Spectrometer wavelength drift correction method and system
By establishing the positive correlation between the wavelength drift amount of the spectrometer and the air pressure data, the wavelength drift amount model was obtained by fitting the linear regression method, and using real-time air pressure data to correct the real-time zero point wavelength data, solving the problem of wavelength drift error of the astronomical spectrometer, improving observation efficiency and reducing costs.
Patent Information
- Application Number
- CN202510122281.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-26
- Publication Date
- 2025-03-04
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
During the observation process, the wavelength drift error caused by environmental factors is difficult to effectively control, resulting in low observation efficiency and high cost.
By collecting the historical air pressure data of the spectrometer and the historical spectral data of the ThAr lamp, a positive correlation between wavelength drift and air pressure data was established, and the wavelength drift model was obtained using linear regression method, and the real-time air pressure data was used to correct the real-time zero-point wavelength data.
It effectively corrects the wavelength drift of the spectrometer, improves observation efficiency, reduces instrument costs and operation and maintenance costs, and avoids complex calibration spectral observation links.
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Figure CN119555205A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of spectrum calibration, and in particular to a method and system for correcting wavelength drift of a spectrometer. Background Art
[0002] At present, the observation mode based on ThAr lamp single fiber asynchronous wavelength calibration is a commonly used observation mode in many astronomical spectrometers. In order to avoid the influence of environmental factors on the stability performance of the spectrometer and obtain more accurate asynchronous calibration measurement results, the observation process of ThAr lamp single fiber asynchronous wavelength calibration is usually as follows in astronomical observation applications: "wavelength calibration observation → background observation → target observation → wavelength calibration observation → background observation...", and the observation is repeated alternately until the observation is completed. Although this method can reduce the wavelength drift error caused by changes in environmental factors at different times, this type of spectrometer belongs to For high-precision instruments, high requirements are placed on the stability control of the operating environment. In practical applications, it is usually necessary to design or install high-precision temperature control and pressure control systems, which increases the cost of the instrument. At the same time, the dynamic stability of the instrument will change with the running time of the equipment, and its operation and maintenance cost is high. In addition, it is usually necessary to intersperse the target observation with the calibration spectrum observation in the observation process of the ThAr lamp single-fiber asynchronous wavelength calibration, which increases the instrument mode switching time, the on and off of the calibration lamp, the calibration lamp observation, and the background observation link increased due to the CCD residue caused by the calibration lamp spectrum, which invisibly consumes more observation time and reduces the observation efficiency. Summary of the invention
[0003] The technical problem to be solved by the present invention is: the present invention provides a method and system for correcting wavelength drift of a spectrometer, which improves observation efficiency and reduces costs at the same time.
[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is: In a first aspect, the present invention provides a method for correcting wavelength drift of a spectrometer, comprising: Collecting historical air pressure from the spectrometer according to a first preset frequency to obtain historical air pressure data and corresponding historical air pressure collection time; Perform two-dimensional imaging acquisition on the historical light beam of the ThAr lamp introduced into the spectrometer according to a second preset frequency to obtain historical spectrum data of the ThAr lamp and the corresponding historical spectrum acquisition time, perform wavelength calibration on the historical spectrum data of the ThAr lamp to obtain historical zero-point wavelength data, and perform statistics on the historical zero-point wavelength data according to a preset level to obtain a historical wavelength drift; According to the historical air pressure collection time and the historical spectrum collection time, a linear regression method is used to perform positive correlation fitting on the historical air pressure data and the historical wavelength drift, and a wavelength drift model is obtained: =a× +b in, Indicates the wavelength drift at the time i of historical air pressure collection, represents the historical air pressure data at the time i when the historical air pressure was collected, a represents the regression coefficient, and b represents the movement coefficient; The real-time air pressure and real-time zero-point wavelength data collected in real time are obtained, the real-time air pressure is input into the wavelength drift model to calculate the real-time wavelength drift, and the real-time zero-point wavelength data is corrected according to the real-time wavelength drift to obtain the corrected real-time zero-point wavelength data.
[0005] The beneficial effects of the present invention are as follows: two-dimensional imaging and acquisition are performed on the historical light beam of the ThAr lamp introduced into the spectrometer to obtain the historical spectrum data of the ThAr lamp, thereby obtaining the historical wavelength drift amount according to the historical spectrum data of the ThAr lamp, and a wavelength drift amount model is obtained by performing positive correlation fitting on the historical wavelength drift amount and the historical air pressure data, that is, the wavelength drift amount model is obtained by establishing a positive correlation between the historical wavelength drift amount and the historical air pressure data, so that the real-time zero-point wavelength data is corrected by the wavelength drift amount model and the real-time air pressure, and the objectivity and accuracy of the corrected zero-point wavelength data are ensured. Compared with the traditional ThAr lamp single-fiber asynchronous wavelength calibration observation mode, the complex calibration spectrum observation link is omitted, that is, the instrument mode switching time, the on and off operation of the calibration lamp, the calibration lamp observation, and the background observation link increased due to the CCD residual caused by the calibration lamp spectrum are omitted, thereby improving the observation efficiency, and in this way, there is no need to design or install a high-precision temperature control and pressure control system, thereby reducing the instrument cost and operation and maintenance cost.
[0006] Optionally, the first preset frequency is [0.1 Hz, 0.3 Hz].
[0007] Optionally, performing two-dimensional imaging acquisition on the historical light beam of the ThAr lamp introduced into the spectrometer according to the second preset frequency includes: During the time period when the spectrometer is not working, two-dimensional imaging is performed on the historical light beam of the ThAr lamp introduced into the spectrometer according to a second preset frequency, and the second preset frequency is [13min, 16min].
[0008] According to the above description, considering that the air pressure inside the spectrometer changes relatively slowly, the second preset frequency for collecting the historical light beam of the ThAr lamp introduced into the spectrometer is set to [13min, 16min], which is in line with reality and ensures the objectivity of the historical spectral data of the ThAr lamp while improving the collection efficiency.
[0009] Optionally, the performing statistics on the historical zero-point wavelength data according to a preset level to obtain the historical wavelength drift includes: Filtering out the starting zero-point wavelength data at the starting collection time from the historical zero-point wavelength data according to the historical spectrum collection time; Performing statistics on the historical zero-point wavelength data according to a preset level to obtain the statistically analyzed historical zero-point wavelength data; Subtract the initial zero-point wavelength data from the historical zero-point wavelength data after statistics to obtain the historical wavelength drift; Among them, the preset level is [88,110].
[0010] According to the above description, the historical zero-point wavelength data are counted according to the [88,110] level. The signal-to-noise ratio in this range is high and there is no saturation, which improves the accuracy of the historical wavelength data after statistics. The historical wavelength data after statistics is subtracted from the starting zero-point wavelength data to ensure that the historical wavelength drift obtained is the historical wavelength drift over the time series.
[0011] Optionally, performing positive correlation fitting on the historical air pressure data and the historical wavelength drift amount by a linear regression method according to the historical air pressure collection time and the historical spectrum collection time includes: Matching the historical air pressure collection time and the historical spectrum collection time according to a preset time difference to obtain a matched historical air pressure collection time and a matched historical spectrum collection time; According to the matched historical air pressure collection time and the matched historical spectrum collection time, a linear regression method is used to perform positive correlation fitting on the historical air pressure data and the historical wavelength drift; The preset time difference is less than or equal to 3 seconds.
[0012] According to the above description, when performing positive correlation fitting on historical air pressure data and historical wavelength drift according to the historical air pressure collection time and the historical spectrum collection time, the historical air pressure collection time and the historical spectrum collection time are first matched, that is, the two are time-aligned, and aligned according to a preset time difference of less than or equal to 3 seconds, taking into full consideration that at a time resolution of less than or equal to 3 seconds in the spectrometer, the temperature, humidity and air pressure can be regarded as almost unchanged, thereby ensuring the objectivity of the matching, thereby further ensuring the accuracy of the subsequent positive correlation fitting.
[0013] In a second aspect, the present invention provides a system for correcting wavelength drift of a spectrometer, comprising: An air pressure collection module, used to collect historical air pressure of the spectrometer according to a first preset frequency, and obtain historical air pressure data and corresponding historical air pressure collection time; a spectrum acquisition module, for performing two-dimensional imaging acquisition of the historical light beam of the ThAr lamp introduced into the spectrometer according to a second preset frequency, obtaining historical spectrum data of the ThAr lamp and the corresponding historical spectrum acquisition time, performing wavelength calibration on the historical spectrum data of the ThAr lamp to obtain historical zero-point wavelength data, and performing statistics on the historical zero-point wavelength data according to a preset level to obtain a historical wavelength drift; A model building module is used to perform positive correlation fitting on the historical air pressure data and the historical wavelength drift according to the historical air pressure collection time and the historical spectrum collection time by linear regression method to obtain a wavelength drift model: =a× +b in, Indicates the wavelength drift at the time i of historical air pressure collection, represents the historical air pressure data at the time i when the historical air pressure was collected, a represents the regression coefficient, and b represents the movement coefficient; The correction module is used to obtain the real-time air pressure and real-time zero-point wavelength data collected in real time, input the real-time air pressure into the wavelength drift model to calculate the real-time wavelength drift, and correct the real-time zero-point wavelength data according to the real-time wavelength drift to obtain the corrected real-time zero-point wavelength data.
[0014] The beneficial effects of the present invention are as follows: two-dimensional imaging and acquisition are performed on the historical light beam of the ThAr lamp introduced into the spectrometer to obtain the historical spectrum data of the ThAr lamp, thereby obtaining the historical wavelength drift amount according to the historical spectrum data of the ThAr lamp, and a wavelength drift amount model is obtained by performing positive correlation fitting on the historical wavelength drift amount and the historical air pressure data, that is, the wavelength drift amount model is obtained by establishing a positive correlation between the historical wavelength drift amount and the historical air pressure data, so that the real-time zero-point wavelength data is corrected by the wavelength drift amount model and the real-time air pressure, and the objectivity and accuracy of the corrected zero-point wavelength data are ensured. Compared with the traditional ThAr lamp single-fiber asynchronous wavelength calibration observation mode, the complex calibration spectrum observation link is omitted, that is, the instrument mode switching time, the on and off operation of the calibration lamp, the calibration lamp observation, and the background observation link increased due to the CCD residual caused by the calibration lamp spectrum are omitted, thereby improving the observation efficiency, and in this way, there is no need to design or install a high-precision temperature control and pressure control system, thereby reducing the instrument cost and operation and maintenance cost.
[0015] Optionally, the first preset frequency is [0.1 Hz, 0.3 Hz].
[0016] Optionally, the spectrum acquisition module is specifically: During the time period when the spectrometer is not working, two-dimensional imaging is performed on the historical light beam of the ThAr lamp introduced into the spectrometer according to a second preset frequency, and the second preset frequency is [13min, 16min].
[0017] According to the above description, considering that the air pressure inside the spectrometer changes relatively slowly, the second preset frequency for collecting the historical light beam of the ThAr lamp introduced into the spectrometer is set to [13min, 16min], which is in line with reality and ensures the objectivity of the historical spectral data of the ThAr lamp while improving the collection efficiency.
[0018] Optionally, the spectrum acquisition module is specifically: Filtering out the starting zero-point wavelength data at the starting collection time from the historical zero-point wavelength data according to the historical spectrum collection time; Performing statistics on the historical zero-point wavelength data according to a preset level to obtain the statistically analyzed historical zero-point wavelength data; Subtract the initial zero-point wavelength data from the historical zero-point wavelength data after statistics to obtain the historical wavelength drift; Among them, the preset level is [88,110].
[0019] According to the above description, the historical zero-point wavelength data are counted according to the [88,110] level. The signal-to-noise ratio in this range is high and there is no saturation, which improves the accuracy of the historical wavelength data after statistics. The historical wavelength data after statistics is subtracted from the starting zero-point wavelength data to ensure that the historical wavelength drift obtained is the historical wavelength drift over the time series.
[0020] Optionally, the model building module is specifically: Matching the historical air pressure collection time and the historical spectrum collection time according to a preset time difference to obtain a matched historical air pressure collection time and a matched historical spectrum collection time; According to the matched historical air pressure collection time and the matched historical spectrum collection time, a linear regression method is used to perform positive correlation fitting on the historical air pressure data and the historical wavelength drift; The preset time difference is less than or equal to 3 seconds.
[0021] According to the above description, when performing positive correlation fitting on historical air pressure data and historical wavelength drift according to the historical air pressure collection time and the historical spectrum collection time, the historical air pressure collection time and the historical spectrum collection time are first matched, that is, the two are time-aligned, and aligned according to a preset time difference of less than or equal to 3 seconds, taking into full consideration that at a time resolution of less than or equal to 3 seconds in the spectrometer, the temperature, humidity and air pressure can be regarded as almost unchanged, thereby ensuring the objectivity of the matching, thereby further ensuring the accuracy of the subsequent positive correlation fitting. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 A flow chart of a method for correcting wavelength drift of a spectrometer provided by an embodiment of the present invention; Figure 2 A schematic diagram of the overall process of a method for correcting wavelength drift of a spectrometer provided by an embodiment of the present invention; Figure 3 A schematic diagram of a collection product involved in an embodiment of the present invention; Figure 4 It is a statistical diagram of the pixel drift mean value of the spectral line at the same order involved in the embodiment of the present invention, and the change of the temperature, humidity and air pressure inside the insulation shell of the spectrometer; Figure 5 A first statistical diagram of changes in historical wavelength drift and historical air pressure data at the same level involved in an embodiment of the present invention; Figure 6 The second statistical diagram of the historical wavelength drift and historical air pressure data at the same level involved in the embodiment of the present invention Figure 7 A third statistical diagram of changes in historical wavelength drift and historical air pressure data at the same level involved in an embodiment of the present invention; Figure 8 A statistical diagram of changes in historical wavelength drift and historical air pressure data of level 88 involved in an embodiment of the present invention; Fig. 9 A statistical diagram of changes in historical wavelength drift and historical air pressure data of level 95 involved in an embodiment of the present invention; Fig.10 A statistical diagram of changes in historical wavelength drift and historical air pressure data of level 110 involved in an embodiment of the present invention; Fig.11 It is a superimposed statistical graph of changes in historical wavelength drift and historical air pressure data of different levels involved in the embodiment of the present invention; Fig.12 A schematic diagram of the structure of a system for correcting wavelength drift of a spectrometer provided by an embodiment of the present invention.
[0023] Description of Reference Numerals 1. A correction system for wavelength drift of a spectrometer; 2. Air pressure collection module; 3. Spectrum acquisition module; 4. Model building module; 5. Correction module. DETAILED DESCRIPTION
[0024] In order to better understand the above technical solution, exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to enable a clearer and more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.
[0025] Embodiment 1 Please refer to Figures 1 to 11 The present invention provides a method for correcting wavelength drift of a spectrometer, comprising the steps of: S1. Collect historical air pressure from a spectrometer according to a first preset frequency to obtain historical air pressure data and corresponding historical air pressure collection time; In this embodiment, the Figure 3 The acquisition product shown collects the air pressure and ThAr lamp spectrum data of the spectrometer. The air pressure sensor is installed inside the insulation shell of the spectrometer and is responsible for detecting the air pressure inside the insulation shell of the spectrometer. It is connected to the collector through communication cables. The ThAr lamp is installed outside the insulation shell of the spectrometer and introduces the light beam into the optical system of the spectrometer through optical fiber. The CCD chip is installed at the end of the optical path of the optical system for two-dimensional imaging acquisition. Figure 2 As shown, the historical air pressure of the spectrometer is collected according to the first preset frequency, wherein the first preset frequency is [0.1Hz, 0.3Hz], and the preferred first preset frequency is 0.2Hz, that is, the historical air pressure inside the insulation shell of the spectrometer is collected at 0.2Hz to obtain the historical air pressure data and the corresponding historical air pressure collection time.
[0026] S2, performing two-dimensional imaging acquisition on the historical light beam of the ThAr lamp introduced into the spectrometer according to a second preset frequency, obtaining historical spectrum data of the ThAr lamp and the corresponding historical spectrum acquisition time, performing wavelength calibration on the historical spectrum data of the ThAr lamp to obtain historical zero-point wavelength data, and performing statistics on the historical zero-point wavelength data according to a preset level to obtain a historical wavelength drift; At this time, the two-dimensional imaging acquisition of the historical light beam of the ThAr lamp introduced into the spectrometer according to the second preset frequency in step S2 includes: S21. During a period when the spectrometer is not working, two-dimensional imaging is performed on the historical light beam of the ThAr lamp introduced into the spectrometer according to a second preset frequency, where the second preset frequency is [13min, 16min].
[0027] In this embodiment, if Figure 2 As shown, during the time period when the spectrometer is not working, the historical light beam of the ThAr lamp introduced into the spectrometer is subjected to two-dimensional imaging and acquisition according to the second preset frequency, wherein the second preset frequency is [13min, 16min], and the preferred second frequency is 15min, that is, the historical light beam of the ThAr lamp introduced into the spectrometer is subjected to two-dimensional imaging and acquisition at a frequency of once every 15min, and the historical spectrum data of the ThAr lamp and the corresponding historical spectrum acquisition time are obtained, so that the wavelength of each image of the historical spectrum data of the ThAr lamp is calibrated to obtain the historical zero-point wavelength data, and the zero-point wavelength data is statistically analyzed according to the preset level to obtain the historical wavelength drift.
[0028] At this time, in step S2, the historical zero-point wavelength data is counted according to the preset level to obtain the historical wavelength drift amount, which includes: S22, filtering out the starting zero-point wavelength data of the starting collection time from the historical zero-point wavelength data according to the historical spectrum collection time; S23, performing statistics on the historical zero-point wavelength data according to a preset level to obtain the statistically analyzed historical zero-point wavelength data; S24, subtracting the initial zero point wavelength data from the historical zero point wavelength data after statistics to obtain a historical wavelength drift; Among them, the preset level is [88,110].
[0029] In this embodiment, if Figure 2 As shown, the historical zero-point wavelength data is counted according to the preset level [88,110]. Preferably, the preset level is 100, that is, the historical zero-point wavelength data is counted according to level 100 to obtain the statistical zero-point wavelength data, and the starting zero-point wavelength data at the starting collection time is filtered out from the historical zero-point wavelength data according to the historical spectrum collection time, and the starting zero-point wavelength data is subtracted from the statistical historical zero-point wavelength data to obtain the historical wavelength drift.
[0030] S3. According to the historical air pressure collection time and the historical spectrum collection time, a linear regression method is used to perform positive correlation fitting on the historical air pressure data and the historical wavelength drift to obtain a wavelength drift model: =a× +b in, Indicates the wavelength drift at the time i of historical air pressure collection, represents the historical air pressure data at the time i when the historical air pressure was collected, a represents the regression coefficient, and b represents the movement coefficient; In this embodiment, if Figure 4 As shown, Figure 4 The first sub-image from top to bottom is a statistical graph of the pixel drift mean value change of 15 spectral lines of the same order, the second sub-image is a statistical graph of the temperature change inside the insulation shell of the spectrometer, the third sub-image is a statistical graph of the humidity change inside the insulation shell of the spectrometer, and the fourth sub-image is a statistical graph of the air pressure change inside the insulation shell of the spectrometer. It can be seen that the first sub-image, i.e., the pixel drift mean value change graph of 15 spectral lines of the same order, is positively correlated with the fourth sub-image, i.e., the air pressure change statistical graph inside the insulation shell of the spectrometer, as shown in FIG. Figures 5 to 7 As shown, Figure 5 , Figure 6 and Figure 7 From top to bottom, the upper sub-graphs are all historical wavelength drift statistics, and the lower sub-graphs are all historical pressure data statistics of the internal pressure of the insulation shell of the spectrometer. It can be seen that the historical wavelength drift is positively correlated with the historical pressure data, such as Figures 8 to 10 As shown in the figure, the statistical diagram of the changes in the historical wavelength drift and historical air pressure data of different levels and Fig.11 From the superimposed statistical diagram of the changes in the historical wavelength drift and the historical air pressure data of different levels, it can be seen that the historical wavelength drift and the historical air pressure data of different levels are also positively correlated. Since the drawings in the specification need to be grayscale drawings, Figures 8 to 11 The five-pointed stars of different colors cannot be displayed clearly. If necessary, color drawings can be provided for reference later.
[0031] Therefore, if Figure 2 As shown, according to the historical air pressure collection time and the historical spectrum collection time, the historical air pressure data and the historical wavelength drift are positively correlated by linear regression method, and the regression coefficient a and the movement coefficient b are calculated by the least squares method to obtain a complete wavelength drift model.
[0032] At this time, performing positive correlation fitting on the historical air pressure data and the historical wavelength drift amount by linear regression method according to the historical air pressure collection time and the historical spectrum collection time in step S3 includes: S31, matching the historical air pressure collection time and the historical spectrum collection time according to a preset time difference to obtain a matched historical air pressure collection time and a matched historical spectrum collection time; S32, performing positive correlation fitting on the historical air pressure data and the historical wavelength drift amount by a linear regression method according to the matched historical air pressure collection time and the matched historical spectrum collection time; The preset time difference is less than or equal to 3 seconds.
[0033] In this embodiment, if Figure 2 As shown, the historical air pressure collection time and the historical spectrum collection time are matched according to a preset time difference, wherein the preset time difference is less than or equal to 3 seconds, that is, the historical air pressure collection time and the historical spectrum collection time are aligned and matched according to a time difference less than or equal to 3 seconds to obtain the matched historical air pressure collection time and historical spectrum collection time, and then the historical air pressure data and the historical wavelength drift are positively correlated by linear regression method.
[0034] S4, obtaining the real-time air pressure and real-time zero-point wavelength data collected in real time, inputting the real-time air pressure into the wavelength drift model to calculate the real-time wavelength drift, and correcting the real-time zero-point wavelength data according to the real-time wavelength drift to obtain the corrected real-time zero-point wavelength data.
[0035] In this embodiment, if Figure 2 As shown, the real-time air pressure and real-time zero-point wavelength data acquired in real time are input into the wavelength drift model to calculate the real-time wavelength drift, thereby correcting the real-time zero-point wavelength data according to the calculated real-time wavelength drift to obtain the corrected real-time zero-point wavelength data.
[0036] Embodiment 2 Please refer to Fig.12 The present invention provides a correction system 1 for wavelength drift of a spectrometer, comprising: an air pressure acquisition module 2, a spectrum acquisition module 3, a model building module 4 and a correction module 5.
[0037] The air pressure collection module 2 is used to collect the historical air pressure of the spectrometer according to the first preset frequency to obtain the historical air pressure data and the corresponding historical air pressure collection time; The spectrum acquisition module 3 is used to perform two-dimensional imaging acquisition of the historical light beam of the ThAr lamp introduced into the spectrometer according to a second preset frequency, obtain the historical spectrum data of the ThAr lamp and the corresponding historical spectrum acquisition time, perform wavelength calibration on the historical spectrum data of the ThAr lamp to obtain historical zero-point wavelength data, and perform statistics on the historical zero-point wavelength data according to a preset level to obtain a historical wavelength drift; The model building module 4 is used to perform positive correlation fitting on the historical air pressure data and the historical wavelength drift according to the historical air pressure collection time and the historical spectrum collection time by linear regression method to obtain a wavelength drift model: =a× +b in, Indicates the wavelength drift at the time i of historical air pressure collection, represents the historical air pressure data at the time i when the historical air pressure was collected, a represents the regression coefficient, and b represents the movement coefficient; The correction module 5 is used to obtain the real-time air pressure and real-time zero-point wavelength data collected in real time, input the real-time air pressure into the wavelength drift model to calculate the real-time wavelength drift, and correct the real-time zero-point wavelength data according to the real-time wavelength drift to obtain the corrected real-time zero-point wavelength data.
[0038] Specifically, the first preset frequency is [0.1 Hz, 0.3 Hz].
[0039] Specifically, the spectrum acquisition module 3 is: During the time period when the spectrometer is not working, two-dimensional imaging is performed on the historical light beam of the ThAr lamp introduced into the spectrometer according to a second preset frequency, and the second preset frequency is [13min, 16min].
[0040] Specifically, the spectrum acquisition module 3 is: Filtering out the starting zero-point wavelength data at the starting collection time from the historical zero-point wavelength data according to the historical spectrum collection time; Performing statistics on the historical zero-point wavelength data according to a preset level to obtain the statistically analyzed historical zero-point wavelength data; Subtract the initial zero-point wavelength data from the historical zero-point wavelength data after statistics to obtain the historical wavelength drift; Among them, the preset level is [88,110].
[0041] Specifically, the model building module 4 is specifically: Matching the historical air pressure collection time and the historical spectrum collection time according to a preset time difference to obtain a matched historical air pressure collection time and a matched historical spectrum collection time; According to the matched historical air pressure collection time and the matched historical spectrum collection time, a linear regression method is used to perform positive correlation fitting on the historical air pressure data and the historical wavelength drift; The preset time difference is less than or equal to 3 seconds.
[0042] Since the system / device described in the above embodiments of the present invention is a system / device used to implement the method of the above embodiments of the present invention, a person skilled in the art can understand the specific structure and deformation of the system / device based on the method described in the above embodiments of the present invention, and thus will not be described in detail here. All systems / devices used in the method of the above embodiments of the present invention belong to the scope of protection of the present invention.
[0043] It should be understood by those skilled in the art that embodiments of the present invention may be provided as methods, systems or computer program products. Therefore, the present invention may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware aspects. Moreover, the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.
[0044] The present invention is described with reference to flowcharts and / or block diagrams of methods, devices (systems) and computer program products according to embodiments of the present invention. It should be understood that each process and / or box in the flowchart and / or block diagram, as well as the combination of processes and / or boxes in the flowchart and / or block diagram, can be implemented by computer program instructions.
[0045] It should be noted that in the claims, any reference numerals placed between brackets shall not be construed as limiting the claims. The word "comprising" does not exclude the presence of components or steps not listed in the claims. The word "a" or "an" preceding a component does not exclude the presence of a plurality of such components. The invention may be implemented by means of hardware comprising several different components and by means of a suitably programmed computer. In the claims enumerating several means, several of these means may be embodied by the same hardware. The use of the words first, second, third, etc., is for convenience of expression only and does not indicate any order. These words may be understood as part of the component name.
[0046] In addition, it should be noted that, in the description of this specification, the description of the terms "one embodiment", "some embodiments", "embodiment", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.
[0047] Although the preferred embodiments of the present invention have been described, those skilled in the art may make other changes and modifications to these embodiments after knowing the basic creative concept. Therefore, the claims should be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present invention.
[0048] Obviously, those skilled in the art can make various modifications and variations to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention should also include these modifications and variations.
Claims
1. A method for correcting wavelength drift of a spectrometer, characterized in that: include: Collecting historical air pressure from the spectrometer according to a first preset frequency to obtain historical air pressure data and corresponding historical air pressure collection time; Perform two-dimensional imaging acquisition on the historical light beam of the ThAr lamp introduced into the spectrometer according to a second preset frequency to obtain historical spectrum data of the ThAr lamp and the corresponding historical spectrum acquisition time, perform wavelength calibration on the historical spectrum data of the ThAr lamp to obtain historical zero-point wavelength data, and perform statistics on the historical zero-point wavelength data according to a preset level to obtain a historical wavelength drift; According to the historical air pressure collection time and the historical spectrum collection time, a linear regression method is used to perform positive correlation fitting on the historical air pressure data and the historical wavelength drift, and a wavelength drift model is obtained: =a× +b in, Indicates the wavelength drift at the time i of historical air pressure collection, represents the historical air pressure data at the time i when the historical air pressure was collected, a represents the regression coefficient, and b represents the movement coefficient; The real-time air pressure and real-time zero-point wavelength data collected in real time are obtained, the real-time air pressure is input into the wavelength drift model to calculate the real-time wavelength drift, and the real-time zero-point wavelength data is corrected according to the real-time wavelength drift to obtain the corrected real-time zero-point wavelength data.
2. A method for correcting wavelength drift of a spectrometer as claimed in claim 1, characterized in that: The first preset frequency is [0.1 Hz, 0.3 Hz].
3. A method for correcting wavelength drift of a spectrometer as claimed in claim 1, characterized in that: The collecting of two-dimensional imaging of the historical light beam of the ThAr lamp introduced into the spectrometer according to the second preset frequency comprises: During the time period when the spectrometer is not working, two-dimensional imaging is performed on the historical light beam of the ThAr lamp introduced into the spectrometer according to a second preset frequency, and the second preset frequency is [13min, 16min].
4. A method for correcting wavelength drift of a spectrometer as claimed in claim 1, characterized in that: The statistical analysis of the historical zero-point wavelength data according to the preset levels to obtain the historical wavelength drift includes: Filtering out the starting zero-point wavelength data at the starting collection time from the historical zero-point wavelength data according to the historical spectrum collection time; Performing statistics on the historical zero-point wavelength data according to a preset level to obtain the statistically analyzed historical zero-point wavelength data; Subtract the initial zero-point wavelength data from the historical zero-point wavelength data after statistics to obtain the historical wavelength drift; Among them, the preset level is [88,110].
5. A method for correcting wavelength drift of a spectrometer as claimed in claim 1, characterized in that: The performing positive correlation fitting on the historical air pressure data and the historical wavelength drift amount by a linear regression method according to the historical air pressure collection time and the historical spectrum collection time comprises: Matching the historical air pressure collection time and the historical spectrum collection time according to a preset time difference to obtain a matched historical air pressure collection time and a matched historical spectrum collection time; According to the matched historical air pressure collection time and the matched historical spectrum collection time, a linear regression method is used to perform positive correlation fitting on the historical air pressure data and the historical wavelength drift; The preset time difference is less than or equal to 3 seconds.
6. A correction system for wavelength drift of a spectrometer, characterized in that: include: An air pressure collection module, used to collect historical air pressure of the spectrometer according to a first preset frequency, and obtain historical air pressure data and corresponding historical air pressure collection time; a spectrum acquisition module, for performing two-dimensional imaging acquisition of the historical light beam of the ThAr lamp introduced into the spectrometer according to a second preset frequency, obtaining historical spectrum data of the ThAr lamp and the corresponding historical spectrum acquisition time, performing wavelength calibration on the historical spectrum data of the ThAr lamp to obtain historical zero-point wavelength data, and performing statistics on the historical zero-point wavelength data according to a preset level to obtain a historical wavelength drift; A model building module is used to perform positive correlation fitting on the historical air pressure data and the historical wavelength drift according to the historical air pressure collection time and the historical spectrum collection time by linear regression method to obtain a wavelength drift model: =a× +b in, Indicates the wavelength drift at the time i of historical air pressure collection, represents the historical air pressure data at the time i when the historical air pressure was collected, a represents the regression coefficient, and b represents the movement coefficient; The correction module is used to obtain the real-time air pressure and real-time zero-point wavelength data collected in real time, input the real-time air pressure into the wavelength drift model to calculate the real-time wavelength drift, and correct the real-time zero-point wavelength data according to the real-time wavelength drift to obtain the corrected real-time zero-point wavelength data.
7. A spectrometer wavelength drift correction system as claimed in claim 6, characterized in that: The first preset frequency is [0.1 Hz, 0.3 Hz].
8. A spectrometer wavelength drift correction system as claimed in claim 6, characterized in that: The spectrum acquisition module is specifically: During the time period when the spectrometer is not working, two-dimensional imaging is performed on the historical light beam of the ThAr lamp introduced into the spectrometer according to a second preset frequency, and the second preset frequency is [13min, 16min].
9. A spectrometer wavelength drift correction system as claimed in claim 6, characterized in that: The spectrum acquisition module is specifically: Filtering out the starting zero-point wavelength data at the starting collection time from the historical zero-point wavelength data according to the historical spectrum collection time; Performing statistics on the historical zero-point wavelength data according to a preset level to obtain the statistically analyzed historical zero-point wavelength data; Subtract the initial zero-point wavelength data from the historical zero-point wavelength data after statistics to obtain the historical wavelength drift; Among them, the preset level is [88,110].
10. A spectrometer wavelength drift correction system as claimed in claim 6, characterized in that: The model building module is specifically: Matching the historical air pressure collection time and the historical spectrum collection time according to a preset time difference to obtain a matched historical air pressure collection time and a matched historical spectrum collection time; According to the matched historical air pressure collection time and the matched historical spectrum collection time, a linear regression method is used to perform positive correlation fitting on the historical air pressure data and the historical wavelength drift; The preset time difference is less than or equal to 3 seconds.
Citation Information
Patent Citations
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