Multi-stage low-temperature plasma waste gas treatment equipment

Abstract

The invention relates to multi-stage low-temperature plasma waste gas treatment equipment which comprises a main low-temperature plasma reactor, the main low-temperature plasma reactor comprises a front base and a rear base, an outer protection layer and an inner barrier layer are arranged between the front base and the rear base, the rear base is provided with a plurality of gas outlet branch pipes, and the gas outlet branch pipes are converged to be provided with a gas outlet header pipe. The gas outlet branch pipe comprises a circulation monitoring section provided with a pollutant sensor, the gas outlet branch pipe is provided with a secondary treatment section in parallel, the secondary treatment section is provided with an auxiliary waste gas treatment device, and control valves are arranged at the front end and the rear end of the gas outlet branch pipe respectively. By adopting the scheme, the invention provides the multi-stage low-temperature plasma waste gas treatment equipment capable of accurately monitoring the concentration of pollutants and completely treating the pollutants.

Description

Technical Field

[0001] The invention relates to waste gas treatment equipment, in particular to multi-stage low-temperature plasma waste gas treatment equipment. Background Art

[0002] In the production process of various industries, waste gas is inevitably generated. The waste gas often contains pollutants (volatile organic compounds, odorous gases, other harmful gases, etc.). For the purpose of environmental protection, human health, sustainable development, etc., the toxic and harmful gases in the waste gas need to be treated harmlessly by waste gas treatment equipment before being discharged into the outside world.

[0003] With the technological advancement of waste gas treatment equipment, low-temperature plasma reactors have been developed. They mainly use high-energy electrons, ions, free radicals and other active particles in low-temperature plasma to react with pollutant molecules in the waste gas to decompose and react them, thereby achieving the purpose of purification. Due to its high efficiency, environmental protection, and wide practicality, it is widely used in all walks of life.

[0004] The above-mentioned low-temperature plasma reactor has the following disadvantages: since the total amount of exhaust gas flowing through the low-temperature plasma reactor is large, the range that the pollutant sensor can monitor is limited, resulting in the possibility that the discharged exhaust gas still has excessive pollutant content in some areas. The above possibility can only be reduced by increasing the power and processing time of the low-temperature plasma reactor, which invisibly increases energy waste and makes the equipment structure more bloated. Summary of the invention

[0005] In view of the deficiencies in the prior art, the object of the present invention is to provide a multi-stage low-temperature plasma waste gas treatment device that can accurately monitor the concentration of pollutants and completely treat the pollutants.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical scheme: comprising a main low-temperature plasma reactor, the main low-temperature plasma reactor comprising a front base and a rear base respectively located at the front and rear ends, an annular outer protective layer and an inner barrier layer are sequentially arranged between the front base and the rear base from the outside to the inside, an electrode compartment for installing electrodes is formed between the outer protective layer and the inner barrier layer, the space inside the inner barrier layer is used as a waste gas treatment chamber, the front base is provided with an air inlet pipe connected to the waste gas source and passing the waste gas into the waste gas treatment chamber, the rear base is provided with a plurality of air outlet branch pipes for the treated waste gas to flow out of the waste gas treatment chamber, each of the air outlet branch pipes An outlet main pipe is arranged at the other end of the exhaust gas treatment chamber, and the outlet branch pipe includes a circulation monitoring section provided with a pollutant sensor, and the outlet branch pipe is parallelly provided with a secondary treatment section whose front and rear ends are respectively connected to the corresponding ends of the circulation monitoring section, and the secondary treatment section is provided with an auxiliary exhaust gas treatment device, and control valves are respectively arranged at the front and rear ends of the outlet branch pipe, and when the pollutant concentration detected by the pollutant sensor exceeds the set value, each control valve is cut off, and the exhaust gas circulates between the circulation monitoring section and the secondary treatment section; when the pollutant concentration detected by the pollutant sensor is lower than the set value, each control valve is opened to allow the exhaust gas to flow to the outlet main pipe.

[0007] By adopting the above technical solution, the exhaust gas treated by the main low-temperature plasma reactor will flow from the exhaust gas treatment chamber to the exhaust main pipe through multiple exhaust branch pipes. Once the pollution sensor of one of the exhaust branch pipes detects that the pollutant concentration exceeds the set value, the exhaust branch pipe will be immediately cut off from the exhaust gas treatment chamber to the exhaust main pipe. The blocked exhaust gas will circulate through the circulation monitoring section and the secondary treatment section on the exhaust branch pipe. The pollutants will be treated by the auxiliary exhaust gas treatment device of the secondary treatment section until the pollutant concentration is lower than the set value. The control valve is opened to restore the exhaust function of the exhaust branch pipe. The above structure The advantages are as follows: ① Compared with the exhaust method of a single outlet pipe, the exhaust method with multiple outlet pipes reduces the cross-section of the exhaust channel, so that the monitoring range of the pollutant sensor can completely cover all exhaust gases, improve monitoring accuracy, and detect pollutant leakage in time; ② When pollutant leakage is found, the outlet pipe where it is located can carry out emergency treatment in time, and the treatment is more efficient and intelligent; ③ When dealing with leaked pollutants, only a small amount of gas flow rate is reduced, and the gas outlet will not be completely stopped, ensuring continuous, stable and smooth operation of the equipment; ④ The main low-temperature plasma reactor does not need to be operated for too long at overpower, which greatly saves resources.

[0008] The present invention is further configured as follows: the secondary processing section is provided with an accelerating air pump.

[0009] By adopting the above technical solution, the air pump is accelerated to increase the number of times the exhaust gas circulates through the auxiliary exhaust gas treatment device per unit time, quickly reducing the pollutant concentration in the outlet pipe, thereby shortening the cut-off time of the control valve, and quickly restoring the outlet function, thereby ensuring stable operation of the equipment.

[0010] The present invention is further configured as follows: the number of the gas outlet branch pipes is four and they are arranged equidistantly along the circumferential direction.

[0011] By adopting the above technical solution, the preferred number of outlet branch pipes is four and they are arranged equidistantly along the circumference. This meets the precise monitoring requirements of the pollutant sensor and the exhaust gas can flow out of the exhaust gas treatment chamber evenly and smoothly, thereby ensuring stable operation of the equipment.

[0012] The present invention is further configured such that the flow rate of the air inlet pipe is less than the sum of the flow rates of the air outlet branch pipes.

[0013] By adopting the above technical solution, after one of the gas outlet branch pipes is cut off, the remaining gas outlet branch pipes can still meet the flow rate for smooth discharge of exhaust gas, thereby ensuring stable operation of the equipment.

[0014] The present invention is further configured as follows: the exhaust gas treatment chamber is provided with a front guide ring surrounding the air inlet pipe, the exhaust gas treatment chamber is provided with a rear guide ring surrounding all the air outlet pipes and having the same shape as the front guide ring, the space between the front guide ring and the inner barrier layer serves as a front guide chamber, the front base is provided with a front air supply device that pressurizes the working gas and delivers it to various locations around the front guide chamber, the space between the rear guide ring and the inner barrier layer serves as a rear guide chamber, and the rear base is provided with a rear air supply device that pressurizes the working gas and delivers it to various locations around the rear guide chamber.

[0015] By adopting the above technical solution, the working gas is a gas that is ionized or excited by a high-energy electric field or microwave in a low-temperature plasma reactor to form a plasma, and the plasma is used to treat pollutants in the exhaust gas, which is generally an inert gas. In this structure, the exhaust gas treatment chamber is always in a flow state, so the working gas needs to be replenished at all times. Moreover, since the pollutants in the exhaust gas may react with the inner barrier layer and affect the stability of the generated electric field, in this structure, on the one hand, the working gas is pressurized, and on the other hand, the flow direction of the working gas is guided by the front guide chamber and the rear guide chamber, so that the working gas sprayed from the front and rear ends turns to the center after reaching the middle of the exhaust gas treatment chamber, thereby forming a protective area around the inner barrier layer, greatly reducing the possibility of pollutants contacting and reacting with the inner barrier layer, and then the electric field can be kept stable for a long time, ensuring the exhaust gas treatment effect and reducing maintenance costs. At the same time, sufficient working gas can be provided to the middle of the exhaust gas treatment chamber at all times for treating pollutants, further ensuring the treatment effect. In addition, the exhaust gas flow rate flowing through the middle of the exhaust gas treatment chamber can be reduced to extend the treatment time.

[0016] The present invention is further configured as follows: the front air supply device includes a front air supply seat arranged on the front base and surrounding the air intake pipe, an annular air supply cavity is arranged in the front air supply seat, the front air supply seat is provided with an air supply pipe connecting the working gas source with the air supply cavity, the air supply pipe is provided with a front pressurized air pump, the air supply cavity is circumferentially provided with a plurality of pressure-stabilizing channels connected with the front guide chamber, and a pressure-stabilizing mechanism is provided in the pressure-stabilizing channel to make the pressure of the working gas ejected from each pressure-stabilizing channel consistent.

[0017] By adopting the above technical solution, in order to ensure that the working gas sent into the annular air supply cavity still maintains a similar air pressure when it reaches various places around the front guide chamber, a pressure stabilizing mechanism for adjusting the air pressure is added. The working gas enters the front guide chamber only after the pressure is stabilized, thereby ensuring the protection effect at various places around the protection area.

[0018] The present invention is further configured as follows: the pressure-stabilizing channel includes a first section and a second section in sequence along a direction away from the front guide chamber, the first section is cylindrical, the second section is truncated cone-shaped with a large end connected to the first section, the first section is circumferentially provided with a mounting ring, the pressure-stabilizing mechanism includes a pressure-stabilizing steel ball and a pressure-stabilizing spring, the pressure-stabilizing steel ball is located in the second section and is sealed with a side wall of the second section, the pressure-stabilizing spring is compressed between the pressure-stabilizing steel ball and the mounting ring and resets the pressure-stabilizing steel ball to the second section.

[0019] By adopting the above technical solution, the working gas in the air delivery chamber enters the pressure stabilizing channel and the air pressure gradually increases with the increase of working gas until the pressure stabilizing spring is compressed and the sealing cooperation between the pressure stabilizing steel ball and the second section is released before it is sprayed into the front guide chamber, thereby achieving a better pressure stabilizing effect.

[0020] The present invention is further configured as follows: the rear air supply device includes a rear air supply seat arranged on a rear base, a main pipeline connected to a working gas source is arranged in the middle of the rear of the rear air supply seat, the main pipeline is provided with a rear pressurizing air pump for pressurizing the working gas, and a plurality of branch channels connected to the main pipeline and extending to the rear guide chamber in all directions are arranged in the rear air supply seat, the position where the branch channel is connected to the rear guide chamber serves as an air supply port, and the air supply ports are arranged equidistantly along the circumference of the rear guide chamber.

[0021] By adopting the above technical solution, the working gas enters the rear base from the middle after being pressurized by the pressurized air pump of the main pipeline, and then diffuses to the surroundings through the branch channel until it reaches the air supply port and is sprayed into the rear guide chamber, making the air pressure in the rear guide chamber more uniform, thereby ensuring the protection effect in all parts of the protection area. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A three-dimensional structure of a specific embodiment of the present invention Figure 1 ;

[0023] Figure 2 A three-dimensional structure of a specific embodiment of the present invention Figure 2 ;

[0024] Figure 3 A cross-sectional view of a specific embodiment of the present invention;

[0025] Figure 4 for Figure 1 A magnified view of middle;

[0026] Figure 5 for Figure 2 Enlarged view of middle B;

[0027] Figure 6 for Figure 3 Enlarged view of middle C;

[0028] Figure 7 for Figure 3 Enlarged view of D in the middle. DETAILED DESCRIPTION

[0029] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0031] like Figure 1 — Figure 7As shown, the present invention discloses a multi-stage low-temperature plasma waste gas treatment equipment, including a main low-temperature plasma reactor 1, the main low-temperature plasma reactor 1 includes a front base 11 and a rear base 12 respectively located at the front and rear ends, and an annular outer protective layer 13 and an inner barrier layer 14 are sequentially arranged between the front base 11 and the rear base 12 from the outside to the inside, and an electrode compartment 15 for installing an electrode 151 is formed between the outer protective layer 13 and the inner barrier layer 14. The main low-temperature plasma reactor 1 also includes a power supply, a controller, etc., which are not shown in the drawings and do not affect the understanding of the structure. The space inside the inner barrier layer 14 is used as a waste gas treatment chamber 16, and the front base 11 is provided with an air intake pipe 111 connected to the waste gas source and passing the waste gas into the waste gas treatment chamber 16, and the rear base 12 is provided with a plurality of supply pipes 111 for the waste gas treatment chamber 16. The treated exhaust gas flows out of the exhaust gas treatment chamber 16 through the exhaust branch pipe 21. The other end of each exhaust branch pipe 21 connected to the exhaust gas treatment chamber 16 is converged to form an exhaust main pipe 2. The exhaust branch pipe 21 includes a circulation monitoring section 211 provided with a pollutant sensor 212. The exhaust branch pipe 21 is parallelly provided with a secondary treatment section 213 whose front and rear ends are respectively connected to the corresponding ends of the circulation monitoring section 211. The secondary treatment section 213 is provided with an auxiliary exhaust gas treatment device 214. The auxiliary exhaust gas treatment device 214 can adopt a low-temperature plasma reactor or other traditional waste treatment devices (activated carbon adsorption device, etc.). Control valves 215 are respectively provided at the front and rear ends of the exhaust branch pipe 21. When the pollutant concentration detected by the pollutant sensor 212 exceeds the set value, each control valve 215 is cut off, and the exhaust gas is discharged at a certain temperature. The waste gas circulates between the circulation monitoring section 211 and the secondary treatment section 213; when the pollutant concentration detected by the pollutant sensor 212 is lower than the set value, each control valve 215 opens to allow the waste gas to flow to the gas outlet main pipe 2. The waste gas treated by the main low-temperature plasma reactor 1 will flow from the waste gas treatment chamber 16 to the gas outlet main pipe 2 through multiple gas outlet branch pipes 21. Once the pollution sensor of one of the gas outlet branch pipes 21 detects that the pollutant concentration exceeds the set value, the gas outlet branch pipe 21 will be immediately cut off from the gas path from the waste gas treatment chamber 16 to the gas outlet main pipe 2. The blocked waste gas will circulate through the circulation monitoring section 211 and the secondary treatment section 213 on the gas outlet branch pipe 21, and the pollutants will be treated by the auxiliary waste gas treatment device 214 of the secondary treatment section 213. , until the pollutant concentration is lower than the set value, the control valve 215 is opened to restore the gas outlet function of the gas outlet pipe 21. The above structure has the following advantages: ① Compared with the exhaust method of a single gas outlet pipe, the exhaust method of multiple gas outlet pipes 21 reduces the cross-section of the exhaust channel, so that the monitoring range of the pollutant sensor 212 can completely cover all exhaust gases, improve monitoring accuracy, and timely detect pollutant leakage; ② When a pollutant leakage is found, the gas outlet pipe 21 where it is located can promptly handle it in an emergency, and the treatment is more efficient and intelligent; ③ When dealing with leaked pollutants, only a small amount of gas outlet flow is reduced, and the gas outlet will not be completely stopped, ensuring continuous, stable and smooth operation of the equipment; ④ The main low-temperature plasma reactor 1 does not need to be operated for a long time at overpower, which greatly saves resources.

[0032] The secondary treatment section 213 is provided with an accelerating air pump 216, which increases the number of times the exhaust gas circulates through the auxiliary exhaust gas treatment device 214 per unit time, quickly reduces the pollutant concentration of the exhaust branch pipe 21, and further shortens the cut-off time of the control valve 215, quickly restores the exhaust function, and thus ensures stable operation of the equipment.

[0033] There are four gas outlet branch pipes 21 and they are arranged equidistantly along the circumference. The preferred layout of four gas outlet branch pipes 21 and they are arranged equidistantly along the circumference meets the precise monitoring requirements of the pollutant sensor 212, while the exhaust gas can flow out of the exhaust gas treatment chamber 16 evenly and smoothly, thereby ensuring stable operation of the equipment.

[0034] The flow rate of the air inlet pipe 111 is less than the sum of the flow rates of the air outlet branch pipes 21 . After one of the air outlet branch pipes 21 is cut off, the remaining air outlet branch pipes 21 still meet the flow rate for smooth exhaust gas discharge, thereby ensuring stable operation of the equipment.

[0035] The exhaust gas treatment chamber 16 is provided with a front guide ring 161 surrounding the air inlet pipe 111, and the exhaust gas treatment chamber 16 is provided with a rear guide ring 162 surrounding all the outlet branch pipes 21 and having the same shape as the front guide ring 161. The space between the front guide ring 161 and the inner barrier layer 14 is used as a front guide chamber 163. The front base 11 is provided with a front air supply device for pressurizing the working gas and sending it to various places around the front guide chamber 163. The space between the rear guide ring 162 and the inner barrier layer 14 is used as a rear guide chamber 164. The rear base 12 is provided with a rear air supply device for pressurizing the working gas and sending it to various places around the rear guide chamber 164. The working gas is a gas that is ionized or excited by a high-energy electric field or microwave in a low-temperature plasma reactor to form a plasma. The plasma is used to treat pollutants in the exhaust gas, which is generally an inert gas. In this structure, the exhaust gas treatment chamber 16 is always in a flow state. In the open state, it is necessary to replenish the working gas all the time, and since the pollutants in the exhaust gas may react with the inner barrier layer 14 and affect the stability of the generated electric field, in this structure, on the one hand, the working gas is pressurized, and on the other hand, the front guide chamber 163 and the rear guide chamber 164 guide the flow direction of the working gas, so that the working gas sprayed in from the front and rear ends will turn to the center after reaching the middle of the exhaust gas treatment chamber 16, thereby forming a protective area on the inner periphery of the inner barrier layer 14, greatly reducing the possibility of pollutants contacting and reacting with the inner barrier layer 14, so that the electric field can be maintained stably for a long time, ensuring the exhaust gas treatment effect and reducing maintenance costs. At the same time, it can also provide sufficient working gas for the middle of the exhaust gas treatment chamber 16 to treat pollutants at all times, further ensuring the treatment effect. In addition, it can also reduce the flow rate of exhaust gas flowing through the middle of the exhaust gas treatment chamber 16 and extend the treatment time.

[0036] The front air supply device includes a front air supply seat 17 which is arranged on the front base 11 and surrounds the air inlet pipe 111. An annular air supply cavity 171 is arranged in the front air supply seat 17. The front air supply seat 17 is provided with an air supply pipe 172 which connects the working gas source with the air supply cavity 171. The air supply pipe 172 is provided with a front pressurized air pump 173. The air supply cavity 171 is circumferentially provided with a plurality of pressure-stabilizing channels 174 which are connected with the front guide chamber 163. A pressure-stabilizing mechanism which makes the air pressure of the working gas ejected from each pressure-stabilizing channel 174 consistent is arranged in the pressure-stabilizing channel 174. In order to ensure that the working gas sent into the annular air supply cavity 171 still maintains a similar air pressure when it reaches various circumferential locations of the front guide chamber 163, a pressure-stabilizing mechanism for adjusting the air pressure is additionally provided. The working gas enters the front guide chamber 163 only after the pressure is stabilized, thereby ensuring the protection effect at various circumferential locations of the protection area.

[0037] The pressure stabilizing channel 174 includes a first section 1741 and a second section 1742 in a direction away from the front guide chamber 163. The first section 1741 is cylindrical, and the second section 1742 is a truncated cone whose large end is connected to the first section 1741. The first section 1741 is provided with a mounting ring 1743 along the circumferential direction. The pressure stabilizing mechanism includes a pressure stabilizing steel ball 1744 and a pressure stabilizing spring 1745. The pressure stabilizing steel ball 1744 is located in the second section 1742 and connected to the side of the second section 1742. The wall seal cooperates, the pressure-stabilizing spring 1745 is compressed between the pressure-stabilizing steel ball 1744 and the mounting ring 1743, and the pressure-stabilizing steel ball 1744 is reset to the second section 1742, and the working gas of the air supply chamber 171 enters the pressure-stabilizing channel 174 and the air pressure gradually increases with the increase of the working gas until the pressure-stabilizing spring 1745 is compressed. The sealing cooperation between the pressure-stabilizing steel ball 1744 and the second section 1742 is released and then it is sprayed into the front guide chamber 163, so that the pressure-stabilizing effect is better.

[0038] The rear air supply device includes a rear air supply seat 18 arranged on the rear base 12, and a main pipeline 181 connected to the working gas source is arranged in the middle of the rear of the rear air supply seat 18, and the main pipeline 181 is provided with a rear pressurizing air pump 182 for pressurizing the working gas. A plurality of branch channels 183 connected with the main pipeline 181 and extending to the rear guide chamber 164 in all directions are arranged in the rear air supply seat 18, and the positions where the branch channels 183 are connected with the rear guide chamber 164 serve as air supply ports 1831, and the air supply ports 1831 are arranged equidistantly along the circumference of the rear guide chamber 164. After being pressurized by the pressurized air pump of the main pipeline 181, the working gas enters the rear base 12 from the middle, and then diffuses to the surroundings through the branch channels 183 until it reaches the air supply port 1831 and is sprayed into the rear guide chamber 164, so that the air pressure at various locations around the rear guide chamber 164 is more uniform, thereby ensuring the protection effect at various locations around the protection area.

Claims

1. A multi-stage low-temperature plasma waste gas treatment device, comprising a main low-temperature plasma reactor, the main low-temperature plasma reactor comprising a front base and a rear base respectively located at the front and rear ends, an annular outer protective layer and an inner barrier layer are sequentially arranged between the front base and the rear base from the outside to the inside, an electrode compartment for installing electrodes is formed between the outer protective layer and the inner barrier layer, the space inside the inner barrier layer is used as a waste gas treatment chamber, the front base is provided with an air intake pipe connected to the waste gas source and passing the waste gas into the waste gas treatment chamber, characterized in that: The rear base is provided with a plurality of gas outlet branch pipes for the treated exhaust gas to flow out of the exhaust gas treatment chamber, and each of the gas outlet branch pipes is connected to the other end of the exhaust gas treatment chamber and converges to form a gas outlet main pipe, the gas outlet branch pipe includes a circulation monitoring section provided with a pollutant sensor, and the gas outlet branch pipe is parallelly provided with a secondary treatment section whose front and rear ends are respectively connected to the corresponding ends of the circulation monitoring section, and the secondary treatment section is provided with an auxiliary exhaust gas treatment device, and control valves are respectively provided at the front and rear ends of the gas outlet branch pipe, and when the pollutant concentration detected by the pollutant sensor exceeds the set value, each control valve is cut off, and the exhaust gas circulates between the circulation monitoring section and the secondary treatment section; when the pollutant concentration detected by the pollutant sensor is lower than the set value, each control valve is opened to allow the exhaust gas to flow to the gas outlet main pipe.

2. The multi-stage low-temperature plasma waste gas treatment equipment according to claim 1, characterized in that: The secondary processing section is provided with an accelerating air pump.

3. The multi-stage low-temperature plasma waste gas treatment equipment according to claim 1, characterized in that: The number of the gas outlet branch pipes is four and they are arranged equidistantly along the circumferential direction.

4. The multi-stage low-temperature plasma waste gas treatment equipment according to claim 1, characterized in that: The flow rate of the air inlet pipeline is less than the sum of the flow rates of the air outlet branch pipes.

5. The multi-stage low-temperature plasma waste gas treatment equipment according to claim 1, characterized in that: The exhaust gas treatment chamber is provided with a front guide ring surrounding the air inlet pipe, and the exhaust gas treatment chamber is provided with a rear guide ring surrounding all the air outlet pipes and having the same shape as the front guide ring. The space between the front guide ring and the inner barrier layer serves as a front guide chamber, and the front base is provided with a front air supply device that pressurizes the working gas and delivers it to various locations around the front guide chamber. The space between the rear guide ring and the inner barrier layer serves as a rear guide chamber, and the rear base is provided with a rear air supply device that pressurizes the working gas and delivers it to various locations around the rear guide chamber.

6. The multi-stage low-temperature plasma waste gas treatment equipment according to claim 5, characterized in that: The front air supply device includes a front air supply seat arranged on the front base and surrounding the air intake pipe, an annular air supply cavity is arranged in the front air supply seat, an air supply pipe connecting the working gas source with the air supply cavity is arranged in the front air supply seat, a front pressurized air pump is arranged in the air supply pipe, a plurality of pressure-stabilizing channels connected with the front guide chamber are arranged along the circumferential direction of the air supply cavity, and a pressure-stabilizing mechanism is arranged in the pressure-stabilizing channel to make the pressure of the working gas ejected from each pressure-stabilizing channel consistent.

7. The multi-stage low-temperature plasma waste gas treatment equipment according to claim 6, characterized in that: The pressure-stabilizing channel includes a first section and a second section in sequence along the direction away from the front guide chamber, the first section is cylindrical, the second section is truncated cone-shaped with the large end connected to the first section, the first section is circumferentially provided with a mounting ring, the pressure-stabilizing mechanism includes a pressure-stabilizing steel ball and a pressure-stabilizing spring, the pressure-stabilizing steel ball is located in the second section and is sealed with the side wall of the second section, the pressure-stabilizing spring is compressed between the pressure-stabilizing steel ball and the mounting ring and resets the pressure-stabilizing steel ball to the second section.

8. The multi-stage low-temperature plasma waste gas treatment equipment according to claim 5, characterized in that: The rear air supply device includes a rear air supply seat arranged on the rear base, a main pipeline connected to the working gas source is arranged in the middle of the rear of the rear air supply seat, the main pipeline is provided with a rear pressurizing air pump for pressurizing the working gas, and a plurality of branch channels connected to the main pipeline and extending to the rear guide chamber in all directions are arranged in the rear air supply seat, the position where the branch channel is connected to the rear guide chamber serves as an air supply port, and the air supply ports are arranged equidistantly along the circumference of the rear guide chamber.

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