Device for preventing friction clamping stagnation of graphite air floatation tray

Abstract

The invention relates to a device for preventing friction clamping stagnation of a graphite air floatation tray, which comprises a lower half-moon piece, a central rotating shaft and the air floatation tray, and the cross section of the lower half-moon piece is arranged to be a lower semicircular ring; a circular tray groove is formed in the top surface of the lower half-moon piece, and a first circular groove, a second circular groove and a through hole which are of stepped hole structures are formed in the bottom surface of the tray groove; a chamfer is arranged at the top of the first circular groove, and a through hole type exhaust hole is formed in the chamfer; an air inlet is formed in the side face of the top wall of the lower half-moon piece, and an air outlet is formed in the tray groove and connected with the air inlet. The central rotating shaft is in a circular tube shape; the central rotating shaft is fixedly arranged in the second circular groove; the air floatation tray is in a disc shape, the bottom of the air floatation tray is provided with an annular protrusion, and the protrusion is rotationally arranged in the first circular groove and rotationally arranged outside the central rotating shaft in a sleeving mode; particle powder can be discharged through the exhaust holes, and the phenomenon that the tray cannot rotate due to friction between the tray and the next half moon is avoided.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor silicon carbide growth, and in particular relates to a device for preventing a graphite air floating tray from being stuck due to friction. Background Art

[0002] At present, in the field of semiconductor silicon carbide growth, the lower half of the horizontal silicon carbide epitaxial graphite accessory mainly functions to suspend and rotate the graphite tray connected to it through gas.

[0003] Since the tray is suspended at a height of about 10-15μm, and there will be some errors in the processing of graphite parts, especially near the center axis of the tray, and when the rotation stops, the air flotation disk will rub against the lower half of the moon and some granular powder will appear; because the air flow pores flow outward, the inner circle between the pores and the center axis gradually accumulates to form a lot of granular powder. These factors will cause friction between the tray and the lower half of the moon. In severe cases, it will affect the tray's inability to rotate, resulting in process failure. Summary of the invention

[0004] In response to at least one of the problems in the above-mentioned prior art, the purpose of the present invention is to provide a device to prevent friction and jamming of the graphite flotation tray, which can avoid the gradual accumulation of a lot of granular powder in the inner circle between the pores and the central shaft, resulting in friction between the tray and the lower half of the moon, which in severe cases will affect the phenomenon that the tray cannot rotate.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A device for preventing a graphite air flotation tray from frictional jamming, comprising:

[0007] A lower half-moon member, wherein the cross section of the lower half-moon member is set to a lower semicircular ring; a circular tray groove is provided on the top surface of the lower half-moon member, and a first circular groove, a second circular groove and a through hole of a step hole structure are provided on the bottom surface of the tray groove; a chamfer is provided on the top of the first circular groove, and a through hole-type exhaust hole is provided at the chamfer; an air inlet hole is provided on the side surface of the top wall of the lower half-moon member, and an air outlet hole is provided at the tray groove, and the air inlet hole is connected to the air outlet hole;

[0008] The central rotating shaft is configured as a circular tube; the central rotating shaft is fixedly disposed in the second circular groove;

[0009] The air flotation tray is set in a disc shape, and a circular protrusion is set on the bottom. The protrusion is rotatably set in the first circular groove and rotatably sleeved on the outside of the central rotating shaft.

[0010] Preferably, the air outlet is configured as an inclined hole, and the airflow blown out of the inclined hole can drive the air flotation tray to rotate; the inclined hole is configured as a vertical hole, and is inclined from bottom to top along the rotation direction of the air flotation tray, and the inclination angle ranges from 30° to 60°.

[0011] Preferably, the number of the air outlet holes is at least two, and the plurality of air outlet holes are evenly arranged along the circumference.

[0012] Preferably, the exhaust hole is configured as a vertical hole.

[0013] Preferably, the number of the exhaust holes is at least two, and the plurality of exhaust holes are evenly arranged along the circumference.

[0014] Preferably, the chamfer is configured to be conical.

[0015] Preferably, the central shaft is fixed in the second circular groove by interference fit.

[0016] Preferably, the first circular groove, the second circular groove and the through hole are nested in sequence and opened at the center position of the bottom surface of the tray groove.

[0017] Preferably, the protrusion is arranged at the center of the bottom surface of the air floating tray.

[0018] Preferably, a dust removal groove is provided on the bottom surface of the air flotation tray.

[0019] The present invention adopts the above technical solution, which has the following advantages:

[0020] The device for preventing the graphite flotation tray from frictionally jamming is provided by the present invention. By arranging a chamfer on the lower half moon piece and opening an exhaust hole at the chamfer, particulate dust can be effectively discharged through the exhaust hole, thereby reducing the phenomenon of being unable to rotate due to friction between the flotation tray and the lower half moon piece caused by factors such as processing errors and accumulation of particulate dust. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic structural diagram of a device for preventing friction and jamming of a graphite flotation tray provided in a first embodiment of the present invention.

[0022] Figure 2 It is a three-dimensional exploded view from the first perspective of the device for preventing friction and jamming of a graphite flotation tray provided in the first embodiment of the present invention.

[0023] Figure 3 It is a three-dimensional exploded view from a second perspective of the device for preventing friction and jamming of a graphite flotation tray provided in the first embodiment of the present invention.

[0024] Figure 4It is a top view of the lower half-moon member of the device for preventing friction and jamming of a graphite flotation tray provided in the first embodiment of the present invention.

[0025] Figure 5 yes Figure 4 Longitudinal cross-section of the center of the middle and lower half moon pieces.

[0026] Markings in the accompanying drawings:

[0027] 1 is the lower half moon, 110 is the tray groove, 111 is the first circular groove, 112 is the second circular groove, 113 is the through hole, 114 is the chamfer, 101 is the air inlet, 102 is the air outlet, 103 is the exhaust hole, 2 is the central shaft, 3 is the air flotation tray, 310 is the protrusion, and 320 is the dust exhaust groove. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0029] In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower", "front", "rear", etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the system or component referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention. The direction of the arrow in the figure represents the direction of liquid flow.

[0030] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "assembly", "setting", and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] The invention provides a device for preventing a graphite flotation tray from being stuck due to friction. By opening an exhaust hole on a lower half moon, granular powder can be discharged through the exhaust hole, thereby avoiding the phenomenon that the flotation tray cannot rotate due to friction between the tray and the lower half moon.

[0032] The embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0033] Embodiment 1

[0034] Please refer to Figures 1 to 5 As shown, a device for preventing a graphite air flotation tray from being stuck by friction provided in this embodiment comprises a lower half-moon member 1, a central rotating shaft 2 and an air flotation tray 3, wherein the cross section of the lower half-moon member 1 is arranged in a lower semicircular ring shape; a circular tray groove 110 is provided on the top surface of the lower half-moon member 1, and a first circular groove 111, a second circular groove 112 and a through hole 113 of a step hole structure are provided on the bottom surface of the tray groove 110; a chamfer 114 is provided on the top of the first circular groove 111, and a through hole 113 is provided at the chamfer 114 There is a through-hole type exhaust hole 103; an air inlet hole 101 is opened on the side of the top wall of the lower semi-moon member 1, and an air outlet hole 102 is opened at the tray groove 110, and the air inlet hole 101 is connected to the air outlet hole 102; the central rotating shaft 2 is configured as a circular tube; the central rotating shaft 2 is fixedly set in the second circular groove 112; the air floating tray 3 is configured as a disc and a circular protrusion 310 is set at the bottom, and the protrusion 310 is rotatably set in the first circular groove 111, and is rotatably sleeved on the outside of the central rotating shaft 2.

[0035] Among them, the lower half-moon member 1 and the air flotation tray 3 are both configured as graphite members. The contact surface between the lower half-moon member 1 and the bottom surface of the air flotation tray 3 is a whole plane, and the air flotation tray 3 and the lower half-moon member 1 are fixedly connected and rotated through the central shaft 2. The gas flows into the air outlet 102 through the air inlet 101, and then flows out through the air outlet 102 to between the lower half-moon member 1 and the air flotation tray 3, and forms an air film with a thickness of about 10-15μm, so that the air flotation tray 3 is suspended and rotated. However, due to factors such as graphite processing accuracy and accumulation of particle dust, the phenomenon of the air flotation tray 3 being unable to rotate may occur. For this reason, in the device for preventing the friction and jamming of the graphite air flotation tray of this embodiment, a chamfer 114 is set at the top of the first circular groove 111, and a through-hole type exhaust hole 103 is opened at the chamfer 114, so that the phenomenon of being unable to rotate caused by friction between the air flotation tray 3 and the lower half-moon member 1 caused by processing errors and accumulation of particle dust can be effectively reduced through the exhaust hole 103.

[0036] When the air-floating tray 3 is suspended and rotated under the action of airflow, the top of the central shaft 2 is rotated and set in the protrusion 310, so that the central shaft 2 can fix the lateral position of the air-floating tray 3 to prevent the air-floating tray 3 from sliding laterally during suspension and rotation.

[0037] Please refer to Figure 4 and Figure 5 As shown, specifically, the air outlet hole 102 is set as an inclined hole, so as to drive the air flotation tray 3 to maintain suspension and rotation by blowing out an inclined gas flow, such as argon gas, from the inclined hole.

[0038] Please refer to Figure 2 , Figure 4 and Figure 5 As shown, the air outlet 102 is opened on the bottom surface of the tray groove 110 and is located outside the first circular groove 111. The inclined hole is set as a vertical hole and is inclined from bottom to top along the rotation direction of the air flotation tray 3. The inclination angle ranges from 30° to 60°, wherein the rotation effect of the air flotation tray 3 is best when the inclination angle is 45°, which is conducive to the airflow blown out of the inclined hole to drive the air flotation tray 3 to rotate. The cross section of the inclined hole can be set to a circle.

[0039] Specifically, at least two air outlet holes 102 are provided, and the plurality of air outlet holes 102 are evenly arranged along the circumference.

[0040] For example, three air outlet holes 102 are provided, and the three air outlet holes 102 are evenly arranged along the circumference on the outer side of the first circular groove 111 .

[0041] Specifically, the exhaust hole 103 is set as a vertical hole. There are at least two exhaust holes 103, and the plurality of exhaust holes 102 are evenly arranged along the circumference.

[0042] For example, three exhaust holes 103 are provided, and the three exhaust holes 103 are evenly arranged along the circumference.

[0043] Please refer to Figures 1 to 5 As shown, the air inlet hole 101 can be set as a transverse hole.

[0044] Please refer to Figure 4 and Figure 5 As shown, specifically, the central shaft 2 is fixed in the second circular groove 112 by interference fit. The first circular groove 111, the second circular groove 112 and the through hole 113 are nested in sequence and opened at the center of the bottom surface of the tray groove 110. The protrusion 310 is set at the center of the bottom surface of the air floating tray 3.

[0045] The tray groove 110 may be provided at the center of the top surface of the lower half-moon member 1. That is, the top surface of the lower half-moon member 1, the tray groove 110, the chamfer 114, the first circular groove 111, the second circular groove 112, the through hole 113, the central shaft 2, the air-floating tray 3 and the vertical center axis of the protrusion 310 all coincide.

[0046] Please refer to Figure 2 , Figure 4 and Figure 5 As shown, specifically, the chamfer 114 is configured to be conical.

[0047] Among them, the diameter of the chamfer 114 can be set to 44-48mm, and the side inclination angle of the chamfer 114 can be set to 10°, that is, the angle between the side of the chamfer 114 and its vertical center axis can be set to 10°, thereby effectively reducing the friction between the air floating tray 3 and the center position of the lower semi-moon part 1 caused by processing errors, resulting in the inability to rotate.

[0048] The distance between the vertical center axis of the exhaust hole 103 and the inner edge of the chamfer 114 may be set to 1 mm.

[0049] Please refer to Figure 3 As shown, specifically, a dust discharge groove 320 is provided on the bottom surface of the air flotation tray 3 , and the dust particles are discharged through the dust discharge groove 320 .

[0050] Among them, the dust exhaust groove 320 can be set to at least two, and can be set to a long strip groove. Multiple dust exhaust grooves 320 can be arranged in a divergent shape with the center of the air flotation tray 3 as the center. The dust at the bottom of the air flotation tray 3 can be discharged through the dust exhaust groove 320, which has a dust exhaust function. At the same time, the dust exhaust groove 320 also has an air flow guide to assist the rotation of the air flotation tray 3. The dust exhaust groove 320 is an oblique groove, and its inclination angle is consistent with the projection direction of the air flow of the air outlet 102 on the air flotation tray 3, which can more effectively resist the rotation of the air flotation tray 3.

[0051] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A device for preventing friction and jamming of a graphite flotation tray, characterized in that: include: A lower half-moon member (1), wherein the cross section of the lower half-moon member (1) is arranged in the shape of a lower semicircular ring; a circular tray groove (110) is provided on the top surface of the lower half-moon member (1), and a first circular groove (111), a second circular groove (112) and a through hole (113) of a step hole structure are provided on the bottom surface of the tray groove (110); a chamfer (114) is provided on the top of the first circular groove (111), and a through hole-type exhaust hole (103) is provided at the chamfer (114); an air inlet (101) is provided on the side surface of the top wall of the lower half-moon member (1), and an air outlet (102) is provided at the tray groove (110), and the air inlet (101) is connected to the air outlet (102); The central rotating shaft (2) is configured to be in the shape of a circular tube; the central rotating shaft (2) is fixedly disposed in the second circular groove (112); The air flotation tray (3) is arranged in a disc shape, and a circular protrusion (310) is arranged at the bottom. The protrusion (310) is rotatably arranged in the first circular groove (111) and rotatably sleeved on the outside of the central rotating shaft (2).

2. The device for preventing friction and jamming of a graphite flotation tray according to claim 1, characterized in that: The air outlet hole (102) is configured as an inclined hole, and the airflow blown out of the inclined hole can drive the air flotation tray (3) to rotate; the inclined hole is configured as a vertical hole, and is inclined from bottom to top along the rotation direction of the air flotation tray, and the inclination angle ranges from 30° to 60°.

3. The device for preventing friction and jamming of a graphite flotation tray according to claim 2, characterized in that: The number of the air outlet holes (102) is at least two, and the plurality of air outlet holes (102) are evenly arranged along the circumference.

4. The device for preventing friction and jamming of a graphite flotation tray according to claim 1, characterized in that: The exhaust hole (103) is configured as a vertical hole.

5. The device for preventing friction and jamming of a graphite flotation tray according to claim 1, characterized in that: The number of the exhaust holes (103) is at least two, and the plurality of exhaust holes (102) are evenly arranged along the circumference.

6. The device for preventing friction and jamming of a graphite flotation tray according to claim 1, characterized in that: The chamfer (114) is configured to be conical.

7. The device for preventing friction and jamming of a graphite flotation tray according to claim 1, characterized in that: The central rotating shaft (2) is fixed in the second circular groove (112) by interference fit.

8. The device for preventing friction and jamming of a graphite flotation tray according to claim 1, characterized in that: The first circular groove (111), the second circular groove (112) and the through hole (113) are nested in sequence and are opened at the center position of the bottom surface of the tray groove (110).

9. The device for preventing friction and jamming of a graphite flotation tray according to claim 1, characterized in that: The protrusion (310) is arranged at the center of the bottom surface of the air floating tray (3).

10. The device for preventing friction and jamming of a graphite flotation tray according to any one of claims 1 to 9, characterized in that: The bottom surface of the air flotation tray (3) is provided with a dust removal groove (320).

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