Liquid treatment device based on high-frequency sound waves

Abstract

The invention relates to a liquid treatment device based on high-frequency sound waves, and the device comprises a substrate which is provided with a flow channel structure and a high-frequency sound wave driver; the flow channel structure is provided with a flow channel, an inlet and an outlet, and liquid enters the flow channel through the inlet and flows out of the flow channel through the outlet; the high-frequency sound wave driver is arranged at the outlet and has a preset position corresponding relation with the outlet; when liquid flows out of the flow channel structure, the high-frequency sound wave driver covers the liquid, the high-frequency sound wave driver generates high-frequency sound waves, the high-frequency sound waves make contact with the liquid to be attenuated, and volume force is generated to act on the liquid. The liquid can be promoted to break through surface tension under the action of volume force to be broken, small-size atomized liquid drops are formed, the problems of low atomization efficiency and large power consumption caused by the fact that sound waves directly act on the surface of the liquid in the past are solved, and the liquid atomization device can also serve as a jet flow generator to form jet flow in the liquid.

Description

Technical Field

[0001] The present application relates to the field of micro-electromechanical technology, and in particular to a liquid processing device based on high-frequency sound waves. Background Art

[0002] Atomization technology can produce tiny droplets and is widely used in mass spectrometry, inhalation therapy, spraying, and surface deposition. Traditional liquid atomization technologies mainly include heating atomization, pressure jet atomization, mesh vibration atomization, and ultrasonic atomization:

[0003] 1) Heating atomization heats the liquid into aerosol through local high temperature, but the local high temperature causes some liquids to denature or decompose, especially biological-related liquids, which have strict temperature requirements.

[0004] 2) Jet nebulizers use high-pressure airflow to produce high-throughput atomization effects, but they are expensive and can easily lead to drug waste.

[0005] 3) The mesh vibration method uses piezoelectric ceramics and a mesh screen. The atomized particle size is small, but it is easy to cause the mesh screen to be blocked when atomizing the liquid, reducing its service life.

[0006] 4) For drugs, excessive atomization volume can easily lead to drug waste. Ultrasonic atomization uses ultrasound to act on the liquid surface to produce atomization. This type of method has been applied to all aspects of life, but the frequency of ultrasound waves is low, resulting in a relatively large droplet diameter, with a particle size distribution of about 10μm, which cannot meet the demand for smaller particle sizes.

[0007] In addition, the researchers also proposed an acoustic atomization technology, which uses 30MHz surface acoustic waves to act on the liquid. The liquid is added to the center of the interdigital transducer by means of a pipette, so that the disturbance of the acoustic wave breaks through the surface tension to generate droplets. However, since the acoustic wave needs to propagate in the air and causes losses, it is impossible to achieve effective energy conversion. The applied power required for atomization is as high as 7W, and the atomized particle size is 10.66μm. The overall power consumption is high, and miniaturization and integration are difficult.

[0008] In summary, although various atomization methods have been developed, with the development of refinement, higher performance requirements are put forward for atomization technology, such as smaller and more uniform particle size, lower power consumption, easy integration, etc., which cannot be achieved by the above technologies. Summary of the invention

[0009] In view of the above problems in the prior art, the present application provides a liquid processing device based on high-frequency sound waves. One application that can be realized by the device is to generate volume force for atomization by means of the attenuation of high-frequency sound waves in a liquid environment, so as to achieve smaller and more uniform particle size and lower power consumption. Another application that can be realized by the device is liquid jet.

[0010] To achieve the above objectives, the present application provides a liquid treatment device based on high-frequency sound waves, comprising:

[0011] A substrate, on which a flow channel structure and a high-frequency acoustic wave driver are arranged;

[0012] A flow channel structure, comprising a flow channel, an inlet and an outlet, wherein the liquid enters the flow channel through the inlet and flows out of the flow channel through the outlet;

[0013] A high-frequency sound wave driver, which is disposed at the outlet and has a preset position correspondence with the outlet;

[0014] When the liquid flows out of the flow channel structure and covers the high-frequency acoustic wave driver, the high-frequency acoustic wave driver generates high-frequency acoustic waves, and the high-frequency acoustic waves are attenuated when in contact with the liquid, generating a volume force acting on the liquid.

[0015] In some achievable embodiments, the generating of volume force to act on the liquid includes: the liquid breaking through surface tension and atomizing under the action of the volume force, or the liquid generating a jet facing back to the high-frequency acoustic wave driver under the action of the volume force.

[0016] From the above, the present application can be used for atomization on the one hand. The atomization technology based on high-frequency sound waves uses the inlet to transport the liquid to the range of the sound wave action, and the liquid is forced to break through the surface tension under the action of the volume force, and ruptures to form small-sized atomized droplets, thereby avoiding the problems of low atomization efficiency and high power consumption caused by the direct action of sound waves on the liquid surface in the past. On the other hand, the present application can be used for a jet generator, which can realize the jet inside the liquid by acting on the liquid through the volume force.

[0017] In some achievable embodiments, the width of the flow channel is not less than the size of the outer circumferential diameter of the high-frequency acoustic wave driver, or the width of the flow channel is not less than the size of the contour of the vibrating portion in the core of the high-frequency acoustic wave driver.

[0018] In some feasible embodiments, there is a preset position correspondence with the outlet of the flow channel structure, including: the distance between the transverse center axis of the outlet and the transverse geometric center axis of the high-frequency acoustic wave driver satisfies a preset first distance range; the distance between the outlet and the longitudinal geometric center axis of the high-frequency acoustic wave driver satisfies a preset second distance range.

[0019] In some achievable embodiments, the preset first distance range is 0 μm-20 mm, and / or the preset second distance range is 0 μm-20 mm.

[0020] In some achievable embodiments, the inlet and / or the flow channel include a plurality of inlets, and / or the high-frequency acoustic wave driver includes a plurality of inlets, which are arranged in a preset array pattern.

[0021] In some achievable manners, a control circuit of the high-frequency acoustic wave driver is further included, which is disposed on, inside or outside the substrate, for example, under the high-frequency acoustic wave driver.

[0022] In some achievable embodiments, the method further includes: a liquid replenishing device for replenishing liquid into the flow channel through the inlet.

[0023] In some achievable embodiments, the resonant frequency range of the high-frequency acoustic wave driver is 0.5 GHz-10 GHz.

[0024] In some achievable embodiments, the outer side of the outlet has a side wall located on the base and extending along the outlet, the side wall is open to the top facing away from the base, and the top inner edge of the side wall is used to form a liquid surface of a first height that matches the height of the side wall in combination with the surface tension of the liquid; the high-frequency acoustic wave driver has a preset position correspondence with the outlet, including: the position of the high-frequency acoustic wave driver corresponds to the position at the first height.

[0025] In some achievable embodiments, the two side walls extending along both sides of the outlet are partially closed or open away from the side wall portion of the outlet. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is a three-dimensional diagram of a liquid treatment device based on high-frequency sound waves provided in an embodiment of the present application;

[0027] Figure 2 It is a bottom-up structural diagram of a liquid treatment device based on high-frequency sound waves provided in an embodiment of the present application;

[0028] Figure 3 is a top view of a liquid treatment device based on high-frequency sound waves provided in an embodiment of the present application;

[0029] Figure 4 It is a cross-sectional view of the central interface of a liquid treatment device based on high-frequency sound waves provided in an embodiment of the present application;

[0030] Figure 5 is a top view of a liquid treatment device based on high-frequency sound waves provided in an embodiment of the present application, including positional relationships;

[0031] Figure 6 is a top view of a high-frequency sound wave-based liquid treatment device including multiple inlets provided in an embodiment of the present application;

[0032] Figure 7 is a top view of a high-frequency acoustic wave-based liquid treatment device including a plurality of inlets and a plurality of high-frequency acoustic wave drivers provided in an embodiment of the present application;

[0033] Figure 8 This is a test diagram of atomized particle size of a liquid treatment device based on high-frequency sound waves provided in an embodiment of the present application;

[0034] Fig. 9 This is a high-speed camera image of the atomization process of a liquid treatment device based on high-frequency sound waves provided in an embodiment of the present application;

[0035] Fig. 10A This is the first embodiment of the embodiment of the present application in which a side wall is arranged on the outer side of the outlet;

[0036] Fig. 10B This is the second embodiment of the embodiment of the present application in which a side wall is arranged on the outer side of the outlet;

[0037] Fig. 10C This is the third embodiment of the embodiment of the present application in which a side wall is arranged on the outer side of the outlet;

[0038] Fig. 10D This is the fourth embodiment of the embodiment of the present application in which a side wall is provided on the outer side of the outlet.

[0039] It should be understood that the size and shape of each block diagram in the above structural diagram are for reference only and should not constitute an exclusive interpretation of the embodiment of the present invention. The relative position and inclusion relationship between the blocks presented in the structural diagram are only schematic representations of the structural association between the blocks, and do not limit the physical connection method of the embodiment of the present invention. DETAILED DESCRIPTION

[0040] The technical solution provided by the present application is further described below with reference to the accompanying drawings and examples. It should be understood that the system structure and business scenarios provided in the examples of the present application are mainly to illustrate the possible implementation methods of the technical solution of the present application and should not be interpreted as the only limitation on the technical solution of the present application. It is known to those of ordinary skill in the art that with the evolution of the system structure and the emergence of new business scenarios, the technical solution provided by the present application is also applicable to similar technical problems.

[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art to which the present application belongs. If there is any inconsistency, the meaning described in this specification or the meaning derived from the content recorded in this specification shall prevail. In addition, the terms used herein are only for the purpose of describing the embodiments of the present application and are not intended to limit the present application. In order to accurately describe the technical contents in this application, and in order to accurately understand the present invention, the following explanation or definition is given to the terms used in this specification before describing the specific embodiments.

[0042] In view of the problems existing in the prior art, the present application provides a liquid treatment device based on high-frequency sound waves, such as Figures 1 to 4 As shown, including:

[0043] A substrate 1, on which a flow channel structure 4 and a high-frequency acoustic wave driver 2 are arranged;

[0044] a flow channel structure 4, which has a flow channel, an inlet and an outlet, wherein the liquid 3 enters the flow channel through the inlet and flows out of the flow channel through the outlet;

[0045] A high-frequency sound wave driver 2, which is disposed at the outlet and has a preset position corresponding relationship with the outlet;

[0046] When the liquid 3 flows out of the flow channel structure 4 and covers the high-frequency acoustic wave driver 2, the high-frequency acoustic wave driver 2 generates high-frequency acoustic waves, which attenuate when in contact with the liquid 3, generating a volume force acting on the liquid.

[0047] In some embodiments, a control circuit of a built-in, integrated or external high-frequency acoustic wave driver may also be included.

[0048] In some embodiments, the liquid breaks through the surface tension under the action of the body force and becomes atomized, or the liquid generates a jet facing away from the high-frequency acoustic wave driver under the action of the body force.

[0049] In the present application, the substrate 1 and the flow channel structure 4 are two structures, and the two are made of different materials. The material of the substrate 1 includes but is not limited to semiconductor materials, metal materials, inorganic materials, composite materials, etc. The material of the flow channel structure 4 may include PDMS, PMMA, glass, plastic, metal, and materials that can be made into a flow channel.

[0050] The substrate 1 and the flow channel structure 4 may also be integrally formed using the same material.

[0051] In the present application, the flow channel structure 4 includes an inlet, and the inlet can be used to input liquid into the flow channel from the outside. The inlet can be set at the bottom, top, side wall, etc. of the flow channel structure 4. The inlet can be connected to an external pipeline, and the liquid flows into the flow channel structure 4 through the external pipeline.

[0052] The flow channel structure 4 includes an outlet, and the outlet is controlled at a distance from the action range of the sound wave so that the outflowing liquid is just located in the area that can be atomized or the area of ​​the jet.

[0053] The liquid can be water, ethanol, liquid for medicine or other liquids with certain fluidity.

[0054] In this application, since the transmission speed of sound waves in different media is different, when sound waves are transmitted from solid to liquid, the sound waves are attenuated, and the expression of the attenuation coefficient β is:

[0055]

[0056] Among them, c L is the propagation speed of sound waves in liquid, ω is the frequency of sound waves, ρ is the density of liquid, μ is the viscosity of liquid, and μ B is the volume viscosity of the liquid. From the above formula, we can find that when the properties of the liquid are determined, the attenuation rate of the sound wave propagating in the liquid is proportional to the square of the sound wave frequency. The nonlinear attenuation of the sound wave propagating in the liquid will induce the volume force, which is expressed as:

[0057] F B =2ρβω 2 u 2 e -2β

[0058] Where u is the velocity amplitude of the sound wave in the z direction. It can be seen that the magnitude of the volume force is positively correlated with the frequency of the sound wave, that is, the higher the frequency of the sound wave, the greater the volume force generated.

[0059] Therefore, in one embodiment of the present application, it is proposed to use a high-frequency acoustic wave driver to drive atomization. Unlike the previous sound waves directly acting on the liquid surface, the high-frequency acoustic wave driver generates high-frequency sound waves (0.5-10GHz, preferably 1GHz-3GHz range). At low power (can be 0.4W), the high-frequency sound waves are coupled with the liquid to generate huge volume force, so that the liquid breaks through the surface tension, breaks, and quickly atomizes to form small-sized atomized droplets. This avoids the problems of low atomization efficiency and high power consumption caused by the direct action of sound waves on the liquid surface.

[0060] Furthermore, compared with electrical heating atomization, this method generates less heat, does not cause reaction or decomposition of the liquid, has low thermal damage to the atomized liquid, and is applicable to a wider range of liquids.

[0061] Furthermore, in the atomization particle size test, high-frequency sound waves are used, and the average atomized particle size can be 1.8μm, which makes the average atomized particle size less than 5μm, and even produces nanometer-level droplets. Compared with traditional ultrasonic atomization, the particle size produced is smaller.

[0062] Furthermore, the power of the high-frequency acoustic wave driver can be increased, which can increase the amount of liquid atomization. When used to generate a jet, the flow rate or range of the liquid jet can be increased.

[0063] Furthermore, there is no mesh or nozzle structure, so there is no clogging problem.

[0064] In addition, when applied to atomization, due to the effect of super strong volume force, the device can not only atomize low-viscosity fluids such as water, but also atomize glycerin, honey, etc. with a viscosity as high as 3000cp.

[0065] The shapes of the high-frequency acoustic wave drivers used in this application include, but are not limited to, pentagons, circles, donuts, triangles, and the like.

[0066] In some embodiments, the width of the flow channel is not less than the size of the outer circumferential diameter of the high-frequency acoustic wave driver, or the width of the flow channel is not less than the size of the contour of the vibrating portion in the core of the high-frequency acoustic wave driver.

[0067] In this way, since the high-frequency acoustic wave driver cooperates with the flow channel, the width of the flow channel is set to be larger than the size of the outer circumferential diameter of the high-frequency acoustic wave driver, or the width of the flow channel is not smaller than the size of the contour of the vibrating part in the core of the high-frequency acoustic wave driver, so that the liquid can completely cover the entire high-frequency acoustic wave driver after flowing out of the flow channel, so that the high-frequency sound waves of the high-frequency acoustic wave driver can act well on the liquid.

[0068] In addition, the height of the flow channel is generally 1 μm-500 μm, but not limited thereto, and the height of the flow channel enables the liquid surface of the liquid 3 to contact the vibrating part of the core of the high-frequency acoustic wave driver 2 .

[0069] In some embodiments, the outlet of the flow channel structure has a preset position correspondence relationship, including:

[0070] The distance between the transverse center axis of the outlet and the transverse geometric center axis of the high-frequency acoustic wave driver satisfies a preset first distance range;

[0071] The distance between the outlet and the longitudinal geometric center axis of the high-frequency sound wave driver meets a preset second distance range.

[0072] When applied to atomization, the preset first distance range is 0um-20mm, and / or the preset second distance range is 0um-20mm.

[0073] When applied to atomization, specifically, Figure 5 As shown, the high-frequency acoustic wave driver has a certain positional correspondence with the outlet of the flow channel, and the two dimensions Y are used to constrain the range, where X is the distance range between the transverse center axis of the outlet and the transverse geometric center axis of the high-frequency acoustic wave driver, X is generally 0-20mm, and the preferred spacing is 0mm (the center of the device and the center of the flow channel coincide, and the atomization flux is more). Y is the distance between the outlet and the longitudinal geometric center axis of the high-frequency acoustic wave driver, Y is generally 0-20mm, and the preferred spacing is 1μm-500μm. Unless otherwise specified, X and Y represent absolute values. It is best when the high-frequency acoustic wave driver is located on the center line of the flow channel outlet.

[0074] In some embodiments, the inlet and / or the flow channel comprises a plurality of inlets.

[0075] Specifically, Figure 6 The device top view corresponding to the two inlets is shown, which can allow two liquids to be introduced for solution ratios of different concentrations, and then directly transported to the vicinity of the high-frequency acoustic wave driver for atomization or jetting. Of course, more inlets can also be provided for the ratio of liquids of various concentrations.

[0076] It is also possible to configure the flow channel to include multiple, corresponding to multiple inlets, into which multiple liquids can be introduced.

[0077] In some embodiments, the high-frequency acoustic wave driver includes a plurality of drivers arranged in a preset array pattern.

[0078] Specifically, Figure 7 As shown, there are two high-frequency acoustic wave drivers 2-1 and 2-2 corresponding to two inlets, which are used for atomization or jetting of liquids of different concentrations and for increasing the flow rate and range of the atomization flux or jetting. In the figure, the device 2-2 has no independent or discrete flow channel in contact with it, and the range of possible liquid 3 is not marked.

[0079] Multiple high-frequency acoustic wave drivers can be arranged in a preset array pattern, such as a horizontal array, a circular array, etc. The use of multiple high-frequency acoustic wave drivers can further improve the atomization or jet flux. The corresponding control circuit is also prepared in an array.

[0080] In some embodiments, the high-frequency acoustic wave-based liquid treatment device may further include a control circuit for a high-frequency acoustic wave driver, which is disposed on, inside, or outside the substrate and under the high-frequency acoustic wave driver.

[0081] In some embodiments, it also includes: a signal generator connected to the control circuit of the high-frequency sound wave driver, used to control the high-frequency sound wave driver to generate high-frequency sound waves through the control circuit of the high-frequency sound wave driver.

[0082] Specifically, the control circuit is connected to the signal generator and the high-frequency sound wave driver. Under the control of the signal generator, the control circuit drives the high-frequency sound wave driver to generate high-frequency sound waves.

[0083] In some embodiments, it also includes: a liquid replenishing device for replenishing liquid into the flow channel through the inlet.

[0084] In some embodiments, the fluid infusion device is further used to: control the flow rate of the liquid.

[0085] Specifically, the atomization or jet flux can be further improved by controlling the liquid flow rate in combination with the strong volume force generated by high-frequency sound waves.

[0086] In some embodiments, the outer side of the outlet has a side wall located on the base and extending along the outlet, the side wall is open to the top of the base (open means without a top cover), and the top inner edge of the side wall is used to form a liquid surface of a first height matching the height of the side wall in combination with the surface tension of the liquid;

[0087] The high-frequency sound wave driver and the outlet have a preset position correspondence relationship, including: the position of the high-frequency sound wave driver corresponds to the position at the first height.

[0088] The liquid level of the liquid coming out of the outlet can be adjusted by the side wall. Fig. 10A , Fig. 10B , Fig. 10C , Fig. 10D Some examples are shown and described below:

[0089] in Fig. 10A In the embodiment, the side wall A gradually decreases along the extension direction. Combined with the surface tension of the liquid, the surface of the liquid will also gradually decrease. The high-frequency acoustic wave driver can be set at the desired liquid level height to achieve atomization or jetting.

[0090] in Fig. 10B In the embodiment, the side wall A is lowered along the extension direction as a whole, and a side wall portion with substantially the same height is formed at the portion of the side wall A away from the outlet. In combination with the surface tension of the liquid, the liquid surface in this portion is not only lower than the outlet, but also substantially the same in height. The high-frequency acoustic wave driver can be set below the side wall at this height to achieve atomization or jetting. It can be seen that in this way, the required height of the liquid level can be maintained within a certain range along the side wall, and the position of the high-frequency acoustic wave driver can be set more conveniently and flexibly.

[0091] in Fig. 10C In, relatively Fig. 10BFor example, the side wall A as a whole rises along the extension direction, and a side wall portion with basically the same height is formed at the side wall away from the outlet. Combined with the surface tension of the liquid, the liquid surface in this portion is not only higher than that at the outlet, but also has a basically consistent height. The high-frequency acoustic wave driver can be set below the side wall at this height to achieve atomization or jetting.

[0092] in Fig. 10A , Fig. 10B and Fig. 10C In the figure, the side wall portions of the two side walls A extending along the two sides of the outlet and away from the outlet are not closed. Fig. 10D In the embodiment, the two side walls A extending along both sides of the outlet are partially closed away from the side wall of the outlet. In this way, not only the droplet area can be limited, but also, due to the increase in the overall side walls, the liquid surface tension is better supported, and the liquid level height can be better controlled.

[0093] In some embodiments, when the two side walls A extending along the two sides of the outlet are away from the side wall portion of the outlet and are closed, a Fig. 10D In other embodiments, the side wall in the top view may also form any one or any combination of the following shapes: a rectangular portion, an annular portion or other closed curved shape, such as a shape like the outline of a table tennis racket. The shape like the outline of a table tennis racket includes a first portion forming an annular portion with an opening, and a second portion connecting the annular opening and the outlet. The annular portion may be a circular ring, and the height of the circular portion is consistent. The height of the first portion and the second portion may be transitionally set, so that the circular ring portion is higher than the outlet, lower than the outlet, or equal to the outlet. The circular ring with consistent height can better cooperate with the liquid surface tension.

[0094] In some embodiments, the outlet can be arranged upward or downward, that is, the substrate is located below or above. When arranged downward, due to the combined effect of the capillary force of the outlet and / or the side wall A at the outlet and the tension of the liquid surface, the liquid surface effect of the above embodiment can also be achieved.

[0095] In some embodiments, when the two side walls A extending along both sides of the outlet are partially closed away from the side wall of the outlet, a plurality of liquid channels may be provided to connect to the space formed by the side walls.

[0096] In some embodiments, the high-frequency acoustic wave driver acts on the liquid to produce atomization or jet ejection, which is also related to the liquid level height. When there is no side wall outside the outlet, the position where atomization can be achieved or the position of the jet can be determined based on the change in the height of the liquid level formed along the substrate at the liquid flowing out of the outlet, such as the preset first distance range and the preset second distance range for achieving atomization mentioned above.

[0097] In some embodiments, when a side wall A is provided outside the outlet, a matching liquid level height can be obtained according to the height of the side wall, so as to realize atomization or jet at the liquid level of the height. In some embodiments, the side wall height required for atomization is lower than the side wall height required for jet. In other embodiments, the liquid supply speed can also be coordinated at the same time, and the liquid level of the outer wall of the outlet is made convex, horizontal or concave at the moment before atomization or jet, so as to realize fine adjustment of the liquid level height. That is, the liquid surface shape formed at the top of the outer wall of the outlet (i.e., the above-mentioned convex, horizontal or concave) is related to the capillary force, liquid surface tension, and liquid supply speed, and accordingly, the liquid surface shape can be adjusted based on the liquid supply speed, so as to realize fine adjustment of the liquid level height, so that the liquid level reaches the desired optimal height of atomization or jet.

[0098] In some embodiments, the high frequency acoustic wave driver may be located on the upper surface of the substrate, such as Figure 2 As shown, in some embodiments, it can also be located on the lower surface of the substrate with the working surface facing upward, or embedded in the substrate.

[0099] In the embodiment where a side wall is arranged outside the outlet, the position of the high-frequency acoustic wave driver is such that the range of action covers the desired position of the side wall (such as the position at the desired height of the side wall mentioned above). Since the liquid is confined within the side wall, the high-frequency acoustic wave driver is located in the top view semi-enclosed by the inner side of the side wall (such as Fig. 10A , Fig. 10B or Fig. 10C between the side walls) or surrounded by (such as Fig. 10D A position in the area surrounded by the side wall is a preferred position, especially at the desired position on the inner side of the side wall.

[0100] Specific examples:

[0101] use Figure 1 When the high-frequency acoustic wave-based liquid treatment device shown is applied to atomization, the n-octanol solution is pumped to the inlet of the flow channel structure 4 at a speed of 10ul / min by an external pump, and the liquid is transported to the position of the high-frequency acoustic wave driver 2 along the flow channel structure with a width of 100μm and a height of 85μm. Due to the effect of surface tension, the fluid 3 will form a certain contact angle with the substrate 1 after flowing out of the flow channel and continue to move forward. The high-frequency acoustic wave driver 2 used in this embodiment is 50μm away from the outlet of the flow channel structure 4, and the geometric centers of the two are aligned. The frequency used by the high-frequency acoustic wave driver 2 is 2GHz, and the diameter of the circumscribed circle of the high-frequency acoustic wave driver 2 is 80μm. A power signal is applied to the control circuit to drive the high-frequency acoustic wave driver 2 through an external signal generator, thereby causing liquid atomization.

[0102] Figure 8The corresponding atomized particle size test chart, the horizontal axis represents the atomized droplet size, the vertical axis represents the corresponding particle size distribution ratio, among which the particle size standard material focuses on Dv(50), which represents the particle size corresponding to 50% volume distribution.

[0103] Figure 8 As shown, the atomized particle size of the device we proposed is 1.483 μm, which provides a method for applications with smaller particle sizes.

[0104] Fig. 9 This is the effect picture taken by the fog high-speed camera.

[0105] The liquid treatment device based on high-frequency sound waves proposed in the present application can be applied to atomization. Under certain relative position conditions between the flow channel and the high-frequency sound waves, in coordination with the entry of the fluid, a high-frequency sound wave is generated by an external signal generator through the underlying control circuit. The high-frequency sound wave acts on the liquid at the outlet of the flow channel, so that the liquid breaks through the surface tension and becomes atomized. The device has the advantages of miniature, low power consumption, simple structure, small atomization particle size, adjustable atomization amount, and compatibility with semiconductor processes, and can also be portable through wireless drive. On the other hand, the liquid treatment device based on high-frequency sound waves proposed in the present application can be applied to jets, and also has the advantages of miniature, low power consumption, simple structure, adjustable jet flux, and compatibility with semiconductor processes, and can also be portable through wireless drive.

[0106] Note that the above are only preferred embodiments of the present application and the technical principles used. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of protection of the present application. Therefore, although the present application is described in more detail through the above embodiments, the present application is not limited to the above embodiments, and may also include more other equivalent embodiments without departing from the concept of the present application, all of which belong to the scope of protection of the present application.

Claims

1. A liquid treatment device based on high-frequency sound waves, characterized in that: include: A substrate, on which a flow channel structure and a high-frequency acoustic wave driver are arranged; A flow channel structure, comprising a flow channel, an inlet and an outlet, wherein the liquid enters the flow channel through the inlet and flows out of the flow channel through the outlet; A high-frequency sound wave driver, which is disposed at the outlet and has a preset position correspondence with the outlet; When the liquid flows out of the flow channel structure and covers the high-frequency acoustic wave driver, the high-frequency acoustic wave driver generates high-frequency acoustic waves, and the high-frequency acoustic waves are attenuated when in contact with the liquid, generating a volume force acting on the liquid.

2. The device according to claim 1, characterized in that The step of generating a volume force to act on the liquid comprises: The liquid breaks through the surface tension under the action of the volume force and atomizes, or The liquid generates a jet facing away from the high-frequency acoustic wave driver under the action of the body force.

3. The device according to claim 1 or 2, characterized in that The width of the flow channel is not less than the outer diameter of the high-frequency acoustic wave driver, or The width of the flow channel is not less than the size of the contour of the vibrating portion in the core of the high-frequency acoustic wave driver.

4. The device according to claim 1 or 2, characterized in that Having a preset position correspondence relationship with the outlet of the flow channel structure, including: The distance between the transverse center axis of the outlet and the transverse geometric center axis of the high-frequency acoustic wave driver satisfies a preset first distance range; The distance between the outlet and the longitudinal geometric center axis of the high-frequency sound wave driver meets a preset second distance range.

5. The device according to claim 4, characterized in that The preset first distance range is 0 μm-20 mm, and / or the preset second distance range is 0 μm-20 mm.

6. The device according to claim 1 or 2, characterized in that The inlet and / or the flow channel include a plurality of The high-frequency sound wave drivers include a plurality of drivers arranged in a preset array pattern.

7. The device according to claim 1 or 2, characterized in that The invention also comprises a control circuit of the high-frequency acoustic wave driver, wherein the control circuit is arranged on, inside or outside the substrate.

8. The device according to claim 1 or 2, characterized in that Also includes: A liquid replenishing device is used to replenish liquid into the flow channel through the inlet.

9. The device according to claim 1, characterized in that The resonant frequency range of the high-frequency acoustic wave driver is 0.5 GHz-10 GHz.

10. The device according to claim 1 or 2, characterized in that The outer side of the outlet has a side wall located on the base and extending along the outlet, the side wall is open facing away from the top of the base, and the top inner edge of the side wall is used to form a liquid surface of a first height matching the height of the side wall in combination with the surface tension of the liquid; The high-frequency sound wave driver and the outlet have a preset position correspondence relationship, including: the position of the high-frequency sound wave driver corresponds to the position at the first height.

11. The device according to claim 10, characterized in that The two side walls extending along both sides of the outlet are partially closed or not closed, and the side wall portion away from the outlet is closed.

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