Dynamic balance and helium side leakage integrated automatic test equipment

Abstract

The invention belongs to the field of detection, and provides a dynamic balance and helium side leakage integrated automatic test device which comprises a detection disc, sensors and a leakage instrument which are arranged on a detection tool, the sensors are annularly distributed at the bottom of the detection disc at intervals, and the detection disc is used for bearing a bearing seat. Detecting a dynamic balance parameter when the substrate drives the seed crystal model to rotate through a sensor; the leakage instrument penetrates through the detection disc and is communicated with the interior of the seed crystal model, so that when helium is sprayed to the exterior of the seed crystal model, the leakage instrument can detect the sealing performance of the interior of the seed crystal model. Compared with the prior art, the full-automatic seed crystal model detection tool has the advantages that two detection items are integrated on one detection tool to be completed, and the full-automatic process from feeding to detection completion of a seed crystal model is achieved through automatic equipment such as a conveying line, a position adjusting mechanism, a bearing mechanism, a lifting mechanism and the detection tool, so that the detection time is greatly shortened, and the detection efficiency is improved. And the consistency and reliability of the detection result are improved by reducing human intervention.

Description

Technical Field

[0001] The invention belongs to the field of detection, and in particular relates to an integrated automatic testing device for dynamic balance and helium side leakage. Background Art

[0002] In the semiconductor industry, the quality of the seed crystal model directly affects the quality of the wafer. Dynamic balance refers to the state in which the various parts of the seed crystal model are evenly stressed when rotating, and is one of the important indicators for measuring whether the seed crystal model is qualified. Helium side leakage is used to check whether there is a leakage problem inside the seed crystal model.

[0003] Traditional detection methods often require dynamic balancing and helium leakage detection to be performed separately, which means that each test requires independent operation steps, including loading, testing, recording data and unloading, which undoubtedly prolongs the total detection cycle. Moreover, the separate tests may lead to inconsistent test results due to changes in the operating environment, different operators, etc. For example, after the dynamic balancing test, the position of the counterweight may need to be adjusted. When performing the helium leakage test again, if the adjustment is improper, it will affect the accuracy of the test results. In addition, the seed crystal model needs to be reloaded and unloaded for each test, which not only wastes manpower and material resources, but also may cause the risk of damage to the seed crystal model due to frequent movement, and thus the consistency and reliability of the test cannot be guaranteed. Summary of the invention

[0004] In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is to provide an integrated automatic testing device capable of simultaneously completing dynamic balancing and helium side leakage detection.

[0005] The technical solution adopted by the present invention to solve the technical problem is to provide an integrated automatic test device for dynamic balance and helium side leakage, which is used to detect the dynamic balance and helium side leakage of a seed crystal model, wherein the seed crystal model has a bearing seat, a base plate movably connected to the bearing seat, and a driving motor for driving the base plate to rotate, a counterweight block is connected to the periphery of the base plate, and the counterweight block can adjust its relative position with the base plate, and the automatic test device comprises: Conveyor lines, wherein placement grooves are formed between the conveyor lines, and the substrate can be movably attached to the conveyor lines because the bearing seat extends into the placement grooves, so that the conveyor lines can drive the seed crystal model to move horizontally; A positioning mechanism, arranged at the end of the conveying line, and used for adjusting the seed crystal model to a posture to be detected; A receiving mechanism, a lifting mechanism and a detection tool, wherein the receiving mechanism is located between the positioning mechanism and the lifting mechanism, and the receiving mechanism is used to push the seed crystal model adjusted to the posture to be detected into the lifting mechanism; the lifting mechanism is used to receive the substrate to drive the seed crystal model to move in the vertical direction and place it on the detection tool, wherein: The detection tooling is provided with a detection disk, a sensor and a leak meter. The sensors are distributed at annular intervals at the bottom of the detection disk. The detection disk is used to receive the load-bearing seat, and the sensor detects the dynamic balance parameters when the substrate drives the seed crystal model to rotate; the leak meter runs through the detection disk and is connected to the interior of the seed crystal model, so that when helium is sprayed to the outside of the seed crystal model, the sealing of the inside of the seed crystal model can be detected by the leak meter.

[0006] In the above-mentioned integrated automatic test equipment for dynamic balancing and helium side leakage, the detection tooling further includes: A fixing frame, on which a mounting tube is arranged, wherein the sensors are distributed in the mounting tube in an annular shape and at equal intervals, and the detection disk is located at the opening end of the mounting tube and is pressed against the sensor; A plurality of limit blocks are equidistantly distributed in a ring shape on the outer wall of the mounting tube, and the limit blocks extend to the top of the detection plate; A fixing seat and a pressing block, wherein the fixing seats are distributed in an annular shape and at equal intervals on the detection plate, and the pressing block is movably connected to the fixing seat and is used to fix the load-bearing seat on the detection plate.

[0007] In the above-mentioned dynamic balancing and helium side leakage integrated automatic testing equipment, a connecting hole and a sealing ring are provided on the detection disk, and the connecting hole is used to connect the detection tube on the leak meter; the sealing ring is arranged at the periphery of the connecting hole to prevent gas leakage when the detection tube is connected to the inside of the seed crystal model.

[0008] In the above-mentioned integrated automatic test equipment for dynamic balancing and helium side leakage, the positioning mechanism comprises: Support frame; A conveying member, movably arranged on the support frame, and used for receiving the seed crystal model on the conveying line; A rotating assembly is connected to the bottom of the support frame. A rotating shaft is arranged on the rotating assembly. The rotating shaft passes through the support frame and is connected to the conveying member, and is used to drive the conveying member to rotate relative to the support frame to adjust the detection posture of the seed crystal model.

[0009] In the above-mentioned integrated automatic test equipment for dynamic balancing and helium side leakage, the conveying member, the conveying line and the receiving mechanism all include: The mounting brackets are symmetrically arranged, the placement groove is formed between two adjacent mounting brackets, the two sides of the mounting brackets are connected with guide plates, the guide plates are formed with engaging grooves, and the two ends of the base plate are movably engaged in the engaging grooves; A plurality of guide rollers are rotatably arranged in the mounting bracket, each of the guide rollers is provided with at least two rolling teeth, and the rolling teeth on two adjacent guide rollers are movably connected by a chain; A synchronous shaft and a first driving member, wherein the synchronous shaft is movably arranged in the mounting bracket, and chain transmission is adopted between the output end of the first driving member and the synchronous shaft, and between the synchronous shaft and any of the hobbing gears.

[0010] In the above-mentioned integrated automatic test equipment for dynamic balancing and helium side leakage, the rotating assembly comprises: A driving cylinder is installed on the support frame; A moving block and a slide rail, wherein the length direction of the slide rail is arranged parallel to the driving direction of the driving cylinder, the driving end of the driving cylinder is connected to the moving block, the bottom of the moving block is connected to a slider, and the slider is movably connected to the slide rail; A rack and a gear, wherein the rack is connected to the side wall of the moving block, the gear is connected to the end of the rotating shaft, and the rack is movably meshed with the gear; A mounting seat is arranged on the support frame, a bearing is arranged in the mounting seat, and an inner ring of the bearing is connected to the rotating shaft.

[0011] In the above-mentioned dynamic balancing and helium side leakage integrated automatic testing equipment, a rotating plate is movably connected to the base plate, and the rotating plate is respectively provided with a first adjustment hole and a second adjustment hole along its length direction and width direction, and the counterweight block is provided with a first locking piece movably connected to the first adjustment hole so that the counterweight block can move relative to the rotating plate; the second adjustment hole is provided with a second locking piece connected to the base plate so that the rotating plate can drive the counterweight block to rotate synchronously relative to the base plate.

[0012] In the above-mentioned integrated automatic test equipment for dynamic balancing and helium side leakage, the lifting mechanism comprises: A frame and a lifting frame, wherein the frame is provided with a guide rail placed in a vertical direction, and the lifting frame is provided with a guide block, and the guide block is movably connected to the guide rail; The second driving member and the lift are arranged in the frame, the output end of the second driving member is connected with a coupling, a horizontal connecting shaft is installed between the input end of the lift and the coupling, the output end is connected with a vertical connecting shaft, and a movable block is connected to the lifting frame, and the movable block is movably sleeved on the vertical connecting shaft; A positioning block and a plurality of receiving blocks are arranged on the top wall of the lifting frame, wherein the positioning block is used to prevent the seed crystal model from escaping from the lifting frame; a plurality of receiving blocks are arrayed and equidistantly arranged on the lifting frame, and each receiving block is movably connected with a ball.

[0013] In the above-mentioned dynamic balancing and helium side leakage integrated automatic testing equipment, the conveying direction of the conveyor belt and the moving direction of the seed crystal model pushed by the receiving mechanism are arranged perpendicular to each other, so that the receiving mechanism and the lifting mechanism can be provided with several groups for synchronous detection.

[0014] The technical solution adopted by the present invention to solve the technical problem is to provide an integrated automatic test device for dynamic balance and helium side leakage, which is used to detect the dynamic balance and helium side leakage of a seed crystal model, wherein the seed crystal model has a bearing seat, a base plate movably connected to the bearing seat, and a driving motor for driving the base plate to rotate, a counterweight block is connected to the periphery of the base plate, and the counterweight block can adjust its relative position with the base plate, and the automatic test device includes the following structure: A conveyor line for driving the seed crystal model to move horizontally, wherein a placement groove is formed on the conveyor line, and the placement groove allows the bearing seat to pass through, so that the seed crystal model is in a horizontal placement posture; A positioning mechanism and a receiving mechanism, wherein the positioning mechanism is used to drive the seed crystal model to rotate at a right angle to a posture to be detected, and push it to the receiving mechanism to wait for detection; A lifting mechanism and a detection tool, wherein the lifting mechanism is used to place the seed crystal model on the detection tool; the detection tool is provided with a detection plate, a sensor and a leakage meter, and the sensors are distributed at intervals in an annular manner at the bottom of the detection plate; When the lifting mechanism places the bearing seat on the detection plate, the sensor can detect the dynamic balance parameters of the seed crystal model because the driving motor drives the substrate to rotate relative to the bearing seat, and adjust the balance of the seed crystal model by moving the counterweight block relative to the substrate; The detection disk is provided with a connecting hole and a sealing ring, the connecting hole is used to connect the detection tube on the leak meter, and the connection between the inside of the seed crystal model and the detection tube is sealed through the sealing ring, so that when helium is sprayed to the outside of the seed crystal model, the sealing of the inside of the seed crystal model can be detected by the leak meter.

[0015] Compared with the prior art, the present invention has the following beneficial effects: (1) The present invention is an integrated automatic test device for dynamic balancing and helium side leakage, which integrates the two tests on one test fixture. Through automated equipment such as a conveyor line, a positioning mechanism, a receiving mechanism, a lifting mechanism and a test fixture, a fully automated process from loading the seed crystal model to the completion of the test is realized, which not only greatly shortens the test time, but also improves the consistency and reliability of the test results by reducing human intervention.

[0016] (2) The active meshing of the rack and the gear is used in conjunction with the linear motion of the driving cylinder to complete the rotational motion of the mounting bracket. The overall structure is simple and achieves a smooth and controllable rotation adjustment function. It is suitable for occasions where the rotation angle and speed need to be precisely controlled.

[0017] (3) By using the adjustment holes at different positions and the locking parts at different positions, users can flexibly adjust the position of the counterweight and the angle of the rotating plate according to actual needs to obtain a variety of dynamic balancing parameters. This has strong flexibility and greatly improves the accuracy and reliability of the detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the seed crystal model; Figure 2 It is a schematic diagram of the structure of this application; Figure 3 It is an exploded view of the inspection tooling; Figure 4 is a cross-sectional view between the rotating assembly and the mounting bracket; Figure 5 It is a schematic diagram of the installation structure between the driving cylinder and the rack; Figure 6 It is a schematic diagram of the structure of the undertaking organization; Figure 7 It is a structural diagram of the lifting mechanism.

[0019] In the figure, 1, seed crystal model; 10, bearing seat; 11, base plate; 110, rotating plate; 111, first adjustment hole; 112, second adjustment hole; 112a, second locking member; 12, driving motor; 13, counterweight block; 130, first locking member; 2. Conveyor line; 20. Placement trough; 3. Positioning mechanism; 30. Support frame; 31. Rotating assembly; 310. Rotating shaft; 311. Driving cylinder; 312. Moving block; 313. Slide rail; 314. Sliding block; 315. Rack; 316. Mounting seat; 317. Bearing; 318. Buffer block; 4. receiving mechanism; 40. mounting bracket; 400. guide plate; 400a. engaging groove; 401. guide roller; 402. hobbing gear; 403. chain; 404. synchronous shaft; 405. first driving member; 406. auxiliary wheel; 407. anti-dropping block; 5. Lifting mechanism; 50. Frame; 500. Guide rail; 51. Lifting frame; 510. Guide block; 52. Second driving member; 53. Lifter; 54. Coupling; 55. Horizontal connecting shaft; 56. Vertical connecting shaft; 57. Positioning block; 58. Receiver block; 580. Ball bearing; 6. Testing tool; 60. Testing plate; 61. Sensor; 62. Testing tube; 63. Fixing frame; 630. Mounting tube; 631. Limiting block; 632. Fixing seat; 633. Pressing block; 634. Connecting hole; 635. Sealing ring. DETAILED DESCRIPTION

[0020] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0021] like Figures 1 to 7 As shown, the present invention is an integrated automatic test equipment for dynamic balance and helium side leakage, which is used to detect the dynamic balance and helium side leakage of a seed crystal model 1, wherein the seed crystal model 1 has a bearing seat 10, a substrate 11 movably connected to the bearing seat 10, and a driving motor 12 for driving the substrate 11 to rotate, and a counterweight block 13 is connected to the periphery of the substrate 11, and the counterweight block 13 can adjust its relative position with the substrate 11. The automatic test equipment includes: a conveyor line 2, a placement groove 20 is formed between the conveyor lines 2, and the substrate 11 can be movably attached to the conveyor line 2 because the bearing seat 10 extends into the placement groove 20, so that the conveyor line 2 drives the seed crystal model 1 to move horizontally; a positioning mechanism 3, which is arranged at the end of the conveyor line 2, and the positioning mechanism 3 is used to adjust the seed crystal model 1 to the posture to be detected; a receiving mechanism 4, a lifting mechanism The receiving mechanism 4 is located between the positioning mechanism 3 and the lifting mechanism 5, and the receiving mechanism 4 is used to push the seed crystal model 1 adjusted to the posture to be detected into the lifting mechanism 5; the lifting mechanism 5 is used to receive the substrate 11 to drive the seed crystal model 1 to move in the vertical direction and place it on the detection tool 6, wherein the detection tool 6 is provided with a detection disk 60, a sensor 61 and a leakage meter, and the sensors 61 are distributed at annular intervals at the bottom of the detection disk 60, and the detection disk 60 is used to receive the bearing seat 10, and the dynamic balance parameters of the seed crystal model 1 driven by the substrate 11 to rotate are detected by the sensor 61; the leakage meter runs through the detection disk 60 and is connected to the inside of the seed crystal model 1, so that when helium is sprayed to the outside of the seed crystal model 1, the sealing of the inside of the seed crystal model 1 can be detected by the leakage meter.

[0022] like Figure 1As shown, in this embodiment, the seed crystal model 1 mainly relies on the driving motor 12 to drive the substrate 11 and all the components thereon to rotate relative to the bearing seat 10, and the position of the counterweight block 13 relative to the substrate 11 is adjusted to obtain the required dynamic balance parameter value; specifically, as Figures 1 to 7 As shown, when the external crane places the seed crystal model 1 on the conveyor line 2, the bearing seat 10 can extend into the placement groove 20, so that the substrate 11 can be moved closely to the upper end surface of the conveyor line 2 and maintained in a horizontal posture to be conveyed to the positioning mechanism 3, refer to Figure 2 Since the positions of the receiving mechanism 4, the lifting mechanism 5 and the detection tooling 6 are exactly arranged perpendicular to the conveyor line 2, the positioning mechanism 3 is required to adjust the seed crystal model 1 to the posture to be detected (that is, it needs to be rotated at a right angle) to ensure that the seed crystal model 1 is in a position suitable for subsequent detection, so as to facilitate dynamic balance detection and helium side leakage detection. When the receiving mechanism 4 receives the seed crystal model 1 and pushes it into the lifting mechanism 5, the seed crystal model 1 can be moved down under the action of the lifting mechanism 5 and finally the load-bearing seat 10 can be placed on the detection disk 60. It should be noted that at this time, the lifting mechanism 5 no longer supports the substrate 11. As the driving motor 12 drives the substrate 11 and all components thereon to rotate, the dynamic balance parameters of the seed crystal model 1 during rotation can be detected by the sensor 61 at the bottom of the detection disk 60. Since the sensors 61 are distributed in a ring-shaped interval, they can comprehensively detect the dynamic balance status of the seed crystal model 1 in all directions. At the same time, the leak meter passes through the detection disk 60 and is connected to the inside of the seed crystal model 1. When the external helium device (not shown in the figure) sprays helium to the outside of the seed crystal model 1, the leak meter (not shown in the figure) can detect the sealing inside the seed crystal model 1 in real time to determine whether there is a helium leakage. It can be seen that the automatic detection equipment integrates two tests on one detection tool 6. Combined with the above-mentioned conveyor line 2, positioning mechanism 3, receiving mechanism 4 and lifting mechanism 5, a fully automated process from loading to detection of the seed crystal model 1 is realized. The overall structure and detection method are relatively simple, which not only greatly shortens the detection time, but also reduces human intervention, effectively improving the consistency and reliability of the detection results.

[0023] The detection tooling 6 also includes: a fixed frame 63, on which a mounting tube 630 is arranged, sensors 61 are distributed in the mounting tube 630 in a circular shape and at equal intervals, and the detection disk 60 is located at the open end of the mounting tube 630 and is pressed against the sensor 61; a plurality of limit blocks 631 are distributed in a circular shape and at equal intervals on the outer wall of the mounting tube 630, and the limit blocks 631 extend to the top of the detection disk 60; a fixed seat 632 and a clamping block 633, the fixed seat 632 is distributed in a circular shape and at equal intervals on the detection disk 60, and the clamping block 633 is movably connected to the fixed seat 632, and is used to fix the load-bearing seat 10 on the detection disk 60.

[0024] Further, if Figures 2 to 3As shown, the three sensors 61 in this embodiment are distributed in an annular and equidistant manner in the cavity of the installation cylinder 630, and the detection disk 60 is located at the open end of the installation cylinder 630 and is in close contact with the sensor 61, so as to ensure that the required dynamic balance parameters can be detected by the sensor 61 at any position on the detection disk 60. In addition, the limit blocks 631 distributed in an annular and equidistant manner on the outer wall of the installation cylinder 630 extend to the top of the detection disk 60. These limit blocks 631 play a positioning role to prevent the detection disk 60 from shifting during the detection process; and during the placement of the seed crystal model 1, the worker can rotate the pressing block 633 to the outside of the detection disk 60 in advance. When the bearing seat 10 is placed on the detection disk 60, the pressing block 633 can be used again to stabilize the bearing seat 10 on the detection disk 60, so as to ensure the smoothness and stability during the detection process. It should be noted that the sensor 61 in this embodiment can use other devices such as load-bearing sensors 61 and pressure sensors 61 to detect dynamic balance parameters, and the acquired parameter values ​​are fed back to the data display screen of the system.

[0025] A rotating plate 110 is movably connected to the base plate 11, and the rotating plate 110 is respectively provided with a first adjusting hole 111 and a second adjusting hole 112 along its length direction and width direction. The counterweight 13 is provided with a first locking member 130 movably connected to the first adjusting hole 111 so that the counterweight 13 can move relative to the rotating plate 110; the second adjusting hole 112 is provided with a second locking member 112a connected to the base plate 11 so that the rotating plate 110 can drive the counterweight 13 to rotate synchronously relative to the base plate 11.

[0026] Preferably, if Figure 1As shown, in this embodiment, different dynamic balancing parameter values ​​can also be obtained by workers adjusting the position of the configuration block. Specifically, when the position of the counterweight 13 needs to be adjusted, the first locking member 130 is first loosened. At this time, the counterweight 13 can move freely along the length direction of the rotating plate 110 within the range of the first adjustment hole 111. The operator can move the counterweight 13 to a suitable position as needed to achieve the desired dynamic balancing state. After the adjustment is completed, the first locking member 130 is re-tightened to lock the position of the counterweight 13. Similarly, if the angle relationship between the rotating plate 110 and the base plate 11 needs to be changed, the operator can loosen the second locking member 112a so that the rotating plate 110 can rotate relative to the base plate 11 along its width direction. In this process, since the counterweight 13 is fixed to the rotating plate 110 by the first locking member 130, the counterweight 13 will rotate synchronously with the rotation of the rotating plate 110. After adjusting to the desired angle, the second locking member 112a is tightened to fix the rotating plate 110 and the configuration block at the new position. It can be seen that the structure allows the position and angle of the counterweight 13 relative to the substrate 11 to be adjusted, and the counterweight 13 can provide better dynamic balance in the new position, ensuring that the seed crystal model 1 can operate stably during the detection process. It should be noted that the first locking member 130 and the second locking member 112a in this embodiment can be replaced by other fixing components such as bolts and locking screws.

[0027] The detection disk 60 is provided with a connecting hole 634 and a sealing ring 635. The connecting hole 634 is used to connect the detection tube 62 on the leakage instrument; the sealing ring 635 is arranged at the periphery of the connecting hole 634 to prevent gas leakage when the detection tube 62 is connected to the inside of the seed crystal model 1.

[0028] It is worth noting that the load-bearing seat 10 in this embodiment is provided with a through hole (not shown in the figure) interconnected with the components on the substrate 11. Therefore, when the load-bearing seat 10 is placed on the detection plate 60, the through hole is just interconnected with the connection hole 634. As the detection tube 62 of the leak meter docks with the connection hole 634 on the detection plate 60, the sealing ring 635 can ensure the sealing of the connection between the two. At this time, the external helium device (not shown in the figure) can spray helium to the outside of the seed crystal model 1. If the inside of the seed crystal model 1 is in a vacuum state, the leak meter cannot detect the presence of helium in the seed crystal model 1. On the contrary, if the leak meter detects the presence of helium in the seed crystal model 1, it can be judged that the sealing of the seed crystal model 1 cannot meet the use requirements. Finally, the data collected by the sensor 61 and the leak meter are fed back to the system for evaluating the dynamic balance and sealing of the seed crystal model 1.

[0029] The positioning mechanism 3 includes: a support frame 30; a conveying member, which is movably arranged on the support frame 30 and is used to receive the seed crystal model 1 on the conveying line 2; a rotating component 31, which is connected to the bottom of the support frame 30 and is provided with a rotating shaft 310. The rotating shaft 310 passes through the support frame 30 and is connected to the conveying member, and is used to drive the conveying member to rotate relative to the support frame 30 to adjust the detection posture of the seed crystal model 1.

[0030] like Figures 4 to 6 As shown, when the conveyor line 2 transfers the seed crystal model 1 to the conveyor, the rotating assembly 31 is started, and the conveyor is driven to rotate 90 degrees relative to the support frame 30 through the rotating shaft 310, so as to adjust the posture of the seed crystal model 1. The rotation of the rotating shaft 310 enables the seed crystal model 1 on the conveyor to be adjusted to a suitable detection posture, ensuring that the subsequent dynamic balance detection and helium side leakage detection can be carried out smoothly.

[0031] The conveying member, the conveying line 2 and the receiving mechanism 4 all include: symmetrically arranged mounting brackets 40, a placement groove 20 is formed between two adjacent mounting brackets 40, guide plates 400 are connected to both sides of the mounting bracket 40, a snap-fit ​​groove 400a is formed in the guide plate 400, and both ends of the base plate 11 are movably snap-fitted in the snap-fit ​​groove 400a; a plurality of guide rollers 401 are rotatably arranged in the mounting bracket 40, each guide roller 401 is provided with at least two rolling teeth 402, and the rolling teeth 402 on two adjacent guide rollers 401 are movably connected by a chain 403; a synchronous shaft 404 and a first driving member 405, the synchronous shaft 404 is movably arranged in the mounting bracket 40, and chain transmission is adopted between the output end of the first driving member 405 and the synchronous shaft 404, and between the synchronous shaft 404 and any rolling teeth 402.

[0032] Further, if Figures 4 to 6 As shown, it should be noted that, for the transportation action of the seed crystal model 1, the conveying member, the conveying line 2 and the receiving mechanism 4 in this embodiment all adopt the same structure. The following only describes the working method of the receiving mechanism 4. The specific working principles of the conveying line 2, the receiving mechanism 4 and the conveying member are the same, and will not be described in detail here. When the substrate 11 is close to the guide roller 401 and the load-bearing seat 10 extends into the placement groove 20, the first driving member 405 can start the operation, and drive the synchronous shaft 404 to rotate through the chain transmission. The synchronous shaft 404 then drives all the guide rollers 401 to rotate synchronously through the cooperation of the hobbing gear 402 and the chain 403. As the guide roller 401 rotates, it contacts the substrate 11, thereby pushing the substrate 11 to move smoothly along the track in the mounting bracket 40. Through a series of cooperation of the above-mentioned structure, the stability and accuracy of the seed crystal model 1 during the pushing process are effectively ensured.

[0033] Preferably, this embodiment also provides an anti-slip block 407 on the mounting bracket 40 of the receiving mechanism 4. The anti-slip block 407 can be extended to the top of the guide roller 401 by the drive of a cylinder or an oil cylinder, thereby limiting the seed crystal model 1 and preventing it from retreating in the direction of the positioning mechanism 3 and affecting the subsequent assembly line actions.

[0034] The rotating assembly 31 includes: a driving cylinder 311, which is installed on the support frame 30; a moving block 312 and a slide rail 313, the length direction of the slide rail 313 is arranged parallel to the driving direction of the driving cylinder 311, the driving end of the driving cylinder 311 is connected to the moving block 312, the bottom of the moving block 312 is connected to a slider 314, and the slider 314 is movably connected to the slide rail 313; a rack 315 and a gear, the rack 315 is connected to the side wall of the moving block 312, the gear is connected to the end of the rotating shaft 310, and the rack 315 is movably engaged with the gear; a mounting seat 316, which is arranged on the support frame 30, and a bearing 317 is arranged in the mounting seat 316, and the inner ring of the bearing 317 is connected to the rotating shaft 310.

[0035] like Figures 4 to 5 As shown, as the driving cylinder 311 is started, its driving end (piston rod) begins to extend, pushing the connected moving block 312 to make linear motion along the length direction of the slide rail 313. Since the rack 315 on the moving block 312 is movably meshed with the gear (not shown in the figure) on the rotating shaft 310, the linear motion of the moving block 312 can be converted into the rotational motion of the rotating shaft 310 through the cooperation of the gear and the rack 315, thereby realizing the synchronous rotation of the mounting bracket 40 and the seed crystal model 1 at its upper end by 90 degrees to align with the mounting bracket 40 on the bearing mechanism (that is, the seed crystal model 1 is in the posture to be detected at this time); in this process, the inner ring of the bearing 317 is connected to the rotating shaft 310 to ensure that the rotating shaft 310 can rotate smoothly and frictionlessly. Similarly, in the process of unloading the seed crystal model 1 after detection, it can be smoothly transferred to the outside for crane transportation by the reverse contraction action of the driving cylinder 311.

[0036] Preferably, in this embodiment, an auxiliary wheel 406 is also provided on the mounting bracket 40, and a buffer block 318 is provided on the support frame 30, wherein the auxiliary wheel 406 is movably pressed against the top wall of the support frame 30, which can not only ensure that all components on the mounting bracket 40 can maintain a stable posture during rotation, but also ensure that it maintains absolute smoothness during rotation; and the buffer block 318 is located at the end of the slide rail 313, which has a buffering effect on the stopping of the moving block 312 after the rotating shaft 310 drives the mounting bracket 40 to rotate, thereby ensuring that the seed crystal model 1 after rotation will not be displaced relative to the mounting bracket 40.

[0037] The lifting mechanism 5 includes: a frame 50 and a lifting frame 51. The frame 50 is provided with a guide rail 500 placed in the vertical direction, and the lifting frame 51 is provided with a guide block 510, which is movably connected to the guide rail 500; a second driving member 52 and a lifter 53 are arranged in the frame 50, the output end of the second driving member 52 is connected with a coupling 54, a horizontal connecting shaft 55 is installed between the input end of the lifter 53 and the coupling 54, and the output end is connected with a vertical connecting shaft 56, and a movable block is connected to the lifting frame 51, and the movable block is movably sleeved on the vertical connecting shaft 56; a positioning block 57 and a plurality of receiving blocks 58 are arranged on the top wall of the lifting frame 51, and the positioning block 57 is used to prevent the seed crystal model 1 from detaching from the lifting frame 51; a plurality of receiving blocks 58 are arrayed and equidistantly arranged on the lifting frame 51, and each receiving block 58 is movably connected with a ball 580.

[0038] like Figure 7 As shown, before the guide roller 401 on the receiving mechanism 4 transfers the substrate 11 to the lifting mechanism 5, the second driving member 52 is started, and the horizontal connecting shaft 55 is driven to rotate through the coupling 54, so that the output end of the elevator 53 drives the lifting frame 51 to slide on the guide rail 500 during the synchronous rotation process, ensuring that the horizontal height of the lifting frame 51 and the mounting bracket 40 are unified, so that the seed crystal model 1 can be smoothly pushed to the receiving block 58 of the lifting frame 51. It is worth noting that the ball 580 on the receiving block 58 can ensure that the seed crystal model 1 is placed stably, reducing any unnecessary shaking or friction, and at the same time, the positioning block 57 can be used to protect the seed crystal model 1 to prevent the seed crystal model 1 from accidentally sliding. When the seed crystal model 1 is lowered with the lifting frame 51, the bearing seat 10 is placed on the detection plate 60, and the seed crystal model 1 falls into the position to be detected, and the subsequent dynamic balancing and helium leakage detection can be prepared.

[0039] Preferably, if Figure 2 As shown, in this embodiment, the conveying direction of the conveyor belt and the moving direction of the seed crystal model 1 pushed by the receiving mechanism 4 are arranged perpendicular to each other, that is, the above-mentioned positioning mechanism 3 and the receiving mechanism 4, the lifting mechanism 5 and the detection tool 6 are not limited to Figure 2 The one or two groups shown can also be provided with multiple groups accordingly, and multiple groups of the detection structure can be used to realize the synchronous detection operation of multiple seed crystal models 1, which greatly improves the operation efficiency during the detection.

[0040] The technical solution adopted by the present invention to solve its technical problems is to also propose an integrated automatic test device for dynamic balance and helium side leakage, which is used to detect the dynamic balance and helium side leakage of a seed crystal model 1, wherein the seed crystal model 1 has a bearing seat 10, a substrate 11 movably connected to the bearing seat 10, and a driving motor 12 for driving the substrate 11 to rotate, and a counterweight block 13 is connected to the periphery of the substrate 11, and the counterweight block 13 can adjust its relative position with the substrate 11. The automatic test device includes the following structures: a conveyor line 2 for driving the seed crystal model 1 to move horizontally, a placement groove 20 is formed on the conveyor line 2, and the placement groove 20 can be passed through by the bearing seat 10, so that the seed crystal model 1 is in a horizontal placement posture; a positioning mechanism 3 and a receiving mechanism 4, the positioning mechanism 3 is used to drive the seed crystal model 1 to rotate at a right angle to the posture to be detected, and push it to the receiving mechanism 4 to wait for detection; a lift The lifting mechanism 5 and the detection fixture 6, the lifting mechanism 5 is used to place the seed crystal model 1 on the detection fixture 6; the detection fixture 6 is provided with a detection disk 60, a sensor 61 and a leakage meter, and the sensors 61 are distributed at the bottom of the detection disk 60 in a ring-shaped interval; when the lifting mechanism 5 places the load-bearing seat 10 on the detection disk 60, the sensor 61 can detect the dynamic balance parameters of the seed crystal model 1 due to the driving motor 12 driving the substrate 11 to rotate relative to the load-bearing seat 10, and adjust the balance of the seed crystal model 1 by moving the counterweight block 13 relative to the substrate 11; the detection disk 60 is provided with a connecting hole 634 and a sealing ring 635, the connecting hole 634 is used to connect the detection tube 62 on the leakage meter, and the connection between the inside of the seed crystal model 1 and the detection tube 62 is sealed by the sealing ring 635, so that when helium is sprayed to the outside of the seed crystal model 1, the sealing of the inside of the seed crystal model 1 can be detected by the leakage meter.

[0041] This embodiment mainly combines the cooperation among the conveyor line 2, the positioning mechanism 3, the receiving mechanism 4, the lifting mechanism 5 and the detection fixture 6 to realize the automatic loading and unloading of the seed crystal model 1, and can also simultaneously complete the dynamic balancing and helium detection operations of the seed crystal model 1. Specifically, when the driving crane places the seed crystal model 1 stably on the conveyor line 2 in a horizontal posture, the positioning mechanism 3 rotates the seed crystal model 1 90 degrees to meet the subsequent detection posture, and then the receiving mechanism 4 can be cooperated to transport the seed crystal model 1 to the lifting mechanism 5. The detection tray 60 on the detection fixture 6 is located at the terminal position of the lifting mechanism 5. When the lifting mechanism 5 drops the seed crystal model 1 into place, the load-bearing seat 10 is placed on the detection tray 60. At this time, the driving motor 12 can drive the substrate 11 to rotate, and the detection tray 60 passes through its bottom The sensor 61 detects the dynamic balance parameters of the seed crystal model 1 when it rotates. At the same time, according to the information fed back by the sensor 61, the operator can improve the dynamic balance performance of the seed crystal model 1 by adjusting the relative position of the counterweight block 13 and the substrate 11, so that the seed crystal model 1 can reach the best dynamic balance state; at the same time, the detection tube 62 on the leak meter is connected to the connection hole 634, so that the detection tube 62 can be connected to the inside of the seed crystal model 1. When the external helium device sprays helium to the outside of the seed crystal model 1, the leak meter can be used to detect whether there is helium inside the seed crystal model 1 in real time, and then judge the sealing of the seed crystal model 1. Finally, the data collected by the sensor 61 and the leak meter are fed back to the system to evaluate whether the dynamic balance and sealing of the seed crystal model 1 can meet the use requirements. After the detection is completed, the lifting mechanism 5 removes the seed crystal model 1 from the detection fixture 6, and the seed crystal model 1 is horizontally moved again by the receiving mechanism 4 and the positioning mechanism 3 until it is sent out of the test equipment and lifted off by the crane, completing the entire detection process. The present invention realizes the integrated automatic processing of loading and unloading of the seed crystal model 1, dynamic balance detection and helium side leakage detection, ensures the stability and sealing of the seed crystal model 1 during the detection process, and improves the detection efficiency and accuracy.

[0042] It should be noted that the first driving member 405 and the second driving member 52 in this embodiment can be replaced by other driving devices such as stepper motors and servo motors. In addition, the driving motor 12 in this embodiment drives the substrate 11 to rotate, which can be achieved by a synchronous belt.

[0043] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0044] In addition, in the present invention, descriptions such as "first", "second", "one", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0045] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] In addition, the technical solutions between the various embodiments of the present invention can be combined with each other, but it must be based on the fact that ordinary technicians in the field can implement it. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

Claims

1. An integrated automatic test device for dynamic balance and helium side leakage, used to detect the dynamic balance and helium side leakage of a seed crystal model, wherein: The seed crystal model comprises a bearing seat, a substrate movably connected to the bearing seat, and a driving motor for driving the substrate to rotate. A counterweight block is connected to the periphery of the substrate, and the counterweight block can adjust its relative position with the substrate. The automatic testing equipment comprises: Conveyor lines, wherein placement grooves are formed between the conveyor lines, and the substrate can be movably attached to the conveyor lines because the bearing seat extends into the placement grooves, so that the conveyor lines can drive the seed crystal model to move horizontally; A positioning mechanism, arranged at the end of the conveying line, and used for adjusting the seed crystal model to a posture to be detected; A receiving mechanism, a lifting mechanism and a detection tool, wherein the receiving mechanism is located between the positioning mechanism and the lifting mechanism, and the receiving mechanism is used to push the seed crystal model adjusted to the posture to be detected into the lifting mechanism; the lifting mechanism is used to receive the substrate to drive the seed crystal model to move in the vertical direction and place it on the detection tool, wherein: The detection tooling is provided with a detection disk, a sensor and a leak meter. The sensors are distributed at annular intervals at the bottom of the detection disk. The detection disk is used to receive the load-bearing seat, and the sensor detects the dynamic balance parameters when the substrate drives the seed crystal model to rotate; the leak meter runs through the detection disk and is connected to the interior of the seed crystal model, so that when helium is sprayed to the outside of the seed crystal model, the sealing of the inside of the seed crystal model can be detected by the leak meter.

2. The integrated automatic test equipment for dynamic balancing and helium side leakage according to claim 1, characterized in that: The detection tooling also includes: A fixing frame, on which a mounting tube is arranged, wherein the sensors are distributed in the mounting tube in an annular shape and at equal intervals, and the detection disk is located at the opening end of the mounting tube and is pressed against the sensor; A plurality of limit blocks are equidistantly distributed in a ring shape on the outer wall of the mounting tube, and the limit blocks extend to the top of the detection plate; A fixing seat and a pressing block, wherein the fixing seats are distributed in an annular shape and at equal intervals on the detection plate, and the pressing block is movably connected to the fixing seat and is used to fix the load-bearing seat on the detection plate.

3. The integrated automatic test equipment for dynamic balancing and helium side leakage according to claim 1 is characterized in that: The detection disk is provided with a connecting hole and a sealing ring, the connecting hole is used to connect the detection tube on the leakage instrument; the sealing ring is arranged at the periphery of the connecting hole to prevent gas leakage when the detection tube is connected to the inside of the seed crystal model.

4. The integrated automatic test equipment for dynamic balancing and helium side leakage according to claim 1, characterized in that: The positioning mechanism comprises: Support frame; A conveying member, movably arranged on the support frame, and used for receiving the seed crystal model on the conveying line; A rotating assembly is connected to the bottom of the support frame. A rotating shaft is arranged on the rotating assembly. The rotating shaft passes through the support frame and is connected to the conveying member, and is used to drive the conveying member to rotate relative to the support frame to adjust the detection posture of the seed crystal model.

5. The integrated automatic test equipment for dynamic balancing and helium side leakage according to claim 4 is characterized in that: The conveying member, the conveying line and the receiving mechanism all include: The mounting brackets are symmetrically arranged, the placement groove is formed between two adjacent mounting brackets, the two sides of the mounting brackets are connected with guide plates, the guide plates are formed with engaging grooves, and the two ends of the base plate are movably engaged in the engaging grooves; A plurality of guide rollers are rotatably arranged in the mounting bracket, each of the guide rollers is provided with at least two rolling teeth, and the rolling teeth on two adjacent guide rollers are movably connected by a chain; A synchronous shaft and a first driving member, wherein the synchronous shaft is movably arranged in the mounting bracket, and chain transmission is adopted between the output end of the first driving member and the synchronous shaft, and between the synchronous shaft and any of the hobbing gears.

6. The integrated automatic test equipment for dynamic balancing and helium side leakage according to claim 5 is characterized in that: The rotating assembly comprises: A driving cylinder is installed on the support frame; A moving block and a slide rail, wherein the length direction of the slide rail is arranged parallel to the driving direction of the driving cylinder, the driving end of the driving cylinder is connected to the moving block, the bottom of the moving block is connected to a slider, and the slider is movably connected to the slide rail; A rack and a gear, wherein the rack is connected to the side wall of the moving block, the gear is connected to the end of the rotating shaft, and the rack is movably meshed with the gear; A mounting seat is arranged on the support frame, a bearing is arranged in the mounting seat, and an inner ring of the bearing is connected to the rotating shaft.

7. The integrated automatic test equipment for dynamic balancing and helium side leakage according to claim 1, characterized in that: A rotating plate is movably connected to the base plate, and the rotating plate is respectively provided with a first adjustment hole and a second adjustment hole along its length direction and width direction; the counterweight block is provided with a first locking piece movably connected to the first adjusting hole so that the counterweight block can move relative to the rotating plate; the second adjustment hole is provided with a second locking piece connected to the base plate so that the rotating plate can drive the counterweight block to rotate synchronously relative to the base plate.

8. The integrated automatic test equipment for dynamic balancing and helium side leakage according to claim 1, characterized in that: The lifting mechanism comprises: A frame and a lifting frame, wherein the frame is provided with a guide rail placed in a vertical direction, and the lifting frame is provided with a guide block, and the guide block is movably connected to the guide rail; The second driving member and the lift are arranged in the frame, the output end of the second driving member is connected with a coupling, a horizontal connecting shaft is installed between the input end of the lift and the coupling, the output end is connected with a vertical connecting shaft, and a movable block is connected to the lifting frame, and the movable block is movably sleeved on the vertical connecting shaft; A positioning block and a plurality of receiving blocks are arranged on the top wall of the lifting frame, wherein the positioning block is used to prevent the seed crystal model from escaping from the lifting frame; a plurality of receiving blocks are arrayed and equidistantly arranged on the lifting frame, and each receiving block is movably connected with a ball.

9. The integrated automatic test equipment for dynamic balancing and helium side leakage according to claim 1, characterized in that: The conveying direction of the conveyor belt and the moving direction of the seed crystal model pushed by the receiving mechanism are arranged perpendicular to each other, so that the receiving mechanism and the lifting mechanism can be arranged with several groups for synchronous detection.

10. An integrated automatic test device for dynamic balance and helium side leakage, used to detect the dynamic balance and helium side leakage of a seed crystal model, wherein: The seed crystal model comprises a bearing seat, a substrate movably connected to the bearing seat, and a driving motor for driving the substrate to rotate. A counterweight block is connected to the periphery of the substrate, and the counterweight block can adjust its relative position with the substrate. The automatic testing equipment comprises the following structure: A conveyor line for driving the seed crystal model to move horizontally, wherein a placement groove is formed on the conveyor line, and the placement groove allows the bearing seat to pass through, so that the seed crystal model is in a horizontal placement posture; A positioning mechanism and a receiving mechanism, wherein the positioning mechanism is used to drive the seed crystal model to rotate at a right angle to a posture to be detected, and push it to the receiving mechanism to wait for detection; A lifting mechanism and a detection tool, wherein the lifting mechanism is used to place the seed crystal model on the detection tool; the detection tool is provided with a detection plate, a sensor and a leakage meter, and the sensors are distributed at intervals in an annular manner at the bottom of the detection plate; When the lifting mechanism places the bearing seat on the detection plate, the sensor can detect the dynamic balance parameters of the seed crystal model because the driving motor drives the substrate to rotate relative to the bearing seat, and adjust the balance of the seed crystal model by moving the counterweight block relative to the substrate; The detection disk is provided with a connecting hole and a sealing ring, the connecting hole is used to connect the detection tube on the leak meter, and the connection between the inside of the seed crystal model and the detection tube is sealed through the sealing ring, so that when helium is sprayed to the outside of the seed crystal model, the sealing of the inside of the seed crystal model can be detected by the leak meter.

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