0038] Figure 11 for Figure 10 Internal cross-sectional view of

[0039] Figure 12 for Figure 10 Schematic diagram of the three-dimensional decomposition of

[0040] Figure 13 Schematic diagram of the three-dimensional structure of the ejector rod in one embodiment of the present invention;

[0041] Figure 14 is a side view of a second guide tube in one embodiment of the present invention;

[0042] Figure 15 is an internal cross-sectional view of a second guide tube in one embodiment of the present invention;

[0043] Figure 16 This is a diagram showing the unfolding change process when the ejector pin pushes the ejector buckle from the inner guide groove to the inner tooth shape in one embodiment of the present invention;

[0044] Figure 17 A diagram showing the unfolding change process when the ejector pin pushes the ejector buckle from the inner tooth shape to the inner guide groove in one embodiment of the present invention;

[0045] Figure 18 This is a diagram of the expansion change process when the ejector pin is reset in one embodiment of the present invention;

[0046] Figure 19 1. A diagram showing the expansion change process of the telescopic assembly in the limit slot in different use states in one embodiment of the present invention;

[0047] Among them: 1. Rotary table; 2. Internal drive unit; 3. External sliding unit; 4. Liquid tank; 5. Internal diverter cover; 7. Mounting frame; 8. Guide rail; 9. External diverter cover; 10. External liquid outlet; 11. Internal liquid outlet; 12. Pushing component; 13. Limiting unit; 14. Limiting plate; 15. Telescopic assembly; 16. Wafer; 17. Positioning pin; 18. Rotary motor; 20. Lifting motor; 21. Internal slider; 22. Internal connecting plate; 23. Internal column; 30. External slider; 31. External connecting plate; 3 2. Outer column; 120. First push plate; 121. Second push plate; 140. Limiting slot; 150. First guide tube; 151. Second guide tube; 152. Limiting rod; 153. Buckle; 154. Push rod; 155. Spring; 150a. First inner hole; 150b. Second inner hole; 150c. Inner sleeve; 150d. Inner tooth profile; 150e. Guide inner groove; 153a. Buckle guide strip; 153b. Oblique tooth profile; 154a. Push rod tooth profile; 154b. Push rod guide strip. DETAILED DESCRIPTION

[0048] In order to enable those skilled in the art to better understand the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of this application.

[0049] The present invention provides a liquid medicine recovery device to solve the problem in the prior art that in the process of recovering liquid medicine for wafer cleaning, different liquid medicines need to be recovered in batches using multiple mechanisms, which leads to complex structure, difficulty in control, excessive occupation of area, and is not conducive to the later maintenance of the equipment and the arrangement of other mechanisms.

[0050] For ease of understanding, the specific process in the embodiment of this application is described below. Figures 1 to 9 A liquid medicine recovery device in an embodiment of the present application includes a rotating table 1, an internal driving part 2, an external sliding part 3, a liquid medicine tank 4, an internal diverter cover 5, a mounting frame 7, a guide rail 8, an external diverter cover 9, an external liquid outlet 10, an internal liquid outlet 11, a pushing component 12 and a limiting part 13; the rotating table 1 has a plurality of positioning PINs 17 for clamping a wafer 16; the liquid medicine tank 4 is distributed along the circumference of the rotating table 1 and surrounds the rotating table 1, and the bottom of the liquid medicine tank 4 is provided with an external liquid outlet 10 for recovering the liquid medicine; the mounting frame 7 is installed below the liquid medicine tank 4, and a vertically arranged guide rail 8 is provided on the mounting frame 7.

[0051] The inner diverter hood 5 is arranged between the rotating table 1 and the medicine liquid tank 4, and the inner diverter hood 5 can actively rise and fall in the guide rail 8 through the inner driving part 2 to guide the medicine liquid to flow out along the direction of the inner diverter hood 5; the outer diverter hood 9 is arranged between the inner diverter hood 5 and the medicine liquid tank 4, and the outer diverter hood 9 can rise and fall in the guide rail 8 through the outer sliding part 3 to guide the medicine liquid to flow out along the gap between the inner diverter hood 5 and the outer diverter hood 9, wherein the outer sliding part 3 is located above the inner driving part 2; the two limiting parts 13 are respectively installed on both sides of the mounting frame 7; the pushing part 12 extends from both sides of the inner driving part 2 and corresponds to the two limiting parts 13 respectively.

[0052] The liquid medicine recovery device of the present invention drives the inner diverter cover 5 and the outer diverter cover 9 to rise synchronously through the inner driving part 2. At this time, the first liquid medicine can be recovered by the inner liquid outlet 11 under the guidance of the inner diverter cover 5, and at the same time, the pushing component 12 pushes the limiting part 13 to limit the outer diverter cover 9, so that the inner and outer diverter covers are separated; when the inner driving part 2 descends, the inner diverter cover 5 follows the inner driving part 2 to descend, and the outer diverter cover 9 drops to the lowest limit in the limiting part 13 due to its own gravity. At this time, another liquid medicine can flow out from the gap between the inner diverter cover 5 and the outer diverter cover 9. After it comes out, it is recovered through the external liquid outlet 10; when the outer diverter hood 9 needs to be reset, the internal driving part 2 drives the pushing part 12 to rise again, and the pushing part 12 contacts the limit part 13 to release the limit of the outer diverter hood 9, and then the lifting mechanism 6 drives the inner diverter hood 5 to descend, and the outer diverter hood 9 is reset under the action of its own gravity. In this way, the inner diverter hood 5 and the outer diverter hood 9 can be driven up and down by one power mechanism, thereby realizing the independent collection of different liquid medicines. The overall structure is compact, easy to control and debug, and the cost is relatively low.

[0053] In one embodiment, see Figure 1 , Figure 4 and Figure 6 The outer shroud 9 and inner shroud 5 are disc-shaped, with the outer shroud 9 surrounding the inner shroud 5. Initially, the upper surface of the outer shroud 9 is located above the upper surface of the inner shroud 5, and both upper surfaces are smaller than the height of the wafer 16. Furthermore, a gap is left between the outer shroud 9 and the inner shroud 5 to ensure that the drug solution can flow through the gap into the drug solution tank 4 and then be discharged from the external drain port 10.

[0054] Further, based on Figure 2 The external liquid outlet 10 and the internal liquid outlet 11 are arranged adjacent to each other. Specifically, since the liquid medicine tank 4 surrounds the outside of the external diverter cover 9, the liquid medicine will flow into the liquid medicine tank 4 from the gap between the external diverter cover 9 and the internal diverter cover 5 under the action of the centrifugal force of the wafer, and then be discharged from the external liquid outlet 10 at the bottom of the liquid medicine tank 4, thereby realizing an independent channel recovery of one liquid medicine, and the independent recovery channel of the other liquid medicine is discharged from the internal liquid outlet 11 under the guidance of the internal diverter cover 5.

[0055] In one embodiment, see Figure 2 In this embodiment, there are two guide rails 8, which are mounted vertically and parallel to the mounting frame 7. The inner drive unit 2 and the outer slider 3 can both slide on the two guide rails 8, with the inner drive unit 2 actively sliding on the guide rails 8, while the outer slider 3 slides passively. During operation, the inner drive unit 2 rises, pushing the outer slider 3 upward within the guide rails 8. The outer slider 3 descends on the guide rails 8 due to its own weight.

[0056] In one embodiment, see Figures 2 to 9 The inner drive unit 2 includes a lifting motor 20 vertically mounted on the mounting frame 8. The lifting motor 20 drives an inner slider 21 positioned on the two guide rails 8 to move up and down. The inner slider 21 is provided with inner connecting plates 22 distributed along the diameter of the liquid medicine tank 4. Inner columns 23 are provided at both ends of the upper surface of the inner connecting plates 22. The inner columns 23 are connected to the inner diverter cover 5, thereby fixedly connecting the inner diverter cover 5 to the inner slider 21. During operation, when the inner slider 21 slides on the guide rails 8, it simultaneously drives the inner diverter cover 5 to move up and down between the outer diverter cover 9 and the rotating platform 1.

[0057] Furthermore, the outer sliding portion 3 includes an outer sliding block 30 slidably arranged on the guide rail 8, and the outer sliding block 30 is located above the inner sliding block 21; the outer sliding block 30 is provided with an outer connecting plate 31 located on the upper surface of the inner connecting plate 22, and the two ends of the upper surface of the outer connecting plate 31 are provided with outer columns 32, and the outer columns 32 are connected to the outer diverter cover 9. During operation, when the inner sliding block 21 is driven to rise by the lifting motor 20, since the outer sliding block 30 is slidably arranged above the inner sliding block 21, when the inner sliding block 21 rises in the guide rail 8, it simultaneously pushes the outer sliding block 30 to move up in the guide rail 8, and when the inner sliding block 21 is driven to descend by the lifting motor 20, the outer sliding block 30 will move downward along the guide rail under the action of its own gravity, thus realizing the function of driving the inner and outer sliding blocks to rise and fall by one power mechanism, reducing one power mechanism, reducing costs, and also utilizing control and debugging.

[0058] The lifting process of the inner shroud 5 and the outer shroud 6 is described in detail below:

[0059] When the lifting motor 20 drives the inner diverter hood 5 to rise along the guide rail 8, the inner slider 21 synchronously pushes the outer slider 30 to rise along the guide rail 8, and the outer slider 30 drives the outer diverter hood 9 to rise synchronously. The outer diverter hood 9 and the inner diverter hood 5 rise until the upper surface of the inner diverter hood 5 is higher than the position of the wafer 16, and the wafer begins to be sprayed with liquid medicine. During the spraying process, the liquid medicine is recovered by the inner liquid outlet 11 along the guidance of the inner diverter hood 5 under the action of the centrifugal force of the wafer rotation, completing an independent recovery of the liquid medicine. In this process, the pushing component 12 follows the inner diverter hood 5 to rise and then pushes the limiting part 13 to limit the lifting distance of the outer diverter hood 9 on the guide rail 8.

[0060] When the lifting motor 20 drives the inner diverter hood 5 to descend along the guide rail 8, the inner diverter hood 5 will reset along the guide rail 8, and the outer diverter hood 9 will also move downward due to its own gravity. However, the limiting part 13 limits the descending position of the outer diverter hood 9. However, in this descending position, the height of the outer connecting plate 31 is still higher than the height of the inner connecting plate 22. The outer diverter hood 9 descends to the lowest limit position given to the outer diverter hood 9 by the limiting part 13. At this time, the wafer 16 is just located between the inner diverter hood 5 and the outer diverter hood 9, and the wafer begins to be sprayed with liquid medicine. During the spraying process, the liquid medicine flows out along the gap between the inner diverter hood 5 and the outer diverter hood 9 under the action of the centrifugal force of the wafer rotation, and is recovered by the external liquid outlet 10, completing the independent recovery of another liquid medicine.

[0061] When the two kinds of liquid medicine are recovered, the lifting motor 20 drives the inner diverter cover 5 to rise again, and the pushing component 12 also rises accordingly. After the pushing component 12 contacts the limit part 13 again, the limit part 13 retracts to release the limit on the lifting position of the outer diverter cover 9 on the guide rail 8, and then the lifting motor 20 drives the inner diverter cover 5 to move downward. Since the outer diverter cover 9 has no limit, it is reset under the action of its own gravity. When the outer diverter cover 9 is in its original position, the outer connecting plate 31 connected to the outer diverter cover 9 is attached to the position on the inner connecting plate 22 of the inner diverter cover 5.

[0062] In one embodiment, based on Figure 2 and Figure 3 The pushing member 12 includes a first push plate 120 and a second push plate 121. The first push plate 120 is elongated and extends from the side of the inner connecting plate 22 opposite the stopper 13. The second push plate 121 is provided at an angle at the extended end of the first push plate 120. When the first push plate 120 moves upward following the inner connecting plate 22, the second push plate 121 moves in an inclined direction. When the second push plate 121 contacts one end of the stopper 13, it exerts a lateral force on the stopper 13.

[0063] In one embodiment, based on Figures 1 to 4The limiting parts 13 include two in total, and the two limiting parts 13 are respectively arranged on both sides of the mounting frame 7. In this embodiment, the limiting parts 13 include a limiting plate 14 and a telescopic assembly 15. The limiting plate 14 is installed on the outer sliding block 30 and slides up and down with the outer slider 30. At the same time, a long strip of limiting slot 140 is opened on the limiting plate 14. The telescopic assembly 15 is arranged on the side of the mounting frame 7 and is arranged opposite to the limiting slot 140. When the pushing member 12 pushes the telescopic assembly 15 forward for the first time, the telescopic assembly 15 is inserted into the limiting slot 140. The limiting plate 14 is connected to the outer slider 30. In this way, when the limiting plate 14 slides up and down, the sliding distance of the limiting plate 14 will be limited within the limiting slot 140.

[0064] For further information, see Figure 1 , Figures 10 to 19 ; The telescopic assembly 15 includes a first guide tube 150, a second guide tube 151, a limit rod 152, a buckle 153 and a push rod 154; the first guide tube 150 and the second guide tube 151 are sequentially installed transversely on the mounting frame 7; the second guide tube 151 is provided with a first inner hole 150a and a second inner hole 150b arranged coaxially, and the diameter of the first inner hole 150a is larger than the diameter of the second inner hole 150b; the inner wall of the second inner hole 150b is provided with an inner sleeve 150c, and the end of the inner sleeve 150c opposite to the first guide tube 150 has an internal tooth shape 150d, and the end of the inner sleeve 150c opposite to the internal tooth shape 150d has a guide inner groove 150e equidistantly distributed along the circumferential direction of the inner wall of the inner sleeve, and the guide inner groove 150e is arranged to penetrate toward one end of the internal tooth shape 150d.

[0065] After the limiting rod 152 is inserted from the first guide tube 150, it is rested on the end face of the second inner hole 150b, and a spring 155 is sleeved on the side of the limiting rod 152 opposite to the second inner hole; the buckle 153 is inserted from one end of the inner sleeve 150c and is connected to the limiting rod 152, thereby compressing the spring 55. At this time, the limiting rod 152 is in a compressed state.

[0066] In addition, a plurality of buckle guide strips 153a are provided on the circumference of the opposite end of the buckle 153 and the limiting rod 152, and the buckle guide strip 153a has an oblique tooth shape 153b at the end opposite to the limiting rod 152; in the initial state, the buckle guide strip 153a is limited in the guide inner groove 150e.

[0067] A push rod 154 is provided between the buckle 153 and the inner sleeve 150c, which is sleeved on the buckle 153; the push rod 154 is sleeved on one side end face of the buckle 153 and is provided with a push rod tooth shape 154a, and the push rod tooth shape 154a is arranged opposite to the buckle guide strip 153a; the rear end of the push rod tooth shape 154a is provided with a plurality of push rod guide strips 154b distributed along the circumference of the push rod 154, and at this time the push rod guide strip 154b is also limited in the wire inner groove 150e.

[0068] In the initial state, see Figures 13 to 15 and Figure 16 The limiting rod 152 is connected to the top buckle 153 by means of a clamping mechanism; the spring 155 on the limiting rod 152 is in a compressed state. At this time, the top rod guide strip 154b and the buckle guide strip 153a are simultaneously in the guide inner groove 150e, but the two are not in contact. Instead, the oblique teeth 153b on the buckle guide strip 153a are pressed against the top rod teeth 154a. The top rod guide strip 154b and the buckle guide strip 153a are limited to the same position by the wire inner groove 150e to prevent the top rod 154 from deviating when pushing the top buckle 153 forward. At this time, the state relationship between the limiting portion 15 and the limiting groove 140 can be seen in FIG. Figure 19 The first picture on the left.

[0069] During operation, when the pushing component 12 rises and drives the push rod 154 to move forward along the direction of the guide inner groove 150e, the push rod tooth profile 154a pushes the buckle guide strip 153a to move in the direction of the force applied by the push rod. When the buckle guide strip 153a is pushed out of the guide inner groove 150e by the push rod tooth profile 154a, the buckle 153 loses the circumferential restriction of the guide inner groove 150e. In this way, under the action of the spring 155, the buckle guide strip 153a will rotate along the push rod tooth profile 154a and slide into the inner tooth profile 150d; at this time, the pushing component 12 descends, and the push rod 154 resets after losing the force of the pushing component 12, and the buckle guide strip 153a is engaged with the guide groove tooth profile 150e. Figure 16 At this time, the limiting rod 26 is in an extended state and inserted into the limiting slot 140. The limiting plate 14 is then limited in the limiting slot 140 and moves up and down, thereby playing the role of limiting the upper and lower positions of the outer diverter cover 4 connected to the limiting plate 14. At this time, the state relationship between the limiting portion 15 and the limiting slot 140 is shown in FIG. Figure 19 As shown in the second and third expanded state diagrams, the limiting portion 15 can only move up and down in the limiting groove 140.

[0070] When the pushing component 12 rises again, the pushing component 12 drives the push rod 154 to move forward along the direction of the inner tooth profile 150d. At this time, the push rod tooth profile 154a pushes the buckle guide strip 153a to move in the direction of the force applied by the push rod. When the buckle guide strip 153a is pushed out of the inner tooth profile 150d by the push rod tooth profile 154a, the buckle 153 loses the circumferential restriction of the inner tooth profile 150d. Under the action of the spring 155, the buckle guide strip 153a will rotate along the push rod tooth profile 154a and slide into the guide inner groove 150e. At this time, the limit rod 152 is in a retracted state due to the action of the spring, and disengages from the limit slot 140, so that the outer air flow cover 9 loses its limit and the outer air flow cover 9 is in a downward movement.

[0071] In summary, when the limit plate 14 and the telescopic assembly 15 in the limit part 13 are working, when the second push plate 121 pushes the telescopic assembly for the first time, the telescopic assembly is inserted into the limit groove 140 of the limit plate. When the second push plate pushes the telescopic assembly for the second time, the telescopic assembly automatically retracts from the limit groove 140, thereby realizing the switching between the limit and non-limit of the limit plate 14, and its driving force is also provided by the corresponding lifting motor 20, thereby reducing the setting of the corresponding driving mechanism and reducing the cost.

[0072] See Figures 1 to 19 The working process of this liquid medicine recovery equipment is as follows:

[0073] In the initial state, the upper surfaces of the inner diverter cover 5 and the outer diverter cover 9 are both lower than the upper surface of the wafer 16 , and the device is in an idle state.

[0074] When the wafer 16 needs to be cleaned with the first type of liquid, the lifting motor 20 starts working. The lifting motor 20 drives the inner diversion hood to rise through the inner slider. At the same time, the inner diversion hood drives the outer diversion hood to rise synchronously. When the inner diversion hood rises to a height higher than the wafer 16, it stops rising. Then the rotating table 1 rotates with the wafer 16 and sprays the liquid on the wafer 16. Under the action of the centrifugal force of the wafer, the liquid moves according to the centrifugal force of the wafer. Figure 7 The direction of the arrow is guided by the inner diverter cover 5 into the inner liquid outlet 11, and finally the first spray liquid is independently recovered through the inner liquid outlet 11.

[0075] In addition, during this stage, the pushing component 12 rises synchronously with the inner airflow cover 5, and the second push plate 121 in the pushing component 12 pushes the limiting rod 152 to be inserted into the limiting slot 140, and is now located at the uppermost end of the limiting slot 140, and the distance that the limiting plate 14 moves up and down is limited within the limiting slot 140.

[0076] When the wafer 16 needs to be cleaned with another liquid, the lifting motor 20 starts to work, and the lifting motor 20 drives the inner diversion cover 5 to descend. At this time, the outer wind hood 9 moves from the upper end of the limit slot 140 to the lower end under the action of its own gravity and then stops moving downward. At this time, the outer diversion cover 9 is in the working state, and the inner diversion cover 5 is in the initial state. The wafer 16 rotates and the liquid is sprayed on the wafer 2. The liquid moves according to the centrifugal force. Figure 9 In the direction of the arrow, the sprayed liquid is guided by the outer diversion cover 9 into the gap between the outer diversion cover 9 and the inner diversion cover 5 and then recovered from the outer liquid outlet 10, thereby completing the independent recovery of the second liquid.

[0077] After the two liquid chemicals have been processed and recovered, the lifting motor 20 drives the inner shroud 5 and the push member 12 to rise synchronously again. The second push plate 121 in the push member 12 pushes the ejector pin 154 forward, causing the limit rod 152 to retract from the limit slot 140, releasing the limit on the outer airflow shroud 9. The lifting motor 20 then drives the inner shroud 5 downward. At this time, the outer shroud 9 also moves downward under the action of its own gravity until the outer connecting plate is attached to the inner connecting plate. Finally, the robot removes the wafer 16, and the entire cleaning process is completed.

[0078] As described above, the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A liquid medicine recovery device, characterized in that: include: A rotating table (1), wherein the rotating table (1) has a positioning PIN (17) for clamping a wafer (16); A liquid medicine tank (4) is distributed along the outer circumference of the rotating table (1), and an outflow liquid outlet (10) is provided at the bottom of the liquid medicine tank (4); A mounting frame (7) is arranged below the liquid medicine tank (4), and a vertically arranged guide rail (8) is provided on the mounting frame (7); An inner flow divider (5) is arranged between the rotating platform (1) and the liquid medicine tank (4), and the inner flow divider (5) can be actively raised and lowered in the guide rail (8) by an inner driving unit (2) to guide the liquid medicine to flow out along the direction of the inner flow divider (5); An outer flow divider (9) is provided between the inner flow divider (5) and the liquid medicine tank (4), and the outer flow divider (9) can be raised and lowered in the guide rail (8) via an outer sliding portion (3) to guide the liquid medicine to flow out along the gap between the inner flow divider (5) and the outer flow divider (9), wherein the outer sliding portion (3) is located above the inner driving portion (2); A limiting portion (13), wherein two limiting portions (13) are respectively arranged on both sides of the mounting frame (7); A pushing component (12) is provided on both sides of the inner flow dividing cover (5) and is provided corresponding to the limiting portion (13); When the inner driving part (2) drives the inner diverter hood (5) to rise along the guide rail (8), the inner driving part (2) synchronously drives the outer sliding part (3) to rise along the guide rail (8), and the outer sliding part (3) drives the outer diverter hood (9) to rise synchronously. When the upper surface of the inner diverter hood (5) is higher than the position of the wafer (16), the sprayed liquid is recovered from the inner liquid outlet (11) along the guidance of the inner diverter hood (5) under the action of the rotating centrifugal force of the wafer (16). At this time, the pushing component (12) follows the inner diverter hood (5) to rise and then pushes the limiting part (13) to limit the lifting distance of the outer diverter hood (9) on the guide rail (8); When the inner driving part (2) drives the inner diverter cover (5) to descend along the guide rail (8), the inner diverter cover (5) is reset, and the outer diverter cover (9) descends to the lowest limit position of the limit part (13) due to its own gravity. At this time, the wafer (16) is located between the inner diverter cover (5) and the outer diverter cover (9). The sprayed liquid flows out along the gap between the inner diverter cover (5) and the outer diverter cover (9) under the action of the centrifugal force of the rotation of the wafer (16) and is recovered by the outgoing liquid outlet (10); When the recovery of the liquid medicine is completed, the inner driving part (2) drives the inner diverter cover (5) to rise again, and at this time the pushing component (12) pushes the limiting part (13) again to release the limiting part (13) on the outer diverter cover (9), and then the inner driving part (2) drives the inner diverter cover (5) to move downward, and the outer diverter cover (9) is reset due to its own gravity.

2. The liquid medicine recovery device according to claim 1, characterized in that: The external liquid outlet (10) and the internal liquid outlet (11) are arranged adjacent to each other.

3. The liquid medicine recovery device according to claim 1, characterized in that: The inner driving part (2) includes a lifting motor (20) vertically arranged on the mounting frame (7); the lifting motor (20) drives an inner slider (21) located on the guide rail (8) to move up and down; the inner slider (21) is provided with an inner connecting plate (22) distributed along the diameter direction of the liquid medicine tank (4), and inner columns (23) are provided at both ends of the upper surface of the inner connecting plate (22); the inner columns (23) are connected to the inner diversion cover (5).

4. The liquid medicine recovery device according to claim 3, characterized in that: The outer sliding portion (3) comprises an outer sliding block slidably arranged on the guide rail (8); an outer connecting plate (31) located on the upper surface of the inner connecting plate (22) is provided on the outer sliding block, and outer columns (32) are provided at both ends of the upper surface of the outer connecting plate (31), and the outer columns (32) are connected to the outer diversion cover (9).

5. The liquid medicine recovery device according to claim 1, characterized in that: The pushing component (12) includes a first push plate (120) and a second push plate (121); the first push plate (120) extends from one side of the inner driving part (2), and the extending end of the first push plate (120) is provided with an inclined second push plate (121), so that when the pushing component (12) rises, the second push plate (121) can push the limiting part (13).

6. The liquid medicine recovery device according to claim 1, characterized in that: The limiting portion (13) includes a limiting plate (14) and a telescopic assembly (15); the limiting plate (14) is provided on the outer sliding portion (3), and a limiting slot (140) is provided on the limiting plate (14); the telescopic assembly (15) is provided on the side of the mounting frame (7); the telescopic assembly (15) includes a first guide tube (150), a second guide tube (151), a limiting rod (152), a buckle (153) and a push rod (154); The first guide tube (150) and the second guide tube (151) are vertically mounted on the mounting frame (7) in sequence; the second guide tube (151) is provided with a first inner hole (150a) and a second inner hole (150b) coaxially arranged therein, and the diameter of the first inner hole (150a) is larger than the diameter of the second inner hole (150b); the inner wall of the second inner hole (150b) is provided with an inner sleeve (150c), and the end of the inner sleeve (150c) opposite to the first guide tube (150) has an inner tooth shape (150d), and the end of the inner sleeve (150c) opposite to the inner tooth shape (150d) has guide inner grooves (150e) equidistantly distributed along the inner wall of the inner sleeve (150c), and the guide inner grooves (150e) are arranged to penetrate toward the end of the inner tooth shape (150d); The limiting rod (152) is inserted from the first guide tube (150) and abuts against the end surface of the second inner hole (150b), and a spring (155) is sleeved on the side of the limiting rod (152) facing the second inner hole (150b); The buckle (153) is inserted from one end of the inner sleeve (150c) and connected to the limiting rod (152) by a buckle, so that the spring (155) on the limiting rod (152) is in a compressed state; a plurality of buckle guide strips (153a) are provided in the circumferential direction of the end of the buckle (153) opposite to the limiting rod (152), and the end surface of the buckle guide strip (153a) opposite to the limiting rod (152) has an oblique tooth shape (153b); wherein, the buckle guide strip (153a) is limited in the guide inner groove (150e); A push rod (154) sleeved on the buckle (153) is provided between the buckle (153) and the inner sleeve (150c); the push rod (154) sleeved on one side end face of the buckle (153) is provided with a push rod tooth shape (154a), and the push rod tooth shape (154a) is away from the buckle guide strip (153a); a plurality of push rod guide strips (154b) distributed along the circumference of the push rod (154) are provided at the rear end of the push rod tooth shape (154a); the push rod guide strip (154b) is limited in the guide inner groove (150e) and is arranged opposite to the buckle guide strip (153a).

7. The liquid medicine recovery device according to claim 6, characterized in that: The number of the buckle guide strips (153a) is four.

Images