Evaporation source heating and cooling auxiliary device and method and vacuum evaporation equipment

Abstract

The invention relates to an evaporation source heating and cooling auxiliary device and method and vacuum evaporation equipment, and the device comprises a substrate which is made of a flexible temperature-resistant material capable of being curled; the heat insulation coating and the heat absorption coating both cover the surface, facing the linear evaporation source, of the substrate, and the area of the heat insulation coating and the area of the heat absorption coating account for half of the area of the substrate; wherein the emissivity epsilon of the heat insulation coating is smaller than 0.15, and the absorptivity alpha of the heat absorption coating is larger than 0.8. According to the invention, the switching between the heat insulation coating and the heat absorption coating can be realized without shutdown, and the shutdown filling time of the equipment after the material consumption is finished is reduced, so that the overall production efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the field of vacuum evaporation technology, and in particular to an evaporation source temperature raising and lowering auxiliary device, method and vacuum evaporation equipment. Background Art

[0002] As a physical vapor deposition method, vacuum evaporation technology plays an important role in the preparation process of solar cells, electronic devices, optical films and other fields. Especially in the manufacture of perovskite solar cells, vacuum evaporation technology is widely used to deposit perovskite absorption layers, and achieves efficient photoelectric conversion by forming nano-scale films on conductive substrates. With the rapid development of the solar energy industry, vacuum evaporation perovskite solar cells have shown huge market potential and application prospects due to their high efficiency and low cost advantages.

[0003] However, the existing vacuum evaporation technology faces a series of challenges in practical applications. First, the evaporation process needs to accurately control multiple parameters such as temperature, vacuum degree and evaporation rate to ensure the quality and crystallinity of the film. Secondly, in order to achieve large-scale industrial production, improve production efficiency and reduce costs, the existing technology usually uses a linear evaporation source to evaporate perovskite materials. However, due to the large difference in evaporation temperature of different materials, the temperature control is unstable during the co-evaporation process, which in turn affects the stability of the evaporation rate and the uniformity of the material film formation. Therefore, during the evaporation process, the outside of the evaporation source needs to be insulated. In the prior art, a reflector is added between the crucible and the evaporation source nozzle to achieve insulation. The reflector will reflect the radiant heat to the crucible, increasing the heating thermal efficiency. However, when the evaporation process is completed and cooling is required, the reflector will affect the cooling effect of the water cooling system. The cooling time of the evaporation source is too long, which increases the maintenance cycle and reduces production efficiency.

[0004] In addition, existing evaporation devices need to be shut down for refilling after the material is consumed. The high evaporation temperature requirements of perovskite materials and commonly used organic light-emitting materials make the cooling time of the evaporation source too long, which increases the maintenance cycle and reduces production efficiency.

[0005] In response to the above problems, although vacuum evaporation equipment has significant advantages in multilayer film preparation, material compatibility, surface performance improvement, and environmental protection and high efficiency, its efficiency and stability in the continuous production process still need to be improved. Summary of the invention

[0006] To this end, the technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide an evaporation source temperature rise and fall auxiliary device, method and vacuum evaporation equipment, which can realize the switching of thermal insulation coating and heat absorption coating without stopping the equipment, reducing the equipment's downtime and filling time after the material is consumed, thereby improving the overall production efficiency.

[0007] In the first aspect, in order to solve the above technical problems, the present invention provides an evaporation source temperature rise and fall auxiliary device, comprising: A substrate, wherein the substrate is a rollable, flexible, temperature-resistant material; The thermal insulation coating and the heat absorption coating both cover the surface of the substrate facing the linear evaporation source, and the thermal insulation coating and the heat absorption coating each occupy half of the substrate area; wherein the emissivity ε of the thermal insulation coating is less than 0.15, and the absorptivity α of the heat absorption coating is greater than 0.8.

[0008] In one embodiment of the present invention, the thermal insulation coating may be a CeO2 / K2Ti6O13 silicate-based high temperature resistant low emissivity coating.

[0009] In one embodiment of the present invention, the heat absorbing coating is an Al-Al2O3 metal ceramic composite coating.

[0010] In one embodiment of the present invention, the heat-insulating coating and the heat-absorbing coating have a temperature resistance greater than 600° C. The heat-insulating coating and the heat-absorbing coating can work for a long time in a high-temperature environment, thereby improving the durability and service life of the equipment.

[0011] In one embodiment of the present invention, the length of the substrate is at least twice the circumference of the linear evaporation source.

[0012] In one embodiment of the present invention, the two ends of the substrate are respectively wound on a driving shaft 1 and a driving shaft 2, the driving shaft 1 is driven by a motor 1, and the driving shaft 2 is driven by a motor 2. At least three driven shafts are provided on the inner side of the substrate, which cooperate with the driving shaft 1 and the driving shaft 2 to support the substrate into an open annular structure, and the annular structure is wrapped around the linear evaporation source to achieve heat insulation or heat absorption between the linear evaporation source and the water cooling plate.

[0013] In one embodiment of the present invention, the first driving shaft, the second driving shaft and the driven shaft are all arranged on a supporting frame, and the supporting frame is located outside the linear evaporation source.

[0014] In one embodiment of the present invention, a plurality of through holes are provided at the end of the base, and the two ends of the base are connected to the first driving shaft and the second driving shaft respectively by screws.

[0015] In one embodiment of the present invention, a monitoring device is provided on the support frame for monitoring whether the thermal insulation coating and the heat absorption coating on the substrate are delivered to the right place.

[0016] In a second aspect, in order to solve the above technical problem, the present invention provides an evaporation source temperature rise and fall method, which is implemented by using the evaporation source temperature rise and fall auxiliary device described in the first aspect, and specifically includes the following steps: Control the motor 1 of the active axis 1 to return to the origin, record the current position of the motor 1 of the active axis 1 as the origin 1, and the current position of the motor 2 of the active axis 2 as the origin 2; The second motor drives the second driving shaft to rotate clockwise, so that the heat-absorbing coating on the substrate is completely rolled onto the second driving shaft, and the heat-insulating coating is stretched around the linear evaporation source; Record the current motor position 1 of active axis 1 as heat insulation position 1, and the current motor position 2 of active axis 2 as heat insulation position 2; The driving motor 1 drives the driving shaft 1 to rotate clockwise, and the driving shaft 2 to rotate counterclockwise, so that the heat insulation coating is completely rolled onto the driving shaft 1, so that the heat absorption coating on the substrate is stretched around the linear evaporation source; the current position of the motor 1 of the driving shaft 1 is recorded as the heat absorption position 1, and the current position of the motor 2 of the driving shaft 2 is recorded as the heat absorption position 2; When the linear evaporation source is in a heating working state, by rotating the driving shaft 1 and the driving shaft 2, when the position of the motor 1 of the driving shaft 1 reaches the heat insulation position 1, and the position of the motor 2 of the driving shaft 2 reaches the heat insulation position 2, the two motors stop running. At this time, the heat insulation coating is completely wrapped between the water cooling plate and the linear evaporation source, which is used to reduce the radiation heat transfer in the vacuum and improve the stability of the evaporation rate; When the linear evaporation source is in a cooling state, by rotating the driving shaft one and the driving shaft two, when the position of the motor one of the driving shaft one reaches the heat absorption position one, and the position of the motor two of the driving shaft two reaches the heat absorption position two, the two motors stop running, so that the heat absorption coating on the substrate is completely wrapped between the water cooling plate and the linear evaporation source, thereby accelerating the heat transfer between the linear evaporation source and the water cooling plate and reducing the cooling time.

[0017] In a third aspect, in order to solve the above-mentioned technical problem, the present invention provides a vacuum evaporation equipment, including the evaporation source lifting auxiliary device described in the first aspect.

[0018] The above technical solution of the present invention has the following beneficial effects compared with the prior art: The novel evaporation source heating and cooling auxiliary device described in the present invention can reduce the influence of temperature on the evaporation source by designing a heat-insulating and heat-absorbing coating, so that the temperature fluctuation of the evaporation source is smaller and easier to control; when the evaporation source is heated up or cooled down, there is no need to stop the machine, and the position of the heat-insulating and heat-absorbing materials can be adjusted in real time, the heat transfer process is optimized, the stability of the evaporation rate is improved, and the downtime and filling time of the equipment after the material is consumed is reduced, thereby improving the overall production efficiency; and the rollable substrate can adapt to linear evaporation sources of different lengths, increasing the flexibility of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to make the contents of the present invention more clearly understood, the present invention is further described in detail below based on specific embodiments of the present invention in conjunction with the accompanying drawings.

[0020] Figure 1 It is a structural schematic diagram of the evaporation source temperature raising and lowering auxiliary device in a preferred embodiment of the present invention; Figure 2 Schematic diagram of three states of the heat insulating material and the heat absorbing material on the substrate in the present invention; Figure 3 It is a schematic diagram of the structure of the driving shaft and the base in the present invention; Figure 4 It is a schematic diagram of the connection between the driving shaft 1 and the motor 1 in the present invention; Figure 5 This is a comparison diagram of the effects of using a heat-insulating coating and not using a heat-insulating coating in the present invention; Figure 6 It is a comparison diagram of the effects of using a heat absorbing coating and not using a heat absorbing coating in the present invention.

[0021] Explanation of the reference numerals in the drawings in the specification: 1. substrate; 11. thermal insulation coating; 12. heat absorption coating; 2. driving shaft one; 3. driving shaft two; 4. driven shaft; 5. motor one; 6. coupling; 100. water cooling plate; 200. linear evaporation source. DETAILED DESCRIPTION

[0022] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention. Embodiment 1

[0023] Reference Figure 1-4 As shown, the present invention provides an evaporation source temperature raising and lowering auxiliary device, comprising: A substrate 1, wherein the substrate 1 is a rollable, flexible, temperature-resistant material; The thermal insulation coating 11 and the heat absorption coating 12 both cover one side of the surface of the substrate 1 facing the linear evaporation source 200, and the thermal insulation coating 11 and the heat absorption coating 12 each occupy half of the area of ​​the substrate 1; wherein the emissivity ε of the thermal insulation coating 11 is less than 0.15, and the absorptivity α of the heat absorption coating 12 is greater than 0.8.

[0024] Preferably, the thermal insulation coating 11 may be a CeO2 / K2Ti6O13 silicate-based high temperature resistant low emissivity coating.

[0025] Preferably, the heat absorbing coating 12 is an Al-Al2O3 metal ceramic composite coating.

[0026] The heat-insulating coating 11 and the heat-absorbing coating 12 in this embodiment have a temperature resistance greater than 600° C. The heat-insulating coating 11 and the heat-absorbing coating 12 can work for a long time in a high-temperature environment, thereby improving the durability and service life of the equipment.

[0027] In this embodiment, the length of the substrate 1 is at least twice the circumference of the linear evaporation source 200.

[0028] Further, the two ends of the base 1 are respectively wound on the driving shaft 1 2 and the driving shaft 2 3, the driving shaft 1 2 is driven by the motor 1 5, and the driving shaft 2 3 is driven by the motor 2. The inner side of the base 1 is provided with at least three driven shafts 4, which cooperate with the driving shaft 1 2 and the driving shaft 2 3 to support the base 1 into an open annular structure, and the annular structure is wrapped around the linear evaporation source 200 to achieve heat insulation or heat absorption between the linear evaporation source 200 and the water-cooled plate 100. Specifically, the driving shaft 1 2 is connected to the motor 1 5 through a coupling 6, and the driving shaft 2 3 is connected to the motor 2 through a coupling 6.

[0029] In this embodiment, the driving shaft 1 2 , the driving shaft 2 3 and the driven shaft 4 are all arranged on a supporting frame, and the supporting frame is located outside the linear evaporation source 200 .

[0030] Furthermore, a plurality of through holes 13 are provided at the end of the base 1 , and the two ends of the base 1 are connected to the driving shaft 1 2 and the driving shaft 2 3 respectively by screws.

[0031] In this embodiment, the support frame is provided with a monitoring device for monitoring whether the heat-insulating coating 11 and the heat-absorbing coating 12 on the substrate 1 are delivered to the right position. Embodiment 2

[0032] In order to solve the above technical problems, the present invention provides a method for heating and cooling an evaporation source, which is implemented by using the evaporation source heating and cooling auxiliary device described in the first embodiment, and specifically includes the following steps: Control the motor 15 of the active axis 12 to return to the origin, record the current position of the motor 15 of the active axis 12 as the origin 1, and the current position of the motor 2 of the active axis 23 as the origin 2; The second motor drives the second driving shaft to rotate clockwise, so that the heat absorbing coating 12 on the substrate 1 is completely rolled onto the second driving shaft 3, and the heat insulating coating 11 is stretched around the linear evaporation source 200; Record that the current position of the motor 15 of the active shaft 12 is the heat insulation position 1, and the current position of the motor 2 of the active shaft 2 is the heat insulation position 2; The driving motor 15 drives the driving shaft 12 to rotate clockwise, and the driving shaft 23 to rotate counterclockwise, so that the heat insulation coating is completely rolled onto the driving shaft 12, so that the heat absorption coating on the substrate 1 is stretched around the linear evaporation source 100; the current position of the motor 15 of the driving shaft 12 is recorded as the heat absorption position 1, and the current position of the motor 2 of the driving shaft 23 is recorded as the heat absorption position 2; When the linear evaporation source 200 is in a heating working state, by rotating the driving shaft 1 and the driving shaft 2, when the position of the motor 1 5 of the driving shaft 1 2 reaches the heat insulation position 1, and the position of the motor 2 of the driving shaft 2 3 reaches the heat insulation position 2, the two motors stop running, and at this time, the heat insulation coating 11 is completely wrapped between the water cooling plate 100 and the linear evaporation source 200, which is used to reduce the radiation heat transfer in the vacuum and improve the stability of the evaporation rate; When the linear evaporation source 200 is in a cooling state, by rotating the driving shaft 1 2 and the driving shaft 2 3, when the position of the motor 1 5 of the driving shaft 1 2 reaches the heat absorption position 1, and the position of the motor 2 of the driving shaft 2 3 reaches the heat absorption position 2, the two motors stop running, so that the heat absorption coating 12 on the substrate 1 is completely wrapped between the water-cooled plate 100 and the linear evaporation source 200, thereby accelerating the heat transfer between the linear evaporation source 200 and the water-cooled plate 100 and reducing the cooling time.

[0033] In this embodiment, the detection of the heat absorption position and the heat insulation position is realized in the following two ways: Method 1: An encoder is set on the motor, and the position of the motor is detected by the encoder. The position of the object is determined by the detected position of the motor, thereby achieving positioning. Specifically, when the encoder detects the corresponding spectrum, it transmits the signal to the motor, and the motor translates the code into 01 or 02. When 01 changes to 02 or when 02 changes to 01, the motor stops rotating immediately.

[0034] Method 2: A touch point is set between the heat-insulating coating 11 and the heat-absorbing coating 12, and limit sensors are set at the vertical and horizontal position points of the active axis 1 2 and the active axis 2 3 to detect the boundary between the two materials.

[0035] like Figure 5 and 6 A comparison diagram of the effects of using an evaporation source temperature rise and fall auxiliary device and not using the evaporation source temperature rise and fall auxiliary device is shown; it can be seen from the figure that with the heat insulation device compared with without the heat insulation device, the temperature impact between the linear evaporation sources 100 is small, the temperature fluctuation of the linear evaporation source 100 is small, and it is easier to stabilize; with the heat absorption device compared with without the heat absorption device, the time required for the temperature of the linear evaporation source 100 to reach the cooling target temperature is shorter, and it is easier to cool down.

[0036] This patent solution coats a material with good heat absorption or heat insulation effect on a flexible plate, and uses a simple structure in the limited space of the vacuum evaporation chamber to achieve effective replacement of heat absorption and heat insulation. It overcomes the problem of adding a reflector between the crucible and the evaporation source nozzle to achieve heat preservation in the prior art. The reflector will reflect the radiant heat received to the crucible to increase the heating thermal efficiency, but when the evaporation process is completed and cooling is required, the reflector will affect the cooling effect of the water cooling system.

[0037] Embodiment 3 In order to solve the above technical problems, the present invention provides a vacuum evaporation equipment, including the evaporation source lifting auxiliary device described in the first embodiment.

[0038] Obviously, the above embodiments are merely examples for clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the protection scope of the invention.

Claims

1. An evaporation source temperature raising and lowering auxiliary device, characterized in that: include: A substrate, wherein the substrate is a rollable, flexible, temperature-resistant material; The thermal insulation coating and the heat absorption coating both cover the side of the substrate facing the linear evaporation source, the surface of the substrate, and the thermal insulation coating and the heat absorption coating respectively occupy half of the area of ​​the substrate; wherein the emissivity ε of the thermal insulation coating is less than 0.15, and the absorptivity α of the heat absorption coating is greater than 0.

8.

2. The evaporation source temperature raising and lowering auxiliary device according to claim 1, characterized in that: The thermal insulation coating is a CeO2 / K2Ti6O13 silicate-based high-temperature resistant and low-emissivity coating.

3. The evaporation source temperature raising and lowering auxiliary device according to claim 1, characterized in that: The heat absorbing coating is an Al-Al2O3 metal ceramic composite coating.

4. The evaporation source temperature raising and lowering auxiliary device according to claim 1, characterized in that: The heat-insulating coating and the heat-absorbing coating have a temperature resistance greater than 600°C.

5. The evaporation source temperature raising and lowering auxiliary device according to claim 1, characterized in that: The length of the substrate is at least twice the circumference of the linear evaporation source.

6. The evaporation source temperature raising and lowering auxiliary device according to claim 1, characterized in that: The two ends of the base are respectively wound on the driving shaft 1 and the driving shaft 2, the driving shaft 1 is driven by the motor 1, and the driving shaft 2 is driven by the motor 2. At least three driven shafts are provided on the inner side of the base, which cooperate with the driving shaft 1 and the driving shaft 2 to support the base into an open annular structure. The annular structure is wrapped around the linear evaporation source to achieve heat insulation or heat absorption between the linear evaporation source and the water cooling plate.

7. The evaporation source temperature raising and lowering auxiliary device according to claim 6, characterized in that: The end of the base is provided with a plurality of through holes, and the two ends of the base are connected to the first driving shaft and the second driving shaft respectively through screws.

8. The evaporation source temperature raising and lowering auxiliary device according to claim 7, characterized in that: The support frame is provided with a monitoring device for monitoring whether the heat-insulating coating and the heat-absorbing coating on the substrate are delivered to the right place.

9. A method for increasing or decreasing the temperature of an evaporation source, characterized in that: The method is implemented by using the evaporation source temperature rise and fall auxiliary device as described in claims 1 to 8, and specifically comprises the following steps: Control the motor 1 of the active axis 1 to return to the origin, record the current position of the motor 1 of the active axis 1 as the origin 1, and the current position of the motor 2 of the active axis 2 as the origin 2; The second motor drives the second driving shaft to rotate clockwise, so that the heat-absorbing coating on the substrate is completely rolled onto the second driving shaft, and the heat-insulating coating is stretched around the linear evaporation source; Record the current motor position 1 of active axis 1 as heat insulation position 1, and the current motor position 2 of active axis 2 as heat insulation position 2; The driving motor 1 drives the driving shaft 1 to rotate clockwise, and the driving shaft 2 to rotate counterclockwise, so that the heat insulation coating is completely rolled onto the driving shaft 1, so that the heat absorption coating on the substrate is stretched around the linear evaporation source; the current position of the motor 1 of the driving shaft 1 is recorded as the heat absorption position 1, and the current position of the motor 2 of the driving shaft 2 is recorded as the heat absorption position 2; When the linear evaporation source is in a heating working state, by rotating the driving shaft 1 and the driving shaft 2, when the position of the motor 1 of the driving shaft 1 reaches the heat insulation position 1, and the position of the motor 2 of the driving shaft 2 reaches the heat insulation position 2, the two motors stop running. At this time, the heat insulation coating is completely wrapped between the water cooling plate and the linear evaporation source, which is used to reduce the radiation heat transfer in the vacuum and improve the stability of the evaporation rate; When the linear evaporation source is in a cooling state, by rotating the driving shaft one and the driving shaft two, when the position of the motor one of the driving shaft one reaches the heat absorption position one, and the position of the motor two of the driving shaft two reaches the heat absorption position two, the two motors stop running, so that the heat absorption coating on the substrate is completely wrapped between the water cooling plate and the linear evaporation source, thereby accelerating the heat transfer between the linear evaporation source and the water cooling plate and reducing the cooling time.

10. A vacuum evaporation device, characterized in that: The invention comprises the evaporation source lifting auxiliary device as described in any one of claims 1 to 8.

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