Diamond crystal growth device

Abstract

The present invention provides a diamond crystal growth device, which belongs to the field of diamond growth technology and solves the problem of poor diamond growth quality in the prior art. The present invention includes a first cavity, a growth zone is provided below the first cavity, and the growth zone is used to grow diamonds; an antenna, the antenna is arranged in the first cavity and located above the growth zone, and the antenna is used to excite the reaction gas to form plasma; and an adjustment component, the adjustment component includes an adjustment ring and a driving member, the adjustment ring is movably arranged above the antenna, the adjustment ring is used to constrain the shape of the plasma, and the driving member acts on the adjustment ring so that the adjustment ring has at least horizontal freedom of movement. The present application configures an additional adjustment component, uses the adjustment ring to constrain the shape of the plasma, and then adjusts the horizontal position of the adjustment ring through the driving member, thereby indirectly adjusting the horizontal position of the plasma, thereby achieving plasma position correction, and then improving the quality of diamond crystal growth.

Description

Technical Field

[0001] The invention belongs to the technical field of diamond growth, and in particular relates to a diamond crystal growth device. Background Art

[0002] Diamond growth mainly uses the high energy generated by microwaves to ionize the process gas, and the ionized gas grows into diamond on the surface of the substrate.

[0003] The existing diamond substrate is placed on the base, and the uniformity of the substrate heating seriously affects the quality of the single-furnace production, and the base area directly affects the production efficiency of the equipment. When the diamond growth equipment is running, the position of the plasma is affected by the processing size tolerance of the internal parts of the equipment, the assembly quality, the microwave source and the processing quality of the waveguide section, and it is easy to deviate from the base, thereby reducing the quality of diamond growth. If the plasma deviates seriously, it may even be impossible to grow diamonds normally.

[0004] Based on the above content, the technical problem to be solved by this application is: how to improve the growth quality of diamond. Summary of the invention

[0005] The purpose of the present invention is to solve the above problems in the prior art and propose a diamond crystal growth device to solve the problem of poor quality of diamond growth in the prior art. The technical effect of the present application is to improve the growth quality of diamond.

[0006] The purpose of the present invention can be achieved through the following technical solutions: a diamond crystal growth device, including a first cavity, a growth zone is provided below the first cavity, and the growth zone is used to grow diamond; an antenna, the antenna is arranged in the first cavity and located above the growth zone, and the antenna is used to excite the reaction gas to form plasma; and an adjustment component, the adjustment component includes: an adjustment ring, the adjustment ring is movably arranged above the antenna, and the adjustment ring is used to constrain the shape of the plasma; a driving member, the driving member acts on the adjustment ring so that the adjustment ring has at least horizontal freedom of movement. The first cavity can be used for reaction of the reaction gas, and plasma is formed by microwave excitation; the growth zone is generally provided with a substrate, and diamond crystal growth is carried out on the substrate; the antenna is used to transmit and convert microwaves, thereby exciting the reaction gas; the adjustment component is used to constrain and adjust the position of the plasma.

[0007] In the above-mentioned diamond crystal growth device, the antenna includes a transmission part and a conversion part, the transmission part is in the shape of a vertical column, and the conversion part is in the shape of a circular plate or a circular ring, wherein the transmission part is connected to the microwave source and is used to transmit the microwave to the conversion part, and the conversion part is connected to the transmission part and is used to convert the microwave mode into another microwave and can excite the reaction gas in the first cavity to form plasma.

[0008] In the above-mentioned diamond crystal growth device, the driving member includes: a pressing part, which is in the first cavity and has horizontal freedom of movement to abut against the adjustment ring; a force-applying part, which is at least partially arranged outside the first cavity, and the force-applying part passes through the first cavity and is connected to the pressing part. It can be understood that the pressing part can abut against the adjustment ring. More specifically, the pressing part can abut against the outer periphery of the adjustment ring. When the force-applying part acts on the pressing part, it drives the pressing part to move, and the pressing part can drive the adjustment ring to move. The force-applying part in the first cavity can be easily subjected to force. For example, the force-applying part can be moved by manually applying a force, or driven to move by an external driving mechanism. It should be noted that a better sealing structure needs to be configured between the force-applying part and the first cavity to ensure that the working environment of the first cavity is not affected.

[0009] In the above-mentioned diamond crystal growth device, the force-applying part is threadedly connected or slidably connected to the first cavity. Exemplarily, the force-applying part is a stud, a threaded hole is provided on the wall of the first cavity, the stud is threadedly connected to the threaded hole, and the stud is rotated to axially move and drive the top-pressing part to move; Exemplarily, the force-applying part is a guide rail or a guide groove, and a guide groove or a guide rail matching the force-applying part is provided on the wall of the first cavity, so that the force-applying part can slide and drive the top-pressing part to move.

[0010] In the above-mentioned diamond crystal growth device, the driving member includes: a first magnetic member, the first magnetic member is arranged in the first cavity, and the first magnetic member is connected to the adjustment ring, or the first magnetic member has the freedom of movement to abut against the adjustment ring; a second magnetic member, the second magnetic member is arranged outside the first cavity, and the second magnetic member acts on the first magnetic member to drive the first magnetic member to move. It can be understood that the first magnetic member can be connected to the adjustment ring, and the second magnetic member can be configured as a magnetic member with the same or opposite magnetic properties as the first magnetic member. By moving the second magnetic member or increasing the magnetic force of the second magnetic member, the first magnetic member is driven relatively close to or away from the second magnetic member, and the movement of the first magnetic member can drive the adjustment ring to move synchronously; of course, the first magnetic member can also abut against the adjustment ring, and the second magnetic member can drive the first magnetic member to move, and the first magnetic member moves to push the adjustment ring to move.

[0011] In the above-mentioned diamond crystal growth device, there are at least two driving members and they are respectively arranged on the periphery of the adjustment ring, so that the adjustment ring has the freedom of movement in multiple directions on the horizontal plane. It can be understood that there are at least two driving members, and the straight lines connecting at least two driving members and the center of the adjustment ring do not overlap each other, so as to ensure that the adjustment ring can be adjusted to move forward and backward in at least two directions, so as to achieve deviation correction. Preferably, the number of driving members is configured as an integer multiple of 4, and they are respectively located at different angles on the periphery of the adjustment ring. Each driving member is preferably arranged at equal angle intervals. Such an arrangement can simplify the deviation correction parameters.

[0012] In the above-mentioned diamond crystal growth device, the adjustment ring and / or the top pressure part are made of polytetrafluoroethylene material. It is understandable that the polytetrafluoroethylene material will not affect the transmission of microwaves, is corrosion-resistant and high-temperature-resistant, and is suitable for the environment in the first cavity.

[0013] In the above-mentioned diamond crystal growth device, a wave-transmitting ring is provided between the growth zone and the antenna, and the wave-transmitting ring allows the plasma to penetrate into the growth zone; a metal support is provided on the periphery of the wave-transmitting ring, and the top of the metal support carries the antenna to allow a gap to be formed between the top surface of the wave-transmitting ring and the bottom surface of the antenna. Exemplarily, the wave-transmitting ring is made of quartz glass, and by providing a metal support on the periphery of the wave-transmitting ring and supporting the antenna with the metal support, a gap can be formed between the antenna and the wave-transmitting ring, thereby avoiding direct contact and squeezing of the antenna by the antenna, and preventing the wave-transmitting ring from being damaged or broken. It should be noted that the metal support can reflect microwaves.

[0014] In the above-mentioned diamond crystal growth device, the bottom surface of the antenna is provided with an annular groove, the annular groove allows the top of the wave-transmitting ring to extend into, the top of the wave-transmitting ring is provided with an inclined chamfer, and a sealing ring is sleeved on the inclined chamfer. It can be understood that by providing an annular groove on the bottom surface of the antenna and an inclined chamfer on the top of the wave-transmitting ring, the gap between the inclined chamfer and the inner wall of the annular groove allows the sealing ring to be accommodated, thereby achieving side O-type sealing instead of plane sealing, which is not affected by the gravity of the antenna and has a better sealing effect.

[0015] In the above-mentioned diamond crystal growth device, a detection component is also included, and the detection component includes: a detection window, the detection window is arranged on the first cavity, and a detection channel is formed between the detection window and the antenna, and the detection channel is used to observe the plasma; a detection unit, the detection unit is arranged on the detection window, the detection unit is a CCD camera or an infrared temperature sensor, and the detection unit is communicatively connected or electrically connected to the driving member. Exemplarily, the detection window can be configured at the top of the first cavity, and the detection window can obtain at least part of the field of view of the area where the antenna is located through the detection channel, so as to facilitate the detection unit to detect and obtain image information, and obtain the deviation value of the plasma by analyzing the image information, or obtain the deviation value of the plasma by analyzing the temperature information detected by infrared, and then transmit the information to the driving member, and the driving member drives the adjustment ring to adjust the position based on the deviation value of the plasma to achieve online deviation correction.

[0016] In the above-mentioned diamond crystal growth device, a second cavity is also included, and the second cavity is located below the first cavity. A base is provided in the second cavity, and the growth zone is formed on the base, and the base has freedom of movement in the vertical direction. Exemplarily, a driving component can be connected to the base, and the driving component drives the base to move up and down in the vertical direction. The driving component includes a reducer, a magnetic fluid and a transmission mechanism, wherein the transmission mechanism is arranged inside the second cavity, including a gear and a rack, the rack is fixedly connected to the base, and the gear is driven to rotate by the output shaft of the reducer. In some embodiments, the output shaft of the reducer is also provided with a sleeve, and the sleeve and the output shaft are inserted into the second cavity from the outside of the second cavity to protect the output shaft.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. The present application configures an additional adjustment component, uses an adjustment ring to constrain the shape of the plasma, and then adjusts the horizontal position of the adjustment ring through a driving member, thereby indirectly adjusting the horizontal position of the plasma, thereby achieving position correction of the plasma, thereby improving the quality of diamond crystal growth;

[0019] 2. The present application provides a metal support on the outer periphery of the wave-transmitting ring and relies on the metal support to support the antenna, so that a gap can be formed between the antenna and the wave-transmitting ring, thereby preventing the antenna from directly contacting and squeezing the wave-transmitting ring, and preventing the wave-transmitting ring from being damaged or broken;

[0020] 3. The present application provides an annular groove on the bottom surface of the antenna and an inclined chamfer on the top of the wave-transmitting ring, so that the gap between the inclined chamfer and the inner wall of the annular groove allows for the accommodation of a sealing ring, thereby achieving a side O-type seal instead of a plane seal, which is not affected by the gravity of the antenna and has a better sealing effect;

[0021] 4. The present application sets up a second cavity and a base, and utilizes a driving assembly to drive the base to move in a vertical direction, thereby driving the growth area on the base to move synchronously, so as to adapt to a variety of different processes. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the three-dimensional structure of the diamond crystal growth device of the present application;

[0023] Figure 2 yes Figure 1 A schematic cross-sectional view of the structure shown;

[0024] Figure 3 It is a partial structural schematic diagram of the diamond crystal growth device of the present application;

[0025] Figure 4 yes Figure 2 Schematic diagram of the enlarged structure of the A area in the middle;

[0026] Figure 5 It is a simplified structural diagram of the second embodiment of the driving member of the present application;

[0027] Figure 6 It is a simplified structural diagram of the detection component used in the diamond crystal growth device of the present application;

[0028] Figure 7 It is a schematic diagram of the three-dimensional structure of the driving assembly used in the diamond crystal growth device of the present application;

[0029] In the figure, 100, the first cavity; G, the growth zone; 200, the antenna; 210, the transmission part; 220, the conversion part; 230, the annular groove; 300, the adjustment component; 310, the adjustment ring; 320, the driving part; 321, the top pressure part; 322, the force application part; 333, the first magnetic part; 334, the second magnetic part; 400, the wave-transmitting ring; 410, the inclined chamfer; 420, the sealing ring; 500, the metal support; 600, the detection component; 610, the detection window; S, the detection channel; 620, the detection unit; 700, the second cavity; 710, the base; 800, the driving component; 810, the reducer; 820, the magnetic fluid; 830, the gear; 840, the rack; 850, the sleeve. DETAILED DESCRIPTION

[0030] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0031] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0032] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0033] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0035] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only embodiment.

[0036] Please refer to the attached drawings in the instruction manual. Figure 1-Figure 3 The diamond crystal growth device of the present application includes a first cavity 100, a growth zone G is provided below the first cavity 100, and the growth zone G is used to grow diamond; an antenna 200, the antenna 200 is arranged in the first cavity 100 and above the growth zone G, and the antenna 200 is used to excite the reaction gas to form plasma; and an adjustment component 300, the adjustment component 300 includes: an adjustment ring 310, the adjustment ring 310 is movably arranged above the antenna 200, and the adjustment ring 310 is used to constrain the shape of the plasma; a driving member 320, the driving member 320 acts on the adjustment ring 310, so that the adjustment ring 310 has at least horizontal freedom of movement.

[0037] It is understandable that the first cavity 100 can be connected to a microwave source and a gas source, and the microwave source can convert the microwave mode through the antenna 200, and the microwave excites the gas connected to the gas source to form a spherical flame, that is, plasma. The growth area G can be equipped with a substrate, and under the action of the plasma, the substrate in the growth area G can gradually grow diamond crystals. The existing plasma often deviates from the set position when used, and there are many deviation factors. For example, the flatness of the actual surface of the antenna 200 is not the same as the model in the simulation software. The size of the deviation depends on the processing accuracy. In addition to the processing accuracy of the antenna 200, there are also factors such as the assembly accuracy of each component in the first cavity 100 in the actual device, the microwave source, and the processing quality of the waveguide section. Therefore, the present application is additionally configured with an adjustment component 300, and the shape of the plasma is constrained by the adjustment ring 310, and then the horizontal position of the adjustment ring 310 is adjusted by the driving member 320, thereby indirectly adjusting the horizontal position of the plasma, so as to achieve the position correction of the plasma, thereby improving the quality of the diamond crystal growth.

[0038] In some embodiments, the driving member 320 includes: a pressing portion 321 and a force-applying portion 322. The pressing portion 321 is in the first cavity 100 and has a horizontal degree of freedom of movement to abut against the adjustment ring 310. The force-applying portion 322 is at least partially disposed outside the first cavity 100, and the force-applying portion 322 passes through the first cavity 100 and is connected to the pressing portion 321. It can be understood that the pressing portion 321 can abut against the adjustment ring 310. More specifically, the pressing portion 321 can abut against the outer periphery of the adjustment ring 310. When the force-applying portion 322 acts on the pressing portion 321, the pressing portion 321 is driven to move, and the pressing portion 321 can drive the adjustment ring 310 to move. The force-applying portion 322 in the first cavity 100 can be easily subjected to force. For example, the force-applying portion 322 can be moved by applying force manually, or driven to move by an external driving mechanism. It should be noted that a better sealing structure needs to be configured between the force applying portion 322 and the first cavity 100 to ensure that the working environment of the first cavity 100 is not affected.

[0039] Continue to refer to Figure 1-Figure 3 In some embodiments, the force-applying part 322 is threadedly connected or slidably connected to the first cavity 100. Exemplarily, the force-applying part 322 is a stud, and a threaded hole is provided on the wall of the first cavity 100. The stud is threadedly connected to the threaded hole, and the stud is rotated to axially move and drive the pressing part 321 to move; Exemplarily, the force-applying part 322 is a guide rail or a guide groove, and a guide groove or a guide rail matching the force-applying part 322 is provided on the wall of the first cavity 100, so that the force-applying part 322 can slide and drive the pressing part 321 to move.

[0040] See also Figure 5 In other embodiments, the driving member 320 includes: a first magnetic member 333 and a second magnetic member 334, the first magnetic member 333 is disposed in the first cavity 100, and the first magnetic member 333 is connected to the adjustment ring 310, or the first magnetic member 333 has the freedom of movement to abut against the adjustment ring 310, the second magnetic member 334 is disposed outside the first cavity 100, and the second magnetic member 334 acts on the first magnetic member 333 to drive the first magnetic member 333 to move.

[0041] It can be understood that the first magnetic component 333 can be connected to the adjustment ring 310, and the second magnetic component 334 can be configured as a magnetic component with the same or opposite magnetism as the first magnetic component 333. By moving the second magnetic component 334 or increasing the magnetic force of the second magnetic component 334, the first magnetic component 333 can be driven relatively close to or away from the second magnetic component 334, and the movement of the first magnetic component 333 can drive the adjustment ring 310 to move synchronously; of course, the first magnetic component 333 can also abut against the adjustment ring 310, and the second magnetic component 334 can drive the first magnetic component 333 to move, and the first magnetic component 333 moves to push the adjustment ring 310 to move.

[0042] In some embodiments, there are at least two driving members 320 and they are respectively arranged on the periphery of the adjustment ring 310, so that the adjustment ring 310 has the freedom of movement in multiple directions on the horizontal plane. It is understandable that there are at least two driving members 320, and the straight lines connecting the centers of at least two driving members 320 and the adjustment ring 310 do not overlap each other, so as to ensure that the adjustment ring 310 can be adjusted to move forward and backward in at least two directions, so that correction can be achieved. Preferably, the number of driving members 320 is configured as an integer multiple of 4, and they are respectively located at different angles on the periphery of the adjustment ring 310. Each driving member 320 is preferably arranged at equal angle intervals. Such an arrangement can simplify the correction parameters.

[0043] In some embodiments, the adjusting ring 310 and / or the pressing portion 321 are made of polytetrafluoroethylene material. It is understood that the polytetrafluoroethylene material does not affect the transmission of microwaves, is corrosion-resistant and high-temperature-resistant, and is suitable for the environment in the first cavity 100 .

[0044] See also Figure 1 and Figure 3 In some embodiments, the antenna 200 includes a transmission portion 210 and a conversion portion 220, the transmission portion 210 is in a vertical column shape, and the conversion portion 220 is in a circular plate shape or a circular ring shape, wherein the transmission portion 210 is connected to a microwave source for transmitting microwaves to the conversion portion 220, and the conversion portion 220 is connected to the transmission portion 210 for converting a microwave mode into another microwave and exciting the reaction gas in the first cavity 100 to form plasma.

[0045] See also Figure 2 and Figure 4In some embodiments, a wave-transmitting ring 400 is provided between the growth region G and the antenna 200, and the wave-transmitting ring 400 allows plasma to penetrate into the growth region G; a metal support 500 is provided on the periphery of the wave-transmitting ring 400, and the top of the metal support 500 carries the antenna 200 to allow a gap to be formed between the top surface of the wave-transmitting ring 400 and the bottom surface of the antenna 200. Exemplarily, the wave-transmitting ring 400 is made of quartz glass. By providing the metal support 500 on the periphery of the wave-transmitting ring 400 and supporting the antenna 200 by the metal support 500, a gap can be formed between the antenna 200 and the wave-transmitting ring 400, thereby preventing the antenna 200 from directly contacting and squeezing the wave-transmitting ring 400, and preventing the wave-transmitting ring 400 from being damaged or broken. It should be noted that the metal support 500 can reflect microwaves.

[0046] Continue to refer to Figure 2 and Figure 4 In some embodiments, an annular groove 230 is provided on the bottom surface of the antenna 200, and the annular groove 230 allows the top of the wave-transmitting ring 400 to extend therein, and an inclined chamfer 410 is provided on the top of the wave-transmitting ring 400, and a sealing ring 420 is sleeved on the inclined chamfer 410. It can be understood that by providing the annular groove 230 on the bottom surface of the antenna 200 and the inclined chamfer 410 on the top of the wave-transmitting ring 400, the gap between the inclined chamfer 410 and the inner wall of the annular groove 230 allows the sealing ring 420 to be accommodated, thereby realizing a side O-type seal instead of a plane seal, which is not affected by the gravity of the antenna 200 and has a better sealing effect.

[0047] See also Figure 1 and Figure 6 In some embodiments, the diamond crystal growth device of the present application further includes a detection component 600, which includes: a detection window 610, which is arranged on the first cavity 100, and a detection channel S is formed between the detection window 610 and the antenna 200, and the detection channel S is used to observe the plasma; a detection unit 620, which is arranged on the detection window 610, and the detection unit 620 is a CCD camera or an infrared temperature sensor, and the detection unit 620 is connected to the driving member 320 for communication or electrical connection. Exemplarily, the detection window 610 can be configured at the top of the first cavity 100, and the detection window 610 can obtain at least part of the field of view of the area where the antenna 200 is located through the detection channel S, so as to facilitate the detection unit 620 to detect and obtain image information, and obtain the deviation value of the plasma by analyzing the image information, or obtain the deviation value of the plasma by analyzing the temperature information detected by infrared, and then transmit the information to the driving member 320, and the driving member 320 drives the adjustment ring 310 to adjust the position based on the deviation value of the plasma to achieve online deviation correction.

[0048] See also Figure 1 , Figure 2 as well as Figure 7In some embodiments, the diamond crystal growth device of the present application further includes a second cavity 700, which is located below the first cavity 100. A base 710 is provided in the second cavity 700, a growth area G is formed on the base 710, and the base 710 has freedom of movement in the vertical direction.

[0049] Exemplarily, the base 710 may be connected to a driving assembly 800, and the driving assembly 800 drives the base 710 to move up and down in the vertical direction. The driving assembly 800 includes a reducer 810, a magnetic fluid 820, and a transmission mechanism, wherein the transmission mechanism is arranged inside the second cavity 700, and includes a gear 830 and a rack 840, the rack 840 is fixedly connected to the base 710, and the gear 830 is driven to rotate by the output shaft of the reducer 810. In some embodiments, the output shaft of the reducer 810 is further provided with a sleeve 850, and the sleeve 850 and the output shaft penetrate into the second cavity 700 from the outside of the second cavity 700 to protect the output shaft.

[0050] Working principle:

[0051] First, the first cavity 100 is evacuated, and then the reaction gas is connected from the external gas source. The transmission part 210 on the top of the antenna 200 is connected to the microwave source, and then the transmission part 210 transmits the microwave to the conversion part 220, so that the previous microwave mode is converted into another microwave. The converted microwave excites the reaction gas to form plasma in the first cavity 100. The plasma is in the shape of a fireball. Through the detection window 610 and the detection unit 620, the deviation value of the plasma relative to the center of the first cavity 100 is obtained. Based on the deviation value, the driving member 320 drives the adjustment ring 310 to move to the corresponding position, thereby controlling the movement and correction of the plasma until the alignment is completed. The reducer 810 outside the second cavity 700 drives the gear 830 to rotate, and the gear 830 rotates to drive the rack 840 to rise, thereby driving the base 710 connected to the rack 840 to rise, and the growth area G on the base 710 also rises synchronously, so as to reach the bottom of the plasma, and the diamond can grow normally.

[0052] Beneficial effects:

[0053] The present application configures an additional adjustment component 300, uses an adjustment ring 310 to constrain the shape of the plasma, and then adjusts the horizontal position of the adjustment ring 310 through a driving member 320, thereby indirectly adjusting the horizontal position of the plasma, thereby achieving position correction of the plasma, and further improving the quality of diamond crystal growth; by arranging a metal support member 500 on the periphery of the wave-transmitting ring 400, and relying on the metal support member 500 to support the antenna 200, a gap can be formed between the antenna 200 and the wave-transmitting ring 400, thereby preventing the antenna 200 from directly contacting and squeezing the wave-transmitting ring 400, and preventing the wave-transmitting ring 400 from being damaged. 00 is damaged and ruptured; by setting an annular groove 230 on the bottom surface of the antenna 200 and setting an inclined chamfer 410 on the top of the wave-transmitting ring 400, the gap between the inclined chamfer 410 and the inner wall of the annular groove 230 allows for accommodating a sealing ring 420, thereby achieving a side O-type seal rather than a plane seal, which is not affected by the gravity of the antenna 200 and has a better sealing effect; by setting a second cavity 700 and a base 710, the driving assembly 800 is used to drive the base 710 to move in the vertical direction, thereby driving the growth area G on the base 710 to move synchronously, so as to adapt to a variety of different processes.

[0054] The specific embodiments described herein are merely examples of the spirit of the present invention. Those skilled in the art may make various modifications or additions to the specific embodiments described or replace them in similar ways, but they will not deviate from the spirit of the present invention or exceed the scope defined by the appended claims.

Claims

1. A diamond crystal growth device, characterized in that: include: A first cavity (100), wherein a growth zone (G) is provided below the first cavity (100), and the growth zone (G) is used for growing diamond; an antenna (200), the antenna (200) being arranged in the first cavity (100) and located above the growth region (G), the antenna (200) being used to excite the reaction gas to form plasma; as well as An adjustment component (300), the adjustment component (300) comprising: an adjustment ring (310), the adjustment ring (310) being movably disposed above the antenna (200), and the adjustment ring (310) being used to constrain the shape of the plasma; A driving member (320) acts on the adjusting ring (310) so that the adjusting ring (310) has at least a horizontal degree of freedom of movement.

2. The diamond crystal growth device according to claim 1, characterized in that: The driving member (320) comprises: A pressing portion (321), the pressing portion (321) being in the first cavity (100) and having a horizontal degree of freedom of movement so as to abut against the adjusting ring (310); A force-applying portion (322), wherein the force-applying portion (322) is at least partially disposed outside the first cavity (100), and the force-applying portion (322) passes through the first cavity (100) and is connected to the pressing portion (321).

3. The diamond crystal growth device according to claim 2, characterized in that: The force applying portion (322) and the first cavity (100) are threadedly connected or slidably connected.

4. The diamond crystal growth device according to claim 1, characterized in that: The driving member (320) comprises: A first magnetic member (333), wherein the first magnetic member (333) is disposed in the first cavity (100), and the first magnetic member (333) is connected to the adjustment ring (310), or the first magnetic member (333) has a degree of freedom of movement to abut against the adjustment ring (310); A second magnetic member (334), wherein the second magnetic member (334) is disposed outside the first cavity (100), and the second magnetic member (334) acts on the first magnetic member (333) to drive the first magnetic member (333) to move.

5. The diamond crystal growth device according to claim 1, characterized in that: There are at least two driving members (320) which are respectively arranged on the outer circumference of the adjustment ring (310), so that the adjustment ring (310) has a plurality of degrees of freedom of movement in multiple directions on a horizontal plane.

6. The diamond crystal growth device according to claim 2, characterized in that: The adjusting ring (310) and / or the pressing portion (321) are made of polytetrafluoroethylene material.

7. The diamond crystal growth device according to claim 1, characterized in that: A wave-transmitting ring (400) is provided between the growth zone (G) and the antenna (200), and the wave-transmitting ring (400) allows the plasma to penetrate into the growth zone (G); a metal support (500) is provided on the periphery of the wave-transmitting ring (400), and the top of the metal support (500) supports the antenna (200) to allow a gap to be formed between the top surface of the wave-transmitting ring (400) and the bottom surface of the antenna (200).

8. The diamond crystal growth device according to claim 7, characterized in that: The bottom surface of the antenna (200) is provided with an annular groove (230), and the annular groove (230) allows the top of the wave-transmitting ring (400) to extend into the annular groove. The top of the wave-transmitting ring (400) is provided with an inclined chamfer (410), and a sealing ring (420) is sleeved on the inclined chamfer (410).

9. The diamond crystal growth device according to claim 1, characterized in that: Also included is a detection component (600), the detection component (600) comprising: a detection window (610), the detection window (610) being arranged on the first cavity (100) and forming a detection channel (S) between the detection window and the antenna (200), the detection channel (S) being used to observe the plasma; A detection unit (620), wherein the detection unit (620) is disposed in the detection window (610), the detection unit (620) is a CCD camera or an infrared temperature sensor, and the detection unit (620) is communicatively connected or electrically connected to the driving member (320).

10. The diamond crystal growth device according to claim 1, characterized in that: The invention also comprises a second cavity (700), wherein the second cavity (700) is located below the first cavity (100), a base (710) is provided in the second cavity (700), the growth zone (G) is formed on the base (710), and the base (710) has freedom of movement in a vertical direction.

Images