A color router for photonic momentum manipulation and a method of manufacturing the same

Abstract

The present application relates to a kind of color router for photon momentum manipulation and its preparation method.Color router is composed of metal nano antenna, carbon nanotube film, printed circuit board.When the edge of metal nano antenna is excited by electron beam, the green light and red light components emitted in far field are distributed along different propagation directions, while the impact position is located in the center, then non-splitting pattern is generated.In addition, the conversion of characteristic radiation direction can be triggered by controlling the electron beam excitation position.By adjusting the excitation position, the far-field interference of dipole moment and quadrupole moment can be changed, and the active modulation of dichromatic photon splitting can be effectively realized.The present application provides a convincing platform for manipulating photon momentum on nanoscale, and paves the way for future quantum information technology and integrated photonic systems.

Description

Technical Field

[0001] The present invention relates to a color router for photon momentum manipulation and a preparation method thereof, and belongs to the field of micro-nano optical technology. Background Art

[0002] Optical routing technology, with its active manipulation of light fields and high processing speed, has been successfully applied in modern signal transmission, imaging, storage, cryptography, and other fields. In the development of photon manipulation technology, it is crucial to find a suitable method with high integration and large storage capacity to meet the needs of information transmission and processing applications. To meet these requirements, color science with multi-frequency channels offers a promising approach for achieving large information encoding capabilities, and controlling photon momentum at the nanoscale has been demonstrated to be feasible. Therefore, precise modulation of photons in both the frequency and spatial domains is beneficial for optical information applications.

[0003] The color routing effect provides a unique method to control photon momentum in the frequency and spatial domains to efficiently utilize the spectrum. In the study of wavefront modulation, color routers separate light of different frequencies into different directions, which are used for optical operations in multi-frequency channels such as photonic crystal waveguides and frequency-encoded quantum information processing. Because photons are efficient information carriers with high robustness and large capacity, color routers that manipulate photon momentum in multi-frequency channels can be applied to high-dimensional, low-crosstalk optical information encoding and encryption. However, due to the lack of flexible operation at the nanoscale, this still hinders further integration for on-chip applications. Therefore, an effective solution is needed to fully realize its potential in optical information applications. Summary of the Invention

[0004] The technical problem addressed by this invention is to overcome the shortcomings of existing technologies by proposing a color router for photon momentum manipulation and its fabrication method. This is an optical router excited by an electron beam at the subwavelength scale, used to modulate dichromatic photon momentum. When an electron beam from an on-chip source strikes the edge of a gold nanoantenna, the green and red components of the far-field emission are distributed along different propagation directions. When the impact location is at the center, a non-split pattern is observed. Furthermore, the characteristic radiation direction can be switched by controlling the electron beam impact location. By rationally adjusting the excitation location and altering the far-field interference of the dipole and quadrupole moments, active modulation of dichromatic photon splitting can be effectively achieved. Electron beam manipulation, such as cathodoluminescence, is a high-resolution excitation method that overcomes the diffraction limit of light and has been successfully applied to subwavelength-scale electromagnetic field research. Under electron beam excitation, subwavelength shifts in the impact location can directly modulate the localized electron density of states of the excited object, leading to changes in the far-field emission pattern. This technology overcomes the diffraction limit of light and can be used to control subwavelength-scale electron-induced color routers.

[0005] The technical solutions of the present invention are as follows:

[0006] A color router for photon momentum manipulation, the color router comprising a cross-shaped metal nanoantenna, a carbon nanotube film, and a printed circuit board;

[0007] The metal is aluminum, gold or silver;

[0008] The cross-shaped metal nanoantenna is formed by placing two rectangular metal nanoantennas perpendicular to each other, and the rectangular metal nanoantenna has a length of 200nm to 600nm, a width of 50nm to 100nm, and a thickness of 50nm to 100nm;

[0009] The cross-shaped metal nanoantenna is located on the upper surface of the carbon nanotube film;

[0010] The carbon nanotube film is located on the upper surface of the printed circuit board;

[0011] The printed circuit board is integrated with a programmable gate array for controlling the electron beam excitation position, and thereby controlling the radiation direction of the red and green light. The printed circuit board is etched with arrayed excitation units, each of which includes five emission cathodes and five gates. A programmable gate array is integrated under each emission cathode to achieve flexible adjustment and rapid response of the emission cathode. The programmable gate array is used to control the level shifter of each excitation unit. The programmable gate array uses vertical and horizontal scanning circuits. When the emission cathode excites different positions of the carbon nanotube film above it, electrons on the carbon nanotube film are enriched and further emitted to the cross-shaped metal nanoantenna, achieving electron beam excitation with nanometer-level precision.

[0012] The scattering intensity I of the color router when excited by the electron beam is:

[0013]

[0014] Among them, P, M, T, Q αβ 、M αβ and T αβ They correspond to electric dipole, magnetic dipole, circular dipole, electric quadrupole, magnetic quadrupole, and circular quadrupole, respectively. c is the speed of light in a vacuum, ω is the angular frequency, O represents the harmonic minimum term, and α and β are the abscissa and ordinate in the orthogonal coordinate system.

[0015] The printed circuit board can control the radiation direction of photons. When the electron beam on the printed circuit board hits the edge of the cross-shaped metal nanoantenna, the green and red components of the far-field emission are distributed along different propagation directions. When the electron beam on the printed circuit board hits the center of the cross-shaped metal nanoantenna, the green and red components of the far-field emission are distributed along the same propagation direction, that is, a non-split pattern is observed.

[0016] The method for preparing a cross-shaped metal nanoantenna is:

[0017] In the first step, a metal layer is deposited on a substrate using an electron beam evaporator. A positive resist is then spin-coated on the metal layer and etched using electron beam lithography to form a cross-shaped metal nanostructure.

[0018] In the second step, the cross-shaped metal nanostructure formed in the first step is irradiated with argon ions to remove the residual polymethyl methacrylate;

[0019] In the third step, the cross-shaped metal nanostructure obtained in the second step is immersed in ethanol, cleaned in the ethanol with ultrasound, and then dried in an oven. After drying, a commercial polydimethylsiloxane solution is cast on the dried cross-shaped metal nanostructure. Finally, the solution is degassed and cured in a vacuum oven to obtain a nanostructured polydimethylsiloxane film. The nanostructured polydimethylsiloxane film is then peeled off from the substrate to obtain a cross-shaped metal nanoantenna.

[0020] The substrate material is silicon dioxide or silicon;

[0021] The method for transferring the carbon nanotube film to the upper surface of the printed circuit board is as follows:

[0022] Step 1: Transfer the carbon nanotube film onto a substrate and form a strip array by reactive ion etching;

[0023] Step 2, patterning the carbon nanotube film formed into a strip array in step 1 by electron beam lithography;

[0024] Step 3, performing electron beam evaporation to deposit substrate material on the pattern of step 2;

[0025] Step 4, peeling the carbon nanotube film obtained in step 3 from the substrate;

[0026] In step 5, to improve alignment accuracy, electron beam lithography and electron beam evaporation are used to create marks on the carbon nanotube film peeled off in step 4. The marked carbon nanotube film is then transferred to a printed circuit board with the substrate material deposited on the carbon nanotube film facing the printed circuit board. Finally, hydrofluoric acid is used to selectively etch the substrate material and the emission cathode under the carbon nanotube film.

[0027] The center position of the prepared cross-shaped metal nanoantenna is aligned with the created mark and transferred to the carbon nanotube film.

[0028] Beneficial effects

[0029] (1) The optical router of the present invention is used to realize programmable control of dichromatic photon momentum;

[0030] (2) The optical router of the present invention is lightweight and compact. By controlling the impact position of the electron beam, the direction of green and red radiation can be dynamically controlled. The size of each pixel is controlled at the micron level. The high integration and small size expand its practical application range and contribute to interdisciplinary research related to on-chip spectroscopy, optical communications, and integrated quantum information technology.

[0031] (3) The optical router of the present invention overcomes the diffraction limit of light and realizes a subwavelength-scale electron-induced color router. Under electron beam stimulation, the subwavelength displacement of the impact position can directly adjust the distribution of the localized electron state density of the gold nanoantenna, promoting the adjustable change of the far-field emission pattern.

[0032] (4) The optical router of the present invention has the advantages of high robustness and large capacity, and can be applied to high-dimensional, low-crosstalk optical information encoding and encryption. The optical router under electron beam excitation can be manipulated for frequency-dependent quaternary encoding and can also manipulate the momentum of two-color photons by moving the impact position on a deep subwavelength scale. This increases the modulation dimension of information transmission.

[0033] (5) The optical router of the present invention utilizes dichromatic photon momentum and beam intensity as carriers, improving information processing capabilities and increasing information capacity based on frequency-dependent angle measurement. Furthermore, the unitary spatial distribution characteristics enable real-time image display. It can be used as an integrated, miniaturized display device in the fields of virtual and augmented displays.

[0034] (6) The optical router of the present invention is scalable. Materials with higher plasma q factors, such as aluminum and silver, can be introduced into the optical router design to achieve better display performance.

[0035] (7) The present invention relates to an optical router excited by an electron beam at a subwavelength scale and a method for preparing the same, which is used to modulate the momentum of two-color photons. When an electron beam from an on-chip source hits the edge of a gold nanoantenna, the green and red light components emitted in the far field are distributed along different propagation directions, while when the impact position is at the center, a non-split pattern is observed. In addition, the conversion of the characteristic radiation direction can be triggered by controlling the impact position of the electron beam. By rationally adjusting the excitation position and changing the far-field interference of the dipole moment and quadrupole moment, active modulation of the two-color photon splitting can be effectively achieved. The present invention provides a convincing platform for manipulating photon momentum at the nanoscale, paving the way for future quantum information technology and integrated photonic systems. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 This is a schematic diagram of an optical router in a specific embodiment of the present invention. The cross-shaped gold nanoantenna generates asymmetric dichroic dispersion radiation under electron beam excitation;

[0037] Figure 2 This is a pseudo-color scanning electron microscope image of a gold nanoantenna in a specific embodiment of the present invention, where the red dots indicate the electron beam excitation positions;

[0038] Figure 3 The experimental and simulated spectra of the gold nanoantenna in a specific embodiment of the present invention are shown. The blue (black) curve corresponds to the experimental (simulated) spectrum;

[0039] Figure 4 is the scattering intensity of various multipole moments in the gold nanoantenna in a specific embodiment of the present invention;

[0040] Figure 5 A near-field intensity diagram of a simulated red component in a specific embodiment of the present invention;

[0041] Figure 6 A near-field intensity diagram of a simulated green component in a specific embodiment of the present invention;

[0042] Figure 7 The electron beam excitation positions in a specific embodiment of the present invention are located at the upper left corner, upper right corner, center of the lower edge, and center of the gold nanoantenna, respectively, and are marked with red dots in the pseudo-color scanning electron microscope image of the gold nanoantenna.

[0043] Figure 8 This is an experimental angular dichroic diagram generated by respectively exciting the upper left corner, upper right corner, lower edge center and center of the gold nanoantenna in a specific embodiment of the present invention. DETAILED DESCRIPTION

[0044] The present invention will be described in further detail below through specific embodiments in conjunction with the accompanying drawings so that those skilled in the art can understand the present invention more clearly.

[0045] A color router for photon momentum manipulation to modulate the momentum of two-color photons, e.g. Figure 1 shown.

[0046] The color router consists of a cross-shaped gold nanoantenna, a carbon nanotube film, and a printed circuit board. The length and width of the cross-shaped gold nanoantenna range from 200nm to 600nm, 50nm to 100nm, and the thickness ranges from 50nm to 100nm. Figure 2As shown. Below the gold nanoantenna is an ultra-precision aligned carbon nanotube film, and a printed circuit board is integrated under the carbon nanotube film. The electron beam excitation position is controlled by programming the programmable gate array, thereby controlling the radiation direction of the red and green light. Array-arranged excitation units are etched on the printed circuit board. Each excitation unit includes five emission cathodes and five gates. A programmable gate array is integrated under each emission cathode to achieve flexible adjustment and fast response of the emission cathode. The programmable gate array is used to control the level shifter of each excitation unit. The programmable gate array uses vertical and horizontal scanning circuits. When the emission cathode excites different positions of the carbon nanotube film above it, the electrons on the carbon nanotube film are enriched and further emitted to the cross-shaped metal nanoantenna, achieving electron beam excitation with nanometer-level precision. Under electron beam excitation, the experimental and simulated spectra of radiation from the gold nanoantenna with a size of 400nm×70nm are shown as follows. Figure 3 shown.

[0047] The scattering intensity I of the color router when excited by the electron beam is:

[0048]

[0049] Among them, P, M, T, Q αβ 、M αβ and T αβ Corresponding to the electric dipole, magnetic dipole, circular dipole, electric quadrupole, magnetic quadrupole, and circular quadrupole, c is the speed of light in vacuum, ω is the angular frequency, O represents the harmonic minimum term, and α and β are the horizontal and vertical coordinates of the orthogonal coordinate system. The scattering intensity of various multipole moments in the 400nm×70nm gold nanoantenna is shown in Figure 2. Figure 4 shown.

[0050] The printed circuit board in the color router can control the radiation direction of photons. When the electron beam on the printed circuit board hits the edge of the cross-shaped gold nanoantenna, the green and red components of the far-field emission are distributed along different propagation directions, where the red component is as follows: Figure 5 As shown, the green component is Figure 6 When an electron beam on a printed circuit board strikes the center of a cross-shaped metal nanoantenna, the green and red components of the far-field emission are distributed along the same propagation direction, i.e., a non-split pattern is observed.

[0051] By adjusting the electron beam excitation position through the printed circuit board and changing the far-field interference of the dipole moment and quadrupole moment, the active modulation of the two-color photon splitting can be effectively achieved. The five electron beam excitation positions are located at the upper left corner, upper right corner, lower edge center and center of the gold nanoantenna, respectively. Figure 7 As shown, the corresponding experimental angular dichroic diagram of the cross-shaped gold nanoantenna is shown as Figure 8 shown.

[0052] The method for preparing a cross-shaped metal nanoantenna is:

[0053] In the first step, a metal layer is deposited on a substrate using an electron beam evaporator. A positive resist is then spin-coated on the metal layer and etched using electron beam lithography to form a cross-shaped metal nanostructure.

[0054] In the second step, the cross-shaped metal nanostructure formed in the first step is irradiated with argon ions to remove the residual polymethyl methacrylate;

[0055] In the third step, the cross-shaped metal nanostructure obtained in the second step is immersed in ethanol, cleaned in the ethanol with ultrasound, and then dried in an oven. After drying, a commercial polydimethylsiloxane solution is cast on the dried cross-shaped metal nanostructure. Finally, the solution is degassed and cured in a vacuum oven to obtain a nanostructured polydimethylsiloxane film. The nanostructured polydimethylsiloxane film is then peeled off from the substrate to obtain a cross-shaped metal nanoantenna.

[0056] The substrate material is silicon dioxide or silicon;

[0057] The method for transferring the carbon nanotube film to the upper surface of the printed circuit board is as follows:

[0058] Step 1: Transfer the carbon nanotube film onto a substrate and form a strip array by reactive ion etching;

[0059] Step 2, patterning the carbon nanotube film formed into a strip array in step 1 by electron beam lithography;

[0060] Step 3, performing electron beam evaporation to deposit substrate material on the pattern of step 2;

[0061] Step 4, peeling the carbon nanotube film obtained in step 3 from the substrate;

[0062] In step 5, to improve alignment accuracy, electron beam lithography and electron beam evaporation are used to create marks on the carbon nanotube film peeled off in step 4. The marked carbon nanotube film is then transferred to a printed circuit board with the substrate material deposited on the carbon nanotube film facing the printed circuit board. Finally, hydrofluoric acid is used to selectively etch the substrate material and the emission cathode under the carbon nanotube film.

[0063] The center position of the prepared cross-shaped metal nanoantenna is aligned with the created mark and transferred to the carbon nanotube film.

[0064] The present invention relates to an optical router excited by an electron beam at a subwavelength scale and a preparation method thereof, which is used to modulate the momentum of two-color photons. The color router is composed of a metal nanoantenna, a carbon nanotube film, and a printed circuit board. When the electron beam excites the edge of the metal nanoantenna, the green and red light components emitted in the far field are distributed along different propagation directions, while when the excitation position is at the center, a non-split pattern is produced. In addition, the conversion of the characteristic radiation direction can be triggered by controlling the excitation position of the electron beam. By adjusting the excitation position and changing the far-field interference of the dipole moment and quadrupole moment, active modulation of the two-color photon splitting can be effectively achieved. The present invention provides a convincing platform for manipulating photon momentum at the nanoscale, paving the way for future quantum information technology and integrated photonic systems.

[0065] Finally, it should be noted that the purpose of disclosing the embodiments is to facilitate a further understanding of the present invention. Those skilled in the art should understand that various substitutions and modifications are possible without departing from the spirit and scope of the present invention and the appended claims. Therefore, the present invention should not be limited to the contents disclosed in the embodiments; the scope of protection claimed by the present invention shall be determined by the scope defined in the claims.

[0066] In summary, the above are only preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A color router for photon momentum manipulation, characterized by: The color router includes a cross-shaped metal nanoantenna, a carbon nanotube film, and a printed circuit board; The cross-shaped metal nanoantenna is formed by placing two rectangular metal nanoantennas perpendicular to each other, and the rectangular metal nanoantenna has a length of 200-600 nm, a width of 50-100 nm, and a thickness of 50-100 nm; The cross-shaped metal nanoantenna is located on the upper surface of the carbon nanotube film; The carbon nanotube film is located on the upper surface of the printed circuit board; The printed circuit board is etched with array-arranged excitation units, each of which includes five emission cathodes and five gates, and a programmable gate array is integrated under each emission cathode; The programmable gate array is used to control the excitation position of the electron beam, thereby controlling the radiation direction of the red and green light; The programmable gate array uses vertical and horizontal scanning circuits; When the emission cathode excites different positions of the carbon nanotube film above it, electrons on the carbon nanotube film are enriched and further emitted to the cross-shaped metal nanoantenna, achieving electron beam excitation with nanometer-level precision.

2. A color router for photon momentum manipulation according to claim 1, characterized in that: The metal is aluminum, gold or silver.

3. The color router for photon momentum manipulation according to claim 1, characterized in that: Scattering intensity of the color router when excited by electron beam for: in P 、 M 、 T 、 Q αβ 、 M αβ and T αβ They correspond to electric dipole, magnetic dipole, circular dipole, electric quadrupole, magnetic quadrupole and circular quadrupole respectively. c is the speed of light in a vacuum, ω is the angular frequency, O represents the harmonic minimum term, α , β are the horizontal and vertical coordinates in the orthogonal coordinate system.

4. The color router for photon momentum manipulation according to claim 1, characterized in that: The printed circuit board can regulate the radiation direction of photons. When the electron beam on the printed circuit board hits the edge of the cross-shaped metal nanoantenna, the green and red components of the far-field emission are distributed along different propagation directions. When the electron beam on the printed circuit board hits the center of the cross-shaped metal nanoantenna, the green and red components of the far-field emission are distributed along the same propagation direction, that is, a non-split pattern is observed.

5. A method for preparing a color router for photon momentum manipulation, characterized in that The following steps are involved: Step 11: depositing a metal layer on the substrate using an electron beam evaporator, then spin-coating a positive resist on the metal layer, and etching using an electron beam lithography process to form a cross-shaped metal nanostructure; Step 12, irradiating the formed cross-shaped metal nanostructure with argon ions to remove residual polymethyl methacrylate; Step 13: immersing the obtained cross-shaped metal nanostructure in ethanol, cleaning it in the ethanol with ultrasound, and then drying it in an oven. After drying, casting a commercial polydimethylsiloxane solution on the dried cross-shaped metal nanostructure, and finally degassing and curing it in a vacuum oven to obtain a nanostructured polydimethylsiloxane film. The nanostructured polydimethylsiloxane film is then peeled off from the substrate to obtain a cross-shaped metal nanoantenna. Step 14: transferring the carbon nanotube film onto a substrate and forming a strip array by reactive ion etching, patterning the carbon nanotube film formed into the strip array by electron beam lithography, and depositing the substrate material on the pattern by electron beam evaporation; Step 15: peeling the obtained carbon nanotube film from the substrate, and creating a mark on the peeled carbon nanotube film using electron beam lithography and electron beam evaporation. The marked carbon nanotube film is then transferred to a printed circuit board, with the substrate material deposited on the carbon nanotube film facing the printed circuit board. Finally, the substrate material and the emission cathode under the carbon nanotube film are selectively etched using hydrofluoric acid. Step 16: Align the center position of the prepared cross-shaped metal nanoantenna with the created mark and transfer it to the carbon nanotube film to obtain a color router for photon momentum manipulation.

Images