Sealing mechanism for load port door

Abstract

The present disclosure describes devices and systems for seals, and methods for using the seals. The seal includes a base portion configured to be coupled to a groove formed by an edge surface of the first component. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create a hermetic seal between the sealing surfaces of the first component and the second component in response to a threshold sealing force applied against the sealing portion. The seal further includes a retention portion substantially perpendicular to the base portion. A surface of the retaining portion is configured to press against an edge surface of the first component in response to a threshold sealing force applied against the sealing portion.

Description

Technical Field

[0001] Embodiments of this disclosure generally relate to sealing mechanisms for loading port doors. Background Technology

[0002] Electronic device manufacturing systems may include one or more tools or components for transporting and manufacturing substrates. Such tools or components may include a factory interface (e.g., an Equipment Front-End Module (EFEM)) connected to a loading lock and / or transfer chamber. In some cases, the front face of the factory interface may include one or more loading ports. Loading ports are stations for inputting and outputting substrate carriers. Loading ports may include frames adapted to connect the loading ports to the factory interface. The frame may include transfer openings through which one or more substrates can be transported between the substrate carrier and the factory interface.

[0003] Current loading ports typically do not include a seal between the loading port frame and the loading port door. However, such a configuration can be inefficient because current systems do not maintain a controlled atmosphere between the frame and the door. Summary of the Invention

[0004] Some embodiments described herein encompass a seal including a base portion configured to couple to a groove formed by an edge surface of a first component. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between sealing surfaces of a first and a second component in response to a threshold sealing force applied against the sealing portion. The seal further includes a retaining portion substantially perpendicular to the base portion. The surface of the retaining portion is configured to press against an edge surface of the first component in response to the threshold sealing force applied against the sealing portion.

[0005] Some of the described embodiments cover a loading port door. The loading port door includes an inner surface and an outer surface. The loading port door further includes an edge surface, the edge surface including a groove formed therein. The loading port further includes a seal coupled to the groove. The seal includes a base portion and a sealing portion, the base portion being configured to be coupled to the groove, and the sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between sealing surfaces of the loading port door and the frame of the loading port in response to a threshold sealing force applied against the sealing portion. The seal further includes a retaining portion generally perpendicular to the base portion. The surface of the retaining portion is configured to press against the edge surface in response to a threshold force applied against the sealing portion.

[0006] Some of the described embodiments cover a loading port for receiving a substrate carrier. The loading port includes a frame adapted for connecting the loading port to a factory interface. The frame includes a transfer opening through which one or more substrates can be transferred between the substrate carrier and the factory interface. The loading port further includes a loading port door configured to substantially fill the transfer opening. The loading port door includes an edge surface forming a recess. The loading port further includes a seal coupled to the recess formed in the edge surface of the loading port door. The seal includes a base portion and a sealing portion extending from the base portion. The seal is coupled to the recess of the loading port door via the base portion. The sealing portion is configured to create an airtight seal between the loading port door and a sealing surface of the frame in response to a threshold sealing force applied against the sealing portion. The seal further includes a retaining portion substantially perpendicular to the base portion. The surface of the retaining portion is configured to press against the edge surface of the loading port door in response to a threshold sealing force applied against the sealing portion. Attached Figure Description

[0007] The present disclosure is illustrated in the accompanying drawings by way of example and not limitation, in which the same reference numerals indicate similar elements. It should be noted that different references to "a" or "an" embodiment in this disclosure do not necessarily refer to the same embodiment, and such references imply at least one embodiment.

[0008] Figure 1A This is a top view schematic diagram of an example electronic device manufacturing system according to aspects of this disclosure.

[0009] Figure 1B This is a side view of an example electronic device manufacturing system according to aspects of this disclosure.

[0010] Figure 1C This is a front view schematic diagram of an example electronic device manufacturing system according to aspects of this disclosure.

[0011] Figure 2A This is a front view schematic diagram of an example of a loading port frame and sealing assembly based on aspects of this disclosure.

[0012] Figure 2B This is a perspective view of an example of a loading port frame and sealing assembly based on aspects of this disclosure.

[0013] Figure 2C This is a cross-sectional view of an example sealing assembly according to an aspect of this disclosure.

[0014] Figure 3A This is a cross-sectional view of an example of a loading port frame and sealing assembly based on aspects of this disclosure.

[0015] Figure 3BThis is a perspective cross-sectional view of an example of a loading port frame and sealing assembly based on aspects of this disclosure.

[0016] Figures 4A to 4B This is an example of a cross-sectional view of a loading port door according to an aspect of this disclosure.

[0017] Figures 4C to 4D This is an example of a port gate perspective based on aspects of this disclosure.

[0018] Figure 5 This is a flowchart of a method for transferring a substrate from a substrate carrier to a factory interface according to an embodiment of the present disclosure. Detailed Implementation

[0019] The embodiments described herein cover systems and methods related to seals for loading ports. Some embodiments relate to a seal configured to couple to a loading port door. Some embodiments relate to a loading port door having a seal. Some embodiments relate to a loading port including a door with a seal. Other embodiments relate to seals that can be used for other components of a processing system, such as seals for side storage compartments (SSPs), front-opening standard compartments (FOUPs), etc. It should be understood that the embodiments described herein with respect to seals for loading port doors are also applicable to seals for any other components, chambers, or devices in a manufacturing system (e.g., in a semiconductor manufacturing system).

[0020] Many conventional loading ports do not include a seal between the loading port door and the loading port frame interface. Therefore, leakage is frequently present around the loading port door in conventional systems. A positive pressure can be maintained within the chamber of the factory interface (e.g., EFEM) coupled to the loading port, preventing contaminants from being introduced through the interface between the loading port door and the loading port frame. However, maintaining such a positive pressure increases the operating cost of the factory interface due to leaking gas. Furthermore, leaking gas through the conventional unsealed interface with the loading port door can cause corrosion at the interface, leading to particle generation. These particles can be introduced into the substrate carrier (e.g., FOUP) and the factory interface, thereby contaminating the conventional system.

[0021] Some conventional loading ports may include a traditional O-ring seal (e.g., with a generally circular cross-section) between the loading port door and the loading port frame. However, these conventional O-ring seals typically rely on large forces to form an airtight seal. Typically, loading port door actuators cannot provide the large forces that conventional O-ring seals rely on. For example, when using a conventional O-ring seal, the loading port door actuator pushes the loading port door against the loading port frame, causing the O-ring seal positioned between the loading port door and the loading port frame to be sufficiently compressed to form an airtight seal. Including a loading port door actuator that can provide sufficient force to seal using a conventional O-ring seal increases the additional cost and weight of the system. Furthermore, conventional loading port doors often have complex shapes (e.g., such as grooves around the edges of the door), which increases the manufacturing cost of the loading port door due to the additional material used and the additional machining performed. Moreover, conventional O-ring seals are often not possible to include due to space constraints. However, conventional loading port doors using traditional O-ring seals typically have a thicker profile to accommodate machined grooves to secure the O-ring seals, increasing the door's weight and cost.

[0022] In some embodiments of this disclosure, the loading port includes a frame adapted to connect the loading port to a factory interface. The frame includes a transfer opening through which one or more substrates can be transferred between a substrate carrier and the factory interface. The loading port includes a loading port door on the factory interface side of the frame, which substantially fills the transfer opening when the door is in a closed position. The loading port door is coupled to a door mechanism (e.g., an actuator operated by a loading port controller). The door mechanism can position the loading port door from a closed position to an open position and vice versa.

[0023] The loading port door includes a seal having a base portion, a sealing portion, and / or a retaining portion. The seal is configured to be coupled to a recess in the loading port door via the base portion. The recess may be formed by an edge surface of the loading port door and may extend around the periphery of the loading port door. The sealing portion of the seal may extend from the base portion. When the door is closed (e.g., closed by a door mechanism), the sealing portion may form an airtight seal against a sealing surface of the loading port frame. The sealing portion may produce a seal in response to a force applied against the sealing portion. The retaining portion of the seal may be substantially perpendicular to the base portion. In response to a force applied against the sealing portion, a surface of the retaining portion may be pressed against an edge surface of the loading port door. When a force is applied against the sealing portion, the retaining portion may cause the base portion of the seal to be retained in the recess of the loading port door.

[0024] Many advancements can be achieved by providing the seal of this disclosure. For example, the seal of this disclosure can create a smaller sealing force to form an hermetic seal between the loading port door and the loading port frame compared to the sealing force used for conventional O-ring seals, reducing the force requirements for the door actuator and allowing the loading port frame to be constructed from cheaper materials (e.g., sheet metal). Additionally, the seal of this disclosure reduces leakage present in conventional systems by sealing the interface between the loading port door and the loading port frame, thus reducing material consumption (e.g., gases, etc.) and the amount of contaminants leaking around the loading port door compared to conventional systems. Contaminants can remain in the system and can be properly discharged. Furthermore, by including the seal on the loading port door, a sensing system (e.g., a laser beam, etc.) can detect a wafer present in the transfer opening of the loading port frame without being obstructed by the seal (e.g., the seal moves away with the door when it is opened). Furthermore, as an additional improvement over conventional seals and systems, when force is applied to the sealing portion of the seal, the retaining portion of the seal helps to hold the seal within the receiving groove on the loading port door, rather than allowing the seal to "roll" out of the groove. Additionally, compared to conventional seals, the retaining portion allows the seal to sit more loosely within the groove, thus improving the seal's mounting properties and making it easier to install while still retaining the seal itself within the groove of the loading port door.

[0025] Figures 1A to 1C An electronic device manufacturing system 100 is described, wherein one or more loading ports are coupled to a factory interface 106. Figure 1A This is a top view schematic diagram of an example electronic device manufacturing system 100 according to aspects of this disclosure. Figure 1B This is a side view of an example electronic device manufacturing system 100 according to aspects of this disclosure. Figure 1C This is a front view schematic diagram of an example electronic device manufacturing system 100 according to aspects of this disclosure. Note that... Figures 1A to 1C It is for illustrative purposes, and different parts can be positioned in different locations relative to each view.

[0026] The electronic device manufacturing system 100 (also referred to as an electronic processing system) is configured to perform one or more processes on a substrate 102. The substrate 102 can be any suitable rigid, fixed-size planar article suitable for manufacturing electronic devices or circuit components on the substrate 102, such as a silicon-containing disk or wafer, a patterned wafer, a glass plate, or the like.

[0027] Electronic device manufacturing system 100 includes a process tool (e.g., a host) 104 and a factory interface 106 (e.g., EFEM) coupled to the process tool 104. The process tool 104 includes a housing 108 having a transfer chamber 110 within it. The transfer chamber 110 includes one or more processing chambers (also referred to as process chambers) 114, 116, 118 disposed around and coupled to the transfer chamber 110. The processing chambers 114, 116, 118 may be coupled to the transfer chamber 110 via corresponding ports such as slit valves or the like.

[0028] Processing chambers 114, 116, and 118 can be adapted to perform any number of processes on substrate 102. The same or different substrate processes can occur in each of the processing chambers 114, 116, and 118. Examples of substrate processes include atomic layer deposition (ALD), physical vapor deposition (PVD), chemical vapor deposition (CVD), etching, annealing, curing, pre-cleaning, removal of metal or metal oxides, or similar processes. In one example, a PVD process is performed in one or two of the processing chambers 114, an etching process is performed in one or two of the processing chambers 116, and an annealing process is performed in one or two of the processing chambers 118. Other processes can be performed on the substrate within the processing chambers. Processing chambers 114, 116, and 118 may each include a substrate support assembly. The substrate support assembly can be configured to hold the substrate in place while performing substrate processes.

[0029] The transfer chamber 110 also includes a transfer chamber robot 112. The transfer chamber robot 112 may include one or more arms, each arm including one or more end effectors at its end. The end effectors may be configured to handle specific objects such as wafers. Alternatively or additionally, the end effectors may be configured to handle objects such as process fitting rings. In some embodiments, the transfer chamber robot 112 may be a selectively compliant assembly robotic arm (SCARA) robot, such as a 2-link SCARA robot, a 3-link SCARA robot, a 4-link SCARA robot, and so on.

[0030] Load lock 120 may also be coupled to housing 108 and transfer chamber 110. Load lock 120 may be configured to mate with and be coupled to transfer chamber 110 on one side and factory interface 106 on the other side. In some embodiments, load lock 120 may have an environmentally controlled atmosphere, which may be changed from a vacuum environment (where substrates may be transferred to and from transfer chamber 110) to an inert gas environment at or near atmospheric pressure (where substrates may be transferred to and from factory interface 106). In some embodiments, load lock 120 is a stacked load lock having a pair of upper internal chambers and a pair of lower internal chambers located at different vertical levels (e.g., one above the other). In some embodiments, a pair of upper internal chambers may be configured to receive processed substrates from transfer chamber 110 for removal from process tool 104, while a pair of lower internal chambers may be configured to receive substrates from factory interface 106 for processing in process tool 104. In some embodiments, load lock 120 may be configured to perform substrate processes (e.g., etching or pre-cleaning) on ​​one or more substrates 102 housed in load lock 120.

[0031] Factory interface 106 can be any suitable enclosure, such as a device front-end module (EFEM). Factory interface 106 can be configured to receive substrates 102 from substrate carriers 122 (e.g., front-opening standard compartments (FOUP)) docked at various loading ports 124 of factory interface 106. Factory interface robot 126 (shown as dashed lines) can be configured to transfer substrates 102 between substrate carriers (also referred to as containers) 122 and loading locks 120. In other and / or similar embodiments, factory interface 106 is configured to receive replacement parts from replacement parts storage containers. Factory interface robot 126 can include one or more robotic arms and can be or include SCARA robots. In some embodiments, factory interface robot 126 has more links and / or more degrees of freedom than transfer chamber robot 112. Factory interface robot 126 may include end effectors at the end of each robotic arm. End effectors can be configured to pick up and transport specific objects such as wafers. Alternatively or additionally, the end effector may be configured to transport objects such as process fitting rings. Any conventional robot type can be used for the factory interface robot 126. Transfer can be performed in any order or direction. In some embodiments, the factory interface 106 may be maintained in, for example, a slightly positive pressure non-reactive gas environment (using, for example, nitrogen, other inert gases, or air with controlled sub-composition parameters as the non-reactive gas).

[0032] The factory interface 106 can be configured with any number of loading ports 124, which can be located on one or more sides of the factory interface 106 and at the same or different heights. One or more loading ports 124 may include loading port doors designed to include seals having a base portion, a sealing portion, and / or a retaining portion, as described herein. Such designed seals and loading ports will be referenced... Figures 2A to 2C , Figures 3A to 3B and Figures 4A to 4D Let's discuss this in more detail.

[0033] The factory interface 106 may include one or more auxiliary components (not shown). These auxiliary components may include substrate storage containers, metering equipment, servers, air conditioning units, etc. For example, the substrate storage container may store substrates and / or substrate carriers (e.g., FOUP). The metering equipment can be used to determine the property data of the products produced by the electronic device manufacturing system 100. In some embodiments, the factory interface 106 may include an upper compartment 160, such as... Figures 1B to 1C As seen in the image. The upper compartment 160 can accommodate electronic systems (such as servers, air conditioning units, etc.), utility cables, system controller 128, or other components.

[0034] In some embodiments, transfer chamber 110, process chambers 114, 116, and 118, and / or load lock 120 are maintained at a vacuum level. The electronics handling system 100 may include one or more vacuum ports coupled to one or more stations of the electronics manufacturing system 100. For example, a first vacuum port 130a may couple factory interface 106 to load lock 120. A second vacuum port 130b may be coupled to load lock 120 and is located between load lock 120 and transfer chamber 110.

[0035] The electronic device manufacturing system 100 may also include a system controller 128. The system controller 128 may be and / or include computing devices such as personal computers, server computers, programmable logic controllers (PLCs), microcontrollers, etc. The system controller 128 may include one or more processing devices, which may be general-purpose processing devices such as microprocessors, central processing units (CPUs), or the like. More specifically, the processing device may be a complex instruction set computing (CISC) microprocessor, a reduced instruction set computing (RISC) microprocessor, a very long instruction word (VLIW) microprocessor, a processor implementing other instruction sets, or a processor implementing a combination of instruction sets. The processing device may also be one or more special-purpose processing devices, such as application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), digital signal processors (DSPs), network processors, or the like. The system controller 128 may include data storage devices (e.g., one or more disk drives and / or solid-state drives), main memory, static memory, network interfaces, and / or other components. The system controller 128 may execute instructions to perform any one or more of the methods and / or embodiments described herein. Instructions may be stored on a computer-readable storage medium, which may include main memory, static memory, auxiliary storage, and / or processing means (during instruction execution). System controller 128 may include an environment controller configured to control the environment (e.g., pressure, humidity level, vacuum level, etc.) within plant interface 106. In one embodiment, the execution of instructions by system controller 128 causes system controller execution. Figure 5 One or more methods. The system controller 128 may also be configured to allow human operators to input and display data, operating commands, and the like.

[0036] Figures 2A to 2C The illustration shows an example loading port and sealing assembly 200 according to an embodiment of this disclosure. Figure 2A This is a front view schematic diagram of the loading port and sealing assembly 200 according to an embodiment of the present disclosure. Figure 2B This is a perspective view of the loading port and sealing assembly 200 according to an embodiment of the present disclosure. Figure 2C This is a cross-sectional view of seal 220, as shown in section AA 230. In some embodiments, the exterior of load port frame 224 (or any other load port frame discussed herein) may conform to SEMI (International Semiconductor Equipment and Materials) standards and requirements.

[0037] Load port door 210 can be positioned in a closed position to secure it to the transfer opening to maintain a controlled atmosphere within the factory interface 106. A gate mechanism can be used to position the load port door in an open position. When in the open position, the transfer opening in component 200 allows for the transfer of substrates (e.g., wafers) between the substrate carrier 122 coupled to load port 124 and the factory interface 106 using the factory interface robot 126.

[0038] A seal 220 may be positioned around a loading port door 210. In some embodiments, the geometry of the seal is such that a base portion 222 of the seal is coupled to the loading port door 210 and a surface of a sealing portion 223 extending from the base portion 222 contacts a surface of the loading port frame 224 (e.g., a sealing surface) (in response to the loading port door being in a closed position). In some embodiments, the sealing portion 223 may cantilever out from the base portion 222. When the loading port door 210 is in the closed position, the seal 220 may provide an hermetically tight seal. In some instances, the surface of the sealing portion 223 near the distal end of the seal 220 engages with the sealing surface of the loading port frame 224 to form an hermetically tight seal. The base portion 222 may form a seal against the loading port door 210. When the loading port door 210 is in the closed position, the loading port door 210 may apply a force (e.g., a threshold sealing force) to the seal 220, and the loading port frame 224 may apply a reaction force 227 to the sealing portion 223 of the seal 220. In some embodiments, the loading port door 210 moves to a closed position when a force (e.g., through a door actuator) is applied. In some embodiments, the force (e.g., load) applied to the seal 220 during sealing (e.g., when the door is closed) is perpendicular to a surface where the seal is connected to the loading port door (e.g., as shown in the image). Figure 2C (As shown in the diagram). Such a vertical force can cause the seal to separate from the loading port door. In some embodiments, the seal 220 is configured to remain engaged with the loading port door even under sealing conditions where the sealing force is perpendicular to the connection between the seal and the loading port door.

[0039] In some embodiments, seal 220 is a single-piece material, such as vulcanized rubber or any other type of elastomer. Seal 220 may be composed of a flexible elastomer material. Those skilled in the art will understand that other suitable materials may be used, such as natural rubber, silicone, plastics, other synthetic rubbers, polymers, expanded foam, etc. In some embodiments, seal 220 may consist of multiple components coupled together. In some instances, base portion 222 may be composed of a first material, and sealing portion 223 and retaining portion 226 may be composed of a second material and may be bonded and / or coupled to base portion 222. In some embodiments, at least a portion of seal 220 is composed of a plastic material. In some embodiments, seal 220 is extruded or molded.

[0040] The retaining portion 226 of the seal 220 may be positioned close to the base portion 222. In some embodiments, the retaining portion 226 is a protrusion that projects generally perpendicularly relative to the base portion 222. The retaining portion 226 may be positioned toward the distal end of the seal but close to the base portion 222. The retaining portion 226 may include a radiused corner. In some embodiments, the seal 220 includes a radiused corner between the retaining portion 226 and the base portion 222. In some embodiments, the seal 220 includes a radiused corner, and the sealing portion 223 extends from the retaining portion 226 at the radiused corner. The retaining portion 226 may cause the seal to remain connected to the loading port door under sealing conditions (e.g., when a sealing force is applied to create an airtight seal). Further details regarding the function of the retaining portion 226 will be provided in [reference needed]. Figure 3A Let's have a discussion.

[0041] In some embodiments, seal 220 may have a total height between approximately 10 mm and 15 mm. Base portion 222 may have a height between approximately 1.5 mm and 2.5 mm. In some embodiments, seal 220 may have an unbent width (e.g., width in its natural state) between approximately 6 mm and 10 mm. When a sealing force is applied (e.g., applied to seal portion 223), seal 220 may bend to a narrower width. In some embodiments, seal portion 223 may have a width between approximately 1 mm and 2 mm. In some embodiments, seal portion 223 is wider near base portion 222 and narrower near distal end. Seal portion 223 may gradually thin at a distance away from base portion 222. In many embodiments, base portion 222 is configured to fit into a conventional groove (e.g., dovetail groove, slotted groove, square groove, etc.). The surface of base portion 222 may have a radius that fits into the dovetail groove. In some embodiments, the base portion 222 may be configured to substantially fill the recess, but not completely fill it (see, for example, see below). Figure 3A The base portion 222 may include rounded corners. The base portion 222 may have a width between approximately 2.5 and 4 mm. In some embodiments, the neck of the base portion 222 (e.g., a narrow section of the base portion 222) may have a width between approximately 2 mm and 3.5 mm. Those skilled in the art will understand that the seal 220 may have different dimensions than those described herein to suit certain applications.

[0042] Figure 3A and Figure 3B The illustration shows an example of a port frame and sealing assembly 300 according to aspects of this disclosure. Figure 3A This is a cross-sectional view of an example loading port frame and sealing assembly 300. Figure 3B This is a perspective view of component 300. Component 300 includes a first component (e.g., a loading port door 210), a seal 220, and a second component (e.g., a loading port frame 224). As shown, the loading port door 210 is in the closed position, and the seal 220 forms an airtight seal between the sealing surface 224A of the loading port frame 224 and the edge surface 210A of the loading port door 210.

[0043] In some embodiments, edge surface 210A may be angled relative to sealing surface 224A. As shown, edge surface 210A is generally perpendicular to sealing surface 224A. Loading port door 210 may be movable relative to loading port frame 224. A door actuator (not shown) may move loading port door 210 between a closed position and an open position. Loading port door 210 may be illustrated in the closed position. To move to the open position, loading port door 210 may move to the left (as shown) away from loading port frame 224, and then downward (as shown) to expose the transfer opening. The door actuator may apply force to loading port door 210 to move loading port door 210 to the closed position. In response to loading port door 210 moving to the closed position, sealing portion 223 of seal 220 may abut against loading port frame 224. Seal 220 can generate an airtight seal in response to a threshold sealing force applied against sealing portion 223 (e.g., via a door actuator, via loading port frame 224, etc.).

[0044] The sealing surface 224A of the loading port frame 224 can apply a reaction force 227 against the surface of the sealing member 223. The reaction force 227 can be orthogonal to the plane of the sealing surface 224A and can be substantially equal to the threshold sealing force. The threshold sealing force can be applied substantially parallel to the plane of the edge surface 210A. In some embodiments, the applied sealing force is between approximately 50 and 210 Newtons to form an hermetic seal. In some embodiments, the applied sealing force is between approximately 70 and 130 Newtons. In some embodiments, the applied sealing force is less than the maximum force that can be applied to the loading port door 210 by a door actuator (not shown). To form an hermetic seal, a sealing force greater than the threshold sealing force can be applied. In some embodiments, at least a portion of the seal 220 can bend when the sealing force is applied. The hermetic seal can inhibit the flow of fluids (e.g., gases, air, nitrogen, etc.) and contaminants (e.g., particles, etc.) between the interface of the loading port door 210 and the loading port frame 224.

[0045] In some embodiments, a portion of the edge surface 210A abuts against the surface of the retaining portion 226 of the seal 220, applying a reaction force 228. The reaction force 228 may be orthogonal to the edge surface 210A. The reaction force 228 may be applied in response to a moment about the axis of the seal 220 generated by the reaction force 227. The reaction force 228 may in turn cause a reaction force 229 to be applied to the surface of the base portion 222 of the seal 220. In some embodiments, the reaction force 229 may cause the base portion 222 to be retained in the recess 214 of the loading port door 210. In some embodiments, the base portion 222 may be retained in the recess 214 of the loading port door 210 by the elastic properties of the seal 220. In some instances, the seal 220 is elastically stretched to fit around the loading port door 210 and to seat the base portion 222 in the recess 214. The elastic properties of the seal 220 may cause the base portion 222 to be retained in the recess 214. The groove 214 can be a dovetail groove, a semi-dovetail groove, or a square groove. The downward vertical component of the reaction force 229 on the base portion 222 (as shown) helps to retain the base portion 222 within the groove 214, thereby causing the seal 220 to remain coupled to the loading port gate 210 when a sealing force is applied against the sealing portion 223. In some embodiments, a deeper groove may help to retain the seal 220 within the groove 214. In many embodiments, the sum of the reaction forces 227, 228, 229, the sealing force applied to the sealing portion 223, and any torque generated by these forces about the axis of the seal 220 is a net zero force and torque.

[0046] Figures 4A to 4B This is an example of a cross-sectional view of a loading port gate 210 according to an aspect of this disclosure. Figure 4C and Figure 4D This is a perspective view of port gate 210, as exemplified by aspects of this disclosure. Figure 4A The cross-section of groove 214A is shown. Figure 4B The cross-section of groove 214B is shown.

[0047] In some embodiments, the groove 214A is a dovetail groove formed in the edge surface 210A. The groove 214A may be configured to accept the base portion 222 of the seal 220. In some embodiments, the groove 214A may be an interface coupling the seal 220 to the loading port gate 210. The groove 214A may include two sidewalls 217 and a bottom wall.

[0048] In some embodiments, the groove 214A may be cut along a straight section (e.g., a straight portion, a non-curved portion, etc.) of the periphery of the loading port door 210 (e.g., by a machining tool such as a milling cutter) (see See). Figure 4C and Figure 4D The groove 214A can be cut using a dovetail cutter. Due to the nature of the dovetail cutter (e.g., wider at the bottom than at the top), a dovetail groove cannot be cut on a circular profile (e.g., along a curved surface). Therefore, in some embodiments, the rectangular groove 214B (e.g., generally rectangular, square, non-dovetail, etc.) can be cut along a curved section (e.g., a curved portion, a fillet, etc.) around the perimeter of the loading port door 210 (e.g., see [reference]). Figure 4C and Figure 4D In some instances, groove 214B may be cut on a curved (e.g., rounded) section of the edge surface 210A of the loading port door 210. Groove 214B may be cut with a conventional milling cutter. In some embodiments, groove 214B is configured to receive the base portion 222 of seal 220. In some embodiments, grooves 214A and 214B are configured to receive O-rings of standard sizes commonly found in industry. A transition zone 216 may be included in the edge surface 210A, where groove 214A intersects with groove 214B. Transition zone 216 may be a milling plunge zone where a dovetail milling cutter begins and / or ends cutting the dovetail groove 214A.

[0049] In some embodiments, grooves 214A and 214B have substantially the same depth. In some instances, grooves 214A and 214B have depths between approximately 1.5 mm and 2.5 mm. In some embodiments, the throat 213 of groove 214A may have a width between approximately 2.2 mm and 3.5 mm. In some embodiments, the throat 215 of groove 214B may have a width between approximately 3 mm and 4 mm. In some embodiments, the width of throat 215 is greater than the width of throat 213. In some embodiments, the maximum width of groove 214A is greater than the depth of groove 214A. In some embodiments, the sidewall 217 of dovetail groove 214A forms an angle with edge surface 210A. In some instances, the sidewall 217 and edge surface 210A form an angle between approximately 45 degrees and 80 degrees. In some instances, at least one sidewall forms an angle relative to edge surface 210A. In some embodiments, the sidewall of groove 214B is substantially perpendicular to edge surface 210A. Those skilled in the art will understand that grooves 214A and 214B may have different dimensions than those described herein to suit certain applications.

[0050] Figure 5This is a flowchart of a method 500 for transferring a substrate from a substrate carrier to a factory interface according to embodiments of this disclosure. In some embodiments, method 500 is executed by and / or caused by processing logic, which includes hardware (e.g., circuitry, dedicated logic, programmable logic, microcode, processing devices, etc.), software (such as instructions that run on a processing device, general-purpose computer system, or special-purpose machine), firmware, microcode, or a combination of the foregoing. In some embodiments, method 500 is at least partially manufactured by an electronic device manufacturing system (e.g., Figures 1A to 1C The electronic device manufacturing system 100 is executed.

[0051] For the sake of simplicity, method 500 is depicted and described as a series of operations. However, operations according to this disclosure may occur in various orders and / or simultaneously and with other operations not presented and described herein. Furthermore, in some embodiments, not all illustrated operations are performed to implement method 500 according to the disclosed subject matter. Additionally, those skilled in the art will understand and recognize that method 500 may alternatively be represented as a series of interrelated states via a state diagram or events.

[0052] At block 510, a loading port receives a substrate carrier. In some instances, the substrate carrier is a FOUP. In some embodiments, the loading port includes a frame adapted to connect the loading port to a factory interface. The frame includes a transfer opening through which one or more substrates can be transferred between the substrate carrier and the factory interface. The loading port also includes an actuator coupled to the frame and a loading port gate coupled to the actuator. The loading port gate can be configured to seal the transfer opening. The actuator is capable of positioning the loading port gate from a closed position to an open position and from an open position to a closed position.

[0053] The loading port door may include one or more seals coupled to an edge surface of the loading port door. The seal may include a base portion, a sealing portion extending from the base portion, and a retaining portion projecting generally perpendicular to the base portion. The sealing portion may be configured to engage a sealing surface of the loading port frame when the loading port door is in a closed position in response to a threshold sealing force applied against the sealing portion, to form an airtight seal between the loading port door and the loading port frame. The base portion may be configured to be coupled to the loading port door via a groove formed in an edge surface of the loading port door.

[0054] At box 520, the substrate carrier can be positioned such that the front of the substrate carrier is aligned with the opening of the loading port frame (e.g., the transmission opening).

[0055] At box 530, a loading port door disposed in the opening can be opened (e.g., via a door actuator). The loading port door can be moved (e.g., via the door actuator) away from the opening, causing the seal coupled to the loading port door to disengage from the sealing surface of the loading port frame. The door can then be lowered away from the opening.

[0056] At box 540, the factory interface robot, located within the factory interface, can retrieve the substrate from the substrate carrier.

[0057] At box 550, once the substrate is retrieved, an actuator can be used to position the loading port door from the open position to the closed position, causing the seal coupled to the loading port door to engage the sealing surface of the loading port frame to form an airtight seal. The actuator can apply a sealing force greater than a threshold sealing force to the loading port door, enabling the seal to create an airtight seal between the loading port door and the loading port frame.

[0058] The foregoing description sets forth numerous specific details, such as examples of particular systems, components, methods, etc., to provide a good understanding of several embodiments of this disclosure. However, it will be apparent to those skilled in the art that at least some embodiments of this disclosure can be practiced without these specific details. In other instances, well-known components or methods have not been described in detail, or have been presented in a simple block diagram format to avoid unnecessarily obscuring the disclosure. Therefore, the specific details set forth are merely exemplary. Specific embodiments may differ from these exemplary details and may still be contemplated within the scope of this disclosure.

[0059] Throughout this specification, references to "one embodiment" or "an embodiment" indicate that a particular feature, structure, or characteristic described in connection with this embodiment is included in at least one embodiment. Therefore, the phrases "in one embodiment" or "in an embodiment" appearing throughout the specification do not necessarily refer to the same embodiment. Furthermore, the term "or" is intended to indicate an inclusive "or" rather than an exclusive "or." When the terms "about" or "approximately" are used herein, this is intended to indicate that the given nominal value is accurate to within ±10%.

[0060] Although the operations of the methods described herein are illustrated and described in a specific order, the order of operations for each method can be changed so that certain operations can be performed in reverse order, or that certain operations can be performed at least partially in parallel with other operations. In another embodiment, instructions or sub-operations of different operations can be performed intermittently and / or alternately.

[0061] It should be understood that the above description is intended to be illustrative rather than limiting. Many other embodiments will become apparent to those skilled in the art after reading and understanding the foregoing description. Therefore, the scope of the disclosure should be determined by referring to the appended claims, together with the full scope of equivalents conferred by such claims.

Claims

1. A seal comprising: a base portion configured to couple to a groove formed by an edge surface of the first component; a sealing portion extending from the base portion, wherein the sealing portion is configured to create a hermetic seal between sealing surfaces of the first component and the second component in response to a threshold sealing force applied against the sealing portion; and A retaining portion is generally perpendicular to the base portion, wherein a surface of the retaining portion is configured to press against the edge surface of the first component in response to the threshold sealing force being applied against the sealing portion.

2. The seal of claim 1, wherein the edge surface of the first component is substantially perpendicular relative to the sealing surface of the second component, and wherein the first component is movable relative to the second component.

3. The seal of claim 1, wherein at least the sealing portion of the seal comprises a flexible elastomeric material.

4. A seal as described in claim 1, wherein the first component is a loading port door of a factory interface and the second component is a frame of the loading port, the frame including an opening for receiving the loading port door, wherein the loading port door moves to a closed position in response to the threshold sealing force applied against the sealing portion, and wherein the threshold sealing force is applied substantially parallel to the plane of the edge surface of the first component.

5. The seal of claim 1 wherein the threshold sealing force is approximately 50 to 210 Newtons.

6. A seal as described in claim 1, wherein the retaining portion is configured to generate a moment about the axis of the seal in response to the threshold sealing force applied against the sealing portion, and wherein the base portion is configured so that a reaction force on the surface of the base portion causes the base portion to be retained in the groove.

7. The seal of claim 1 , wherein at least a portion of the groove formed by the edge surface of the first component is a dovetail groove having two side walls and a bottom wall, wherein a maximum width between the two side walls is greater than a depth of the dovetail groove, and wherein at least one side wall forms an angle of approximately 45 to 80 degrees relative to the bottom wall.

8. A load port door comprising: Inner surface; External surface; an edge surface including a groove formed therein; and a seal coupled to the groove, wherein the seal comprises: a base portion configured to be coupled to the recess; a sealing portion extending from the base portion, wherein the sealing portion is configured to create an airtight seal between the load port door and a sealing surface of a frame of the load port in response to a threshold sealing force applied against the sealing portion; and A retaining portion is generally perpendicular to the base portion, wherein a surface of the retaining portion is configured to press against the edge surface in response to the threshold sealing force being applied against the sealing portion.

9. The loading port door of claim 8, wherein the edge surface of the loading port door is configured to be substantially perpendicular relative to the sealing surface of the frame of the loading port, and wherein the loading port door is configured to be movable relative to the frame of the loading port.

10. The loading port door of claim 8, wherein at least the sealing portion of the seal comprises a flexible elastomeric material.

11. The load port door of claim 8, wherein the threshold sealing force is approximately 50 to 210 Newtons, and wherein the threshold sealing force is applied generally parallel to the plane of the edge surface.

12. A loading port door as described in claim 8, wherein the retaining portion of the seal is configured to generate a moment about the axis of the seal in response to the threshold sealing force applied against the sealing portion of the seal, and wherein the base portion of the seal is configured such that a reaction force on the surface of the base portion of the seal causes the base portion to be retained in the groove.

13. The loading port door of claim 8, wherein at least a portion of the groove is a dovetail groove having two side walls and a bottom wall, wherein a maximum width between the two side walls is greater than a depth of the dovetail groove, and wherein at least one side wall forms an angle of approximately 45 to 80 degrees relative to the bottom wall.

14. The loading port door of claim 8, wherein the groove is formed in the edge surface along a periphery of the loading port door, wherein the groove is a dovetail groove along at least a straight portion of the edge surface, and wherein the groove is a substantially rectangular groove along at least a curved portion of the edge surface.

15. A load port for receiving a substrate carrier, comprising: a frame adapted for connecting the loadport to a factory interface, the frame including a transfer opening through which one or more substrates can be transferred between the substrate carrier and the factory interface; a loadport door configured to substantially fill the transfer opening, wherein the loadport door includes an edge surface forming a recess; and a seal coupled to the groove formed in the edge surface of the load port door, wherein the seal comprises: a base portion, wherein the seal is coupled to the groove of the load port door via the base portion; a sealing portion extending from the base portion, wherein the sealing portion is configured to create an airtight seal between the load port door and a sealing surface of the frame in response to a threshold sealing force applied against the sealing portion; and A retaining portion is generally perpendicular to the base portion, wherein a surface of the retaining portion is configured to press against the edge surface of the loading port door in response to the threshold sealing force applied against the sealing portion.

16. A loading port as described in claim 15, wherein the edge surface of the loading port door is configured to be substantially perpendicular relative to the sealing surface of the frame, wherein the loading port door is configured to be movable relative to the frame of the loading port, and wherein the seal is configured to engage with the sealing surface of the frame when the loading port door is in a closed position.

17. A loading port as described in claim 15, wherein the retaining portion of the seal is configured to generate a moment about the axis of the seal in response to the threshold sealing force applied against the sealing portion of the seal, and wherein the base portion of the seal is configured such that a reaction force on the surface of the base portion of the seal causes the base portion to be retained in the groove of the loading port door.

18. The loading port of claim 15, wherein at least a portion of the groove of the loading port door is a dovetail groove having two side walls and a bottom wall, wherein a maximum width between the two side walls is greater than a depth of the dovetail groove, and wherein at least one side wall forms an angle of approximately 45 to 80 degrees relative to the bottom wall.

19. The loading port of claim 15, wherein the groove of the loading port door is formed in the edge surface of the loading port door along a periphery of the loading port door, wherein the groove is a dovetail groove along at least a straight portion of the edge surface of the loading port door, and wherein the groove is a substantially rectangular groove along at least a curved portion of the edge surface of the loading port door.

20. The loadport of claim 15, wherein the threshold sealing force is approximately 50 to 210 Newtons, and wherein the threshold sealing force is applied generally parallel to a plane of the edge surface of the loadport door.

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