A clamping device for cleaning of quartz components in epitaxial furnaces and a method of using the same

Abstract

The application relates to a clamping device for cleaning quartz components in an epitaxial furnace and a use method thereof, which comprises three storage partitions arranged in sequence from top to bottom along the horizontal direction, two vertical support plates respectively arranged on the two sides of the storage partitions and a fixing plate arranged behind the storage partitions and the vertical support plates, the two sides of each storage partition are integrally formed with the vertical support plates, the rear end of each storage partition and the rear end of the vertical support plates are integrally formed with the fixing plate, a plurality of uniformly distributed holes are arranged on the storage partitions, the vertical support plates and the fixing plate, a positioning assembly for fixing the to-be-cleaned lifting shaft, the lower dome and the upper dome quartz components along the horizontal direction is arranged on the holes of the three storage partitions, the plurality of uniformly distributed holes arranged on the storage partitions, the vertical support plates and the fixing plate not only reduce the weight of the device, but also greatly promote the flow of the chemical cleaning liquid in the cleaning tank during the wet cleaning process, and improve the cleaning efficiency.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a clamping device for cleaning quartz components in an epitaxial furnace and its method of use. Background Technology

[0002] In the semiconductor manufacturing process, the epitaxial furnace is a key piece of equipment used to grow high-quality crystal layers on silicon wafers or other substrates. After repeated use, the quartz components inside the epitaxial furnace (such as the lifting shaft, lower dome, and upper dome) will accumulate impurities and residues, affecting the quality and efficiency of subsequent processes. Therefore, regular cleaning of these quartz components is an important step to ensure the normal operation of the epitaxial furnace.

[0003] Currently, common cleaning methods include wet cleaning and dry cleaning. Dry cleaning uses plasma or other gas treatment methods for in-situ cleaning; while wet cleaning requires removing the quartz components from the epitaxial furnace and placing them in a dedicated cleaning tank for chemical cleaning. Chemical solutions remove contaminants from the surface of the quartz components, ensuring their cleanliness. Existing wet cleaning methods are mainly divided into two types: one is to directly place the quartz components in the cleaning tank, which can better clean the quartz components and remove the cleaning solution, but it is prone to collisions during the cleaning process, increasing the risk of damage; the other is to use clamping devices to fix various quartz components. However, existing clamping devices have the following problems: the structural design of existing clamping devices is not conducive to the flow and discharge of chemical cleaning solution during the wet cleaning process, resulting in incomplete cleaning, and the chemical solution is not easy to remove after cleaning, increasing the time and difficulty of subsequent processing; the design of the clamping devices is relatively complex, the installation and disassembly process is cumbersome, increasing operation time and labor intensity, and they are often only suitable for quartz components of specific sizes, lacking versatility for different types of epitaxial furnaces or different specifications of quartz components. Summary of the Invention

[0004] The present invention aims to solve the problems existing in the prior art by providing a clamping device and its usage method for cleaning quartz components in an epitaxial furnace. The device has a simple structure, is easy to operate, and is firmly fixed, which can significantly improve the stability and cleaning effect during the cleaning process.

[0005] The technical solution adopted by this invention to solve its technical problem is as follows: This clamping device for cleaning quartz components in an epitaxial furnace includes: three storage partitions arranged horizontally from top to bottom; two vertical support plates located on both sides of the storage partitions; and a fixing plate located behind the storage partitions and the vertical support plates. The two sides of each storage partition are integrally formed with the vertical support plates, and the rear ends of each storage partition and the vertical support plates are integrally formed with the fixing plate. Multiple evenly distributed holes are provided on the storage partitions, vertical support plates, and fixing plate. A horizontal clamping device is provided through the holes on the three storage partitions. A positioning assembly for fixing the direction of the lifting shaft, lower dome, and upper dome quartz components to be cleaned. The positioning assembly includes: a positioning hole and a first positioning element set on the upper storage partition, a second positioning element installed on the middle storage partition, and a third positioning element located below the second positioning element and set on the bottom storage partition. The first positioning element abuts against the left and right ends of the lifting shaft, and an inclined support foot of the lifting shaft extends into the positioning hole. The tube part of the lower dome extends into the upper storage partition, and the disc-shaped part of the lower dome is located in and abuts against the second positioning element. The upper dome is placed on the bottom storage partition, and its outer wall abuts against the third positioning element.

[0006] Preferably, the upper storage partition and the adjacent middle storage partition, together with the vertical support plates on both sides and the fixed plate at the rear, form a first storage layer with one side open. The middle storage partition and the lower storage partition, together with the vertical support plates on both sides and the fixed plate at the rear, form a second storage layer with one side open. The height of the first storage layer is higher than the height of the disc-shaped part of the lower dome, ensuring that the disc-shaped part can move above the second positioning member and extend into the second positioning member. The height of the second storage layer is higher than the height of the upper dome, ensuring that the upper dome can move into the third positioning member and that its outer wall abuts against the third positioning member.

[0007] Preferably, the positioning device further includes a limiting component detachably connected to the hole, used to fix the lifting shaft, the lower dome, and the upper dome vertically to the corresponding storage partition, and the limiting component includes:

[0008] The first limiting member is used to engage the lifting shaft with the upper storage partition. The middle part of the first limiting member is provided with an arc-shaped part that matches the shaft part of the lifting shaft. The two ends of the first limiting member have first connecting parts, and the two first connecting parts extend into the holes on the front and rear sides of the shaft part of the lifting shaft and connect to each other.

[0009] The second limiting member is used to engage the lower dome with the middle layer storage partition. The second limiting member has a second abutment and a second connecting part, which are connected to form a "7" shaped structure. The second connecting part extends into the hole in the middle layer storage partition located around the lower dome disc-shaped part, and the second abutment abuts against the periphery of the lower dome disc-shaped part.

[0010] The third limiting member is used to snap the upper dome onto the lower storage partition. The third limiting member has a third abutment and a third connecting part, which are connected to form a "7" shape. The third connecting part extends into the hole on the lower storage partition located around the upper dome, and the third abutment abuts against the periphery of the upper dome.

[0011] Preferably, the first, second, and third connecting parts are provided with external threads, which pass through the holes and are connected by nuts, so that the first connecting part is connected to the upper storage partition, the second connecting part is connected to the middle storage partition, and the third connecting part is connected to the lower storage partition; or the first, second, and third connecting parts are each provided with at least one pair of elastic buckle parts, which automatically pop out and fasten to the circumference of the connecting part after the buckle parts pass through the holes, and form a snap-fit ​​with the corresponding storage partition.

[0012] Preferably, each of the vertical support plates is provided with at least one handle, the handle is located at the top of the vertical support plate, the height of the vertical support plate is greater than the height of the storage layer, and the horizontal height of the handle is higher than the upper end of the fixing plate.

[0013] Preferably, the upper storage partition is provided with a guide groove, which is used to guide the tube of the lower dome into the upper storage partition. The guide groove is arranged along the width direction of the storage partition.

[0014] Preferably, the first positioning component includes at least two first positioning blocks. The inner end of each first positioning block has a positioning surface that matches both sides of the lifting shaft. The outer end of the first positioning block has a guide hole along the length direction of the upper storage partition. A first screw is inserted into the guide hole. The first screw passes through the hole in the upper storage partition and the first positioning block is fixed to the upper storage partition by a nut.

[0015] Preferably, the second positioning element includes at least three second positioning blocks. The inner end of each second positioning block has a first arc-shaped surface that matches the outer wall of the lower dome. The first arc-shaped surface fits into the disc-shaped portion of the lower dome. The outer end of the second positioning block is provided with a second screw portion. The second screw portion passes through a hole in the intermediate storage partition and is fixed to the intermediate storage partition by a nut.

[0016] Preferably, the third positioning component includes at least three third positioning blocks. The inner end of each third positioning block has a second arc-shaped surface that matches the outer wall of the upper dome. The second arc-shaped surface fits against the upper dome. The outer end of the third positioning block is provided with a third screw portion. The third screw portion passes through a hole in the bottom storage partition and is fixed to the bottom storage partition by a nut.

[0017] A method of using a clamping device for cleaning quartz components in an epitaxial furnace includes the following steps:

[0018] 1) Preparation stage: Place the clamping device on the horizontal end face, ensuring that the device is placed stably, and then check and ensure that the multiple evenly distributed holes on each storage compartment, vertical support plate and fixed plate are aligned.

[0019] 2) Install the lifting shaft: Insert the tilting support feet of the lifting shaft into the positioning holes on the upper storage partition, and make the left and right ends of the lifting shaft abut against the first positioning piece to ensure the initial positioning of the lifting shaft. Use the first limiting piece to firmly clamp the lifting shaft onto the upper storage partition through the holes on the upper storage partition to ensure the lifting shaft is stable and fixed.

[0020] 3) Install the lower dome: Guide the tube of the lower dome through the guide groove so that it extends into the upper storage compartment. At the same time, ensure that the disc-shaped part of the lower dome is located in the second positioning piece on the middle storage compartment and abuts against it to complete the initial positioning of the lower dome. Use the second limiting piece to firmly snap the lower dome onto the middle storage compartment through the hole in the middle storage compartment to ensure that the lower dome is stable and fixed.

[0021] 4) Install the upper dome: Place the upper dome on the bottom storage shelf, so that its outer wall abuts against the third positioning piece to complete the initial positioning of the upper dome. Use the third limiting piece to firmly snap the upper dome onto the bottom storage shelf through the hole in the bottom storage shelf to ensure that the upper dome is stable and fixed.

[0022] 5) Start cleaning: Start the cleaning equipment to clean the quartz components. During the process, the clamping device should be kept stable to ensure the cleaning effect.

[0023] 6) Disassembly and maintenance: After cleaning, the limiter and quartz components can be easily disassembled through the detachable design, which facilitates subsequent inspection and maintenance.

[0024] The present invention has the following beneficial effects:

[0025] 1. The present invention, through positioning components and limiting components, can ensure that the lifting shaft, lower dome and upper dome remain stable during the cleaning process, avoiding the component displacement common in the prior art. This not only improves the cleaning effect, but also reduces the risk of component damage caused by displacement.

[0026] 2. The multiple evenly distributed holes on the storage partition, vertical support plate, and fixing plate not only reduce the weight of the device but also greatly promote the flow of chemical cleaning solution in the cleaning tank during wet washing, thus improving cleaning efficiency. In addition, the positioning components (first positioning component, second positioning component, and third positioning component) can be adjusted by selecting different hole positions to accommodate lifting shafts, lower dome, and upper dome quartz components of different sizes. This design improves the versatility and flexibility of the clamping device and is suitable for various types of epitaxial furnaces and quartz components of different specifications.

[0027] 3. The present invention adopts a detachable design and simplified installation steps, making the clamping device easy to install and disassemble. It can be quickly installed and disassembled through nut connection or elastic buckle, which greatly reduces operation time and labor intensity. This is especially important for chemical operation scenarios and significantly improves work efficiency. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the overall structure of a clamping device for cleaning quartz components in an epitaxial furnace according to the present invention.

[0029] Figure 2 This is a schematic diagram of the overall structure of the clamping device and the quartz component after assembly.

[0030] Figure 3 This is a schematic diagram of the structure after the lifting shaft is positioned by the first positioning component;

[0031] Figure 4 This is a schematic diagram of the structure after the lower dome is positioned by the second positioning component;

[0032] Figure 5 This is a sectional view of the structure in the position of the second positioning element relative to the lower dome.

[0033] Figure 6 This is a schematic diagram of the structure after the upper dome is positioned by the third positioning component;

[0034] Figure 7 This is a structural diagram showing the first connecting part, the second connecting part, and the third connecting part being externally threaded.

[0035] Figure 8 This is a structural diagram when the first connecting part, the second connecting part, and the third connecting part are designed as snap-fit ​​parts;

[0036] Figure 9 This is a schematic diagram of the lifting shaft structure;

[0037] Figure 10 This is a schematic diagram of the lower dome structure;

[0038] Figure 11 This is a schematic diagram of the upper dome structure.

[0039] Explanation of reference numerals in the attached figures:

[0040] 10. Storage partition; 11. Vertical support plate; 12. Fixing plate; 13. Hole; 100. First storage layer; 101. Second storage layer; 102. Handle; 103. Guide groove; 104. Positioning hole;

[0041] 20. First positioning component; 21. Second positioning component; 22. Third positioning component; 200. First positioning block; 201. Positioning surface; 202. First screw part; 203. Second positioning block; 204. First arc-shaped surface; 205. Second screw part; 206. Third positioning block; 207. Second arc-shaped surface; 208. Third screw part; 209. Guide hole;

[0042] 30. First limiting member; 31. Second limiting member; 32. Third limiting member; 300. Arc-shaped part; 301. First connecting part; 302. Second abutment; 303. Second connecting part; 304. Third abutment; 305. Third connecting part; 306. External thread; 307. Snap-fit ​​part;

[0043] 4. Lifting shaft; 40. Support leg; 41. Shaft section;

[0044] 5. Lower dome; 50. Tubular section; 51. Disc-shaped section;

[0045] 6. Top the dome. Detailed Implementation

[0046] To further illustrate the technical means and effects of the present invention in achieving its intended purpose, the following detailed description of the specific implementation methods, structures, features, and effects of the present invention, in conjunction with the accompanying drawings and preferred embodiments, is provided below.

[0047] like Figures 1 to 11As shown, a clamping device for cleaning quartz components in an epitaxial furnace includes: three storage partitions 10 arranged horizontally from top to bottom; two vertical support plates 11 located on both sides of the storage partitions 10; and a fixing plate 12 located behind the storage partitions 10 and the vertical support plates 11. The two sides of each storage partition 10 are integrally formed with the vertical support plates 11, and the rear ends of each storage partition 10 and the rear ends of the vertical support plates 11 are integrally formed with the fixing plate 12. Multiple evenly distributed holes 13 are provided on the storage partitions 10, the vertical support plates 11, and the fixing plate 12. A lifting shaft 4, which is horizontally fixed to be cleaned, and a lower circular... The positioning assembly for the quartz components of the top 5 and the upper dome 6 includes: a positioning hole 104 and a first positioning member 20 provided on the upper storage partition 10, a second positioning member 21 installed on the middle storage partition 10, and a third positioning member 22 located below the second positioning member 21 and provided on the bottom storage partition 10; the first positioning member 20 abuts against the left and right ends of the lifting shaft 4, and an inclined support foot 40 of the lifting shaft 4 extends into the positioning hole 104; the tube portion 50 of the lower dome 5 extends into the upper storage partition 10, and the disc-shaped portion 51 of the lower dome 5 is located in and abuts against the second positioning member 21; the upper dome 6 is placed on the bottom storage partition 10, and its outer wall abuts against the third positioning member 22.

[0048] The clamping device includes three storage partitions 10 arranged horizontally from top to bottom, two vertical support plates 11 located on both sides of the storage partitions 10, and a fixing plate 12 located behind the storage partitions 10 and the vertical support plates 11. The two sides of each storage partition 10 are integrally formed with the vertical support plates 11, and the rear ends of each storage partition 10 and the rear ends of each vertical support plate 11 are also integrally formed with the fixing plate 12. The storage partitions 10, vertical support plates 11, and fixing plate 12 are all made of Teflon material. In this embodiment, the storage partitions 10, vertical support plates 11, and fixing plate 12 are all provided with multiple evenly distributed holes 13. These holes 13 not only reduce the weight of the device but also facilitate the flow of chemical cleaning liquid in the cleaning tank during wet washing, improving cleaning efficiency and facilitating the removal of chemical liquid after cleaning. The three storage compartments 10 are equipped with positioning components for fixing the lifting shaft 4, lower dome 5, and upper dome 6 quartz components to be cleaned in a horizontal direction through these holes 13. The positioning components specifically include: positioning holes 104 and a first positioning element 20 on the upper storage compartment 10, a second positioning element 21 on the middle storage compartment 10, and a third positioning element 22 located below the second positioning element 21 and on the bottom storage compartment 10. The first positioning element 20 abuts against the left and right ends of the lifting shaft 4, and an inclined support foot 40 of the lifting shaft 4 extends into the positioning hole 104. The tube 50 of the lower dome 5 extends into the upper storage compartment 10, and the disc-shaped part 51 of the lower dome 5 is located in the second positioning element 21 and abuts against it. The upper dome 6 is placed on the bottom storage compartment 10, and its outer wall abuts against the third positioning element 22.

[0049] In addition, it should be noted that this clamping device is not only suitable for the quartz components of the epitaxial furnace used for 12-inch epitaxial wafers, but also for different sizes such as 8-inch. The first positioning member 20, the second positioning member 21 and the third positioning member 22 can all be adjusted by selecting different hole positions. This design makes the clamping device widely applicable to different models of epitaxial furnaces and different specifications of quartz components, improving its versatility and flexibility.

[0050] Specifically, such as Figure 1 and Figure 2As shown, the upper storage partition 10 and the adjacent middle storage partition 10, together with the vertical support plates 11 on both sides and the fixed plate 12 at the rear, form a first storage layer 100 with one side open. The middle storage partition 10 and the lower storage partition 10, together with the vertical support plates 11 on both sides and the fixed plate 12 at the rear, form a second storage layer 101 with one side open. The height of the first storage layer 100 is higher than the height of the disc-shaped part 51 of the lower dome 5, ensuring that the disc-shaped part 51 can move above the second positioning member 21 and extend into the second positioning member 21. The height of the second storage layer 101 is higher than the height of the upper dome 6, ensuring that the upper dome 6 can move into the third positioning member 22 and that its outer wall abuts against the third positioning member 22.

[0051] The upper storage partition 10, together with the adjacent middle storage partition 10, and the vertical support plates 11 on both sides and the fixing plate 12 at the rear, form a first storage layer 100 with one side open. The height of the first storage layer 100 is designed to be higher than the height of the disc-shaped part 51 of the lower dome 5, ensuring that the disc-shaped part 51 of the lower dome 5 can move smoothly to the top of the second positioning member 21 and accurately extend into the second positioning member 21 for fixation. At the same time, the middle storage partition 10, together with the lower storage partition 10, and the vertical support plates 11 on both sides and the fixing plate 12 at the rear, form a second storage layer 101 with one side open. The height of the second storage layer 101 is designed to be higher than the height of the upper dome 6, ensuring that the upper dome 6 can move smoothly into the third positioning member 22 and that its outer wall is tightly abutted against the third positioning member 22. This not only optimizes space utilization but also facilitates the installation and disassembly of quartz components by operators, while ensuring the stability and accuracy of each component during the cleaning process.

[0052] Specifically, such as Figures 1 to 8As shown, the positioning device also includes a detachable limiting component connected to the hole 13, which is used to fix the lifting shaft 4, the lower dome 5, and the upper dome 6 vertically to the corresponding storage partition 10. The limiting component includes: a first limiting member 30, used to snap the lifting shaft 4 onto the upper storage partition 10. The middle part of the first limiting member 30 is provided with an arc-shaped part 300 that matches the shaft part 41 of the lifting shaft 4. The two ends of the first limiting member 30 have first connecting parts 301, and the two ends of the first connecting parts 301 extend into the holes 13 on the front and rear sides of the shaft part 41 of the lifting shaft 4 and connect them; a second limiting member 31, used to snap the lower dome 5 onto the middle storage partition 10. The storage compartment 10 has a second abutment 302 and a second connecting part 303 connected in a “7” shape. The second connecting part 303 extends into the hole 13 on the middle layer storage compartment 10 around the disc-shaped part 51 of the lower dome 5. The second abutment 302 abuts against the periphery of the disc-shaped part 51 of the lower dome 5. The storage compartment 10 has a third limiting member 32 for engaging the upper dome 6 onto the lower layer storage compartment 10. The third limiting member 32 has a third abutment 304 and a third connecting part 305 connected in a “7” shape. The third connecting part 305 extends into the hole 13 on the lower layer storage compartment 10 around the upper dome 6. The third abutment 304 abuts against the periphery of the upper dome 6.

[0053] The positioning device also includes a detachable limiting component connected to the hole 13, which is used to fix the lifting shaft 4, the lower dome 5, and the upper dome 6 vertically to the corresponding storage partition 10. The limiting component includes: a first limiting member 30, which is used to snap the lifting shaft 4 onto the upper storage partition 10. The middle part of the first limiting member 30 is provided with an arc-shaped part 300 that matches the shaft part 41 of the lifting shaft 4. The first connecting parts 301 at both ends extend into the holes 13 on the front and rear sides of the shaft part 41 of the lifting shaft 4 and connect them; a second limiting member 31, which is used to snap the lower dome 5 onto the middle storage partition 10. The second limiting member 31 has a second abutment 302 and a second connecting part 303, which are connected to form a "7"-shaped structure. The second connecting part 303 extends into the middle storage partition 10. The second abutment 302 abuts against the periphery of the lower dome 5 disc-shaped portion 51 within the hole 13 on the interlayer storage partition 10. The third limiting member 32 is used to snap the upper dome 6 onto the lower storage partition 10. The third limiting member 32 has a third abutment 304 and a third connecting portion 305, which are connected to form a "7"-shaped structure. The third connecting portion 305 extends into the hole 13 on the lower storage partition 10 around the upper dome 6, and the third abutment 304 abuts against the periphery of the upper dome 6. This design ensures the stability of each quartz component during the cleaning process, simplifies the installation and disassembly process, reduces operation time and labor intensity, improves work efficiency, and enhances the versatility and flexibility of the clamping device.

[0054] It is worth mentioning that, for example, Figure 1 and Figure 2 The first limiting member 30 is not limited to one and can be increased according to the size of the shaft part 41 of the lifting shaft 4. The second limiting member 31 and the third limiting member 32 are set to at least two, with the two on the two sides respectively, which can better achieve vertical restriction of the lower dome 5 and the upper dome 6.

[0055] Furthermore, such as Figure 3 , Figure 5 , Figure 6 , Figure 7 and Figure 8 As shown, the first connecting part 301, the second connecting part 303, and the third connecting part 305 are provided with external threads 306. The external threads 306 pass through the hole 13 and are connected by nuts, so that the first connecting part 301 is connected to the upper storage partition 10, the second connecting part 303 is connected to the middle storage partition 10, and the third connecting part 305 is connected to the lower storage partition 10; or the first connecting part 301, the second connecting part 303, and the third connecting part 305 are each provided with at least one pair of elastic buckle parts 307. When the buckle parts 307 pass through the hole 13, the buckle parts 307 will automatically pop out and be fastened to the circumference of the connecting part, and form a snap-fit ​​with the corresponding storage partition 10.

[0056] The first connecting part 301, the second connecting part 303, and the third connecting part 305 are provided with external threads 306 or at least a pair of elastic snap-fit ​​parts 307 for firmly fixing the limiting component to the corresponding storage partition 10. Specifically, the external thread 306 connection method is as follows: the first connecting part 301, the second connecting part 303, and the third connecting part 305 are each provided with external threads 306. These external threads 306 pass through the holes 13 and are then fastened with nuts. The first connecting part 301 is connected to the upper storage partition 10 with nuts to ensure the stability of the lifting shaft 4; the second connecting part 303 is connected to the middle layer with nuts. On the storage partition 10, the lower dome 5 is stably fixed; the third connecting part 305 is connected to the lower storage partition 10 by a nut to ensure the stability of the upper dome 6. Another connection method is the elastic buckle part 307: As another connection method, the first connecting part 301, the second connecting part 303 and the third connecting part 305 are each provided with at least one pair of elastic buckles 307. When these buckles 307 pass through the hole 13, they will automatically pop out by the spring and be fastened to the circumference of the connecting part, and form a snap with the corresponding storage partition 10. This not only simplifies the installation and disassembly process, but also ensures the stability of the limiting component.

[0057] It is worth mentioning that, Figure 2As shown, corner posts are provided at the four corners of the bottom storage partition 10. One function is to ensure the stability of the clamping device, and the other is to facilitate the disassembly and installation of the third limiting member 32.

[0058] Furthermore, such as Figure 1 and Figure 2 As shown, each vertical support plate 11 is provided with at least one handle 102. The handle 102 is located at the top of the vertical support plate 11. The height of the vertical support plate 11 is greater than the height of the storage layer, and the horizontal height of the handle 102 is higher than the upper end of the fixing plate 12.

[0059] Each vertical support plate 11 is provided with at least one handle 102, which is located at the top of the vertical support plate 11. The height of the vertical support plate 11 is designed to be greater than the height of the storage layer, which ensures the stability of the structure and the convenience of operation. In addition, the horizontal height of the handle 102 is higher than the top of the fixed plate 12, so that the operator can easily grasp the handle 102, which facilitates the overall handling and position adjustment of the clamping device and reduces the risks caused by handling or adjusting the position.

[0060] Specifically, such as Figure 1 , Figure 2 , Figure 3 and Figure 5 As shown, a guide groove 103 is provided on the upper storage partition 10. The guide groove 103 is used to guide the tube 50 of the lower dome 5 into the upper storage partition 10. The guide groove 103 is arranged along the width direction of the storage partition 10.

[0061] A guide groove 103 is provided on the upper storage partition 10. The guide groove 103 is used to guide the tube 50 of the lower dome 5 to accurately extend into the upper storage partition 10. The guide groove 103 is set along the width direction of the storage partition 10 to ensure that the tube 50 of the lower dome 5 can be smoothly and accurately aligned and inserted into the predetermined position. This not only improves the accuracy and convenience of installation, but also ensures the stability and accuracy of the lower dome 5 during the cleaning process, reducing the risk of incomplete cleaning or damage to parts due to positional deviation.

[0062] Specifically, such as Figure 2 , Figure 3 and Figure 4 As shown, the first positioning component 20 includes at least two first positioning blocks 200. The inner end of each first positioning block 200 has a positioning surface 201 that matches both sides of the lifting shaft 4. The outer end of the first positioning block 200 is provided with a guide hole 209 along the length direction of the upper storage partition 10. A first screw part 202 is inserted into the guide hole 209. The first screw part 202 passes through the hole 13 on the upper storage partition 10 and fixes the first positioning block 200 to the upper storage partition 10 with a nut.

[0063] The first positioning component 20 includes at least two first positioning blocks 200. The inner end of each first positioning block 200 has a positioning surface 201 that matches both sides of the lifting shaft 4, ensuring that it can fit tightly against the lifting shaft 4 and provide stable support. The outer end of the first positioning block 200 is provided with a guide hole 209 along the length direction of the upper storage partition 10. A first screw part 202 is inserted into the guide hole 209. The first screw part 202 passes through the hole 13 on the upper storage partition 10 and is firmly fixed to the upper storage partition 10 by a nut. This ensures the accurate installation and stable fixation of the first positioning block 200, and also facilitates the adjustment of its position to adapt to lifting shafts 4 of different sizes, improving the versatility and flexibility of the clamping device.

[0064] Furthermore, such as Figure 2 and Figure 5 As shown, the second positioning component 21 includes at least three second positioning blocks 203. The inner end of each second positioning block 203 has a first arc-shaped surface 204 that matches the outer wall of the lower dome 5. The first arc-shaped surface 204 fits against the disc-shaped portion 51 of the lower dome 5. The outer end of the second positioning block 203 is provided with a second screw portion 205. The second screw portion 205 passes through the hole 13 on the intermediate layer storage partition 10 and fixes the second positioning block 203 to the intermediate layer storage partition 10 with a nut.

[0065] The second positioning component 21 includes at least three second positioning blocks 203. The inner end of each second positioning block 203 has a first arc-shaped surface 204 that matches the outer wall of the lower dome 5. The first arc-shaped surface 204 fits tightly with the disc-shaped portion 51 of the lower dome 5, ensuring that the lower dome 5 remains stable during the cleaning process. The outer end of the second positioning block 203 is provided with a second screw portion 205. The second screw portion 205 passes through the hole 13 on the intermediate storage partition 10 and is firmly fixed to the intermediate storage partition 10 by a nut. This not only ensures the accurate installation and stable fixation of the second positioning block 203, but also adapts to lower domes 5 of different sizes, improving the versatility and flexibility of the clamping device.

[0066] Furthermore, such as Figure 2 and Figure 6 As shown, the third positioning component 22 includes at least three third positioning blocks 206. The inner end of each third positioning block 206 has a second arc-shaped surface 207 that matches the outer wall of the upper dome 6. The second arc-shaped surface 207 fits against the upper dome 6. The outer end of the third positioning block 206 is provided with a third screw portion 208. The third screw portion 208 passes through the hole 13 on the bottom storage partition 10 and fixes the third positioning block 206 to the bottom storage partition 10 with a nut.

[0067] The third positioning component 22 includes at least three third positioning blocks 206. The inner end of each third positioning block 206 has a second arc-shaped surface 207 that matches the outer wall of the upper dome 6. The second arc-shaped surface 207 fits tightly with the upper dome 6 to ensure its stability during cleaning. The outer end of the third positioning block 206 is provided with a third screw portion 208. The third screw portion 208 passes through the hole 13 on the bottom storage partition 10 and is firmly fixed to the bottom storage partition 10 by a nut. This ensures the accurate installation and stable fixation of the third positioning block 206 and can also adapt to upper domes 6 of different sizes, improving the versatility and flexibility of the clamping device.

[0068] It should be noted that at least three second positioning blocks 203 and at least three third positioning blocks 206 can achieve horizontal positioning. However, in this embodiment, four second positioning blocks 203 and four third positioning blocks 206 are used, which can better adapt to these subtle differences and ensure that the best positioning effect can be achieved every time it is installed.

[0069] A method of using a clamping device for cleaning quartz components in an epitaxial furnace includes the following steps:

[0070] 1) Preparation Stage: Place the clamping device on a horizontal end face, ensuring the device is placed stably. Check and confirm that the multiple evenly distributed holes 13 on each storage compartment 10, vertical support plate 11, and fixing plate 12 are aligned. This step is crucial to ensure stability during subsequent installation and cleaning processes, and to allow for smooth flow and drainage of chemical cleaning fluid;

[0071] 2) Install the lifting shaft 4: Using the positioning holes 104 on the upper storage partition 10, accurately insert the tilting support feet 40 of the lifting shaft 4 into the positioning holes 104. Ensure that both ends of the lifting shaft 4 abut against the first positioning member 20 to complete the initial positioning. Next, using the first limiting member 30, pass the first connecting parts 301 at both ends through the holes 13 on the upper storage partition 10, and securely fasten the first limiting member 30 to the upper storage partition 10 with nuts or other fasteners to ensure the lifting shaft 4 is firmly fixed. This design not only improves the stability of the lifting shaft 4 but also facilitates position adjustment to accommodate lifting shafts 4 of different sizes.

[0072] 3) Install the lower dome 5: Guide the tube 50 of the lower dome 5 through the guide groove 103 so that it can smoothly extend into the upper storage compartment 10. At the same time, ensure that the disc-shaped part 51 of the lower dome 5 is located in and abuts against the second positioning member 21 on the middle storage compartment 10, completing the initial positioning of the lower dome 5. Subsequently, using the second limiting member 31, extend its second connecting part 303 into the hole 13 on the middle storage compartment 10, and securely fasten the second limiting member 31 to the middle storage compartment 10 with a nut to ensure that the lower dome 5 is firmly fixed. The design of the guide groove 103 improves the installation accuracy and ensures that the lower dome 5 will not shift or be damaged during cleaning.

[0073] 4) Install the upper dome 6: Place the upper dome 6 on the bottom storage partition 10, ensuring its outer wall is tightly abutted against the third positioning member 22, thus completing the initial positioning of the upper dome 6. Then, using the third limiting member 32, insert its third connecting part 305 into the hole 13 on the bottom storage partition 10, and securely fasten the third limiting member 32 to the bottom storage partition 10 with a nut, ensuring the upper dome 6 is firmly fixed. This design not only ensures the stability of the upper dome 6 during the cleaning process but also simplifies the installation and disassembly process, reducing operation time and labor intensity.

[0074] 5) Start Cleaning: Start the cleaning equipment to begin the cleaning process for the quartz components. During this time, the clamping device remains stable to ensure cleaning effectiveness. Through carefully designed positioning components and limiting elements, the clamping device can maintain the stability and accuracy of the quartz components throughout the cleaning process, improving cleaning efficiency and quality;

[0075] 6) Disassembly and Maintenance: After cleaning, the detachable design allows for easy removal of the limiting components and quartz parts, facilitating subsequent inspection and maintenance. This design not only simplifies the disassembly process but also improves work efficiency, reduces the risk of damage due to improper disassembly, and ensures the long-term stable use of the clamping device.

[0076] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A clamping device for cleaning quartz components in an epitaxial furnace, comprising: The storage compartments (10), two vertical support plates (11) located on both sides of the storage compartments (10), and a fixing plate (12) located behind the storage compartments (10) and the vertical support plates (11) are arranged sequentially from top to bottom along the horizontal direction. The two sides of each storage compartment (10) are integrally formed with the vertical support plates (11), and the rear ends of each storage compartment (10) and the rear ends of the vertical support plates (11) are integrally formed with the fixing plate (12). The characteristic of this configuration is that: The storage partition (10), vertical support plate (11), and fixing plate (12) are all provided with multiple evenly distributed holes (13). Through the holes (13) on the three storage partitions (10), a positioning assembly is provided to fix the lifting shaft (4), lower dome (5), and upper dome (6) quartz components to be cleaned in the horizontal direction. The positioning assembly includes: a positioning hole (104) and a first positioning element (20) provided on the upper storage partition (10), a second positioning element (21) installed on the middle storage partition (10), and a positioning element located on the second positioning element (21). 21) The third positioning member (22) is located below and set on the bottom storage partition (10); the first positioning member (20) abuts against the left and right ends of the lifting shaft (4), and an inclined support foot (40) of the lifting shaft (4) extends into the positioning hole (104), the tube part (50) of the lower dome (5) extends into the upper storage partition (10), and the disc-shaped part (51) of the lower dome (5) is located in the second positioning member (21) and abuts against it, and the upper dome (6) is placed on the bottom storage partition (10), and its outer wall abuts against the third positioning member (22); The positioning assembly also includes a detachable limiting assembly connected to the hole (13), which is used to fix the lifting shaft (4), the lower dome (5) and the upper dome (6) vertically to the corresponding storage partition (10). The limiting assembly includes: The first limiting member (30) is used to snap the lifting shaft (4) onto the upper storage partition (10). The middle part of the first limiting member (30) is provided with an arc-shaped part (300) that matches the shaft part (41) of the lifting shaft (4). The two ends of the first limiting member (30) have first connecting parts (301), and the two first connecting parts (301) extend into the holes (13) on the front and rear sides of the shaft part (41) of the lifting shaft (4) and connect them. The second limiting member (31) is used to snap the lower dome (5) onto the intermediate storage partition (10). The second limiting member (31) has a second abutment (302) and a second connecting part (303), which are connected to form a "7" shaped structure. The second connecting part (303) extends into the hole (13) on the intermediate storage partition (10) located around the disc-shaped part (51) of the lower dome (5). The second abutment (302) abuts against the periphery of the disc-shaped part (51) of the lower dome (5). The third limiting member (32) is used to snap the upper dome (6) onto the lower storage partition (10). The third limiting member (32) has a third abutment (304) and a third connecting part (305), which are connected to form a "7" shaped structure. The third connecting part (305) extends into the hole (13) on the lower storage partition (10) located around the upper dome (6). The third abutment (304) abuts against the periphery of the upper dome (6).

2. The clamping device for cleaning quartz components in an epitaxial furnace according to claim 1, characterized in that: The upper storage partition (10) is provided with a guide groove (103). The guide groove (103) is used to guide the tube (50) of the lower dome (5) to extend into the upper storage partition (10). The guide groove (103) is set along the width direction of the storage partition (10).

3. The clamping device for cleaning quartz components in an epitaxial furnace according to claim 2, characterized in that: The upper storage partition (10) and the adjacent middle storage partition (10) cooperate with the vertical support plates (11) on both sides and the fixed plate (12) at the rear to form a first storage layer (100) with one side open. The middle storage partition (10) and the lower storage partition (10) cooperate with the vertical support plates (11) on both sides and the fixed plate (12) at the rear to form a second storage layer (101) with one side open. The height of the first storage layer (100) is higher than the height of the disc-shaped part (51) of the lower dome (5), ensuring that the disc-shaped part (51) can move above the second positioning member (21) and extend into the second positioning member (21). The height of the second storage layer (101) is higher than the height of the upper dome (6), ensuring that the upper dome (6) can move into the third positioning member (22) and make its outer wall abut against the third positioning member (22).

4. A clamping device for cleaning quartz components in an epitaxial furnace according to claim 2, characterized in that: The first connecting part (301), the second connecting part (303) and the third connecting part (305) are provided with external threads (306). The external threads (306) pass through the hole (13) and are connected by nuts, so that the first connecting part (301) is connected to the upper storage partition (10), the second connecting part (303) is connected to the middle storage partition (10) and the third connecting part (305) is connected to the lower storage partition (10); or the first connecting part (301), the second connecting part (303) and the third connecting part (305) are each provided with at least one pair of elastic buckle parts (307). When the buckle part (307) passes through the hole (13), the buckle part (307) will automatically pop out and be fastened to the circumference of the connecting part, and form a snap-fit ​​with the corresponding storage partition (10).

5. A clamping device for cleaning quartz components in an epitaxial furnace according to claim 2, characterized in that: Each of the vertical support plates (11) is provided with at least one handle (102), the handle (102) is located at the top of the vertical support plate (11), the height of the vertical support plate (11) is greater than the height of the storage layer, and the horizontal height of the handle (102) is higher than the upper end of the fixing plate (12).

6. A clamping device for cleaning quartz components in an epitaxial furnace according to claim 2, characterized in that: The first positioning component (20) includes two first positioning blocks (200). The inner end of each first positioning block (200) has a positioning surface (201) that matches the two sides of the lifting shaft (4). The outer end of the first positioning block (200) is provided with a guide hole (209) along the length direction of the upper storage partition (10). A first screw part (202) is inserted into the guide hole (209). The first screw part (202) passes through the hole (13) on the upper storage partition (10) and fixes the first positioning block (200) on the upper storage partition (10) with a nut.

7. A clamping device for cleaning quartz components in an epitaxial furnace according to claim 2, characterized in that: The second positioning component (21) includes at least three second positioning blocks (203). The inner end of each second positioning block (203) has a first arc-shaped surface (204) that matches the outer wall of the lower dome (5). The first arc-shaped surface (204) fits against the disc-shaped portion (51) of the lower dome (5). The outer end of the second positioning block (203) is provided with a second screw portion (205). The second screw portion (205) passes through the hole (13) on the intermediate storage partition (10) and fixes the second positioning block (203) on the intermediate storage partition (10) with a nut.

8. A clamping device for cleaning quartz components in an epitaxial furnace according to claim 2, characterized in that: The third positioning component (22) includes at least three third positioning blocks (206). The inner end of each third positioning block (206) has a second arc-shaped surface (207) that matches the outer wall of the upper dome (6). The second arc-shaped surface (207) fits against the upper dome (6). The outer end of the third positioning block (206) is provided with a third screw part (208). The third screw part (208) passes through the hole (13) on the bottom storage partition (10) and fixes the third positioning block (206) on the bottom storage partition (10) with a nut.

9. A method of using the clamping device for cleaning quartz components in an epitaxial furnace as described in any one of claims 2 to 8, comprising the following steps: 1) Preparation stage: Place the clamping device on the horizontal end face, ensuring that the device is placed stably, and then check and ensure that the multiple evenly distributed holes (13) on each storage partition (10), vertical support plate (11) and fixing plate (12) are aligned; 2) Install the lifting shaft (4): Through the positioning hole (104) on the upper storage partition (10), the inclined support foot (40) of the lifting shaft (4) is inserted into the positioning hole (104), and the left and right ends of the lifting shaft (4) are abutted against the first positioning part (20) to ensure that the lifting shaft (4) is initially positioned. Using the first limiting part (30), the lifting shaft (4) is firmly clamped onto the upper storage partition (10) through the hole (13) on the upper storage partition (10) to ensure that the lifting shaft (4) is firmly fixed. 3) Install the lower dome (5): Guide the tube (50) of the lower dome (5) through the guide groove (103) so that it extends into the upper storage partition (10). At the same time, ensure that the disc-shaped part (51) of the lower dome (5) is located in the second positioning part (21) on the middle storage partition (10) and abuts against it to complete the initial positioning of the lower dome (5). Use the second limiting part (31) to firmly snap the lower dome (5) onto the middle storage partition (10) through the hole (13) on the middle storage partition (10) to ensure that the lower dome (5) is firmly fixed. 4) Install the upper dome (6): Place the upper dome (6) on the bottom storage partition (10) so that its outer wall abuts against the third positioning member (22) to complete the initial positioning of the upper dome (6). Using the third limiting member (32), the upper dome (6) is firmly snapped onto the bottom storage partition (10) through the hole (13) on the bottom storage partition (10) to ensure that the upper dome (6) is firmly fixed. 5) Start cleaning: Start the cleaning equipment to clean the quartz components. During the process, the clamping device should be kept stable to ensure the cleaning effect. 6) Disassembly and maintenance: After cleaning, the limiter and quartz components can be easily disassembled through the detachable design, which facilitates subsequent inspection and maintenance.

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