A quick detachable tooling for ion implanter beam line

Abstract

The application discloses a kind of quick detachable tool for ion implanter beam line, it is related to the field of ion implanter, including installation pipe and installation tool, the inside of installation tool is sleeved with energy-reducing sheet, installation tool is fixedly installed with installation pressure piece in inside, clamp assembly is arranged between installation pipe and installation tool, cooling assembly is arranged on installation tool, cooling assembly is used to cool the working environment of energy-reducing sheet, limiting assembly is arranged on the front of installation tool, limiting assembly is used to lock and limit clamp assembly and cooling assembly.The application uses the cooperation use mode of installation pipe, installation tool, energy-reducing sheet, clamp assembly and limiting assembly, under the action of locking assembly, first limiting plate and second limiting plate can be in stable state to clamp assembly locking, remove the locking state of locking assembly, clamp assembly can be directly disassembled, so that installation tool and energy-reducing sheet are quickly disassembled and replaced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of ion implanters, in particular to a quick dismounting tool for beam line of ion implanter. BACKGROUND

[0002] The working principle of ion implanter is to use the ion beam generated by ion source, accelerate the ions to the required energy through acceleration and focusing system, and then guide the ion beam into the target tissue.

[0003] The energy reduction sheet is also called energy reducer or energy regulator. The application of energy reduction sheet in ion implanter is to adjust the energy of beam to the designed energy level. In some application scenarios, such as tumor treatment in medical use or material science research, lower beam energy may be required, and fine control of energy is realized through energy reduction sheet.

[0004] The fixing method of energy reduction sheet needs to ensure its stability and safety under the impact of high-energy beam. Generally, bolts are used to fix the clamp on the fixed support of beam line, so as to ensure that the energy reduction sheet will not loosen or shift under the impact of high-energy beam. The energy reduction sheet is generally fixed on a certain section of beam transport line, so it is in a high-dose irradiation environment. Moreover, the energy reduction sheet is a consumable product and needs to be replaced frequently. In order to ensure the health of workers and reduce the irradiation time, the fixing method of energy reduction sheet should have the characteristics of quick dismounting. However, the above-mentioned bolt fixing method needs to spend a lot of time to dismount the energy reduction sheet clamp from the fixed support of beam line, which is not conducive to the health of workers, thus having certain defects. SUMMARY

[0005] The present application aims to provide a quick dismounting tool for beam line of ion implanter to solve the problems in the background art.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical scheme: a quick dismounting tool for beam line of ion implanter, comprising a mounting pipe and a mounting tool, the inside of the mounting tool is sleeved with an energy reduction sheet, and the inside of the mounting tool is fixedly installed with an installation pressure piece for fixing the energy reduction sheet.

[0007] Further comprising:

[0008] A clamp assembly is arranged between the mounting pipe and the mounting tool.

[0009] A cooling assembly is arranged on the mounting tool, and the cooling assembly is used for cooling the working environment of the energy reduction sheet.

[0010] A limiting assembly is arranged on the front face of the mounting tool, and is used for locking and limiting the clamp assembly and the cooling assembly.

[0011] Preferably, the clamp assembly comprises:

[0012] A clamping ring is fixedly connected to the opposite side of the mounting pipe and the mounting tool;

[0013] A fixing member and a hinge member are rotationally connected through the hinge member, and an arc-shaped groove matched with the clamping ring is arranged on the inner wall of the fixing member;

[0014] A protrusion is fixedly connected to the front face of the fixing member, and the protrusion is linked with the limiting assembly.

[0015] Preferably, the cooling assembly comprises:

[0016] A flow chamber is arranged on the mounting tool, and is used for flowing cooling liquid to cool the mounting tool;

[0017] A sealing plate is arranged on the front face of the mounting tool;

[0018] A butt joint is arranged on the side of the sealing plate facing the mounting tool, and the outer wall of the butt joint is extrudedly sleeved with the inner cavity of the flow chamber;

[0019] A connecting pipe is connected to one end of the butt joint;

[0020] A rubber block is fixedly connected between the butt plate and the sealing plate, and the butt plate is linked with the limiting assembly.

[0021] Preferably, the limiting assembly comprises:

[0022] A first limiting plate and a second limiting plate are respectively clamped on the opposite sides of adjacent protrusions;

[0023] A locking assembly is arranged on the first limiting plate and the second limiting plate, and is used for locking the distance between the first limiting plate and the second limiting plate, and the locking assembly is linked with the butt plate.

[0024] Preferably, the locking assembly comprises:

[0025] A first mounting block is fixedly connected to the side of the first limiting plate facing the second limiting plate;

[0026] A second mounting block is fixedly connected to the side of the second limiting plate facing the first limiting plate, and the second mounting block is located on the side of the first mounting block.

[0027] A locking block is clamped between the first mounting block and the second mounting block.

[0028] Preferably, the locking assembly further comprises:

[0029] A driving block is slidingly arranged inside the first mounting block, and the driving block is used to extrude the locking block to move towards the second mounting block.

[0030] An adjusting screw is threadedly connected with the outer wall of the first mounting block, one end of the adjusting screw is rotationally connected with the driving block, and the other end of the adjusting screw is fixedly connected with a handle.

[0031] An extrusion head is fixedly connected to the back of the driving block, and one end of the extrusion head is extrusionally matched with the butt joint plate.

[0032] A reset assembly is arranged between the locking block and the first mounting block.

[0033] Preferably, a connecting hole is formed in the side of the first mounting block, one side of the outer wall of the locking block is slidingly sleeved with the connecting hole, one side of the second mounting block is provided with a locking hole, one side of the bottom of the locking block is provided with a first inclined slope, and the locking block is extruded to the second mounting block through the first inclined slope.

[0034] Preferably, a mounting groove matched with the driving block is formed in the back of the first mounting block, the inner cavity of the mounting groove and the inner cavity of the connecting hole are connected with each other, a second inclined slope is formed in the side of the driving block, a guide groove is formed in the side of the locking block facing the driving block, and the second inclined slope in the side of the driving block is extrusionally matched with the inner wall of the guide groove.

[0035] Preferably, the reset assembly comprises:

[0036] A first fixed block is fixedly connected to the outside of the locking block.

[0037] A sliding groove is formed in the top and bottom of the inner wall of the connecting hole, and the first fixed block is slidingly sleeved in the inside of the sliding groove.

[0038] A second fixed block is fixedly connected to the end of the inner cavity of the sliding groove.

[0039] A guide rod is fixedly connected at the end of the second fixed block, and the outer wall of the guide rod is slidingly inserted into the first fixed block.

[0040] A reset spring is slidingly sleeved on the outside of the guide rod, and the reset spring is located between the first fixed block and the second fixed block.

[0041] Preferably, the opposite side of the first limiting plate and the second limiting plate is fixedly connected with a positioning block, a positioning hole is formed in the top of the protruding block, the outer wall of the positioning block is in sliding sleeve connection with the inner cavity of the positioning hole, the side of the first limiting plate facing the second limiting plate is fixedly connected with a positioning rod, and the bottom of the outer portion of the positioning rod is in sliding through sleeve connection with the second limiting plate.

[0042] Technical effects and advantages of the present application:

[0043] (1) The present application utilizes the cooperative use mode of the mounting pipe, the mounting tool, the energy-reducing sheet, the clamp assembly and the limiting assembly. The limiting assembly comprises a first limiting plate, a second limiting plate and a locking assembly. Under the action of the locking assembly, the first limiting plate and the second limiting plate can be in a stable state to lock the clamp assembly. When the locking state of the locking assembly is released, the clamp assembly can be directly disassembled, thereby quickly disassembling and replacing the mounting tool and the energy-reducing sheet.

[0044] (2) The present application utilizes the cooperative use mode of the cooling assembly, the first limiting plate, the second limiting plate and the locking assembly. The locking assembly adopts an adjusting screw to push a driving block to move, so that a locking block is in clamping connection with a second mounting block, thereby locking the distance between the first limiting plate and the second limiting plate, so that the first limiting plate and the second limiting plate are in a stable state to lock the clamp assembly. Moreover, the adjusting screw pushing the driving block to move can also disassemble the cooling assembly on the mounting tool, thereby further improving the efficiency of disassembling and replacing the mounting tool and the energy-reducing sheet. BRIEF DESCRIPTION OF DRAWINGS

[0045] Figure 1 It is a schematic diagram of the overall structure of the present application.

[0046] Figure 2 It is a schematic diagram of the overall structure of the mounting tool of the present application.

[0047] Figure 3 It is a schematic diagram of the overall structure of the fixing member of the present application.

[0048] Figure 4 It is a schematic diagram of the front internal structure of the mounting tool of the present application.

[0049] Figure 5 It is a schematic diagram of the side internal structure of the mounting tool of the present application.

[0050] Figure 6 It is a schematic diagram of the partial front internal structure of the present application.

[0051] Figure 7 It is a schematic diagram of the front internal structure of the first mounting block of the present application.

[0052] Figure 8The schematic view of the internal structure of the bottom surface of the locking block and the second mounting block in the clamped state.

[0053] Figure 9 The schematic view of the internal structure of the bottom surface of the locking block and the second mounting block in the separated state.

[0054] In the figure: 1, mounting pipe; 2, mounting tool; 3, energy-reducing sheet; 4, mounting pressing piece; 5, clamp assembly; 51, clamping ring; 52, fixing piece; 53, hinged piece; 54, circular-arc groove; 55, protruding block; 6, cooling assembly; 61, flow chamber; 62, sealing plate; 63, butt joint; 64, connecting pipe; 65, rubber block; 66, butt plate; 7, limiting assembly; 71, first limiting plate; 72, second limiting plate; 73, locking assembly; 731, first mounting block; 732, second mounting block; 733, locking block; 734, driving block; 735, extruding head; 736, adjusting screw; 737, handle; 738, connecting hole; 739, locking hole; 7310, mounting groove; 7311, first fixing block; 7312, reset spring; 7313, second fixing block; 7314, guide rod; 7315, guide groove; 74, positioning block; 75, positioning hole; 76, positioning rod. DETAILED DESCRIPTION

[0055] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0056] The present application provides a method for preparing a compound of formula (I) Figures 1-9The utility model provides a kind of quick detachable tool for ion implantation machine beam line, including installation pipe 1 and installation tool 2, installation pipe 1 is used to transport ion beam, the inside sleeve of installation tool 2 is equipped with energy-reducing sheet 3, installation tool 2 is fixedly installed inside installation pressure piece 4 of energy-reducing sheet 3, installation pressure piece 4 is fixed on installation tool 2 by bolt, so as to ensure the stability of energy-reducing sheet 3 installation in installation tool 2, including clamp assembly 5, cooling assembly 6 and limiting assembly 7, clamp assembly 5 is arranged between installation pipe 1 and installation tool 2, under the action of clamp assembly 5, it can guarantee the stability of installation tool 2 installation between two installation pipe 1, cooling assembly 6 is arranged on installation tool 2, cooling assembly 6 is used to cool the working environment of energy-reducing sheet 3, limiting assembly 7 is arranged on the front of installation tool 2, limiting assembly 7 is used to lock limiting clamp assembly 5 and cooling assembly 6, i.e. under the action of limiting assembly 7, it can guarantee the stability of installation of clamp assembly 5 to installation tool 2 clamping, and also can lock cooling assembly 6 installed on installation tool 2, remove limiting assembly 7, and installation tool 2 can be quickly separated from cooling assembly 6 and clamp assembly 5, so as to quickly dismount and install installation tool 2 and energy-reducing sheet 3, this replacement process is easy to operate, and the failure rate is low, can be completed in short time, greatly shorten the time of staff exposed to radiation.

[0057] Specifically, clamp assembly 5 includes clamping ring 51, fixed part 52, hinged part 53 and protrusion 55, one side of installation pipe 1 and installation tool 2 is fixedly connected with clamping ring 51, two corresponding fixed parts 52 are rotatably connected by hinged part 53, the inner wall of fixed part 52 is provided with arc recess 54 matched with clamping ring 51, protrusion 55 is fixedly connected to the front of fixed part 52, and protrusion 55 forms linkage with limiting assembly 7, so that the protrusions 55 on the front of two fixed parts 52 are locked by limiting assembly 7, so that two fixed parts 52 can lock clamping ring 51 on installation pipe 1 and installation tool 2, so as to ensure the stability of relative installation of installation pipe 1 and installation tool 2, and the locking of two protrusions 55 by limiting assembly 7 is released, so that two fixed parts 52 can be rotated and opened, thereby facilitating the dismounting and mounting of installation tool 2.

[0058] Further, the cooling assembly 6 comprises a flow chamber 61, a sealing plate 62, a butt joint 63, connecting pipes 64, rubber blocks 65 and a butt plate 66, the flow chamber 61 is arranged on the mounting tool 2, the flow chamber 61 is used for flowing the cooling liquid to cool the mounting tool 2, the sealing plate 62 is arranged on the front surface of the mounting tool 2, the butt joint 63 is arranged on the side of the sealing plate 62 facing the mounting tool 2, the outer wall of the butt joint 63 is extruded and sleeved with the inner cavity of the flow chamber 61, and the outer wall of the butt joint 63 is sleeved with a sealing sleeve, which can improve the sealing between the butt joint 63 and the flow chamber 61, one end of the connecting pipe 64 is connected with the butt joint 63, the rubber block 65 is fixedly connected between the butt plate 66 and the sealing plate 62, the two connecting pipes 64 are respectively connected with an external water flow circulating conveying system, and the two connecting pipes 64 are respectively water inlet and outlet pipes, so that the cooling liquid flowing in the flow chamber 61 cools the mounting tool 2 and the energy-reducing sheet 3, thereby improving the service life of the energy-reducing sheet 3, and the butt plate 66 is linked with the limiting assembly 7.

[0059] Further, the limiting assembly 7 comprises a first limiting plate 71, a second limiting plate 72 and a locking assembly 73, the first limiting plate 71 and the second limiting plate 72 are respectively clamped on the sides opposite to the adjacent protrusions 55, the locking assembly 73 is arranged between the first limiting plate 71 and the second limiting plate 72, the locking assembly 73 is used for locking the distance between the first limiting plate 71 and the second limiting plate 72, the locking assembly 73 is linked with the butt plate 66, under the action of the locking assembly 73, the first limiting plate 71 and the second limiting plate 72 can press the two protrusions 55 together, thereby ensuring the stability of the two fixing members 52 locking the two clamping annular rings 51, the side opposite to the first limiting plate 71 and the second limiting plate 72 is fixedly connected with a positioning block 74, the top of the protrusion 55 is provided with a positioning hole 75, the outer wall of the positioning block 74 is slidably sleeved with the inner cavity of the positioning hole 75, the side of the first limiting plate 71 facing the second limiting plate 72 is fixedly connected with a positioning rod 76, the bottom of the outer portion of the positioning rod 76 is slidably inserted and sleeved with the second limiting plate 72, and the positioning block 74 and the positioning rod 76 can improve the stability of the first limiting plate 71 and the second limiting plate 72 clamped on the sides opposite to the two protrusions 55.

[0060] In particular, the locking assembly 73 comprises a first mounting block 731, a second mounting block 732, a locking block 733, the first mounting block 731 is fixedly connected to one side of the first limiting plate 71 facing the second limiting plate 72, the second mounting block 732 is fixedly connected to one side of the second limiting plate 72 facing the first limiting plate 71, the second mounting block 732 is located on the side of the first mounting block 731, the locking block 733 is clamped between the first mounting block 731 and the second mounting block 732, the locking block 733 can reduce the distance between the second limiting plate 72 and the first limiting plate 71 by extruding the second mounting block 732, so as to extrude and clamp the two protrusions 55 by the first limiting plate 71 and the second limiting plate 72, the locking assembly 73 further comprises a driving block 734, an adjusting screw 736, an extrusion head 735 and a reset assembly, the driving block 734 is slidingly arranged in the interior of the first mounting block 731, the driving block 734 is used for extruding the locking block 733 to move towards the second mounting block 732, the outer wall of the adjusting screw 736 is threadedly connected with the first mounting block 731, one end of the adjusting screw 736 is rotatably connected with the driving block 734, the other end of the adjusting screw 736 is fixedly connected with a handle 737, the handle 737 is used for driving the adjusting screw 736 to rotate, so that the adjusting screw 736 drives the driving block 734 to move towards the mounting tool 2 to extrude the two locking blocks 733, the extrusion head 735 is fixedly connected to the back of the driving block 734, one end of the extrusion head 735 is extruded to fit with the butt joint plate 66, when the adjusting screw 736 drives the driving block 734 to move towards the mounting tool 2, the extrusion head 735 can also extrude the butt joint plate 66, so as to extrude and lock the sealing plate 62, thereby ensuring the stability of the butt joint 63 driven by the sealing plate 62 and the flow chamber 61, the reset assembly is arranged between the locking block 733 and the first mounting block 731, when the adjusting screw 736 drives the driving block 734 to move away from the mounting tool 2, the reset assembly can drive the locking block 733 to move towards the interior of the first mounting block 731, so that the locking block 733 is separated from the second mounting block 732.

[0061] In particular, the side of the first mounting block 731 is provided with a connecting hole 738, one side of the outer wall of the locking block 733 is slidingly sleeved with the connecting hole 738, one side of the second mounting block 732 is provided with a locking hole 739, one side of the bottom of the locking block 733 is provided with a first inclined slope, the locking block 733 extrudes the second mounting block 732 through the first inclined slope, as Figure 7As shown, when the locking block 733 moves towards the second mounting block 732, the locking block 733 extrudes the second mounting block 732 to move towards the first limiting plate 71, so that the second limiting plate 72 moves towards the first limiting plate 71, and the distance between the first limiting plate 71 and the second limiting plate 72 is reduced. The back of the first mounting block 731 is provided with a mounting groove 7310 matched with the driving block 734, the inner cavity of the mounting groove 7310 is connected with the inner cavity of the connecting hole 738, the side of the driving block 734 is provided with a second inclined slope, and the side of the locking block 733 is provided with a guide groove 7315. As shown, Figure 8 and Figure 9 As shown, the driving block 734 moves towards the mounting tool 2, and the side of the driving block 734 extrudes the two locking blocks 733 to move away from each other, so that the locking block 733 extrudes the second mounting block 732.

[0062] Further, the reset assembly comprises a first fixed block 7311, a sliding groove, a second fixed block 7313, a guide rod 7314 and a reset spring 7312. The first fixed block 7311 is fixedly connected to the outside of the locking block 733. The sliding groove is provided on the top and bottom of the inner wall of the connecting hole 738. The first fixed block 7311 is slidingly sleeved in the inside of the sliding groove. The second fixed block 7313 is fixedly connected to the end of the inner cavity of the sliding groove. The end of the guide rod 7314 is fixedly connected with the second fixed block 7313. The outer wall of the guide rod 7314 is slidingly inserted into the first fixed block 7311. The reset spring 7312 is slidingly sleeved on the outside of the guide rod 7314. The reset spring 7312 is located between the first fixed block 7311 and the second fixed block 7313. The reset spring 7312 provides the locking block 733 with a spring force for moving towards the inside of the first mounting block 731 through the first fixed block 7311. When the driving block 734 no longer extrudes the locking block 733, as shown, Figure 9 As shown, the locking block 733 moves towards the inside of the first mounting block 731, and the locking block 733 is separated from the second mounting block 732. The spring force of the reset spring 7312 acting on the locking block 733 is sufficient to push the locking block 733 away from the second mounting block 732. At this time, the first limiting plate 71 and the second limiting plate 72 can move away from each other, the locking of the protrusion 55 is released, so that the fixing part 52 is opened, and the extrusion head 735 on the back of the driving block 734 is separated from the sealing plate 62, so that the mounting tool 2 and the energy-reducing sheet 3 are disassembled.

[0063] Finally, it should be noted that the above only describes the preferred embodiments of the present application and is not intended to limit the present application. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art will appreciate that the technical solutions described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalent features, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A quick detachable tool for ion implanter beam line, comprising a mounting pipe (1) and a mounting tool (2), the inside of the mounting tool (2) is sleeved with an energy reduction sheet (3), and the inside of the mounting tool (2) is fixedly provided with a mounting pressing piece (4) for fixing the energy reduction sheet (3); characterized in that Further comprising: A clamp assembly (5) is arranged between the mounting pipe (1) and the mounting tool (2), and the clamp assembly (5) comprises: A clamping ring (51) is fixedly connected to the opposite side of the mounting pipe (1) and the mounting tool (2); A fixing piece (52) and a hinge piece (53) are rotatably connected through the hinge piece (53); A protrusion (55) is fixedly connected to the front surface of the fixing piece (52); A cooling assembly (6) is arranged on the mounting tool (2), and the cooling assembly (6) is used for cooling the working environment of the energy reduction sheet (3), and the cooling assembly (6) comprises: A sealing plate (62) is arranged on the front surface of the mounting tool (2); A rubber block (65) and a butt plate (66) are fixedly connected between the butt plate (66) and the sealing plate (62); A limiting assembly (7) is arranged on the front surface of the mounting tool (2), and the limiting assembly (7) is used for locking and limiting the clamp assembly (5) and the cooling assembly (6), and the limiting assembly (7) comprises: A first limiting plate (71) and a second limiting plate (72) are respectively clamped on the opposite sides of the adjacent protrusions (55); A locking assembly (73) is arranged on the first limiting plate (71) and the second limiting plate (72), and the locking assembly (73) is used for locking the distance between the first limiting plate (71) and the second limiting plate (72), and the locking assembly (73) is linked with the butt plate (66); The locking assembly (73) comprises: A first mounting block (731) is fixedly connected to the side of the first limiting plate (71) facing the second limiting plate (72); A second mounting block (732) is fixedly connected to the side of the second limiting plate (72) facing the first limiting plate (71), and the second mounting block (732) is located on the side of the first mounting block (731); A locking block (733) is clamped between the first mounting block (731) and the second mounting block (732); The locking assembly (73) further comprises: A driving block (734) is slidably arranged in the inside of the first mounting block (731), and the driving block (734) is used for extruding the locking block (733) to move towards the second mounting block (732); An adjusting screw (736) is in threaded connection with the first mounting block (731) in an outer wall, one end of the adjusting screw (736) is in rotational connection with the driving block (734), and the other end of the adjusting screw (736) is fixedly connected with a handle (737); An extruding head (735) is fixedly connected to the back of the driving block (734), and one end of the extruding head (735) is extruded to be in close contact with the butt joint plate (66); A reset assembly is arranged between the locking block (733) and the first mounting block (731).

2. The quick detachable tooling for ion implanter beam line of claim 1, wherein, An inner wall of the fixing piece (52) is provided with an arc-shaped groove (54) matched with the clamping annular ring (51), and the protruding block (55) is linked with the limiting assembly (7).

3. The quick detachable tooling for ion implanter beam line of claim 2, wherein, The cooling assembly (6) comprises: A flow chamber (61) is arranged on the mounting tool (2), and the flow chamber (61) is used for flowing cooling liquid to cool the mounting tool (2); A butt joint (63) is arranged on one side of the sealing plate (62) facing the mounting tool (2), and an outer wall of the butt joint (63) is extruded to be in sleeve connection with an inner cavity of the flow chamber (61); A connecting pipe (64) is connected with the butt joint (63), and the butt joint plate (66) is linked with the limiting assembly (7).

4. The quick release tooling for ion implanter beamlines of claim 1, wherein, A connecting hole (738) is arranged on a side of the first mounting block (731), one side of an outer wall of the locking block (733) is slidably sleeved with the connecting hole (738), one side of the second mounting block (732) is provided with a locking hole (739), and one side of a bottom of the locking block (733) is provided with a first inclined slope surface, and the locking block (733) is extruded to the second mounting block (732) through the first inclined slope surface.

5. The quick release tooling for ion implanter beamlines of claim 4, wherein, A mounting groove (7310) matched with the driving block (734) is arranged on a back of the first mounting block (731), an inner cavity of the mounting groove (7310) is linked with an inner cavity of the connecting hole (738), a second inclined slope surface is arranged on a side of the driving block (734), one side of the locking block (733) facing the driving block (734) is provided with a guide groove (7315), and the second inclined slope surface on the side of the driving block (734) is extruded to be in close contact with an inner wall of the guide groove (7315).

6. The quick release tooling for ion implanter beamlines of claim 5, wherein, The reset assembly comprises: A first fixing block (7311) is fixedly connected to an outer portion of the locking block (733); A sliding groove is arranged on a top and a bottom of an inner wall of the connecting hole (738), and the first fixing block (7311) is slidably sleeved in an inner portion of the sliding groove; A second fixing block (7313) is fixedly connected to an end portion of an inner cavity of the sliding groove; An end portion of a guide rod (7314) is fixedly connected with the second fixing block (7313), and an outer wall of the guide rod (7314) is slidably inserted into the first fixing block (7311); A reset spring (7312) is sleeved on the outside of the guide rod (7314), and is located between the first fixed block (7311) and the second fixed block (7313).

7. The quick release tooling for ion implanter beamlines of claim 6, wherein, The opposite side of the first limiting plate (71) and the second limiting plate (72) is fixedly connected with a positioning block (74), the top of the protruding block (55) is provided with a positioning hole (75), the outer wall of the positioning block (74) and the inner cavity of the positioning hole (75) are sleeved, and the side of the first limiting plate (71) facing the second limiting plate (72) is fixedly connected with a positioning rod (76), and the bottom of the outer portion of the positioning rod (76) is sleeved with the second limiting plate (72).

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