Wafer box carrying platform system capable of automatically adjusting position of wafer box

Abstract

The invention discloses a wafer box carrying table system capable of automatically adjusting the position of a wafer box, and relates to the technical field of wafer processing, the wafer box carrying table system comprises a carrying table, and the wafer box is placed on the top of the carrying table; the side wall of the wafer box is detachably fixed to the top of the objective table through extrusion contact with the matching assembly and the pushing assembly. The top of the objective table is fixedly connected with a position detection sensor, the clamping plate is driven to move through the matching assembly and an air cylinder in the pushing assembly, accurate clamping and positioning of the wafer box are achieved, the positioning accuracy is improved, errors of manual operation are reduced, and the time cost is reduced. The use of the position detection sensor further ensures the accuracy of the position of the wafer box, and provides a reliable basis for subsequent wafer processing.

Description

Technical Field

[0001] The invention relates to the technical field of wafer processing, and in particular to a wafer box carrier system for automatically adjusting the position of a wafer box. Background Art

[0002] During the process of assembling the cassette carrier or replacing cassettes from different suppliers, the positioning blocks need to be adjusted repeatedly, which is very inefficient. Summary of the invention

[0003] Therefore, in order to solve the above-mentioned shortcomings, the present invention provides a wafer cassette stage system for automatically adjusting the position of a wafer cassette.

[0004] The present invention is implemented in this way: a wafer box carrier system for automatically adjusting the position of a wafer box is constructed, the device includes a carrier, a wafer box is placed on the top of the carrier; the side wall of the wafer box is detachably fixed to the top of the carrier through extrusion contact with a matching component and a pushing component; a position detection sensor is fixedly connected to the top of the carrier.

[0005] Preferably, the matching components include a slide groove, a cylinder, and a clamping plate; the slide groove is embedded in the top of the loading platform, the cylinder is bolted in the slide groove, and the moving end of the cylinder is fixedly connected to the side wall of the clamping plate.

[0006] Preferably, a left receiving plate and a right receiving plate are fixedly connected to the left and right positions of the front end of the top of the loading platform respectively; a matching magnet is provided on the left receiving plate and the right receiving plate;

[0007] The side wall of the wafer box is in compression contact with the left receiving plate and the right receiving plate.

[0008] Preferably, the pushing assembly includes a cylinder, a clamping plate and a groove; the groove is embedded in the rear end of the top of the loading platform; and the cylinder and the clamping plate are arranged in the groove.

[0009] Preferably, the side wall of the wafer box is provided with an installation cavity, in which a push plate is slidably connected, the push plate is fixedly connected to one end of a spring, and the other end of the spring is fixedly connected to the inner side wall of the installation cavity.

[0010] Preferably, the pushing plate is fixedly connected to the extrusion plate, an elastic airbag is embedded in the side wall of the installation cavity, the elastic airbag is connected to the limiting airbag, and the limiting airbag is arranged on the inner wall of the wafer box.

[0011] Preferably, a magnet is fixedly connected to the push plate.

[0012] Preferably, the elastic airbag and the limiting airbag form a limiting component, and a plurality of groups of limiting components are arranged in the installation cavity.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] (1) The precise clamping and positioning of the wafer box is achieved by driving the clamping plate through the cylinder in the mating assembly and the pushing assembly. This not only improves the positioning accuracy and reduces the error and time cost of manual operation, but the use of position detection sensors further ensures the accuracy of the wafer box position, providing a reliable foundation for subsequent wafer processing.

[0015] (2) The wafer box can be detachably fixed on the stage by means of extrusion contact, which makes the disassembly and assembly of the wafer box very convenient, facilitates the rapid replacement of the wafer box, and improves production efficiency.

[0016] (3) By using the elastic airbag and the limiting airbag together, the shaking and collision of the wafer can be effectively reduced when the wafer box is moved, thereby improving the stability of the wafer during transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional structural schematic diagram of the present invention;

[0018] Figure 2 It is another structural schematic diagram of the present invention;

[0019] Figure 3 is a cross-sectional view of the present invention;

[0020] Figure 4 is a top view of the present invention;

[0021] Figure 5 It is a left side view of the present invention;

[0022] Figure 6 The present invention Figure 2 A in the figure is an enlarged structural diagram.

[0023] Among them: stage-1, position detection sensor-101, slide groove-2, cylinder-3, clamping plate-4, left receiving plate-5, matching component-6, right receiving plate-7, wafer box-8, groove-9, pushing component-10, installation cavity-11, pushing plate-12, spring-13, extrusion plate-14, elastic airbag-15, limiting airbag-16, magnet-17. DETAILED DESCRIPTION

[0024] The following will be combined with the attached Figure 1-Figure 6 The present invention is described in detail, and the technical solutions in the embodiments of the present invention are made clear. The complete description is obvious. The described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0027] See also Figures 1 to 6 A wafer cassette stage system for automatically adjusting the position of a wafer cassette of the present invention comprises a stage 1, on top of which a wafer cassette 8 is placed; the wafer cassette 8 is used for placing wafers.

[0028] Specifically, the side wall of the wafer box 8 is detachably fixed to the top of the stage 1 through extrusion contact with the matching component 6 and the pushing component 10, so that the disassembly and installation of the wafer box 8 are convenient.

[0029] Specifically, the matching component 6 includes a slide groove 2, a cylinder 3, and a clamping plate 4; the slide groove 2 is embedded in the top of the loading platform 1, and the cylinder 3 is bolted inside the slide groove 2, and the moving end of the cylinder 3 is fixedly connected to the side wall of the clamping plate 4; a left receiving plate 5 and a right receiving plate 7 are fixedly connected to the left and right sides of the front end of the top of the loading platform 1 respectively; the cylinder 3 is connected to the external air source, and a position detection sensor 101 is fixedly connected to the top of the loading platform 1.

[0030] Specifically, a matching magnet is provided on the left receiving plate 5 and the right receiving plate 7, and the matching magnet and the magnet 17 are arranged close to each other with the same pole, so that when the magnet 17 approaches the left receiving plate 5 and the right receiving plate 7, the magnet 17 is pushed to move, so that the extrusion plate 14 moves away from the elastic airbag 15.

[0031] Specifically, the side walls of the wafer box 8 are in compression contact with the left receiving plate 5 and the right receiving plate 7; the pushing assembly 10 includes a cylinder 3, a clamping plate 4 and a groove 9; the groove 9 is embedded in the rear end of the top of the stage 1; and the cylinder 3 and the clamping plate 4 are arranged in the groove 9.

[0032] Specifically, the side wall of the wafer box 8 is provided with an installation cavity 11, and a push plate 12 is slidably connected in the installation cavity 11. The push plate 12 is fixedly connected to one end of a spring 13, and the other end of the spring 13 is fixedly connected to the inner wall of the installation cavity 11. The push plate 12 is fixedly connected to the extrusion plate 14, and an elastic airbag 15 is embedded in the side wall of the installation cavity 11. The elastic airbag 15 is connected to the limiting airbag 16, and the limiting airbag 16 is arranged on the inner wall of the wafer box 8.

[0033] Specifically, a magnet 17 is fixedly connected to the push plate 12 .

[0034] Specifically, the elastic airbag 15 and the limiting airbag 16 form a limiting component, and a plurality of limiting components are arranged in the installation cavity 11 .

[0035] Specifically, the wafer box 8 is placed on the stage 1, and then the cylinders 3 in the matching components 6 at the left and right ends are controlled to drive the clamping plates 4 to move. The two groups of clamping plates 4 contact the inner walls of the left and right ends of the wafer box 8 and push the wafer box 8 to move to the limited position. Then the air pressure of the cylinder 3 in the matching component 6 is maintained, and the cylinder 3 in the pushing component 10 is controlled to drive the clamping plates 4 to move. The clamping plates 4 push the wafer box 8 forward until it contacts the left receiving plate 5 and the right receiving plate 7. The air pressure is maintained after it is pushed until it can no longer be pushed forward. At this time, the operator observes whether the position detection sensor 101 is triggered to complete the positioning of the wafer box 8. When the wafer box 8 is close to the left receiving plate 5, the magnet 17 is close to the left receiving plate 5. Near the left receiving plate 5 and the right receiving plate 7, the magnet 17 is pushed to move, so that the squeezing plate 14 moves away from the elastic airbag 15, so that the elastic airbag 15 is restored, and then the elastic airbag 15 extracts the air in the limiting airbag 16, so that the limiting airbag 16 shrinks, and the limiting airbag 16 loses the contact restriction on the side wall of the wafer, which is convenient for wafer transfer; after waiting for the wafer to be taken away, reverse ventilation is performed to release the holding force of the cylinder 3 system in the matching component 6 and the pushing component 10, and the wafer box 8 is taken away. The squeezing plate 14 is reset with the assistance of the spring 13, and the squeezing plate 14 squeezes the elastic airbag 15 to make the limiting airbag 16 open outward, which is convenient for clamping the wafer in the wafer box 8 and improving the wafer box 8 when moving.

[0036] The above shows and describes the basic principle, main features and advantages of the present invention, and the standard parts used in the present invention can be purchased from the market, and special-shaped parts can be customized according to the description in the specification and the drawings. The specific connection methods of each part adopt the conventional means such as mature bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt the conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here.

[0037] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A wafer cassette stage system for automatically adjusting the position of a wafer cassette, comprising a stage, a wafer cassette is placed on top of the stage; Features: The side wall of the wafer box is detachably fixed to the top of the stage by extrusion contact with the matching component and the pushing component; A position detection sensor is fixedly connected to the top of the loading platform.

2. A wafer cassette stage system for automatically adjusting the position of a wafer cassette according to claim 1, characterized in that: The matching components include a slide groove, a cylinder, and a clamping plate; the slide groove is embedded in the top of the loading platform, the cylinder is bolted in the slide groove, and the moving end of the cylinder is fixedly connected to the side wall of the clamping plate.

3. A wafer cassette stage system for automatically adjusting the position of a wafer cassette according to claim 2, characterized in that: A left receiving plate and a right receiving plate are fixedly connected to the left and right positions of the front end of the top of the loading platform respectively; a matching magnet is arranged on the left receiving plate and the right receiving plate; The side wall of the wafer box is in compression contact with the left receiving plate and the right receiving plate.

4. A wafer cassette stage system for automatically adjusting the position of a wafer cassette according to claim 3, characterized in that: The pushing component comprises a cylinder, a clamping plate and a groove; the groove is embedded in the rear end of the top of the loading platform; and the cylinder and the clamping plate are arranged in the groove.

5. A wafer cassette stage system for automatically adjusting the position of a wafer cassette according to claim 4, characterized in that: The side wall of the wafer box is provided with an installation cavity, in which a push plate is slidably connected, the push plate is fixedly connected to one end of a spring, and the other end of the spring is fixedly connected to the inner side wall of the installation cavity.

6. A wafer cassette stage system for automatically adjusting the position of a wafer cassette according to claim 5, characterized in that: The pushing plate is fixedly connected with the extruding plate, an elastic airbag is embedded in the side wall of the installation cavity, the elastic airbag is communicated with the limiting airbag, and the limiting airbag is arranged on the inner side wall of the wafer box.

7. A wafer cassette stage system for automatically adjusting the position of a wafer cassette according to claim 6, characterized in that: A magnet is fixedly connected to the push plate.

8. A wafer cassette stage system for automatically adjusting the position of a wafer cassette according to claim 7, characterized in that: The elastic airbag and the limiting airbag form a limiting component, and a plurality of limiting components are arranged in the installation cavity.

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