Support unit

Abstract

Disclosed is a support unit for supporting a supported element, the support unit comprising: (a) a ball joint; (b) a pressure applying unit configured to maintain contact between the spherical outer surface and the base; (c) a position control unit configured to contact the ball joint positioning element at a plurality of contact points and to set values of the first and second rotation angles of the spherical outer surface. And the spherical joint is positioned above the position control unit. A distance between the fixed center of rotation and a point on the spherical outer surface is less than (b) a distance between the fixed center of rotation and any of the plurality of contact points.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims the benefit of and priority to U.S. Patent Application No. 18 / 368,007, filed on September 13, 2023, entitled “SUPPORT UNIT,” which is incorporated herein by reference in its entirety. Background Art

[0003] Various systems include a tiltable mirror. The tiltable mirror is supported by a gimbal. The tilt angle of the tiltable mirror is set by a threaded element that extends significantly to the side of the gimbal and is located at the top of the gimbal.

[0004] Such gimbals exhibit a high footprint and are inaccurate.

[0005] There is an increasing need to provide accurate support units with a lower footprint. Summary of the invention

[0006] A support unit for supporting a supported element is provided. The support unit includes a spherical joint, a pressure applying unit and a position control unit. The spherical joint includes a spherical outer surface and a base, and the base includes an arc segment. The spherical outer surface is mechanically connected to a spherical joint positioning element. The spherical joint defines a fixed rotation center positioned above the support unit. The pressure application is configured to maintain contact between the spherical outer surface and the base. The position control unit is configured to contact the spherical joint positioning element at multiple contact points, and is configured to (a) set the value of a first rotation angle of the spherical outer surface around a first axis, and (b) set the value of a second rotation angle of the spherical outer surface around a second axis oriented relative to the first axis. The spherical joint is located above the position control unit. The distance between the fixed rotation center and a point on the spherical outer surface is less than the distance between the fixed rotation center and any contact point among the multiple contact points. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] The subject matter which is regarded as the embodiments is particularly pointed out and distinctly claimed in the concluding portion of the specification. However, the embodiments, both as to the organization and method of operation, together with samples, features, and advantages of the embodiments may be best understood by reference to the following detailed description when read in conjunction with the accompanying drawings, in which:

[0008] Figure 1 Examples of reference mechanical elements, housings, and bodies are illustrated;

[0009] Figure 2 Examples of reference mechanical elements, housings, and bodies are illustrated;

[0010] Figure 3 Examples of reference mechanical elements, housings, and bodies are illustrated;

[0011] Figure 4 An example of a housing is illustrated;

[0012] Figure 5 Examples of reference mechanical elements, housings, and bodies are illustrated;

[0013] Figure 6 Examples of housings and bodies are illustrated;

[0014] Figure 7 Examples of housings and bodies are illustrated; and

[0015] Figure 8 Examples are illustrated with reference to a mechanical element, a housing, and a body.

[0016] It should be understood that for simplicity and clarity of illustration, the elements shown in the drawings are not necessarily drawn to scale. For example, the size of some elements may be exaggerated relative to other elements for clarity. In addition, reference numerals may be repeated between the drawings to indicate corresponding or similar elements where deemed appropriate. DETAILED DESCRIPTION

[0017] According to an embodiment, a support unit is provided, which comprises a spherical joint defining a fixed rotation center which may correspond to a certain point of the supported element.

[0018] The supporting unit allows the supported element to be rotated along different rotation axes without raising a certain point of the supported element.

[0019] The rotation sets the inclination of the upper surface of the supported unit.

[0020] As the rotation of the ball joint is set by the position control unit by contacting the ball joint positioning element at one or more contact locations below the base of the ball joint, the setting of the tilt is done with a high degree of precision.

[0021] According to embodiments, the distance between the spherical outer surface of the spherical joint and one or more contact locations may exceed at least 1.5, 2, 3, 4, and more times a radius having a length equal to the distance between the fixed center of rotation and a point on the spherical outer surface.

[0022] The position control unit may be located below the position control unit, and this reduces the footprint of the support unit. The elements of the position control unit may extend sideways by up to a few millimeters (e.g., up to 2 to 4 centimeters), and the extension is formed in a plane lower than the plane of the supported element, wherein the lower plane is less crowded.

[0023] According to an embodiment, the height of the ball joint is set in a precise manner.

[0024] According to an embodiment, the supported element is part of or integrated with the supporting unit.

[0025] According to an embodiment, the supported unit is a measurement target of a substrate evaluation system. Examples of substrate evaluation systems include: (i) defect review systems such as Applied Materials Inc., San Jose, California TM Company (APPLIED MATERIALS TM Inc.'s Defect Review Scanning Electron Microscope SEMVISION TM ; (ii) metrology systems, such as Applied Materials TM PROVision of the company TM 3E Ebeam TM Metrology systems; (iii) electron beam inspection systems, such as Applied Materials TM PRIMEVISION TM ; or (iv) critical dimension scanning electron microscope, such as Applied Materials TM VERITYSEM TM etc. Charged particle evaluation systems can be manufactured by companies such as Hitachi TM (HITACHI TM ) or KLA in Milpitas, California TM Companies such as suppliers, or can be manufactured by other suppliers.

[0026] Figure 1 , Figure 2 , Figure 3 , Figure 5 and Figure 8 An example referring to the mechanical element 20 , the housing 30 , and the body 80 is illustrated.

[0027] Figure 4 An example of the housing 30 is illustrated.

[0028] Figure 6 and Figure 7 An example of the housing 30 and the main body 80 is illustrated.

[0029] The body and / or housing 30 may be movable relative to a reference mechanical element, which may be static or movable.

[0030] The supporting unit 10 is configured to support the supported element 100 .

[0031] According to an embodiment, the support unit 10 comprises a spherical joint comprising a spherical outer surface 38 and a base 31 comprising an arcuate segment 32 .

[0032] The arcuate segments 32 may be spaced apart from one another or may be in contact with one another.

[0033] The outer upper part of the arcuate segment forms part of a virtual sphere matching the spherical outer surface. The spherical outer surface 38 is defined by a radially symmetrical perturbation 37 of the body 80.

[0034] According to an embodiment, the spherical outer surface 38 is in mechanical communication with the ball joint positioning element 88. Figures 1 to 8 , the body 80 includes a spherical outer surface 38 and a ball joint positioning element 88 located below the spherical outer surface 38. It should be noted that the ball joint positioning element 88 can be connected to the spherical outer surface 38 or rigidly attached to the spherical outer surface 38.

[0035] The ball joint defines a fixed center of rotation 99 positioned above the support unit.

[0036] According to an embodiment, the supporting unit includes a pressure applying unit configured to maintain contact between the spherical outer surface and the base.

[0037] exist Figure 6 to Figure 7 , the pressure applying unit comprises a ball joint associated spring 41 which presses against a spring interface 36 of the housing. The joint associated spring also presses against a spring base 75 which has a threaded end 76 which cooperates with an internal thread 77 of a body 80. The rotation of the spring base determines the distance between the end of the joint associated spring and the ball joint. The distance can be adjusted, for example, to prevent irregular movements (jumps) formed when static tension between the joint associated spring and the ball joint is converted into dynamic tension.

[0038] According to an embodiment, the support unit comprises a position control unit (at Figure 8 91), the position control unit is configured to be at multiple contact points (such as Figure 5 The spherical joint positioning element is contacted at the connection points 40-1, 40-2, 40-3 and 40-4), the value of the first rotation angle of the spherical outer surface around the first axis is set, and the value of the second rotation angle of the spherical outer surface around the second axis oriented relative to the first axis is set.

[0039] exist Figures 1 to 8 In the embodiment, the first axis is perpendicular to the second axis, but other angular relationships may also be provided.

[0040] According to an embodiment, the supporting unit comprises a supported element interface (in Figure 8 Alternatively, the supported element belongs to the supporting unit, for example, is integrated with the body of the supporting unit.

[0041] According to an embodiment, the ball joint is above the position control unit.

[0042] According to an embodiment, the distance between the spherical outer surface of the ball joint and one or more contact locations (in Figure 8 102) may exceed (at least 1.1 times, 1.5 times, 2 times, 3 times, 4 times, 5 times and even more times) the radius (in Figure 8 denoted as 101), the radius has a length equal to the distance between the fixed center of rotation and a point on the spherical outer surface.

[0043] According to an embodiment, the position control unit comprises a first rotation angle controller comprising a first adjustable element 51 configured to set a value of a first angle or rotation.

[0044] According to an embodiment, the first adjustable element is an actuator or a motor for moving the ball joint positioning element.The first adjustable element may be configured to move relative to the housing and to vary the first rotation axis.

[0045] According to an embodiment, the first rotation angle controller further includes a first spring 62 configured to maintain contact between the first adjustable element and the body by pressing the body against the first adjustable element 51 . The first spring is held by a first spring holder 61 .

[0046] According to the embodiment, the spring retainer 61 is pressed against the first recess 48 formed in the housing 30 .

[0047] According to an embodiment, the first spring passes through a first spring opening 45 formed in the housing 30 .

[0048] According to an embodiment, the first recess 48 extends from both sides of the first spring opening 45 .

[0049] According to an embodiment, the first adjustable element passes through a first opening 44 formed in the housing.

[0050] According to an embodiment, the position control unit comprises a second rotation angle controller comprising a second adjustable element 51 configured to set the value of the second angle or rotation.

[0051] According to an embodiment, the second adjustable element is an actuator or a motor for moving the ball joint positioning element.The second adjustable element may be configured to move relative to the housing and to vary the second axis of rotation.

[0052] According to an embodiment, the second rotation angle controller further includes a second spring 72 configured to maintain contact between the second adjustable element and the body by pressing the body against the second adjustable element 52. The second spring is held by a second spring holder 71.

[0053] According to an embodiment, the second spring passes through a second spring opening 47 formed in the housing 30 .

[0054] According to the embodiment, the second spring retainer 71 is pressed against the second spring recess 49 formed in the housing 30 .

[0055] According to an embodiment, the second spring recess 49 extends from both sides of the second spring opening 47 .

[0056] According to an embodiment, the second adjustable element passes through a second opening 46 formed in the housing.

[0057] Figures 1 to 8 An embodiment is illustrated in which the base belongs to a housing surrounding the body, the spring holder is held by the housing, and the first and second adjustable elements are accessible via an opening formed in the housing.

[0058] According to an embodiment, the first adjustable element and the second adjustable element partially extend out of the opening.

[0059] According to an embodiment, the first adjustable element and the second adjustable element are located at a (same) first distance from the fixed rotation center, and the first spring and the second spring are located at a (same) second distance from the fixed rotation center. The first distance may be different from the second distance or may be equal to the second distance.

[0060] According to an embodiment, the support unit comprises a height control unit (at Figure 8 92), the height control unit is configured to control the height of the spherical joint.

[0061] According to an embodiment, the height control unit comprises a height setting window 33 which is vertically movable relative to the reference mechanical element and also prevents lateral movement of the support unit and the reference mechanical element 20. Even during adjustment of the height of the support unit, lateral movement is prevented.

[0062] According to an embodiment, a third adjustable element 34 is provided and includes a bolt having an outer thread that cooperates with an inner thread of a top opening 35 formed in a plane wall 39. The plane wall 39 extends to the side of the housing and includes a height setting window 33.

[0063] According to an embodiment, a clockwise (or counterclockwise) rotation of the third adjustable element 34 about the first rotation direction is converted into raising of the housing, and a counterclockwise (or clockwise) rotation of the third adjustable element 34 is converted into lowering of the housing.

[0064] The height control unit is configured to set the height of the ball joint by setting a height difference between the opening and a reference mechanical element.

[0065] According to an embodiment, the height setting window 33 is configured to interface with a portion of the reference mechanical element, wherein the width of the height setting window is equal to the width of the perturbations 21 and 22 of said portion of the reference mechanical element.

[0066] According to an embodiment, the support unit comprises a reference mechanical element.

[0067] According to an embodiment, when the supported element is supported by the supporting unit, the fixed rotation center is located at a point of the outer surface of the supported element.

[0068] For example, the point of the outer surface may be the center of the upper surface of the supported element or any other point of interest of the supported element.

[0069] In the preceding description, numerous specific details are set forth to provide a thorough understanding of embodiments of the present disclosure.

[0070] However, those skilled in the art will appreciate that embodiments of the present disclosure may be practiced without these specific details.In other cases, well-known methods, procedures, and components are not described in detail to avoid obscuring embodiments of the present disclosure.

[0071] The subject matter which is regarded as an embodiment of the present disclosure is particularly pointed out and distinctly claimed in the concluding portion of the specification. However, the embodiments of the present disclosure, both as to organization and method of operation, together with the objects, features, and advantages of the disclosure, may be best understood by reference to the following detailed description when read in conjunction with the accompanying drawings.

[0072] It should be understood that for simplicity and clarity of illustration, the elements shown in the drawings are not necessarily drawn to scale. For example, for clarity, the size of some elements may be exaggerated relative to other elements. In addition, where deemed appropriate, reference numerals may be repeated in the drawings to indicate corresponding or similar elements.

[0073] Any reference in the specification to a support unit shall apply mutatis mutandis to the method that may be performed by the support unit.

[0074] The term "and / or" means additionally or alternatively. For example, A and / or B means only A, or only B, or A and B.

[0075] In the foregoing specification, embodiments of the present disclosure have been described with reference to specific examples thereof. It will, however, be evident that various modifications and changes may be made thereto without departing from the broader spirit and scope of the appended claims.

[0076] Furthermore, the terms "front", "rear", "top", "bottom", "above", "below", etc. in the specification and claims, if any, are used for descriptive purposes and are not necessarily intended to describe permanent relative positions. It is understood that the terms so used are interchangeable under appropriate circumstances such that, for example, the embodiments of the disclosure described herein are capable of operation in other orientations than those illustrated or described herein.

[0077] Any reference to the term "comprising" or "having" or "including" should be applied mutatis mutandis to "containing" and / or to "consisting essentially of.

[0078] However, other modifications, changes, and substitutions are possible. Accordingly, the specification and drawings are to be regarded as illustrative rather than restrictive.

[0079] In the claims, any reference numerals placed between brackets shall not be construed as limiting the claims. The word "comprising" does not exclude the presence of other elements or steps than those listed in the claim. In addition, the terms "a" or "an" as used herein are defined as one or more than one. Moreover, the use of introductory phrases such as "at least one" and "one or more" in the claims shall not be construed as implying that any particular claim containing such introduced claim elements is limited to an embodiment containing only one such element by introducing another claim element by the indefinite article "a" or "an", even when the same claim includes the introductory phrases "one or more" or "at least one" and indefinite articles such as "a" or "an". This applies equally to the use of definite articles. Unless otherwise stated, terms such as "first" and "second" are used to arbitrarily distinguish the elements described by such terms. Therefore, these terms are not necessarily intended to indicate the time or other priority of such elements. The fact that certain measures are recited in different claims from each other does not indicate that the combination of these measures cannot be used advantageously.

[0080] While certain features of the embodiments have been illustrated and described herein, many modifications, substitutions, changes, and equivalents will now occur to those skilled in the art. It is therefore to be understood that the appended claims are intended to cover all such modifications and changes that fall within the true spirit of the embodiments.

Claims

1. A supporting unit for supporting a supported element, the supporting unit comprising: a spherical joint comprising a spherical outer surface and a base, the base comprising an arcuate segment, wherein the spherical outer surface is in mechanical communication with a spherical joint positioning element, and wherein the spherical joint defines a fixed center of rotation positioned above the support unit; a pressure applying unit configured to maintain contact between the spherical outer surface and the base; a position control unit configured to contact the spherical joint positioning element at a plurality of contact points and (a) set a value of a first rotation angle of the spherical outer surface about a first axis and (b) set a value of a second rotation angle of the spherical outer surface about a second axis oriented relative to the first axis; and wherein the ball joint is located above the position control unit; and wherein a distance between the fixed rotation center and a point on the spherical outer surface is less than a distance between the fixed rotation center and any contact point in the plurality of contact points. 2 . The support unit according to claim 1 , wherein a distance between the fixed rotation center and the point on the spherical outer surface is less than half a distance between the fixed rotation center and any contact point among the plurality of contact points.

3. A support unit according to claim 1 or 2, wherein the spherical outer surface and the ball joint locating element are part of a main body.

4. The support unit according to claim 3, wherein the pressure applying unit comprises a ball joint associated spring, which presses against a spring interface of the housing.

5. The support unit according to claim 3, wherein the position control unit comprises: a first rotation angle controller, the first rotation angle controller comprising a first adjustable element, the first adjustable element being configured to set a value of the first angle or rotation; as well as A second rotation angle controller includes a second adjustable element configured to set a value of the second angle or rotation.

6. The support unit according to claim 5, wherein: The first rotation angle controller further includes a first spring configured to maintain contact between the first adjustable element and the body; The second rotation angle controller further includes a second spring configured to maintain contact between the second adjustable element and the body. 7 . The supporting unit according to claim 6 , wherein the first spring and the second spring are held side by side by a spring holder.

8. The support unit according to claim 7, wherein the base belongs to a housing surrounding the body, wherein the spring holder is held by the housing, and wherein the first adjustable element and the second adjustable element are accessible via an opening formed in the housing. 9 . The supporting unit of claim 6 , wherein the first adjustable element and the second adjustable element are located above the first spring and the second spring.

10. The support unit of claim 9, wherein the first adjustable element and the second adjustable element are located at a first distance from the fixed rotation center, and wherein the first spring and the second spring are located at a second distance from the fixed rotation center. 11 . The support unit according to claim 1 or 2 , further comprising a height control unit configured to control the height of the spherical joint.

12. The support unit according to claim 11, wherein the height control unit comprises a height setting window and a third adjustable element, the height setting window preventing lateral movement of the support unit, and the third adjustable element configured to set a value of the height of the ball joint.

13. The support unit according to claim 12, wherein the height control unit is configured to dock with a reference mechanical element, and to set the height of the spherical joint by setting a height difference between the height setting window and the reference mechanical element. 14 . The support unit according to claim 13 , wherein the height setting window is configured to abut against a portion of the reference mechanical element, and wherein a width of the height setting window is equal to a width of a disturbance portion of the portion of the reference mechanical element.

15. The support unit according to claim 14, wherein the height control unit comprises a thread that cooperates with a corresponding thread of the reference mechanical element.

16. The support unit of claim 13, further comprising the reference mechanical element.

17. The supporting unit according to claim 1 or 2, wherein when the supported element is supported by the supporting unit, the fixed rotation center is located at a point of an outer surface of the supported element.

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