Optical element surface particle detection and cleaning device

Abstract

The present invention provides a device for detecting and cleaning particles on the surface of an optical element, comprising a low-vacuum laminar flow environment module, a particle detection module, a particle cleaning module, and a displacement stage module, wherein the low-vacuum laminar flow environment module comprises a working chamber and a laminar low-vacuum control unit; the particle detection module comprises a first condenser, a second condenser, a laser emission assembly, and a laser feedback detection assembly, wherein the first condenser, the second condenser, and the laser feedback detection assembly are respectively disposed in the working chamber; the particle cleaning module comprises a pulsed laser emission assembly, a beam expander, and a converging lens, wherein the beam expander and the converging lens are respectively disposed in the working chamber; and the displacement stage module is disposed in the working chamber, wherein the displacement stage module is used to carry an optical element and move it within the working chamber to detect and clean particles on the optical element. The present invention can realize in-situ detection and cleaning of optical elements within semiconductor equipment, and can avoid the problem of re-contamination after cleaning.

Description

Technical Field

[0001] The present invention relates to the technical field of integrated circuit manufacturing and semiconductor equipment, and in particular to a device for detecting and cleaning particles on the surface of an optical element. Background Art

[0002] With the advancement of semiconductor manufacturing technology, the measurement accuracy of semiconductor equipment such as mask inspection, optical component inspection, and chip manufacturing needs to reach the nanometer level. The working environment within the equipment also needs to be ultra-clean, and some equipment requires a vacuum state. Because particles inevitably accumulate during the transportation of samples such as masks and optical components to be processed, particle detection and removal of particles on the sample surface are required before processes such as exposure to ensure processing accuracy and manufacturing yield.

[0003] In the prior art, patent publication number US20110083696A1 places the entire laser system outside the chamber, resulting in a longer focal length for the focusing lens. This hinders reducing the waist radius, achieving a very small spot size at the focal point, and thus achieving high power density. It also hinders gas ionization and plasma generation, which in turn generates shock waves. Furthermore, the separation of detection and cleaning increases the risk of contamination. Patent publication number US6249932B1 requires the sample to be placed in a dedicated device for cleaning.

[0004] It can be seen from this that the laser shock wave cleaning and other technologies currently used for particle removal can effectively remove particles of 10 to 40 nm without damaging the sample. However, there is still the problem of not being able to detect particles in situ and easily re-contaminating the sample or contaminating the main chamber of the semiconductor equipment after cleaning. Summary of the Invention

[0005] The purpose of the present invention is to provide an optical element surface particle detection and cleaning device that can solve the problem that the existing optical element surface particle cleaning technology cannot detect particles in situ and is prone to re-contamination after cleaning.

[0006] The present invention provides a device for detecting and cleaning particles on the surface of an optical element, comprising:

[0007] A low vacuum laminar flow environment module, comprising a working chamber and a laminar flow low vacuum control unit, wherein the laminar flow low vacuum control unit is used to form a laminar flow low vacuum environment with stable pressure in the chamber;

[0008] A particle detection module includes a first condenser, a second condenser, a laser emission assembly, and a laser feedback detection assembly. The first condenser, the second condenser, and the laser feedback detection assembly are respectively disposed in the working chamber. The first condenser has a first convergence point, the second condenser has a second convergence point, and the first and second condensers have a third convergence point that overlaps. The laser emission assembly is configured to emit laser light toward the first convergence point. When particulate matter is present on the optical element at the first convergence point, a scattered light beam is generated. The scattered light beam can sequentially pass through the third convergence point and the second convergence point. The laser feedback detection assembly can collect scattered light signals.

[0009] A particle cleaning module includes a pulsed laser emission component, a beam expander, and a converging lens. The beam expander and the converging lens are respectively disposed in the working chamber. The pulsed laser emission component is used to emit a pulsed laser toward the beam expander. The pulsed laser passes through the beam expander and the converging lens in sequence, generating a shock wave at the focus of the converging lens to remove particles on the optical element.

[0010] The translation stage module is arranged in the working chamber, and is used for carrying the optical element to move in the working chamber to realize the detection and cleaning of particles on the optical element.

[0011] According to an optical element surface particle detection and cleaning device provided by the present invention, the laminar low vacuum control unit includes a gas input control unit and a gas output control unit respectively arranged at the left and right ends of the working chamber, the gas input control unit includes an air inlet pipeline and a gas distributor, the gas distributor is arranged at a position close to the left side wall in the working chamber, one end of the air inlet pipeline passes through the left side wall of the working chamber and is connected to the gas distributor; the gas output control unit includes an air outlet arranged on the right side wall of the working chamber and a vacuum pump connected to the air outlet.

[0012] According to an optical element surface particle detection and cleaning device provided by the present invention, an air intake stop valve, a mass flow controller and an injection valve are respectively provided on the air intake pipeline; and a pumping speed regulating valve is also provided at the air outlet.

[0013] According to an optical element surface particle detection and cleaning device provided by the present invention, the laser emitting assembly includes a laser and a first reflector, the laser is arranged outside the working chamber, and the first reflector is arranged inside the working chamber. The laser emitted by the laser is reflected by the first reflector and hits the first convergence point.

[0014] According to the optical element surface particle detection and cleaning device provided by the present invention, a first window is further provided in the optical path between the laser and the first reflector, and the first window is installed on the side wall of the working chamber.

[0015] According to an optical element surface particle detection and cleaning device provided by the present invention, the laser feedback detection component includes a second reflector and a photodetector, the second reflector is arranged at the second convergence point, and the scattered light beam directed to the second convergence point is reflected by the second reflector and enters the photodetector.

[0016] According to an optical element surface particle detection and cleaning device provided by the present invention, the pulse laser emission component includes a pulse laser and a third reflector, the pulse laser is arranged outside the working chamber, and the third reflector is arranged inside the working chamber. The laser pulse emitted by the pulse laser is reflected by the third reflector and then emitted into the beam expander.

[0017] According to the optical element surface particle detection and cleaning device provided by the present invention, a second window is further provided in the optical path between the pulse laser and the third reflector, and the second window is installed on the side wall of the working chamber.

[0018] According to an optical element surface particle detection and cleaning device provided by the present invention, the translation stage module includes a multi-axis translation stage and a clamping tool chuck. The clamping tool chuck is arranged on the multi-axis translation stage, and the clamping tool chuck is used to clamp the optical element.

[0019] According to the present invention, an optical element surface particle detection and cleaning device also includes a main control module, which is electrically connected to the laminar low vacuum control unit, the laser emission component, the laser feedback detection component, the pulsed laser emission component and the translation stage module respectively.

[0020] The optical element surface particle detection and cleaning device provided by the present invention has a low vacuum laminar flow environment module in which a laminar flow low vacuum environment with stable pressure is formed in the working chamber through a laminar flow low vacuum control unit; in the particle detection module, a laser can be emitted to a first convergence point through a laser emission component. When particulate matter exists on the optical element at the first convergence point, a scattered light beam is generated. The scattered light beam can pass through a third convergence point and a second convergence point in sequence, and the scattered light signal can be collected through a laser feedback detection component; in the particle cleaning module, a pulsed laser can be emitted to a beam expander through a pulsed laser emission component. The pulsed laser passes through the beam expander and the converging lens in sequence, and a shock wave is generated at the focus of the converging lens to clear the particulate matter on the optical element; the optical element can be carried to move in the working chamber through the translation stage module to realize the detection and cleaning of particulate matter on the optical element. Therefore, the optical element surface particle detection and cleaning device provided by the present invention can be used as a subsystem or module of semiconductor equipment to realize in-situ detection and cleaning of optical elements inside the semiconductor equipment. Since the air pressure inside the working chamber is slightly lower than the ambient air pressure of the main chamber of the semiconductor equipment, air pressure suppression can be formed between the working chamber and the main chamber of the semiconductor equipment, which is beneficial to suppress the escape of particles inside the working chamber to the main chamber of the semiconductor equipment, thereby avoiding the problem of re-contamination of the sample after cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 Schematic diagram of the structure of the optical element surface particle detection and cleaning device of the present invention;

[0023] Figure 2 Schematic diagram of the structure of the particle detection module in the optical element surface particle detection and cleaning device of the present invention;

[0024] Figure 3 Schematic diagram of the structure of the particle cleaning module in the optical element surface particle detection and cleaning device of the present invention;

[0025] Figure 4 Schematic diagram of the structure of the low vacuum laminar flow environment module in the optical element surface particle detection and cleaning device of the present invention;

[0026] Figure 5 Schematic diagram of the structure of the translation stage module in the optical element surface particle detection and cleaning device of the present invention.

[0027] Description of reference numerals:

[0028] 100, particle detection module, 101, laser, 102, first window, 103, first reflector, 104, first condenser, 105, second condenser, 106, second reflector, 107, photodetector;

[0029] 200, particle cleaning module, 201, pulse laser, 202, second window, 203, third reflector, 204, beam expander, 205, converging lens;

[0030] 300, low vacuum laminar flow environment module, 301, air inlet pipe, 302, air inlet stop valve, 303, mass flow controller, 304, injection valve, 305, gas distributor, 306, thin film gauge, 307, working chamber, 308, pumping speed regulating valve, 309, vacuum pump;

[0031] 400, translation stage module, 401, optical element, 402, clamping tool chuck, 403, multi-axis translation stage;

[0032] 500. Main control module. DETAILED DESCRIPTION

[0033] The following will clearly and completely describe the technical solutions of the present invention in conjunction with the embodiments. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like to indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore should not be understood as limiting the present invention.

[0035] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the said features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined. In addition, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a communication between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0036] like Figures 1 to 5 As shown, the optical element surface particle detection and cleaning device according to an embodiment of the present invention includes a particle detection module 100 , a particle cleaning module 200 , a low vacuum laminar flow environment module 300 and a translation stage module 400 .

[0037] The low vacuum laminar flow environment module 300 includes a working chamber 307 and a laminar flow low vacuum control unit. The laminar flow low vacuum control unit is used to form a laminar flow low vacuum environment with stable pressure in the working chamber 307 .

[0038] The particle detection module 100 includes a first condenser lens 104, a second condenser lens 105, a laser emission assembly, and a laser feedback detection assembly. The first condenser lens 104, the second condenser lens 105, and the laser feedback detection assembly are each disposed within the working chamber 307. The first condenser lens 104 has a first convergence point, the second condenser lens 105 has a second convergence point, and the first condenser lens 104 and the second condenser lens 105 have a third convergence point that overlaps. In other words, the first condenser lens 104 and the second condenser lens 105 are both dual-convergence point condensers, with the first and third convergence points being the two convergence points of the first condenser lens 104, and the second and third convergence points being the two convergence points of the second condenser lens 105. This means that the convergence points of the two condensers overlap at the third convergence point. The laser emitting component is used to emit laser to the first convergence point. When there are particles on the optical element 401 at the first convergence point, a scattered light beam will be generated. The scattered light beam can pass through the third convergence point and the second convergence point in sequence. The laser feedback detection component can collect the scattered light signal.

[0039] Among them, the particle cleaning module 200 includes a pulse laser emission component, a beam expander 204 and a converging lens 205. The beam expander 204 and the converging lens 205 are respectively arranged in the working chamber 307. The pulse laser emission component is used to emit pulse laser to the beam expander 204. The pulse laser passes through the beam expander 204 and the converging lens 205 in turn, and generates a shock wave at the focus of the converging lens 205, which is used to remove particulate matter on the optical element 401.

[0040] The translation stage module 400 is disposed in the working chamber 307 , and is used to carry the optical element 401 to move within the working chamber, so as to detect and clean particles on the optical element 401 .

[0041] Therefore, the optical element surface particle detection and cleaning device of the embodiment of the present invention can be used as a subsystem or module of semiconductor equipment to realize in-situ detection and cleaning of optical elements inside the semiconductor equipment. Since the air pressure inside the working chamber is slightly lower than the ambient air pressure of the main chamber of the semiconductor equipment, air pressure suppression can be formed between the working chamber and the main chamber of the semiconductor equipment, which is beneficial to suppress the escape of particles inside the working chamber to the main chamber of the semiconductor equipment, thereby avoiding the problem of re-contamination of the sample after cleaning.

[0042] In some embodiments of the present invention, the optical element surface particle detection and cleaning device further includes a main control module 500, which is electrically connected to the laminar low vacuum control unit, the laser emission component, the laser feedback detection component, the pulsed laser emission component, and the translation stage module. Figure 1 The dashed lines in the figure represent signal and control lines.

[0043] During operation, the main control module 500 controls the translation stage module 400 to receive the optical element 401 at the sample entrance area of ​​the working chamber 307 and transport the optical element 401 to the particle detection area for laser beam scanning. When particles are detected, their coordinates are recorded. After the surface scan of the optical element 401 is complete, the main control module 500 controls the translation stage module 400 to move to the particle cleaning area. Based on factors such as the particle coordinates and particle size, the main control module 500 uses the translation stage module 400 to sequentially transport the particles to the vicinity of the laser focus point of the particle cleaning module 200. The particle cleaning module 200 then performs pulsed emission to clean the particles from the surface of the optical element 401. After all particles on the surface of the optical element 401 are cleaned, the main control module 500 controls the translation stage module 400 to carry the optical element 401 back to the particle detection area and perform particle scanning again. If no residual particles are found, the main control module 500 controls the translation stage module 400 to send the optical element 401 back to the sample inlet area of ​​the device working chamber 307.

[0044] In some embodiments of the present invention, the laminar low vacuum control unit includes a gas input control unit and a gas output control unit respectively arranged at the left and right ends of the working chamber 307. The gas input control unit includes an air inlet pipeline 301 and a gas distributor 305. The gas distributor 305 is arranged at a position close to the left side wall of the working chamber 307. One end of the air inlet pipeline 301 passes through the left side wall of the working chamber 307 and is connected to the gas distributor 305.

[0045] The air intake pipe 301 is provided with an air intake stop valve 302 , a mass flow controller 303 and an injection valve 304 , and the main control module 500 is electrically connected to the air intake stop valve 302 , the mass flow controller 303 and the injection valve 304 .

[0046] The gas output control unit includes a gas outlet located on the right side wall of the working chamber 307 and a vacuum pump 309 connected to the gas outlet. A pumping speed regulating valve 308 is also provided at the gas outlet. The main control module 500 is electrically connected to the vacuum pump 309 and the pumping speed regulating valve 308.

[0047] The inlet line 301 is used to introduce a gas that is easily ionized and generates shock waves into the working chamber 307. This gas forms a laminar flow within the working chamber 307, allowing detached particles to flow in a directional manner and exit the chamber through the outlet, thereby preventing the particles from re-contaminating the sample or the main chamber of the semiconductor equipment. A thin film gauge 306 is also installed on the working chamber 307 to detect the vacuum level within the working chamber 307. The thin film gauge 306 is electrically connected to the main control module 500 and transmits the vacuum level data detected by the thin film gauge 306 to the main control module 500 as a feedback signal.

[0048] In some embodiments of the present invention, the laser emission assembly includes a laser 101 and a first reflector 103. The laser 101 is disposed outside the working chamber 307, and the first reflector 103 is disposed inside the working chamber 307. The laser light emitted by the laser 101 is reflected by the first reflector 103 and then strikes a first convergence point. The laser 101 is electrically connected to the main control module 500, and the main control module 500 can control the operating state of the laser 101.

[0049] A first window 102 is further provided on the optical path between the laser 101 and the first reflector 103 . The first window 102 is installed on the side wall of the working chamber 307 .

[0050] A through hole is provided on the first condensing mirror 104 for the laser beam to pass through.

[0051] The laser feedback detection assembly includes a second reflector 106 and a photodetector 107. The second reflector 106 is positioned at the second convergence point. The scattered light beam directed toward the second convergence point is reflected by the second reflector 106 and then enters the photodetector 107. The photodetector 107 is electrically connected to the main control module 500. The photodetector 107 feeds back the collected light signal to the main control module 500. Based on the feedback signal, the main control module 500 can determine and record the coordinate position of the particle on the surface of the optical element 401.

[0052] Among them, the second reflector 106 can realize rapid rotation at the second convergence point. Through the rapid rotation of the second reflector 106, the light beams reflected from different angles to the second convergence point can be reflected by the second reflector 106 into the photodetector 107 for collection, thereby ensuring the accuracy of particle detection.

[0053] The particle detection module 100 of this embodiment projects a laser beam onto the surface of the optical element 401. When particles are present on the surface of the optical element 401, the particles scatter the laser beam, which is then reflected by two condensing mirrors and collected by the photodetector 107. If the laser beam strikes the surface of the optical element 401 without particles present, the reflected light is not collected by the photodetector 107.

[0054] That is, the optical element 401 is moved to the first convergence point, the laser light emitted by the laser 101 is reflected by the first reflector 103, enters the first condenser 104 through the through hole on the first condenser 104 and hits the first convergence point of the first condenser 104. When there are particles on the surface of the optical element 401 at the first convergence point, the light beam will be scattered. The scattered light beam will be reflected by the first condenser 104 and will be emitted to the third convergence point. After passing through the third convergence point, the light beam will be reflected by the second condenser 105 and will be emitted to the second convergence point. After being reflected by the second reflector 106, it enters the photodetector 107, and the scattered light signal is collected by the photodetector 107.

[0055] In some embodiments of the present invention, the pulsed laser emission assembly includes a pulsed laser 201 and a third reflector 203. The pulsed laser 201 is disposed outside the working chamber 307, and the third reflector 203 is disposed within the working chamber 307. The laser pulses emitted by the pulsed laser 201 are reflected by the third reflector 203 and then emitted into the beam expander 204. The pulsed laser 201 is electrically connected to the main control module 500, and the main control module 500 can control the operating state of the pulsed laser 201.

[0056] A second window 202 is further provided on the optical path between the pulse laser 201 and the third reflector 203 . The second window 202 is installed on the side wall of the working chamber 307 .

[0057] The optical element 401 is moved to the converging lens 205 so that the particle on the optical element 401 is located near the focal point of the converging lens 205. The pulsed laser light emitted by the pulsed laser 201 is reflected by the third reflector 203 and then enters the beam expander 204. After passing through the beam expander 204, the pulsed laser light is incident on the converging lens 205, thereby emitting pulses through the converging lens 205. The converging lens 205 focuses the pulsed laser beam above or diagonally above the particles on the surface of the optical element 401, ionizing the gas in a low vacuum environment under a specific atmosphere and pressure. The ionized gas generates plasma and shock waves, which exert pressure, thrust, or rolling force on the particles, driving them off the surface of the optical element 401.

[0058] In some embodiments of the present invention, the translation stage module 400 includes a multi-axis translation stage 403 and a clamping tool chuck 402 . The clamping tool chuck 402 is disposed on the multi-axis translation stage 403 and is used to clamp the optical element 401 .

[0059] The multi-axis translation stage 403 utilizes a conventional structure and can achieve movement in the X, Y, and Z directions, as well as in the Rx, Ry, and Rz rotational directions. The movement of the multi-axis translation stage 403 enables the detection laser to scan the entire surface of the optical element 401. The multi-axis translation stage 403 is electrically connected to the main control module 500, and the main control module 500 can control the movement of the multi-axis translation stage 403.

[0060] Among them, the main control module 500 can record the particle position coordinate information based on the detection results of the particle detection module 100, and use this particle position coordinate information to accurately control the operation of the multi-axis translation stage 403 when performing particle cleaning, and accurately send the particles to the focus of the converging lens 205 of the particle cleaning module 200 for cleaning.

[0061] The tool chuck 402 is a conventional structure for clamping and fixing the optical element 401 on the multi-axis translation stage 403. The tool chuck 402 is electrically connected to the main control module 500, which controls the clamping state of the tool chuck 402 and the optical element 401.

[0062] Among them, the optical element 401 that can be carried by the translation stage module 400 is not limited to a plane optical element, but can also be an optical element with a curvature surface. The translation stage module 400 can send each point of the curvature surface to the first convergence point of the above-mentioned particle detection module 100 to complete the scanning of the entire curvature surface. It can also send particles at any displacement point on the curvature surface to the focus of the converging lens 205 of the particle cleaning module 200 to complete particle cleaning.

[0063] The working principle of the optical element surface particle detection and cleaning device according to the embodiment of the present invention is as follows:

[0064] Under the control of the main control module 500 , the mass flow controller 303 , the pumping speed regulating valve 308 and the vacuum pump 309 of the low vacuum environment module 300 work together to obtain a laminar low vacuum environment with stable pressure in the working chamber 307 of the low vacuum environment module 300 .

[0065] The translation stage module 400 receives the optical element 401 in the sample entrance area through the clamping tool chuck 402, and sends each point on the surface of the optical element 401 to the detection point (the first convergence point) of the particle detection module 100 by controlling the movement of the multi-axis translation stage 403. After receiving the signal from the photoelectric detector 107 of the particle detection module 100, the main control module 500 identifies and records information such as the particle size and particle position coordinates.

[0066] After completing the particle scanning detection of the element surface 401, the main control module 500 drives the translation stage module 400 to send the optical element 401 to the particle cleaning module 200 area. According to the recorded particle position coordinate information, the main control module 500 controls the movement of the translation stage module 400 to send the particles of the optical element 401 to the core cleaning area of ​​the particle cleaning module 200 (the area near the focus of the converging lens 205). The main control module 500 integrates the particle size information and empirical data to accurately adjust the relative position relationship between the particles and the focusing point, and then controls the particle cleaning module 200 to emit pulses to effectively remove the particles.

[0067] After all particles are removed, the main control module 500 controls the translation stage module 400 to return to the particle detection area again, controls the particle detection module 100 to detect the surface of the optical element 401 again, and after confirming that there are no residual particles, sends the optical element 401 to the sample inlet area of ​​the device to complete the particle detection and cleaning process of this optical element 401.

[0068] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An optical element surface particle detection and cleaning device, characterized in that: include: A low vacuum laminar flow environment module, comprising a working chamber and a laminar flow low vacuum control unit, wherein the laminar flow low vacuum control unit is used to form a laminar flow low vacuum environment with stable pressure in the working chamber; A particle detection module includes a first condenser, a second condenser, a laser emission assembly, and a laser feedback detection assembly. The first condenser, the second condenser, and the laser feedback detection assembly are respectively disposed in the working chamber. The first condenser has a first convergence point, the second condenser has a second convergence point, and the first and second condensers have a third convergence point that overlaps. The laser emission assembly is configured to emit laser light toward the first convergence point. When particulate matter is present on the optical element at the first convergence point, a scattered light beam is generated. The scattered light beam can sequentially pass through the third convergence point and the second convergence point. The laser feedback detection assembly can collect scattered light signals. A particle cleaning module includes a pulsed laser emission component, a beam expander, and a converging lens. The beam expander and the converging lens are respectively disposed in the working chamber. The pulsed laser emission component is used to emit a pulsed laser toward the beam expander. The pulsed laser passes through the beam expander and the converging lens in sequence, generating a shock wave at the focus of the converging lens to remove particles on the optical element. The translation stage module is arranged in the working chamber, and is used for carrying the optical element to move in the working chamber to realize the detection and cleaning of particles on the optical element.

2. The optical element surface particle detection and cleaning device according to claim 1, characterized in that: The laminar low vacuum control unit includes a gas input control unit and a gas output control unit respectively arranged at the left and right ends of the working chamber. The gas input control unit includes an air inlet pipeline and a gas distributor. The gas distributor is arranged at a position close to the left side wall of the working chamber, and one end of the air inlet pipeline passes through the left side wall of the working chamber and is connected to the gas distributor; the gas output control unit includes an air outlet arranged on the right side wall of the working chamber and a vacuum pump connected to the air outlet.

3. The optical element surface particle detection and cleaning device according to claim 2, characterized in that: An air intake stop valve, a mass flow controller and an injection valve are respectively provided on the air intake pipeline; and a pumping speed regulating valve is also provided at the air outlet.

4. The optical element surface particle detection and cleaning device according to claim 1, characterized in that: The laser emitting assembly includes a laser and a first reflector. The laser is arranged outside the working chamber, and the first reflector is arranged inside the working chamber. The laser emitted by the laser is reflected by the first reflector and hits the first convergence point.

5. The optical element surface particle detection and cleaning device according to claim 4, characterized in that: A first window is further provided on the optical path between the laser and the first reflector, and the first window is installed on the side wall of the working chamber.

6. The optical element surface particle detection and cleaning device according to claim 1, characterized in that: The laser feedback detection component includes a second reflector and a photoelectric detector. The second reflector is arranged at the second convergence point. The scattered light beam directed to the second convergence point enters the photoelectric detector after being reflected by the second reflector.

7. The optical element surface particle detection and cleaning device according to claim 1, characterized in that: The pulse laser emission component includes a pulse laser and a third reflector. The pulse laser is arranged outside the working chamber, and the third reflector is arranged inside the working chamber. The laser pulse emitted by the pulse laser is reflected by the third reflector and then emitted into the beam expander.

8. The optical element surface particle detection and cleaning device according to claim 7, characterized in that: A second window is further provided on the optical path between the pulse laser and the third reflector, and the second window is mounted on the side wall of the working chamber.

9. The optical element surface particle detection and cleaning device according to claim 1, characterized in that: The translation stage module includes a multi-axis translation stage and a clamping tool chuck. The clamping tool chuck is arranged on the multi-axis translation stage, and the clamping tool chuck is used to clamp the optical element.

10. The optical element surface particle detection and cleaning device according to claim 1, characterized in that: It also includes a main control module, which is electrically connected to the laminar low vacuum control unit, the laser emission component, the laser feedback detection component, the pulse laser emission component and the translation stage module.

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