A device for detecting the purity of a gas source and a gallium nitride production system

Abstract

The present invention relates to the technical field of gas purity detection, and particularly relates to a gas source purity detection device and a gallium nitride production system. The gas source purity detection device includes a main body, a support member, a control ring, a moving arm, and a concentration sensor. The main body is used for connecting to a gas source pipeline. The control ring is rotatably fitted to the support member and driven by a driver, and there is a rotational seal between the control ring and the outer wall surface. A gas collecting groove is formed on the inner ring wall of the control ring. The support member is provided with a mounting blind hole, and the moving arm is slidably fitted to the mounting blind hole and has a sliding seal. A first elastic member is abutted between the moving arm and the bottom wall of the mounting blind hole. The concentration sensor is arranged on the outer side wall of the moving arm. When the control ring rotates, the gas collecting groove can be periodically communicated with the main body and can also periodically move to the position of the moving arm. It can achieve continuous and accurate detection of the gas source purity for a longer time and realize automatic calibration while performing purity detection.

Description

Technical Field

[0001] The present invention relates to the technical field of gas purity detection, and in particular to a gas source purity detection device and a gallium nitride production system. Background Art

[0002] In production activities, when using raw gas, the purity of the gas source needs to be continuously monitored to ensure that the purity of the gas source meets the use requirements. In the actual monitoring process, as the monitoring time increases, the problem of reduced monitoring accuracy often occurs, and it is necessary to regularly shut down the machine to recalibrate the purity monitoring module. This is not only not conducive to the accurate monitoring of the gas source purity in a timely and effective manner, but also affects the production schedule.

[0003] In view of this, this application is hereby filed. Summary of the invention

[0004] The first purpose of the present invention is to provide a gas source purity detection device, which can realize continuous and accurate detection of gas source purity for a longer period of time, and realize automatic calibration while performing purity detection, thereby effectively improving the accuracy of detection results during long-term detection, and facilitating long-term continuous production.

[0005] The second object of the present invention is to provide a gallium nitride production system, which can realize continuous and accurate detection of the purity of the raw gas during the gallium nitride reaction process, and realize automatic calibration while performing purity detection, thereby ensuring that the purity of the raw gas is always accurately controlled during long-term continuous production, which is conducive to the continuous production of gallium nitride.

[0006] The embodiment of the present invention is achieved as follows:

[0007] A gas source purity detection device comprises: a main pipe body, a support member, a control ring, a moving arm and a concentration sensor.

[0008] The support member has an outer wall surface in the form of a cylindrical surface, and a receiving groove for receiving the main pipe body is provided on the outer wall surface. A groove is provided on the outer wall of the main pipe body, and the groove is connected to the tube cavity of the main pipe body. The groove bottom wall of the groove is arc-shaped, and the curvature of the groove bottom wall of the groove is the same as the curvature of the outer wall surface. When the main pipe body is installed in the receiving groove, the groove bottom wall of the groove and the outer wall surface together form a complete cylindrical surface.

[0009] The main pipe is used to connect to the gas source pipeline.

[0010] The control ring is sleeved on the outer wall surface of the support member, and the control ring fits the outer wall surface. Along the circumference of the outer wall surface, the control ring can be rotatably matched with the support member and driven by the driver, and the control ring and the outer wall surface are rotationally sealed.

[0011] An air collecting groove is formed on the inner circumferential wall of the control ring. An installation blind hole is further formed on the outer wall surface of the support member. The moving arm is slidably fitted in the installation blind hole, and a sliding seal is provided between the moving arm and the hole wall of the installation blind hole. A first elastic member is abutted between the moving arm and the bottom wall of the installation blind hole. An installation groove adapted to the concentration sensor is formed on the outer side wall of the moving arm, and the concentration sensor is installed in the installation groove and flush with the outer side wall of the moving arm.

[0012] When the control ring rotates relative to the support member, the air collecting groove can be periodically communicated with the main pipe body through the groove, and the air collecting groove can also periodically move to the position of the moving arm, so that the moving arm drives the concentration sensor to periodically enter and exit the air collecting groove.

[0013] Further, along the circumferential direction of the control ring, both side groove walls of the air collecting groove are inclined walls for guiding the moving arm to enter and exit the air collecting groove.

[0014] Further, a sliding groove is formed on the hole wall of the installation blind hole close to the concentration sensor. The sliding groove extends along the length direction of the installation blind hole and is spaced from the outer wall surface of the support member. The width of the sliding groove is greater than the width of the concentration sensor.

[0015] A sliding member is slidably fitted in the sliding groove. The width of the sliding member is adapted to the sliding groove, the length of the sliding member is less than the length of the sliding groove, and the thickness of the sliding member is adapted to the depth of the sliding groove. A sliding seal is provided between the sliding member and the sliding groove.

[0016] A guiding groove is further formed on the inner circumferential wall of the control ring. The guiding groove continuously extends along the circumferential direction of the control ring to form a ring shape. The guiding groove includes a deep groove section and a shallow groove section, and the shallow groove section is located on the side of the inner circumferential wall of the control ring away from the air collecting groove.

[0017] A mating blind hole is further formed on the outer wall surface of the support member. The mating blind hole is arranged in parallel and spaced from the installation blind hole. A mating column is slidably fitted in the mating blind hole, and a second elastic member is abutted between the mating column and the bottom wall of the mating blind hole. The mating column abuts against the bottom wall of the guiding groove.

[0018] The installation blind hole and the mating blind hole are communicated by a communication notch. The communication notch extends along the axial directions of both the installation blind hole and the mating blind hole, and there is a distance between the end of the sliding groove close to the outer wall surface and the communication notch. A connecting rod is accommodated in the communication notch, and the connecting rod fixedly connects the sliding member and the mating column.

[0019] An air inlet pipe and an exhaust pipe are arranged at the end of the sliding groove close to the outer wall surface. Both the air inlet pipe and the exhaust pipe are communicated with the external atmosphere. An air inlet valve is arranged at the end of the air inlet pipe, and an exhaust valve is arranged at the end of the exhaust pipe.

[0020] When the mating post is located in the deep groove section, the sliding member fits against one end of the sliding groove close to the outer wall surface, and the sliding member completely covers the concentration sensor. When the mating post is located in the shallow groove section, the sliding member separates from one end of the sliding groove close to the outer wall surface, and the sliding member separates from the concentration sensor.

[0021] Furthermore, a cotton pad is provided on the side of the sliding member close to the concentration sensor, and the cotton pad completely covers the side of the sliding member close to the concentration sensor.

[0022] Furthermore, when the mating post is located in the shallow groove section, the end wall of one end of the sliding member close to the outer wall surface is located on the side of the communication notch close to the outer wall surface.

[0023] Furthermore, both the intake pipe and the exhaust pipe are provided on the end wall of one end of the sliding groove close to the outer wall surface.

[0024] A gallium nitride production system includes: a raw material gas supply device, a gallium nitride preparation device, and the above-mentioned gas source purity detection device.

[0025] The raw material gas supply device and the gallium nitride preparation device are connected by a supply pipeline, and the main body of the gas source purity detection device is connected to the supply pipeline.

[0026] The beneficial effects of the technical solution of the embodiment of the present invention include:

[0027] (1) Only one driver is needed to realize all mechanical drives of the gas source purity detection device, the structure is more concise and compact, the drive failure rate can be effectively reduced, the risk of out-of-synchronization between different power sources is avoided, and the detection stability is improved.

[0028] (2) Periodic detection can be realized by simply rotating the drive control ring in one direction, which is simple and efficient. During the detection process, the sample gas collected by the gas collection groove is not wasted, but is sent back to the main body by the gas collection groove again after the detection is completed. At this time, under the action of the airflow in the main body, the gas collection groove is also re-sampled.

[0029] (3) When the gas collection groove moves to the moving arm, the moving arm will gradually extend from the mounting blind hole and extend into the gas collection groove. Due to the continuous rotation of the control ring, the moving arm will also move from one side of the gas collection groove to the other side relative to the gas collection groove. During this process, the moving arm can stir the gas sample in the gas collection groove, and at the same time, it is also convenient for the concentration sensor to fully contact the gas, which can effectively improve the detection accuracy.

[0030] (4) Due to the design of the moving arm, after the concentration sensor finishes detecting the gas concentration in the gas collection groove, it will be retracted into the mounting blind hole with the moving arm. The sliding seal design adopted can effectively reduce the residual gas sample near the concentration sensor, thereby ensuring the accuracy of subsequent detections.

[0031] (5) It can avoid the concentration sensor from being continuously exposed to the sample gas for a long time, effectively reduce the detection inertia of the concentration sensor, reduce the scouring of the concentration sensor by the air flow, and while achieving a longer stable working time, further extend the service life of the concentration sensor.

[0032] (6) The detection frequency of the gas in the main pipe body can be adjusted by regulating the rotation speed of the control ring relative to the support member.

[0033] Generally speaking, the gas source purity detection device provided by the embodiments of the present invention can achieve continuous and accurate detection of the gas source purity for a longer time, realize automatic calibration while performing purity detection, effectively improve the accuracy of the detection results during long-term detection, and is beneficial to long-term continuous production.

[0034] The gallium nitride production system provided by the embodiments of the present invention can achieve continuous and accurate detection of the purity of the raw material gas during the gallium nitride reaction process, realize automatic calibration while performing purity detection, ensure accurate control of the purity of the raw material gas at all times during long-term continuous production, and is beneficial to the continuous production of gallium nitride. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present invention, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can also be obtained based on these drawings without creative efforts.

[0036] Figure 1 It is a schematic diagram of the external side structure of the gas source purity detection device provided by the embodiments of the present invention;

[0037] Figure 2 It is a schematic diagram of the internal front structure of the gas source purity detection device provided by the embodiments of the present invention;

[0038] Figure 3 It is a schematic diagram of the structure of the support member;

[0039] Figure 4 It is a schematic diagram of the structure of the main pipe body;

[0040] Figure 5 It is a schematic diagram of the gas collection groove of the control ring;

[0041] Figure 6 It is a schematic diagram of the cooperation of the moving arm;

[0042] Figure 7 It is a schematic diagram of the state when the gas collection groove is communicated with the main pipe body;

[0043] Figure 8 Schematic diagram of the state when the gas collecting groove moves to the moving arm;

[0044] Figure 9 Schematic diagram of the internal structure of the control ring;

[0045] Figure 10 Schematic diagram of the cooperation between the sliding member and the cooperation column;

[0046] Figure 11 Schematic diagram of the structure of the guiding groove of the control ring.

[0047] Description of the reference numerals:

[0048] Main body 100; groove 110; bottom wall p1 of the groove; support member 200; outer wall surface 210; accommodating groove 220; mounting blind hole 230; sliding groove 240; sliding member 241; cooperation blind hole 250; cooperation column 251; second elastic member 252; communication notch 260; connecting rod 261; intake pipe 270; exhaust pipe 280; control ring 300; gas collecting groove 310; first inclined wall y1; second inclined wall y2; guiding groove 320; deep groove section 321; shallow groove section 322; moving arm 400; first elastic member 410; concentration sensor 500. Detailed implementation manners

[0049] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Usually, the components of the embodiments of the present invention described and shown in the accompanying drawings here can be arranged and designed in various different configurations.

[0050] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0051] It should be noted that: similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0052] The terms "first", "second", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0053] In addition, terms such as "parallel" and "perpendicular" do not mean that the components are required to be absolutely parallel or perpendicular, but can be slightly inclined. For example, "parallel" only means that its direction is more parallel relative to "perpendicular", and does not mean that the structure must be completely parallel, but can be slightly inclined.

[0054] In the description of the present invention, it should also be noted that unless otherwise clearly specified and limited, the terms "arranged", "installed", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0055] To overcome the deficiencies in the prior art, please refer to Figures 1 - 6 , this embodiment provides a gas source purity detection device, which includes: a main body 100, a support 200, a control ring 300, a moving arm 400, and a concentration sensor 500.

[0056] The support 200 has an outer wall surface 210 in the shape of a cylindrical surface, and the outer wall surface 210 is provided with a receiving groove 220 for receiving the main body 100.

[0057] A groove 110 is formed on the outer side wall of the main body 100, and the groove 110 penetrates through to the lumen of the main body 100. The groove 110 communicates with the lumen of the main body 100. The bottom wall p1 of the groove 110 is arc-shaped, and the radian of the bottom wall p1 of the groove 110 is the same as the radian of the outer wall surface 210.

[0058] When the main body 100 is installed in the receiving groove 220, the bottom wall of the groove 110 and the outer wall surface 210 together form a complete cylindrical surface.

[0059] The main body 100 is used to connect to the gas source pipeline, that is, the main body 100 is used to form a part of the gas source pipeline, and the gas in the gas source pipeline will flow through the main body 100.

[0060] The control ring 300 is sleeved on the outer wall surface 210 of the support 200, and the control ring 300 is in contact with the outer wall surface 210. In this embodiment, the control ring 300 is in a circular ring shape. Along the circumferential direction of the outer wall surface 210, the control ring 300 is rotatably fitted to the support 200 and driven by a driver (not shown in the figure), and there is a rotational seal between the inner ring wall of the control ring 300 and the outer wall surface 210 of the support 200. Along the axial direction of the control ring 300, the control ring 300 is fixedly fitted to the support 200.

[0061] A gas collecting groove 310 is formed on the inner ring wall of the control ring 300.

[0062] An installation blind hole 230 is also formed on the outer wall surface 210 of the support member 200. In this embodiment, the installation blind hole 230 is arranged radially along the outer wall surface 210. The moving arm 400 is slidably fitted in the installation blind hole 230, and a sliding seal is provided between the moving arm 400 and the hole wall of the installation blind hole 230. Wherein, the outer end wall of the moving arm 400 is arc-shaped, and the radian of the outer end wall of the moving arm 400 is the same as that of the outer wall surface 210. When the moving arm 400 just completely enters the installation blind hole 230, the end wall of the moving arm 400 is flush with the outer wall surface 210.

[0063] A first elastic member 410 is abutted between the moving arm 400 and the bottom wall of the installation blind hole 230. Under the elastic force of the first elastic member 410, the moving arm 400 is always in contact with the inner wall of the control ring 300.

[0064] An installation groove adapted to the concentration sensor 500 is formed on the outer side wall of the moving arm 400. The concentration sensor 500 is installed in the installation groove, and the concentration sensor 500 is flush with the outer side wall of the moving arm 400, that is, the concentration sensor 500 just fills the installation groove.

[0065] When the control ring 300 rotates unidirectionally relative to the support member 200, the gas collecting groove 310 moves synchronously with the control ring 300. The gas collecting groove 310 can periodically move to the groove 110 of the main pipe body 100 and communicate with the main pipe body 100 through the groove 110, as Figure 7 shown. In this state, the gas in the main pipe body 100 can smoothly enter the gas collecting groove 310, so that the gas collecting groove 310 realizes sampling and collection of the gas in the main pipe body 100.

[0066] In addition, the gas collecting groove 310 can also periodically move to the position of the moving arm 400, so that the moving arm 400 can extend into the gas collecting groove 310. In this way, the moving arm 400 can drive the concentration sensor 500 into the gas collecting groove 310, so as to detect the purity of the gas sampled and collected from the main pipe body 100 in the gas collecting groove 310, as Figure 8 shown. When the control ring 300 continues to rotate, the gas collecting groove 310 will leave the position of the moving arm 400. At this time, under the action of the side wall of the gas collecting groove 310, the moving arm 400 is pushed back into the installation blind hole 230 again, and the concentration sensor 500 is also retracted into the installation blind hole 230 again, as Figure 2 shown. Optionally, along the circumferential direction of the control ring 300, both side walls of the gas collecting groove 310 are inclined walls, as Figure 5 shown by the first inclined wall y1 and the second inclined wall y2 in, for guiding the moving arm 400 to enter and exit the gas collecting groove 310.

[0067] With the above design, only one driver is needed to achieve all mechanical drives of the gas source purity detection device. The structure is more concise and compact, which can effectively reduce the drive failure rate, avoid the risk of asynchronism between different power sources, and improve the detection stability.

[0068] On this basis, the drive control ring 300 rotates unidirectionally to achieve periodic detection, which is simple and efficient. During the detection process, the sample gas collected by the gas collecting groove 310 is not wasted, but is sent back to the main body 100 by the gas collecting groove 310 again after the detection. At this time, under the action of the air flow in the main body 100, the gas collecting groove 310 is also re-sampled.

[0069] In addition, when the gas collecting groove 310 moves to the moving arm 400, the moving arm 400 will gradually extend from the mounting blind hole 230 and extend into the gas collecting groove 310. Since the control ring 300 continues to rotate, the moving arm 400 will also move from one side of the gas collecting groove 310 to the other side relative to the gas collecting groove 310. During this process, the moving arm 400 can stir the gas sample in the gas collecting groove 310, and at the same time facilitate the full contact of the concentration sensor 500 with the gas, which can effectively improve the detection accuracy.

[0070] Due to the design of the moving arm 400, after the concentration sensor 500 finishes detecting the gas concentration in the gas collecting groove 310, it will be retracted into the mounting blind hole 230 with the moving arm 400. The sliding seal design adopted can effectively reduce the residual gas sample near the concentration sensor 500, thus ensuring the accuracy of subsequent detections.

[0071] The above design can prevent the concentration sensor 500 from being continuously exposed to the sample gas for a long time, effectively reduce the detection inertia of the concentration sensor 500, and reduce the erosion of the air flow on the concentration sensor 500. While achieving a longer stable working time, it further extends the service life of the concentration sensor 500.

[0072] It should be added that the detection frequency of the gas in the main body 100 can also be adjusted by regulating the rotation speed of the control ring 300 relative to the support 200.

[0073] Generally speaking, the gas source purity detection device provided in this embodiment can achieve longer-term continuous and accurate detection of the gas source purity, realize automatic calibration while performing purity detection, effectively improve the accuracy of the detection results during long-term detection, and is beneficial to long-term continuous production.

[0074] In this embodiment, please combine Figure 6 、 Figures 9 - 11, a sliding groove 240 is formed on the side wall of the installation blind hole 230 close to the concentration sensor 500. The sliding groove 240 extends along the length direction of the installation blind hole 230. The sliding groove 240 is spaced from the outer wall surface 210 of the support member 200, that is, there is still a gap between one end of the sliding groove 240 close to the outer wall surface 210 and the outer wall surface 210, and the sliding groove 240 does not extend to the outer wall surface 210. The width of the sliding groove 240 is greater than the width of the concentration sensor 500.

[0075] A sliding member 241 is slidably engaged in the sliding groove 240. The width of the sliding member 241 is adapted to the sliding groove 240. The length of the sliding member 241 is less than the length of the sliding groove 240. The thickness of the sliding member 241 is adapted to the depth of the sliding groove 240. The sliding member 241 is slidably sealed with the groove wall of the sliding groove 240. That is to say, when the sliding member 241 is engaged in the sliding groove 240, the sliding member 241 is flush with the hole wall of the installation blind hole 230.

[0076] The inner ring wall of the control ring 300 is further provided with a guiding groove 320, and the guiding groove 320 extends continuously along the circumferential direction of the control ring 300 to form a ring shape. The guiding groove 320 includes a deep groove section 321 and a shallow groove section 322. The deep groove section 321 and the shallow groove section 322 are connected end to end with each other. The shallow groove section 322 is located on the side of the inner ring wall of the control ring 300 away from the gas collecting groove 310. That is to say, when the gas collecting groove 310 of the control ring 300 is in Figure 5 the state shown, the guiding groove 320 of the control ring 300 is in Figure 11 the state shown.

[0077] The outer wall surface 210 of the support member 200 is further provided with a mating blind hole 250, and the mating blind hole 250 is arranged in parallel with the installation blind hole 230. Along the axial direction of the control ring 300, the mating blind hole 250 is spaced from the installation blind hole 230.

[0078] A mating post 251 is slidably engaged in the mating blind hole 250. A second elastic member 252 is abutted between the mating post 251 and the bottom wall of the mating blind hole 250. Under the elastic force of the second elastic member 252, the mating post 251 abuts against the bottom wall of the guiding groove 320.

[0079] The installation blind hole 230 and the mating blind hole 250 are communicated by a communication notch 260. The communication notch 260 extends along the axial directions of the installation blind hole 230 and the mating blind hole 250, and there is a gap between one end of the sliding groove 240 close to the outer wall surface 210 and the communication notch 260. That is to say, the gap between the communication notch 260 and the outer wall surface 210 is greater than the gap between the sliding groove 240 and the outer wall surface 210.

[0080] The connecting rod 261 is disposed in the connecting notch 260. The connecting rod 261 fixedly connects the sliding member 241 and the mating post 251. The connecting rod 261 is located at one end of the sliding member 241 away from the outer wall surface 210.

[0081] An air inlet pipe 270 and an exhaust pipe 280 are provided at one end of the chute 240 close to the outer wall surface 210. Both the air inlet pipe 270 and the exhaust pipe 280 are in communication with the external atmosphere.

[0082] An air inlet valve (not shown in the figure) is provided at one end of the air inlet pipe 270 close to the chute 240. The air inlet valve only allows the gas in the air inlet pipe 270 to enter the chute 240.

[0083] An exhaust valve (not shown in the figure) is provided at one end of the exhaust pipe 280 close to the chute 240. The exhaust valve only allows the gas in the chute 240 to enter the exhaust pipe 280.

[0084] Wherein, when the mating post 251 is located in the deep groove section 321, the sliding member 241 is attached to one end of the chute 240 close to the outer wall surface 210, and the sliding member 241 completely covers the concentration sensor 500, as Figure 8 shown. This situation applies when the gas collecting groove 310 is located at the moving arm 400 and when the gas collecting groove 310 is located around the moving arm 400 (including when it is about to move to the moving arm 400 and when it has just left the moving arm 400).

[0085] When the mating post 251 is located in the shallow groove section 322, the sliding member 241 is separated from one end of the chute 240 close to the outer wall surface 210, and the sliding member 241 is separated from the concentration sensor 500, as Figure 7 shown. This situation applies when the gas collecting groove 310 is located at the groove 110 and when the gas collecting groove 310 is located around the groove 110 (including when it is about to move to the groove 110 and when it has just left the groove 110). In this situation, the sliding member 241 is driven by the mating post 251, and the sliding member 241 is separated from one end of the chute 240 close to the outer wall surface 210, which forms a "piston"-like effect between the sliding member 241 and the chute 240. External air is inhaled from the air inlet pipe 270 into the chute 240, specifically into the area between the sliding member 241 and one end of the chute 240 close to the outer wall surface 210. Since the sliding member 241 is separated from the concentration sensor 500 at this time, the concentration sensor 500 is exposed to the air environment in the chute 240, which facilitates the cleaning of the trace sample gas that may remain near the concentration sensor 500, and at the same time completes the calibration of the concentration sensor 500, eliminating the detection inertia of the concentration sensor 500.

[0086] When the mating post 251 re-enters the deep groove section 321, the sliding member 241 re-adheres to one end of the chute 240 close to the outer wall surface 210, and the air previously sucked into the chute 240 is re-discharged from the exhaust pipe 280, and the chute 240 is emptied again. In this way, it will not interfere with the subsequent concentration detection of the sample gas.

[0087] Optionally, a cotton pad (not shown in the figure) is provided on the side of the sliding member 241 close to the concentration sensor 500, and the cotton pad completely covers the side of the sliding member 241 close to the concentration sensor 500. With this design, while the sliding member 241 moves in the chute 240, it can also clean the sensing surface of the concentration sensor 500 with the help of the cotton pad, which helps to ensure the accuracy of the detection result.

[0088] In this embodiment, when the mating post 251 is located in the shallow groove section 322, the end wall of the end of the sliding member 241 close to the outer wall surface 210 is located on the side of the communication notch 260 close to the outer wall surface 210. This avoids the accidental entry of air into the communication notch 260 that enters the chute 240.

[0089] Furthermore, both the intake pipe 270 and the exhaust pipe 280 are provided on the end wall of the end of the chute 240 close to the outer wall surface 210, which facilitates the smooth intake of air and also facilitates the full discharge of air.

[0090] This embodiment also provides a gallium nitride production system, which includes: a raw material gas supply device, a gallium nitride preparation device, and the above-mentioned gas source purity detection device.

[0091] The raw material gas supply device and the gallium nitride preparation device are connected by a supply pipeline, and the main body 100 of the gas source purity detection device is connected to the supply pipeline. The gallium nitride production system uses the gas source purity detection device to detect the supply concentration of the raw material gas during the production process to ensure the smooth progress of gallium nitride production.

[0092] In summary, the gas source purity detection device provided by the embodiment of the present invention can achieve longer-term continuous and accurate detection of the gas source purity, realize automatic calibration while performing purity detection, effectively improve the accuracy of the detection result during long-term detection, and is beneficial to long-term continuous production.

[0093] The gallium nitride production system provided by the embodiment of the present invention can achieve continuous and accurate detection of the purity of the raw material gas during the gallium nitride reaction process, realize automatic calibration while performing purity detection, ensure accurate control of the purity of the raw material gas at all times during long-term continuous production, and is beneficial to the continuous production of gallium nitride.

[0094] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A gas source purity detection device, characterized in that: include: Main body, support, control ring, moving arm and concentration sensor; The support member has an outer wall surface in the form of a cylindrical surface, and a receiving groove for receiving the main pipe body is formed on the outer wall surface; a groove is formed on the outer side wall of the main pipe body, and the groove is connected to the tube cavity of the main pipe body, and the groove bottom wall of the groove is arc-shaped, and the curvature of the groove bottom wall of the groove is the same as the curvature of the outer wall surface; when the main pipe body is installed in the receiving groove, the groove bottom wall of the groove and the outer wall surface together form a complete cylindrical surface; The main pipe is used to connect to the gas source pipeline; The control ring is sleeved on the outer wall surface of the support member, and the control ring fits the outer wall surface; along the circumference of the outer wall surface, the control ring can be rotatably matched with the support member and driven by a driver, and the control ring and the outer wall surface are rotationally sealed; The inner ring wall of the control ring is provided with an air collecting groove; the outer wall surface of the support member is also provided with a mounting blind hole, the moving arm can be slidably matched in the mounting blind hole, and the moving arm and the hole wall of the mounting blind hole are slidingly sealed; a first elastic member is abutted between the moving arm and the bottom wall of the mounting blind hole; the outer side wall of the moving arm is provided with a mounting groove adapted to the concentration sensor, the concentration sensor is installed in the mounting groove, and the concentration sensor is flush with the outer side wall of the moving arm; When the control ring rotates relative to the support member, the gas collecting groove can be periodically connected to the main pipe through the groove, and the gas collecting groove can also periodically move to the moving arm, so that the moving arm drives the concentration sensor to periodically enter and exit the gas collecting groove; Along the circumference of the control ring, both side walls of the gas collecting groove are inclined walls, so as to guide the moving arm to enter and exit the gas collecting groove.

2. The gas source purity detection device according to claim 1, characterized in that: A slide groove is provided on a hole wall of the installation blind hole near the concentration sensor, the slide groove is extended along the length direction of the installation blind hole, and the slide groove is spaced apart from the outer wall surface of the support member; the width of the slide groove is greater than the width of the concentration sensor; A sliding member is slidably matched in the slide groove, the width of the sliding member is adapted to the slide groove, the length of the sliding member is smaller than the length of the slide groove, and the thickness of the sliding member is adapted to the depth of the slide groove; a sliding seal is formed between the sliding member and the slide groove; The inner ring wall of the control ring is also provided with a guide groove, which continuously extends in a ring shape along the circumference of the control ring; the guide groove includes a deep groove section and a shallow groove section, and the shallow groove section is located on a side of the inner ring wall of the control ring away from the gas collecting groove; The outer wall surface of the support member is also provided with a matching blind hole, the matching blind hole is arranged parallel to the mounting blind hole and spaced apart, a matching column is slidably matched in the matching blind hole, a second elastic member is abutted between the matching column and the bottom wall of the matching blind hole; the matching column abuts against the bottom wall of the guide groove; The mounting blind hole and the matching blind hole are connected by a connecting notch, the connecting notch extends along the axial direction of the mounting blind hole and the matching blind hole, and a gap is left between the end of the slide groove close to the outer wall surface and the connecting notch; a connecting rod is arranged in the connecting notch, and the connecting rod fixedly connects the sliding member and the matching column; An air inlet pipe and an air exhaust pipe are arranged at one end of the slideway close to the outer wall, and both the air inlet pipe and the air exhaust pipe are connected to the external atmosphere; an air inlet valve is arranged at the end of the air inlet pipe, and an air exhaust valve is arranged at the end of the air exhaust pipe; When the matching column is located in the deep groove section, the sliding part is attached to the end of the slide groove close to the outer wall surface, and the sliding part completely covers the concentration sensor; when the matching column is located in the shallow groove section, the sliding part is separated from the end of the slide groove close to the outer wall surface, and the sliding part is separated from the concentration sensor.

3. The gas source purity detection device according to claim 2, characterized in that: A cotton pad is arranged on one side of the sliding member close to the concentration sensor, and the cotton pad completely covers the side of the sliding member close to the concentration sensor.

4. The gas source purity detection device according to claim 2, characterized in that: When the matching column is located in the shallow groove section, an end wall of the sliding member close to the outer wall surface is located on a side of the connecting notch close to the outer wall surface.

5. The gas source purity detection device according to claim 2, characterized in that: The air inlet pipe and the air outlet pipe are both arranged on an end wall of the slide groove close to the outer wall surface.

6. A gallium nitride production system, characterized in that: include: A raw gas supply device, a gallium nitride preparation device and a gas source purity detection device as described in any one of claims 1 to 5; The raw material gas supply device and the gallium nitride preparation device are connected by a gas supply pipeline, and the main pipe of the gas source purity detection device is connected to the gas supply pipeline.

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