Fused quartz plate annealing equipment convenient to discharge

By designing annealing equipment for fused quartz plates that are easy to discharge, using automated cutting and loading mechanisms, the problems of safety risks and inefficiency in the prior art are solved, and an efficient and safe quartz plate annealing and discharge process is achieved.

CN119612943AInactive Publication Date: 2025-03-14JIANGSU HONGGE SEMICONDUCTOR CO LTD
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Patent Information

Application Number
CN202411799188.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-09
Publication Date
2025-03-14
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

The existing fused silica plate annealing technology poses safety risks and is inefficient, and is especially not suitable for large-scale equipment or large-scale production.

Method used

An annealing equipment for fused quartz plates that are convenient for discharge is designed, including an annealing furnace, a discharge mechanism and a loading mechanism. Through a screw rod and a boom system driven by an electro-hydraulic cylinder and a motor, automatic clamping, pulling and discharge of the quartz plates are realized.

Benefits of technology

It effectively avoids possible mistakes and risks in manual unloading, improves production efficiency, and is suitable for large-scale automated production.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses a fused quartz plate annealing device convenient to discharge and relates to the technical field of quartz plate annealing, furnace doors are slidably connected to the two sides of an annealing furnace, a feeding component is fixedly connected to the side face of the annealing furnace, and a cooling component is fixedly connected to the side, away from the feeding component, of the annealing furnace; a cooling component is fixedly connected to one side of the annealing furnace, a discharging table is fixedly connected to the other side of the cooling component, a connecting component is fixedly connected to the top of the annealing furnace, and the bottom of the connecting component is fixedly connected with the top of the annealing furnace. The output end of the first motor drives the first lead screw to rotate in the inner side of the connecting rod, so that the clamped quartz plate is driven to be pulled, the cooled quartz plate is moved to the discharging table to be discharged, errors and risks possibly caused by manual discharging can be effectively avoided, and the working efficiency is improved. The method is suitable for large-scale automatic production.
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Description

Technical Field

[0001] The invention relates to the technical field of quartz plate annealing, and in particular to an annealing device for a fused quartz plate which is convenient for discharging. Background Art

[0002] Fused quartz plate is a plate made of high-purity fused quartz. Pure quartz sand is heated to above 1800℃ in an electric furnace to melt it, and then cut with professional cutting equipment to produce fused quartz plates of various sizes. It can withstand temperatures up to 1750℃ or even higher, and can maintain stable performance in high-temperature environments. It is not prone to deformation, cracking and other problems. Therefore, it is often used in fields such as thermal insulation materials for high-temperature furnaces. It is almost unaffected by any chemical substances, has good corrosion resistance, can maintain reliability and durability in a variety of chemical environments, and can be used for equipment parts that come into contact with corrosive substances in industries such as chemical and food.

[0003] Annealing of fused quartz plates is mainly to eliminate the internal stress generated during the processing of fused quartz plates. After the annealing process is completed, the equipment is cooled to a certain temperature, and the operator wears heat-insulating gloves and directly enters the equipment to take out the quartz plate. This method is simple and direct, but there are certain safety risks and low efficiency. It is not suitable for large equipment or mass production. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention solves the technical problems by adopting the following technical solution: the annealing device for fused quartz plates that is convenient for discharging the materials described in the present invention comprises:

[0005] An annealing furnace, wherein furnace doors are slidably connected to both sides of the annealing furnace, a feeding component is fixedly connected to the side of the annealing furnace, a cooling component is fixedly connected to the side of the annealing furnace away from the feeding component, a discharge platform is fixedly connected to the other side of the cooling component, and a connecting component is fixedly connected to the top of the annealing furnace;

[0006] A connecting component, which is used to unload the fused quartz plate after annealing, and the bottom of the connecting component is fixedly connected to the top of the annealing furnace;

[0007] The connecting component comprises a connecting column, the bottom of which is fixedly connected to the top of the annealing furnace, the top of which is fixedly connected to a connecting rod, one end of which is fixedly connected to a feeding mechanism, and the other end of which is fixedly connected to a feeding mechanism;

[0008] The cam is connected with the first motor at the middle part, and the second motor is connected with the second motor at the middle part, and the output end of the first motor is fixedly connected with one end of the first motor. An electric hydraulic cylinder, the output end of the first electric hydraulic cylinder drives the connecting plate to move inside the unloading arm through the connecting shaft, so as to perform appropriate height adjustment according to quartz plates of different sizes and thicknesses, so as to better clamp and fix the side of the quartz plate appropriately, by turning on the double-axis motor, the output end of the double-axis motor drives the two second screw rods inside the connecting plate to rotate, so that the clamping arm rotates on the second screw rod, so that the clamping arm clamps and fixes the two sides of the quartz plate after cooling in the annealing furnace, by turning on the first motor, the output end of the first motor drives the first screw rod to rotate inside the connecting rod, so as to drive the clamped quartz plate to pull, so as to move the cooled quartz plate to the unloading table for unloading, which can effectively avoid the mistakes and risks that may occur in manual unloading, and is suitable for large-scale automated production;

[0009] Preferably, the feeding mechanism includes a third screw rod, both ends of the third screw rod are rotatably connected to the inner side of the connecting rod, the inner side of the connecting rod is slidably connected to a sliding arm, the inner side of the sliding arm is threadedly connected to the side of the third screw rod, the connecting rod is fixedly connected to the second motor on the side away from the first motor, the output end of the second motor is fixedly connected to one end of the third screw rod, the inner side of the sliding arm is fixedly connected to a second electric hydraulic cylinder, the output end of the second electric hydraulic cylinder is fixedly connected to a fixed shell, the side of the fixed shell is slidably connected to the inner side of the sliding arm, the inner side of the fixed shell is fixedly connected to the third motor, the output end of the third motor is fixedly connected to a rotating block, the top of the rotating block is rotatably connected to the bottom of the fixed shell, and the bottom of the rotating block is fixedly connected to a clamping mechanism ; When the quartz plate is annealed, the second motor is turned on, and the output end of the second motor drives the third screw rod to rotate inside the connecting rod, so that the sliding arm moves inside the connecting rod, and at the same time, the second electric hydraulic cylinder is turned on, and the fixed housing is driven by the output end of the second electric hydraulic cylinder to move downward inside the sliding arm, and at the same time, the third motor inside the fixed housing is turned on, and the output end of the third motor drives the rotating block to rotate, so that the rotating block drives the clamping mechanism to rotate, so that the placement position of the quartz plate at different angles is appropriately adjusted, and after the quartz plate is clamped and fixed by the clamping mechanism, the quartz plate is clamped and placed on the feeding component, so that the feeding component transports the quartz plate to the annealing furnace for annealing;

[0010] Preferably, the feeding component includes a feeding table, an end of the feeding table away from the inclined plate is fixedly connected to the side of the annealing furnace, the side of the feeding table is fixedly connected to the inclined plate, the inner side of the feeding table is rotatably connected to a conveying mechanism, the inner side of the feeding table is fixed with a contact mechanism, and the contact mechanism is arranged at the bottom of the conveying mechanism; when the loading mechanism clamps the quartz plate and places it on the feeding table, the conveying mechanism is opened to convey the quartz plate to the annealing furnace for subsequent annealing, and at the same time, when the conveying mechanism conveys the quartz plate, since the conveying mechanism contacts and moves with the bottom of the quartz plate, impurities on the quartz plate may leave residues in the equipment during the annealing process, increasing the cleaning and maintenance costs of the equipment. For example, solid residues produced by the decomposition of impurities may adhere to the heating element or the thermal insulation material, reducing the heating efficiency. The quartz plate has good thermal conductivity and thermal insulation performance. It needs to be cleaned and maintained regularly to ensure the normal operation of the annealing equipment. If there are impurities left on the quartz plate, the thermal conductivity of the impurities is usually different from that of quartz. For example, the thermal conductivity of metal impurities is generally higher than that of quartz. When these impurities exist, the local thermal conductivity of the quartz plate will be changed. During the annealing process, the heat transfer will be disturbed, resulting in uneven heating of the quartz plate. In this way, at the annealing temperature, the temperature difference of different parts of the quartz plate may exceed the expected range, affecting the stress elimination effect. The internal stress that should be evenly eliminated may not be completely eliminated due to the excessively high or low local temperature. Even new stress may be generated in some parts, so that the quartz plate can contact with the contact mechanism when the conveying mechanism is conveying, so that the contact mechanism can clean the contact bottom surface of the quartz plate;

[0011] Preferably, the contact mechanism comprises a contact plate, the side of the contact plate is fixedly connected to the inner side of the feed table, the top of the contact plate is fixedly connected to a contact frame, both sides of the contact frame are slidably connected to rubber plates, the side of the rubber plate away from the contact frame is in contact with the side of the conveying mechanism, and both sides of the top of the contact frame are fixedly connected to cleaning components; when the conveying mechanism drives the quartz plate to move continuously, the cleaning component continuously contacts and moves with the bottom of the quartz plate, so that the cleaning component can clean the bottom of the quartz plate, and at the same time, the cleaning component moves on the contact frame A rubber plate is disposed against the side of the roller in the conveying mechanism, so that when the roller rotates inside the feed table, the rubber plate can move against the side of the roller, so that the rubber plate can clean the side of the roller, thereby preventing impurities on the bottom contact surface of the quartz plate from adhering to the roller when the quartz plate is conveyed, thereby preventing some impurities attached to the roller from adhering to the quartz plate when the bottom of the quartz plate cleaned by the cleaning assembly passes through the roller, thereby leaving residues at the bottom of the quartz plate, increasing the cleaning and maintenance costs of the equipment;

[0012] The cleaning component comprises a cleaning frame, the bottom of the cleaning frame is slidably connected to the inner side of the contact frame, the inner side of the cleaning frame is rotatably connected to a cleaning roller, the cleaning frame is provided with sliding grooves on both sides away from the cleaning roller, the inner side of the sliding groove is slidably connected to a sliding shaft, the top of the sliding shaft is fixedly connected to a sliding plate, the side surface of the sliding plate is slidably connected to the inner side of the sliding groove, the top of the sliding plate is fixedly connected to a cleaning block, the sliding shaft is sleeved with a first spring, the top of the first spring is fixedly connected to the bottom of the sliding plate, and the bottom of the first spring is fixedly connected to the inner side of the sliding groove; when the quartz plate is transported and moved by the conveying mechanism, when the bottom of the quartz plate passes through the cleaning frame When the cleaning block is cleaned, the sliding plate drives the cleaning block to contact the bottom of the quartz plate, so that the cleaning block cleans the impurities adhered to the bottom of the quartz plate. At the same time, a cleaning roller is arranged in the middle of the cleaning frame, and the cleaning roller can clean and wipe the cleaned area of ​​the quartz plate with the cleaning block. When the cleaning block cleans the bottom of the quartz plate, the extrusion force between the cleaning block and the impurities adhered to the bottom of the quartz plate is greater than the tensile force of the first spring, so that the cleaning block slides downward in the inner side of the sliding groove through the sliding plate and the sliding shaft, thereby avoiding excessive extrusion force between the cleaning block and the impurities adhered to the bottom of the quartz block, which will cause extrusion damage to the side of the cleaning block.

[0013] The beneficial effects of the present invention are as follows:

[0014] 1. The present invention sets a feeding mechanism. After the annealing work on the quartz plate is completed, the first electric hydraulic cylinder is turned on. The output end of the first electric hydraulic cylinder drives the connecting plate to move inside the feeding arm through the connecting shaft, so that the height adjustment work is performed appropriately according to the quartz plates of different sizes and thicknesses, so that the side of the quartz plate can be better clamped and fixed appropriately. The double-axis motor is turned on and the output end of the double-axis motor drives the two second screw rods inside the connecting plate to rotate, so that the clamping arm rotates on the second screw rod, so that the clamping arm clamps and fixes the two sides of the quartz plate after cooling in the annealing furnace. The first motor is turned on and the output end of the first motor drives the first screw rod to rotate inside the connecting rod, so as to drive the clamped quartz plate to pull, so that the cooled quartz plate is moved to the unloading table for unloading, which can effectively avoid the mistakes and risks that may occur in manual feeding, and is suitable for large-scale automated production.

[0015] 2. The present invention sets a feeding mechanism. When annealing the quartz plate, the second motor is turned on and the output end of the second motor drives the third screw rod to rotate inside the connecting rod, so that the sliding arm moves inside the connecting rod. At the same time, the second electric hydraulic cylinder is turned on and the output end of the second electric hydraulic cylinder drives the fixed housing to move downward inside the sliding arm. At the same time, the third motor inside the fixed housing is turned on and the output end of the third motor drives the rotating block to rotate, so that the rotating block drives the clamping mechanism to rotate. Therefore, the placement position of the quartz plate is appropriately adjusted according to different angles. After the quartz plate is clamped and fixed by the clamping mechanism, the quartz plate is clamped and placed on the feeding component, so that the feeding component transports the quartz plate to the annealing furnace for annealing.

[0016] 3. The present invention provides a feeding component. When the loading mechanism clamps the quartz plate and places it on the feeding table, the conveying mechanism is opened to convey the quartz plate to the annealing furnace for subsequent annealing. At the same time, when the conveying mechanism conveys the quartz plate, since the conveying mechanism contacts and moves with the bottom of the quartz plate, impurities on the quartz plate may leave residues in the equipment during the annealing process, increasing the cleaning and maintenance costs of the equipment.

[0017] 4. The present invention sets a contact mechanism. When the conveying mechanism drives the quartz plate to move continuously, the cleaning component continuously contacts and moves with the bottom of the quartz plate, so that the cleaning component can clean the bottom of the quartz plate. At the same time, rubber plates are set against each other on the sides of the rollers in the contact frame and the conveying mechanism, so that when the rollers rotate on the inner side of the feed table, the rubber plates can move against the sides of the rollers, so that the rubber plates can clean the sides of the rollers, thereby preventing impurities on the contact surface of the bottom of the quartz plate from adhering to the rollers when the quartz plate is conveyed, thereby preventing some impurities attached to the rollers from adhering to the quartz plate when the bottom of the quartz plate cleaned by the cleaning component passes through the rollers, thereby leaving residues on the bottom of the quartz plate and increasing the cleaning and maintenance costs of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic structural diagram of an annealing device for a fused quartz plate that is convenient for discharging of the present invention;

[0019] Figure 2 It is a structural schematic diagram of the annealing furnace of the present invention;

[0020] Figure 3 It is a structural schematic diagram of the connecting component of the present invention;

[0021] Figure 4 It is a structural schematic diagram of the blanking mechanism of the present invention;

[0022] Figure 5 It is a structural schematic diagram of the feeding mechanism of the present invention;

[0023] Figure 6 It is a structural schematic diagram of the feeding component of the present invention;

[0024] Figure 7 It is a structural schematic diagram of the contact mechanism of the present invention;

[0025] Figure 8 It is a schematic diagram of the structure of the cleaning component of the present invention;

[0026] Fig. 9 The present invention Figure 8 The structural diagram at B in the middle;

[0027] Fig.10 The present invention Figure 8 The structural diagram at A in the middle;

[0028] In the figure: 1, annealing furnace; 2, cooling part; 3, feeding part; 31, feeding platform; 32, tilting plate; 33, conveying mechanism; 34, contact mechanism; 341, contact plate; 342, contact frame; 343, rubber plate; 344, cleaning assembly; 3441, cleaning frame; 3442, cleaning roller; 3443, sliding groove; 3444, sliding plate; 3445, sliding shaft; 3446, first spring; 3447, cleaning block; 4, furnace door; 5, discharge platform; 6, connecting part; 61, connecting column; 6 2. Connecting rod; 63. Unloading mechanism; 631. Unloading arm; 632. First screw rod; 633. First motor; 634. First electric hydraulic cylinder; 635. Connecting shaft; 636. Connecting plate; 637. Second screw rod; 638. Clamping arm; 639. Double-axis motor; 64. Loading mechanism; 641. Third screw rod; 642. Sliding arm; 643. Second motor; 644. Second electric hydraulic cylinder; 645. Fixed housing; 646. Third motor; 647. Rotating block; 648. Clamping mechanism. DETAILED DESCRIPTION

[0029] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

[0030] Example 1, using Figure 1-Figure 5An annealing device for a fused quartz plate that is convenient for discharging according to one embodiment of the present invention is described as follows;

[0031] like Figure 1-Figure 5 The present invention shows that a fused quartz plate annealing device that is convenient for discharging includes:

[0032] An annealing furnace 1, with furnace doors 4 slidably connected to both sides of the annealing furnace 1, a feeding component 3 fixedly connected to the side of the annealing furnace 1, a cooling component 2 fixedly connected to the side of the annealing furnace 1 away from the feeding component 3, a discharge platform 5 fixedly connected to the other side of the cooling component 2, and a connecting component 6 fixedly connected to the top of the annealing furnace 1;

[0033] A connecting component 6, which is used to unload the fused quartz plate after annealing, and the bottom of the connecting component 6 is fixedly connected to the top of the annealing furnace 1;

[0034] The connecting component 6 includes a connecting column 61, the bottom of the connecting column 61 is fixedly connected to the top of the annealing furnace 1, the top of the connecting column 61 is fixedly connected to a connecting rod 62, one end of the connecting rod 62 is fixedly connected to a feeding mechanism 63, and the other end of the connecting rod 62 is fixedly connected to a feeding mechanism 64;

[0035] The unloading mechanism 63 includes a first screw rod 632, both ends of the first screw rod 632 are rotatably connected to the inner side of the connecting rod 62, a first motor 633 is fixedly connected to the side of the connecting rod 62, an output end of the first motor 633 is fixedly connected to one end of the first screw rod 632, a unloading arm 631 is slidably connected to the inner side of the connecting rod 62, the inner side of the unloading arm 631 is threadedly connected to the inner side of the first screw rod 632, a first electric hydraulic cylinder 634 is fixedly connected to the inner side of the unloading arm 631, and the output end of the first electric hydraulic cylinder 634 is fixedly connected to the inner side of the connecting rod 62. A connecting shaft 635 is connected, and a connecting plate 636 is fixedly connected to the bottom of the connecting shaft 635. The side of the connecting plate 636 is slidably connected to the inner side of the unloading arm 631. The two sides of the inner wall of the connecting plate 636 are rotatably connected to the second screw rod 637. A double-axis motor 639 is fixedly connected to the middle of the inner side of the connecting plate 636. The output end of the double-axis motor 639 is fixedly connected to one end of the second screw rod 637. The side of the second screw rod 637 is threadedly connected to a clamping arm 638. After the annealing work of the quartz plate is completed, by opening the first The electric hydraulic cylinder 634, the output end of the first electric hydraulic cylinder 634, drives the connecting plate 636 to move inside the unloading arm 631 through the connecting shaft 635, so as to perform appropriate height adjustment according to quartz plates of different sizes and thicknesses, so as to better clamp and fix the side of the quartz plate appropriately, by turning on the double-axis motor 639, the output end of the double-axis motor 639 drives the two second screw rods 637 inside the connecting plate 636 to rotate, so that the clamping arm 638 rotates on the second screw rod 637, so that the clamping arm 638 clamps and fixes the two sides of the quartz plate after cooling and lowering the temperature in the annealing furnace 1, by turning on the first motor 633, the output end of the first motor 633 drives the first screw rod 632 to rotate inside the connecting rod 62, so as to drive the clamped quartz plate to pull, so as to move the cooled quartz plate to the unloading table 5 for unloading, which can effectively avoid the mistakes and risks that may occur in manual unloading, and is suitable for large-scale automated production;

[0036] The feeding mechanism 64 includes a third screw rod 641, both ends of which are rotatably connected to the inner side of the connecting rod 62, a sliding arm 642 is slidably connected to the inner side of the connecting rod 62, the inner side of the sliding arm 642 is threadedly connected to the side of the third screw rod 641, a second motor 643 is fixedly connected to the side of the connecting rod 62 away from the first motor 633, the output end of the second motor 643 is fixedly connected to one end of the third screw rod 641, a second electric hydraulic cylinder 644 is fixedly connected to the inner side of the sliding arm 642, a fixed housing 645 is fixedly connected to the output end of the second electric hydraulic cylinder 644, the side of the fixed housing 645 is slidably connected to the inner side of the sliding arm 642, a third motor 646 is fixedly connected to the inner side of the fixed housing 645, a rotating block 647 is fixedly connected to the output end of the third motor 646, the top of the rotating block 647 is rotatably connected to the bottom of the fixed housing 645, and a clamping mechanism 648 is fixedly connected to the bottom of the rotating block 647; When the quartz plate is annealed, the second motor 643 is turned on, and the output end of the second motor 643 drives the third screw rod 641 to rotate inside the connecting rod 62, so that the sliding arm 642 moves inside the connecting rod 62. At the same time, the second electric hydraulic cylinder 644 is turned on, and the fixed housing 645 is driven by the output end of the second electric hydraulic cylinder 644 to move downward inside the sliding arm 642. At the same time, the third motor 646 inside the fixed housing 645 is turned on, and the output end of the third motor 646 drives the rotating block 647 to rotate, so that the rotating block 647 drives the clamping mechanism 648 to rotate, so that the placement position of the quartz plate at different angles is appropriately adjusted. After the quartz plate is clamped and fixed by the clamping mechanism 648, the quartz plate is clamped and placed on the feeding component 3, so that the feeding component 3 transports the quartz plate to the annealing furnace 1 for annealing.

[0037] Example 2, using Figure 6-Figure 10 The annealing equipment for fused quartz plates of the present invention which is convenient for discharging is described as follows;

[0038] like Figure 6-Figure 10 The present invention shows an annealing device for a fused quartz plate that is convenient for discharging, based on the first embodiment;

[0039] The feeding component 3 includes a feeding table 31, one end of the feeding table 31 away from the inclined plate 32 is fixedly connected to the side of the annealing furnace 1, the side of the feeding table 31 is fixedly connected to the inclined plate 32, the inner side of the feeding table 31 is rotatably connected to the conveying mechanism 33, the inner side of the feeding table 31 is fixed with a contact mechanism 34, and the contact mechanism 34 is arranged at the bottom of the conveying mechanism 33; when the loading mechanism 64 clamps the quartz plate and places it on the feeding table 31, the conveying mechanism 33 is opened to convey the quartz plate to the annealing furnace 1 for subsequent annealing, and at the same time, when the conveying mechanism 33 conveys the quartz plate, since the conveying mechanism 33 contacts and moves with the bottom of the quartz plate, impurities on the quartz plate may leave residues in the equipment during the annealing process, increasing the cleaning and maintenance costs of the equipment. For example, solid residues produced by the decomposition of impurities may adhere to the heating element or the insulation material. , reducing the heating efficiency and thermal insulation performance, and the equipment needs to be cleaned and maintained regularly to ensure the normal operation of the annealing equipment. If there are impurities remaining on the quartz plate, the thermal conductivity of the impurities is usually different from that of quartz. For example, the thermal conductivity of metal impurities is generally higher than that of quartz. When these impurities exist, the local thermal conductivity of the quartz plate will be changed. During the annealing process, the heat transfer will be disturbed, resulting in uneven heating of the quartz plate. In this way, at the annealing temperature, the temperature difference of different parts of the quartz plate may exceed the expected range, affecting the stress elimination effect. The internal stress that should have been evenly eliminated may not be completely eliminated due to the local temperature being too high or too low, and even new stress may be generated in some parts, so that the quartz plate can be transported by the conveying mechanism 33. Through the contact mechanism 34, the contact mechanism 34 can clean the contact bottom surface of the quartz plate;

[0040] The contact mechanism 34 includes a contact plate 341, the side of the contact plate 341 is fixedly connected to the inner side of the feed table 31, the top of the contact plate 341 is fixedly connected to a contact frame 342, both sides of the contact frame 342 are slidably connected to rubber plates 343, the side of the rubber plate 343 away from the contact frame 342 is in contact with the side of the conveying mechanism 33, and both sides of the top of the contact frame 342 are fixedly connected to cleaning components 344; when the conveying mechanism 33 drives the quartz plate to move continuously, the cleaning component 344 continuously contacts and moves with the bottom of the quartz plate, so that the cleaning component 344 can clean the bottom of the quartz plate, and at the same time, A rubber plate 343 is provided against the side of the roller in the contact frame 342 and the conveying mechanism 33, so that when the roller rotates inside the feed table 31, the rubber plate 343 can move against the side of the roller, so that the rubber plate 343 can clean the side of the roller, thereby preventing impurities on the bottom contact surface of the quartz plate from adhering to the roller when the quartz plate is conveyed, thereby preventing some impurities attached to the roller from adhering to the quartz plate when the bottom of the quartz plate cleaned by the cleaning component 344 passes through the roller, thereby leaving residues at the bottom of the quartz plate, increasing the cleaning and maintenance costs of the equipment;

[0041] The cleaning assembly 344 includes a cleaning frame 3441, the bottom of the cleaning frame 3441 is slidably connected to the inner side of the contact frame 342, the inner side of the cleaning frame 3441 is rotatably connected to a cleaning roller 3442, the cleaning frame 3441 is provided with sliding grooves 3443 on both sides away from the cleaning roller 3442, the inner side of the sliding groove 3443 is slidably connected to a sliding shaft 3445, the top of the sliding shaft 3445 is fixedly connected to a sliding plate 3444, the side of the sliding plate 3444 is slidably connected to the inner side of the sliding groove 3443, the top of the sliding plate 3444 is fixedly connected to a cleaning block 3447, the sliding shaft 3445 is sleeved with a first spring 3446, the top of the first spring 3446 is fixedly connected to the bottom of the sliding plate 3444, and the bottom of the first spring 3446 is fixedly connected to the inner side of the sliding groove 3443; when the quartz plate is transported and moved by the conveying mechanism 33, when the bottom of the quartz plate passes through the cleaning When the cleaning rack 3441 is moved, the sliding plate 3444 drives the cleaning block 3447 to contact the bottom of the quartz plate, so that the cleaning block 3447 cleans the impurities adhering to the bottom of the quartz plate. At the same time, a cleaning roller 3442 is provided in the middle of the cleaning rack 3441, and the cleaning roller 3442 can clean and wipe the cleaning block 3447 on the cleaned area of ​​the quartz plate. When the cleaning block 3447 cleans the bottom of the quartz plate, the extrusion force between the cleaning block 3447 and the impurities adhering to the bottom of the quartz plate is greater than the tensile force of the first spring 3446, so that the cleaning block 3447 slides downward in the inner side of the sliding groove 3443 through the sliding plate 3444 and the sliding shaft 3445, so as to avoid excessive extrusion force between the cleaning block 3447 and the impurities adhering to the bottom of the quartz block, which will cause extrusion damage to the side of the cleaning block 3447.

[0042] The specific workflow is as follows:

[0043] During operation, the molten quartz plate is placed on the feeding component 3 through the connecting component 6, and the molten quartz plate is fed into the annealing furnace 1 through the feeding component 3. By closing the furnace door 4, the annealing furnace 1 is mainly composed of a furnace body, a heating element, a temperature control system and other parts. The furnace body is generally made of a high-temperature resistant steel shell, and the interior is lined with insulation materials such as ceramic fibers to reduce heat loss. The heating elements are mostly resistance wires, which are evenly distributed on both sides or the bottom of the furnace body. The molten quartz plate placed in the furnace is heated by thermal radiation. When the annealing furnace 1 is turned on, the current generates heat through the resistance wire, and the heat is transferred to the quartz plate by radiation. The temperature control system monitors the temperature in the furnace through temperature sensors such as thermocouples, and adjusts the power of the heating element according to the set annealing temperature curve. For example, at the beginning of annealing, the temperature gradually increases, and the power of the heating element is relatively large. ; When approaching the annealing temperature, the power is reduced to slowly raise the temperature to the target temperature, and then maintained for a period of time to allow the stress inside the quartz plate to be fully released. After the annealing work of the molten quartz plate is completed, the molten quartz plate in the annealing furnace 1 is moved to the cooling component 2 through the connecting component 6. The cooling component 2 is a combination of natural cooling and forced air cooling. After the annealing process is completed, the natural cooling method is first used to slowly cool the molten quartz plate in the furnace so that the internal structure gradually stabilizes. When the temperature drops to a certain level, the forced air cooling system is turned on. The forced air cooling system introduces cold air into the furnace by setting vents and fans in the cooling component 2 to accelerate the cooling process. This step-by-step cooling method can avoid new stress on the quartz plate caused by a sudden drop in temperature, thereby moving the cooled quartz plate to the discharge table 5 through the connecting component 6 for discharge work;

[0044] When the quartz plate is annealed, the second motor 643 is turned on, and the output end of the second motor 643 drives the third screw rod 641 to rotate inside the connecting rod 62, so that the sliding arm 642 moves inside the connecting rod 62. At the same time, the second electric hydraulic cylinder 644 is turned on, and the fixed housing 645 is driven by the output end of the second electric hydraulic cylinder 644 to move downward inside the sliding arm 642. At the same time, the third motor 646 inside the fixed housing 645 is turned on, and the output end of the third motor 646 drives the rotating block 647 to rotate, so that the rotating block 647 drives the clamping mechanism 648 to rotate, so that the placement position of the quartz plate at different angles is appropriately adjusted. After the quartz plate is clamped and fixed by the clamping mechanism 648, the quartz plate is clamped and placed on the feeding component 3, so that the feeding component 3 transports the quartz plate to the annealing furnace 1 for annealing.

[0045] After the annealing work on the quartz plate is completed, the first electric hydraulic cylinder 634 is turned on, and the output end of the first electric hydraulic cylinder 634 drives the connecting plate 636 to move inside the lower arm 631 through the connecting shaft 635, so that the height adjustment work can be carried out according to the quartz plates of different sizes and thicknesses, so that the side of the quartz plate can be properly clamped and fixed, and the dual-axis motor 639 is turned on, and the output end of the dual-axis motor 639 drives the two second screw rods 637 inside the connecting plate 636 to rotate, so that The clamping arm 638 is rotated on the second screw rod 637, so that the clamping arm 638 clamps and fixes the two sides of the quartz plate after cooling in the annealing furnace 1. By turning on the first motor 633, the first screw rod 632 is driven to rotate inside the connecting rod 62 through the output end of the first motor 633, so as to drive the clamped quartz plate to pull, so as to move the cooled quartz plate to the discharge table 5 for discharge, which can effectively avoid the mistakes and risks that may occur in manual unloading, and is suitable for large-scale automated production;

[0046] When the loading mechanism 64 clamps the quartz plate and places it on the feeding table 31, the conveying mechanism 33 is turned on to convey the quartz plate to the annealing furnace 1 for subsequent annealing. At the same time, when the conveying mechanism 33 conveys the quartz plate, since the conveying mechanism 33 moves in contact with the bottom of the quartz plate, impurities on the quartz plate may leave residues in the equipment during the annealing process, increasing the cleaning and maintenance costs of the equipment. For example, solid residues produced by the decomposition of impurities may adhere to the heating element or the insulation material, reducing the heating efficiency and insulation performance. The equipment needs to be cleaned and maintained regularly to ensure the normal operation of the annealing equipment. If there are impurities remaining on the quartz plate, the thermal conductivity of the impurities is usually Different from quartz, for example, the thermal conductivity of metal impurities is generally higher than that of quartz. When these impurities exist, the local thermal conductivity of the quartz plate will be changed. During the annealing process, the heat transfer will be disturbed, resulting in uneven heating of the quartz plate. In this way, at the annealing temperature, the temperature difference of different parts of the quartz plate may exceed the expected range, affecting the stress elimination effect. The internal stress that should be uniformly eliminated may not be completely eliminated due to the local temperature being too high or too low. Even new stress may be generated in some parts, so that the quartz plate can be in contact with the contact mechanism 34 when being transported by the conveying mechanism 33, so that the contact mechanism 34 can clean the contact bottom surface of the quartz plate;

[0047] When the conveying mechanism 33 drives the quartz plate to move continuously, the cleaning component 344 continuously contacts and moves with the bottom of the quartz plate, so that the cleaning component 344 can clean the bottom of the quartz plate. At the same time, a rubber plate 343 is provided on the contact frame 342 and the side of the roller in the conveying mechanism 33, so that when the roller rotates inside the feed table 31, the rubber plate 343 can move against the side of the roller, so that the rubber plate 343 can clean the side of the roller, thereby preventing impurities on the contact surface of the bottom of the quartz plate from adhering to the roller when the quartz plate is conveyed, thereby preventing some impurities attached to the roller from adhering to the quartz plate when the bottom of the quartz plate cleaned by the cleaning component 344 passes through the roller, thereby leaving residues at the bottom of the quartz plate, increasing the cleaning and maintenance costs of the equipment;

[0048] When the quartz plate is transported and moved by the conveying mechanism 33, when the bottom of the quartz plate passes through the cleaning rack 3441, the sliding plate 3444 drives the cleaning block 3447 to contact the bottom of the quartz plate, so that the cleaning block 3447 cleans the impurities adhered to the bottom of the quartz plate. At the same time, a cleaning roller 3442 is provided in the middle of the cleaning rack 3441, and the cleaning roller 3442 can clean and wipe the cleaning block 3447 on the cleaned area of ​​the quartz plate. When the cleaning block 3447 cleans the bottom of the quartz plate, the extrusion force between the cleaning block 3447 and the impurities adhered to the bottom of the quartz plate is greater than the tensile force of the first spring 3446, so that the cleaning block 3447 slides downward in the inner side of the sliding groove 3443 through the sliding plate 3444 and the sliding shaft 3445, thereby avoiding excessive extrusion force between the cleaning block 3447 and the impurities adhered to the bottom of the quartz block, which will cause extrusion damage to the side of the cleaning block 3447.

[0049] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention are implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. An annealing device for fused quartz plates that is easy to discharge, characterized in that: include: An annealing furnace (1), wherein furnace doors (4) are slidably connected to both sides of the annealing furnace (1), a feeding component (3) is fixedly connected to the side of the annealing furnace (1), a cooling component (2) is fixedly connected to the side of the annealing furnace (1) away from the feeding component (3), a discharge platform (5) is fixedly connected to the other side of the cooling component (2), and a connecting component (6) is fixedly connected to the top of the annealing furnace (1); A connecting component (6), the connecting component (6) is used to carry out a material feeding operation on the fused quartz plate after the annealing operation, and the bottom of the connecting component (6) is fixedly connected to the top of the annealing furnace (1); The connecting component (6) comprises a connecting column (61), the bottom of the connecting column (61) is fixedly connected to the top of the annealing furnace (1), the top of the connecting column (61) is fixedly connected to a connecting rod (62), one end of the connecting rod (62) is fixedly connected to a feeding mechanism (63), and the other end of the connecting rod (62) is fixedly connected to a feeding mechanism (64); The unloading mechanism (63) comprises a first screw rod (632), both ends of which are rotatably connected to the inner side of the connecting rod (62), a first motor (633) is fixedly connected to the side of the connecting rod (62), a unloading arm (631) is slidably connected to the inner side of the connecting rod (62), a first electric hydraulic cylinder (634) is fixedly connected to the inner side of the unloading arm (631), and an output end of the first electric hydraulic cylinder (634) is fixedly connected to the output end of the first electric hydraulic cylinder (634). A connecting shaft (635) is provided, the bottom of the connecting shaft (635) is fixedly connected to a connecting plate (636), both sides of the inner wall of the connecting plate (636) are rotatably connected to a second screw rod (637), a dual-axis motor (639) is fixedly connected to the middle of the inner side of the connecting plate (636), the output end of the dual-axis motor (639) is fixedly connected to one end of the second screw rod (637), and a clamping arm (638) is threadedly connected to the side of the second screw rod (637).

2. The annealing device for fused quartz plates that is easy to discharge according to claim 1, characterized in that: The output end of the first motor (633) is fixedly connected to one end of the first screw rod (632), the inner side of the discharge arm (631) is threadedly connected to the inner side of the first screw rod (632), and the side surface of the connecting plate (636) is slidably connected to the inner side of the discharge arm (631).

3. The annealing device for fused quartz plates that is easy to discharge according to claim 1, characterized in that: The feeding mechanism (64) comprises a third screw rod (641), both ends of which are rotatably connected to the inner side of the connecting rod (62), a sliding arm (642) is slidably connected to the inner side of the connecting rod (62), a second motor (643) is fixedly connected to the side of the connecting rod (62) away from the first motor (633), an output end of the second motor (643) is fixedly connected to one end of the third screw rod (641), a second electric hydraulic cylinder (644) is fixedly connected to the inner side of the sliding arm (642), a fixed housing (645) is fixedly connected to the output end of the second electric hydraulic cylinder (644), a third motor (646) is fixedly connected to the inner side of the fixed housing (645), a rotating block (647) is fixedly connected to the output end of the third motor (646), a clamping mechanism (648) is fixedly connected to the bottom of the rotating block (647).

4. The annealing device for fused quartz plates that is easy to discharge according to claim 3, characterized in that: The inner side of the sliding arm (642) is threadedly connected to the side of the third screw rod (641), the top of the rotating block (647) is rotatably connected to the bottom of the fixed shell (645), and the side of the fixed shell (645) is slidably connected to the inner side of the sliding arm (642).

5. The annealing device for fused quartz plates that is easy to discharge according to claim 1, characterized in that: The feeding component (3) comprises a feeding platform (31), a side surface of the feeding platform (31) is fixedly connected to an inclined plate (32), the inner side of the feeding platform (31) is rotatably connected to a conveying mechanism (33), the inner side of the feeding platform (31) is fixed with a contact mechanism (34), and the contact mechanism (34) is arranged at the bottom of the conveying mechanism (33).

6. The annealing device for fused quartz plates that is easy to discharge according to claim 5, characterized in that: The contact mechanism (34) comprises a contact plate (341), the side of the contact plate (341) is fixedly connected to the inner side of the feed table (31), the top of the contact plate (341) is fixedly connected to a contact frame (342), both sides of the contact frame (342) are slidably connected to rubber plates (343), and both sides of the top of the contact frame (342) are fixedly connected to cleaning components (344).

7. The annealing device for fused quartz plates that is easy to discharge according to claim 6, characterized in that: One end of the feed platform (31) away from the inclined plate (32) is fixedly connected to the side of the annealing furnace (1), and one side of the rubber plate (343) away from the contact frame (342) is in contact with the side of the conveying mechanism (33).

8. The annealing device for fused quartz plates that is easy to discharge according to claim 6, characterized in that: The cleaning assembly (344) comprises a cleaning frame (3441), the inner side of which is rotatably connected to a cleaning roller (3442), both sides of the cleaning frame (3441) away from the cleaning roller (3442) are provided with sliding grooves (3443), the inner side of the sliding groove (3443) is slidably connected to a sliding shaft (3445), the top of the sliding shaft (3445) is fixedly connected to a sliding plate (3444), the top of the sliding plate (3444) is fixedly connected to a cleaning block (3447), and the sliding shaft (3445) is sleeved with a first spring (3446).

9. The annealing device for fused quartz plates that is easy to discharge according to claim 8, characterized in that: The bottom of the cleaning frame (3441) is slidably connected to the inner side of the contact frame (342), the side of the sliding plate (3444) is slidably connected to the inner side of the sliding groove (3443), the top of the first spring (3446) is fixedly connected to the bottom of the sliding plate (3444), and the bottom of the first spring (3446) is fixedly connected to the inner side of the sliding groove (3443).

Citation Information

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