Six-axis linkage motion platform, scanning electron microscope and its application

Abstract

The present invention provides a six-axis linkage motion platform, which belongs to the field of scanning electron microscope technology. The present invention includes: an X-axis linear motion structure, which is arranged on a base; a Y-axis linear motion mechanism, which is arranged on a base and is used to provide the gantry with movement along the Y direction; a Z-axis linear motion structure, which is arranged on a gantry; an R-axis rotation structure, which is arranged on the X-axis linear motion structure and is used to rotate the sample 360°; a T-axis tilting structure, which is arranged on the Z-axis linear motion structure and is used to provide the electron gun assembly with swinging; and an A-axis linear motion mechanism, which is arranged on the T-axis tilting structure and is used to provide the electron gun assembly with linear motion along the A-axis direction. The present invention has an X-axis, a Y-axis, a Z-axis, an A-axis, a T-axis, and an R-axis, and can realize the adjustment of movement in six directions. When observing large-scale samples, there is no need for slicing, which avoids damage to precious samples.

Description

Technical Field

[0001] The present invention relates to the technical field of scanning electron microscopes, and in particular to a six-axis linkage motion platform, an application of the six-axis linkage motion platform in a scanning electron microscope, and a scanning electron microscope comprising the six-axis linkage motion platform. Background Art

[0002] With the advancement of technology, scanning electron microscopes are increasingly being used in enterprises, institutions, and major research institutes. Currently, conventional SEMs can only observe relatively small samples, placing extremely stringent requirements on sample size and space. Large samples must be sectioned, which damages precious specimens. Furthermore, conventional SEMs have limited observation angles, making multi-angle observation impossible. Summary of the Invention

[0003] In view of this, in order to solve the technical problem that when conventional scanning electron microscopes observe large-size samples, they need to perform slicing processing, which causes certain damage to precious samples, in the first aspect, the present invention provides a six-axis linkage motion platform, which has X-axis, Y-axis, Z-axis, A-axis, T-axis and R-axis, and can realize the adjustment of movement in six directions. When observing large-size samples, there is no need for slicing processing, thereby avoiding damage to precious samples.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] A six-axis linkage motion platform, comprising:

[0006] The X-axis linear motion structure is arranged on the base;

[0007] The Y-axis linear motion mechanism is provided on the base and is used to provide the gantry with movement along the Y direction;

[0008] A Z-axis linear motion structure is provided on the gantry;

[0009] The R-axis rotation structure is provided on the X-axis linear motion structure and is used to rotate the sample 360°;

[0010] A T-axis tilting structure is provided on the Z-axis linear motion structure to provide the electron gun assembly with a swinging motion;

[0011] The A-axis linear motion mechanism is arranged on the T-axis tilting structure and is used to provide linear motion of the electron gun assembly along the A-axis direction.

[0012] Preferably, it also includes:

[0013] A sample changing shaft, provided on the base, for changing samples;

[0014] The X-axis linear motion structure is arranged on the sample changing axis.

[0015] Preferably, the T-axis tilt structure allows the electron gun assembly to swing within a range of -20° to 150°.

[0016] Preferably, the electron gun assembly comprises:

[0017] an electron gun bracket connected to the A-axis linear motion mechanism;

[0018] The electron gun is fixed on the electron gun bracket.

[0019] Preferably, it also includes:

[0020] An integral maintenance shaft is provided at the bottom of the base and is used to move the six-axis linkage motion platform as a whole out of the vacuum chamber.

[0021] In a second aspect, the present invention provides a scanning electron microscope comprising the above-mentioned six-axis linkage motion platform.

[0022] In a third aspect, the present invention provides an application of the above-mentioned six-axis linkage motion platform in a scanning electron microscope.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] The six-axis motion platform of this invention possesses six degrees of freedom: X, Y, Z, A, T, and R, enabling adjustable motion in all six directions. This advanced platform design eliminates the need for cumbersome sectioning when observing large samples, thus avoiding potential damage to precious specimens. This comprehensive range of motion adjustment allows researchers to more flexibly and meticulously observe and analyze samples, ensuring sample integrity and research accuracy.

[0025] The six-axis linkage motion platform involved in the present invention is applied to a scanning electron microscope to realize a multi-angle observation function. The platform can accurately adjust the position and posture of the sample through a precise six-axis control mechanism, thereby realizing all-round, multi-angle and detailed observation during the observation process of the scanning electron microscope. In addition, the platform also has excellent stability and reliability, and can maintain stable performance output during long-term, high-intensity observation tasks. In the field of scanning electron microscopy, the application of this six-axis linkage motion platform not only greatly broadens the observation range and improves the observation quality, but also provides scientific researchers with a more convenient and efficient means of observation, which is of great significance to promoting the development of related scientific research fields.

[0026] The six-axis linkage motion platform provided by this invention can accommodate large samples, enabling nondestructive observation of these samples without blind spots. Breaking with the conventional design of a scanning electron microscope (SEM), where the electron gun remains stationary, both the electron gun and the sample are movable, providing greater freedom of movement and enabling observation of a wider range of angles and samples. It can also be used in diverse scenarios, such as atmospheric environments.

[0027] The observation angle range is wider and the electron gun has higher degrees of freedom.

[0028] There are fewer restrictions on sample size and weight.

[0029] Due to the mobility of the electron gun, the observation of the sample is no longer limited to the traditional fixed electron gun position, thus achieving flexible observation of different parts of the sample.

[0030] The innovative design of the present invention significantly reduces the restrictions on sample size and weight, allowing larger and heavier samples to be observed non-destructively under a scanning electron microscope.

[0031] The high-precision control of the six-axis linkage motion platform ensures the stability and positioning accuracy of the sample during observation, which is crucial for obtaining high-quality images. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0033] Figure 2 Schematic diagram of the structure of the present invention in different postures;

[0034] Figure 3 is a side view of the present invention;

[0035] Figure 4 A top view of the present invention;

[0036] In the figure, 1. Gantry; 2. T-axis tilting structure; 3. Electron gun bracket; 4. Electron gun; 5. Y-axis linear motion mechanism; 6. Overall maintenance axis; 7. Base; 8. Sample changing axis; 9. X-axis linear motion structure; 10. R-axis rotation structure; 11. Z-axis linear motion structure; 12. A-axis linear motion mechanism. DETAILED DESCRIPTION

[0037] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention; it is obvious that the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0038] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "top / bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limiting the present invention.

[0039] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "mounted / connected," and "connected" should be understood in a broad sense. For example, "connected" can mean a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be internal communication between two components. Those skilled in the art will be able to understand the specific meanings of the above terms in the present invention in specific circumstances.

[0040] like Figure 1-4 As shown, the present invention provides a six-axis linkage motion platform, comprising:

[0041] X-axis linear motion structure 9, disposed on the base 7;

[0042] A Y-axis linear motion mechanism 5 is provided on the base 7 and is used to provide the gantry 1 with movement along the Y direction;

[0043] A Z-axis linear motion structure 11 is provided on the gantry 1;

[0044] The R-axis rotation structure 10 is provided on the X-axis linear motion structure 9 and is used to rotate the sample 360°;

[0045] The T-axis tilting structure 2 is provided on the Z-axis linear motion structure 11 to provide the electron gun assembly with a swinging motion;

[0046] The A-axis linear motion mechanism 12 is provided on the T-axis tilting structure 2 and is used to provide linear motion of the electron gun assembly along the A-axis direction.

[0047] The above-mentioned six-axis linkage motion platform provided by the present invention, wherein the X-axis linear motion structure 9 and the R-axis rotation structure 10 control the movement of the sample stage, the Y-axis linear motion mechanism 5, the T-axis tilting structure 2, the A-axis linear motion mechanism 12, and the Z-axis linear motion structure 11 control the movement of the electron gun 4. Through the multi-axis motion control board, the linkage control of the six axes is realized, and multi-angle non-destructive testing of the sample is realized.

[0048] Among them, the X-axis linear motion structure 9, the Y-axis linear motion mechanism 5 and the Z-axis linear motion structure 11 can select a linear sliding mechanism of a slider and a slide rail, or other conventional linear motion structures in this field, such as a conventional lead screw, linear motor, linear module, crank slider, electric push rod, electric cylinder, gear rack, etc. The linear motion structure can be. As for its specific composition, it is an existing technology and can be selected according to actual needs, so it will not be repeated here.

[0049] The R-axis rotating structure 10 refers to a mechanism or component that rotates around a rotation axis. The R-axis can represent any axis around which rotation occurs. For example, in robotics, the R-axis can be a rotary joint in a robot arm, enabling the robot to rotate in a horizontal plane. This type of rotating structure is widely used in various mechanical systems and automated equipment to achieve specific motion functions. In the present invention, the R-axis rotating structure refers to rotation around the axis of the R-axis rotating structure.

[0050] The T-axis tilting structure 2 refers to a mechanical structure that can realize tilting motion along the T-axis direction. This structure is usually used in application scenarios where it is necessary to adjust or control the tilt of an object in a vertical plane, such as machine tools, robots, aerospace and other fields. The T-axis tilting structure is mainly composed of a support seat, a driving component and a transmission device. The T-axis tilting structure in the present invention is preferably driven by a motor, and is rotated along the T-axis direction through a worm gear transmission device. A specific rotation angle range is set by a control system, and finally the tilting motion required by the user is formed.

[0051] The A-axis linear motion mechanism 12 is a mechanical mechanism capable of linear motion along the A-axis. This mechanism is widely used in various mechanical devices, robotic systems, CNC machine tools, and other applications to achieve specific motion functions. A conventional A-axis linear motion mechanism can be used in the present invention, and those skilled in the art can select one based on their actual needs.

[0052] The present invention also includes:

[0053] A sample changing shaft 8 is provided on the base 7 and is used for sample replacement;

[0054] The X-axis linear motion structure 9 is arranged on the sample changing axis 8 .

[0055] Sample replacement and electron gun 4 maintenance were considered from the outset. Large samples are heavy, and to prevent personnel from entering the vacuum chamber and potentially damaging the equipment and personnel, a sample exchange shaft 8 was designed. This shaft is located beneath the R-axis rotating structure 10. To change samples, simply manually push and pull the shaft 8, pulling the entire R-axis rotating structure 10 out of the vacuum chamber. After replacing the sample, the shaft is manually reset to complete the sample change.

[0056] In the present invention, the T-axis tilting structure 2 provides the electron gun assembly with a swing range of -20° to 150°.

[0057] In the present invention, the electron gun assembly comprises:

[0058] an electron gun support 3 connected to the A-axis linear motion mechanism 12;

[0059] The electron gun 4 is fixed on the electron gun bracket 3 .

[0060] The present invention also includes:

[0061] The integral maintenance shaft 6 is provided at the bottom of the base 7 and is used to move the six-axis linkage motion platform as a whole out of the vacuum chamber.

[0062] The movement of the electron gun 4 also requires maintenance. To facilitate maintenance of the electron gun 4, an integral maintenance shaft 6 is designed. When maintenance is required, the entire shaft is pulled out of the vacuum chamber. This pulls half of the six-axis linkage motion platform out of the vacuum chamber, while the Y-axis linear motion structure 5 is simultaneously moved to its outermost position. Maintenance of the electron gun 4 is then possible. Given the heavy weight of the linkage motion platform, a support frame can be installed outside the vacuum chamber.

[0063] In a second aspect, the present invention provides a scanning electron microscope comprising the above-mentioned six-axis linkage motion platform.

[0064] In a third aspect, the present invention provides an application of the above-mentioned six-axis linkage motion platform in a scanning electron microscope.

[0065] The above are only preferred embodiments of the present invention; however, the scope of protection of the present invention is not limited thereto. Any person skilled in the art who, within the technical scope disclosed by the present invention, makes equivalent substitutions or modifications based on the technical solutions and improved concepts of the present invention shall be covered by the scope of protection of the present invention.

Claims

1. A six-axis linkage motion platform, characterized in that: include: The X-axis linear motion structure is arranged on the base; The Y-axis linear motion mechanism is provided on the base and is used to provide the gantry with movement along the Y direction; A Z-axis linear motion structure is provided on the gantry; The R-axis rotation structure is provided on the X-axis linear motion structure and is used to rotate the sample 360°; A T-axis tilting structure is provided on the Z-axis linear motion structure to provide a swinging effect on the electron gun assembly; An A-axis linear motion mechanism is provided on the T-axis tilting structure and is used to provide linear motion of the electron gun assembly along the A-axis direction; Also includes: A sample changing shaft, provided on the base, for changing samples; The X-axis linear motion structure is arranged on the sample changing axis; Also includes: An integral maintenance shaft is provided at the bottom of the base and is used to move the six-axis linkage motion platform as a whole out of the vacuum chamber.

2. The six-axis linkage motion platform according to claim 1, characterized in that: The T-axis tilt structure allows the electron gun assembly to swing within a range of -20° to 150°.

3. The six-axis linkage motion platform according to claim 1, characterized in that: The electron gun assembly comprises: an electron gun bracket connected to the A-axis linear motion mechanism; The electron gun is fixed on the electron gun bracket.

4. A scanning electron microscope, characterized in that A six-axis linkage motion platform comprising any one of claims 1-3.

5. Application of the six-axis linkage motion platform according to any one of claims 1 to 3 in a scanning electron microscope.

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