Maintenance test device for vacuum valve and test method thereof

Abstract

The invention belongs to the technical field of testing devices, and discloses a maintenance testing device for a vacuum valve and a testing method thereof.The maintenance testing device comprises a first vacuum pressure gauge, a second vacuum pressure gauge, a vacuum cavity, a mass flow meter, a control box, a gas pressure adjusting and switching jig and a connector; the first vacuum pressure gauge and the second vacuum pressure gauge are both installed at the top of the vacuum cavity, the switching jig and the connector are installed at one end of the vacuum cavity, the bearing assembly is arranged below the switching jig and the connector, the supporting frame is arranged below the vacuum cavity, and the mass flow meter, the control box and the gas pressure adjusting device are installed in the supporting frame. Through the testing device, off-line valve detection can be carried out, pressure control testing and position control can be conveniently carried out on the valve, the testing efficiency of the valve is improved, the testing device further has the advantage of being small in occupied area, and the testing device can be matched with different jigs to operate valves of different specifications, so that the adaptability of the device is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of testing devices, and in particular relates to a maintenance testing device for a vacuum valve and a testing method thereof. Background Art

[0002] A vacuum valve is a vacuum system component used to change the direction of air flow, adjust the amount of air flow, and cut off or connect pipelines in a vacuum system.

[0003] At present, vacuum coating equipment used in the semiconductor manufacturing process is generally equipped with a variety of control valves, such as butterfly valves, pendulum valves, etc. During the maintenance and repair stage of the equipment, the valves need to be removed for corresponding repair and maintenance. After the removed valves are repaired, they need to be tested to ensure that the performance of the valves meets the requirements;

[0004] Most machines on the market today are limited to product production and are unable to independently perform valve testing. Even if a few devices have testing functions, they usually require long downtime and cumbersome installation processes, resulting in low valve testing efficiency. Summary of the invention

[0005] The object of the present invention is to provide a maintenance and testing device for a vacuum valve and a testing method thereof, so as to solve the problems raised in the above background technology.

[0006] In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions: a maintenance and testing device for a vacuum valve, comprising a first vacuum pressure gauge, a second vacuum pressure gauge, a vacuum chamber, a mass flow meter, a control box, a gas pressure regulator and a switching fixture and an interface, wherein the first vacuum pressure gauge and the second vacuum pressure gauge are both mounted on the top of the vacuum chamber, the switching fixture and the interface are mounted at one end of the vacuum chamber, a bearing assembly is disposed below the switching fixture and the interface, a support frame is disposed below the vacuum chamber, and the mass flow meter, the control box and the gas pressure regulator are mounted inside the support frame;

[0007] A first reserved interface and a second reserved interface are installed on the top of the vacuum chamber, and a manual diaphragm valve is installed at one end of the vacuum chamber away from the adapter and the interface, and the manual diaphragm valve is connected to the mass flow meter through a hose;

[0008] A connecting pipe and a connecting straight-through pipeline are installed at one end of the transfer fixture and the interface away from the vacuum chamber, and a dry vacuum pump is arranged at the bottom end of the connecting straight-through pipeline.

[0009] As a further technical solution of the present invention, the bearing assembly includes a bearing plate arranged below the adapter fixture and the interface, and the outer walls on both sides of the bearing plate are equipped with mounting seats, and the mounting seats are installed inside the support frame through a lifting assembly.

[0010] As a further technical solution of the present invention, a fixed profile is installed on the outer wall of the vacuum chamber, and two fixed profiles are provided. Both of the two fixed profiles are fixedly installed on the top of the bearing plate.

[0011] As a further technical solution of the present invention, the lifting assembly includes a slide fixedly mounted on the side wall of the mounting seat, and the slides are evenly arranged in multiple numbers. Each of the slides is slidably mounted inside the support frame, and the internal thread of one of the slides is connected to a threaded rod, and the threaded rod is rotatably mounted inside the support frame, a motor is installed at the bottom end of the threaded rod, and a lubrication assembly is arranged on the outside of the threaded rod.

[0012] As a further technical solution of the present invention, the bearing plate is slidably connected to the mounting seat.

[0013] As a further technical solution of the present invention, a slide groove is provided inside the mounting seat, a sliding block is slidably connected inside the slide groove, and the sliding block is fixedly mounted on the top of the bearing plate.

[0014] As a further technical solution of the present invention, the lubrication assembly includes a fixing ring arranged on the outside of the threaded rod, the fixing ring is fixedly installed on the side wall of the slide seat, the interior of the fixing ring is evenly installed with liquid outlet pipes in a circular array, the interior of the liquid outlet pipes is rotatably connected with balls, the top end of the fixing ring is fixedly connected with a liquid guide tube, the top end of the liquid guide tube is embedded in the interior of the liquid storage cavity, and the liquid storage cavity is opened inside the support frame.

[0015] As a further technical solution of the present invention, the liquid guiding tube is configured as a corrugated tube.

[0016] As a further technical solution of the present invention, bristles are provided at both upper and lower ends of the liquid outlet pipe, and the bristles are fixedly mounted on the inner wall of the fixing ring.

[0017] A testing method for a maintenance testing device for a vacuum valve, comprising the following steps:

[0018] S1: When working, first select different adapters and interfaces according to different valve specifications;

[0019] S2: Then adjust the height of the vacuum chamber according to the model and specification of the valve, start the motor to drive the threaded rod to rotate, the rotation of the threaded rod drives the movement of the slide seat, the movement of the slide seat drives the movement of the mounting seat, the movement of the mounting seat drives the movement of the bearing plate, the movement of the bearing plate drives the movement of the fixed profile, and the movement of the fixed profile drives the movement of the vacuum chamber to adjust the height of the vacuum chamber;

[0020] S3: When the sliding seat moves, the fixed ring is driven to move outside the threaded rod, and the movement of the fixed ring drives the movement of the liquid outlet pipe. When the liquid outlet pipe moves, the ball contacts the outer wall of the threaded rod and rotates. The lubricating liquid inside the fixed ring is driven by the ball to be applied to the outer wall of the threaded rod to lubricate the threaded rod, and the lubricating oil is evenly spread through the contact between the bristles and the outer wall of the threaded rod;

[0021] S4: Then install the valve to the vacuum chamber, select a matching connecting cable according to different valve models, and connect the cable to the valve;

[0022] S5: Open the air inlet valve and set the gas flow rate;

[0023] S6: Turn on the control computer and connect to the test software;

[0024] S7: Set different pressure values ​​and perform control tests.

[0025] The beneficial effects of the present invention are as follows:

[0026] 1. The present invention can perform valve detection offline through the testing device, facilitate pressure control testing and position control of the valve, and improve the testing efficiency of the valve.

[0027] 2. The present invention is provided with a lifting assembly. When in use, the motor is started to drive the threaded rod to rotate, the rotation of the threaded rod drives the movement of the slide seat, the movement of the slide seat drives the movement of the mounting seat, the movement of the mounting seat drives the movement of the bearing plate, the movement of the bearing plate drives the movement of the fixed profile, and the movement of the fixed profile drives the movement of the vacuum chamber to adjust the height of the vacuum chamber for adapting to valves of different specifications.

[0028] 3. Through the setting of the lubrication component, the present invention allows the slide to move on the outer wall of the threaded rod when adjusting the height of the vacuum chamber. The movement of the slide drives the movement of the fixed ring, and the movement of the fixed ring drives the movement of the liquid outlet pipe. When the liquid outlet pipe moves, the ball contacts the outer wall of the threaded rod and rotates. The lubricating liquid inside the fixed ring is driven by the ball to be coated on the outer wall of the threaded rod, thereby lubricating the threaded rod, which helps to extend the service life of the threaded rod and reduce equipment failures and maintenance costs caused by wear. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0030] Figure 2 It is a front view of the overall structure of the present invention;

[0031] Figure 3 It is a schematic cross-sectional view of the overall structure of the present invention;

[0032] Figure 4 For the present invention Figure 3A schematic diagram of the structure enlargement in the middle;

[0033] Figure 5 It is a structural schematic diagram of the bearing plate of the present invention;

[0034] Figure 6 It is a schematic cross-sectional view of the structure of the fixing ring of the present invention.

[0035] In the figure: 1. first reserved interface; 2. first vacuum pressure gauge; 3. second vacuum pressure gauge; 4. second reserved interface; 5. manual diaphragm valve; 6. vacuum chamber; 7. mass flow meter; 8. control box; 9. gas pressure regulation; 10. adapter and interface; 11. connecting pipe; 12. connecting straight-through pipeline; 13. dry vacuum pump; 14. fixed profile; 15. bearing plate; 16. mounting seat; 17. sliding seat; 18. support frame; 19. threaded rod; 20. motor; 21. slider; 22. slide; 23. liquid storage chamber; 24. liquid guide tube; 25. fixing ring; 26. liquid outlet pipe; 27. ball bearing; 28. bristles. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] like Figures 1 to 6 As shown, in an embodiment of the present invention, a maintenance and testing device for a vacuum valve includes a first vacuum pressure gauge 2, a second vacuum pressure gauge 3, a vacuum chamber 6, a mass flow meter 7, a control box 8, a gas pressure regulator 9, and a switching fixture and an interface 10. The first vacuum pressure gauge 2 and the second vacuum pressure gauge 3 are both installed on the top of the vacuum chamber 6, the switching fixture and the interface 10 are installed at one end of the vacuum chamber 6, a bearing assembly is arranged below the switching fixture and the interface 10, a support frame 18 is arranged below the vacuum chamber 6, and the mass flow meter 7, the control box 8 and the gas pressure regulator 9 are installed inside the support frame 18;

[0038] A first reserved interface 1 and a second reserved interface 4 are installed on the top of the vacuum chamber 6, and a manual diaphragm valve 5 is installed at one end of the vacuum chamber 6 away from the adapter fixture and the interface 10, and the manual diaphragm valve 5 is connected to the mass flow meter 7 through a hose;

[0039] A connecting pipe 11 and a connecting straight-through pipe 12 are installed at one end of the adapter fixture and interface 10 away from the vacuum chamber 6 , and a dry vacuum pump 13 is arranged at the bottom end of the connecting straight-through pipe 12 .

[0040] The first vacuum pressure gauge 2 is specifically a 10Torr vacuum pressure gauge, and the second vacuum pressure gauge 3 is specifically a 1000Torr vacuum pressure gauge. When used, the corresponding range is selected according to different valves;

[0041] The mass flow meter 7 uses 0-30SLM specifications;

[0042] The connecting pipe 11 is used to connect the angle valve to the vacuum chamber 6;

[0043] A manual angle valve is also installed on the top of the straight-through pipe 12 to facilitate the isolation or connection of the vacuum pump;

[0044] Through this testing device, valve detection can be performed offline, which facilitates pressure control testing and position control of the valve, thereby improving the testing efficiency of the valve.

[0045] The test device also has the advantage of occupying a small area, and can be matched with different fixtures to operate valves of different specifications, thereby improving the adaptability of the device.

[0046] like Figures 1 to 5 As shown, the bearing assembly includes a bearing plate 15 disposed below the adapter fixture and the interface 10 , and mounting seats 16 are installed on the outer walls on both sides of the bearing plate 15 , and the mounting seats 16 are installed inside the support frame 18 through a lifting assembly.

[0047] When in use, the valve can be temporarily placed on the top of the carrier plate 15 and below the adapter and interface 10 to facilitate installation or removal of the valve and improve the convenience of operation.

[0048] like Figures 1 to 5 As shown, a fixed profile 14 is installed on the outer wall of the vacuum chamber 6 , and two fixed profiles 14 are provided. Both fixed profiles 14 are fixedly installed on the top of the carrying plate 15 .

[0049] The vacuum chamber 6 is fixed by a fixing profile 14 so that it is located above the carrying plate 15 to ensure the stability of the test process.

[0050] like Figures 1 to 4 As shown, the lifting assembly includes a slide 17 fixedly mounted on the side wall of the mounting seat 16, and a plurality of slides 17 are evenly arranged. Each slide 17 is slidably mounted inside a support frame 18. The internal thread of one of the slides 17 is connected to a threaded rod 19, and the threaded rod 19 is rotatably mounted inside the support frame 18. A motor 20 is installed at the bottom end of the threaded rod 19, and a lubrication assembly is arranged on the outside of the threaded rod 19.

[0051] Through the setting of the lifting assembly, when in use, the starting motor 20 drives the threaded rod 19 to rotate, the rotation of the threaded rod 19 drives the movement of the slide 17, the movement of the slide 17 drives the movement of the mounting seat 16, the movement of the mounting seat 16 drives the movement of the bearing plate 15, the movement of the bearing plate 15 drives the movement of the fixed profile 14, and the movement of the fixed profile 14 drives the movement of the vacuum chamber 6 to adjust the height of the vacuum chamber 6 for adapting to valves of different specifications.

[0052] like Figures 1 to 5 As shown, the bearing plate 15 and the mounting seat 16 are slidably connected.

[0053] During operation, the fixed profile 14 and the vacuum chamber 6 can be driven to move by sliding the bearing plate 15, thereby facilitating the installation of the valve.

[0054] like Figures 1 to 6 As shown, a slide groove 22 is provided inside the mounting seat 16 , and a slider 21 is slidably connected inside the slide groove 22 . The slider 21 is fixedly mounted on the top of the bearing plate 15 .

[0055] The sliding distance of the slider 21 is limited by the sliding groove 22 , thereby limiting the moving position of the carrying plate 15 .

[0056] like Figures 1 to 6 As shown, the lubrication assembly includes a fixed ring 25 arranged on the outside of the threaded rod 19, the fixed ring 25 is fixedly installed on the side wall of the slide 17, the interior of the fixed ring 25 is evenly installed with liquid outlet pipes 26 in a circular array, the interior of the liquid outlet pipes 26 is rotatably connected with balls 27, the top end of the fixed ring 25 is fixedly connected with a liquid guide tube 24, the top end of the liquid guide tube 24 is embedded in the interior of the liquid storage chamber 23, and the liquid storage chamber 23 is opened inside the support frame 18.

[0057] Through the setting of the lubrication component, when adjusting the height of the vacuum chamber 6, the slide 17 moves on the outer wall of the threaded rod 19, the movement of the slide 17 drives the movement of the fixed ring 25, the movement of the fixed ring 25 drives the movement of the liquid outlet pipe 26, when the liquid outlet pipe 26 moves, the ball 27 contacts the outer wall of the threaded rod 19 and rotates, the lubricating liquid inside the fixed ring 25 is driven by the ball 27 to be coated on the outer wall of the threaded rod 19, lubricating the threaded rod 19, which helps to extend the service life of the threaded rod 19 and reduce equipment failures and maintenance costs caused by wear.

[0058] like Figure 4 and Figure 6 As shown, the liquid guiding tube 24 is configured as a bellows.

[0059] When the slide 17 drives the fixing ring 25 to move up and down, the liquid guide tube 24 is stretched to adapt to the transmission of lubricating liquid at different distances.

[0060] like Figure 6 As shown, bristles 28 are provided at both the upper and lower ends of the liquid outlet pipe 26 , and the bristles 28 are fixedly mounted on the inner wall of the fixing ring 25 .

[0061] After the lubricating liquid is applied, the bristles 28 come into contact with the outer wall of the threaded rod 19, so that the lubricating oil is spread evenly, thereby improving the lubrication effect.

[0062] A testing method for a maintenance testing device for a vacuum valve, comprising the following steps:

[0063] S1: When working, first select different adapters and interfaces 10 according to different valve specifications (the test vacuum chamber uses the ISO160 standard interface);

[0064] S2: Then, the height of the vacuum chamber 6 is adjusted according to the model and specification of the valve, the motor 20 is started to drive the threaded rod 19 to rotate, the rotation of the threaded rod 19 drives the movement of the slide 17, the movement of the slide 17 drives the movement of the mounting seat 16, the movement of the mounting seat 16 drives the movement of the bearing plate 15, the movement of the bearing plate 15 drives the movement of the fixed profile 14, and the movement of the fixed profile 14 drives the movement of the vacuum chamber 6 to adjust the height of the vacuum chamber 6;

[0065] S3: When the slide 17 moves, the fixed ring 25 is driven to move outside the threaded rod 19. The movement of the fixed ring 25 drives the movement of the liquid outlet pipe 26. When the liquid outlet pipe 26 moves, the ball 27 contacts the outer wall of the threaded rod 19 and rotates. The lubricating liquid inside the fixed ring 25 is driven by the ball 27 to be applied to the outer wall of the threaded rod 19 to lubricate the threaded rod 19, and the lubricating oil is evenly spread through the contact of the brush 28 with the outer wall of the threaded rod 19.

[0066] S4: Then install the valve to the vacuum chamber 6, select a connecting cable matching the valve according to different models, and connect the cable to the valve;

[0067] S5: Open the air inlet valve and set the gas flow rate;

[0068] S6: Turn on the control computer and connect to the test software;

[0069] S7: Set different pressure values ​​and perform control tests.

[0070] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A maintenance and testing device for a vacuum valve, comprising a first vacuum pressure gauge (2), a second vacuum pressure gauge (3), a vacuum chamber (6), a mass flow meter (7), a control box (8), a gas pressure regulator (9), and a switching fixture and an interface (10), characterized in that: The first vacuum pressure gauge (2) and the second vacuum pressure gauge (3) are both installed on the top of the vacuum chamber (6); the adapter fixture and the interface (10) are installed at one end of the vacuum chamber (6); a bearing assembly is provided below the adapter fixture and the interface (10); a support frame (18) is provided below the vacuum chamber (6); and the mass flow meter (7), the control box (8) and the gas pressure regulator (9) are installed inside the support frame (18); A first reserved interface (1) and a second reserved interface (4) are installed on the top of the vacuum chamber (6); a manual diaphragm valve (5) is installed at one end of the vacuum chamber (6) away from the adapter fixture and the interface (10); and the manual diaphragm valve (5) is connected to the mass flow meter (7) via a hose; A connecting pipe (11) and a connecting straight-through pipe (12) are installed at one end of the adapter fixture and interface (10) away from the vacuum chamber (6), and a dry vacuum pump (13) is arranged at the bottom end of the connecting straight-through pipe (12).

2. A maintenance and testing device for a vacuum valve according to claim 1, characterized in that: The bearing assembly comprises a bearing plate (15) arranged below the adapter fixture and the interface (10), and outer walls on both sides of the bearing plate (15) are both installed with mounting seats (16), and the mounting seats (16) are installed inside the support frame (18) through a lifting assembly.

3. A maintenance and testing device for a vacuum valve according to claim 1, characterized in that: The outer wall of the vacuum chamber (6) is installed with a fixed profile (14), two fixed profiles (14) are provided, and both of the two fixed profiles (14) are fixedly installed on the top of the bearing plate (15).

4. A maintenance and testing device for a vacuum valve according to claim 2, characterized in that: The lifting assembly comprises a slide (17) fixedly mounted on the side wall of the mounting seat (16), wherein a plurality of slides (17) are evenly arranged, and each of the slides (17) is slidably mounted inside a support frame (18), wherein an internal thread of one of the slides (17) is connected to a threaded rod (19), and the threaded rod (19) is rotatably mounted inside the support frame (18), a motor (20) is mounted at the bottom end of the threaded rod (19), and a lubrication assembly is arranged outside the threaded rod (19).

5. A maintenance and testing device for a vacuum valve according to claim 2, characterized in that: The bearing plate (15) is slidably connected to the mounting seat (16).

6. A maintenance and testing device for a vacuum valve according to claim 2, characterized in that: A sliding groove (22) is provided inside the mounting seat (16), and a sliding block (21) is slidably connected inside the sliding groove (22), and the sliding block (21) is fixedly mounted on the top of the bearing plate (15).

7. A maintenance and testing device for a vacuum valve according to claim 4, characterized in that: The lubrication assembly comprises a fixing ring (25) arranged outside the threaded rod (19), the fixing ring (25) being fixedly mounted on the side wall of the slide seat (17), the inside of the fixing ring (25) being evenly mounted with liquid outlet pipes (26) in an annular array, the inside of the liquid outlet pipes (26) being rotatably connected with balls (27), the top end of the fixing ring (25) being fixedly connected with a liquid guide pipe (24), the top end of the liquid guide pipe (24) being embedded in a liquid storage chamber (23), and the liquid storage chamber (23) being opened in the inside of the support frame (18).

8. A maintenance and testing device for a vacuum valve according to claim 7, characterized in that: The liquid guiding tube (24) is configured as a corrugated tube.

9. A maintenance and testing device for a vacuum valve according to claim 7, characterized in that: Brushes (28) are provided at both the upper and lower ends of the liquid outlet pipe (26), and the brushes (28) are fixedly mounted on the inner wall of the fixing ring (25).

10. A testing method for a maintenance and testing device for a vacuum valve, the method being applicable to the maintenance and testing device for a vacuum valve as claimed in claims 1 to 9, characterized in that: The following steps are involved: S1: When working, first select different adapters and interfaces (10) according to different valve specifications (the test vacuum chamber uses the ISO160 standard interface); S2: Then, the height of the vacuum chamber (6) is adjusted according to the model and specification of the valve, and the motor (20) is started to drive the threaded rod (19) to rotate. The rotation of the threaded rod (19) drives the movement of the slide seat (17). The movement of the slide seat (17) drives the movement of the mounting seat (16). The movement of the mounting seat (16) drives the movement of the bearing plate (15). The movement of the bearing plate (15) drives the movement of the fixed profile (14). The movement of the fixed profile (14) drives the movement of the vacuum chamber (6) to adjust the height of the vacuum chamber (6); S3: When the slide seat (17) moves, the fixed ring (25) is driven to move outside the threaded rod (19), and the movement of the fixed ring (25) drives the liquid outlet pipe (26) to move. When the liquid outlet pipe (26) moves, the ball (27) contacts the outer wall of the threaded rod (19) and rotates. The lubricating liquid inside the fixed ring (25) is driven by the ball (27) to be applied to the outer wall of the threaded rod (19), thereby lubricating the threaded rod (19), and the lubricating oil is evenly spread by the contact of the brush (28) with the outer wall of the threaded rod (19); S4: Then install the valve to the vacuum chamber (6), select a connecting cable that matches the valve according to different models, and connect the cable to the valve; S5: Open the air inlet valve and set the gas flow rate; S6: Turn on the control computer and connect to the test software; S7: Set different pressure values ​​and perform control tests.

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