An electromagnetic protection device based on nonlinear attenuation of mechanical waves

Abstract

The application belongs to the technical field of electromagnetic protection, and relates to an electromagnetic protection device based on nonlinear attenuation of mechanical waves, which comprises a piezoelectric substrate, a signal input component, a nonlinear attenuation component and a signal output component which are sequentially and spaced apart on the piezoelectric substrate; the nonlinear attenuation component comprises an energy-absorbing structure, a deformation structure and a rigid connection structure; the energy-absorbing structure is made of an energy-absorbing material and is spaced apart above the piezoelectric substrate; the deformation structure is made of mechanical metamaterial and is connected to the energy-absorbing structure and the piezoelectric substrate at two ends; one end of the rigid connection structure is connected to the energy-absorbing structure, and the other end is spaced apart from or abuts against the piezoelectric substrate; the signal input component converts electromagnetic wave signals into mechanical waves; the nonlinear attenuation component deforms under the propagation of the mechanical waves, and the deformation amount is proportional to the intensity of the mechanical waves; and the signal output component converts the mechanical waves into electromagnetic wave signals and outputs the electromagnetic wave signals. The application can realize electromagnetic protection based on nonlinear attenuation of mechanical waves.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electromagnetic protection, in particular to an electromagnetic protection device based on nonlinear attenuation of mechanical waves. BACKGROUND

[0002] With the rapid development of modern electronic and communication technologies, electromagnetic technology has been widely applied in various aspects of daily production and life. Electromagnetic radiation generated by the operation of various electronic information systems and related infrastructure has widely existed in the space environment, resulting in an increasingly complex electromagnetic environment for equipment operation and human survival.

[0003] Electromagnetic radiation has become a new pollution source due to its serious harm and difficulty in protection. More seriously, there is a type of intentional electromagnetic interference, that is, high-intensity electromagnetic pulse energy is intentionally generated for special purposes to disrupt, interrupt or destroy electronic systems and equipment. Strong electromagnetic pulses have high power and large energy, and have very strong destructive power, which can cause serious damage to electronic devices working at a distance (even in a closed state). A typical application form is high-power electromagnetic microwaves, which have developed into an important form of information confrontation.

[0004] In the prior art, an amplitude limiter is usually used in an electromagnetic protection module, and a PIN diode is the most widely used power control device in a microwave amplitude limiter. Therefore, PIN diode amplitude limiters are widely used in current domestic and foreign devices to improve the survivability of equipment under strong electromagnetic attacks. The principle is the nonlinear amplitude limiting mechanism of the PIN diode. The equivalent microwave impedance of the PIN diode is controlled by the microwave power. The attenuation of a small power signal is very small, and there is only a small insertion loss. The microwave signal can pass through almost without resistance, and a high-power microwave signal will cause conductivity modulation of the PIN diode, which attenuates the input microwave signal.

[0005] However, since the PIN diode is a semiconductor device, the upper limit of the power it can withstand is not high, which makes it easy to be broken down under high-power microwave radiation, and it cannot be restored after breakdown. The PIN diode also has a contradiction between working frequency and protection power. Increasing the protection power will inevitably increase the junction capacitance of the semiconductor device, which will seriously affect the transmission signal quality under high working frequency and non-protection working state, making it difficult to adapt to the development of future electronic systems. SUMMARY

[0006] Therefore, it is necessary to provide an electromagnetic protection device based on nonlinear attenuation of mechanical waves, which can achieve electromagnetic protection without using diodes based on nonlinear attenuation of mechanical waves.

[0007] An electromagnetic protection device based on nonlinear attenuation of mechanical waves, comprising: a piezoelectric substrate, and a signal input member, a nonlinear attenuation member and a signal output member arranged in sequence on the piezoelectric substrate;

[0008] The nonlinear attenuation member comprises: an energy absorption structure, a deformation structure and a rigid connection structure; the energy absorption structure is made of an energy absorption material and is arranged above the piezoelectric substrate; the deformation structure is made of a mechanical metamaterial and is connected to the energy absorption structure and the piezoelectric substrate at both ends; one end of the rigid connection structure is connected to the energy absorption structure, and the other end is arranged in a spaced manner with the piezoelectric substrate or is in abutment with the piezoelectric substrate;

[0009] The signal input member converts the input electromagnetic wave signal into a mechanical wave and transmits it to the nonlinear attenuation member; the nonlinear attenuation member deforms under the propagation of the mechanical wave, and the deformation amount is proportional to the intensity of the mechanical wave; and the signal output member converts the mechanical wave output by the nonlinear attenuation member into an electromagnetic wave signal and outputs it.

[0010] In one embodiment, the deformation structure and the rigid connection structure are both multiple and are arranged in a crossed manner between the energy absorption structure and the piezoelectric substrate.

[0011] In one embodiment, the deformation structure comprises: a plurality of cubic frames;

[0012] The adjacent cubic frames are connected to form a plate-shaped array, and the thickness direction of the plate-shaped array is consistent with the propagation direction of the mechanical wave.

[0013] In one embodiment, the rigid connection structure comprises: a connecting sheet;

[0014] The connecting sheet is a sheet structure, and the thickness direction of the sheet structure is consistent with the propagation direction of the mechanical wave.

[0015] In one embodiment, the connecting sheet is wavy.

[0016] In one embodiment, the rigid connection structure comprises: one or more connecting columns;

[0017] When there are two or more connecting columns, all the connecting columns are arranged in parallel and in a spaced manner to form a fence-shaped array perpendicular to the propagation direction of the mechanical wave.

[0018] In one embodiment, the connecting column comprises: a column body and a column cap connected to the column body;

[0019] The column body is a cylindrical structure, the column cap is a circular plate structure, and the column cap is arranged in a spaced manner with the piezoelectric substrate.

[0020] In one embodiment, the signal input member and the signal output member are both implemented as an interdigital transducer.

[0021] In one embodiment, the distance between the signal input member and the signal output member satisfies:

[0022]

[0023] wherein, represents the distance between the signal input member and the signal output member, represents the interdigital period of the interdigital transducer.

[0024] In one embodiment, the electromagnetic protection device is arranged on an electromagnetic wave signal transmission line.

[0025] The electromagnetic protection device based on nonlinear attenuation of mechanical waves has the function of electromagnetic limiting by converting the microwave electromagnetic physical field to the mechanical wave physical field for nonlinear energy limiting processing. When the electromagnetic wave signal power is too large, the power of the high-power electromagnetic wave signal in the transmission process of the electromagnetic wave signal (including radio frequency signal and microwave signal) is reduced to avoid damage to the radio frequency microwave caused by the excessive power of the electromagnetic wave signal. When the power of the electromagnetic wave signal is small, the electromagnetic wave signal is normally transmitted in the electromagnetic wave signal transmission line, the power of the electromagnetic wave signal transmitted in the electromagnetic wave signal transmission line is adjusted, the protection power is improved, and the purpose of electromagnetic protection is achieved. The application realizes the limiting processing of energy through the nonlinear mechanical coupling area, avoids the disadvantage of easy breakdown of the traditional semiconductor limiter, has higher microwave signal power to be protected, and does not have the problem of breakdown caused by excessive voltage and unrecoverable after breakdown when irradiated by high-power microwave. The application does not have junction capacitance in the limiting process, overcomes the problems of low upper limit power and existence of peak leakage of traditional semiconductor limiting protection devices, decouples the contradiction between the working frequency and the protection power of the traditional limiter, does not affect the transmission signal quality in the high working frequency and non-protection working state, and improves the survivability of the electronic information system. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 FIG. 1 is a structural schematic diagram of an electromagnetic protection device based on nonlinear attenuation of mechanical waves in one embodiment;

[0027] Figure 2 FIG. 2 is a normal working state schematic diagram of an electromagnetic protection device based on nonlinear attenuation of mechanical waves in one embodiment;

[0028] Figure 3 FIG. 3 is a protection working state schematic diagram of an electromagnetic protection device based on nonlinear attenuation of mechanical waves in one embodiment;

[0029] Figure 4Fig. 1 is a schematic diagram of an interdigital transducer of an electromagnetic protection device based on nonlinear attenuation of mechanical waves in one embodiment.

[0030] Figure 5 Fig. 2 is a schematic diagram of a reflective grating of an electromagnetic protection device based on nonlinear attenuation of mechanical waves in one embodiment.

[0031] Reference signs:

[0032] piezoelectric substrate 1;

[0033] signal input member 2;

[0034] nonlinear attenuation member 3, energy absorption structure A, deformation structure B, rigid connection structure C;

[0035] signal output member 4;

[0036] reflective grating 5. DETAILED DESCRIPTION

[0037] In order to make the objects, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not used to limit the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.

[0038] It should be noted that all directionality indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relative positional relationship, movement condition, etc. between components in a certain specific posture (as shown in the drawings), and if the specific posture changes, the directionality indications also change accordingly.

[0039] In addition, the descriptions such as “first”, “second” and the like in the present application are only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the technical features indicated or the number of the technical features indicated. Therefore, the features limited by “first” and “second” can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of “multiple groups” is at least two groups, such as two groups, three groups, etc., unless otherwise specifically limited.

[0040] In the present application, unless otherwise explicitly specified and limited, the terms "connection", "fixation" and the like should be understood in a broad sense, for example, "fixation" can be fixed connection, or detachable connection, or integral; can be mechanical connection, or electrical connection, or physical connection, or wireless communication connection; can be directly connected, or indirectly connected through intermediate medium, can be internal communication of two elements or interaction relationship of two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0041] In addition, the technical solutions of various embodiments of the present application can be combined with each other, but it must be based on the realization of ordinary skilled in the art, when the combination of technical solutions appear contradictory or cannot be realized, it should be considered that the combination of technical solutions does not exist, also not within the scope of protection claimed in the present application.

[0042] The present application provides an electromagnetic protection device based on nonlinear attenuation of mechanical waves, such as Figures 1 to 3 As shown in one embodiment, it comprises: a piezoelectric substrate, a signal input member, a nonlinear attenuation member and a signal output member.

[0043] The piezoelectric substrate is made of piezoelectric material, as a bearing part, provides a bearing space, so that the signal input member, the nonlinear attenuation member and the signal output member are sequentially and spaced apart on the piezoelectric substrate.

[0044] The signal input member converts the input electromagnetic wave signal into mechanical wave and propagates to the nonlinear attenuation member, the nonlinear attenuation member deforms under the propagation of mechanical wave and the deformation amount is proportional to the mechanical wave intensity, the signal output member converts the mechanical wave output by the nonlinear attenuation member into electromagnetic wave signal and outputs.

[0045] The signal input member and the signal output member are both interdigital transducers (IDT). The interdigital transducer is used to detect and excite mechanical waves on the surface of the piezoelectric substrate, thereby realizing mutual conversion between electromagnetic wave signals and mechanical wave signals; the amplitude of the mechanical wave output by the signal input member is determined by the electromagnetic wave signal, and the amplitude of the mechanical wave converted by a high-power electromagnetic wave signal is large, and the amplitude of the mechanical wave converted by a low-power electromagnetic wave signal is small; the power of the electromagnetic wave signal output by the signal output member is related to the mechanical wave amplitude, and the mechanical wave amplitude is small, and the electromagnetic wave signal output power is small, and the mechanical wave amplitude is large, and the electromagnetic wave signal output power is large. Preferably, the interdigital transducer selects a single-phase unidirectional transducer (SPUDT) to control the propagation direction of the wave, thereby reducing the conversion loss. The specific structure of the interdigital transducer is prior art, and will not be described here. For example: the interdigital transducer includes two groups of interdigital electrodes, and the two groups of interdigital electrodes are two groups of metal strips deposited on the surface of the piezoelectric substrate and interlaced and periodically distributed, each group of electrodes is connected with a bus bar, and the parameters a 、 b are related to the frequency of the electromagnetic wave signal (specifically how to be related is prior art), as shown in Figure 4 , wherein IN represents an input end, OUT represents an output end, a represents a finger width, b represents a finger spacing, represents a finger period.

[0046] Preferably, the distance between the signal input member and the signal output member satisfies the following formula, so as to reduce the propagation loss as much as possible while ensuring the protection effect of the device:

[0047]

[0048] wherein, represents the distance between the signal input member and the signal output member, represents the finger period of the interdigital transducer.

[0049] The nonlinear attenuation member transmits signals and energy, so that small-power signals pass through and large-power signals are attenuated, and includes an energy-absorbing structure, a deformation structure, and a rigid connection structure.

[0050] The energy-absorbing structure is made of an energy-absorbing material and is used to absorb the mechanical wave energy transmitted by the rigid connection structure. The energy-absorbing structure is a plate-shaped structure and is spaced above the piezoelectric substrate, so that a containing space is formed between the energy-absorbing structure and the piezoelectric substrate, and the deformation structure and the rigid connection structure are arranged in the containing space.

[0051] The deformation structure is made of mechanical metamaterial, has a deformation mode without consuming elastic energy, and can realize nonlinear adjustment of mechanical wave amplitude through the mode. The deformation structure is connected with the energy absorption structure and the piezoelectric substrate respectively. The deformation structure has a first state and a second state; when a normal electromagnetic wave signal propagates, the deformation structure is in the first state and the deformation is relatively small; when a strong electromagnetic wave signal propagates, the deformation structure is in the second state and the deformation is relatively large.

[0052] The rigid connection structure is used to conduct mechanical wave energy. One end of the rigid connection structure is connected with the energy absorption structure, and the other end is spaced apart from the piezoelectric substrate (i.e. suspended) or abuts against the piezoelectric substrate. Specifically: when a normal electromagnetic wave signal propagates, the deformation structure is in the first state, and the other end of the rigid connection structure is spaced apart from the piezoelectric substrate; when a strong electromagnetic wave signal propagates, the deformation structure is in the second state, and the other end of the rigid connection structure abuts against the piezoelectric substrate. By adjusting the suspension amplitude of the rigid connection structure (i.e. the length of the rigid connection structure), the electromagnetic protection threshold can be adjusted; the greater the suspension amplitude of the rigid connection structure, the smaller the length of the rigid connection structure, the higher the electromagnetic protection threshold, and the greater the vibration energy required to achieve protection; the smaller the suspension amplitude of the rigid connection structure, the greater the length of the rigid connection structure, the lower the electromagnetic protection threshold, and the smaller the vibration energy required to achieve protection.

[0053] Preferably, the deformation structure and the rigid connection structure are both multiple and are arranged between the energy absorption structure and the piezoelectric substrate in cross to perform multiple layer-by-layer nonlinear attenuation on the mechanical wave, further improving the electromagnetic protection performance.

[0054] In one embodiment, the deformation structure comprises: a plurality of cubic frames; adjacent cubic frames are connected to form a plate-shaped array, and the thickness direction of the plate-shaped array is consistent with the propagation direction of the mechanical wave.

[0055] In one embodiment, the rigid connection structure comprises: a connecting sheet; the connecting sheet is a sheet-shaped structure, and the thickness direction of the sheet-shaped structure is consistent with the propagation direction of the mechanical wave.

[0056] Preferably, the connecting sheet is in a wave shape to further improve the electromagnetic protection performance.

[0057] In one embodiment, the rigid connection structure comprises: one or more connecting columns; when there are two or more connecting columns, all the connecting columns are arranged in parallel and spaced apart to form a fence-shaped array perpendicular to the propagation direction of the mechanical wave.

[0058] Preferably, the connecting column comprises: a column body and a column cap connected with the column body; the column body is a cylindrical structure, and the column cap is a circular plate-shaped structure; and the column cap is spaced apart from the piezoelectric substrate to increase the coupling area of the mechanical wave, improve the nonlinear attenuation effect, and further improve the electromagnetic protection effect.

[0059] In one embodiment, it further includes a reflective grid, that is, the electromagnetic protection device includes a piezoelectric substrate, a signal input component, a nonlinear attenuation component, a signal output component, and a reflective grid.

[0060] There are two reflective gratings, both of which are disposed on the piezoelectric substrate. The signal input component, the nonlinear attenuation component, and the signal output component are disposed between the two reflective gratings. That is, one reflective grating, the signal input component, the nonlinear attenuation component, the signal output component, and the other reflective grating are disposed sequentially and alternately on the piezoelectric substrate so that the reflective gratings reflect mechanical waves, prevent energy from diffusing to the outside, and thus reduce propagation loss.

[0061] like Figure 5 As shown, preferably, the reflective grating includes: two first parts and a plurality of second parts, both the first parts and the second parts being strip-shaped structures, the plurality of second parts being arranged in parallel and spaced apart, and one corresponding end of each second part being connected to one long side of one first part, and the other corresponding end being connected to one long side of another first part.

[0062] It should be noted that electromagnetic protection devices can be placed at any location on the electromagnetic wave signal transmission line, such as the beginning, end, and / or middle of the transmission line. In other words, both the signal input and output components are connected to the transmission line. Electromagnetic wave signal transmission lines are used for transmitting electromagnetic signals and include: substrate integrated waveguides (SIW), coplanar waveguides (CPW), rectangular waveguides, and coaxial cables.

[0063] It should also be noted that the piezoelectric materials for piezoelectric substrates include: lithium niobate (… Materials used in the energy-absorbing structure include: lithium tantalate, quartz crystal, barium titanate (BT), or lead zirconate titanate (PZT), to achieve a higher mechanical coupling coefficient and reduce energy loss during electromagnetic wave signal conversion. Energy-absorbing materials for the energy-absorbing structure include: sponge, rubber, or latex. For the deformable structure, mechanical metamaterials are selected whose deformation varies with the amplitude of the mechanical wave, including: zero-mode mechanical metamaterials, which can deform with the amplitude of the mechanical wave and absorb almost no mechanical wave energy, thus reducing mechanical wave propagation loss. Rigid connection structures use MEMS materials with small deformation that are easy to process, including: silicon, glass, and quartz. The specific materials used are all existing technologies and will not be elaborated further here.

[0064] The working process for this application is as follows:

[0065] When normal electromagnetic wave signal (the power of electromagnetic wave signal is small) is input by signal input component, the generated mechanical wave propagates to nonlinear attenuation component, the amplitude of mechanical wave is small, the deformation of deformation structure made of mechanical metamaterial is relatively small, the rigid connection structure is in a suspended state and does not directly contact the piezoelectric substrate, the mechanical wave can normally propagate through the nonlinear mechanical coupling area formed by the nonlinear attenuation component, and there is almost no attenuation loss, and finally reaches the signal output component and is converted into electromagnetic wave signal by the signal output component and then outputted;

[0066] When strong electromagnetic wave signal (the power of electromagnetic wave signal is large) is input by signal input component, the generated mechanical wave propagates to nonlinear attenuation component and reaches the set threshold value (the nonlinear attenuation component can absorb the mechanical wave reaching a certain threshold value, and almost does not absorb the mechanical wave with amplitude lower than the threshold value, the set threshold value is related to the electromechanical coupling coefficient of piezoelectric material, the deformation amplitude of mechanical metamaterial and the length of rigid connection structure, the specific threshold value can be obtained by experiment using existing technology, which will not be described here), the amplitude of mechanical wave is large, the deformation of deformation structure made of mechanical metamaterial is relatively large (i.e. significant deformation occurs), when the deformation reaches the threshold value, the rigid connection structure abuts against the piezoelectric substrate, i.e. directly contacts, most of the energy of mechanical wave is transmitted to the energy absorption structure through the rigid connection structure and is absorbed by the energy absorption structure, the mechanical wave is greatly attenuated, only a small part of energy is transmitted to the signal output component, the output power of electromagnetic wave signal is limited, so that the power of electromagnetic wave signal in electromagnetic wave signal transmission line is reduced and then transmitted to the rear-end circuit, thereby protecting the rear-end circuit, preventing the damage of radio frequency microwave device in the rear-end circuit due to the power of electromagnetic wave signal in electromagnetic wave signal transmission line being too high, achieving mechanical amplitude limiting effect and realizing the function of electromagnetic protection.

[0067] The electromagnetic protection device based on the nonlinear attenuation of mechanical waves realizes the function of electromagnetic limiting by converting the microwave electromagnetic physical field into the mechanical wave physical field for nonlinear energy limiting processing; when the power of the electromagnetic wave signal is too large, the power of the high-power electromagnetic wave signal in the transmission process of the electromagnetic wave signal (including the radio frequency signal and the microwave signal) is reduced, so as to avoid the damage of the radio frequency microwave caused by the too large power of the electromagnetic wave signal; when the power of the electromagnetic wave signal is small, the electromagnetic wave signal is normally transmitted in the electromagnetic wave signal transmission line, the power of the electromagnetic wave signal transmitted in the electromagnetic wave signal transmission line is adjusted, the protection power is improved, and the purpose of electromagnetic protection is realized; the application realizes the limiting processing of energy through the nonlinear mechanical coupling area, avoids the disadvantage that the traditional semiconductor limiter is easy to be broken down, the microwave signal power that can be protected is higher, and the problem that the breakdown caused by the too large voltage when the high-power microwave is radiated and the breakdown cannot be recovered after the breakdown does not exist; the application does not exist the junction capacitance in the limiting process, overcomes the problems that the upper limit power that can be borne by the traditional limiting protection device such as the semiconductor is not high and the peak leakage exists, decouples the contradiction between the working frequency and the protection power of the traditional limiter, does not affect the transmission signal quality in the high working frequency and non-protection working state, and improves the survivability of the electronic information system.

[0068] The content not described in detail in the specification belongs to the prior art known by the person skilled in the art.

[0069] The technical features of the above embodiments can be combined arbitrarily, and in order to make the description simple, all possible combinations of the technical features in the above embodiments are not described, however, as long as the combination of the technical features does not exist contradictory, it should be considered that it is within the scope of the present application.

[0070] The above-described embodiments only express several implementation manners of the present application, the description is more specific and detailed, but it should not be understood as the limitation on the scope of the present application. It should be pointed out that for the person skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. An electromagnetic protection device based on the nonlinear attenuation of mechanical waves, characterized in that, The application relates to an electromagnetic protection device. The device comprises a piezoelectric substrate and a signal input component, a nonlinear attenuation component and a signal output component which are sequentially and spacedly arranged on the piezoelectric substrate. The nonlinear attenuation component comprises an energy absorption structure, a deformation structure and a rigid connection structure; the energy absorption structure is made of an energy absorption material and is spacedly arranged above the piezoelectric substrate; the deformation structure is made of a mechanical metamaterial and is connected with the energy absorption structure and the piezoelectric substrate at two ends; one end of the rigid connection structure is connected with the energy absorption structure, and the other end is spacedly arranged with the piezoelectric substrate or is in abutment with the piezoelectric substrate. The signal input component converts an input electromagnetic wave signal into a mechanical wave and transmits the mechanical wave to the nonlinear attenuation component; the nonlinear attenuation component is deformed under the transmission of the mechanical wave, and the deformation amount is proportional to the mechanical wave intensity; and the signal output component converts the mechanical wave output by the nonlinear attenuation component into an electromagnetic wave signal and outputs the electromagnetic wave signal.

2. An electromagnetic protection device based on the nonlinear attenuation of mechanical waves according to claim 1, characterized in that, The deformation structure and the rigid connection structure are both multiple and are crossly arranged between the energy absorption structure and the piezoelectric substrate.

3. An electromagnetic protection device based on the nonlinear attenuation of mechanical waves according to claim 1 or 2, characterized in that, The deformation structure comprises multiple cubic frames. Adjacent cubic frames are connected to form a plate-shaped array, and the thickness direction of the plate-shaped array is consistent with the transmission direction of the mechanical wave.

4. An electromagnetic protection device based on the nonlinear attenuation of mechanical waves according to claim 1 or 2, characterized in that, The rigid connection structure comprises a connecting sheet. The connecting sheet is in a sheet structure, and the thickness direction of the sheet structure is consistent with the transmission direction of the mechanical wave.

5. An electromagnetic protection device based on the nonlinear attenuation of mechanical waves according to claim 4, characterized in that, The connecting sheet is in a wave shape.

6. An electromagnetic protection device based on the nonlinear attenuation of mechanical waves according to claim 1 or 2, characterized in that, The rigid connection structure comprises more than one connecting column. When the connecting column is more than two, all the connecting columns are parallel and spacedly arranged to form a fence-shaped array which is perpendicular to the transmission direction of the mechanical wave.

7. An electromagnetic protection device based on the nonlinear attenuation of mechanical waves according to claim 6, characterized in that, The connecting column comprises a column body and a column cap connected with the column body. The column body is in a cylindrical structure, the column cap is in a circular plate structure, and the column cap is spacedly arranged with the piezoelectric substrate.

8. An electromagnetic protection device based on the nonlinear attenuation of mechanical waves according to claim 1 or 2, characterized in that, The signal input component and the signal output component are both in an interdigital transducer.

9. An electromagnetic protection device based on the nonlinear attenuation of mechanical waves according to claim 8, characterized in that, The distance between the signal input component and the signal output component satisfies: wherein denotes the distance between the signal input member and the signal output member, denotes the interdigital period of the interdigital transducer.

10. An electromagnetic protection device based on the nonlinear attenuation of mechanical waves according to claim 1 or 2, characterized in that, The electromagnetic protection device is arranged on an electromagnetic wave signal transmission line.

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