Upper cover driving device of vacuum chamber and semiconductor equipment

Abstract

The invention discloses an upper cover driving device of a vacuum chamber and semiconductor equipment, and relates to the technical field of semiconductor equipment. The upper cover driving device of the vacuum chamber comprises a lifting mechanism and a rotating mechanism, the lifting mechanism comprises a lifting air cylinder and a supporting assembly, the supporting assembly comprises a supporting sleeve and a limiting supporting column, the supporting sleeve is arranged on an upper cover, the limiting supporting column is movably arranged in the supporting sleeve, and the limiting supporting column is connected with the driving end of the lifting air cylinder through a connecting piece. The rotating mechanism comprises a base, a rotating arm and a rotating shaft, the base is arranged in the circumferential direction of the vacuum cavity, the rotating shaft is rotationally arranged in the base, one end of the rotating arm is connected with the rotating shaft, and the other end is connected with the fixed end of the lifting cylinder. The locking mechanism fixes the upper cover after the opening is closed by the upper cover, and it is ensured that the upper cover cannot be accidentally opened or moved. According to the upper cover driving device of the vacuum chamber, the sealing performance of the vacuum chamber is ensured; moreover, the semiconductor device can be arranged in a limited space, and the compactness of the semiconductor device is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to an upper cover driving device of a vacuum chamber and a semiconductor equipment. Background Art

[0002] The vacuum chamber of the semiconductor equipment usually has an upper cover, and the upper cover driving device drives the upper cover to open or close the opening at the top of the vacuum chamber, so as to facilitate the installation and maintenance of the interior of the vacuum chamber. A sealing ring is also arranged between the upper cover and the opening of the vacuum chamber. When the opening is closed, the upper cover presses the sealing ring, so that the sealing ring can seal the gap between the upper cover and the vacuum chamber, thereby ensuring the sealing of the vacuum chamber.

[0003] Since semiconductor equipment requires regular maintenance and overhaul, frequent opening and closing of the upper cover will cause wear on the sealing ring, leading to sealing failure and affecting the stability of the process environment. At present, in order to reduce the impact of frequent opening and closing of the upper cover on the sealing ring, the upper cover is lifted by a cylinder and then flipped upward to open it. This opening operation has poor stability and requires a large operating radius for the upward flipping action, resulting in the semiconductor equipment occupying a large height space on the production line; and in the process of flipping to the side, gravity causes mechanical stress to be concentrated at a certain position of the upper cover, which will also increase the risk of deformation of the vacuum chamber and damage to the sealing interface, especially for the upper cover with a large mass. Summary of the invention

[0004] The object of the present invention is to provide a cover driving device for a vacuum chamber and a semiconductor device, which effectively reduces the concentrated mechanical stress on the vacuum chamber and the sealing interface and the high space occupied by the semiconductor device, and ensures the stability of the cover during the lifting process and the sealing of the vacuum chamber.

[0005] To achieve this object, the present invention adopts the following technical solutions: The upper cover driving device of the vacuum chamber comprises: A lifting mechanism, comprising a lifting cylinder and a support assembly, wherein the support assembly comprises a support sleeve and a limit support column, wherein the support sleeve is arranged on the upper cover, the limit support column is movably arranged in the support sleeve, and the limit support column is connected to the driving end of the lifting cylinder through a connecting piece; The rotating mechanism comprises a base, a rotating arm and a rotating shaft, wherein the base is arranged in the circumference of the vacuum chamber, the rotating shaft is rotatably arranged in the base, one end of the rotating arm is connected to the rotating shaft, and the other end is connected to the fixed end of the lifting cylinder; The locking mechanism is characterized in that one end of the rotating shaft away from the rotating arm is connected to a rotating disk, a locking hole is provided on the rotating disk, and the locking mechanism comprises a locking guide column, which can selectively cooperate with the locking hole to lock or unlock the rotating shaft.

[0006] As an optional scheme of the upper cover driving device of the vacuum chamber, the support sleeve includes a cache cavity and a through hole, the limit support column includes a limit column and a limit head, the limit head is arranged in the cache cavity and can abut against one end of the cache cavity close to the through hole; the limit column passes through the through hole and is connected to the connecting piece, and the height of the cache cavity is greater than the height of the limit head.

[0007] As an optional solution of the upper cover driving device of the vacuum chamber, the lifting mechanism also includes a guide assembly, the guide assembly includes a guide shaft and a guide sleeve, the guide shaft is arranged on the connecting member, the guide sleeve is arranged at the fixed end of the lifting cylinder, and the guide shaft is slidably arranged in the guide sleeve.

[0008] As an optional solution of the upper cover driving device of the vacuum chamber, a positioning mechanism is further provided in the circumference of the vacuum chamber, and the positioning mechanism includes a fixed positioning component and an adjustable positioning component, the fixed positioning component and the adjustable positioning component are arranged at intervals in the circumference of the vacuum chamber, and the fixed positioning component and the adjustable positioning component are both used to position the upper cover when closing the vacuum chamber; The fixed positioning assembly includes a fixed positioning column and a fixed linear bearing seat, one of the fixed positioning column and the fixed linear bearing seat is arranged in the circumference of the vacuum chamber, and the other is arranged on the upper cover, and the inner hole of the fixed linear bearing seat cooperates with the fixed positioning column; The adjustable positioning assembly includes an adjustable positioning column and an adjustable linear bearing seat. The adjustable linear bearing seat is rotatably connected to one of the circumference of the vacuum chamber and the upper cover. The adjustable positioning column is arranged at the other of the circumference of the vacuum chamber and the upper cover. The adjustable linear bearing seat can rotate so that the inner hole of the adjustable linear bearing seat can cooperate with the adjustable positioning column.

[0009] As an optional solution of the upper cover driving device of the vacuum chamber, the locking mechanism also includes a locking cylinder, and the driving end of the locking cylinder is connected to the locking guide column to drive the locking guide column to extend and retract.

[0010] As an optional solution of the upper cover driving device of the vacuum chamber, the locking mechanism further includes a limit assembly, the limit assembly includes a limit seat and a limit shaft, a limit hole is arranged in the limit seat, the limit shaft is slidably arranged in the limit hole, one end of the limit shaft is connected to the driving end of the locking cylinder, and the other end is connected to the locking guide column; The limiting seat is also provided with a limiting groove in communication with the limiting hole in the circumferential direction, the limiting groove extending in a direction parallel to the axis of the limiting shaft, the limiting shaft is provided with a limiting pin, the limiting pin cooperates with the limiting groove to limit the moving distance of the limiting shaft; The locking hole includes a first locking hole and a second locking hole, the first locking hole and the second locking hole are arranged at intervals along the circumference of the turntable, the first locking hole is used to lock the rotating shaft when the upper cover is located directly above the vacuum chamber; the second locking hole is used to lock the rotating shaft after the upper cover is rotated out.

[0011] As an optional solution of the upper cover driving device of the vacuum chamber, a limit block is further provided on the base, and a buffer block is provided on the turntable, and the buffer block abuts against the limit block to limit the rotation angle of the upper cover.

[0012] As an optional solution of the upper cover driving device of the vacuum chamber, a plurality of second locking holes are provided, and the included angles between different second locking holes and the first locking holes are different.

[0013] As an optional solution of the upper cover driving device of the vacuum chamber, the rotating shaft is rotatably connected to the base via a needle bearing, and the rotating arm and the turntable are rotatably connected to the base via a thrust ball bearing.

[0014] A semiconductor device comprises an upper cover, a vacuum chamber and an upper cover driving device of the vacuum chamber as described in any of the above schemes, wherein the upper cover driving device of the vacuum chamber is used to drive the upper cover to close or open the vacuum chamber.

[0015] Beneficial effects of the present invention: The upper cover driving device of the vacuum chamber provided by the present invention comprises a lifting mechanism, a rotating mechanism and a locking mechanism. The driving end of the lifting cylinder is connected to the upper cover, and is used to lift the upper cover to separate the upper cover from the opening of the vacuum chamber; the rotating mechanism is connected to the fixed end of the lifting cylinder through a rotating shaft, and the upper cover can be moved out from the top of the vacuum chamber by rotating the rotating shaft, so as to facilitate the installation and maintenance of the interior of the vacuum chamber. When the upper cover driving device opens the upper cover, the upper cover is first lifted and separated from the vacuum chamber, and then the upper cover is rotated and moved out in a plane, and the upper cover will not be subjected to stress concentration, reducing the risk of deformation of the vacuum chamber and damage to the sealing interface; at the same time, the space occupied in the height direction is small, which is more conducive to the compact design of semiconductor equipment. The support sleeve of the support assembly is arranged on the upper cover, and the limit support column is connected to the driving end of the lifting cylinder through a connecting piece, so that the lifting cylinder will not deviate and tilt when lifting the upper cover, ensuring the stability of the upper cover lifting. The locking mechanism is used to fix the position of the upper cover after the upper cover closes the opening, ensuring that the upper cover will not be accidentally opened or moved; at the same time, the limiting support column is movably arranged in the supporting sleeve, providing a certain buffer distance when the upper cover is lowered, so as to ensure the sealing of the upper cover and the opening of the vacuum chamber.

[0016] The semiconductor device provided by the present invention uses the upper cover driving device of the vacuum chamber to drive the upper cover to open or close the vacuum chamber, which effectively reduces the concentrated mechanical stress on the vacuum chamber and the sealing interface and the high space occupied by the semiconductor device; not only ensures the sealing of the vacuum chamber; but also is suitable for arranging semiconductor devices in a limited space, thereby improving the compactness of the semiconductor device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the state of the upper cover driving device of the vacuum chamber provided by the embodiment of the present invention after lifting the upper cover; Figure 2 is a longitudinal sectional view of a lifting cylinder and a guide assembly of a lifting mechanism provided by an embodiment of the present invention; Figure 3 is a longitudinal sectional view of a support assembly provided by an embodiment of the present invention; Figure 4 is a longitudinal sectional view of a rotating mechanism and a locking mechanism of an upper cover driving device of a vacuum chamber provided by an embodiment of the present invention; Figure 5 is a longitudinal sectional view of a locking mechanism provided by an embodiment of the present invention; Figure 6 It is a top view of the locking mechanism provided by an embodiment of the present invention.

[0018] In the figure: 100, upper cover; 200, vacuum chamber; 201, opening; 1. Lifting mechanism; 11. Lifting cylinder; 12. Support assembly; 121. Support sleeve; 1211. Buffer chamber; 1212. Perforation; 122. Limiting support column; 1221. Limiting column; 1222. Limiting head; 1223. Connecting block; 123. Buffering gasket; 13. Connecting piece; 14. Guide assembly; 141. Guide shaft; 142. Guide sleeve; 143. Sleeve bearing; 2. Rotating mechanism; 21. Base; 211. Limit block; 22. Rotating arm; 23. Rotating shaft; 231. Key; 24. Needle roller bearing; 25. Thrust ball bearing; 3. Positioning mechanism; 31. Fixed positioning assembly; 311. Fixed positioning column; 312. Fixed linear bearing seat; 32. Adjustable positioning assembly; 321. Adjustable positioning column; 322. Adjustable linear bearing seat; 4. Locking mechanism; 41. Turntable; 411. Locking hole; 4111. First locking hole; 4112. Second locking hole; 412. Buffer block; 42. Locking guide column; 43. Locking cylinder; 44. Limiting assembly; 441. Limiting seat; 4411. Limiting hole; 4412. Limiting groove; 442. Limiting shaft; 443. Limiting pin; 444. Fixed shaft; 45. Locking nut; 46. Locking washer; 5. Rotate the handle. DETAILED DESCRIPTION

[0019] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0020] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0021] Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0022] Unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include the first feature being in direct contact with the second feature, or may include the first feature being in contact with the second feature through another feature between them instead of being in direct contact. Moreover, a first feature being "above", "above" and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0023] The technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0024] like Figure 1-Figure 3As shown, this embodiment provides an upper cover driving device for a vacuum chamber, including a lifting mechanism 1 and a rotating mechanism 2. The lifting mechanism 1 is connected to the upper cover 100, and is used to drive the upper cover 100 to rise, so that the upper cover 100 is completely separated from the vacuum chamber 200, and the upper cover 100 is located directly above the opening 201. When installing and maintaining the interior of the vacuum chamber 200, it is inconvenient to operate the upper cover 100 directly above the opening 201; the rotating mechanism 2 is connected to the lifting mechanism 1, and is used to drive the lifting mechanism 1 to drive the upper cover 100 to rotate to one side in the plane where the upper cover 100 is located, so as to move the upper cover 100 out from above the opening 201. In order to ensure the sealing of the vacuum chamber 200, a sealing ring is provided at the opening 201 of the vacuum chamber 200 to ensure the sealing between the upper cover 100 and the opening 201. In this way of opening the upper cover 100, it is only necessary to lift the upper cover 100 until it is disengaged from the sealing ring at the opening 201, and then the upper cover 100 is rotated to one side through the rotating mechanism 2. During operation, it does not need to occupy a large height space, which is convenient for arranging semiconductor equipment in a more compact space, improves the compactness of semiconductor equipment, and provides operators with a larger operating space and safety guarantee. Moreover, when opening the upper cover 100, the opening 201 and the sealing ring of the vacuum chamber 200 will not be subjected to the force of a certain position of the upper cover 100, thereby avoiding deformation of the vacuum chamber 200 and damage to the sealing ring caused by mechanical stress concentration, thereby ensuring the stability of the upper cover 100 during the lifting process and the sealing of the vacuum chamber 200.

[0025] The lifting mechanism 1 includes a lifting cylinder 11 and a support assembly 12. The support assembly 12 includes a support sleeve 121 and a limit support column 122. The support sleeve 121 is arranged on the upper cover 100. The limit support column 122 is movably arranged in the support sleeve 121. The limit support column 122 is connected to the driving end of the lifting cylinder 11 through a connecting piece 13. The lifting cylinder 11 includes a first cylinder body and a first gas rod. The first gas rod is slidably arranged in the first cylinder body. The gas in the first cylinder body drives the first gas rod to extend and retract. The extension and retraction of the first gas rod drives the support assembly 12 to rise and fall through the connecting piece 13. The extension and retraction of the first gas rod is controlled by a pneumatic control system to ensure the smooth lifting of the upper cover 100. At the same time, the lifting cylinder 11 uses an anti-fall cylinder to ensure the stability and safety of the driving of the upper cover 100.

[0026] Specifically, the connecting member 13 is a connecting plate, and two groups of support assemblies 12 are provided. The two groups of support assemblies 12 are spaced apart on the side of the connecting plate away from the lifting cylinder 11, and are respectively located at the two ends of the connecting plate; the first gas rod is connected to the center position of the side of the connecting plate close to the lifting cylinder 11 to ensure that when the lifting cylinder 11 drives the upper cover 100 to descend and seal the opening 201 of the vacuum chamber 200, the force applied by the upper cover 100 on the sealing ring is uniform, thereby ensuring the sealing between the upper cover 100 and the opening 201.

[0027] The support sleeve 121 includes a buffer cavity 1211 and a through hole 1212. The limiting support column 122 includes a limiting column 1221 and a limiting head 1222. The limiting head 1222 is disposed in the buffer cavity 1211 and can abut against one end of the buffer cavity 1211 close to the through hole 1212. The limiting column 1221 passes through the through hole 1212 and is connected to the connecting member 13. The height of the buffer cavity 1211 is greater than the height of the limiting head 1222. Such an arrangement leaves a certain buffer distance for the descent of the upper cover 100 when driving the upper cover 100 to seal the opening 201. When the upper cover 100 abuts against the sealing ring, the limit head 1222 abuts against one end of the cache cavity 1211 close to the perforation 1212. At this time, in order to ensure the sealing between the upper cover 100 and the opening 201, the first gas rod can continue to extend, driving the limit head 1222 to continue to move downward and abut against the bottom of the cache cavity 1211 to apply pressure to the sealing ring to ensure the sealing of the vacuum chamber 200.

[0028] In this embodiment, a connection block 1223 is provided at one end of the limit column 1221 away from the limit head 1222, and the connection block 1223 is fixedly connected to the connection plate by a fastening screw. In order to reduce the difficulty of processing, the end of the buffer cavity 1211 away from the through hole 1212 is through-set, so that the limit head 1222 can directly abut against the upper cover 100 and exert a downward force on the upper cover 100.

[0029] Furthermore, a buffer pad 123 is provided at one end of the limit head 1222 close to the perforation 1212. When the limit head 1222 abuts against one end of the buffer cavity 1211 close to the perforation 1212, the buffer pad 123 is located between the limit head 1222 and the connection between the buffer cavity 1211 and the perforation 1212, so as to prevent the limit head 1222 and the buffer cavity 1211 from being damaged by collision, thereby extending the service life of the support sleeve 121.

[0030] Since the lifting cylinder 11 requires a period of buffering during its ascent and descent process, there will be a portion of margin in the buffer chamber 1211 to adjust the position deviation of the lifting cylinder 11. The buffer gasket 123 in the buffer chamber 1211 can also be easily replaced after wear, thereby avoiding direct hard contact between the upper cover 100 connected to the lifting cylinder 11 and the vacuum chamber 200.

[0031] In order to ensure that when the lifting cylinder 11 drives the upper cover 100 to rise and fall, the movement trajectory of the upper cover 100 is a straight line, the lifting mechanism 1 also includes a guide assembly 14, the guide assembly 14 includes a guide shaft 141 and a guide sleeve 142, the guide shaft 141 is arranged on the connecting member 13, the guide sleeve 142 is arranged at the fixed end of the lifting cylinder 11, and the guide shaft 141 is slidably arranged in the guide sleeve 142.

[0032] Specifically, two guide shafts 141 and two guide sleeves 142 are provided. The two guide shafts 141 are provided on the connecting member 13 and are located on both sides of the driving end of the lifting cylinder 11. The two guide sleeves 142 are provided at the fixed end of the lifting cylinder 11, and the two guide sleeves 142 are respectively located on both sides of the driving end of the lifting cylinder 11. The two guide shafts 141 and the two guide sleeves 142 are connected one by one. The two guide shafts 141 are respectively located on both sides of the first gas rod, and play a guiding role in the process of the lifting cylinder 11 driving the upper cover 100 to rise and fall, ensuring that the movement trajectory of the upper cover 100 remains straight.

[0033] Furthermore, a sleeve bearing 143 is provided between the guide sleeve 142 and the guide shaft 141. The sleeve bearing 143 is also called a bushing, which can reduce friction, vibration and noise between the guide sleeve 142 and the guide shaft 141 and has lower cost.

[0034] The lifting mechanism 1 can ensure the stability of the movement of the upper cover 100 during the process of driving the upper cover 100 to rise and fall, avoiding tilting or friction damage caused by gravity or uneven force of the upper cover 100, while reducing the occupation of height space and improving the flexibility of arranging semiconductor equipment in a small space.

[0035] The rotating mechanism 2 includes a base 21, a rotating arm 22 and a rotating shaft 23. The base 21 is arranged in the circumference of the vacuum chamber 200. The rotating shaft 23 is rotatably arranged in the base 21. One end of the rotating arm 22 is connected to the rotating shaft 23, and the other end is connected to the fixed end of the lifting cylinder 11.

[0036] A square block is provided at one end of the rotating arm 22 connected to the lifting cylinder 11, the first cylinder body is fixed on the square block, a evacuation hole for the first gas rod to pass through is provided in the middle of the square block, a guide sleeve 142 is provided on the square block, and two guide sleeves 142 are respectively located on both sides of the first cylinder body. The end and side wall of the rotating shaft 23 are fixedly connected to the rotating arm 22 by set screws to ensure that the rotating shaft 23 rotates synchronously with the rotating arm 22 when the rotating shaft 23 rotates. The rotating shaft 23 is rotatably connected to the base 21 through a bearing to ensure the smoothness and reliability of the rotation of the rotating shaft 23.

[0037] In order to facilitate the rotation operation of the upper cover 100, two rotating handles 5 are installed on the upper cover 100. After the lifting mechanism 1 lifts the upper cover 100 into place, the operator holds the two rotating handles 5 to rotate the upper cover 100, so that the upper cover 100 rotates relative to the base 21. The design of the rotating handle 5 is ergonomic, simple in structure, provides a good operating feel and control, is more convenient for the rotation operation of the upper cover 100, and has better flexibility.

[0038] After the installation and maintenance inside the vacuum chamber 200 is completed, the upper cover 100 is rotated to just above the opening 201 by holding the rotating handle 5 , and then the first gas rod is controlled to extend to drive the upper cover 100 to descend and seal the opening 201 .

[0039] In order to ensure the accuracy of the docking between the upper cover 100 and the opening 201, a positioning mechanism 3 is also provided in the circumference of the vacuum chamber 200. The positioning mechanism 3 includes a fixed positioning component 31 and an adjustable positioning component 32. The fixed positioning component 31 and the adjustable positioning component 32 are arranged at intervals in the circumference of the vacuum chamber 200. The fixed positioning component 31 and the adjustable positioning component 32 are both used to position the upper cover 100 when closing the vacuum chamber 200. The fixed positioning component 31 is used to ensure the fixed positioning of the upper cover 100, and the setting of the adjustable positioning component 32 can achieve fine adjustment of the final position of the upper cover 100, ensuring the accuracy and sealing of the docking between the upper cover 100 and the opening 201.

[0040] Specifically, the fixed positioning assembly 31 includes a fixed positioning column 311 and a fixed linear bearing seat 312. One of the fixed positioning column 311 and the fixed linear bearing seat 312 is arranged in the circumference of the vacuum chamber 200, and the other is arranged in the upper cover 100. The inner hole of the fixed linear bearing seat 312 cooperates with the fixed positioning column 311. The adjustable positioning assembly 32 includes an adjustable positioning column 321 and an adjustable linear bearing seat 322. The adjustable linear bearing seat 322 is rotatably connected to one of the circumference of the vacuum chamber 200 and the upper cover 100. The adjustable positioning column 321 is arranged in the other of the circumference of the vacuum chamber 200 and the upper cover 100. The adjustable linear bearing seat 322 rotates to enable the adjustable linear bearing seat 322 to cooperate with the adjustable positioning column 321.

[0041] In this embodiment, the fixed positioning column 311 is arranged on the circumference of the vacuum chamber 200, the fixed linear bearing seat 312 is arranged on the upper cover 100, the adjustable positioning column 321 is arranged on the circumference of the vacuum chamber 200, and the inner hole of the adjustable linear bearing seat 322 is rotatably connected to the upper cover 100. One end of the adjustable linear bearing seat 322 is rotatably connected to one of the rotating handles 5, that is, one of the rotating handles 5 serves as the rotating axis of the adjustable linear bearing seat 322 on the upper cover 100, which does not affect the operator's rotation of the upper cover 100 by rotating the handle 5, and can also realize the rotation of the adjustable linear bearing seat 322 relative to the upper cover 100, so that one object can be used for two purposes, thereby reducing costs.

[0042] Hold the rotating handle 5 and rotate the upper cover 100 to the top of the opening 201. First, align the inner hole of the fixed linear bearing seat 312 with the fixed positioning column 311, and align the inner hole of the adjustable linear bearing seat 322 with the adjustable positioning column 321. Then, the first gas rod drives the upper cover 100 to descend, so that the fixed positioning column 311 is inserted into the inner hole of the fixed linear bearing seat 312, and the adjustable positioning column 321 is inserted into the inner hole of the adjustable linear bearing seat 322; finally, when adjusting the final position of the upper cover 100, the fixed linear bearing seat 312 does not move, and the adjustable linear bearing seat 322 rotates relative to the upper cover 100 as the position of the upper cover 100 is adjusted, so that the adjustable positioning column 321 can always cooperate with the inner hole of the adjustable linear bearing seat 322, ensuring that the docking of the upper cover 100 and the vacuum chamber 200 is more precise, thereby ensuring the sealing of the vacuum chamber 200.

[0043] The linear bearing seat and the positioning column are coordinated for positioning, and the positioning column can rotate in the inner hole of the linear bearing seat, so that the positioning accuracy is higher.

[0044] like Figure 4-Figure 6 As shown, the upper cover driving device of the vacuum chamber also includes a locking mechanism 4, which is used to fix the position of the upper cover 100 after the upper cover 100 closes the opening 201, so as to ensure that the upper cover 100 will not be accidentally opened or moved during the operation of the semiconductor device. The end of the rotating shaft 23 away from the rotating arm 22 is connected to the turntable 41. The rotating shaft 23 drives the turntable 41 to rotate while the rotating shaft 23 rotates. In order to ensure the consistency of the rotation of the rotating shaft 23 and the turntable 41, a key 231 is provided at one end of the rotating shaft 23 connected to the turntable 41, and a key slot is provided on the turntable 41. The key 231 cooperates with the key slot to ensure the stability of the connection between the rotating shaft 23 and the turntable 41, thereby ensuring the consistency of the rotation of the turntable 41 and the rotating shaft 23. After the rotating shaft 23 passes through the turntable 41, the other end is connected to the turntable 41 through a locking nut 45, and a locking gasket 46 is provided between the locking nut 45 and the turntable 41.

[0045] Specifically, the rotating shaft 23 is rotatably connected to the base 21 through a needle bearing 24, and the rotating arm 22 and the rotating disk 41 are rotatably connected to the base 21 through a thrust ball bearing 25. Needle bearings 24 are provided at both ends of the base 21, and the needle bearings 24 mainly bear the radial load of the rotating shaft 23 on the base 21. The end of the rotating arm 22 close to the base 21 is rotatably connected to the base 21 through a thrust ball bearing 25, and the end of the rotating disk 41 close to the base 21 is rotatably connected to the base 21 through a thrust ball bearing 25. The thrust ball bearing 25 mainly bears the axial load of the rotating disk 41 and the rotating arm 22 on the base 21. The reliability of the rotation of the rotating shaft 23 is ensured by the combination of the needle bearing 24 and the thrust ball bearing 25.

[0046] The rotating disk 41 is provided with a locking hole 411, and the locking mechanism 4 includes a locking guide column 42, which can selectively cooperate with the locking hole 411 to lock or unlock the rotating shaft 23. One end of the rotating shaft 23 is connected to the rotating arm 22, and the other end is connected to the rotating disk 41, so that the rotating disk 41 is fixed, and when the upper cover 100 is moved by rotating the handle 5, the upper cover 100 cannot move. The rotating disk 41 is locked by the locking guide column 42 cooperating with the locking hole 411, which ensures that the rotating disk 41 is fixed and immovable, and facilitates the locking guide column 42 to disengage from the locking hole 411 and release the lock.

[0047] Specifically, the locking mechanism 4 also includes a locking cylinder 43, the driving end of which is connected to the locking guide column 42, and is used to drive the locking guide column 42 to extend and retract. The locking cylinder 43 includes a second cylinder body and a second gas rod, which is connected to the locking guide column 42. When the second gas rod is extended, the locking guide column 42 can be moved to lock with the locking hole 411; when the second gas rod is retracted, the locking guide column 42 can be moved to disengage from the locking hole 411 to release the lock.

[0048] The driving direction of the locking cylinder 43 is set perpendicular to the axis of the rotating shaft 23 to ensure that the locking guide column 42 can only move in the direction close to or away from the turntable 41, that is, when the locking guide column 42 cooperates with the locking hole 411, it only applies a force perpendicular to the axis of the rotating shaft 23 to the turntable 41, avoiding the locking guide column 42 from applying a force parallel to the axis of the rotating shaft 23 to the turntable 41, which affects the sealing of the upper cover 100 and the vacuum chamber 200.

[0049] Furthermore, the locking mechanism 4 further includes a limiting assembly 44, which includes a limiting seat 441 and a limiting shaft 442. A limiting hole 4411 is provided in the limiting seat 441, and the limiting shaft 442 is slidably arranged in the limiting hole 4411. One end of the limiting shaft 442 is connected to the driving end of the locking cylinder 43, and the other end is connected to the locking guide column 42. The axis of the limiting hole 4411 is perpendicular to the axis of the rotating shaft 23, so that the second gas rod drives the locking guide column 42 to move only in a direction perpendicular to the axis of the rotating shaft 23.

[0050] The upper surface of the limit seat 441 and the lower surface of the base 21 are fixedly connected by screws to ensure that the locking hole 411 and the locking guide column 42 are always located in the same plane. The extension of the second gas rod can drive the locking guide column 42 to accurately dock with the locking hole 411.

[0051] A threaded hole is provided at one end of the limiting shaft 442 close to the second gas rod, and an external thread is provided at the end of the second gas rod, which is screwed to the threaded hole through the external thread and fixed by a nut. A mounting groove and a fixing hole are provided at one end of the limiting shaft 442 away from the second gas rod, and the fixing hole is perpendicular to the axis of the limiting shaft 442 and penetrates the two side walls of the mounting groove. The locking guide column 42 is provided in the mounting groove, and is partially located outside the mounting groove to cooperate with the semicircular locking hole 411. A connecting hole is provided at the center of the locking guide column 42, and the two ends of the fixing shaft 444 are fixedly connected to the fixing holes after passing through the connecting hole, so as to fix the locking guide column 42 to the end of the limiting shaft 442.

[0052] Of course, in other embodiments, a substrate may be arranged between the base 21 and the limit seat 441, the base 21 is arranged above the substrate, the base 21 and the turntable 41 are arranged below the substrate, the base 21 is fixed to the upper surface of the substrate, and the limit seat 441 is fixed to the lower surface of the substrate.

[0053] Furthermore, the limiting seat 441 is also provided with a limiting groove 4412 in the circumference thereof, which is connected to the limiting hole 4411. The limiting groove 4412 extends in a direction parallel to the axis of the limiting shaft 442. The limiting shaft 442 is provided with a limiting pin 443, which cooperates with the limiting groove 4412 to limit the moving distance of the limiting shaft 442. The limiting pin 443 cooperates with the limiting groove 4412 to limit the moving distance of the limiting shaft 442 in the limiting hole 4411, thereby limiting the rotation of the limiting shaft 442 in the limiting hole 4411 and limiting the moving distance of the locking guide column 42, so as to ensure that the locking guide column 42 can accurately cooperate with the locking hole 411; at the same time, the failure of the locking mechanism 4 due to external force or improper installation operation is avoided.

[0054] The locking mechanism 4 provided in this embodiment ensures the stability and safety of the upper cover 100 in the working position through the dual protection of mechanical limiting and locking cylinder 43, and prevents the upper cover 100 from shifting or sealing failure due to external force or vibration of semiconductor equipment.

[0055] Specifically, the locking hole 411 includes a first locking hole 4111 and a second locking hole 4112. The first locking hole 4111 and the second locking hole 4112 are arranged at intervals along the circumference of the turntable 41. The first locking hole 4111 is used to lock the rotating shaft 23 when the upper cover 100 is located directly above the vacuum chamber 200; the second locking hole 4112 is used to lock the rotating shaft 23 after the upper cover 100 is rotated and moved out. When the upper cover 100 closes the opening 201 of the vacuum chamber 200 and is located in the working position, and when the upper cover 100 is rotated to the maintenance position relative to the rotating mechanism 2, it is necessary to ensure that the position of the upper cover 100 is fixed to ensure the sealing of the vacuum chamber 200 and the safety of the operator during maintenance. Therefore, the upper cover 100 has two locking positions, and two locking holes 411 are correspondingly arranged to achieve the fixation of the upper cover 100 at different locking positions.

[0056] In order to ensure the accuracy of the rotation position of the upper cover 100 when it rotates relative to the rotating mechanism 2, a limit block 211 is further provided on the base 21, and a buffer block 412 is provided on the turntable 41. The buffer block 412 abuts against the limit block 211 to limit the rotation angle of the upper cover 100. The buffer block 412 is used to provide anti-collision protection when the upper cover 100 is rotated into place, and prevent mechanical collision caused by excessive rotation or misoperation of the upper cover 100.

[0057] The buffer block 412 is made of polyurethane, which has excellent tensile strength, tear strength, impact resistance and wear resistance. It can not only reduce the noise and wear caused by the impact with the limit block 211, but also extend the service life; it also does not fall off and is suitable for the working environment of the vacuum chamber 200.

[0058] When the upper cover 100 is in the working position, the locking guide column 42 cooperates with the first locking hole 4111 to lock; when the upper cover 100 needs to be rotated from the working position to the maintenance position, the locking cylinder 43 is first controlled to drive the limiting shaft 442 to move in the limiting hole 4411 in the direction away from the turntable 41, so that the locking guide column 42 is disengaged from the first locking hole 4111 and the lock is released; then the upper cover 100 is rotated by holding the rotating handle 5, and when the buffer block 412 abuts against the limiting block 211 and the upper cover 100 cannot continue to rotate, it means that the upper cover 100 has rotated into place, and at this time, the locking cylinder 43 is controlled to drive the limiting shaft 442 to move in the limiting hole 4411 in the direction close to the turntable 41 to drive The locking guide column 42 cooperates with the second locking hole 4112 for locking; similarly, when the upper cover 100 needs to be rotated from the maintenance position to the working position, first control the locking cylinder 43 to drive the limiting shaft 442 to move in the limiting hole 4411 in the direction away from the turntable 41, so that the locking guide column 42 is disengaged from the second locking hole 4112 and unlocked and locked; then hold the rotating handle 5 to rotate the upper cover 100, when the buffer block 412 abuts against the limiting block 211, it means that the upper cover 100 is rotated into place, and at this time, control the locking cylinder 43 to drive the limiting shaft 442 to move in the limiting hole 4411 in the direction close to the turntable 41, so as to drive the locking guide column 42 to cooperate with the first locking hole 4111 for locking.

[0059] There is one buffer block 412 on the turntable 41, and the number of limit blocks 211 can be set according to the rotation angle of the upper cover 100. When the rotation angle of the upper cover 100 from the working position to the maintenance position is 180°, only one limit block 211 is required. When the upper cover 100 is rotated from the working position to the maintenance position, the buffer block 412 abuts against one end of the limit block 211; when the upper cover 100 is rotated from the maintenance position to the working position, the buffer block 412 abuts against the other end of the limit block 211. When the rotation angle of the upper cover 100 from the working position to the maintenance position is less than 180°, two limit blocks 211 need to be provided, one of which is used to abut against the buffer block 412 when the upper cover 100 is rotated from the maintenance position to the working position; and the other limit block 211 is used to abut against the buffer block 412 when the upper cover 100 is rotated from the working position to the maintenance position.

[0060] Since different parts of the vacuum chamber 200 require different rotation angles of the upper cover 100 when they are maintained, in order to meet the maintenance requirements of different parts of different vacuum chambers 200, multiple second locking holes 4112 are provided, and the angles between different second locking holes 4112 and the first locking holes 4111 are different, that is, the upper cover 100 can be opened at different angles, and at different angles, the locking guide column 42 cooperates with different second locking holes 4112 to lock the position of the upper cover 100. Exemplarily, when replacing the sealing ring between the vacuum chamber 200 and the upper cover 100, the upper cover 100 only needs to be lifted without being rotated, and at this time, the locking cylinder 43 is not required to drive the locking guide column 42 to move.

[0061] The present embodiment also provides a semiconductor device, comprising an upper cover 100, a vacuum chamber 200 and the upper cover driving device of the vacuum chamber, wherein the upper cover driving device of the vacuum chamber is used to drive the upper cover 100 to close or open the vacuum chamber 200, thereby effectively reducing the concentrated mechanical stress on the vacuum chamber 200 and the sealing interface and the high space occupied by the semiconductor device; not only the sealing of the vacuum chamber 200 is ensured; but also it is suitable for arranging semiconductor devices in a limited space, thereby improving the compactness of the semiconductor device.

[0062] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there will be changes in the specific implementation methods and application scopes. The content of this specification should not be understood as limiting the present invention.

Claims

1. A cover driving device for a vacuum chamber, characterized in that: include: A lifting mechanism (1) comprises a lifting cylinder (11) and a support assembly (12), wherein the support assembly (12) comprises a support sleeve (121) and a position-limiting support column (122), wherein the support sleeve (121) is arranged on an upper cover (100), and the position-limiting support column (122) is movably arranged in the support sleeve (121), and the position-limiting support column (122) is connected to a driving end of the lifting cylinder (11) via a connecting piece (13); The rotating mechanism (2) comprises a base (21), a rotating arm (22) and a rotating shaft (23), wherein the base (21) is arranged in the circumference of the vacuum chamber (200), the rotating shaft (23) is rotatably arranged in the base (21), one end of the rotating arm (22) is connected to the rotating shaft (23), and the other end is connected to the fixed end of the lifting cylinder (11); The locking mechanism (4) comprises a rotating disk (41) connected to one end of the rotating shaft (23) away from the rotating arm (22), and a locking hole (411) is provided on the rotating disk (41). The locking mechanism (4) comprises a locking guide column (42), and the locking guide column (42) can selectively cooperate with the locking hole (411) to lock or unlock the rotating shaft (23).

2. The upper cover driving device of the vacuum chamber according to claim 1, characterized in that: The support sleeve (121) comprises a cache cavity (1211) and a through hole (1212); the limiting support column (122) comprises a limiting column (1221) and a limiting head (1222); the limiting head (1222) is arranged in the cache cavity (1211) and can abut against one end of the cache cavity (1211) close to the through hole (1212); the limiting column (1221) passes through the through hole (1212) and is connected to the connecting member (13); the height of the cache cavity (1211) is greater than the height of the limiting head (1222).

3. The upper cover driving device of the vacuum chamber according to claim 1, characterized in that: The lifting mechanism (1) also includes a guide assembly (14), the guide assembly (14) includes a guide shaft (141) and a guide sleeve (142), the guide shaft (141) is arranged on the connecting member (13), the guide sleeve (142) is arranged at the fixed end of the lifting cylinder (11), and the guide shaft (141) is slidably arranged in the guide sleeve (142).

4. The upper cover driving device of the vacuum chamber according to claim 1, characterized in that: A positioning mechanism (3) is also provided in the circumference of the vacuum chamber (200), and the positioning mechanism (3) comprises a fixed positioning component (31) and an adjustable positioning component (32), the fixed positioning component (31) and the adjustable positioning component (32) are arranged at intervals in the circumference of the vacuum chamber (200), and the fixed positioning component (31) and the adjustable positioning component (32) are both used to position the upper cover (100) when closing the vacuum chamber (200); The fixed positioning assembly (31) comprises a fixed positioning column (311) and a fixed linear bearing seat (312), one of the fixed positioning column (311) and the fixed linear bearing seat (312) being arranged in the circumference of the vacuum chamber (200), and the other being arranged on the upper cover (100), and the inner hole of the fixed linear bearing seat (312) being matched with the fixed positioning column (311); The adjustable positioning assembly (32) comprises an adjustable positioning column (321) and an adjustable linear bearing seat (322); the adjustable linear bearing seat (322) is rotatably connected to one of the circumference of the vacuum chamber (200) and the upper cover (100); the adjustable positioning column (321) is arranged on the other of the circumference of the vacuum chamber (200) and the upper cover (100); the adjustable linear bearing seat (322) rotates so that the inner hole of the adjustable linear bearing seat (322) can cooperate with the adjustable positioning column (321).

5. The upper cover driving device of the vacuum chamber according to claim 1, characterized in that: The locking mechanism (4) further comprises a locking cylinder (43), the driving end of which is connected to the locking guide column (42) and is used to drive the locking guide column (42) to extend and retract.

6. The upper cover driving device of the vacuum chamber according to claim 5, characterized in that: The locking mechanism (4) further comprises a limiting assembly (44), the limiting assembly (44) comprising a limiting seat (441) and a limiting shaft (442), a limiting hole (4411) being arranged in the limiting seat (441), the limiting shaft (442) being slidably arranged in the limiting hole (4411), one end of the limiting shaft (442) being connected to the driving end of the locking cylinder (43), and the other end being connected to the locking guide column (42); The limiting seat (441) is also provided with a limiting groove (4412) in communication with the limiting hole (4411) in the circumferential direction, the limiting groove (4412) extending in a direction parallel to the axis of the limiting shaft (442), the limiting shaft (442) is provided with a limiting pin (443), the limiting pin (443) cooperates with the limiting groove (4412) to limit the moving distance of the limiting shaft (442); The locking hole (411) comprises a first locking hole (4111) and a second locking hole (4112), wherein the first locking hole (4111) and the second locking hole (4112) are arranged at intervals along the circumference of the turntable (41), wherein the first locking hole (4111) is used to lock the rotating shaft (23) when the upper cover (100) is located directly above the vacuum chamber (200); and the second locking hole (4112) is used to lock the rotating shaft (23) after the upper cover (100) is rotated and removed.

7. The upper cover driving device of the vacuum chamber according to claim 6, characterized in that: A limit block (211) is also provided on the base (21), and a buffer block (412) is provided on the rotating disk (41); the buffer block (412) abuts against the limit block (211) to limit the rotation angle of the upper cover (100).

8. The upper cover driving device of the vacuum chamber according to claim 6, characterized in that: A plurality of the second locking holes (4112) are provided, and the included angles between different second locking holes (4112) and the first locking holes (4111) are different.

9. The upper cover driving device of the vacuum chamber according to claim 5, characterized in that: The rotating shaft (23) is rotatably connected to the base (21) via a needle bearing (24), and the rotating arm (22) and the rotating disk (41) are rotatably connected to the base (21) via a thrust ball bearing (25).

10. A semiconductor device, characterized in that It comprises an upper cover (100), a vacuum chamber (200) and an upper cover driving device of the vacuum chamber as described in any one of claims 1 to 9, wherein the upper cover driving device of the vacuum chamber is used to drive the upper cover (100) to close or open the vacuum chamber (200).

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