Chip carrier film separation device, separation method and mounting equipment

Abstract

The present invention relates to the field of semiconductor technology, and specifically to a separation device, a separation method and a mounting device for a chip carrier film. The separation device is used for lifting and demolding large-sized ultra-thin chips in the semiconductor industry, so that the head binding device can pick up the chip separated from the carrier film. The separation device of the present invention gradually moves through the outer top block, the middle top block and the inner top block which are sequentially mounted, ensuring that the chip is gradually separated from the carrier film during the material retrieval process, thereby avoiding the chip from being damaged during the material retrieval process; utilizing the limiting cooperation between the top block assembly, the top rod assembly and the elastic assembly, two different action modes of pushing and pulling are realized on the same separation device, and different action modes can be switched for chips of different thicknesses, thereby improving the compatibility of the separation device. The present invention solves the technical problems that the chip of the existing chip carrier film separation device is easily broken and damaged during the material retrieval process, and cannot meet the requirements of demolding chips of different thicknesses.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a separation device, a separation method and a mounting equipment for a chip carrier film. Background Art

[0002] The chip carrier film separation device is an indispensable equipment in the integrated circuit packaging process. It is mainly used in the semiconductor industry to lift and demold large-size ultra-thin chips, separate the chip from the carrier film, and facilitate the suction nozzle to pick up the material. The device can apply physical force to the target area for separation of the chip and the carrier film, so that it forms a slight step difference with other non-target areas, and then the chip can be picked up using the vacuum suction nozzle on the head binding device.

[0003] However, the existing chip carrier film separation device may forcibly separate the chip from the carrier film during the material removal process, causing the chip to be easily broken and damaged; and the separation device has low compatibility. For chips of different thicknesses, it is necessary to use separation devices with different action modes (such as pushing type and pulling film type) or replace parts inside the device, which cannot meet the requirements of chip demolding of different thicknesses. Summary of the invention

[0004] In order to solve the technical problems that the chips in the existing chip carrier film separation device are easily broken and damaged during the material removal process and cannot meet the requirements of chip demolding with different thicknesses, the present invention provides a chip carrier film separation device, separation method and mounting equipment.

[0005] The technical solution to the technical problem solved by the present invention is to provide a separation device for a chip carrier film, which is connected to a ventilation device, and the ventilation device adjusts the interior of the separation device to a vacuum state to adsorb the carrier film. The separation device includes a top plate and a sleeve structure, and a top block assembly, a top rod assembly and an elastic assembly are arranged in the sleeve structure; the top block assembly includes an outer top block, a middle top block and an inner top block which are sequentially sleeved, the top plate covers the sleeve structure and is sleeved on the top of the outer top block, the top surfaces of the outer top block, the middle top block and the inner top block are all exposed, and the middle top block can slide relative to the outer top block; the top rod assembly includes an outer top rod and an inner top rod located inside the outer top rod, the end of the outer top rod is connected to the outer top block, and the end of the inner top rod is connected to the The middle top blocks are connected by a linkage, the bottom of the linkage is connected to the inner wall surface of the outer top rod, and at least part of the inner top block is located in the inner top rod after the linkage and the inner top rod are sequentially passed through; the outer top block and the middle top block are respectively provided with a first positioning step for abutting against the middle top block and a second positioning step for abutting against the inner top block, and there are a first gap and a second gap between the linkage and the outer top block, and between the inner top rod and the middle top block, respectively; the elastic component includes a first elastic component sleeved on the inner top rod and a second elastic component sleeved on the linkage, the first elastic component is fixed to the outer side wall of the inner top rod at one end away from the top block assembly, and the two ends of the second elastic component are respectively connected to the outer top block and the linkage.

[0006] Preferably, the separation device also includes a driving assembly, which includes a motor assembly, a cam assembly and a reading head, the motor assembly includes a first motor and a second motor, and the cam assembly includes a first cam and a second cam; the other end of the outer push rod is in contact with the first cam, and the end of the first cam away from the outer push rod is connected to the working end of the first motor; the other end of the inner push rod is in contact with the second cam, and the end of the second cam away from the inner push rod is connected to the working end of the second motor; the reading head is electrically connected to the first motor and the second motor, respectively.

[0007] Preferably, the sleeve structure includes a connected sleeve body and a sleeve base, the sleeve base is arranged at one end of the sleeve body away from the top block assembly, and is sequentially sleeved between the sleeve base, the outer push rod and the inner push rod; a reset assembly is provided between the sleeve base and the outer push rod, and the reset assembly includes a first limit member, a reset elastic member and a second limit member which are sequentially arranged; the ends of the first limit member respectively abut against the outer wall surface of the outer push rod and the inner wall surface of the sleeve body, the second limit member and the reset elastic member are both sleeved on the outer push rod, and the two ends of the reset elastic member are respectively connected to the first limit member and the second limit member.

[0008] Preferably, a limiting protrusion and a supporting portion are provided on the first limiting member, and the supporting portion is located at an end of the limiting protrusion away from the reset elastic member; the limiting protrusion supports the inner wall surface of the sleeve body, and the supporting portion supports the outer wall surface of the outer push rod.

[0009] Preferably, the separation device also includes a ventilation component, which includes a vacuum ventilation block, a first sealing ring and a second sealing ring, one end of the vacuum ventilation block is connected to an end of the sleeve base away from the sleeve body, and the other end is sealed with the ventilation device, the vacuum ventilation block, the outer push rod and the inner push rod are sequentially sleeved; the first sealing ring is located between the vacuum ventilation block and the outer push rod, and is sleeved on the outer wall surface of the outer push rod; the second sealing ring is located between the outer push rod and the inner push rod, and is sleeved on the outer wall surface of the inner push rod.

[0010] Preferably, a first boss is provided on the outer periphery of the outer push rod, and the outer side wall of the first boss can slide relative to the inner wall surface of the sleeve structure; a second boss is provided on the outer periphery of the inner push rod, and the outer side wall of the second boss can slide relative to the inner wall surface of the linkage member, and one end of the first elastic member away from the push block assembly is fixed to the top of the second boss; a third boss is provided on the outer periphery of the linkage member, and the outer side wall of the third boss can slide relative to the inner wall surface of the outer push rod.

[0011] Preferably, the outer top block includes a connected outer top block body and a first base, the middle top block includes a connected middle top block body and a second base, the outer top block body can be slidably mounted on the middle top block body, and the first base can be slidably mounted on the second base; a first turning part is provided on the inner wall surface of the outer top block body, and a second turning part is provided on the outer wall surface of the middle top block body, and there is a movable gap between the first turning part and the second turning part; the first positioning step is arranged on the side of the first base facing the second base, an oil-free bushing is provided between the first positioning step and the inner bottom wall of the first base, and the oil-free bushing is sleeved on the second base.

[0012] Preferably, the inner top block includes a connected inner top block body and a third base, the middle top block body can be slidably mounted on the inner top block body, and the second base can be slidably mounted on the third base; the second positioning step is arranged on the side of the second base facing the third base, and a linear bearing is provided between the second positioning step and the inner bottom wall of the second base, and the linear bearing is mounted on the third base.

[0013] Another technical solution of the present invention to solve the above-mentioned technical problem is to provide a chip carrier film separation method, which is applied to the above-mentioned separation device, and the separation method includes: the ventilation equipment adjusts the separation device to a vacuum state to adsorb the carrier film; pushes the outer push rod and the inner push rod upward to simultaneously lift the outer top block, the middle top block and the inner top block to a first height; keeps the outer top block at the first height, and the inner push rod lifts the middle top block and the inner top block to a second height at the same time; keeps the middle top block at the second height, and the inner push rod lifts the inner top block to a third height ; Or, the separation method includes: the ventilation equipment adjusts the separation device to a vacuum state to adsorb the supporting film; pushes the outer push rod and the inner push rod upward to simultaneously lift the outer top block, the middle top block and the inner top block to the first height; keeps the middle top block and the inner top block at the first height, the outer push rod descends to make the outer top block descend to a third height, and the descent of the outer top block drives the middle top block to descend to a fourth height; keeps the outer top block and the middle top block at the third height and the fourth height respectively, and the inner push rod descends to make the inner top block descend to the fifth height.

[0014] Another technical solution of the present invention to solve the above technical problem is to provide a mounting device, which includes the above separation device.

[0015] Compared with the prior art, the chip carrier film separation device, separation method and mounting equipment provided by the present invention have the following advantages:

[0016] 1. An embodiment of the present invention provides a separation device for a chip carrier film, which is connected to a ventilation device. The ventilation device adjusts the interior of the separation device to a vacuum state to adsorb the carrier film. The adsorption of the carrier film is achieved by an outer top block, a middle top block and an inner top block. Through the gradual movement of the three top blocks, it can be ensured that the chip is gradually separated from the carrier film during the material removal process, which can prevent the chip from being broken and damaged during the material removal.

[0017] It can be understood that the outer top block, the middle top block and the inner top block are arranged in sequence, and the top surfaces of the outer top block, the middle top block and the inner top block are exposed for adsorbing the chip carrier film when the interior of the separation device is vacuumed; the push rod assembly includes an outer push rod and an inner push rod located inside the outer push rod, and the end of the outer push rod can push the outer top block to lift upward. By arranging the first locking step and the second locking step on the outer top block and the middle top block, it can be ensured that when the outer top block is lifted upward, the middle top block and the inner top block are also lifted upward to the same height at the same time.

[0018] It should be noted that a linkage is provided between the end of the inner push rod and the middle push block, the bottom of the linkage is connected to the inner wall surface of the outer push rod, the elastic component includes a first elastic component sleeved on the inner push rod and a second elastic component sleeved on the linkage component, the end of the first elastic component away from the push block assembly is fixed to the outer side wall of the inner push rod, and the two ends of the second elastic component are respectively connected to the outer push block and the linkage component; wherein, a first gap is provided between the linkage component and the outer push block, and a second gap is provided between the inner push rod and the middle push block. When the inner push rod is pushed upward, the first elastic component will first be deformed and exert an upward force on the linkage component. By setting the second elastic component, the speed of the linkage component lifting upward can be slowed down. At the same time, the middle top block and the inner top block are driven upward by the linkage component to ensure the movement accuracy of the top block assembly.

[0019] 2. In the separation device provided in the embodiment of the present invention, the upward lifting of the outer push rod and the inner push rod is achieved through a driving assembly, wherein the first motor drives the first cam to lift the outer push rod, and when the outer push rod is lifted upward, it will push the outer push block, the middle push block and the inner push block to be lifted upward together, and the second motor drives the second cam to lift the inner push rod, and when the inner push rod is lifted upward, it will push the middle push block and the inner push block to be lifted upward.

[0020] It should be noted that the first motor and the second motor in the embodiment of the present invention are both voice coil motors, which can ensure the response speed of the cam driving the outer push rod and the inner push rod to lift upward. The voice coil motor and the reading head are used instead of the servo motor to drive the first cam and the second cam to drive the lifting action of the outer push rod and the inner push rod, thereby pushing the push block assembly to complete the follow-up lifting action. The use of the reading head can ensure the movement accuracy of the outer push rod and the inner push rod to lift the push block assembly upward.

[0021] 3. In the separation device provided in the embodiment of the present invention, the connected sleeve body and sleeve base provide axial support for the upward lifting action of the outer push rod and the inner push rod. The sleeve base is located at the end of the sleeve body away from the top block assembly, and the sleeve base, the outer push rod and the inner push rod are sequentially arranged. The sleeve base can be used to limit the outer push rod and the inner push rod away from one end of the top block assembly.

[0022] It can be understood that a reset assembly is provided between the sleeve base and the outer push rod, wherein the reset elastic member can provide a certain buffer pulling force to the outer push rod when the outer push rod completes the upward lifting action and needs to be reset. The ends of the first limiting member respectively abut against the outer wall surface of the outer push rod and the inner wall surface of the sleeve body, which can ensure that the outer push rod and the inner push rod slide in their length direction without deviation. The second limiting member is sleeved on the outer push rod and cooperates with the first limiting member to respectively abut against the two ends of the reset elastic member to ensure the stability of the reset elastic member in completing the reset action on the outer push rod.

[0023] 4. In the separation device provided in the embodiment of the present invention, the limiting protrusion arranged on the first limiting member abuts against the inner wall surface of the sleeve body, which can ensure that there is a passage inside the sleeve body for the ventilation equipment to draw vacuum into the interior of the separation device, and ensure that the push rod assembly and the push block assembly located inside the sleeve body will not produce lateral displacement in the length direction of the sleeve body. Through this design, the stability of the operation of the separation device can be ensured.

[0024] It can be understood that the abutting portion abuts against the outer wall surface of the outer push rod, and one end of the first limit member away from the abutting portion is connected to the reset elastic member to ensure that the buffering tension applied by the reset elastic member acts on the outer push rod.

[0025] 5. In the separation device provided in the embodiment of the present invention, the ends of the outer push rod and the inner push rod away from the push block assembly are connected to the motor assembly through the cam assembly. When ventilation equipment is required to adjust the interior of the separation device to a vacuum state and adsorb the carrier film, it is necessary to ensure the vacuum sealing between the vacuum ventilation block, the outer push rod and the inner push rod.

[0026] It can be understood that the vacuum ventilation block, the outer push rod and the inner push rod are sequentially arranged, the first sealing ring seals the inner wall surface of the vacuum ventilation block and the outer wall surface of the outer push rod, and the second sealing ring seals the inner wall surface of the outer push rod and the outer wall surface of the inner push rod, ensuring that only vacuum is drawn from the ventilation equipment to the vacuum ventilation block. Through this design, it can be ensured that the interior of the separation device has good vacuum sealing.

[0027] 6. In the separation device provided in the embodiment of the present invention, the first boss is arranged on the outer periphery of the outer push rod, and the outer side wall of the first boss can slide relative to the inner wall surface of the sleeve structure; the second boss is arranged on the outer periphery of the inner push rod, and the outer side wall of the second boss can slide relative to the inner wall surface of the linkage member, and one end of the first elastic member away from the top block assembly is fixed to the top of the second boss; the third boss is arranged on the outer periphery of the linkage member, and the outer side wall of the third boss can slide relative to the inner wall surface of the outer push rod.

[0028] It can be understood that the separation device of the embodiment of the present invention can ensure that the ventilation equipment can adsorb the carrier film when the interior of the separation device is adjusted to a vacuum state by setting the first boss, the second boss and the third boss. On the other hand, it can ensure the stability of the components such as the outer push rod, the inner push rod, the linkage and the first elastic member inside the sleeve structure, so as to avoid affecting the effect of the chip gradually separating from the carrier film when taking the material.

[0029] 7. In the separation device provided in the embodiment of the present invention, the outer top block includes a connected outer top block body and a first base, the middle top block includes a connected middle top block body and a second base, the outer top block body can be slidably mounted on the middle top block body, and the first base can be slidably mounted on the second base; when the outer top block and the middle top block are simultaneously lifted upward to the same height, no relative sliding will occur between the outer top block body and the middle top block body, and between the first base and the second base, and when the middle top block body and the second base are lifted or lowered, the outer top block body and the first base remain relatively still, so that the outer layer of the chip can be separated from the carrier film.

[0030] It can be understood that a first turning portion is provided on the inner wall surface of the outer top block body, and a second turning portion is provided on the outer wall surface of the middle top block body, that is, the first turning portion is provided on a side of the outer top block body facing the outer wall of the middle top block body, and the second turning portion is provided on a side of the middle top block body facing the inner wall of the outer top block body. The first turning portion and the second turning portion are arranged opposite to each other, and by providing a movable gap between the first turning portion and the second turning portion, space for upward lifting can be provided for the middle top block body and the second base.

[0031] 8. In the separation device provided in the embodiment of the present invention, the inner top block includes a connected inner top block body and a third base, and the inner top block body and the third base are respectively slidably mounted on the middle top block body and the second base. When the inner top block body and the third base are lifted, the middle top block body and the second base remain relatively still, so that the middle layer of the chip can be separated from the carrier film.

[0032] It can be understood that the second locking step is arranged on the side of the second base facing the third base. When the middle top block body and the second base are lifted upward, the inner top block body and the third base will also be driven to lift upward at the same time to ensure that the outer top block does not move, and the middle top block and the inner top block continue to lift until the middle top block reaches the limit position; the linear bearing is arranged between the second locking step and the inner bottom wall of the second base, and is sleeved on the third base, using the rolling motion of the ball to achieve low-friction linear reciprocating motion, with the advantages of high precision, low friction and low cost.

[0033] 9. An embodiment of the present invention further provides a method for separating a chip carrier film, which is applied to the above-mentioned separation device, and the separation method includes: the ventilation device adjusts the separation device to a vacuum state to adsorb the carrier film; pushes the outer push rod and the inner push rod upward to simultaneously lift the outer top block, the middle top block and the inner top block to a first height; keeps the outer top block at the first height, and the inner push rod simultaneously lifts the middle top block and the inner top block to a second height; keeps the middle top block at the second height, and the inner push rod lifts the inner top block to a third height; or, the separation method includes: the ventilation device adjusts the separation device to a vacuum state to adsorb the carrier film; pushes the outer push rod and the inner push rod upward to simultaneously lift the outer top block, the middle top block and the inner top block to a first height; keeps the middle top block and the inner top block at the first height, the outer push rod descends to make the outer top block descend to the third height, and the outer top block descends to drive the middle top block to descend to the fourth height; keeps the outer top block and the middle top block at the third height and the fourth height respectively, and the inner push rod descends to make the inner top block descend to the fifth height.

[0034] It should be noted that the separation method has the same beneficial effects as the above-mentioned separation device, which will not be described in detail here.

[0035] 10. An embodiment of the present invention further provides a mounting device, which includes the above-mentioned separation device.

[0036] It should be noted that the separation method has the same beneficial effects as the above-mentioned separation device, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0038] Figure 1 It is a schematic diagram of the overall structure of the separation device of the chip carrier film in an embodiment of the present invention.

[0039] Figure 2 The sectional view of the chip carrier film separation device including the internal structure in the embodiment of the present invention Figure 1 .

[0040] Figure 3 The present invention Figure 2 A partial enlarged view of part A.

[0041] Figure 4 The present invention Figure 2 A partial enlarged view of part B.

[0042] Figure 5The sectional view of the chip carrier film separation device including the internal structure in the embodiment of the present invention Figure 2 .

[0043] Figure 6 Schematic diagram of the process of separating the chip carrier film in the embodiment of the present invention Figure 1 .

[0044] Figure 7 Schematic diagram of the process of separating the chip carrier film in the embodiment of the present invention Figure 2 .

[0045] Figure 8 It is a schematic diagram of the overall structure of the mounting device in an embodiment of the present invention.

[0046] Description of the accompanying drawings:

[0047] 100. Mounting equipment;

[0048] 10. Separation device; 20. Head binding device; 30. Visual correction device;

[0049] 1. top plate; 2. sleeve structure; 21. sleeve body; 22. sleeve base; 23. reset assembly; 231. first position-limiting member; 2311. position-limiting protrusion; 2312. abutting portion; 232. reset elastic member; 233. second position-limiting member;

[0050] 3. Top block assembly; 31. External top block; 310. First positioning step; 311. External top block body; 3111. First turning part; 312. First base; 32. Middle top block; 320. Second positioning step; 321. Middle top block body; 3211. Second turning part; 3212. Active gap; 322. Second base; 3220. Oil-free bushing; 33. Internal top block; 331. Internal top block body; 332. Third base; 3320. Linear bearing;

[0051] 4. ejector assembly; 41. outer ejector; 411. first boss; 42. inner ejector; 420. second gap; 421. second boss; 43. linkage; 430. first gap; 431. third boss;

[0052] 5. Elastic component; 51. First elastic member; 52. Second elastic member;

[0053] 6. driving assembly; 61. motor assembly; 611. first motor; 612. second motor; 62. reading head;

[0054] 7. Ventilation assembly; 71. Vacuum ventilation block; 72. First sealing ring; 73. Second sealing ring. DETAILED DESCRIPTION

[0055] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and implementation examples. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0056] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0057] It should be noted that the terms "first" and "second" and the like in the specification and claims of the present invention are used to distinguish different objects rather than to describe a specific order.

[0058] In the present invention, the directions or positional relationships indicated by the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like are based on the directions or positional relationships shown in the drawings. These terms are mainly used to better describe the present invention and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific direction, or to be constructed and operated in a specific direction.

[0059] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those skilled in the art, the specific meanings of these terms in the present invention can be understood according to specific circumstances.

[0060] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0061] See also Figure 1 and Figure 2The embodiment of the present invention provides a separation device 10 for a chip carrier film, which is connected to a ventilation device. The ventilation device adjusts the interior of the separation device 10 to a vacuum state to adsorb the carrier film. The separation device 10 includes a top plate 1 and a sleeve structure 2. The sleeve structure 2 is provided with a top block assembly 3, a top rod assembly 4 and an elastic assembly 5;

[0062] The top block assembly 3 includes an outer top block 31, a middle top block 32 and an inner top block 33 which are sleeved in sequence. The top plate 1 covers the sleeve structure 2 and is sleeved on the top of the outer top block 31. The top surfaces of the outer top block 31, the middle top block 32 and the inner top block 33 are all exposed. The middle top block 32 can slide relative to the outer top block 31.

[0063] The push rod assembly 4 includes an outer push rod 41 and an inner push rod 42 located inside the outer push rod 41. The end of the outer push rod 41 is connected to the outer push block 31. The end of the inner push rod 42 is connected to the middle push block 32 through a linkage 43. The bottom of the linkage 43 is connected to the inner wall surface of the outer push rod 41. At least part of the inner push block 33 is located inside the inner push rod 42 after the linkage 43 and the inner push rod 42 are sequentially penetrated.

[0064] The outer top block 31 and the middle top block 32 are respectively provided with a first positioning step 310 for abutting against the middle top block 32 and a second positioning step 320 for abutting against the inner top block 33. A first gap 430 and a second gap 420 are respectively provided between the linkage member 43 and the outer top block 31 and between the inner top rod 42 and the middle top block 32.

[0065] The elastic component 5 includes a first elastic member 51 sleeved on the inner push rod 42 and a second elastic member 52 sleeved on the linkage member 43. One end of the first elastic member 51 away from the top block assembly 3 is fixed to the outer wall of the inner push rod 42, and the two ends of the second elastic member 52 are respectively connected to the outer top block 31 and the linkage member 43.

[0066] The separation device 10 provided in the embodiment of the present invention can be used for lifting and demolding large-sized ultra-thin chips in the semiconductor industry, so as to separate the chip from the carrier film to facilitate the suction nozzle to take out the material.

[0067] It can be understood that the separation device 10 is connected to the ventilation equipment, and the ventilation equipment can adjust the interior of the separation device 10 to a vacuum state to adsorb the carrier film; the adsorption of the carrier film is achieved by setting a number of adsorption holes on the top surfaces of the outer top block 31, the middle top block 32 and the inner top block 33, and ensuring good vacuum sealing between the separation device 10 and the ventilation equipment. This embodiment ensures that the chip is gradually separated from the carrier film during the material retrieval process through the gradual action of multiple top blocks, thereby avoiding the chip from being broken and damaged during material retrieval.

[0068] In some embodiments, the outer top block 31, the middle top block 32 and the inner top block 33 are sequentially arranged, and the top surfaces of the outer top block 31, the middle top block 32 and the inner top block 33 are exposed for adsorbing the chip carrier film when the interior of the separation device 10 is vacuumed; the push rod assembly 4 includes an outer top block 31 and an inner push rod 42 located inside the outer top rod 41, and the end of the outer push rod 41 can push the outer top block 31 to rise upward; further, by setting a first locking step 310 and a second locking step 320 on the outer top block 31 and the middle top block 32, it can be ensured that when the outer top block 31 is lifted upward, the middle top block 32 and the inner top block 33 are also lifted upward to the same height at the same time.

[0069] Specifically, the first locking step 310 provided on the outer top block 31 is located on the outer bottom wall of the middle top block 32. When the outer top rod 41 pushes the outer top block 31 upward, the first locking step 310 abuts against the outer bottom wall of the middle top block 32 and pushes the middle top block 32 to be lifted upward at the same time; the second locking step 320 provided on the middle top block is located on the outer bottom wall of the inner top block 33. When the middle top block 32 is in the process of being lifted upward, the second locking step 320 abuts against the outer bottom wall of the inner top block 33 and pushes the inner top block to be lifted upward.

[0070] It should be noted that a linkage 43 is provided between the end of the inner push rod 42 and the middle push block 32, and the bottom of the linkage 43 is connected to the inner wall surface of the outer push rod 41. The elastic component 5 includes a first elastic component 51 sleeved on the inner push rod 42 and a second elastic component 52 sleeved on the linkage 43. The end of the first elastic component 51 away from the push block assembly 3 is fixed to the outer side wall of the inner push rod 42, and the two ends of the second elastic component 52 are respectively connected to the outer push block 31 and the linkage 43; when the inner push rod 42 is pushed upward, the first elastic component 51 will first be deformed and apply an upward force to the linkage 43. By setting the second elastic component 52, the speed of the linkage 43 lifting upward can be slowed down. At the same time, the middle push block 32 and the inner push block 33 are driven upward by the linkage 43 to ensure the movement accuracy of the push block assembly 3.

[0071] In the embodiment of the present invention, a first gap 430 is provided between the linkage member 43 and the outer top block 31, and a second gap 420 is provided between the inner top rod 42 and the middle top block 32. The push-up action is as follows: the outer top rod 41 and the inner top rod 42 are used to push up simultaneously to simultaneously push up the outer top block 31, the middle top block 32 and the inner top block 33 to a certain height, and then the inner top rod 42 continues to push up to cause the first elastic member 51 to be deformed and exert an upward pushing force on the linkage member 43, and the linkage member 43 drives the middle top block 32 and the inner top block 33 to push up, so that the middle top block 32 slides upward relative to the outer top block 31 for a distance, and at this time the first gap 430 gradually decreases until it disappears. The inner top block 33 is lost, that is, the sliding stroke of the middle top block 32 relative to the outer top block 31 reaches the limit; then the inner top rod 42 continues to be pushed upward to lift, and since the first gap 430 has disappeared, the inner top rod 42 further realizes the independent lifting of the inner top block 33, and the second gap 420 at this time also gradually decreases until it disappears, and the inner top block 33 continues to slide upward for a distance relative to the middle top block 32. When the sliding stroke of the inner top block 33 reaches the limit, the second gap 420 between the inner top rod 42 and the middle top block 32 disappears.

[0072] The action of the membrane pulling type is as follows: the outer top rod 41 and the inner top rod 42 are used to lift up at the same time to lift the outer top block 31, the middle top block 32 and the inner top block 33 to a certain height at the same time, and then the outer top rod 41 is lowered to cause the outer top block 31 to slide downward a certain distance relative to the middle top block 32 under the action of gravity. At this time, the first gap 430 will gradually decrease until it disappears, that is, the sliding stroke of the outer top block 31 relative to the middle top block 32 reaches the limit, and then the outer top block 31 will press down the middle top block 32 so that the middle top block 32 also slides downward a certain distance; continue to lower the inner top rod 42 to cause the inner top block 33 to drop.

[0073] It should be further explained that the chip can be completely separated from the carrier film through the above-mentioned pushing and pulling action modes. When using the pushing or pulling method, the order in which the carrier film falls off is outer layer, middle layer to inner layer. The present invention solves the technical problems that the chip is easily broken and damaged during the material removal process in the existing chip carrier film separation device, and cannot meet the requirements of chip demolding of chips of different thicknesses.

[0074] Furthermore, the separation device 10 also includes a driving assembly 6, which includes a motor assembly 61, a cam assembly and a reading head 62, the motor assembly 61 includes a first motor 611 and a second motor 612, and the cam assembly includes a first cam and a second cam; the other end of the outer push rod 41 is in contact with the first cam, and the end of the first cam away from the outer push rod 41 is connected to the working end of the first motor 611; the other end of the inner push rod 42 is in contact with the second cam, and the end of the second cam away from the inner push rod 42 is connected to the working end of the second motor 612; the reading head 62 is electrically connected to the first motor 611 and the second motor 612, respectively.

[0075] It can be understood that the upward lifting of the outer push rod 41 and the inner push rod 42 is achieved by the driving component 6, one end of the outer push rod 41 is connected to the outer push block 31, and the other end is in contact with the first cam, one end of the inner push rod 42 is connected to the middle push block 32 through the linkage 43, and the other end is in contact with the second cam; wherein, the first motor 611 drives the first cam to thereby lift the outer push rod 41, and when the outer push rod 41 is lifted upward, it will push the outer push block 31, the middle push block 32 and the inner push block 33 to be lifted upward together, and the second motor 612 drives the second cam to thereby lift the inner push rod 42, and when the inner push rod 42 is lifted upward, it will push the middle push block 32 and the inner push block 33 to be lifted upward.

[0076] The first motor 611 and the second motor 612 in the embodiment of the present invention are both voice coil motors, which are linear motors that can convert electrical energy into linear motion mechanical energy without any mechanical transmission links; when the outer push rod 41 and the inner push rod 42 need to be lifted upward by force control, the external controller sets the current input to the voice coil motor to adjust the lifting force on the outer push rod 41 or the inner push rod 42.

[0077] It should be noted that the voice coil motor provided in the embodiment of the present invention can ensure the response speed of the cam driving the outer push rod 41 and the inner push rod 42 to lift upward. The voice coil motor and the reading head 62 are used instead of the servo motor to drive the first cam and the second cam to drive the lifting action of the outer push rod 41 and the inner push rod 42. The outer push rod 41 pushes the outer push block 31, the middle push block 32 and the inner push block 33 to complete the lifting action. The inner push rod 42, the linkage part 43, the first elastic part 51 and the second elastic part 52 and other components cooperate to push the middle push block 32 and the inner push block 33 to complete the follow-up lifting action. The use of the reading head 62 in the present invention can ensure the movement accuracy of the outer push rod 41 and the inner push rod 42 to lift the push block assembly 3 upward.

[0078] Please continue reading Figure 1 and Figure 2 The sleeve structure 2 includes a sleeve body 21 and a sleeve base 22 connected to each other. The sleeve base 22 is arranged at one end of the sleeve body 21 away from the top block assembly 3, and the sleeve base 22, the outer push rod 41 and the inner push rod 42 are sequentially sleeved.

[0079] In the separation device 10 provided in the embodiment of the present invention, the sleeve body 21 and the sleeve base 22 are connected. At the end of the separation device 10 away from the top block assembly 3, the outer push rod 41 is sleeved on the inner push rod 42, and the sleeve base 22 is sleeved on the outer push rod 41. By setting the sleeve base 22, the outer push rod 41 and the inner push rod 42 can be limited away from one end of the top block assembly 3. The sleeve base 22 can also provide axial support for the upward lifting action of the outer push rod 41 and the inner push rod 42.

[0080] In some embodiments, the sleeve body 21 and the sleeve base 22 are detachably connected, and the connection method between the two can be bolt connection, threaded connection and snap connection, etc. As a preferred implementation scheme of the embodiment of the present invention, the sleeve body 21 and the sleeve base 22 are threadedly connected; it can be understood that the specific implementation method of this embodiment cannot be used to limit the present invention, and any modifications, equivalent replacements and improvements made within the principles of the present invention should be included in the protection scope of the present invention.

[0081] Furthermore, a reset assembly 23 is provided between the sleeve base 22 and the outer push rod 41, and the reset assembly 23 includes a first limit member 231, a reset elastic member 232 and a second limit member 233 which are arranged in sequence; the ends of the first limit member 231 respectively abut against the outer wall surface of the outer push rod 41 and the inner wall surface of the sleeve body 21, the second limit member 233 and the reset elastic member 232 are both sleeved on the outer push rod 41, and the two ends of the reset elastic member 232 are respectively connected to the first limit member 231 and the second limit member 233.

[0082] It can be understood that the reset elastic member 232, the first limit member 231 and the second limit member 233 are arranged between the sleeve base 22 and the outer push rod 41, wherein the reset elastic member 232 can provide a certain buffer pulling force to the outer push rod 41 when the outer push rod 41 completes the upward lifting action and needs to be reset, and at the same time can avoid the rotation of the first cam; the ends of the first limit member 231 respectively abut against the outer wall surface of the outer push rod 41 and the inner wall surface of the sleeve body 21, which can ensure that the outer push rod 41 and the inner push rod 42 slide in their length direction without deviation; the second limit member 233 is sleeved on the outer push rod 41, and cooperates with the first limit member 231 to respectively abut the two ends of the reset elastic member 232, so as to ensure the stability of the reset elastic member 232 to complete the reset action of the outer push rod 41.

[0083] In some embodiments, see Figure 2 and Figure 3 The first limiting member 231 is provided with a limiting protrusion 2311 and a supporting portion 2312, and the supporting portion 2312 is located at an end of the limiting protrusion 2311 away from the reset elastic member 232; the limiting protrusion 2311 supports the inner wall surface of the sleeve body 21, and the supporting portion 2312 supports the outer wall surface of the outer push rod 41.

[0084] It can be understood that the limiting protrusion 2311 set on the first limiting member 231 is abutted against the inner wall surface of the sleeve body 21, which can ensure that there is a ventilation channel inside the sleeve body 21 for the separation device 10 to draw vacuum, and ensure that the top rod assembly 4 and the top block assembly 3 located inside the sleeve body 21 will not produce lateral displacement in the length direction of the sleeve body 21. Through this design, the stability of the separation device 10 in adsorbing the carrier film and separating the chip from the carrier film can be ensured.

[0085] It should be noted that the supporting portion 2312 in the embodiment of the present invention is abutted against the outer wall surface of the outer push rod 41, and the end of the first limiting member 231 away from the supporting portion 2312 is connected to the reset elastic member 232 to ensure that the buffering tension applied by the reset elastic member 232 acts on the outer push rod 41.

[0086] See also Figure 1 and Figure 5 The separation device 10 also includes a ventilation component 7, which includes a vacuum ventilation block 71, a first sealing ring 72 and a second sealing ring 73. One end of the vacuum ventilation block 71 is connected to an end of the sleeve base 22 away from the sleeve body 21, and the other end is sealed and connected to the ventilation device. The vacuum ventilation block 71, the outer push rod 41 and the inner push rod 42 are sequentially arranged.

[0087] Furthermore, the first sealing ring 72 is located between the vacuum vent block 71 and the outer push rod 41 , and is sleeved on the outer wall surface of the outer push rod 41 ; the second sealing ring 73 is located between the outer push rod 41 and the inner push rod 42 , and is sleeved on the outer wall surface of the inner push rod 42 .

[0088] It should be noted that the air inlet end of the vacuum vent block 71 is connected to an external vent device, which can prevent the vacuum sealing from being insufficient and thus affecting the separation effect between the chip and the carrier film.

[0089] In an embodiment of the present invention, one end of the outer push rod 41 and the inner push rod 42 away from the push block assembly 3 is connected to the motor assembly 61 through a cam assembly. When ventilation equipment is required to draw vacuum on the separation device 10 to adsorb the supporting film, it is necessary to ensure the vacuum sealing between the vacuum ventilation block 71, the outer push rod 41 and the inner push rod 42; the specific positions that require vacuum sealing treatment are: between the inner wall surface of the vacuum ventilation block 71 and the outer wall surface of the outer push rod 41, and between the inner wall surface of the outer push rod 41 and the outer wall surface of the inner push rod 42.

[0090] It can be understood that the vacuum ventilation block 71, the outer push rod 41 and the inner push rod 42 are sequentially arranged, and the first sealing ring 72 seals the inner wall surface of the vacuum ventilation block 71 and the outer wall surface of the outer push rod 41, and the second sealing ring 73 seals the inner wall surface of the outer push rod 41 and the outer wall surface of the inner push rod 42, ensuring that vacuum is only drawn from the ventilation equipment to the vacuum ventilation block 71. Through this design, it can be ensured that the interior of the separation device 10 has good vacuum sealing, thereby ensuring that the chip gradually separates from the carrier film during the material removal process, and the vacuum pressure value in the separation device 10 is within the deviation range.

[0091] See also Figure 5A first boss 411 is provided on the outer periphery of the outer push rod 41, and the outer side wall of the first boss 411 can slide relative to the inner wall surface of the sleeve structure 2; by providing the first boss 411, the outer push rod 41 can have rigidity when it slides stably on the inner wall surface of the sleeve structure 2, and a ventilation device can be opened between the outer wall surface of the outer push rod 41 and the inner wall surface of the sleeve structure 2 to draw a vacuum channel to the separation device 10.

[0092] Furthermore, a second boss 421 is provided on the outer periphery of the inner push rod 42, and the outer side wall of the second boss 421 can slide relative to the inner wall surface of the linkage member 43, and the end of the first elastic member 51 away from the top block assembly 3 is fixed to the top of the second boss 421; by setting the second boss 421, the inner push rod 42 can have rigidity when it slides stably on the inner wall surface of the linkage member 43, and a limiting space can be provided for the first elastic member 51.

[0093] A third boss 431 is provided on the outer periphery of the linkage member 43, and the outer side wall of the third boss 431 can slide relative to the inner wall surface of the outer push rod 41; by providing the third boss 431, the linkage member 43 can have rigidity when sliding stably on the inner wall surface of the outer push rod 41, and can also provide a limiting space for the second elastic member 52.

[0094] It should be noted that the first elastic member 51 is sleeved on the inner push rod 42, and the first elastic member 51 is fixed to the top of the second boss 421. When the inner push rod 42 is lifted upward, the side of the first elastic member 51 away from the second boss 421 is squeezed and compressed; the second elastic member 52 is sleeved on the linkage member 43, and the second elastic member 52 is fixed to the top of the third boss 431. When the first elastic member 51 is compressed to a certain extent, the second elastic member 52 is also squeezed and compressed. It can be understood that the elastic coefficient of the first elastic member 51 in the embodiment of the present invention is greater than the elastic coefficient of the second elastic member 52.

[0095] It can be understood that the separation device 10 of the embodiment of the present invention can ensure that the carrier film can be adsorbed when the vacuum is drawn into the separation device 10 by setting the first boss 411, the second boss 421 and the third boss 431. On the other hand, it can ensure the stability of the components such as the outer push rod 41, the inner push rod 42, the linkage 43 and the first elastic member 51 inside the sleeve structure 2, so that the friction force exerted on the first boss 411, the second boss 421 and the third boss 431 when sliding is lower, and no lateral force is generated on the separation device 10 when sliding, thereby avoiding affecting the effect of the chip gradually separating from the carrier film when taking the material.

[0096] See also Figure 2 and Figure 4The outer top block 31 includes a connected outer top block body 311 and a first base 312, the middle top block 32 includes a connected middle top block body 321 and a second base 322, the outer top block body 311 can be slidably mounted on the middle top block body 321, and the first base 312 can be slidably mounted on the second base 322.

[0097] It can be understood that when the outer top block 31 and the middle top block 32 are simultaneously lifted upward to the same height, no relative sliding will occur between the outer top block body 311 and the middle top block body 321, and between the first base 312 and the second base 322. When the middle top block body 321 and the second base 322 are lifted or lowered, the outer top block body 311 and the first base 312 remain relatively still, so that the outer layer of the chip can be separated from the carrier film.

[0098] Furthermore, a first turning portion 3111 is provided on the inner wall surface of the outer top block body 311 , a second turning portion 3211 is provided on the outer wall surface of the middle top block body 321 , and an active gap 3212 exists between the first turning portion 3111 and the second turning portion 3211 .

[0099] It can be understood that the first turning portion 3111 is arranged on a side of the outer top block body 311 facing the outer wall of the middle top block body 321, and the second turning portion 3211 is arranged on a side of the middle top block body 321 facing the inner wall of the outer top block body 311, and the first turning portion 3111 and the second turning portion 3211 are arranged opposite to each other; the embodiment of the present invention provides an upward lifting space for the middle top block body 321 and the second base 322 by setting a movable gap 3212 between the first turning portion 3111 and the second turning portion 3211.

[0100] In some embodiments, the first positioning step 310 is disposed on a side of the first base 312 facing the second base 322 , an oil-free bushing 3220 is disposed between the first positioning step 310 and the inner bottom wall of the first base 312 , and the oil-free bushing 3220 is sleeved on the second base 322 .

[0101] It should be noted that the oil-free bushing 3220 is a self-lubricating bearing that combines the characteristics of metal bearings and oil-free lubricated bearings. It realizes the lubrication function by embedding solid lubricants (such as graphite, molybdenum disulfide, etc.) in the metal matrix. It can operate without external oil supply and is particularly suitable for scenes that are difficult to lubricate, such as heavy loads, low speeds, reciprocating or swinging. The advantages of using the oil-free bushing 3220 are: it has good self-lubricating performance and can form a lubricating film during the friction process to reduce the friction coefficient and reduce wear; since there is no need to add lubricating oil regularly, the maintenance of the oil-free bushing 3220 is relatively convenient; it is wear-resistant and adaptable to different temperature environments, which can extend the service life of the separation device 10.

[0102] Please continue reading Figure 2 and Figure 4 The inner top block 33 includes a connected inner top block body 331 and a third base 332, the middle top block body 321 can be slidably mounted on the inner top block body 331, and the second base 322 can be slidably mounted on the third base 332; through this design, when the inner top block body 331 and the third base 332 are lifted, the middle top block body 321 and the second base 322 remain relatively still, so that the middle layer of the chip can be separated from the carrier film.

[0103] Furthermore, the second positioning step 320 is disposed on a side of the second base 322 facing the third base 332 , a linear bearing 3320 is disposed between the second positioning step 320 and the inner bottom wall of the second base 322 , and the linear bearing 3320 is sleeved on the third base 332 .

[0104] It can be understood that the second locking step 320 is arranged on the side of the second base 322 facing the third base 332. When the middle top block body 321 and the second base 322 are pushed upward, the inner top block body 331 and the third base 332 are also driven to be pushed upward at the same time to ensure that the outer top block 31 does not move, and the middle top block 32 and the inner top block 33 continue to be pushed until the middle top block 32 reaches the limit.

[0105] It should be noted that the provision of a linear bearing 3320 can reduce the friction generated inside the separation device 10 when the chip is separated from the carrier film, and the linear bearing 3320 can reduce the friction between the second base 322 and the third base 332; the linear bearing 3320 is a linear motion system, which is mainly used in motion mechanisms that require low friction and high precision. It generally uses the rolling motion of a ball to achieve low-friction linear reciprocating motion, and has the advantages of high precision, low friction and low cost.

[0106] See also Figure 6 and Figure 7 The embodiment of the present invention further provides a chip carrier film separation method, which is applied to the above-mentioned separation device, and the separation method comprises:

[0107] S1: The ventilation device adjusts the separation device to a vacuum state to adsorb the carrier film;

[0108] S2: Push the outer push rod and the inner push rod upward to simultaneously lift the outer push block, the middle push block and the inner push block to the first height;

[0109] S3: Keeping the outer top block at the first height, the inner top rod lifts the middle top block and the inner top block to the second height at the same time;

[0110] S4: Keeping the middle top block at the second height, the inner top rod lifts the inner top block to the third height;

[0111] Alternatively, the separation method comprises:

[0112] F1: The ventilation device adjusts the separation device to a vacuum state to adsorb the carrier film;

[0113] F2: Push the outer push rod and the inner push rod upward to lift the outer push block, the middle push block and the inner push block to the first height at the same time;

[0114] F3: Keep the middle top block and the inner top block at the first height, and lower the outer top rod to make the outer top block drop to the third height. The outer top block drops and drives the middle top block to drop to the fourth height.

[0115] F4: Keep the outer top block and the middle top block at the third height and the fourth height respectively, and lower the inner top rod to make the inner top block drop to the fifth height.

[0116] It can be understood that the separation device provided in the embodiment of the present invention can realize two different chip demolding action modes, namely, the push-up type and the film-pulling type, on the same set of structures, wherein the push-up type has steps S1 to S4, and the film-pulling type has steps F1 to F4. When using the separation device, two different action modes can be switched for chips of different thicknesses to improve the compatibility of the separation device.

[0117] It should be noted that in step S1 or F1, the electromagnetic valve is used to control the parameters such as the direction, flow rate and speed of the ventilation device to draw vacuum to the separation device. When the carrier film is adsorbed, the vacuum nozzle on the head binding device moves to the top of the chip.

[0118] In step S2 or F2, the outer top block corresponds to the outer layer of the chip, the middle top block corresponds to the middle layer of the chip, and the inner top block corresponds to the outer layer of the chip; when the outer top block, the middle top block and the inner top block are simultaneously lifted to the first height, the vacuum nozzle descends to adsorb the chip.

[0119] In steps S3 and S4, the vacuum suction nozzle needs to rise synchronously with the middle top block and the inner top block, and keep the downward pressure of the vacuum suction nozzle unchanged to avoid chip cracking; when the middle top block and the inner top block are simultaneously lifted to the second height, the outer layer of the chip is separated from the carrier film, and when the inner top block is lifted to the third height, the middle layer of the chip is separated from the carrier film, and finally the vacuum suction nozzle continues to adsorb the chip to separate the outer layer of the chip from the carrier film to complete the material removal.

[0120] It should be noted that in step F4, when the inner ejector rod descends to make the inner ejector block descend to the fifth height, the carrier film is completely separated from the chip, and the chip is adsorbed by the vacuum suction nozzle to pick up the chip, thereby completing the material removal.

[0121] Optionally, during steps F3 and F4, a selection can be made according to the needs of the chip: gradually reducing the downward pressure of the vacuum nozzle to 0, or maintaining the downward pressure at a constant force; through this design, it is possible to avoid chip breakage due to the gradual reduction in contact area and gradual increase in pressure between the vacuum nozzle and the chip, thereby preventing the chip from being damaged and affecting the yield of the finished product.

[0122] See also Figure 1 and Figure 8 The embodiment of the present invention further provides a mounting device 100, and the mounting device 100 includes the above-mentioned separation device 10.

[0123] It can be understood that the mounting device 100 provided in the embodiment of the present invention can realize chip picking, correction and mounting, and has the same beneficial effects as the above-mentioned separation device 10. The mounting device 100 is mainly used in occasions where high-precision mounting is required in the automatic mounting process in the semiconductor industry.

[0124] In some embodiments, the mounting equipment 100 also includes a head binding device 20 for chip picking and mounting and a visual correction device 30 that cooperates with the head binding device 20 to achieve correction during mounting. The visual correction device 30 is responsible for real-time alignment correction of the upper surface of the chip and the mounting position identification point during mounting.

[0125] It should be noted that the head binding device 20 is responsible for picking up and adsorbing the chip to be processed placed on the separation device 10. The head binding device 20 cooperates with the separation device 10 to gradually separate the outer layer, middle layer and inner layer of the chip to be processed from the carrier film. The visual correction device 30 can identify the chip and its corresponding mounting position identification point. The head binding device 20 and the visual correction device 30 realize real-time alignment and mounting of the chip.

[0126] In some embodiments, the head binding device 20 can achieve a good chip picking effect through a vacuum nozzle, meet the chip picking and mounting requirements, and can better adjust the mounting angle during the mounting process to improve the accuracy of the mounting angle.

[0127] In some embodiments, in order to ensure the normal load of the head binding device 20 during the lifting movement, a magnetic spring assembly is provided between the head binding device 20 and the main body fixed on the mounting equipment 100. When the force control cannot lift the head binding device 20, the magnetic spring assembly can lift it, effectively preventing the head binding device 20 from falling off and colliding or damaging the chip during the mounting process, thereby improving the yield of the finished product.

[0128] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A separation device for a chip carrier film, connected to a ventilation device, wherein the ventilation device adjusts the interior of the separation device to a vacuum state to adsorb the carrier film, characterized in that: The separation device comprises a top plate and a sleeve structure, wherein a top block assembly, a top rod assembly and an elastic assembly are arranged in the sleeve structure; The top block assembly comprises an outer top block, a middle top block and an inner top block which are sleeved in sequence, the top plate covers the sleeve structure and is sleeved on the top of the outer top block, the top surfaces of the outer top block, the middle top block and the inner top block are all exposed, and the middle top block can slide relative to the outer top block; The push rod assembly includes an outer push rod and an inner push rod located inside the outer push rod, the end of the outer push rod is connected to the outer push block, the end of the inner push rod is connected to the middle push block through a linkage, the bottom of the linkage is connected to the inner wall surface of the outer push rod, and at least part of the inner push block is located in the inner push rod after the linkage and the inner push rod are sequentially passed through; The outer top block and the middle top block are respectively provided with a first positioning step for abutting against the middle top block and a second positioning step for abutting against the inner top block, and a first gap and a second gap are respectively provided between the linkage member and the outer top block, and between the inner top rod and the middle top block; The elastic component includes a first elastic member sleeved on the inner push rod and a second elastic member sleeved on the linkage member, one end of the first elastic member away from the push block assembly is fixed to the outer side wall of the inner push rod, and the two ends of the second elastic member are respectively connected to the outer push block and the linkage member.

2. The separation device according to claim 1, characterized in that: The separation device further comprises a driving assembly, the driving assembly comprises a motor assembly, a cam assembly and a reading head, the motor assembly comprises a first motor and a second motor, and the cam assembly comprises a first cam and a second cam; The other end of the outer ejector rod contacts the first cam, and the end of the first cam away from the outer ejector rod is connected to the working end of the first motor; the other end of the inner ejector rod contacts the second cam, and the end of the second cam away from the inner ejector rod is connected to the working end of the second motor; The reading head is electrically connected to the first motor and the second motor respectively.

3. The separation device according to claim 2, characterized in that: The sleeve structure comprises a sleeve body and a sleeve base connected to each other, wherein the sleeve base is arranged at one end of the sleeve body away from the ejector assembly, and the sleeve base, the outer ejector rod and the inner ejector rod are sequentially sleeved therebetween; A reset assembly is provided between the sleeve base and the outer push rod, and the reset assembly includes a first limiter, a reset elastic member and a second limiter which are arranged in sequence; The ends of the first limit member respectively abut against the outer wall surface of the outer push rod and the inner wall surface of the sleeve body, the second limit member and the reset elastic member are both sleeved on the outer push rod, and the two ends of the reset elastic member are respectively connected to the first limit member and the second limit member.

4. The separation device according to claim 3, characterized in that: The first limiting member is provided with a limiting protrusion and a supporting portion, and the supporting portion is located at an end of the limiting protrusion away from the resetting elastic member; The limiting protrusion abuts against the inner wall surface of the sleeve body, and the abutting portion abuts against the outer wall surface of the outer push rod.

5. The separation device according to claim 3, characterized in that: The separation device further comprises a ventilation assembly, which comprises a vacuum ventilation block, a first sealing ring and a second sealing ring, one end of the vacuum ventilation block is connected to an end of the sleeve base away from the sleeve body, and the other end is sealed and connected to the ventilation device, and the vacuum ventilation block, the outer push rod and the inner push rod are sleeved in sequence; The first sealing ring is located between the vacuum vent block and the outer push rod, and is sleeved on the outer wall surface of the outer push rod; the second sealing ring is located between the outer push rod and the inner push rod, and is sleeved on the outer wall surface of the inner push rod.

6. The separation device according to claim 1, characterized in that: A first boss is provided on the outer periphery of the outer push rod, and the outer side wall of the first boss can slide relative to the inner wall surface of the sleeve structure; A second boss is provided on the outer periphery of the inner push rod, the outer side wall of the second boss can slide relative to the inner wall surface of the linkage member, and one end of the first elastic member away from the push block assembly is fixed to the top of the second boss; A third boss is provided on the outer periphery of the linkage member, and the outer side wall of the third boss can slide relative to the inner wall surface of the outer push rod.

7. The separation device according to claim 1, characterized in that: The outer top block comprises a connected outer top block body and a first base, the middle top block comprises a connected middle top block body and a second base, the outer top block body is slidably sleeved on the middle top block body, and the first base is slidably sleeved on the second base; A first turning portion is provided on the inner wall surface of the outer top block body, and a second turning portion is provided on the outer wall surface of the middle top block body, and there is a movable gap between the first turning portion and the second turning portion; The first positioning step is arranged on a side of the first base facing the second base, an oil-free bushing is arranged between the first positioning step and the inner bottom wall of the first base, and the oil-free bushing is sleeved on the second base.

8. The separation device according to claim 7, characterized in that: The inner top block comprises a connected inner top block body and a third base, the middle top block body is slidably sleeved on the inner top block body, and the second base is slidably sleeved on the third base; The second positioning step is arranged on a side of the second base facing the third base, a linear bearing is arranged between the second positioning step and the inner bottom wall of the second base, and the linear bearing is sleeved on the third base.

9. A method for separating a chip carrier film, applied to the separation device according to any one of claims 1 to 8, characterized in that: The separation method comprises: The ventilation device adjusts the separation device to a vacuum state to adsorb the carrier film; Pushing the outer push rod and the inner push rod upwards to simultaneously lift the outer push block, the middle push block and the inner push block to a first height; The outer top block is kept at the first height, and the inner top rod simultaneously lifts the middle top block and the inner top block to a second height; The middle top block is kept at the second height, and the inner top rod lifts the inner top block to a third height; Or, the separation method comprises: The ventilation device adjusts the separation device to a vacuum state to adsorb the carrier film; Pushing the outer push rod and the inner push rod upwards to simultaneously lift the outer push block, the middle push block and the inner push block to a first height; The middle top block and the inner top block are kept at the first height, the outer top rod is lowered to make the outer top block lower to the third height, and the lowering of the outer top block drives the middle top block to lower to the fourth height; The outer top block and the middle top block are kept at the third height and the fourth height respectively, and the inner top rod is lowered to make the inner top block drop to the fifth height.

10. A mounting device, characterized in that: The placement equipment comprises the separation device according to any one of claims 1-8.

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