Crystal bar centering device and method and crystal bar barreling device

Abstract

The invention provides a crystal bar centering device, a crystal bar centering method and a crystal bar barreling device. The crystal bar centering device comprises a base, a plurality of crystal bars and a plurality of crystal bars, the two clamping parts are fixed to the base and symmetrically arranged in the length direction of the base, and the two clamping parts abut against the two end faces of a crystal bar correspondingly so as to clamp the crystal bar; the adjusting assembly is used for enabling at least one clamping part to move in the direction perpendicular to the length direction of the base according to the centering detection result so that the crystal bar can be centered.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor manufacturing technology, and in particular to a device and method for centering a crystal rod, and a crystal rod rolling device. Background Art

[0002] At present, single crystal silicon wafers used to manufacture semiconductor devices are mainly manufactured through a series of process steps such as crystal pulling, tumbling, cutting, grinding, etching, cleaning and polishing. In the crystal pulling process, the single crystal silicon rod (also called crystal rod) pulled by the Czochralski method is usually a cylinder with irregular diameter, which needs to be tumbled to a uniform standard diameter.

[0003] Usually, the barrel grinding process is to clamp the end face center of the single crystal silicon rod, rotate it around the central axis of the single crystal silicon rod as the rotation axis (i.e., center it), and use grinding materials such as sandpaper or grinding wheels to grind the outer circumference of the single crystal silicon rod into a regular cylinder of standard diameter during the rotation process.

[0004] During the barrel grinding process, if the end face of the single crystal silicon rod is not clamped at the center (i.e. eccentricity), the barrel grinding process will not be able to rotate along the central axis of the single crystal silicon rod (i.e. misalignment), which will lead to uneven grinding and failure to obtain a regular cylinder. Therefore, before and during the barrel grinding process, it is necessary to perform a centering test and adjust the clamping position of the end face of the single crystal silicon rod to achieve centering if there is no centering. Summary of the invention

[0005] The present invention provides a device and method for centering a crystal rod, and a crystal rod rolling device, which can adjust the crystal rod to make it centered.

[0006] The technical solution of the present disclosure is achieved as follows: In a first aspect, the present disclosure provides a device for centering a crystal rod, the device comprising: Pedestal; Two clamping parts fixed to the base and symmetrically arranged along the length direction of the base, the two clamping parts respectively press against two end surfaces of the crystal rod to clamp the crystal rod; The adjustment component is used to move at least one of the clamping parts in a direction perpendicular to the length direction of the base according to the centering detection result, so as to center the crystal rod.

[0007] In some examples, at least one of the clamping portions further includes a first telescopic assembly, which includes at least one telescopic component; the telescopic component is used to telescopically abut a transition region of the crystal rod, and to telescope according to the centering detection result to center the crystal rod; wherein the transition region of the crystal rod is the region between the end face of the crystal rod pressed by the clamping portion and the main body of the crystal rod.

[0008] In some examples, at least one second telescopic component is further provided on the base along the length direction of the base, and the second telescopic component is used to telescopically abut against the main part of the crystal rod and to telescope according to the centering detection result to center the crystal rod.

[0009] In some examples, the device further includes: a movable mechanical clamp arranged along the length direction of the base, the mechanical clamp being used to clamp the main body of the crystal rod and move in a direction perpendicular to the length direction of the base according to the centering detection result to center the crystal rod.

[0010] In some examples, the mechanical gripper includes: Two first clamping blocks and a second clamping block are arranged opposite to each other, wherein a clamping space for accommodating the crystal rod is formed between the first clamping block and the second clamping block; The first clamping block and the second clamping block are connected to a bidirectional screw rod, the bidirectional screw rod has two threaded areas with different directions and symmetrical positions, the first clamping block is connected to one threaded area of ​​the bidirectional screw rod by thread sliding, the second clamping block is symmetrically connected to the other threaded area of ​​the bidirectional screw rod by thread sliding, and the distance from the first clamping block to the center of the bidirectional screw rod and the distance from the second clamping block to the center of the bidirectional screw rod are equal; the bidirectional screw rod rotates to drive the first clamping block and the second clamping block to move closer to or away from each other on the bidirectional screw rod, so that the clamping space can be adjusted; A lifting assembly is used to set the first clamping block and the second clamping block, and the lifting assembly can be lifted and lowered in a vertical direction along the length direction of the base.

[0011] In some examples, the apparatus further comprises: At least one measuring portion is arranged above or below the clamping portion along the axial direction of the crystal rod, and the measuring portion is used to measure the distance between the measuring portion and the outer peripheral surface of the crystal rod; A determination unit is used to determine the centering detection result according to the distance between the measuring unit and the outer peripheral surface of the crystal rod.

[0012] In some examples, the number of the measuring part is at least one, and each of the measuring parts is used to measure the distance change between the position of the measuring part itself and the outer peripheral surface of the crystal rod during the crystal rod rolling process; The determination unit is used to determine that the crystal rod is not centered when the distance change value during the crystal rod rolling process exceeds a set first distance threshold; and to determine the eccentricity direction according to the minimum distance between the measuring unit and the outer peripheral surface of the crystal rod during the crystal rod rolling process and the rotation angle corresponding to the minimum distance; and to determine the eccentricity distance according to the distance change value.

[0013] In some examples, the number of the measuring parts is two or more and they are arranged on both sides of the center position of the crystal rod in the length direction, and each of the measuring parts is used to measure the distance between the position of the measuring part itself and the outer peripheral surface of the crystal rod when the crystal rod is not rolled; The determination unit is used to determine that the crystal rod is not aligned when the distance difference between the distances measured by any two measuring units is greater than a set second distance threshold; and to determine the eccentricity direction according to the distance comparison result measured by the measuring unit; and to determine the eccentricity direction and distance according to the distance difference.

[0014] In a second aspect, the present disclosure provides a method for centering a crystal ingot, the method being applied to the device for centering a crystal ingot as described in any one of the first aspect and examples thereof, the method comprising: When the crystal ingot is clamped by the clamping part, obtaining the centering detection result of the crystal ingot; wherein the number of the clamping parts is two, fixed to the base and symmetrically arranged along the length direction of the base; According to the centering detection result, at least one of the clamping parts is moved in a direction perpendicular to the length direction of the base by adjusting the assembly to center the crystal rod.

[0015] In some examples, the method further includes: The telescopic component of the first telescopic assembly is controlled to be telescopically extended according to the centering detection result so that the crystal rod is centered; wherein the telescopic component of the first telescopic assembly can be telescopically abutted against the transition area of ​​the crystal rod, and the transition area of ​​the crystal rod is the area between the end face of the crystal rod pressed by the clamping part and the main body of the crystal rod.

[0016] In some examples, the method further includes: The second telescopic component is controlled to telescope according to the centering detection result so as to center the crystal rod; wherein the second telescopic component is arranged along the length direction of the base and is used to telescopically abut the main part of the crystal rod.

[0017] In some examples, the method further includes: The main part of the crystal rod is clamped by a mechanical clamp, and is moved in a direction perpendicular to the length direction of the base according to the centering detection result to center the crystal rod; wherein the mechanical clamp is arranged along the length direction of the base.

[0018] In some examples, the method further includes: Measuring the distance between the measuring part and the outer peripheral surface of the crystal rod by the measuring part; The centering detection result is determined by a determination unit according to a distance between the measurement unit and an outer peripheral surface of the crystal rod.

[0019] In some examples, measuring the distance between the measuring portion and the outer peripheral surface of the crystal rod by the measuring portion includes: During the crystal ingot rolling process, each measuring unit measures a change in the distance between its own position and the outer peripheral surface of the crystal ingot; Correspondingly, the determining unit determines the centering detection result according to the distance between the measuring unit and the outer peripheral surface of the crystal rod, including: When the distance change value during the crystal ingot rolling process exceeds a set first distance threshold, the determining unit determines that the crystal ingot is not centered; The determining unit determines the eccentric direction according to a minimum distance between the measuring unit and the outer peripheral surface of the crystal ingot during the crystal ingot rolling process and a rotation angle corresponding to the minimum distance; The determining unit determines the eccentric distance according to the distance change value.

[0020] In some examples, the number of the measuring parts is two or more and they are arranged on both sides of the center position of the length direction of the crystal rod, respectively, and measuring the distance between the measuring part and the outer peripheral surface of the crystal rod by the measuring part includes: When the crystal ingot is not tumbled, each measuring part measures the distance between the position of the measuring part itself and the outer peripheral surface of the crystal ingot; Correspondingly, the determining unit determines the centering detection result according to the distance between the measuring unit and the outer peripheral surface of the crystal rod, including: When the distance difference between the distances measured by any two measuring units is greater than a set second distance threshold, the determining unit determines that the crystal ingot is not centered; The determining unit determines the eccentric direction according to the distance comparison result measured by the measuring unit; The determining unit determines the eccentric direction and the distance according to the distance difference.

[0021] In a third aspect, the present disclosure provides a crystal rod rolling device, comprising the crystal rod centering device described in any one of the first aspect and examples thereof.

[0022] The present invention provides a device and method for centering a crystal rod, and a crystal rod rolling device, which can detect whether a single crystal silicon rod is centered before and during the rolling process. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic diagram of the composition of a crystal rod centering device provided by the present invention.

[0024] Figure 2 A schematic diagram of a crystal rod misalignment situation provided by the present invention.

[0025] Figure 3 A schematic diagram of the composition of an adjustment component provided in the present invention.

[0026] Figure 4 A schematic diagram of the composition of another adjustment component provided in the present disclosure.

[0027] Figure 5 A schematic diagram of the layout of a first telescopic component provided in the present invention.

[0028] Figure 6 A schematic diagram of a crystal rod provided in the present disclosure.

[0029] Figure 7 A schematic diagram of the layout of another first telescopic assembly provided in the present invention.

[0030] Figure 8 A schematic diagram of the layout of a second telescopic component provided in the present invention.

[0031] Fig. 9 The disclosure provided herein will Figure 8 Schematic cross-section along BB'.

[0032] Fig.10 A schematic diagram of the layout of another second telescopic assembly provided in the present invention.

[0033] Fig.11 A schematic diagram of the layout of a mechanical gripper provided in the present invention.

[0034] Fig.12 A schematic diagram of the composition of a mechanical gripper provided in the present invention.

[0035] Fig.13 A schematic diagram of the composition of another crystal rod centering device provided by the present invention.

[0036] Fig.14 A schematic diagram of the composition of yet another crystal rod centering device provided by the present invention.

[0037] Fig.15 A schematic diagram of the composition of yet another crystal rod centering device provided in the present invention.

[0038] Fig.16 A schematic flow chart of a method for centering a crystal rod provided in the present invention. DETAILED DESCRIPTION

[0039] The technical solutions in the present disclosure will be described clearly and completely below in conjunction with the accompanying drawings in the present disclosure.

[0040] See also Figure 1 , which shows a schematic diagram of the composition of a crystal ingot centering device 1 provided by the present disclosure, the crystal ingot centering device 1 can be applied to a crystal ingot rolling device, and the crystal ingot centering device 1 includes: Base 11; Two clamping parts 12 fixed to the base 11 and symmetrically arranged along the length direction of the base 11, the two clamping parts 12 respectively press against two end surfaces of the crystal rod S to clamp the crystal rod S; The adjustment assembly 13 is used to move at least one clamping portion in a direction perpendicular to the length direction of the base 11 according to the centering detection result, so as to center the crystal ingot S.

[0041] for Figure 1 The technical solution shown, specifically, the base 11 can be used to carry part or all of the components included in the device 1. It can usually be implemented as a long strip platform. The clamping parts 12 are symmetrically arranged along the length direction of the base shown by the solid arrows, and are marked as 12-1 and 12-2 in the figure. The pulled crystal rod S has two end faces, and the clamping parts 12-1 and the clamping parts 12-2 are respectively pressed against one of the two end faces, so that the crystal rod S can be clamped without falling.

[0042] In the two clamping parts, at least one clamping part, for example, the clamping part 12-2 can be adjusted based on the vertical direction (such as Figure 1 In some examples, when the two clamping parts are not aligned, such as Figure 2 As shown, even if the clamping parts 12-1 and 12-2 are pressed to the center of the end face, the crystal ingot S still cannot rotate about the central axis of the crystal ingot S during the grinding process, that is, the crystal ingot S is not centered, which will lead to uneven grinding. When the above-mentioned misalignment detection result caused by the misalignment of the two clamping parts is obtained, the clamping part 12-2 can be adjusted to move in the vertical direction by adjusting the component 13 so that the two clamping parts are aligned to ensure that the crystal ingot S is centered.

[0043] In some examples, such as Figure 3As shown, the adjustment assembly 13 may include a screw rod 131, a nut 132, and a slide 133 fixed to the nut 132, which are arranged on the base in a vertical direction. The slide 133 is also fixedly connected to at least one clamping part, such as the clamping part 12-2. Figure 3 (not shown) The rotating screw 131 drives the nut 132 to move in the vertical direction, and the nut 132 drives the clamping part 12-2 to move in the vertical direction through the slide 133, so that the clamping part 12-2 is adjusted to be aligned with the clamping part 12-1.

[0044] In some examples, such as Figure 4 As shown, the adjustment assembly 13 may include a slide rail 134 disposed on the base in a vertical direction and a slider 135 disposed on the slide rail 134, and the slider 135 is fixedly connected to at least one clamping portion, such as the clamping portion 12-2. Figure 4 (not shown) drives the slider 135 to slide on the slide rail 134, so that the slider 135 drives the clamping portion 12-2 to move in the vertical direction, thereby adjusting the clamping portion 12-2 to be aligned with the clamping portion 12-1.

[0045] Understandably, in addition to the above Figure 3 or Figure 4 In addition to the examples shown, other adjustment component structures that can drive the clamping portion 12 - 2 to move in the vertical direction are applicable to the technical solution of the present disclosure and will not be described in detail here.

[0046] for Figure 1 The device 1 for centering a crystal rod shown in the figure may be implemented in some possible ways, such as Figure 5 As shown, at least one of the clamping parts 12, such as the clamping part 12-2, also includes a first telescopic assembly 14, and the first telescopic assembly 14 includes at least one telescopic component 141, such as 4 telescopic components 141 as an example; the telescopic component 141 is used to telescopically abut the transition area of ​​the crystal rod S, and to telescope according to the centering detection result to center the crystal rod S.

[0047] For the above implementation, see Figure 6 FIG. 1 is a schematic cross-sectional view of a crystal rod S. Figure 6 The left half of the crystal rod S includes an end face 61 and a main body 62 of the same diameter as the crystal rod S, and a transition region 63 connecting the end face 61 and the main body 62 .

[0048] like Figure 5As shown, retractable parts 141 are provided above and below the clamping part 12-2, and each retractable part 141 can be supported on the clamping part 12-2 by the bracket 5. Each retractable part 141 includes a retractable abutment 1411 and a receiving cavity 1412 for accommodating the abutment 1411. The abutment 1411 of each retractable part 141 can extend from the receiving cavity 1412 and abut the transition area of ​​the crystal rod S. When the abutment 1411 abuts the transition area, a thrust can be applied to the crystal rod S toward the transition area to control the part of the transition area of ​​the crystal rod S that is abutted to move in the direction of the thrust, thereby causing the end face of the crystal rod S to move under the pressure of the clamping part 12-2.

[0049] In some examples, in combination with Figure 7 , which is based on Figure 5 In the side cross-sectional view along the AA' direction, the number of retractable components 141 can be 4, which are marked as 141-1, 141-2, 141-3 and 141-4, and 2 are respectively arranged above and below the clamping portion 12-2. Figure 7 As shown, above and below the clamping portion 12-2, the two corresponding retractable components can be arranged axially symmetrically along the vertical direction of the cross section of the crystal rod S, as shown in FIG. Figure 7 As shown in the figure, the retractable parts 141-1 and 141-2 are arranged above the clamping part 12-2, and are symmetrically arranged with respect to the axial direction perpendicular to the cross section of the crystal rod S (as shown by the dotted line). The retractable parts 141-3 and 141-4 are arranged below the clamping part 12-2, and are also symmetrically arranged with respect to the axial direction perpendicular to the cross section of the crystal rod S (as shown by the dotted line).

[0050] In the above example, when the crystal rod S is misaligned at the clamping portion 12-2, the corresponding retractable component can be controlled to abut against the transition area to provide thrust according to the eccentric direction and distance, so that the crystal rod S is centered. Figure 7 In FIG. 7 , the solid dots represent the center position of the crystal ingot S in the centered state, and the hollow dots represent an exemplary case where the center of the crystal ingot S is offset. For example, when the center of the crystal ingot S is at the position shown in FIG. 71 , the abutment head in the retractable component 141 - 1 is abutted against the transition region to apply a thrust to the crystal ingot S. Figure 7 The end face of the crystal ingot S shown in the figure moves in the direction of the thrust, so that the center of the crystal ingot S moves from position 71 to the position shown by the solid circle. Similarly, when the center of the crystal ingot S is at the position shown by 72, 73 or 74, the abutment in the corresponding retractable part 141-2, 141-3 or 141-4 can be abutted against the transition area to apply a thrust to the crystal ingot S, and the thrust can move the center of the crystal ingot S from the position shown by 72, 73 or 74 to the position shown by the solid circle.

[0051] Understandably, the above Figure 5 as well as Figure 7 Although the solution shown in the figure is described by taking the clamping part 12-2 as an example, those skilled in the art can still use the above Figure 5 as well as Figure 7 The illustrated solution is applied to the clamping portion 12 - 1 , and will not be described in detail in the present disclosure.

[0052] for Figure 1 The device 1 for centering a crystal rod shown in the figure may be implemented in some possible ways, such as Figure 8 As shown, the base 11 further includes at least one second telescopic assembly 15 disposed along the length direction of the base 11. Figure 8 Taking the two of them as an example, the second telescopic assembly 15 is used to telescopically abut the main part of the crystal rod W, and to telescope according to the centering detection result to center the crystal rod.

[0053] In some examples, such as Figure 8 In the embodiment, each second telescopic assembly is arranged directly below the crystal rod S in the vertical direction. Each second telescopic assembly 15 includes a bearing seat 151 and a telescopic head 152. The telescopic head 152 can extend from the bearing seat 151 and abut against the main part of the crystal rod S. When the telescopic head 152 abuts against the main part of the crystal rod S, a vertical upward thrust can be applied to the main part of the crystal rod S to control the main part of the crystal rod S to move in the direction of the thrust, thereby causing the end face of the crystal rod S to move under the pressure of the clamping part 12-2.

[0054] Specifically, see Fig. 9 As shown in Figure 8 The side cross-sectional view in the BB' direction. Fig. 9 In the figure, the vertical axis of the cross section of the crystal ingot S is shown by the dotted line, the solid dot indicates the center position of the crystal ingot S in the centered state, and the positions 90 and 91 indicated by the hollow dots respectively indicate exemplary situations where the center of the crystal ingot S is offset. For example, when the center of the crystal ingot S is at the position indicated by the hollow dot 90, the telescopic head 152 in the second telescopic assembly 15 is abutted against the main part of the crystal ingot S to apply a vertical upward thrust to the crystal ingot S. Fig. 9 The crystal ingot S shown in the figure will move in the direction of the thrust, so that the center of the crystal ingot S moves from the position shown by the hollow dot 90 to the position shown by the solid dot. When the center of the crystal ingot S is at the position shown by the hollow dot 91, the crystal ingot rolling device can be used to control the crystal ingot S to rotate 180 degrees to rotate the hollow dot 91 downward, and then the telescopic head 152 is abutted against the main part of the crystal ingot S to apply a vertical upward thrust to the crystal ingot S, so that the center of the crystal ingot S moves from the position shown by the hollow dot 91 to the position shown by the solid dot.

[0055] In some examples, in order to be able to center the crystal rod S when the vertical axis of the cross section of the amorphous rod S is eccentric, such as Fig.10 As shown in the cross-sectional view, a group of second telescopic components, marked as 15-1 and 15-2, can be arranged symmetrically on the base 11 along the vertical axis of the cross-section of the crystal rod S. Similar to the above, in the group of second telescopic components, the telescopic head 152 of each second telescopic component 15-1 or 15-2 abuts against the main part of the crystal rod S, and applies a thrust perpendicular to the surface of the abutting main part of the crystal rod S to the crystal rod S, so as to control the main part of the crystal rod S to move in the direction of the thrust, thereby causing the end face of the crystal rod S to move under the pressure of the clamping part 12-2.

[0056] Specifically, in Fig.10 In the figure, the vertical axis of the cross section of the crystal ingot S is shown as a dotted line, the solid dot indicates the center position of the crystal ingot S in the centered state, and the hollow dots 101 and 102 respectively indicate exemplary situations where the center of the crystal ingot S is offset. For example, when the center of the crystal ingot S is at the position shown by the hollow dot 101, the telescopic head 152 in the second telescopic assembly 15-1 abuts against the main part of the crystal ingot S to apply a thrust to the crystal ingot S. Fig.10 The crystal ingot S shown in the figure will move in the direction of the thrust, so that the center of the crystal ingot S moves from the position shown by the hollow dot 101 to the position shown by the solid dot. When the center of the crystal ingot S is at the position shown by the hollow dot 102, the telescopic head 152 in the second telescopic assembly 15-2 abuts against the main part of the crystal ingot S to apply thrust to the crystal ingot S. Fig.10 The crystal ingot S shown in the figure will move in the direction of the thrust, so that the center of the crystal ingot S moves from the position shown by the hollow circle 102 to the position shown by the solid circle.

[0057] Similarly, when the center of the crystal rod S is at the position indicated by the hollow dot 103 or 104, the crystal rod rolling device can be used to control the crystal rod S to rotate 180 degrees to rotate the position indicated by the hollow dot 103 or 104 downward, and then according to the above-mentioned example scheme, the telescopic head 152 in the second telescopic assembly 15-1 or 15-2 is used to abut the main part of the crystal rod S to apply thrust to the crystal rod S, so that the center of the crystal rod S moves from the position indicated by the hollow dot 103 or 104 to the position indicated by the solid dot.

[0058] for Figure 1 The device 1 for centering the crystal rod shown in FIG. 1 may be implemented in some possible ways. Fig.11The device 1 also includes: a movable mechanical clamp 16 arranged along the length direction of the base 11, the mechanical clamp 16 is used to clamp the main part of the crystal rod W and move in the vertical direction along the length direction of the base according to the centering detection result to center the crystal rod W.

[0059] In some examples, such as Fig.12 As shown in FIG. 1 , it shows a schematic diagram of the composition of the mechanical gripper 16. The mechanical gripper 16 includes two clamping blocks arranged opposite to each other, respectively as shown in FIG. Fig.12 The first clamp block 161 and the second clamp block 162 are shown in FIG. A clamping space 120 is formed between the first clamp block 161 and the second clamp block 162 for accommodating the crystal rod S. Fig.12 In the embodiment, the first clamping block 161 and the second clamping block 162 are respectively provided with inner concave parts on the opposite surfaces, so that the crystal rod S fits more closely with the inner concave parts when being clamped and grasped, thereby improving the grasping stability. The first clamping block 161 and the second clamping block 162 are connected to a bidirectional screw rod 163, which has two threaded areas with different directions and symmetrical positions. The first clamping block 161 is connected to one threaded area of ​​the bidirectional screw rod 163 by thread sliding, and the second clamping block 162 is symmetrically connected to the other threaded area of ​​the bidirectional screw rod 163 by thread sliding. The distance from the first clamping block 161 to the center of the bidirectional screw rod 163 and the distance from the second clamping block 162 to the center of the bidirectional screw rod 163 are equal. In addition, a driving motor 164 is disposed at the center of the bidirectional screw rod 163 to act on the bidirectional screw rod 163. The driving motor 164 drives the bidirectional screw rod 163 to rotate, thereby driving the first clamping block 161 and the second clamping block 162 to move closer to or farther from each other on the bidirectional screw rod 163, so that the clamping space 120 can be adjusted. Fig.12 As shown, the clamp block may be disposed on a lifting assembly 165 that can be lifted and lowered in a vertical direction along the length direction of the base, and the lifting and lowering of the lifting assembly 165 can control the clamp block to move in the vertical direction.

[0060] Specifically, the lifting direction of the lifting assembly 165 is vertical. Fig. 9 When the first clamp 161 and the second clamp 162 are at the position shown by the hollow dot 90 or 91, the lifting assembly 165 can be used to first move the first clamp 161 and the second clamp 162 to the position of the crystal ingot S. At this time, the clamping space 120 formed between the first clamp 161 and the second clamp 162 is relatively large, and the crystal ingot S is in the clamping space and does not contact the first clamp 161 and the second clamp 162. Next, the first clamp 161 and the second clamp 162 are controlled to move closer to each other by driving the rotation of the bidirectional lead screw 163 until the crystal ingot S is firmly clamped and grasped. Then, corresponding to the position shown by the hollow dot 90 or 91, the lifting assembly 165 is controlled to rise or fall in the vertical direction until the center of the crystal ingot S moves from the position shown by the hollow dot 90 or 91 to Fig. 9 The positions are indicated by the solid circles shown in .

[0061] It should be noted that, through the above technical solutions and their implementations, the crystal ingot S can be adjusted to be centered when it is not centered. Whether the crystal ingot is centered is indicated by the centering detection result. Therefore, based on the above technical solutions and their implementations, see Fig.13 The device 1 for centering a crystal rod provided by the present disclosure further comprises: At least one measuring part 17 is arranged above or below the clamping part 12 along the axial direction of the crystal ingot S, and the measuring part 17 is used to measure the distance from the position of the measuring part 17 itself to the outer peripheral surface of the crystal ingot S; The determination unit 18 is used to determine the centering detection result according to the distance measured by the measurement unit 17.

[0062] In this disclosure, Fig.13 Taking the measuring part 17 shown in the figure as an example, the measuring part 17 can be implemented as a distance sensor, such as a laser distance sensor, an infrared distance sensor, a millimeter wave radar, or a sensor based on the time of flight (TOF) of light. The measuring part 17 can be arranged above the clamping part 12, such as the measuring part 17 shown by the solid line, or arranged below the clamping part 12, such as the measuring part 17 shown by the dotted line. When the measuring part 17 is arranged below the clamping part 12, such as Fig.13 As shown, the measuring part 17 is preferably disposed on the base 11. In the present disclosure, regardless of whether the measuring part 17 is disposed above or below the clamping part 12, the measuring part 17 is preferably disposed to be able to measure the distance directly to the main part of the crystal rod S.

[0063] After measuring the distance, the measuring unit 17 can transmit the measured distance to the determining unit 18. In the present disclosure, the determining unit 18 can be implemented as an electronic device with data processing and computing functions, such as at least one of a smart phone, a smart watch, a desktop computer, a laptop, a virtual reality terminal, an augmented reality terminal, a wireless terminal and a laptop computer. The electronic device has a communication function, can access a wired network or a wireless network and receive data transmitted by the measuring unit 17 based on the wired network or the wireless network accessed. After receiving the distance measured by the measuring unit 17, the determining unit 18 performs data processing on the distance to obtain the centering detection result, that is, whether the crystal rod is centered, and in the case of non-centering, the eccentricity direction and eccentricity distance of the crystal rod S.

[0064] In some examples, such as Fig.13As shown, the two aligned clamping parts 12 are both pressed against the center position of the end face of the crystal ingot S, that is, the crystal ingot S is already in a centered state. In this state, when the crystal ingot is rolled, the distance measured by the measuring part 17 will not change significantly. Based on this, when the number of measuring parts 17 is at least one, each measuring part 17 measures the distance change between the position of the measuring part 17 itself and the outer peripheral surface of the crystal ingot S during the crystal ingot rolling process; The determination unit 18 is used to determine that the crystal rod S is not centered when the distance change value during the rolling process of the crystal rod S exceeds a set first distance threshold; and to determine the eccentricity direction according to the minimum distance between the measuring unit and the outer peripheral surface of the crystal rod during the rolling process of the crystal rod and the rotation angle corresponding to the minimum distance; and to determine the eccentricity distance according to the distance change value.

[0065] For the above example, specifically, when the crystal rod S is in the centered state, during the crystal rod rolling process, the determination unit 18 uses the difference between the maximum distance and the minimum distance between the position of each measuring unit and the outer peripheral surface of the crystal rod S as the distance change value. It should be noted that, since the outer peripheral surface of the crystal rod is not smooth during rolling, but has some defects, in the centered state, there will be a small deviation between the position of the measuring unit itself and the outer peripheral surface of the crystal rod S due to these non-smooth defects. The present disclosure uses the first distance threshold to characterize this small deviation. When the distance change value is less than the first distance threshold, it can be determined that the distance change is only caused by the non-smooth defects on the outer peripheral surface of the crystal rod. In this case, the determination unit 18 can determine that the crystal rod S has been centered.

[0066] like Fig.14 As shown, when the two aligned clamping parts 12 are pressed against the center of the end face of the crystal rod S (as shown by the dotted line) at a position slightly above the end face center of the crystal rod S, during the rolling process of the crystal rod, due to the eccentric distance of the pressing, the distance measured by each measuring part will show a large difference. In this case, the distance change value will be greater than the first distance threshold. At this time, the determination unit 18 can determine that the crystal rod S is not centered, and the eccentric distance can be determined by the distance change value. In addition, in the case of no centering, the determination unit 18 can also determine the eccentric direction of the crystal rod S based on the minimum distance measured by the measuring unit 17 during the rolling process and the rotation angle of the crystal rod when the minimum distance is measured. In the case where the determination unit 18 concludes that there is no centering and determines the eccentric distance and the eccentric direction, the aforementioned Figures 1 to 12 The crystal rod S is adjusted according to the scheme shown in any example so that the crystal rod S is centered, and this disclosure will not go into details.

[0067] It can be understood that when the two aligned clamping parts 12 are pressed against a position below the end face center of the crystal rod S (as shown by the dot-dash line), the eccentric distance and eccentric direction can also be determined using the above example, and the present disclosure will not elaborate on this.

[0068] In some examples, such as Fig.15 As shown, measuring parts 17-1 and 17-2 can be arranged on both sides of the center position in the length direction of the crystal rod S, and the measuring parts 17-1 and 17-2 are arranged in parallel. When the two aligned clamping parts 12 are pressed against the upper and lower positions of the end face center of the crystal rod S (as shown by the dotted line), when the crystal rod is not rolled, the distances measured by the measuring parts 17-1 and 17-2 will be greatly different. Based on this, when the number of measuring parts 17 is two or more, each measuring part is used to measure the distance between the position of the measuring part itself and the outer peripheral surface of the crystal rod when the crystal rod S is not rolled; The determination unit 18 is used to determine that the crystal rod is not centered when the distance difference between the distances measured by any two measuring units is greater than a set second distance threshold; and to determine the eccentricity direction based on the distance comparison result measured by the measuring units; and to determine the eccentricity direction and distance based on the distance difference.

[0069] For the above example, specifically, Fig.15 For example, when the crystal rod is not rolled, the distances measured by the measuring parts 17-1 and 17-2 are different. It can be seen that the crystal rod S is clamped in a "tilted" manner. The distance measured by the measuring part 17-1 is greater than the distance measured by the measuring part 17-2. The determination part 18 can know that the clamping part 12-1 is pressed against the position above the center of the end face of the crystal rod S, and the clamping part 12-2 is pressed against the position below the center of the end face of the crystal rod S. The eccentric distance can be determined by the difference between the distance measured by the measuring part 17-1 and the distance measured by the measuring part 17-2. After the determination part 18 obtains the above-mentioned alignment detection result, it can also be determined by the aforementioned Figures 1 to 12 The crystal rod S is adjusted according to the scheme shown in any example so that the crystal rod S is centered, and the present disclosure will not go into details here.

[0070] Based on the same inventive concept as the above technical solution, see Fig.16 , which shows a method for centering a crystal ingot that can be applied to the aforementioned crystal ingot centering device 1, the method may include: S1601: When the crystal ingot is clamped by the clamping part, obtain the centering detection result of the crystal ingot.

[0071] There are two clamping parts, which are fixed to the base and symmetrically arranged along the length direction of the base.

[0072] S1602: According to the centering detection result, at least one clamping part is moved in a direction perpendicular to the length direction of the base by adjusting the assembly to center the crystal rod.

[0073] In some examples, the method further includes: The telescopic component of the first telescopic assembly is controlled to be telescopically extended according to the centering detection result so that the crystal rod is centered; wherein the telescopic component of the first telescopic assembly can be telescopically abutted against the transition area of ​​the crystal rod, and the transition area of ​​the crystal rod is the area between the end face of the crystal rod pressed by the clamping part and the main body of the crystal rod.

[0074] In some examples, the method further includes: The second telescopic component is controlled to telescope according to the centering detection result so as to center the crystal rod; wherein the second telescopic component is arranged along the length direction of the base and is used to telescopically abut the main part of the crystal rod.

[0075] In some examples, the method further includes: The main part of the crystal rod is clamped by a mechanical clamp, and is moved in a direction perpendicular to the length direction of the base according to the centering detection result to center the crystal rod; wherein the mechanical clamp is arranged along the length direction of the base.

[0076] In some examples, the method further includes: Measuring the distance between the measuring part and the outer peripheral surface of the crystal rod by the measuring part; The centering detection result is determined by a determination unit according to a distance between the measurement unit and an outer peripheral surface of the crystal rod.

[0077] In some examples, measuring the distance between the measuring portion and the outer peripheral surface of the crystal rod by the measuring portion includes: During the crystal ingot rolling process, each measuring unit measures a change in the distance between its own position and the outer peripheral surface of the crystal ingot; Correspondingly, the determining unit determines the centering detection result according to the distance between the measuring unit and the outer peripheral surface of the crystal rod, including: When the distance change value during the crystal ingot rolling process exceeds a set first distance threshold, the determining unit determines that the crystal ingot is not centered; The determining unit determines the eccentric direction according to a minimum distance between the measuring unit and the outer peripheral surface of the crystal ingot during the crystal ingot rolling process and a rotation angle corresponding to the minimum distance; The determining unit determines the eccentric distance according to the distance change value.

[0078] In some examples, the number of the measuring parts is two or more and they are arranged on both sides of the center position of the length direction of the crystal rod, respectively, and measuring the distance between the measuring part and the outer peripheral surface of the crystal rod by the measuring part includes: When the crystal ingot is not tumbled, each measuring part measures the distance between the position of the measuring part itself and the outer peripheral surface of the crystal ingot; Correspondingly, the determining unit determines the centering detection result according to the distance between the measuring unit and the outer peripheral surface of the crystal rod, including: When the distance difference between the distances measured by any two measuring units is greater than a set second distance threshold, the determining unit determines that the crystal ingot is not centered; The determining unit determines the eccentric direction according to the distance comparison result measured by the measuring unit; The determining unit determines the eccentric direction and the distance according to the distance difference.

[0079] Based on the same inventive concept as the aforementioned technical solution, the present disclosure further provides a crystal rod rolling device, which includes the crystal rod centering device described in any of the aforementioned embodiments.

[0080] It should be noted that the technical solutions described in the present disclosure can be combined arbitrarily without conflict.

[0081] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A device for centering a crystal rod, characterized in that: The device comprises: Pedestal; Two clamping parts fixed to the base and symmetrically arranged along the length direction of the base, the two clamping parts respectively press against two end surfaces of the crystal rod to clamp the crystal rod; The adjustment component is used to move at least one of the clamping parts in a direction perpendicular to the length direction of the base according to the centering detection result, so as to center the crystal rod.

2. The device according to claim 1, characterized in that The adjustment assembly includes a screw rod, a nut and a slide fixed to the nut, which are arranged on the base along the vertical direction. The slide is also fixedly connected to at least one clamping part. The screw rod is rotated to drive the nut to move in the vertical direction. The nut drives the clamping part to move in the vertical direction through the slide, thereby aligning the clamping part.

3. The device according to claim 1, characterized in that At least one of the clamping parts includes a first telescopic component, which includes at least one telescopic part; the telescopic part is used to telescopically abut the transition area of ​​the crystal rod, and to telescope according to the centering detection result to center the crystal rod; wherein the transition area of ​​the crystal rod is the area between the end face of the crystal rod pressed by the clamping part and the main body of the crystal rod.

4. The device according to claim 1, characterized in that At least one second telescopic component is arranged on the base along the length direction of the base, and the second telescopic component is used to telescopically abut against the main part of the crystal rod and to telescope according to the centering detection result to center the crystal rod.

5. The device according to claim 1, characterized in that The device also includes: a movable mechanical clamp arranged along the length direction of the base, the mechanical clamp is used to clamp the main part of the crystal rod and move in a direction perpendicular to the length direction of the base according to the centering detection result to center the crystal rod.

6. The device according to claim 5, characterized in that The mechanical gripper comprises: Two first clamping blocks and a second clamping block are arranged opposite to each other, wherein a clamping space for accommodating the crystal rod is formed between the first clamping block and the second clamping block; The first clamping block and the second clamping block are connected to a bidirectional screw rod, the bidirectional screw rod has two threaded areas with different directions and symmetrical positions, the first clamping block is connected to one threaded area of ​​the bidirectional screw rod by thread sliding, the second clamping block is symmetrically connected to the other threaded area of ​​the bidirectional screw rod by thread sliding, and the distance from the first clamping block to the center of the bidirectional screw rod and the distance from the second clamping block to the center of the bidirectional screw rod are equal; the bidirectional screw rod rotates to drive the first clamping block and the second clamping block to move closer to or away from each other on the bidirectional screw rod, so that the clamping space can be adjusted; A lifting assembly is used to set the first clamping block and the second clamping block, and the lifting assembly can be lifted and lowered in a vertical direction along the length direction of the base.

7. The device for centering a crystal ingot according to any one of claims 1 to 4, characterized in that: The device also includes: At least one measuring portion is arranged above or below the clamping portion along the axial direction of the crystal rod, and the measuring portion is used to measure the distance between the measuring portion and the outer peripheral surface of the crystal rod; A determination unit is used to determine the centering detection result according to the distance between the measuring unit and the outer peripheral surface of the crystal rod.

8. The device according to claim 7, characterized in that The number of the measuring part is at least one, and each measuring part is used to measure the distance change between the position of the measuring part itself and the outer peripheral surface of the crystal rod during the crystal rod rolling process; The determination unit is used to determine that the crystal rod is not centered when the distance change value during the crystal rod rolling process exceeds a set first distance threshold; and to determine the eccentricity direction according to the minimum distance between the measuring unit and the outer peripheral surface of the crystal rod during the crystal rod rolling process and the rotation angle corresponding to the minimum distance; and to determine the eccentricity distance according to the distance change value.

9. The device according to claim 7, characterized in that The number of the measuring parts is two or more and they are arranged on both sides of the center position of the crystal rod in the length direction, and each measuring part is used to measure the distance between the position of the measuring part itself and the outer peripheral surface of the crystal rod when the crystal rod is not rolled; The determination unit is used to determine that the crystal rod is not aligned when the distance difference between the distances measured by any two measuring units is greater than a set second distance threshold; and to determine the eccentricity direction according to the distance comparison result measured by the measuring unit; and to determine the eccentricity direction and distance according to the distance difference.

10. A method for centering a crystal rod, characterized in that: The method is applied to the device for centering the crystal rod according to any one of claims 1 to 9, and the method comprises: When the crystal ingot is clamped by the clamping part, obtaining the centering detection result of the crystal ingot; wherein the number of the clamping parts is two, fixed to the base and symmetrically arranged along the length direction of the base; According to the centering detection result, at least one of the clamping parts is moved in a direction perpendicular to the length direction of the base by adjusting the assembly to center the crystal rod.

11. A crystal rod rolling device, characterized in that: The crystal rod rolling device includes the crystal rod centering device according to any one of claims 1 to 9.

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