A laboratory SEM manual shooting leveling mechanism

Abstract

The application discloses a laboratory SEM manual shooting leveling mechanism, which comprises a bottom plate, a carrier table, an adjusting cylinder and a supporting leg, one side of the top of the bottom plate is provided with the carrier table, the bottom plate on the side above the carrier table is provided with an SEM main body, both sides of the bottom of the carrier table are provided with the adjusting cylinder, the central positions in the adjusting cylinder are both provided with lead screws, the lead screws are both provided with lifting sleeves, the bottom ends of the lifting sleeves are both provided with two groups of supporting legs through supports, one side of the adjusting cylinder is provided with a handle, and one end of the handle close to the adjusting cylinder is provided with a driving gear. The application is provided with the carrier table, the adjusting cylinder, the supporting leg, the handle, the driving gear, a driven gear, the lead screw, the lifting sleeve and an inclination sensor, the operation process is more simple, the adjustment time is saved, the work efficiency is improved, and the handle is arranged on both sides, so that the staff can operate conveniently.

Description

Technical Field

[0001] This invention relates to the field of laboratory SEM leveling technology, specifically a laboratory SEM manual imaging leveling mechanism. Background Technology

[0002] Laboratory SEM, or scanning electron microscope, is a commonly used microscopic analysis instrument that uses various physical signals excited by a finely focused electron beam scanning the sample surface to modulate images.

[0003] In laboratory SEM work, the sample needs to be placed on the stage first. If the stage is not level, the electron beam may not be able to scan and capture images evenly on the sample surface, which may cause distortion, stretching and other distortions in the image. Therefore, a leveling device is needed to level the stage. Leveling usually requires turning the adjusting screws at the four support legs to raise or lower one side of the stage, while observing the position of the bubble in the level gauge to observe the levelness of the stage. Based on the observation results, continue to adjust the other adjusting screws until the stage is level. This operation is quite troublesome. Summary of the Invention

[0004] The purpose of this invention is to provide a manual SEM imaging and leveling mechanism for laboratory use, in order to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a manual SEM imaging and leveling mechanism for a laboratory, comprising a base plate, a stage, an adjusting cylinder, and support legs. A stage is provided on one side of the top of the base plate, and an SEM body is provided on the base plate above the stage. Adjusting cylinders are provided on both sides of the bottom of the stage, and a lead screw is provided at the center of each adjusting cylinder. A lifting sleeve is fitted onto each lead screw, and two sets of support legs are provided at the bottom of each lifting sleeve via a bracket. A handle is provided on one side of each adjusting cylinder, and a drive gear is provided at the end of each handle near the adjusting cylinder. A driven gear meshing with the drive gear is provided at the top of each lead screw. A tilt sensor is provided on one side of the stage.

[0006] The top of the platform is provided with a placement plate, and one side of the placement plate is provided with a handle; both sides of the top of the platform are provided with sliding grooves, and both sides of the bottom of the placement plate are provided with slide rails that match the sliding grooves.

[0007] Preferably, guide grooves are provided on both sides of the inside of the adjusting cylinder, and guide blocks are provided on both sides of the lifting sleeve.

[0008] Preferably, all the legs are trapezoidal in shape, and the bottom of each leg is provided with an anti-slip silicone pad.

[0009] Preferably, each end of the bottom of the bracket is provided with a mounting part, and the top of each leg is connected to the mounting part via a mounting block.

[0010] Preferably, screws pass through both sides of the mounting part, and a locking block is provided at one end of each screw. The mounting block has a locking groove on both sides that matches the locking block.

[0011] Preferably, storage slots are provided on both sides inside the mounting part, and the storage slots are located on the same horizontal line as the card block.

[0012] Compared with existing technologies, the advantages of this invention are as follows: This laboratory SEM manual imaging leveling mechanism is equipped with a stage, adjusting cylinder, support legs, handle, driving gear, driven gear, lead screw, lifting sleeve, and tilt sensor. By rotating the handle, the driving gear can be rotated, causing the driven gear and lead screw to rotate, thereby driving the lifting sleeve to rise or fall along the lead screw, which in turn drives the two sets of support legs to adjust the height. Only one set of handles needs to be rotated to raise or lower one side of the stage, making the operation simpler, saving adjustment time, and improving work efficiency. The handles are located on both sides for easy operation by the staff. At the same time, a tilt sensor is installed on the stage. During the leveling process, the tilt sensor can monitor the tilt angle of the stage in real time and display the current status on the display screen or other indicators for easy viewing by the staff. Attached Figure Description

[0013] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a front view structural diagram of the present invention.

[0015] Figure 2 This is a schematic cross-sectional view of the regulating cylinder structure of the present invention.

[0016] Figure 3 This is a cross-sectional structural diagram of the mounting part of the present invention.

[0017] Figure 4 This is a top view of the regulating cylinder structure of the present invention.

[0018] Figure 5 This is a top view of the stage structure of the present invention.

[0019] In the diagram: 1. Base plate; 2. SEM body; 3. Stage; 4. Placement plate; 5. Tilt sensor; 6. Adjustment cylinder; 7. Support leg; 8. Drive gear; 9. Driven gear; 10. Lead screw; 11. Lifting sleeve; 12. Mounting part; 13. Handle; 14. Screw; 15. Slot; 16. Locking block; 17. Storage slot; 18. Mounting block; 19. Bracket; 20. Slide. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0021] Please see Figure 1-5 An embodiment of the present invention provides a laboratory SEM manual imaging and leveling mechanism, comprising a base plate 1, a stage 3, an adjusting cylinder 6, and support legs 7. The stage 3 is provided on one side of the top of the base plate 1, and the SEM body 2 is provided on the base plate 1 on the side above the stage 3. Adjusting cylinders 6 are provided on both sides of the bottom of the stage 3, and a lead screw 10 is provided at the center of the inside of each adjusting cylinder 6. A lifting sleeve 11 is sleeved on each lead screw 10, and two sets of support legs 7 are provided at the bottom end of each lifting sleeve 11 through a bracket 19.

[0022] Each side of the adjusting cylinder 6 is provided with a handle 13, and the end of the handle 13 near the adjusting cylinder 6 is provided with a drive gear 8. The top of the lead screw 10 is provided with a driven gear 9 that meshes with the drive gear 8. First, the platform 3 is leveled. When leveled, the drive gear 8 can be rotated by turning the handle 13, which will cause the driven gear 9 and the lead screw 10 to rotate, thereby driving the lifting sleeve 11 to rise or fall along the lead screw 10, and thus driving the two sets of support legs 7 to adjust the height.

[0023] The platform 3 can be raised or lowered on one side by simply rotating a set of handles 13, making the operation process simpler, saving adjustment time and improving work efficiency. The handles 13 are located on both sides for easy operation by staff.

[0024] Guide grooves are provided on both sides inside the adjusting cylinder 6, and guide blocks are provided on both sides of the lifting sleeve 11 to guide and limit the lifting sleeve 11 when it rises or falls. An inclination sensor 5 is provided on one side of the platform 3. During the leveling process, the inclination sensor 5 can monitor the tilt angle of the platform 3 in real time and display the current status through the display screen or other indicators for easy viewing by the staff.

[0025] The stage 3 has a placement plate 4 on its top, and a handle on one side of the placement plate 4. The top of the stage 3 has grooves 20 on both sides, and the bottom of the placement plate 4 has slide rails that match the grooves 20 on both sides. After leveling the stage 3, the placement plate 4 is pulled out. The sample is placed on the placement plate 4 and then pushed back under the SEM body 2 for scanning. By leveling, the electron beam of the SEM body 2 can be scanned evenly on the sample surface, thereby avoiding distortion and improving the accuracy of the image.

[0026] All legs 7 are trapezoidal in shape, and the bottom of each leg 7 is equipped with an anti-slip silicone pad to increase the stability of the platform 3. Mounting portions 12 are provided at both ends of the bottom of the bracket 19, and the tops of each leg 7 are connected to the mounting portions 12 via mounting blocks 18. Screws 14 pass through both sides of the mounting portions 12, and each screw 14 has a locking block 16 at one end. The mounting blocks 18 have matching slots 15 on both sides. Storage slots 17 are provided on both sides inside the mounting portions 12, and these storage slots 17 are on the same horizontal line as the locking blocks 16.

[0027] During use, the support legs 7 of the stage 3 will bear a certain weight and stress. Over time, the support legs 7 may become uneven due to wear or aging, which will affect the levelness of the stage 3. At this time, the screws 14 on both sides of the mounting part 12 can be rotated to separate the locking block 16 from the locking slot 15 and retract it into the storage slot 17. Then the support legs 7 can be separated from the mounting part 12, which is convenient for replacing the support legs 7. The specific model and specifications of the tilt sensor 5 need to be determined by selection calculation based on the specifications and parameters of the device. The selection calculation method is existing technology, so it will not be described in detail.

[0028] Working principle: First, the platform 3 is leveled. When leveled, rotating the handle 13 will drive the drive gear 8 to rotate, which in turn drives the driven gear 9 and the lead screw 10 to rotate. This drives the lifting sleeve 11 to rise or fall along the lead screw 10, thereby adjusting the height of the two sets of support legs 7. Only one set of handles 13 needs to be rotated to raise or lower one side of the platform 3, making the operation simpler, saving adjustment time and improving work efficiency.

[0029] Handles 13 are located on both sides for easy operation by staff. Tilt sensors 5 are installed on the stage 3. During leveling, tilt sensors 5 can monitor the tilt angle of the stage 3 in real time and display the current status on a display screen or other indicator for easy viewing by staff. After leveling the stage 3, the placement plate 4 is pulled out, the sample is placed on the placement plate 4, and then pushed back under the SEM body 2 for scanning. Through the leveling operation, the electron beam of the SEM body 2 can be uniformly scanned on the sample surface, thereby avoiding distortion and improving the accuracy of the image.

[0030] In addition, during use, the legs 7 of the stage 3 will bear a certain weight and stress. Over time, the surface of the legs 7 may become uneven due to wear or aging, which will affect the levelness of the stage 3. At this time, the screws 14 on both sides of the mounting part 12 can be rotated to separate the locking block 16 from the locking groove 15 and retract it into the storage groove 17. Then the legs 7 can be separated from the mounting part 12, which is convenient for replacing the legs 7.

Claims

1. A laboratory SEM manual shot levelling mechanism, characterised in that, The application relates to a SEM (scanning electron microscope) adjusting device which comprises a bottom plate (1), a carrier table (3), adjusting cylinders (6) and supporting legs (7), one side of the top of the bottom plate (1) is provided with the carrier table (3), a SEM main body (2) is arranged on one side of the top of the bottom plate (1) above the carrier table (3), adjusting cylinders (6) are arranged on the two sides of the bottom of the carrier table (3), a screw rod (10) is arranged at the central position in the adjusting cylinder (6), a lifting sleeve (11) is sleeved on the screw rod (10), two groups of supporting legs (7) are arranged at the bottom end of the lifting sleeve (11) through supports (19), a handle (13) is arranged on one side of the adjusting cylinder (6), a driving gear (8) is arranged at the end of the handle (13) close to the adjusting cylinder (6), a driven gear (9) meshing with the driving gear (8) is arranged at the top of the screw rod (10), an inclination sensor (5) is arranged on one side of the carrier table (3), a placing plate (4) is arranged on the top of the carrier table (3), a handle is arranged on one side of the placing plate (4), sliding grooves (20) are formed in the two sides of the top of the carrier table (3), sliding rails matched with the sliding grooves (20) are arranged on the two sides of the bottom of the placing plate (4), mounting portions (12) are arranged at the two ends of the bottom of the support (19), the top of the supporting leg (7) is connected with the mounting portion (12) through a mounting block (18), screw rods (14) pass through the two sides of the mounting portion (12), clamping blocks (16) are arranged at the ends of the screw rods (14), clamping grooves (15) matched with the clamping blocks (16) are formed in the two sides of the mounting block (18), receiving grooves (17) are arranged on the two sides in the mounting portion (12), and the receiving grooves (17) are located on the same horizontal line with the clamping blocks (16).

2. A laboratory SEM manual shot levelling mechanism according to claim 1, wherein: The two sides in the adjusting cylinder (6) are provided with guiding grooves, and the two sides of the lifting sleeve (11) are provided with guiding blocks.

3. A laboratory SEM manual shot levelling mechanism according to claim 1, wherein: The supporting legs (7) are all of trapezoidal structures, and anti-skid silica gel pads are arranged at the bottom ends of the supporting legs (7).

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