High-speed movement detection system and detection method

Abstract

The invention provides a high-speed mobile detection system and method, and the system comprises an XY linear platform, a reinforcing and stabilizing mechanism, a Z-axis module, an infrared camera, and a displacement sensor, the XY linear platform is provided with the reinforcing and stabilizing mechanism, the reinforcing and stabilizing mechanism is connected with the Z-axis module, the Z-axis module is connected with the infrared camera, and the displacement sensor is connected with the Z-axis module; the infrared camera conducts Z-axis movement through the Z-axis module, the Z-axis module conducts XY-axis movement on the XY linear platform through the reinforcing and stabilizing mechanism, and the displacement sensor checks the distance between the displacement sensor and a winding tape through the Z-axis module. According to the invention, the stability of the infrared camera is ensured through the reinforcing and stabilizing mechanism, so that the camera does not defocus during high-speed movement; the displacement sensor detects the distance between the infrared camera and the tape, and the Z-axis module is matched for compensation to ensure the accurate position, so that the infrared camera is not out of focus; an XY linear motor platform which is driven faster and more stably is selected, and only 80 ms is needed for moving 3 mm.

Description

Technical Field

[0001] The present invention relates to the field of roll-to-roll appearance inspection, and in particular to a high-speed mobile inspection system and an inspection method. Background Art

[0002] When cutting silicon wafers, if the cutter is contaminated with foreign matter such as small silicon fragments or the cutter is no longer sharp, the edge of the chip will be damaged during cutting; when the tape reel places the chip on the wafer into the pocket of the carrier tape, if the chip is not completely placed in the pocket, the chip will tilt. At this time, the process of covering film bonding will force the chip into the pocket, and the corner of the front solder ball surface of the chip will be damaged, causing chip failure.

[0003] The existing reel to reel appearance inspection system has two problems: (1) The inspection speed is slow. The XY platform moves at a speed of 150 ms to move 3 mm. (2) The XY platform moves for too long, causing heat and resulting in reduced accuracy.

[0004] After searching, there is a Chinese utility model patent with patent number CN204044086U, which discloses an appearance detection device of electronic component taping packaging equipment, which is used for electronic component taping packaging. It discloses an upper appearance detection device and a lower appearance detection device, which are respectively installed beside the upper and lower surface turntables of the working panel. The upper appearance detection device is composed of a Y-axis moving seat, an X-axis moving seat, a CCD camera, and a light source head; the lower appearance detection device is composed of a Y-axis moving seat, an X-axis moving seat, a CCD camera, a right-angle sharp mirror, and a light source head. The above patents can only realize the movement in the XY axis, and cannot solve the problem of the XY platform moving heat and thus the decrease in accuracy. Summary of the invention

[0005] In view of the defects in the prior art, an object of the present invention is to provide a high-speed motion detection system and a detection method.

[0006] A high-speed mobile detection system provided by the present invention includes: an XY linear platform, a strengthening and stabilizing mechanism, a Z-axis module, an infrared camera and a displacement sensor, wherein the XY linear platform is provided with a strengthening and stabilizing mechanism, the strengthening and stabilizing mechanism is connected to the Z-axis module, the Z-axis module is connected to the infrared camera, and the displacement sensor is connected to the Z-axis module;

[0007] The infrared camera performs Z-axis movement through the Z-axis module, and the Z-axis module performs XY-axis movement on the XY linear platform through the enhanced stabilization mechanism. The displacement sensor checks the distance to the tape through the Z-axis module.

[0008] Preferably, the reinforcing and stabilizing mechanism includes an XY linear motor connecting plate, reinforcing ribs and a Z-axis connecting plate. An XY linear motor connecting plate is provided at the bottom of the reinforcing rib, the XY linear motor connecting plate is connected to the XY linear platform, a Z-axis connecting plate is provided on the side of the reinforcing rib, and the Z-axis connecting plate is connected to the Z-axis module.

[0009] Preferably, the Z-axis module includes a servo motor and a linear module, the servo motor is connected to the linear module, the linear module is connected to the Z-axis connecting plate, and the infrared camera and the displacement sensor are respectively slidably connected to the linear module.

[0010] Preferably, the displacement sensor measures the distance from the infrared camera to the tape. After the infrared camera completes the predetermined detection, the displacement sensor measures the accuracy error caused by the heating of the XY linear platform and feeds it back to the Z-axis module, and the error compensation in the Z-axis direction is performed through the Z-axis module.

[0011] Preferably, the infrared camera is moved in the X and Y axis directions in sequence by the drive of the XY linear platform, and the infrared camera is moved in the Z axis direction by the linear module.

[0012] Preferably, the XY linear platform is connected to a linear motor, the linear motor drives the XY linear platform to move at high speed, and the XY linear platform drives the Z-axis module, the infrared camera and the displacement sensor to move horizontally in the X and Y axes.

[0013] Preferably, the reinforcing rib is triangular in shape.

[0014] The present invention also provides a detection method for a high-speed mobile detection system, and the specific operation steps are as follows:

[0015] S1, XY linear platform drives the Z-axis module, infrared camera and displacement sensor to move in the X-axis and Y-axis directions;

[0016] The X-axis moves upward by a predetermined distance, the XY linear platform stops, and the infrared camera takes the first photo; then the Y-axis moves upward by a predetermined distance, the XY linear platform stops, and the infrared camera takes the second photo;

[0017] S2. After the preset number of chips are detected, the XY linear platform stops, and the Z-axis module moves downward by a preset distance. The displacement sensor transmits a signal after being triggered, and the detected distance is compared with the initial distance. The Z-axis module compensates to ensure that the photo is not out of focus.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] (1) The present invention ensures the stability of the infrared camera by strengthening the stabilizing mechanism, so that the camera can take pictures without losing focus when moving at high speed;

[0020] (2) The present invention detects the distance from the infrared camera to the tape through a displacement sensor, detects the current position every 1,000 chips, compares it with the initial position, and performs compensation to ensure accurate position, thereby solving the problem of camera defocusing caused by the heat generated by the high-speed movement of the linear motor;

[0021] (3) The present invention adopts a linear module with an accuracy of 0.001 mm, and the Z-axis module performs compensation and clearing through detection by a displacement sensor, thereby improving the accuracy of the infrared camera;

[0022] (4) The present invention uses an XY linear motor platform with a faster and more stable drive, which can move 3 mm in only 80 ms, thus achieving high-speed movement of the infrared camera. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings:

[0024] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0025] Figure 2 It is a schematic diagram of the structure of the strengthening and stabilizing mechanism and the Z-axis module in the present invention.

[0026] The figure shows: XY linear platform 101, strengthening and stabilizing mechanism 102, XY linear motor connecting plate 1021, reinforcing ribs 1022, Z-axis connecting plate 1023, servo motor 1024, linear module 1025, Z-axis module 103, infrared camera 104, displacement sensor 105. DETAILED DESCRIPTION

[0027] The present invention is described in detail below in conjunction with specific embodiments. The following embodiments will help those skilled in the art to further understand the present invention, but are not intended to limit the present invention in any form. It should be noted that, for those of ordinary skill in the art, several changes and improvements can also be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0028] Example 1

[0029] According to a high-speed mobile detection system provided by the present invention, Figure 1-2The device comprises: an XY linear platform 101, a strengthening and stabilizing mechanism 102, a Z-axis module 103, an infrared camera 104 and a displacement sensor 105. The XY linear platform 101 is provided with a strengthening and stabilizing mechanism 102, which is connected to the Z-axis module 103. The Z-axis module 103 moves downward in the Z-axis range of 0-7mm. The Z-axis module 103 is connected to the infrared camera 104, and the displacement sensor 105 is connected to the Z-axis module 103. The XY linear platform 101 achieves high-speed movement through a linear motor. The movement rate of the XY linear platform 101 is 3mm / 80ms, and it only takes 80ms to move 3mm. With the strengthening and stabilizing mechanism 102, its stability is ensured, so that when it moves at high speed, the infrared camera 104 does not lose focus when taking pictures.

[0030] like Figure 2 As shown, the strengthening and stabilizing mechanism 102 includes an XY linear motor connecting plate 1021, a reinforcing rib 1022 and a Z-axis connecting plate 1023. The reinforcing rib 1022 is triangular, and an XY linear motor connecting plate 1021 is provided at the bottom of the reinforcing rib 1022. The XY linear motor connecting plate 1021 is connected to the XY linear platform 101, and a Z-axis connecting plate 1023 is provided on the side of the reinforcing rib 1022. The Z-axis module 103 includes a servo motor 1024 and a linear module 1025. The servo motor 1024 is connected to the linear module 1025, and the linear module 1025 is connected to the Z-axis connecting plate 1023. The infrared camera 104 and the displacement sensor 105 are respectively slidably connected to the linear module 1025. The infrared camera 104 is driven by the XY linear platform 101 to move in the X and Y axis directions in sequence, and the infrared camera 104 is moved in the Z axis direction through the linear module 1025, and the accuracy of the linear module 1025 can reach 0.001mm.

[0031] The infrared camera 104 moves in the Z-axis direction through the Z-axis module 103, and the Z-axis module 103 moves in the XY-axis direction on the XY linear platform 101 through the strengthening and stabilizing mechanism 102. The displacement sensor 105 checks the distance from the tape through the Z-axis module 103. The displacement sensor 105 measures the distance from the infrared camera 104 to the tape. After the infrared camera 104 completes the predetermined detection, the displacement sensor 105 measures the precision error caused by the heating of the XY linear platform 101 and feeds it back to the Z-axis module 103, and the error compensation in the Z-axis direction is performed through the Z-axis module 103.

[0032] More specifically, if in the overall detection system, only the detection speed is increased, ghosting may occur during the camera shooting process due to the increased speed, the shooting may be unclear, and the image captured by the camera cannot identify the appearance defects on the chip; therefore, in the overall detection system, a high frame rate camera + a special super-frequency flash is selected to achieve an image acquisition time of only 1ms, which can ensure that the image acquisition effect is not blurred when moving at high speed; in order to address the problem of reduced accuracy, a displacement sensor is added, and the current position is detected every 1,000 chips, compared with the initial position, and compensated to ensure the position is accurate and the photo is not out of focus.

[0033] A very high brightness light source is required so that the camera can have good grayscale brightness even at a very low exposure time. However, the longer the wavelength of the light source, the lower the brightness itself. The longer the light emission time, the more likely it is to burn the light source chip. Therefore, it is necessary to use super-frequency flash. Within 1ms, the light source is flashed at 3 times the brightness while the camera shutter is opened to let in light instantly. The image is taken within 1ms. This can minimize the image acquisition time, and instantaneous image acquisition can also better avoid image blur caused by camera or product vibration.

[0034] Example 2

[0035] The present invention also provides a detection method of the high-speed movement detection system in Embodiment 1, and the specific operation steps are as follows:

[0036] S1, the XY linear platform 101 drives the Z axis module 103, the infrared camera 104 and the displacement sensor 105 to move in the X axis and Y axis directions;

[0037] The X-axis moves 3 mm upward, the XY linear platform 101 stops, and the infrared camera 104 takes the first picture; then the Y-axis moves 3 mm upward, the XY linear platform 101 stops, and the infrared camera 104 takes the second picture;

[0038] S2. After detecting 1000 chips, the XY linear platform 101 stops, the Z axis module 103 moves downward by 7 mm, the displacement sensor 104 transmits a signal after being triggered, and the detected distance is compared with the initial distance. The Z axis module 103 compensates to ensure that the photo is not out of focus.

[0039] In the description of the present application, it should be understood that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0040] The above describes the specific embodiments of the present invention. It should be understood that the present invention is not limited to the above specific embodiments, and those skilled in the art can make various changes or modifications within the scope of the claims, which does not affect the essence of the present invention. In the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other arbitrarily.

Claims

1. A high-speed mobile detection system, characterized in that: include: An XY linear platform (101), a reinforcing and stabilizing mechanism (102), a Z-axis module (103), an infrared camera (104), and a displacement sensor (105), wherein the XY linear platform (101) is provided with the reinforcing and stabilizing mechanism (102), the reinforcing and stabilizing mechanism (102) is connected to the Z-axis module (103), the Z-axis module (103) is connected to the infrared camera (104), and the displacement sensor (105) is connected to the Z-axis module (103); The infrared camera (104) performs Z-axis movement through the Z-axis module (103), the Z-axis module (103) performs XY-axis movement on the XY linear platform (101) through the reinforcing stabilizing mechanism (102), and the displacement sensor (105) checks the distance from the roll through the Z-axis module (103).

2. The high-speed movement detection system according to claim 1, characterized in that: The reinforcing and stabilizing mechanism (102) comprises an XY linear motor connecting plate (1021), reinforcing ribs (1022) and a Z-axis connecting plate (1023); the XY linear motor connecting plate (1021) is provided at the bottom of the reinforcing ribs (1022); the XY linear motor connecting plate (1021) is connected to the XY linear platform (101); the Z-axis connecting plate (1023) is provided on the side of the reinforcing ribs (1022); and the Z-axis connecting plate (1023) is connected to the Z-axis module (103).

3. The high-speed movement detection system according to claim 2, characterized in that: The Z-axis module (103) comprises a servo motor (1024) and a linear module (1025), the servo motor (1024) is connected to the linear module (1025), the linear module (1025) is connected to the Z-axis connecting plate (1023), and the infrared camera (104) and the displacement sensor (105) are respectively slidably connected to the linear module (1025).

4. The high-speed movement detection system according to claim 1, characterized in that: The displacement sensor (105) measures the distance between the infrared camera (104) and the tape roll. After the infrared camera (104) completes the predetermined detection, the displacement sensor (105) measures the accuracy error caused by the heating of the XY linear platform (101), and feeds it back to the Z-axis module (103), and performs error compensation in the Z-axis direction through the Z-axis module (103).

5. The high-speed movement detection system according to claim 3, characterized in that: The infrared camera (104) is moved in the X and Y axial directions in sequence by being driven by the XY linear platform (101), and the infrared camera (104) is moved in the Z axial direction by the linear module (1025).

6. The high-speed movement detection system according to claim 1, characterized in that: The XY linear platform (101) is connected to a linear motor, the linear motor drives the XY linear platform (101) to move, and the XY linear platform (101) drives the Z-axis module (103), the infrared camera (104) and the displacement sensor (105) to move in the X and Y axis directions.

7. The high-speed movement detection system according to claim 2, characterized in that: The reinforcing rib (1022) is triangular in shape.

8. A detection method using the high-speed motion detection system according to any one of claims 1 to 7, characterized in that: The specific steps are as follows: S1, the XY linear platform (101) drives the Z-axis module (103), the infrared camera (104) and the displacement sensor (105) to move in the X-axis and Y-axis directions; The XY linear platform (101) moves a predetermined distance in the X-axis direction, stops, and the infrared camera (104) takes a first picture; then, the XY linear platform (101) moves a predetermined distance in the Y-axis direction, stops, and the infrared camera (104) takes a second picture; S2. After detecting a preset number of chips, the XY linear platform (101) stops, the Z-axis module (103) moves downward a predetermined distance, the displacement sensor (104) transmits a signal after being triggered, the detected distance is compared with the initial distance, and the Z-axis module (103) performs compensation.

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