Atomic layer deposition coating system for inner wall of gas pipeline

Abstract

Embodiments of an apparatus for coating a plurality of gas lines are provided herein. In some embodiments, an apparatus for coating a plurality of gas lines via an ALD process includes a furnace having a housing defining an interior volume configured to receive the plurality of gas lines, the housing having a door configured to transfer the plurality of gas lines into and out of the interior volume; a plurality of inlet ports disposed through a first wall of the housing; a plurality of exhaust ports disposed through a second wall of the housing; a fluid panel disposed outside the furnace and coupled to the plurality of inlet ports through respective ones of the plurality of fluid distribution assemblies; and a foreline disposed outside the furnace and coupled to the plurality of exhaust ports.

Description

Technical Field

[0001] Embodiments of the disclosed invention generally relate to deposition apparatus. Background Art

[0002] Various manufacturing processes expose semiconductor processing chamber components to high temperatures, high energy plasmas, corrosive halogen gases, high stresses, and combinations thereof. Such extreme conditions may erode and / or corrode chamber components, thereby increasing defects. Reducing defects may improve the erosion and / or corrosion resistance of components in such extreme environments.

[0003] Protective coatings are typically deposited on chamber components by a variety of methods, such as thermal spray, sputtering, ion-assisted deposition (IAD), plasma spray, or evaporation techniques. However, such techniques are unable to adequately deposit coatings into certain features of chamber components with high aspect ratios or complex geometries. In some cases, special fixtures must be used to direct precursor gases into the complex internal features of gas lines and other components of the gas distribution system, which can result in poor film quality and / or non-conformal films.

[0004] Accordingly, the inventors have provided improved methods and apparatus for coating the interior walls of gas lines. Summary of the invention

[0005] Embodiments of an apparatus for coating a plurality of gas lines are provided herein. In some embodiments, an apparatus for coating a plurality of gas lines via an ALD process comprises: a furnace having an outer shell, the outer shell defining an inner volume configured to accommodate a plurality of gas lines, the outer shell having a door configured to convey the plurality of gas lines to and from the inner volume; a plurality of inlet ports disposed through a first wall of the outer shell, wherein each of the plurality of inlet ports is configured to couple to a first end of a corresponding one of the plurality of gas lines; a plurality of exhaust ports disposed through a second wall of the outer shell, wherein each of the plurality of exhaust ports is configured to couple to a second end of a corresponding one of the plurality of gas lines; a fluid panel disposed outside the furnace and coupled to the plurality of inlet ports through a corresponding one of a plurality of fluid distribution assemblies; and a foreline disposed outside the furnace and coupled to the plurality of exhaust ports.

[0006] In some embodiments, an apparatus for coating multiple gas lines by ALD processing includes: a furnace having an outer shell, the outer shell defining an internal volume configured to accommodate multiple gas lines, the outer shell having a door configured to convey the multiple gas lines to and from the internal volume; a plurality of inlet ports, the inlet ports being disposed through a first wall of the outer shell and arranged in a vertically spaced direction, wherein each of the plurality of inlet ports is configured to be coupled to a first end of a corresponding one of the multiple gas lines; a plurality of exhaust ports, which are disposed through a second wall of the outer shell and arranged in a vertically spaced direction, wherein each of the plurality of exhaust ports is configured to be coupled to a second end of a corresponding one of the multiple gas lines; a fluid panel, the fluid panel being disposed outside the furnace and coupled to the multiple inlet ports through corresponding fluid distribution assemblies among a plurality of fluid distribution assemblies; and a foreline, the foreline being disposed outside the furnace and coupled to the multiple exhaust ports.

[0007] In some embodiments, a method for simultaneously coating the interior of multiple gas lines includes: placing the multiple gas lines in a furnace; coupling a first end of each of the multiple gas lines to a corresponding one of a plurality of inlet ports of the furnace; coupling a second end of each of the multiple gas lines to a corresponding one of a plurality of exhaust ports of the furnace; and flowing one or more processing fluids from the multiple inlet ports through the multiple gas lines to the multiple exhaust ports to coat the inner walls of the multiple gas lines via an ALD process.

[0008] Other and further embodiments of the disclosure are described below. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Embodiments of the present disclosure, briefly summarized above and discussed in more detail below, may be understood by reference to the illustrative embodiments of the present disclosure depicted in the accompanying drawings. However, the drawings illustrate only typical embodiments of the present disclosure and are therefore not to be considered limiting of scope, as the present disclosure may admit to other equally effective embodiments.

[0010] Figure 1 A schematic diagram of an apparatus for coating a plurality of gas lines is depicted, in accordance with at least some embodiments of the disclosed inventions.

[0011] Figure 2 Depicted is a schematic top isometric view of an apparatus for coating a plurality of gas lines, in accordance with at least some embodiments of the disclosed inventions.

[0012] Figure 3 Depicted is an isometric view of a rack disposed within an interior volume, in accordance with at least some embodiments of the disclosed inventions.

[0013] Figure 4An isometric view of a lifting fixture in accordance with at least some embodiments of the disclosed inventions is depicted.

[0014] Figure 5 Depicted is a schematic top view of a fluid dispensing assembly in accordance with at least some embodiments of the disclosed inventions.

[0015] Figure 6 Depicted is a schematic side view of a foreline in accordance with at least some embodiments of the disclosed inventions.

[0016] Figure 7 Depicted is a schematic side view of a furnace in accordance with at least some embodiments of the disclosed invention.

[0017] Figure 8 A flow chart is depicted of a method of simultaneously coating the interior of multiple gas lines in accordance with at least some embodiments of the disclosed inventions.

[0018] For ease of understanding, the same reference numerals are used where possible to represent the same elements common to the figures. The drawings are not drawn to scale and may be simplified for clarity. Elements and features of one embodiment may be advantageously incorporated into other embodiments without further description. DETAILED DESCRIPTION

[0019] Embodiments of an apparatus for coating a plurality of gas lines by atomic layer deposition (ALD) are provided herein. ALD is used to advantageously deposit AlO on the inner wall of gas lines of various configurations and sizes. x A membrane (e.g., Al2O3), for example, having a length to diameter or depth to width ratio of about 10:1 to about 300:1 (e.g., the interior of a gas line). AlO x The film advantageously reduces particles generated by the gas line during use and increases the life of the gas line. The apparatus may include a furnace configured to coat multiple gas lines or welds simultaneously. This arrangement advantageously increases throughput and reduces precursor consumption.

[0020] The precursors used for the coating can be organometallic or inorganic chemicals such as TMA, H2O, and ozone, maintained at a specified temperature and vapor pressure in an ampoule. Deposition is performed under conditions of limited surface reactions to obtain conformal coatings and good step coverage using the processing scheme pressure and temperature, for example, at a temperature of about 300 degrees (Celsius) and at a pressure of about 1 torr to about 100 torr. The processing pressure is optimized and controlled in conjunction with the foreline pump through the airflow and throttle position. The system outlet is connected to a dedicated foreline pump. The throttle valve located in the system exhaust line is used to pump slowly and gradually through the foreline pump.

[0021] Figure 1A schematic diagram of an apparatus 100 for coating a plurality of gas lines according to at least some embodiments of the presently disclosed invention is depicted. The apparatus 100 generally includes a furnace 102 having a housing 106 that defines an interior volume 110 configured to accommodate a plurality of gas lines 112. The plurality of gas lines 112 may be retained within the furnace 102 in any suitable manner. For example, Figure 1 As shown, the plurality of gas lines 112 may be disposed on a plurality of trays 108 (discussed in more detail below). Alternatively, in some embodiments, the plurality of gas lines 112 may be suspended or retained on a side wall of the housing 106. In other examples, the plurality of gas lines 112 may be arranged on a rotating fixture disposed in the interior volume 110. The furnace 102 is configured to facilitate coating the plurality of gas lines 112 by an atomic layer deposition (ALD) process. The furnace 102 may advantageously coat the interior walls of the plurality of gas lines 112 having various shapes and sizes, which may otherwise be difficult to coat.

[0022] The furnace 102 includes a plurality of inlet ports 114 and a plurality of exhaust ports 118. In some embodiments, the plurality of inlet ports 114 are disposed through a first wall 122 of the housing 106. The plurality of inlet ports 114 are coupled to a fluid panel 120 for delivering a process fluid to the furnace 102. A first end of each of the plurality of gas lines 112 is fluidly coupled to one of the plurality of inlet ports 114 via one of a plurality of first conduits 162. In some embodiments, the plurality of exhaust ports 118 are disposed through a second wall 126 of the housing 106. A second end of each of the plurality of gas lines 112 is fluidly coupled to one of the plurality of exhaust ports 118 via one of a plurality of second conduits 164. The plurality of exhaust ports 118 are coupled to a foreline 128 for exhausting the process fluid from the plurality of gas lines 112. Thus, in use, each of the plurality of gas lines 112 functions as a separate ALD chamber disposed in the furnace 102 which is configured to provide temperature and pressure conditions to promote good film coverage on the inner walls of the plurality of gas lines 112 .

[0023] In some embodiments, the furnace 102 includes one or more recirculation inlet ports 132 and recirculation output ports 134 for facilitating heating and cooling of the interior volume 110. For example, one or more blowers 142 may be coupled to the housing 106 to deliver a gas, such as nitrogen. For a heating cycle, the gas may be heated via a heating element 138 and then delivered from the heating element 138 to the interior volume 110 via a conduit 136. The conduit 136 may be coupled to the one or more blowers 142 to allow the heated gas to flow into the interior volume 110. The recirculation output port 134 may deliver the gas back to the heating element 138 via a conduit 168 for reheating and recirculation. In some embodiments, the interior volume 110 is maintained at about 250 degrees (Celsius) to about 350 degrees (Celsius) during processing.

[0024] For the cooling cycle, the gas captures heat from the plurality of gas lines 112 and delivers the heated gas to the heating element 138 via conduit 168, which can act as a heat exchanger to cool the heated gas. The cooled gas can then flow back to the interior volume 110 via conduit 136 and one or more blowers 142. In some embodiments, the one or more recirculation inlet ports 132 consist of two such ports.

[0025] The fluid panel 120 is typically disposed outside the furnace 102 and is coupled to the plurality of inlet ports 114, for example, via a respective one of the plurality of fluid distribution assemblies 130. The fluid panel 120 may house a source of process fluids for performing the coating process described herein. A plurality of process fluid supply lines may extend from the fluid panel 120 to each of the plurality of fluid distribution assemblies 130. For example, in some embodiments, the plurality of process fluid supply lines include a first process fluid supply line 144, a second process fluid supply line 146, and a third process fluid supply line 148. In some embodiments, the first process fluid supply line 144 includes a trimethylaluminum (TMA) supply line. In some embodiments, the second process fluid supply line 146 includes a nitrogen supply line. In some embodiments, the third process fluid supply line 148 includes a water supply line. In some embodiments, the apparatus 100 includes a purification source 140 coupled to the fluid panel 120 for purifying the plurality of process fluid supply lines as needed. In some embodiments, the purification source 140 includes ozone and is coupled to the fluid panel 120 via a supply line 124.

[0026] The foreline 128 (described in more detail below) is generally disposed outside of the furnace 102 and is coupled to the plurality of exhaust ports 118. For example, the foreline 128 can be fastened to an outer surface of the housing 106. The foreline 128 is coupled to a pump 150 that is configured to facilitate exhausting the interior volume of the plurality of gas lines 112. The foreline 128 can include an isolation valve 152 for maintenance and safety. One or more valves 156 that are normally closed can be coupled to the foreline 128 to prevent exhausting the plurality of gas lines 112 when not needed during the coating process.

[0027] The apparatus 100 may include additional supports to facilitate the loading and unloading of the plurality of trays 108 and the plurality of gas lines 112. For example, the apparatus may include a loading rack 160. The loading rack 160 may include structures or features configured to hold the plurality of trays 108. Prior to being transferred to the furnace 102, the plurality of gas lines 112 may be arranged or assembled on corresponding trays of the plurality of trays 108 on the loading rack 160. In some embodiments, each tray of the plurality of trays 108 is transferred individually from the loading rack 160 to the internal volume 110. In some embodiments, the entire loading rack 160 with the plurality of gas lines 112 may be placed in the furnace 102 for processing. In some embodiments, the apparatus may include a removal rack 170 having structures or features for holding the plurality of trays 108 after processing. The removal rack 170 may facilitate easy removal of the plurality of gas lines 112 that have been processed or coated. Once the plurality of gas lines 112 are removed, the empty trays of the plurality of trays 108 may be transferred to the loading rack 160 for reuse.

[0028] Figure 2 A schematic top isometric view of an apparatus for coating a plurality of gas lines according to at least some embodiments of the disclosed inventions is depicted. The housing 106 of the furnace 102 generally includes one or more openings for conveying the plurality of gas lines 112. For example, the housing 106 may include one or more doors 206 configured to convey the plurality of gas lines 112 into and out of the interior volume 110. Figure 2 A set of two doors 206 are depicted disposed on a single wall of the housing 106. However, in some embodiments, one or more doors 206 may be disposed on multiple walls of the housing. The one or more doors 206 may form a seal (not shown) with the housing 106 in an appropriate manner (e.g., via one or more O-rings, etc.). In some embodiments, the device 100 is configured to arrange multiple gas lines 112 in a vertically spaced orientation.

[0029] In some embodiments, the plurality of inlet ports 114 are arranged in a vertically spaced direction. In some embodiments, the plurality of fluid distribution assemblies 130 are arranged in a vertically spaced direction. For example, each of the plurality of fluid distribution assemblies 130 may be disposed adjacent to or proximate to a corresponding one of the plurality of inlet ports 114. In some embodiments, the first treatment fluid supply line 144 includes a first integrated pipeline 208 extending from the fluid panel 120 and a plurality of branches 248 extending from the first integrated pipeline 208 to the plurality of fluid distribution assemblies 130. In some embodiments, the second treatment fluid supply line 146 includes a second integrated pipeline 210 extending from the fluid panel 120 and a plurality of second branches 230 extending from the second integrated pipeline 210 to the plurality of fluid distribution assemblies 130. In some embodiments, the third treatment fluid supply line 148 includes a third integrated pipeline 218 extending from the fluid panel 120 and a plurality of third branches 228 extending from the third integrated pipeline 218 to the plurality of fluid distribution assemblies 130.

[0030] As described above, each of the plurality of inlet ports 114 is configured to be coupled to a first end of a corresponding one of the plurality of gas lines 112. In some embodiments, the plurality of inlet ports 114 are disposed proximate to the one or more doors 206 to facilitate access and connection to the plurality of first conduits 162. In some embodiments, a plurality of trays 108 are disposed in the interior volume 110 to hold the plurality of gas lines 112.

[0031] In some embodiments, the plurality of exhaust ports 118 are arranged in a vertically spaced apart direction. Each of the plurality of exhaust ports 118 is configured to be coupled to a second end of a corresponding one of the plurality of gas lines 112. In some embodiments, the plurality of exhaust ports 118 are disposed near one or more doors 206 to facilitate access and connection to the plurality of second conduits 164. During processing, the interior volume of the plurality of gas lines 112 is not exposed to the interior volume 110 of the furnace 102.

[0032] In some embodiments, the furnace 102 has a width 212 of about 5 to about 9 feet. In some embodiments, the furnace 102 has a length 214 of about 4 to about 7 feet. In some embodiments, the furnace 102 has a height 216 of about 4 to about 7 feet. The plurality of pallets 108 may be sized to properly hold the plurality of gas lines 112 within the interior volume 110 of the furnace 102. One or more lifting fixture guides 220 may be disposed adjacent to one or more doors 206 to assist a lifting fixture (e.g., lifting fixture 400) in aligning, loading, or unloading the plurality of pallets 108.

[0033] Figure 3An isometric view of a rack disposed in an interior volume in accordance with at least some embodiments of the presently disclosed invention is depicted. In some embodiments, a rack of multiple trays 108 may include multiple slots 310 ( Figure 3 1 ). Each of the plurality of slots 310 can be configured to receive a pin 302 extending from a side wall of the housing 106 (e.g., from the second wall 126). Each pin 302 can rest in the plurality of slots 310 to facilitate supporting and retaining the plurality of trays 108. In some embodiments, for each of the plurality of trays 108, the first wall 122 can include one or more pins 302 aligned along a common horizontal plane with one or more pins 302 extending from the second wall 126. In some embodiments, the plurality of trays 108 include a frame 303 and a grid 304 or mesh extending through the frame 303.

[0034] Figure 4 An isometric view of a lifting fixture 400 is depicted in accordance with at least some embodiments of the presently disclosed inventions. The lifting fixture 400 generally includes a fixed portion 410 and a lifting portion 420, wherein the lifting portion 420 can be raised or lowered relative to the fixed portion 410. In some embodiments, the lifting portion 420 can include a support arm (e.g., fork 430) configured to support one of the plurality of pallets 108. In some embodiments, the lifting portion 420 can be manually moved via a handle 418. In some embodiments, the lifting portion 420 can be moved via an electronic actuator, a pulley system, gears and chains, and the like.

[0035] Figure 5 A schematic top view of a fluid distribution assembly according to at least some embodiments of the presently disclosed invention is depicted. In some embodiments, the plurality of fluid distribution assemblies 130 include a plurality of process fluid supply lines that converge into a single inlet line 510 that is coupled to each of the plurality of inlet ports 114. In some embodiments, the plurality of fluid distribution assemblies include a Y-shaped weldment 508 that is configured to combine the plurality of process fluids while minimizing chemical vapor deposition in the Y-shaped weldment 508.

[0036] For example, in some embodiments, a first treatment fluid supply line 144 containing a first fluid can be coupled to a first conduit 512 having a first valve 542 for controlling the flow of the first fluid through the first conduit 512. In some embodiments, a second treatment fluid supply line 146 can be coupled to a first carrier conduit 514 having a first mass flow controller 544 for controlling the flow of a second fluid through the first carrier conduit 514. The first conduit 512 can be coupled to the first carrier conduit 514 via a first three-port pulse valve 532. The first carrier conduit 514 can provide a carrier or purge gas. The first treatment fluid can include a mixture of the first fluid and the second fluid. The first treatment fluid line 526 is coupled to the first three-port pulse valve 532 at one end and to the junction 550 of the Y-shaped weldment 508 at the other end. The first three-port pulse valve 532 can be configured to pulse the first fluid into the first treatment fluid line 526 (and thus into one of the plurality of inlet ports 114). In some embodiments, the first three-port pulse valve 532 is configured to provide continuous flow from the first carrier conduit 514 and pulse flow from the first conduit 512. The first exhaust line 524 can extend from the first conduit 512 to a foreline of the device 100, such as the foreline 128 or a separate foreline. The first exhaust line 524 can include a normally closed first exhaust valve 554.

[0037] In some embodiments, a third process fluid supply line 148 containing a third fluid can be coupled to a third conduit 518 having a third valve 548 for controlling the flow of the third fluid through the third conduit 518. In some embodiments, a second process fluid supply line 146 can be coupled to a second carrier conduit 516 having a second mass flow controller 546 for controlling the flow of the second fluid through the second carrier conduit 516. The third conduit 518 can be coupled to the second carrier conduit 516 via a second three-port pulse valve 534. The second carrier conduit 516 can provide a carrier or purge gas. The second process fluid can include a mixture of the third fluid and the second fluid. The second process fluid line 528 is coupled to the second three-port pulse valve 534 at one end and to the junction 550 of the Y-shaped weldment 508 at the other end. The second three-port pulse valve 534 can be configured to pulse the third fluid into the second process fluid line 528 (and thus into one of the plurality of inlet ports 114). In some embodiments, the second three-port pulse valve 534 is configured to provide continuous flow from the second carrier conduit 516 and pulsed flow from the third conduit 518 .

[0038] The second exhaust line 522 may extend from the third conduit 518 to a foreline of the apparatus 100, such as the foreline 128 of the apparatus 100 or a separate foreline. The second exhaust line 522 may include a normally closed second exhaust valve 552. The first process fluid line 526 and the second process fluid line 528 merge into a single inlet line 510. In some embodiments, the single inlet line 510 includes a pressure gauge for measuring the pressure of the single inlet line 510 and is configured to transmit the pressure data to the system controller 700 of the apparatus 100 to control the flow and pulse rate of the process gas.

[0039] In some embodiments, the purge source 140 extends to a purge conduit 506 that extends to various conduits of the purge gas distribution assembly. In some embodiments, the purge conduit 506 extends from the second exhaust line 522 and includes a purge valve 536 to control the flow of the purge gas. In some embodiments, the purge conduit 506 flows ozone (O3). In some embodiments, the first fluid comprises trimethylaluminum. In some embodiments, the second fluid comprises nitrogen. In some embodiments, the third fluid comprises H2O.

[0040] Figure 6 Depicted is a side view of a foreline according to at least some embodiments of the presently disclosed invention. In some embodiments, a normally closed valve 610 is disposed between the foreline 128 and each of the plurality of exhaust ports 118. Thus, in use, when a corresponding one of the plurality of gas lines 112 needs to be evacuated, the normally closed valve 610 can be actuated to an open position. In some embodiments, a purge line 650 is coupled to the foreline 128 for providing a purge gas, such as nitrogen, to the foreline 128. The purge gas can be provided by a purge gas source 620. The purge line 650 is typically coupled to the foreline 128 upstream of any normally closed valve 610. In some embodiments, the purge gas is provided by a fluid panel 120. When a process fluid from the plurality of gas lines 112 passes through the foreline 128, the purge gas can advantageously reduce or prevent undesirable deposition or coating of the inner wall of the foreline 128. In some embodiments, the purge line 650 includes a check valve 612 to ensure that there is no backflow.

[0041] The foreline 128 may include various components to help pressure control and measurement. For example, in some embodiments, the foreline 128 includes a throttle valve 618 located downstream of the normally closed valve 610 to maintain the desired pressure in the foreline 128. In some embodiments, the foreline 128 includes a pressure switch 602 having a desired pressure set point to help the regulation and pumping of the foreline 128. In some embodiments, the pressure switch 602 is disposed downstream of the isolation valve 152. The foreline 128 may include a pressure gauge 616 for measuring the pressure in the foreline 128. In some embodiments, the foreline 128 includes a manual valve 604. The manual valve 604 may be disposed downstream of the isolation valve 152. In some embodiments, the foreline 128 includes a trap 606 for accommodating particulate contaminants and extending the life of the pump 150. The trap 606 may include a net or appropriate filter medium to capture particulate contaminants. In some embodiments, the trap 606 is disposed downstream of the isolation valve 152. In some embodiments, the trap 606 is disposed downstream of the pressure gauge 616 .

[0042] Figure 7 A schematic side view of a furnace according to at least some embodiments of the presently disclosed invention is depicted. The system controller 700 controls the operation of the device 100 by controlling a computer (or controller) associated with the furnace 102, the fluid panel 120, the fluid distribution assembly 130, and the components connected to the foreline 128. The system controller 700 generally includes a central processing unit (CPU) 702, a memory 704, and support circuits 706. The CPU 702 can be one of any form of general-purpose computer having one or more processors that can be used in an industrial environment. The support circuits 706 are generally coupled to the CPU 702 and can include caches, clock circuits, input / output subsystems, power supplies, etc. Software routines (e.g., processing methods as described above) can be stored in the memory 704 and, when executed by the CPU 702, transform the CPU 702 into the system controller 700. The software routines can also be stored and / or executed by a second controller (not shown) located remote from the device 100.

[0043] In operation, the system controller 700 enables the collection of data and feedback from the various components of the device 100 to optimize the performance of the device 100 and provides instructions to the system components to perform the methods described herein. For example, the memory 704 can be a non-transitory computer-readable storage medium having instructions that, when executed by the CPU 702 (or the system controller 700), perform the methods described herein.

[0044] For example, the system controller 700 can be used to check whether a gas line in the plurality of gas lines 112 exists and is connected to the inlet port 114 and the exhaust port 118. For example, the plurality of inlet ports 114 may include a first input port 712, a second input port 714, a third input port 716, a fourth input port 718, and a fifth input port 720. The plurality of exhaust ports 118 may include a first exhaust port 712', a second exhaust port 714', a third exhaust port 716', a fourth exhaust port 718', and a fifth exhaust port 720', respectively. On the input side, an inlet sensor 740 may be coupled to each port of the plurality of inlet ports 114. The inlet sensor 740 is configured to provide a signal to the system controller 700 indicating whether a gas line in the plurality of gas lines 112 is connected to the inlet port. Similarly, on the exhaust side, an output sensor 750 may be coupled to each port of the plurality of exhaust ports 118. The output sensor 750 is configured to provide a signal to the system controller 700 indicating whether a gas line in the plurality of gas lines 112 is connected to the exhaust port. Figure 7 As shown, the first gas pipeline 112' can be connected to the fifth input port 720 and the fifth exhaust port 720', the second gas pipeline 112" can be connected to the fourth input port 718 and the third exhaust port 716', and the third gas pipeline 112"' can be connected to the third input port 716 and the first exhaust port 712'. In such an embodiment, the system controller 700 can recognize that the second exhaust port 714' and the fourth exhaust port 718' are not coupled to any gas pipeline, and therefore maintain the state of the normally closed valve 610 associated with the second exhaust port 714' and maintain the fourth exhaust port 718' in a closed position. Similarly, the valves associated with the first input port 712 and the second input port 714 in the fluid distribution assembly 130 will remain closed.

[0045] In some embodiments, the pressure gauge 504 on the input side can provide pressure readings to the system controller 700 for controlling fluid flow to the plurality of inlet ports 114. In some embodiments, the pressure gauge 616 on the foreline 128 can provide pressure readings to the system controller 700, and the system controller 700 can facilitate actuation of various valves coupled to the foreline 128 to control and regulate pressure.

[0046] Figure 8A flow chart of a method 800 for simultaneously coating the interior of a plurality of gas lines is depicted in accordance with at least some embodiments of the presently disclosed invention. At 802, the method 800 includes placing a plurality of gas lines (e.g., the plurality of gas lines 112) in a furnace (e.g., the furnace 102). In some embodiments, placing the plurality of gas lines in the furnace is performed via a rolling lifting fixture (e.g., the lifting fixture 400). The plurality of gas lines may be suspended from a side wall of the furnace or placed on various fixtures or brackets disposed in the furnace. In some embodiments, the plurality of gas lines may be placed on a tray (e.g., the plurality of trays 108).

[0047] At 804, method 800 includes coupling a first end of each of the plurality of gas lines to a respective one of a plurality of inlet ports (e.g., plurality of inlet ports 114) of the furnace. The plurality of inlet ports may be arranged in a vertically or horizontally spaced orientation. At 806, method 800 includes coupling a second end of each of the plurality of gas lines to a respective one of a plurality of exhaust ports (e.g., plurality of exhaust ports 118) of the furnace.

[0048] At 808, method 800 includes flowing one or more treatment fluids from multiple inlet ports through multiple gas lines to multiple exhaust ports to coat the inner walls of multiple gas lines via ALD processing. One or more treatment fluids can be supplied via a fluid panel (e.g., fluid panel 120). In some embodiments, a fluid distribution assembly (e.g., fluid distribution assembly 130) can be used to mix and convey one or more treatment fluids. In some embodiments, the fluid distribution assembly provides treatment fluids at a desired ratio or desired pulse rate at a desired interval. For example, the fluid distribution assembly can be configured to pulse the first fluid at a rate of less than about 200 milliseconds and pulse the second fluid at a rate of about 200 milliseconds. In some embodiments, before or after one or more treatment fluids flow through the conduit, ozone flows through the conduit of the fluid distribution assembly 130 to clean or purge the conduit. In some embodiments, 1 to 4 seconds of purge can be performed after pulsing the first fluid. In some embodiments, 1 to 4 seconds of purge can be performed after pulsing the third fluid. In some embodiments, the inner walls of multiple gas lines are coated with a coating having a thickness of about 4000 angstroms to about 6000 angstroms, such as an aluminum oxide coating.

[0049] In some embodiments, the one or more process fluids include nitrogen, trimethylaluminum (TMA), and H2O. In some embodiments, the interior volume 110 of the furnace 102 is heated to about 200 degrees (Celsius) to about 500 degrees (Celsius) during processing. In some embodiments, the pressure inside the plurality of gas lines is maintained at about 1 Torr to about 100 Torr during processing. The interior volume of the furnace may be maintained at a pressure of about 1.5 Torr to about 650 Torr, such as about 1.5 to about 10 Torr. In some embodiments, the method 800 includes flowing an inert gas into the interior volume of the furnace while flowing the one or more process fluids.

[0050] In some embodiments, a valve (e.g., normally closed valve 610) is coupled to each of the plurality of exhaust ports. In some embodiments, method 800 includes maintaining the valve closed while coupling a first end of each of the plurality of gas lines and a second end of each of the plurality of gas lines. Method 800 may include opening the valve while performing the ALD process. Method 800 may include opening only the valve coupled to the gas lines and maintaining valves not connected to the gas lines closed during the ALD process. In some embodiments, after the process is completed, furnace 102 is cooled to about 30 degrees (Celsius) to about 70 degrees (Celsius).

[0051] While the foregoing is directed to embodiments of the disclosed invention, other and further embodiments of the disclosed invention may be devised without departing from the basic scope thereof.

Claims

1. An apparatus for coating a plurality of gas lines by an ALD process, comprising: a furnace having a housing defining an interior volume configured to house the plurality of gas lines, the housing having one or more doors configured to convey the plurality of gas lines into and out of the interior volume; a plurality of inlet ports disposed through the first wall of the housing, wherein each of the plurality of inlet ports is configured to be coupled to a first end of a respective one of a plurality of gas lines; a plurality of exhaust ports disposed through a second wall of the housing, wherein each of the plurality of exhaust ports is configured to be coupled to a second end of a respective one of the plurality of gas lines and is configured to be coupled to a foreline disposed outside of the furnace; A fluid panel is disposed external to the furnace and coupled to the plurality of inlet ports via respective ones of a plurality of fluid distribution assemblies.

2. The device of claim 1, wherein the plurality of fluid distribution assemblies are arranged in a vertically spaced apart orientation. 3 . The apparatus of claim 1 , further comprising a foreline disposed outside the furnace and a normally closed valve disposed between the foreline and each of the plurality of exhaust ports.

4. The apparatus of claim 1, wherein each of the plurality of fluid distribution assemblies comprises a plurality of treatment fluid supply lines that converge into a single inlet line coupled to each of the plurality of inlet ports.

5. The apparatus of claim 4, wherein the plurality of process fluid supply lines comprises a nitrogen supply line, a water supply line, and a trimethylaluminum (TMA) supply line.

6. The device of any one of claims 1 to 5, wherein the plurality of exhaust ports are arranged in a vertically spaced orientation.

7. The apparatus of any one of claims 1 to 5, wherein the foreline comprises a trap for containing particulate contaminants.

8. The apparatus of any one of claims 1 to 5, wherein the apparatus is configured to arrange the plurality of gas pipelines in a vertically spaced-apart direction.

9. The apparatus of any one of claims 1 to 5, further comprising a plurality of trays disposed in the interior volume to hold the plurality of gas lines.

10. The device of any one of claims 1 to 5, wherein the plurality of inlet ports are arranged in a vertically spaced direction, and the plurality of exhaust ports are arranged in a vertically spaced direction.

11. The apparatus of any one of claims 1 to 5, wherein the furnace comprises a recirculation input port and a recirculation output port.

12. The apparatus of any one of claims 1 to 5, wherein the plurality of fluid distribution components comprises a Y-shaped weldment configured to combine a plurality of process fluids while minimizing chemical vapor deposition in the Y-shaped weldment.

13. The device of any one of claims 1 to 5, wherein the plurality of inlet ports and the plurality of exhaust ports are disposed proximate the one or more doors.

14. The apparatus of any one of claims 1 to 5, wherein the furnace has a width of about 4 feet to about 7 feet.

15. A method for simultaneously coating the interior of a plurality of gas pipelines, comprising: placing multiple gas lines in the furnace; coupling a first end of each of the plurality of gas lines to a respective one of a plurality of inlet ports of the furnace; coupling a second end of each of the plurality of gas lines to a respective one of a plurality of exhaust ports of the furnace; and One or more process fluids are flowed through the plurality of gas lines from the plurality of inlet ports to the plurality of exhaust ports to coat inner walls of the plurality of gas lines via an ALD process.

16. The method of claim 15, wherein the one or more treatment fluids include nitrogen, trimethylaluminum (TMA), and ozone.

17. The method of claim 15, wherein placing the plurality of gas lines in the furnace is performed by a rolling lift fixture.

18. The method of claim 15, wherein a valve is coupled to each of the plurality of exhaust ports, and further comprising: The valve is closed when the first end of each of the plurality of gas lines and the second end of each of the plurality of gas lines are coupled, and the valve is opened when the ALD process is performed.

19. The method of claim 15, further comprising: An inert gas is flowed into the interior volume of the furnace simultaneously with flowing the one or more process fluids.

20. A non-transitory computer readable medium having stored thereon instructions which, when executed by one or more processors, result in the performance of a method as claimed in any one of claims 15 to 19.

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