High-universality SEM (scanning electron microscope) sample carrying platform
By designing an adjustable flange carrier and moving mechanism, the height and size limitations of existing SEM sample carriers when carrying large or exceeding the high samples are solved, and the general range of carriers is expanded and sample safe bearing is achieved.
Patent Information
- Application Number
- CN202411743493.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-30
- Publication Date
- 2025-03-11
AI Technical Summary
When existing SEM sample loaders carry large or excessive high samples, they are prone to scratches or drops due to height or size limitations, and the general range of the loaders is relatively narrow.
A high-versatile SEM sample loading stage is designed, using an adjustable flange carrier and moving mechanism. By adjusting the position of the flange carrier, the bearing area of the carrier disk or the height difference is formed to accommodate samples of different sizes and heights.
It effectively improves the load-bearing capacity of the stage for large-size or exceeding high samples, expands the general range of the stage, and avoids the risk of sample damage and drop.
Smart Images
Figure CN119595682A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of carriers, and in particular to a highly versatile SEM sample carrier. Background Art
[0002] SEM, or scanning electron microscope, is a multifunctional instrument with many superior performances and is the most widely used instrument. It can perform morphological observation and micro-region composition analysis at the same time, and is widely used in materials science, biology, semiconductor testing and other fields.
[0003] At present, the SEM sample carrier is often used to carry samples so that the samples can be placed in the SEM machine for inspection. The SEM machine limits the sample height to 1.2 cm. When a sample that exceeds the standard height enters the SEM chamber gate, there is a risk of scratching the sample surface or falling. Therefore, for example, large embedded test pieces, etc., cannot be observed using the SEM due to height restrictions. In addition, if the sample is large in size, it is often unable to be placed in the SEM for analysis due to the size limitation of the carrier plate of the carrier, and the general range of the SEM sample carrier is narrow. Summary of the invention
[0004] In order to improve the universal range of the carrier, the present application provides a highly universal SEM sample carrier.
[0005] The present application provides a highly versatile SEM sample carrier, which adopts the following technical solution: A highly versatile SEM sample carrier comprises a platform body, a support shaft is arranged on the top surface of the platform body, a circular carrier is arranged on the top surface of the support shaft, a cutting edge is arranged on one side of the circular carrier, an adjustment support is arranged on the bottom surface of the cutting edge, a flange carrier is arranged on one side of the adjustment support, and the adjustment support is provided with a moving mechanism for driving the flange carrier to adjust its position.
[0006] By adopting the above technical scheme, when it is necessary to carry large-sized samples, the flange carrier is first driven by the moving mechanism to swing to the top surface of the adjustment support. At this time, the flange carrier abuts against one side of the cut edge to increase the carrying area of the circular carrier, and the flange carrier and the circular carrier jointly carry the large-sized samples; when it is necessary to carry samples that exceed the standard height, the flange carrier is driven by the moving mechanism to swing to one side of the adjustment support. At this time, the flange carrier abuts against one side of the adjustment support, and the flange carrier and the circular carrier form a height difference, so that the sample can be carried by the low-drop flange carrier. By adjusting the position of the flange carrier, large-sized or excessive-height samples can be carried, which is beneficial to improve the general range of the carrier.
[0007] Optionally, the moving mechanism includes a first articulated seat group and a second articulated seat group, the first articulated seat group is arranged on both sides of the adjustment support, the second articulated seat group is arranged on both sides of the flange carrier, the first articulated seat group and the second articulated seat group are arranged opposite to each other, the second articulated seat group is slidably arranged in the first articulated seat group, and the adjustment support is provided with a fixing component for fixing the flange carrier.
[0008] By adopting the above technical solution, when the flange carrier is driven to swing, the flange carrier drives the first articulated seat group to swing, the first articulated seat group swings around the hinge point of the second articulated seat group, and the first articulated seat group and the second articulated seat group slide relative to each other, and when the flange carrier swings to the desired position, the flange carrier is fixed at the current position by the fixing component, which is beneficial to improve the stability of the flange carrier adjustment and fixation.
[0009] Optionally, the fixing assembly includes an insertion rod, a first spring is provided on the side of the first articulated seat group opposite to the second articulated seat group, one end of the first spring is fixedly connected to the first articulated seat group, and the other end of the first spring is fixedly connected to the second articulated seat group, the insertion rod is provided on one side of the flange carrier, and the cutting edge and the adjustment support are respectively provided with fixing grooves on one side corresponding to the position of the insertion rod, and the insertion rod is inserted into the fixing groove.
[0010] By adopting the above technical solution, when the flange carrier is driven to swing away from the adjustment support, the flange carrier stretches the first spring through the second hinge seat group, and when the insertion rod is aligned with the fixing groove, the flange carrier is released. At this time, the first spring releases the elastic force and finally drives the insertion rod to be inserted into the fixing groove. Under the limiting action of the elastic force of the first spring, the flange carrier is fixed to the top surface or one side of the adjustment support, which is beneficial to improve the stability of the adjustment and fixation of the flange carrier.
[0011] Optionally, a lower support is provided on the bottom surface of the adjustment support, and a slot is provided on a side of the lower support corresponding to the insertion rod, and the insertion rod is plugged into the slot.
[0012] By adopting the above technical solution, when the flange carrier is fixed to one side of the lower support by an insertion rod, it is helpful to increase the height difference between the flange carrier and the circular carrier, which is helpful to improve the convenience of carrying higher samples and further improve the universal range of the carrier.
[0013] Optionally, the flange carrier includes an adjusting portion and a connecting portion, the adjusting portion is hingedly arranged on one side of the connecting portion, and the connecting portion is provided with a positioning mechanism for adjusting and positioning a swing angle of the adjusting portion.
[0014] By adopting the above technical solution, when it is necessary to observe the sample from different angles, the sample is first placed on the top surface of the adjustment part, and then the adjustment part is driven to swing, and the adjustment part drives the sample to swing, and when the adjustment part swings to the required angle, the adjustment part is then fixed at the current angle through the positioning mechanism, which is beneficial to improve the convenience of observing the sample at different angles.
[0015] Optionally, the positioning mechanism includes a first hinged rod and a second hinged rod, one end of the first hinged rod is hinged to the bottom surface of the adjusting portion, the other end of the first hinged rod is hinged to one end of the second hinged rod, a positioning cylinder is provided on the bottom surface of the connecting portion, the other end of the second hinged rod is slidably connected to the positioning cylinder, and the connecting portion is provided in a positioning assembly for positioning the second hinged rod.
[0016] By adopting the above technical solution, when the adjusting part swings upward, the adjusting part drives the first hinged rod to swing, and under the guidance of the positioning cylinder, the first hinged rod drives the second hinged rod to move in the direction away from the positioning cylinder. When the positioning assembly positions the position of the second hinged rod, the position of the adjusting part is also positioned synchronously, which is beneficial to improve the stability of the angle adjustment and positioning of the adjusting part.
[0017] Optionally, the positioning assembly includes a blocking ball, a first air hole is formed at one end of the positioning cylinder, a second air hole is formed at the other end of the positioning cylinder, the blocking ball is arranged in the positioning cylinder, the blocking ball is sealed and connected to the second air hole, and the connecting part is provided with a moving part for cooperating to drive the blocking ball to move.
[0018] By adopting the above technical solution, when the second hinged rod moves in the direction away from the positioning cylinder, the second hinged rod draws air into the positioning cylinder through the second air hole. At this time, the blocking ball opens the second air hole. When the second hinged rod is released, with the cooperation of the moving part, the blocking ball re-blocks the second air hole, so that the gas in the positioning cylinder cannot flow outward. At this time, under the action of pressure, the second hinged rod cannot move in the direction close to the positioning cylinder, which is beneficial to improve the stability of the adjustment part at the current swing angle.
[0019] Optionally, the movable part is a second spring, a positioning seat is provided on the bottom surface of the connecting part, a pull rod is slidably provided in the positioning seat, one end of the pull rod is plugged into the second air hole, one end of the pull rod is connected to the blocking ball, the second spring is sleeved on the pull rod, one end of the second spring is fixedly connected to the positioning seat, and the other end of the second spring is fixedly connected to the side wall of the pull rod.
[0020] By adopting the above technical solution, when the second hinged rod moves in the direction away from the positioning cylinder, the second hinged rod draws gas into the positioning cylinder through the second air hole, and the gas pushes the blocking ball inward, and the blocking ball drives the pull rod to move in the direction close to the positioning cylinder and open the second air hole. At this time, the pull rod stretches the second spring, and when the second hinged rod stops moving, the second spring releases the elastic force and drives the blocking ball through the pull rod to re-seal the second air hole, which is beneficial to improve the stability of the blocking ball blocking or opening the second air hole.
[0021] Optionally, a conductive gasket is provided between the circular carrier plate and the platform.
[0022] By adopting the above technical solution, under the action of the conductive gasket, the contact area between the circular carrier and the platform is increased, the conductivity between the platform and the circular carrier is ensured, and the use of conductive glue is reduced.
[0023] Optionally, a lifting groove is provided on the surface of the adjusting part, a baffle is slidably arranged in the lifting groove, a screw is rotatably arranged on the bottom surface of the adjusting part, one end of the screw extends into the lifting groove, and one end of the screw is threadedly connected to the baffle.
[0024] By adopting the above technical solution, when the screw is rotated, the baffle moves upward under the guidance of the lifting groove, and the baffle is used to support the sample placed on the adjusting part to prevent the sample from slipping off the adjusting part.
[0025] In summary, this application includes the following beneficial technical effects: When it is necessary to carry large-sized samples, the flange carrier is first driven by the moving mechanism to swing to the top surface of the adjustment support. At this time, the flange carrier abuts against one side of the cut edge to increase the carrying area of the circular carrier, and the flange carrier and the circular carrier jointly carry the large-sized samples; when it is necessary to carry samples that exceed the standard height, the flange carrier is driven by the moving mechanism to swing to one side of the adjustment support. At this time, the flange carrier abuts against one side of the adjustment support, and the flange carrier and the circular carrier form a height difference, so that the sample can be carried by the low-drop flange carrier. By adjusting the position of the flange carrier, large-sized or excessive-height samples can be carried, which is beneficial to improve the general range of the carrier. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1 This is a schematic diagram of the state of the highly versatile SEM sample carrier of the present application when carrying a sample of super-high height; Figure 2 This is a schematic diagram of the state of the highly versatile SEM sample carrier of the present application when carrying a large-size sample; Figure 3 is a front view of the flange carrier of the present application; Figure 4It is a schematic diagram of the connection between the flange carrier and the adjustment support of the present application; Figure 5 It is a schematic diagram of the conductive gasket assembly of the present application.
[0027] Explanation of the reference numerals in the accompanying drawings: 1. platform; 2. support shaft; 3. circular carrier plate; 4. trimming; 5. adjustment support; 6. flange carrier plate; 7. first articulated seat group; 8. second articulated seat group; 9. insertion rod; 10. fixing groove; 11. first spring; 12. lower support; 13. slot; 14. adjustment part; 15. connecting part; 16. first articulated rod; 17. second articulated rod; 18. positioning cylinder; 19. blocking ball; 20. first air hole; 21. second air hole; 22. second spring; 23. positioning seat; 24. pull rod; 25. conductive gasket; 26. lifting groove; 27. baffle; 28. screw; 29. fork structure groove. DETAILED DESCRIPTION
[0028] The following is combined with Figure 1-5 This application is described in further detail.
[0029] Example: See also Figure 1 and Figure 2 A highly versatile SEM sample carrier comprises a platform 1. A support shaft 2 is fixedly connected to the top surface of the platform 1, and a circular carrier 3 is coaxially fixedly connected to the top surface of the support shaft 2. In addition, one of the side walls of the circular carrier 3 is a cutting edge 4. An adjustment support 5 is fixedly connected to the bottom surface of the cutting edge 4, and a flange carrier 6 is installed on one side of the adjustment support 5. Both the flange carrier 6 and the circular carrier 3 can be used to carry samples. A moving mechanism is installed on the adjustment support 5, and the moving mechanism is used to drive the flange carrier 6 to adjust the position.
[0030] When a large-sized sample needs to be carried, the flange carrier 6 is first driven by the moving mechanism to swing and adjust to the top surface of the adjustment support 5, and at the same time, the flange carrier 6 is pressed against the cut edge 4 of the circular carrier 3. At this time, the flange carrier 6 and the circular carrier 3 are in the same plane, thereby increasing the sample carrying area, and the flange carrier 6 and the circular carrier 3 jointly carry the large-sized sample.
[0031] When it is necessary to carry samples with a height exceeding the standard, the flange carrier 6 is driven by the moving mechanism to swing and adjust to one side of the adjustment support 5, and at the same time, the flange carrier 6 is pressed against the side wall of the adjustment support 5, at which time a height difference is formed between the flange carrier 6 and the circular carrier 3. When the sample is placed on the flange carrier 6, the overall height of the sample placed on the flange carrier 6 is lower than the overall height placed on the circular carrier 3, thereby adapting to the placement of samples with a height exceeding the standard.
[0032] For details, see Figure 3The moving mechanism includes a first articulated seat group 7 and a second articulated seat group 8. The first articulated seat group 7 is composed of two first articulated seats, which are respectively articulated on both sides of the adjustment support 5. The second articulated seat group 8 is composed of two second articulated seats, which are respectively articulated on both sides of the flange carrier 6. The first articulated seat group 7 is arranged opposite to the second articulated seat group 8, and the second articulated seat group 8 slides on the inner side of the first articulated seat group 7.
[0033] When the flange carrier 6 moves in a direction away from the adjustment support 5, the flange carrier 6 drives the second articulated seat assembly 8 to move in a direction away from the adjustment support 5, and at this time, the second articulated seat assembly 8 and the first articulated seat assembly 7 move in directions away from each other. When the flange carrier 6 swings at the hinge point of the first articulated seat assembly 7, the second articulated seat assembly 8 drives the first articulated seat assembly 7 to swing at the hinge point of the first articulated seat assembly 7.
[0034] See also Figure 1 , Figure 3 and Figure 4 In order to fix the flange carrier 6 after swing adjustment, the adjustment support 5 is also equipped with a fixing component. The fixing component includes an insertion rod 9, which is fixed to the side of the flange carrier 6 facing the adjustment support 5. The cutting edge 4 and the side of the adjustment support 5 facing the flange carrier 6 are both provided with a fixing groove 10 at the position corresponding to the insertion rod 9, and the insertion rod 9 is plugged into the fixing groove 10. The first articulated seat group 7 and the second articulated seat group 8 are respectively installed on the opposite side thereof. One end of the first spring 11 is fixedly connected to the inner side of the first articulated seat group 7, and the other end of the first spring 11 is fixedly connected to the inner side of the second articulated seat group 8.
[0035] When the flange carrier 6 drives the second hinged seat group 8 to move away from the adjustment support 5, the second hinged seat group 8 stretches the first spring 11. When the flange carrier 6 is adjusted and swung to the top surface of the adjustment support 5, and the insertion rod 9 is inserted into the fixing groove 10 on the circular carrier 3, the first spring 11 releases the elastic force and tightens the flange carrier 6 through the second hinged seat, finally fixing the flange carrier 6 to the top surface of the adjustment support 5.
[0036] Similarly, when the flange carrier 6 is adjusted and swung to one side of the adjustment support 5, and the insertion rod 9 is inserted into the fixing groove 10 on the adjustment support 5, the first spring 11 releases the elastic force and tightens the flange carrier 6 through the second hinge seat, and finally the flange carrier 6 is fixed to one side of the adjustment support 5.
[0037] It should be noted that the first spring 11 has sufficient tension to fix the flange carrier 6 .
[0038] See also Figure 4In order to further improve the universal range of the stage and facilitate the loading of higher samples, the bottom surface of the adjustment support 5 is fixedly connected with a lower support 12, and a slot 13 is opened on one side of the lower support 12, and the insertion rod 9 is plugged into the slot 13.
[0039] When the insertion rod 9 of the flange carrier 6 is inserted into the slot 13 of the lower support 12, the flange carrier 6 is fixed to one side of the lower support 12 under the tension of the first spring 11. At this time, the flange carrier 6 is located at the bottom surface of the lower support 12, thereby further increasing the height difference between the flange carrier 6 and the circular carrier 3, so as to meet the requirement of carrying higher samples.
[0040] See also Figure 2 , Figure 3 and Figure 4 To facilitate observation of the sample from different angles, the flange carrier 6 includes an adjusting portion 14 and a connecting portion 15 . The adjusting portion 14 is hinged to one side of the connecting portion 15 , and the insertion rod 9 is fixed to the side of the connecting portion 15 facing the circular carrier 3 .
[0041] In addition, in order to facilitate the swing angle of the positioning adjustment part 14, the connection part 15 is installed with a positioning mechanism, which includes a first hinge rod 16 and a second hinge rod 17. The first hinge rod 16 is located below the adjustment part 14, and the second hinge rod 17 is located below the connection part 15. One end of the first hinge rod 16 is hinged to the bottom surface of the adjustment part 14, and the other end of the first hinge rod 16 is hinged to one end of the second hinge rod 17. A positioning cylinder 18 is fixedly connected to the bottom surface of the connection part 15, and the other end of the second hinge rod 17 extends into the positioning cylinder 18, and the second hinge rod 17 is slidably connected to the positioning cylinder 18.
[0042] When the adjusting portion 14 is driven to swing upward, the adjusting portion 14 drives the first hinge rod 16 to swing, and the first hinge rod 16 drives the second hinge rod 17 to slide in a direction away from the positioning tube 18. When the adjusting portion 14 is driven to swing downward, the adjusting portion 14 drives the first hinge rod 16 to swing, and the first hinge rod 16 drives the second hinge rod 17 to slide in a direction close to the positioning tube 18.
[0043] See also Figure 3 In order to further position the adjusting part 14, the connecting part 15 is also equipped with a positioning assembly, and the positioning assembly includes a blocking ball 19. A first air hole 20 is opened at one end of the positioning cylinder 18, and the number of the first air holes 20 is set to be multiple. A second air hole 21 is opened at the other end of the positioning cylinder 18, and the blocking ball 19 is slidably installed in the positioning cylinder 18, and the blocking ball 19 is sealed and connected with the second air hole 21.
[0044] In addition, in order to cooperate with the movement of the blocking ball 19, the connecting portion 15 is also equipped with a moving part, which is a second spring 22. A positioning seat 23 is fixedly connected to the bottom surface of the connecting portion 15, and a pull rod 24 is slidably installed in the positioning seat 23. One end of the pull rod 24 is plugged into the second air hole 21, and one end of the pull rod 24 is fixedly connected to the blocking ball 19. The second spring 22 is sleeved on the pull rod 24, one end of the second spring 22 is fixedly connected to one side of the positioning seat 23, and the other end of the second spring 22 is fixedly connected to the side wall of the pull rod 24.
[0045] When the second hinged rod 17 moves in a direction away from the positioning cylinder 18, the gas inside the positioning cylinder 18 and on the left side of the second hinged rod 17 is discharged out of the positioning cylinder 18 through the first air hole 20. The gas inside the positioning cylinder 18 and on the right side of the second hinged rod 17 squeezes the blocking ball 19 inward through the second air hole 21 and enters the positioning cylinder 18. At this time, the blocking ball 19 drives the pull rod 24 to move in a direction close to the positioning cylinder 18, and the pull rod 24 squeezes the second spring 22. When the second hinged rod 17 stops moving and swings downward to squeeze, the second spring 22 releases its elastic force and drives the pull rod 24 to move in a direction away from the positioning cylinder 18. At this time, the blocking ball 19 resets to block the second air hole 21, and the gas inside the positioning cylinder 18 and on the right side of the second hinged rod 17 cannot be discharged, so that the adjusting part 14 cannot swing and squeeze. Under the action of gravity of the adjusting part 14, the adjusting part 14 is positioned at the current swinging position.
[0046] See also Figure 5 In order to reduce the use of conductive glue, a conductive gasket 25 is inserted between the circular carrier 3 and the platform 1. The conductive gasket 25 is made of copper with the highest conductivity. The conductive gasket 25 is inserted into the support shaft 2, and the conductive gasket 25 increases the contact area between the circular carrier 3 and the platform 1, thereby increasing the conductivity.
[0047] It is worth noting that see Figure 3 The surface of the adjusting part 14 is provided with a lifting groove 26, and a baffle 27 is installed in the lifting groove 26. A screw rod 28 is rotatably installed on the bottom surface of the adjusting part 14, one end of the screw rod 28 extends in the lifting groove 26, and one end of the screw rod 28 is threadedly connected with the bottom surface of the baffle 27.
[0048] Since the lifting slot 26 limits the movement of the baffle 27, when the screw 28 is rotated, the screw 28 drives the baffle 27 to rise and extend out of the adjustment part 14. At this time, the baffle 27 supports the sample carried on the adjustment part 14 to prevent the sample from sliding off the inclined adjustment part 14.
[0049] It is worth mentioning that see Figure 2 A finger-fork structure groove 29 is formed on the top surface of the adjusting portion 14, and the finger-fork structure groove 29 is convenient for placing the DIP package sample.
[0050] Working principle of a highly versatile SEM sample stage: When it is necessary to carry a large-sized sample, the flange carrier 6 is driven to swing to the top surface of the adjustment support 5. When the flange carrier 6 drives the second hinge seat group 8 to move away from the adjustment support 5, the second hinge seat group 8 stretches the first spring 11. When the flange carrier 6 is adjusted and swung to the top surface of the adjustment support 5, and the insertion rod 9 is inserted into the fixing groove 10 on the circular carrier 3, the first spring 11 releases the elastic force and tightens the flange carrier 6 through the second hinge seat group 8, and finally fixes the flange carrier 6 to the top surface of the adjustment support 5. At this time, the flange carrier 6 and the circular carrier 3 are in the same plane, thereby increasing the sample bearing area, and the flange carrier 6 and the circular carrier 3 jointly carry large-sized samples.
[0051] When it is necessary to carry a sample that exceeds the standard height, the flange carrier 6 is driven to swing to one side of the adjustment support 5. When the insertion rod 9 is inserted into the fixing groove 10 on the adjustment support 5, the first spring 11 releases the elastic force and tightens the flange carrier 6 through the second hinge seat group 8, and finally the flange carrier 6 is fixed to one side of the adjustment support 5. At this time, the flange carrier 6 forms a height difference with the circular carrier 3. And when the sample is placed on the flange carrier 6, the overall height of the sample relative to the flange carrier 6 is lower than the overall height of the sample placed on the circular carrier 3, so as to adapt to the placement of samples that exceed the standard height.
[0052] In summary, increasing the bearing area of the circular carrier 3 is conducive to bearing large-sized samples, and forming a height difference with the circular carrier 3 is conducive to bearing samples of excessive height, thereby increasing the general range of the carrier.
[0053] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.
Claims
1. A highly versatile SEM sample carrier, comprising a carrier body (1), characterized in that: The top surface of the platform (1) is provided with a support shaft (2), the top surface of the support shaft (2) is provided with a circular carrier (3), one side of the circular carrier (3) is provided with a cutting edge (4), the bottom surface of the cutting edge (4) is provided with an adjustment support (5), one side of the adjustment support (5) is provided with a flange carrier (6), and the adjustment support (5) is provided with a moving mechanism for driving the flange carrier (6) to adjust its position.
2. A highly versatile SEM sample carrier according to claim 1, characterized in that: The moving mechanism comprises a first articulated seat group (7) and a second articulated seat group (8); the first articulated seat group (7) is arranged on both sides of the adjusting support (5); the second articulated seat group (8) is arranged on both sides of the flange carrier (6); the first articulated seat group (7) and the second articulated seat group (8) are arranged opposite to each other; the second articulated seat group (8) is slidably arranged in the first articulated seat group (7); and the adjusting support (5) is provided with a fixing component for fixing the flange carrier (6).
3. A highly versatile SEM sample carrier according to claim 2, characterized in that: The fixing assembly comprises an insert rod (9), a first spring (11) is arranged on the side of the first articulated seat group (7) opposite to the second articulated seat group (8), one end of the first spring (11) is fixedly connected to the first articulated seat group (7), and the other end of the first spring (11) is fixedly connected to the second articulated seat group (8), the insert rod (9) is arranged on one side of the flange carrier (6), and the cutting edge (4) and the adjustment support (5) are respectively provided with fixing grooves (10) on the side corresponding to the position of the insert rod (9), and the insert rod (9) is plugged into the fixing groove (10).
4. The highly versatile SEM sample carrier according to claim 3, characterized in that: A lower support (12) is provided on the bottom surface of the adjustment support (5), and a slot (13) is provided on a side of the lower support (12) corresponding to the insertion rod (9), and the insertion rod (9) is plugged into the slot (13).
5. The highly versatile SEM sample carrier according to claim 1, characterized in that: The flange carrier (6) comprises an adjusting portion (14) and a connecting portion (15); the adjusting portion (14) is hingedly arranged on one side of the connecting portion (15); and the connecting portion (15) is provided with a positioning mechanism for adjusting and positioning the swing angle of the adjusting portion (14).
6. The highly versatile SEM sample carrier according to claim 5, characterized in that: The positioning mechanism comprises a first hinged rod (16) and a second hinged rod (17), one end of the first hinged rod (16) is hinged to the bottom surface of the adjusting portion (14), the other end of the first hinged rod (16) is hinged to one end of the second hinged rod (17), a positioning cylinder (18) is provided on the bottom surface of the connecting portion (15), the other end of the second hinged rod (17) is slidably connected to the positioning cylinder (18), and the connecting portion (15) is provided on a positioning component for positioning the second hinged rod (17).
7. The highly versatile SEM sample carrier according to claim 6, characterized in that: The positioning assembly comprises a blocking ball (19), a first air hole (20) is formed at one end of the positioning tube (18), a second air hole (21) is formed at the other end of the positioning tube (18), the blocking ball (19) is arranged in the positioning tube (18), the blocking ball (19) is sealed and connected to the second air hole (21), and the connecting part (15) is provided with a moving part for cooperating and driving the blocking ball (19) to move.
8. The highly versatile SEM sample carrier according to claim 7, characterized in that: The movable part is a second spring (22), a positioning seat (23) is provided on the bottom surface of the connecting part (15), a pull rod (24) is slidably provided in the positioning seat (23), one end of the pull rod (24) is plugged into the second air hole (21), one end of the pull rod (24) is connected to the blocking ball (19), the second spring (22) is sleeved on the pull rod (24), one end of the second spring (22) is fixedly connected to the positioning seat (23), and the other end of the second spring (22) is fixedly connected to the side wall of the pull rod (24).
9. The highly versatile SEM sample carrier according to claim 1, characterized in that: A conductive gasket (25) is provided between the circular carrier plate (3) and the platform (1).
10. The highly versatile SEM sample carrier according to claim 5, characterized in that: The surface of the adjusting portion (14) is provided with a lifting groove (26), a blocking piece (27) is slidably arranged in the lifting groove (26), and a screw rod (28) is rotatably arranged on the bottom surface of the adjusting portion (14), one end of the screw rod (28) extends into the lifting groove (26), and one end of the screw rod (28) is threadedly connected to the blocking piece (27).