A control system and method applicable to parallel pipelines

Abstract

The present invention discloses a control system and method applicable to a parallel pipeline, relating to the technical field of pipeline transportation, including: a main pipeline, one end of the main pipeline is connected to a fluid source device, and the other end branches out multiple branch pipelines; a plurality of fluid control devices, each fluid control device is arranged on a corresponding branch pipeline, the fluid control device includes a first on-off part, a temporary storage cavity and a second on-off part that are connected in sequence, the first on-off part is used to control the on-off of the fluid upstream of the branch pipeline, an adjustment part is arranged in the temporary storage cavity, the adjustment part is used to adjust the internal volume of the temporary storage cavity, and the second on-off part is used to control the on-off of the fluid in the temporary storage cavity; a controller, which is used to control the actions of the first on-off part, the adjustment part and the second on-off part. The present invention can reduce the sudden change of fluid flow rate generated by the traditional semiconductor glue pump when used in a parallel pipeline, improve the discharge volume accuracy, enable the discharge volume accuracy of each pipeline in the parallel pipeline to meet the actual requirements, and reduce the cost of the equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of pipeline transportation, and particularly to a control system and method applicable to parallel pipelines. Background Art

[0002] Since the discharge volume of the liquid is determined by the power source, i.e., the pump, in order to ensure the flow accuracy at the end of the pipeline, i.e., the discharge volume accuracy, it is necessary to streamline the pipeline structure. Generally speaking, a typical pipeline that can ensure flow accuracy includes a pump, a on-off and back-suction valve, and various control elements. If, for certain practical functions, control elements such as a pressure stabilizing valve and a flow control valve need to be added to the pipeline. However, even with the use of control elements, the flow rate mutation in the pipeline cannot be completely eliminated, and the more control elements there are in the pipeline, the greater the redundancy, which will lead to a lower discharge volume accuracy at the end of the pipeline. As a result, the discharge volume at the end of the pipeline (nozzle) has a worse accuracy than the pump accuracy at the front end of the pipeline, limiting the applicable scenarios. Therefore, if a high discharge volume accuracy is desired, the typical pipeline described above is usually used in the application scenario.

[0003] However, although the setting of the typical pipeline can eliminate several factors that have a negative effect on the discharge volume accuracy, the actual application scenario is often a pipeline system composed of multiple pipelines rather than a single one. In this scenario, usually multiple single typical pipelines are replicated. That is, multiple single typical pipelines require multiple pumps. Considering that the cost of the pump accounts for about 80% or more of the total cost of a typical pipeline, the total cost of the multiple pipeline system is too high. Of course, in the prior art, there is also a method of using one pump in combination with an external controller to control parallel pipelines, that is, one pump controls multiple branch pipelines. However, if one pump is shared by two or more pipelines, when one pipeline is in circulation, the other pipelines must be kept closed to reduce the disturbance. And if the on-off times of multiple pipelines overlap, in the case of extremely short time conditions, due to the flow rate mutation in the pipeline, the discharge volume accuracy does not meet the use requirements.

[0004] Therefore, it is necessary to provide a control system and method applicable to parallel pipelines to solve the above problems existing in the prior art. Summary of the Invention

[0005] The purpose of the present invention is to provide a control system and method applicable to parallel pipelines, which can reduce the fluid flow rate mutation in the parallel pipelines, improve the discharge volume accuracy, enable the discharge volume accuracy of each pipeline in the parallel pipelines to meet the actual use requirements, and reduce the equipment cost.

[0006] To achieve the above purpose, the technical solution of the present invention is as follows:

[0007] In a first aspect, the present invention provides a control system applicable to parallel pipelines, including:

[0008] A fluid source device for supplying fluid;

[0009] A main pipeline, one end of the main pipeline is connected to the fluid source device, and the other end branches out into multiple branch pipelines;

[0010] A plurality of fluid control devices are arranged on the corresponding branch pipelines. The fluid control device includes a first on-off part, a temporary storage chamber, and a second on-off part that can communicate with each other in sequence. The first on-off part is used to control the on-off of the fluid upstream of the branch pipeline. An adjustment part is arranged in the temporary storage chamber, and the adjustment part is used to adjust the internal volume of the temporary storage chamber. The second on-off part is used to control the on-off of the fluid in the temporary storage chamber;

[0011] A controller is respectively connected to the first on-off part, the adjustment part, and the second on-off part, and is used to control the actions of the first on-off part, the adjustment part, and the second on-off part.

[0012] Further, the fluid control device further includes a third on-off part and a circulation part. The third on-off part is used to control the on-off between the temporary storage chamber and the circulation part; one end of the circulation part is connected to the third on-off part, and the other end is connected to the upstream of the main pipeline.

[0013] Further, it further includes a plurality of nozzle parts. The branch pipeline has an outlet, and each nozzle part is arranged at the corresponding outlet.

[0014] Further, it further includes a plurality of flow meters. Each flow meter is arranged on the corresponding branch pipeline and between the fluid control device and the nozzle part, and is used to measure the flow rate of the fluid flowing out of the fluid control device.

[0015] Further, the fluid source device includes a pump. The fluid is transported to the main pipeline through the pump, and then transported from the main pipeline to the fluid control devices on each branch pipeline. The fluid transportation is controlled by the fluid control device.

[0016] Further, the adjustment part includes a first connecting piece, a second connecting piece, and a deformable piece. Both the first connecting piece and the second connecting piece are connected to the deformable piece. When the deformable piece moves along the extending direction of the temporary storage chamber, the volume of the temporary storage chamber is changed.

[0017] In a second aspect, the present invention also provides a control method applicable to a parallel pipeline, including:

[0018] Setting a preset discharge amount of the fluid;

[0019] A fluid is transported to a main pipeline by a fluid source device, and is transported from the main pipeline to each branch, and the output of the fluid is controlled by a fluid control device;

[0020] Obtain the state of the fluid control device, which includes a first state and a second state;

[0021] If the fluid control device is in the first state, the controller controls the fluid control device to perform a first action to fill the fluid into a temporary storage cavity of the fluid control device;

[0022] If the fluid control device is in the second state, the controller controls the fluid control device to perform a second action to discharge the fluid in the temporary storage cavity and / or suck back the fluid downstream of the branch to the temporary storage cavity.

[0023] Further, the first state is that the inside of the temporary storage cavity is empty; the second state is that the inside of the temporary storage cavity is full.

[0024] Further, the first action is: the controller controls a first on-off part of the fluid control device to be in a flowing state, a second on-off part of the fluid control device to be in a cut-off state, and controls the internal volume of the temporary storage cavity of the fluid control device to increase, so that the fluid in the main pipeline is filled into the temporary storage cavity from the upstream of the branch.

[0025] Further, the second action is: the controller controls the first on-off part of the fluid control device to be in a cut-off state, the second on-off part of the fluid control device to be in a flowing state, and controls the internal volume of the temporary storage cavity of the fluid control device to decrease, so that the fluid in the temporary storage cavity flows out from the downstream of the branch through the second on-off part.

[0026] Further, after the fluid in the temporary storage cavity flows out from the downstream of the branch through the second on-off part, the controller controls the internal volume of the temporary storage cavity to increase, so that the fluid downstream of the branch is sucked back into the temporary storage cavity;

[0027] Further, it further includes: obtaining the state of the fluid control device, and further including a third state; if the fluid control device is in the third state, the controller controls the fluid control device to perform a third action to make the fluid circulate in the main pipeline and the branch; the third state is that the volume of the temporary storage cavity changes reciprocally; the third action is that the controller controls the first on-off part of the fluid control device to be in a cut-off state, the second on-off part of the fluid control device to be in a cut-off state, the third on-off part to be in a flowing state and controls the adjustment part to reciprocally change the volume of the temporary storage cavity.

[0028] The beneficial effects of the control system applicable to parallel pipelines provided by the present invention are as follows: By setting corresponding fluid control devices on each branch pipeline, only one pump or no pump needs to be configured on the main pipeline. Compared with the prior art, the equipment cost is greatly reduced, and the space occupation is reduced. At the same time, by controlling the first on-off part, the second on-off part and the adjustment part of the fluid control device through the controller, there is no need to set multiple control elements, avoiding the redundancy caused by multiple control elements, ensuring that the discharge accuracy of the fluid delivered by the main pipeline to each branch through the branch outflow reaches the preset requirement, and avoiding the flow mutation on each branch. In addition, compared with the prior art, the present application can reduce the fluid flow mutation generated by the traditional semiconductor glue pump when used in parallel pipelines. Specifically, by setting the first on-off part and the second on-off part on each branch pipeline, the flow rate of the branch pipeline can be adjusted independently. When a flow mutation occurs in one pipeline, it will not affect the discharge accuracy of the remaining branches, thereby greatly reducing the flow interference between different branches.

[0029] The beneficial effects of the control method applicable to parallel pipelines provided by the present invention are as follows: By setting a preset discharge volume of the fluid and working according to the set discharge volume, then, it is necessary to obtain the state of the fluid control device, judge the action that the fluid control device should execute, and according to the first state and the second state of the fluid control device, the controller controls the fluid control device to execute the first action and the second action respectively, so as to realize the pump function of filling the fluid or the pump function of pumping out the fluid or the back suction valve function of the fluid control device, and timely switch the executed action, which can ensure the discharge accuracy of the fluid, so that the discharge volumes of each pipeline in the parallel pipelines can meet the actual requirements, improve production efficiency, and reduce equipment cost. Description of the Drawings

[0030] Figure 1 Schematic diagram of the control system applicable to parallel pipelines according to an embodiment of the present invention;

[0031] Figure 2 Overall structural diagram of the fluid control device according to an embodiment of the present invention;

[0032] Figure 3 Flow chart of the control method applicable to parallel pipelines according to an embodiment of the present invention;

[0033] Figure 4 Logic flow chart of the control method applicable to parallel pipelines according to an embodiment of the present invention.

[0034] Reference numerals: 1, fluid control device; 11, temporary storage chamber; 12, first on-off part; 121, inlet of the first on-off part; 122, outlet of the first on-off part; 13, second on-off part; 131, inlet of the second on-off part; 132, outlet of the second on-off part; 14, adjustment part; 141, first connecting part; 142, deformation part; 143, second connecting part; 15, first driving part; 16, second driving part; 17, third driving part; 18, third on-off part; 181, circulation outlet; 182, fourth driving part; 19, circulation part; 2, main pipeline; 3, branch pipeline; 4, controller; 5, flowmeter; 6, nozzle part; 7, pump. Detailed implementation manners

[0035] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are some but not all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings as understood by those of ordinary skill in the art in the field to which the present invention pertains. The words such as "including" used herein mean that the elements or items appearing before this word cover the elements or items listed after this word and their equivalents, without excluding other elements or items.

[0036] The following further elaborates in detail on the specific implementation manners of the present invention with reference to the drawings.

[0037] The present invention is applicable to the semiconductor equipment industry, for example, for transporting photoresist in a discharge volume mode for supply to a wafer.

[0038] The parallel pipelines in the present invention mean that two or more pipelines branch out at the same place and converge at another place (the atmospheric environment is a branch-out place or a convergence place with a relative pressure of 0 Pa). The combined pipelines are called parallel pipelines. The upstream of the branch-out place and the downstream of the convergence place are called the main pipeline, and each pipeline between the branch-out place and the convergence place is called a branch pipeline.

[0039] As Figure 1 and Figure 2 shown, the embodiment of the present invention provides a control system applicable to parallel pipelines, including: a fluid source device, a plurality of fluid control devices 1, a main pipeline 2, branch pipelines 3 and a controller 4.

[0040] One end of the main pipeline 2 is communicated with the fluid source device, and the other end of the main pipeline 2 branches out multiple branch pipelines 3. That is, the fluid in the fluid source device is transported through the main pipeline 2 and discharged through each branch pipeline 3.

[0041] Each fluid control device 1 is arranged on a corresponding branch 3, that is, the number of fluid control devices 1 is the same as the number of branches 3. No matter how many branches 3 are actually arranged, corresponding fluid control devices 1 are arranged on each branch 3. The fluid control device 1 includes a first on-off part 12, a temporary storage chamber 11 and a second on-off part 13 that are connected in sequence. That is, one end of the temporary storage chamber 11 is connected to the outlet 122 of the first on-off part, and the other end of the temporary storage chamber 11 is connected to the inlet 131 of the second on-off part. The first on-off part 12 is used to control the on-off of the fluid upstream of the branch 3, that is, the first on-off part 12 forms a flowing or truncated state for the fluid upstream of the branch 3. An adjusting part 14 is arranged in the temporary storage chamber 11, and the adjusting part 14 is used to adjust the internal volume of the temporary storage chamber 11, so that fluid flows into or out of the temporary storage chamber 11. The second on-off part 13 is used to control the on-off of the fluid in the temporary storage chamber 11, that is, the second on-off part 13 forms a flowing or truncated state for the fluid in the temporary storage chamber 11.

[0042] The controller 4 is connected to the fluid control device 1 and is used to control the working mode of the fluid control device 1. Specifically, the controller 4 is connected to the first on-off part 12 to control the first on-off part 12 to form a flowing or truncated state, that is, to make the first on-off part 12 switch between the flowing and truncated states; the controller 4 is also connected to the adjusting part 14 to increase or decrease the internal volume of the temporary storage chamber 11 by controlling the adjusting part 14; the controller 4 is also connected to the second on-off part 13 to control the second on-off part 13 to form a flowing or truncated state, that is, to make the second on-off part 13 switch between the flowing and truncated states. The controller 4 outputs a control instruction to make the first on-off part 12, the second on-off part 13 and the adjusting part 14 perform mechanical movements to realize the pump or valve function of the fluid control device 1.

[0043] Specifically, taking two branches 3 as an example, there are two corresponding fluid control devices 1. The fluid in the fluid source device is respectively transported to the first branch and the second branch through the main pipeline 2. By controlling the fluid control devices 1 on each branch through the controller 4, the fluid control device 1 realizes the pump or valve function for the fluid in the branch 3, avoids the flow rate mutation on each branch 3, and improves the accuracy of the discharge amount of the fluid flowing out of the end of the branch 3. The fluid control device 1 determines the discharge amount and its accuracy of the fluid at the end of the branch 3.

[0044] As Figure 1 shown, in some embodiments of the present invention, the control system applicable to the parallel pipeline further includes a plurality of nozzle parts 6. Each nozzle part 6 is arranged on a corresponding branch 3 and is located at the outlet of the corresponding fluid control device 1. That is, the branch 3 has an output port, and nozzle parts 6 are arranged at the output ports of each branch 3 for ejecting photoresist onto the wafer.

[0045] As Figure 1As shown in the figure, in some embodiments of the present invention, the control system applicable to the parallel pipelines further includes a plurality of flow meters 5. Each flow meter 5 is arranged on the corresponding branch 3 and between the fluid control device 1 and the nozzle part 6, and is used to measure the flow rate of the fluid flowing out of the fluid control device 1. That is, the fluid control device 1, the flow meter 5 and the nozzle part 6 are sequentially arranged on each branch 3. Here, the discharge amount detected by the flow meter 5 is the actual discharge amount, and the discharge amount accuracy of each branch 3 can be calculated. At the same time, the flow rate data obtained by the flow meter 5 is transmitted to the controller 4, and the controller 4 can control the fluid control device 1 according to the flow rate data.

[0046] As Figure 1 As shown in the figure, in some embodiments of the present invention, the fluid source device includes a pump 7. The pump 7 transports the fluid to the main pipeline 2, and is discharged from the main pipeline 2 to each branch 3, that is, the fluid is transported to the fluid control device 1 on each branch 3, and the fluid flow rate is controlled by the fluid control device 1. That is, the fluid in the pump chamber of the pump 7 is transported to the wafer through the main pipeline 2 and each branch 3 respectively. It can be seen that only one pump 7 needs to be arranged on the main pipeline 2 to meet the needs of fluid transportation in multiple pipelines, greatly saving the cost of pipeline manufacturing.

[0047] In other embodiments of the present invention, the fluid source device includes a pressure vessel for supplying fluid. According to specific working conditions, without using a pump, various containers such as nitrogen-pressurized containers can meet the requirements, saving the equipment cost of the pump.

[0048] As Figure 2As shown in the figure, the fluid control device 1 in the present invention specifically includes: a temporary storage chamber 11, a first on-off part 12, a second on-off part 13, and an adjustment part 14. The temporary storage chamber 11 is used to store fluid. The outlet 122 of the first on-off part is connected to one end of the temporary storage chamber 11 and is used to control the inflow of fluid into the temporary storage chamber 11, that is, the first on-off part 12 controls the on-off of the fluid at the inlet of the fluid control device 1. The inlet 131 of the second on-off part is connected to the other end of the temporary storage chamber 11 and is used to control the outflow of the fluid in the temporary storage chamber 11, that is, the second on-off part 13 controls the on-off of the fluid at the outlet of the fluid control device 1. The inlet 121 of the first on-off part is connected to the outlet 132 of the second on-off part. That is to say, when both the first on-off part 12 and the second on-off part 13 are in a flowing state, the fluid flow path is the inlet 121 of the first on-off part, the outlet 122 of the first on-off part, the temporary storage chamber 11, the inlet 131 of the second on-off part, and the outlet 132 of the second on-off part. The adjustment part 14 is arranged in the temporary storage chamber 11 and is used to adjust the internal volume of the temporary storage chamber 11. The temporary storage chamber 11 serves as a fluid transfer station, which can accurately control the flow rate or the accuracy of the fluid flow rate, realize the quantitative output of fluid, and improve the accuracy of the fluid discharge volume. The adjustment part 14 is used to adjust the internal volume of the temporary storage chamber 11, so that the temporary storage chamber 11 can receive and discharge fluid.

[0049] Through the mutual cooperation among the first on-off part 12, the temporary storage chamber 11, the second on-off part 13, and the adjustment part 14, the fluid control device 1 can realize the following three functions:

[0050] The first is the pump function of loading fluid. Specifically, when the second on-off part 13 is in a cut-off state, the first on-off part 12 is in a flowing state, and the adjustment part 14 enlarges the internal volume of the temporary storage chamber 11, the fluid in the fluid source device passes through the inlet 121 of the first on-off part and the outlet 122 of the first on-off part and is loaded into the temporary storage chamber 11 until the temporary storage chamber 11 is filled. That is, the temporary storage chamber 11 temporarily stores the fluid flowing into it through the first on-off part 12. At this time, the fluid control device 1 functions as a pump for loading fluid.

[0051] The second is the pump function of pumping out fluid. Specifically, when the temporary storage chamber 11 is filled with fluid, the first on-off part 12 is in a cut-off state, the second on-off part 13 is in a flowing state, and the adjustment part 14 reduces the internal volume of the temporary storage chamber 11. The full-load fluid in the temporary storage chamber 11 flows out through the inlet 131 of the second on-off part and the outlet 132 of the second on-off part. At this time, the fluid control device 1 functions as a pump for pumping out fluid.

[0052] The third is the valve function of sucking back fluid. Specifically, the first on-off part 12 is in the cut-off state, and the second on-off part 13 is in the flowing state. After all the fluid in the temporary storage chamber 11 is emptied, the adjusting part 14 enlarges the internal volume of the temporary storage chamber. The fluid at the outlet 132 of the second on-off part will be sucked back into the temporary storage chamber 11. At this time, the fluid control device 1 functions as a valve for sucking back fluid. It should be noted that when the fluid control device 1 functions as a sucking-back valve, it can be used alone or after functioning as a pump for pumping out fluid. However, in actual use, it is usually used after the fluid control device 1 pumps out fluid.

[0053] By designing the first on-off part 12, the temporary storage chamber 11, and the second on-off part 13 that are connected in sequence, the flow accuracy and flow velocity of the fluid can be controlled more precisely. Specifically, the first on-off part 12 controls whether the fluid from the fluid source flows into the temporary storage chamber 11, and the second on-off part 13 controls whether the fluid flows out of the temporary storage chamber 11. That is, the temporary storage chamber 11 serves as a transfer of the fluid, rather than the fluid directly flowing through the first on-off part 12, the temporary storage chamber 11, and the second on-off part 13. The functions of a pump or a valve can be achieved by only one set of devices, which greatly improves the production efficiency and saves the equipment cost. At the same time, since the fluid in the temporary storage chamber 11 is preset each time, the accuracy of the discharged amount of the fluid can be ensured by pumping out the fluid in the temporary storage chamber 11 once. In addition, by arranging the first on-off part 12, the second on-off part 13, and the temporary storage chamber 11 on each branch pipeline, the flow rate of this branch pipeline can be adjusted independently. When there is a sudden change in the flow rate in one pipeline, it only needs to close the first on-off part 12, which will not affect the discharged amount accuracy of the remaining branches 3, and thus there is no interference in the pumped flow rates between different branches 3.

[0054] As Figure 2 shown, in some embodiments of the present invention, the adjusting part 14 is a rolling diaphragm. The edge part of the rolling diaphragm is fixedly connected to the side wall of the temporary storage chamber 11. The central part of the rolling diaphragm is connected to the third driving part 17, and the third driving part 17 is used to drive the rolling diaphragm to move reciprocally along the extending direction of the temporary storage chamber 11, so as to adjust the internal volume of the temporary storage chamber 11. For example, if the third driving part 17 drives the central part of the rolling diaphragm to move upward, the internal volume of the temporary storage chamber 11 will increase; if the third driving part 17 drives the central part of the rolling diaphragm to move downward, the internal volume of the temporary storage chamber 11 will decrease.

[0055] It should be noted that the adjusting part 14, as a soft, deformable, and linearly movable component, realizes the adjustment of the internal volume of the temporary storage chamber 11, that is, the specific structure of the adjusting part 14 is not limited.

[0056] In other embodiments of the present invention, the fluid control device 1 further includes a third on-off part 18 and a circulation part 19. The third on-off part 18 is used to control the on-off between the temporary storage cavity 11 and the circulation part 19. The third on-off part 18 has a circulation outlet 181. The circulation part 19 includes a circulation pipeline arranged on the circulation outlet 181. One end of the circulation pipeline is communicated with the circulation outlet 181, and the other end is communicated with the upstream of the main pipeline 2.

[0057] Exemplarily, through the adjustment part 14, the reciprocating adjustment of the liquid volume in the temporary storage cavity 11 can be realized; through the third on-off part 18, the on-off between the temporary storage cavity 11 and the circulation part 19 can be adjusted; through the cooperation of the two, the fluid in the temporary storage cavity 11 can be pumped out to the circulation part 19, or pumped from the circulation part 19 into the temporary storage cavity 11, so as to realize the circulating flow of the fluid among the temporary storage cavity 11, the circulation pipeline, the upstream of the main pipeline 2 and the branch pipeline.

[0058] As Figure 1 and Figure 2 As shown, in some embodiments of the present invention, the fluid control device 1 further includes a first driving part 15, a second driving part 16 and a third driving part 17. The first driving part 15, the second driving part 16 and the third driving part 17 serve as power sources and respectively drive the corresponding components connected thereto. Specifically, the first driving part 15 is connected to the first on-off part 12 and is used to drive the first on-off part 12 to form a flowing or truncated state. The second driving part 16 is connected to the second on-off part 13 and is used to drive the second on-off part 13 to form a flowing or truncated state. The third driving part 17 is connected to the adjustment part 14 and is used to drive the adjustment part 14 to perform a reciprocating motion to adjust the internal volume of the temporary storage cavity 11. The first driving part 15, the second driving part 16 and the third driving part 17 can communicate with the controller 4 in a wired or wireless manner, and the controller 4 outputs control instructions to the first driving part 15, the second driving part 16 and the third driving part 17 to realize the control of the first on-off part 12, the second on-off part 13 and the adjustment part 14.

[0059] As Figure 2 As shown, in some embodiments of the present invention, the first on-off part 12 is a first diaphragm valve. The first diaphragm valve includes a first valve body, a first diaphragm arranged in the first valve body and a first actuator. The first diaphragm realizes the switching of the flow state inside the first valve body. The first diaphragm is connected to the first actuator, and the first actuator is connected to the first driving part 15. The first driving part 15 is used to drive the first actuator to perform a reciprocating motion to drive the first diaphragm to perform a synchronous reciprocating motion, so that the first valve body forms a flowing or truncated state, that is, the reciprocating motion of the first diaphragm changes the gap change of the flow area of the first valve body, thereby changing the fluid flow rate.

[0060] For example, the first driving part 15 drives the first actuator to move upward, and the first actuator drives the first diaphragm to move upward synchronously, so that a flow-through state is formed inside the first valve body, and the fluid enters the temporary storage cavity 11 through the first valve body, thereby filling the temporary storage cavity 11; the first driving part 15 drives the first actuator to move downward, and the first actuator drives the first diaphragm to move downward synchronously, so that a cut-off state is formed inside the first valve body, and the fluid cannot enter the temporary storage cavity 11 through the first valve body.

[0061] As Figure 2 shown, in some embodiments of the present invention, the first actuator includes a first valve stem. One end of the first valve stem is connected to the first diaphragm, and the other end is connected to the driving end of the first driving part 15. Specifically, the first driving part 15 includes a first motor and a first lead screw. One end of the first lead screw is connected to the other end of the first valve stem, and the other end is connected to the first motor. When the first motor starts, it drives the first lead screw to move, the first lead screw drives the first valve stem to move, and the first valve stem drives the first diaphragm to move, changing the flow-through area inside the first valve body, so that the first valve body forms a flow-through or cut-off state for the fluid.

[0062] It should be noted that any other driving mechanism that can achieve driving the first on-off part 12 to form a flow-through or cut-off state can be used, and the present invention is not limited thereto.

[0063] As Figure 2 shown, in some embodiments of the present invention, the second on-off part 13 is a second diaphragm valve. The second diaphragm valve includes a second valve body, a second diaphragm disposed inside the second valve body, and a second actuator. The second diaphragm is connected to the second actuator, and the second actuator is connected to the second driving part 16. The second driving part 16 is used to drive the second actuator to move reciprocally, so as to drive the second diaphragm to move reciprocally synchronously, thereby making the second valve body form a flow-through or cut-off state. For example, the second driving part 16 drives the second actuator to move upward, and the second actuator drives the second diaphragm to move upward synchronously, so that the second valve body forms a flow-through state, and the fluid in the temporary storage cavity 11 is discharged or the fluid downstream of the branch 3 is sucked back into the temporary storage cavity 11; the second driving part 16 drives the second actuator to move downward, and the second actuator drives the second diaphragm to move downward synchronously, so that the second valve body forms a cut-off state, and the fluid in the temporary storage cavity 11 cannot be discharged or the fluid downstream of the branch 3 cannot be sucked back into the temporary storage cavity.

[0064] In other embodiments of the present invention, both the first on-off part 12 and the second on-off part 13 are also ball valves or flap valves. The advantage of selecting a ball valve is its simple structure, small volume, convenient installation and maintenance, and wide application range. The advantage of selecting a flap valve is its good sealing performance, high durability, and convenient operation.

[0065] It should be noted that the specific structures of the first on-off part 12 and the second on-off part 13 are not specifically limited.

[0066] As Figure 2 shown, in some embodiments of the present invention, the second actuator includes a second valve stem. One end of the second valve stem is connected to the second diaphragm, and the other end is connected to the driving end of the second driving part 16. Specifically, the second driving part 16 includes a second motor and a second lead screw. One end of the second lead screw is connected to the other end of the second valve stem, and the other end is connected to the second motor. When the second motor starts, it drives the second lead screw to move. The second lead screw drives the second valve stem to move, and the second valve stem drives the second diaphragm to move, changing the flow area inside the second valve body. Thus, the second valve body can form a flow or cut-off of the fluid.

[0067] It should be noted that any other driving mechanism that can drive the second on-off part 13 to form a flow or cut-off state can be used, and the present invention does not make any limitations.

[0068] As Figure 2 shown, in some embodiments of the present invention, the adjusting part 14 includes a first connecting part 141, a deforming part 142, and a second connecting part 143. With such a structure of the adjusting part 14, the movement stroke is increased, which helps to change the internal volume amplitude of the temporary storage cavity 11. One end of the first connecting part 141 is connected to the deforming part 142, and the other end is slidably connected to the side wall of the temporary storage cavity 11. The upper end or the lower end of the first connecting part 141 is connected to the driving end of the third driving part 17. When the third driving part 17 is started, the driving end of the third driving part 17 drives the first connecting part 141 to move, so as to drive the deforming part 142 to move. The deforming part 142 deforms due to the liquid pressure generated by the sliding, thereby changing the internal volume of the temporary storage cavity 11. In some other embodiments of the present invention, the deforming part 142 is made of an elastic material and one side is designed to be convex or concave. With the above design, when the third driving part 17 adjusts the displacement of the deforming part 142, the amplitude of increasing or decreasing the internal volume of the temporary storage cavity 11 can be made larger, which helps the temporary storage cavity 11 to store or discharge the fluid. The second connecting part 143 is also connected to the deforming part 142. The second connecting part 143 is connected to the deforming part 142 along its inner peripheral side and is slidably connected to the side wall of the temporary storage cavity 11.

[0069] As Figure 2 shown, in some embodiments of the present invention, the adjusting part 14 adopts a rolling diaphragm. The central part of the rolling diaphragm is connected to the driving end of the third driving part 17, that is, the driving end of the third driving part 17 extends into the temporary storage cavity 11 and is connected to the central part.

[0070] In some embodiments of the present invention, the third driving part 17 includes a third motor and a third lead screw. One end of the third lead screw is connected to the central part, and the other end is connected to the third motor. When the third motor starts, it drives the third lead screw to move, and the third lead screw drives the central part of the rolling diaphragm to move, thereby increasing or decreasing the internal volume of the temporary storage chamber 11, and realizing the function of the temporary storage chamber 11 receiving or discharging fluid.

[0071] It should be noted that any other driving mechanism that can realize the reciprocating movement of the driving adjustment part 14 can be used, and the present invention is not limited thereto.

[0072] As Figure 2 shown, in some embodiments of the present invention, the inlet 121 of the first on-off part is used to communicate with the fluid source device.

[0073] As Figure 2 shown, in some embodiments of the present invention, the third on-off part 18 is a ball valve or a baffle valve. A fourth driving part 182 is arranged on the third on-off part 18. Specifically, the fourth driving part 182 is connected to the third on-off part 18 and is used to drive the third on-off part 18 to form a flowing or truncated state. The fourth driving part 182 can communicate with the controller 4 in a wired or wireless manner, and the controller 4 outputs a control instruction to the fourth driving part 182 to realize the control of the third on-off part 18.

[0074] As Figure 3 shown and in combination with reference Figure 1 - 2, an embodiment of the present invention provides a control method applicable to a parallel pipeline, including the following steps:

[0075] Step S1: Set a preset discharge amount of the fluid.

[0076] Specifically: The user sets the discharge amount of the fluid, and this request signal can be sent to the controller 4 manually or automatically.

[0077] According to the preset discharge amount of the photoresist, the photoresist is transported to the surface of the wafer. Due to the transportation of the pipeline, the actual discharge amount of the photoresist will be different from the preset discharge amount. Therefore, the discharge amount accuracy of the photoresist can be calculated based on the set preset discharge amount and the actual discharge amount, and is used to measure the accuracy of transporting the photoresist by the parallel pipeline.

[0078] Step S2: Transport the fluid to the main pipeline 2 through the fluid source device, transport it from the main pipeline 2 to each branch pipeline 3, and control the output of the fluid through the fluid control device 1.

[0079] After setting the preset discharge amount of the fluid, the transportation of the fluid starts. In the parallel pipeline, it is transported to each branch pipeline 3 through the main pipeline 2, and the fluid control device 1 arranged on each branch pipeline 3 determines the discharge amount accuracy of the fluid.

[0080] Step S3: Obtain the state of the fluid control device 1, where the state includes a first state and a second state.

[0081] In some embodiments of the present invention, the first state is that the inside of the temporary storage chamber 11 of the fluid control device 1 is empty, that is, the empty state indicates that there is no fluid to be discharged in the temporary storage chamber 11, and fluid should be loaded into it. The second state is that the inside of the temporary storage chamber 11 of the fluid control device 1 is full, that is, the full state indicates that the temporary storage chamber 11 is filled with the fluid to be discharged, and it should be emptied.

[0082] For example, a sensor for measuring the liquid level height can be arranged in the temporary storage chamber 11 to obtain whether there is fluid in the temporary storage chamber 11, so as to judge the actions to be performed next.

[0083] Step S4: If the fluid control device 1 is in the first state, the controller 4 controls the fluid control device 1 to perform a first action to load fluid into the temporary storage chamber 11 of the fluid control device 1.

[0084] As Figure 4 shown, the controller 4 can automatically query, modify and obtain the state of the fluid control device 1. If the fluid control device 1 is in the first state, it means that the fluid control device 1 cannot respond to the discharge amount request. Therefore, various actions in the first action are performed, that is, fluid is loaded first.

[0085] In some embodiments of the present invention, if the fluid control device 1 is in the first state, the controller 4 controls the first on-off part 12 of the fluid control device 1 to be in a flowing state, the second on-off part 13 of the fluid control device 1 to be in a cut-off state, and controls the internal volume of the temporary storage chamber 11 to increase, so that the fluid in the main pipeline 2 is loaded from the upstream of the branch 3 into the temporary storage chamber 11. Under this control method, the fluid control device 1 loads the fluid upstream of the branch 3 into the inside of the temporary storage chamber 11, realizing the pump function of loading fluid.

[0086] That is to say, the first action performed by the fluid control device 1 is: the fluid upstream of the branch 3 is loaded into the temporary storage chamber 11, that is, the temporary storage chamber 11 is filled with fluid, and this is the execution of the complete first action.

[0087] Step S5: If the fluid control device 1 is in the second state, the controller 4 controls the fluid control device 1 to perform a second action to discharge the fluid in the temporary storage chamber 11 and / or suck back the fluid downstream of the branch 3 into the temporary storage chamber 11.

[0088] As Figure 4 shown, if the fluid control device 1 is in the second state, it means that the fluid control device 1 responds to the discharge amount request. Therefore, various actions in the second action are performed, that is, the fluid is pumped out first and then the fluid is sucked back.

[0089] In some embodiments of the present invention, when the fluid control device 1 is in the second state, the controller 4 controls the first on-off part 12 to be in the cut-off state, the second on-off part 13 to be in the flowing state, and controls the internal volume of the temporary storage chamber 11 to decrease, so that the internal fluid of the temporary storage chamber 11 flows out from the downstream of the branch 3 through the second on-off part 13. At this time, both the upstream and downstream of the first on-off part 12 are isolated, and the downstream fluid is not disturbed by the flow rate and pressure of the main pipeline 2 and the other branches 3, thus avoiding sudden changes in flow rate. Under this control method, the fluid control device 1 discharges the fluid inside the temporary storage chamber 11 from the downstream of the branch, realizing the pumping function of pumping out the fluid.

[0090] In some embodiments of the present invention, after the internal fluid of the temporary storage chamber 11 flows out from the downstream of the branch through the second on-off part 13, that is, after discharging the fluid in the temporary storage chamber 11, the controller 4 controls the internal volume of the temporary storage chamber 11 to increase, so that the fluid downstream of the branch 3 is sucked back into the temporary storage chamber 11. Under this control method, the fluid control device 1 generates a suction effect on the fluid downstream of the branch 3, that is, the downstream fluid flows upstream to realize the function of the suction valve.

[0091] That is to say, the second action performed by the fluid control device 1 is: after pumping out the fluid in the temporary storage chamber 11, then sucking back the fluid downstream of the branch 3 into the temporary storage chamber 11, which is the execution of the complete second action.

[0092] Specifically, since after the photoresist in the temporary storage chamber 11 is discharged once, some photoresist will remain at the end of the downstream of the branch. At this time, it is necessary to suck back these remaining liquids into the temporary storage chamber 11 to prevent the photoresist at the end of the downstream of the branch from dripping onto the wafer again and prevent overreaction.

[0093] In some other embodiments of the present invention, when the fluid control device 1 is in the third state, the controller 4 controls the fluid control device 1 to perform a third action, so that the fluid circulates in the main pipeline 2 and the branch 3.

[0094] After the fluid control device 1 works for a certain period of time, it is necessary to perform circulation, particle flushing or when the liquid inside the pipeline needs to be discharged as waste; adjust the fluid control device 1 to be in the third state; the third state is that the inside of the circulation chamber 181 is full. Specifically, the third action is: the controller 4 controls the first on-off part 12 of the fluid control device 1 to be in the cut-off state, the second on-off part 13 of the fluid control device 1 to be in the cut-off state, and the third on-off part 18 to be in the flowing state. At this time, the flow path of the fluid is: the fluid on the branch 3 passes through the circulation chamber 181 of the fluid control device 1 and then flows through the circulation part 19 and finally circulates into the upstream of the main pipeline 2, and the returned fluid passes through the pump 7, is filtered and then refilled into the fluid control device 1. By adopting the above work process, the circulating flow action of the fluid can be realized.

[0095] The control method applicable to parallel pipelines of the present invention can enable the main pipeline 2 to supply fluid to each branch pipeline 3 simultaneously, and can ensure the discharge accuracy of the fluid on each branch pipeline 3, avoiding sudden changes in the flow rate on the branch pipeline 3. At the same time, one controller 4 is used to control multiple fluid control devices 1, thus avoiding redundancy caused by multiple control elements.

[0096] In summary, in the first aspect of the present invention, by providing corresponding fluid control devices 1 on each branch pipeline 3, and at the same time, controlling the first on-off part 12, the second on-off part 13 and the adjustment part 14 of the fluid control device 1 through the controller 4, it can ensure that the discharge accuracy of the fluid flowing out of the branch pipeline 3 after the fluid conveyed by the main pipeline 2 to each branch pipeline 3 reaches the preset requirement, and avoid sudden changes in the flow rate on each branch pipeline 3. In this way, only one pump 7 needs to be configured on the main pipeline 2 or no pump 7 needs to be configured. Compared with the prior art, the equipment cost is greatly reduced and the space occupation is saved. In the second aspect, by setting the preset discharge volume of the fluid and working according to the set discharge volume, then, it is necessary to obtain the state of the fluid control device 1, judge the action that the fluid control device 1 should perform, and according to the first state and the second state of the fluid control device 1, the controller 4 controls the fluid control device 1 to perform the first action and the second action respectively, so as to realize the pump function of filling the fluid or the pump function of pumping out the fluid or the back suction valve function of the fluid control device 1, and timely switch the performed action, which can ensure the discharge accuracy of the fluid, so that the discharge volume of each pipeline in the parallel pipeline can meet the actual requirements, improve the production efficiency and reduce the equipment cost.

[0097] Although the embodiments of the present invention have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are all within the scope and spirit of the present invention. Moreover, the present invention described herein can have other embodiments and can be implemented or realized in various ways.

Claims

1. A control system suitable for parallel pipelines, characterized in that: include: A fluid source device; A main pipeline, one end of which is connected to the fluid source device, and the other end of which branches into a plurality of branches that do not interfere with each other; A plurality of fluid control devices are respectively arranged on a plurality of the branch roads, the fluid control devices comprising a first on-off portion, a temporary storage chamber and a second on-off portion which can be connected in sequence, the first on-off portion is used to control the on-off of the fluid upstream of the branch road, the temporary storage chamber is provided with an adjustment portion, the adjustment portion is used to adjust the internal volume of the temporary storage chamber, and the second on-off portion is used to control the on-off of the fluid in the temporary storage chamber; a controller, the controller being connected to the first on-off part, the adjusting part and the second on-off part respectively, and being used to control the actions of the first on-off part, the adjusting part and the second on-off part; The fluid control device further includes a third on-off portion and a circulation portion, wherein the third on-off portion is used to control the on-off between the temporary storage chamber and the circulation portion; one end of the circulation portion is connected to the third on-off portion, and the other end is connected to the upstream of the main pipeline; The fluid control device includes a first state and a second state. If the fluid control device is in the first state, the controller controls the fluid control device to perform a first action so that the fluid is filled into the temporary storage chamber of the fluid control device. If the fluid control device is in the second state, the controller controls the fluid control device to perform a second action, so that the fluid in the temporary storage chamber is discharged, and the fluid downstream of the branch is sucked back into the temporary storage chamber; After the fluid in the temporary storage chamber flows out from the downstream of the branch through the second on-off portion, the controller controls the internal volume of the temporary storage chamber to increase so that the fluid downstream of the branch is sucked back into the temporary storage chamber.

2. The control system suitable for parallel pipelines according to claim 1, characterized in that: It also includes a plurality of nozzle parts, the branch has an output port, and each of the nozzle parts is arranged at the corresponding output port.

3. The control system suitable for parallel pipelines according to claim 2, characterized in that: It also includes a plurality of flow meters, each of which is arranged on the corresponding branch and located between the fluid control device and the nozzle part, and is used to measure the flow rate of the fluid flowing out of the fluid control device.

4. The control system suitable for parallel pipelines according to claim 1, characterized in that: The fluid source device includes a pump, through which the fluid is delivered to the main line, and then delivered from the main line to the fluid control devices on each of the branch lines, and the fluid delivery is controlled by the fluid control devices.

5. A control method applicable to parallel pipelines, used to control the control system applicable to parallel pipelines as claimed in any one of claims 1 to 4, characterized in that: The method comprises: Set the preset discharge volume of the fluid; The fluid is delivered to the main pipeline through the fluid source device, and then delivered to each branch pipeline through the main pipeline, and the output of the fluid is controlled by the fluid control device; Acquiring a state of the fluid control device, which includes a first state and a second state; If the fluid control device is in the first state, the controller controls the fluid control device to perform a first action so that the fluid is filled into the temporary storage chamber of the fluid control device; If the fluid control device is in the second state, the controller controls the fluid control device to perform a second action, so that the fluid in the temporary storage chamber is discharged and the fluid downstream of the branch is sucked back into the temporary storage chamber.

6. The control method applicable to parallel pipelines according to claim 5, characterized in that: The first state is that the interior of the temporary storage chamber is empty; the second state is that the interior of the temporary storage chamber is fully loaded.

7. The control method applicable to parallel pipelines according to claim 5, characterized in that: The first action is: the controller controls the first on-off part of the fluid control device to be in a flow state, the second on-off part of the fluid control device to be in a cut-off state, and controls the internal volume of the temporary storage chamber of the fluid control device to increase, so that the fluid in the main line is filled into the temporary storage chamber from the upstream of the branch line.

8. The control method applicable to parallel pipelines according to claim 5, characterized in that: The second action is: the controller controls the first on-off part of the fluid control device to be in a cut-off state, the second on-off part of the fluid control device to be in a flow state, and controls the internal volume of the temporary storage chamber of the fluid control device to be reduced, so that the fluid in the temporary storage chamber flows out from the downstream of the branch through the second on-off part.

9. The control method applicable to parallel pipelines according to claim 8, characterized in that: After the fluid in the temporary storage chamber flows out from the downstream of the branch through the second on-off portion, the controller controls the internal volume of the temporary storage chamber to increase so that the fluid downstream of the branch is sucked back into the temporary storage chamber.

10. The control method applicable to parallel pipelines according to claim 5, characterized in that: Also includes: obtaining a state of the fluid control device, further comprising a third state; The fluid control device further comprises a third on-off portion, and an adjustment portion is provided in the temporary storage chamber; If the fluid control device is in the third state, the controller controls the fluid control device to perform a third action, so that the fluid circulates in the main circuit and the branch circuit; The third state is that the volume of the temporary storage chamber changes reciprocatingly; the third action is that the controller controls the first on-off part of the fluid control device to be in a cut-off state, the second on-off part of the fluid control device to be in a cut-off state, the third on-off part to be in a flow state, and controls the adjustment part to reciprocately change the volume of the temporary storage chamber.

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