Feeding and discharging device for coating equipment

Abstract

The invention belongs to the technical field of solar coating, and particularly relates to a feeding and discharging device for coating equipment, which comprises a support frame, a lifting mechanism mounted in the support frame, a feeding and taking mechanism mounted above the lifting mechanism, a feeding plate mounted at the top end of the feeding and taking mechanism, and a silicon wafer carrier plate arranged above the feeding plate. A coating assembly is installed on the side, away from the feeding and taking mechanism, of the top end of the supporting frame, a containing disc is arranged in the coating assembly, and a groove in the containing disc is matched with the silicon wafer carrier plate in shape. The position of the silicon wafer carrier plate is shot through the camera, the silicon wafer carrier plate is clamped by the clamping plate through descending of the lifting plate, then the silicon wafer carrier plate can be straightened by rotating the direction of the lifting plate, and then the silicon wafer carrier plate is put back to the top end of the feeding plate so that deviation correction of the silicon wafer carrier plate can be achieved.

Description

Technical Field

[0001] The invention belongs to the technical field of solar film coating, in particular to a loading and unloading device for film coating equipment. Background Art

[0002] Solar energy is a clean energy that is often seen in our lives. To generate electricity from solar energy, solar cells are used to convert the sun's light energy into electrical energy. Silicon wafers are used in solar cells. After the silicon wafers are produced, they need to be coated. Coating can make the conversion efficiency of solar cells higher. For coating, the silicon wafers need to be placed in the coating chamber, and the silicon wafers need to be placed in the coating chamber through the loading and unloading device.

[0003] During use, the silicon wafer carrier is placed into the coating chamber through the loading and unloading device. However, the silicon wafer carrier is prone to be placed crookedly after being placed on the top of the feeding plate. At this time, the silicon wafer carrier cannot be loaded into the placement tray of the coating chamber. In the feeding process, the silicon wafer carrier is prone to slide off the top of the feeding plate, which will cause damage to the silicon wafer and affect subsequent use.

[0004] To this end, the present invention provides a loading and unloading device for coating equipment. Summary of the invention

[0005] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0006] The technical solution adopted by the present invention to solve its technical problem is: the loading and unloading device for coating equipment described in the present invention comprises a supporting frame, a lifting mechanism is installed inside the supporting frame, a feeding and picking mechanism is installed above the lifting mechanism, a feeding plate is installed at the top of the feeding and picking mechanism, a silicon wafer carrier is arranged above the feeding plate, a coating assembly is installed on the side of the top of the supporting frame away from the feeding and picking mechanism, a placing tray is arranged inside the coating assembly, the trough body inside the placing tray matches the shape of the silicon wafer carrier, a fixing frame is arranged above the feeding and picking mechanism, and the bottom end of the fixing frame is fixedly connected to the supporting frame. A mounting frame is fixed to the top of the fixed frame, and a first lifting frame is slidably connected to the inside of the mounting frame. A first motor is installed on the top of the mounting frame, a threaded column is fixed to the end of the rotating shaft of the first motor, and the threaded column is threadedly connected to the first lifting frame. The bottom end of the first lifting frame is rotatably connected to a steering column, a second motor is installed on one side of the steering column, a gear is fixed to the end of the rotating shaft of the second motor, a gear is also fixed to the top of the steering column, the gear of the second motor is meshed with the gear of the steering column, a lifting plate is fixed to the bottom end of the steering column, a camera is installed at the bottom end of the lifting plate, and clamping plates are provided on both sides of the lifting plate.

[0007] Preferably, a movable cavity is provided inside the lifting plate, a telescopic plate is slidably connected inside the movable cavity, and one end of the telescopic plate is fixedly connected to the clamping plate.

[0008] Preferably, a second oil cylinder is provided inside the lifting plate, and a second piston is slidably connected inside the second oil cylinder, a second telescopic rod is fixed to one end of the second piston, and the other end of the second telescopic rod is fixedly connected to a side of the top of the telescopic plate close to the clamping plate, a first oil cylinder is installed on a side of the first lifting frame away from the mounting frame, an infusion tube is fixed to the bottom end of the first oil cylinder, and the other end of the infusion tube is connected to the top of the lifting plate, a first piston is slidably connected inside the first oil cylinder, a first telescopic rod is fixed to the top of the first piston, the first telescopic rod passes through the top of the first oil cylinder, a first spring is sleeved on the outside of the first telescopic rod, the bottom end of the first spring is fixedly connected to the top of the first piston, and the top of the first spring is fixedly connected to the top inside the first oil cylinder.

[0009] Preferably, a lifting block is fixed to the top of the first telescopic rod, and pull rods are fixed on both sides of the lifting block, and a plurality of teeth are fixed at equal intervals on both sides of the interior of the mounting frame away from one end of the first lifting frame, and the teeth are arranged in the upper area inside the mounting frame, and winding gears are rotatably connected on both sides of the first lifting frame, and the winding gears can be meshed with the teeth, and a winding disk is fixed on the end of the winding gear away from the first lifting frame, and a pull rope is wound on the outside of the winding disk, and pulley guide blocks are fixed on both sides of the top of the mounting frame, and the pull rope runs through the interior of the pulley guide block, and the other end of the pull rope is fixedly connected to the end of the pull rod of the lifting block.

[0010] Preferably, a slot is provided on one side of the lifting block, a support plate is fixed on the side of the first oil cylinder close to the slot, a block is provided on the top of the support plate close to the side of the lifting block, the block can form a snap connection with the slot, a telescopic column is fixed to one end of the block close to the support plate, the telescopic column runs through the interior of the support plate, a third spring is sleeved on the outside of the telescopic column, one end of the third spring is fixedly connected to the block, and the other end of the third spring is fixedly connected to the support plate.

[0011] Preferably, a connecting frame is provided on one side of the support plate away from the block, the other end of the telescopic column of the block is fixedly connected to the connecting frame, push blocks are fixed on both sides of the bottom end of the connecting frame, and top columns are provided on both sides of the first lifting frame, which are fixedly connected to the mounting frame.

[0012] Preferably, limiting blocks are fixed on both sides of the bottom end of the silicon wafer carrier, and limiting grooves are provided on both sides of one end of the feeding plate, and a snap-fit ​​connection can be formed between the limiting blocks and the limiting grooves.

[0013] Preferably, a side of the splint close to the camera is rotatably connected to a rotating wheel, a first toothed disc is fixed to the top of the rotating wheel, a second toothed disc is arranged above the first toothed disc, and the second toothed disc is slidably connected to the inside of the splint.

[0014] Preferably, a third telescopic rod is fixed to the top of the second toothed disc, a second spring is sleeved on the outside of the third telescopic rod, the bottom end of the second spring is fixedly connected to the top of the second toothed disc, the top of the second spring is fixedly connected to the splint, a second lifting frame is fixed to the top of the third telescopic rod, one end of the second lifting frame is slidably connected to the inside of the splint, and an extension rod is fixed to the end of the second lifting frame away from the splint.

[0015] Preferably, a ball is rotatably connected to the bottom end of the extension rod.

[0016] The beneficial effects of the present invention are as follows: 1. The loading and unloading device for coating equipment described in the present invention uses a camera to shoot the position of the silicon wafer carrier, and uses a clamping plate to clamp the silicon wafer carrier by lowering the lifting plate, and then the silicon wafer carrier can be straightened by rotating the lifting plate, and then the silicon wafer carrier is placed back to the top of the feeding plate to realize the deviation correction of the silicon wafer carrier.

[0017] 2. The loading and unloading device for coating equipment described in the present invention can limit the two sides of the silicon wafer carrier by the rotating wheel during the feeding process of the feeding plate, thereby ensuring that the silicon wafer carrier is in a stable state during the feeding process. At the same time, when the clamping plate clamps the silicon wafer carrier, the second toothed disc and the first toothed disc limit the rotating wheel, thereby ensuring that the rotating wheel and the silicon wafer carrier are in a stable state during the clamping process. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention will be further described below in conjunction with the accompanying drawings.

[0019] Figure 1 is a stereogram of the present invention; Figure 2 It is a schematic diagram of the internal structure of the present invention; Figure 3 It is a schematic diagram of the structure of the limiting groove and the limiting block in the present invention; Figure 4 It is a schematic diagram of the structure of the mounting frame in the present invention; Figure 5 is a schematic diagram of the structure of the first lifting frame in the present invention; Figure 6 It is a schematic diagram of the internal structure of the lifting plate in the present invention; Figure 7 It is a schematic diagram of the internal structure of the first oil cylinder in the present invention; Figure 8 It is a schematic diagram of the internal structure of the splint in the present invention.

[0020] In the figure: 1, support frame; 11, feeding and taking-up mechanism; 111, feeding plate; 112, limiting groove; 12, lifting mechanism; 2, silicon wafer carrier; 21, limiting block; 3, coating assembly; 31, placing plate; 4, fixing frame; 41, mounting frame; 411, first motor; 412, threaded column; 413, pulley guide block; 414, teeth; 415, top column; 42, first lifting frame; 421, winding gear; 422, winding disk; 423, pull rope; 424, second motor; 425, steering column; 43, first oil cylinder; 431, infusion tube; 432, first piston; 43 3. first spring; 434. first telescopic rod; 435. lifting block; 436. slot; 44. lifting plate; 441. movable chamber; 442. telescopic plate; 443. second telescopic rod; 444. second piston; 445. second oil cylinder; 45. camera; 46. clamping plate; 461. rotating wheel; 462. first gear disc; 463. second gear disc; 464. second spring; 465. third telescopic rod; 466. second lifting frame; 467. extension rod; 468. ball; 47. support plate; 471. connecting frame; 472. push block; 473. clamping block; 474. third spring. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0022] like Figures 1 to 5As shown, a loading and unloading device for a coating device described in an embodiment of the present invention comprises a support frame 1, a lifting mechanism 12 is installed inside the support frame 1, a feeding and picking mechanism 11 is installed above the lifting mechanism 12, a feeding plate 111 is installed at the top of the feeding and picking mechanism 11, a silicon wafer carrier 2 is arranged above the feeding plate 111, a coating component 3 is installed on the side of the top of the support frame 1 away from the feeding and picking mechanism 11, a placing tray 31 is arranged inside the coating component 3, a trough body inside the placing tray 31 matches the shape of the silicon wafer carrier 2, a fixing frame 4 is arranged above the feeding and picking mechanism 11, the bottom end of the fixing frame 4 is fixedly connected to the support frame 1, a mounting frame 41 is fixed at the top of the fixing frame 4, and a mounting frame 41 is arranged on the top of the fixing frame 4. The mounting frame 41 is internally slidably connected with a first lifting frame 42, a first motor 411 is installed at the top of the mounting frame 41, a threaded column 412 is fixed to the end of the rotating shaft of the first motor 411, the threaded column 412 is threadedly connected to the first lifting frame 42, a steering column 425 is rotatably connected to the bottom end of the first lifting frame 42, a second motor 424 is installed on one side of the steering column 425, a gear is fixed to the end of the rotating shaft of the second motor 424, a gear is also fixed to the top of the steering column 425, the gear of the second motor 424 is meshed with the gear of the steering column 425, a lifting plate 44 is fixed to the bottom end of the steering column 425, a camera 45 is installed at the bottom end of the lifting plate 44, and clamping plates 46 are provided on both sides of the lifting plate 44; After the silicon wafers are produced, they need to be coated for higher conversion efficiency. At this time, a loading and unloading device is needed. Before coating, the feeding and unloading mechanism 11 and the feeding plate 111 are at the lowest position. At this time, the silicon wafer carrier 2 with silicon wafers can be placed on the top of the feeding plate 111, and then the lifting mechanism 12 is started to drive the feeding and unloading mechanism 11 and the feeding plate 111 to rise upward. At this time, the feeding plate 111 can drive the silicon wafer carrier 2 to the position of the feeding port of the coating component 3. At the same time, the lifting plate 44 is at the highest point, and the camera 45 is on the silicon wafer carrier. 2 is photographed during the lifting process, and it is determined whether the silicon wafer carrier 2 is in the correct position. When the silicon wafer carrier 2 is in the correct position, the feeding and taking mechanism 11 is started to drive the feeding plate 111 to feed the silicon wafer carrier 2 into the inside of the placement tray 31 for coating, and after the coating is completed, the feeding and taking mechanism 11 and the lifting mechanism 12 are moved in the reverse direction to take out the silicon wafer carrier 2. When the silicon wafer carrier 2 is not in the correct position, the second motor 424 is started to drive the steering column 425 to rotate through the gear, and the steering column 425 drives the lifting plate 44 to rotate and automatically align with the current silicon wafer carrier 2. The second motor 424 stops rotating after the wafer carrier 2 is aligned, and the first motor 411 is started to drive the threaded column 412 to rotate. The threaded column 412 rotates to drive the first lifting frame 42 to move downward inside the mounting frame 41. At this time, the first lifting frame 42 drives the lifting plate 44 to move downward. When the first lifting frame 42 moves to the bottom of the mounting frame 41, the two clamping plates 46 move toward the direction of the camera 45. At this time, the silicon wafer carrier 2 can be clamped under the lifting plate 44. Then the first motor 411 is started to drive the first lifting frame 42 The first lifting frame 42 drives the lifting plate 44 to rise, and at this time the lifting plate 44 drives the clamping plate 46 to clamp the silicon wafer carrier 2, and then the second motor 424 drives the lifting plate 44 to rotate to the correct angle, and then the lifting plate 44 descends to drive the silicon wafer carrier 2 to be placed on the top of the feeding plate 111, and then the feeding plate 111 can feed the adjusted silicon wafer carrier 2 into the interior of the coating component 3 and place it in the interior of the placement tray 31, and then the coating is carried out, which can realize automatic adjustment of the position of the silicon wafer carrier 2 to prevent the feeding process from being affected by the position offset of the silicon wafer carrier 2.

[0023] like Figures 4 to 6 As shown, a movable cavity 441 is provided inside the lifting plate 44, and a telescopic plate 442 is slidably connected inside the movable cavity 441, and one end of the telescopic plate 442 is fixedly connected to the clamping plate 46; When the clamping plate 46 approaches the camera 45, the telescopic plate 442 slides inside the movable cavity 441. At this time, the telescopic plate 442 can pull the clamping plate 46, and the clamping plate 46 can clamp the silicon wafer carrier 2, so that the silicon wafer carrier 2 can be easily grasped.

[0024] like Figures 4 to 7As shown, a second oil cylinder 445 is provided inside the lifting plate 44, and a second piston 444 is slidably connected inside the second oil cylinder 445, and a second telescopic rod 443 is fixed to one end of the second piston 444, and the other end of the second telescopic rod 443 is fixedly connected to a side of the top of the telescopic plate 442 close to the clamping plate 46, and a first oil cylinder 43 is installed on the side of the first lifting frame 42 away from the mounting frame 41, and a liquid infusion tube 431 is fixed to the bottom end of the first oil cylinder 43, and the other end of the liquid infusion tube 431 is connected to the top of the lifting plate 44, and a first piston 432 is slidably connected inside the first oil cylinder 43, and a first telescopic rod 434 is fixed to the top of the first piston 432, and the first telescopic rod 434 runs through the top of the first oil cylinder 43, and a first spring 433 is sleeved on the outside of the first telescopic rod 434, and the bottom end of the first spring 433 is fixedly connected to the top of the first piston 432, and the top of the first spring 433 is fixedly connected to the top inside the first oil cylinder 43; The interior of the first oil cylinder 43 below the first piston 432 and the interior of the infusion tube 431 are filled with hydraulic oil, and the first spring 433 is in a compressed state. When the telescopic plate 442 needs to pull the clamping plate 46, the elastic force of the first spring 433 pushes the first piston 432, and the first piston 432 squeezes the hydraulic oil inside the first oil cylinder 43. At this time, the hydraulic oil is injected into the interior of the second oil cylinder 445 through the infusion tube 431. Under the push of the hydraulic oil, the second piston 444 pushes the second telescopic rod 443 to move. At this time, the second telescopic rod 443 can push the telescopic plate 442 to move. At this time, the telescopic plate 442 can pull the clamping plate 46 to clamp the silicon wafer carrier 2.

[0025] like Figures 4 to 7 As shown, a lifting block 435 is fixed to the top of the first telescopic rod 434, and pull rods are fixed on both sides of the lifting block 435. A plurality of teeth 414 are evenly fixed on both sides of the mounting frame 41 away from one end of the first lifting frame 42, and the teeth 414 are arranged in the upper area of ​​the mounting frame 41. Winding gears 421 are rotatably connected on both sides of the first lifting frame 42, and the winding gear 421 can be meshed and connected with the teeth 414. A winding disk 422 is fixed to the end of the winding gear 421 away from the first lifting frame 42, and a pull rope 423 is wound around the outside of the winding disk 422. Pulley guide blocks 413 are fixed on both sides of the top of the mounting frame 41, and the pull rope 423 runs through the inside of the pulley guide block 413. The other end of the pull rope 423 is fixedly connected to the end of the pull rod of the lifting block 435. After the clamping plate 46 clamps the silicon wafer carrier 2, the first lifting frame 42 drives the lifting plate 44 to rise. At this time, the stroke of the first lifting frame 42 is short, and the winding gear 421 cannot mesh with the teeth 414. At this time, the winding disk 422 is in a relaxed state, allowing the pull rope 423 to move freely. When the silicon wafer carrier 2 is placed in the coating component 3, the first lifting frame 42 needs to be reset, and the first lifting frame 42 moves upward. When the winding gear 421 moves to the position of the teeth 414 and meshes with it, the winding disk 422 is in a relaxed state. The gear 421 drives the winding disk 422 to reel the pull rope 423. At this time, the pull rope 423 pulls the pull rod of the lifting block 435. The lifting block 435 pulls the first telescopic rod 434 to drive the first piston 432 to move. At this time, the first piston 432 can draw hydraulic oil into the first oil cylinder 43. At the same time, the first spring 433 is squeezed. At the same time, the hydraulic oil drives the second piston 444 to pull the second telescopic rod 443. The second telescopic rod 443 pulls the telescopic plate 442 to drive the splint 46 to open, so as to realize the resetting of the splint 46.

[0026] like Figures 4 to 7 As shown, a slot 436 is provided on one side of the lifting block 435, a support plate 47 is fixed on one side of the first oil cylinder 43 close to the slot 436, a block 473 is provided on the top of the support plate 47 close to the side of the lifting block 435, the block 473 can be engaged with the slot 436, a telescopic column is fixed on one end of the block 473 close to the support plate 47, the telescopic column runs through the inside of the support plate 47, a third spring 474 is sleeved on the outside of the telescopic column, one end of the third spring 474 is fixedly connected to the block 473, and the other end of the third spring 474 is fixedly connected to the support plate 47; When the slot 436 is pulled up, the top end will push the inclined surface of the block 473. At this time, the block 473 is squeezed to move toward the support plate 47. At the same time, the third spring 474 is squeezed. When the first lifting frame 42 moves to the highest point, the slot 436 is aligned with the position of the block 473. At this time, the elastic force of the third spring 474 pushes the block 473 to be stuck into the inside of the slot 436. At this time, the lifting block 435 can be limited to maintain the state of the hydraulic oil in the first oil cylinder 43.

[0027] like Figures 4 to 7 As shown, a connecting frame 471 is provided on one side of the support plate 47 away from the clamping block 473, the other end of the telescopic column of the clamping block 473 is fixedly connected to the connecting frame 471, pushing blocks 472 are fixed on both sides of the bottom end of the connecting frame 471, and top columns 415 are provided on both sides of the first lifting frame 42, and the top columns 415 are fixedly connected to the mounting frame 41; When the first lifting frame 42 moves to the bottom for the first time, the clamp 46 needs to clamp the silicon wafer carrier 2. Therefore, when the first lifting frame 42 moves to the bottom, the inclined surface of the push block 472 is pushed by the top column 415. At this time, the push block 472 is pushed and drives the connecting frame 471 to move. At this time, the connecting frame 471 pulls the clamping block 473 and the clamping slot 436 to separate, and the lifting block 435 can be released. At this time, the first spring 433 can push the first piston 432 to move downward, so that the clamp 46 can automatically clamp the silicon wafer carrier 2 when the first lifting frame 42 descends for the first time.

[0028] like Figure 3 As shown, both sides of the bottom of the silicon wafer carrier 2 are fixed with limit blocks 21, and both sides of one end of the feeding plate 111 are provided with limit grooves 112, and the limit blocks 21 and the limit grooves 112 can form a snap connection; When the clamp 46 clamps the silicon wafer carrier 2 and places it on the top of the feeding plate 111, the silicon wafer carrier 2 is straightened, and the limit block 21 and the limit groove 112 are engaged. At this time, when the feeding plate 111 feeds the silicon wafer carrier 2 into the interior of the coating component 3, the silicon wafer carrier 2 can be pulled out from between the clamps 46.

[0029] like Figure 8 As shown, a rotating wheel 461 is rotatably connected to one side of the clamping plate 46 close to the camera 45, a first toothed disc 462 is fixed to the top of the rotating wheel 461, a second toothed disc 463 is arranged above the first toothed disc 462, and the second toothed disc 463 is slidably connected to the inside of the clamping plate 46; When the clamp 46 clamps the silicon wafer carrier 2, the rotating wheel 461 can contact the silicon wafer carrier 2. When the feeding plate 111 pulls the silicon wafer carrier 2 out from between the clamps 46, the rolling of the rotating wheel 461 can reduce a lot of friction, making it easier to separate the clamp 46 from the silicon wafer carrier 2.

[0030] like Figure 8 As shown, a third telescopic rod 465 is fixed to the top of the second toothed disc 463, a second spring 464 is sleeved on the outside of the third telescopic rod 465, a bottom end of the second spring 464 is fixedly connected to the top of the second toothed disc 463, a top end of the second spring 464 is fixedly connected to the clamping plate 46, a second lifting frame 466 is fixed to the top of the third telescopic rod 465, one end of the second lifting frame 466 is slidably connected to the inside of the clamping plate 46, and an extension rod 467 is fixed to the end of the second lifting frame 466 away from the clamping plate 46; When the clamping plate 46 clamps the wafer carrier 2 and straightens it, the wafer carrier 2 may drive the rotating wheel 461 to roll, causing the wafer carrier 2 to slide. Therefore, when the clamping plate 46 is at the lowest point, the extension rod 467 is supported on the top of the supporting frame 1. At this time, the extension rod 467 drives the second lifting frame 466 to pull the third telescopic rod 465. The third telescopic rod 465 pulls up the second toothed disc 463. At this time, the second toothed disc 463 is separated from the first toothed disc 462, and the rotating wheel 461 can roll. When the clamp 46 clamps the silicon wafer carrier 2, the extension rod 467 is separated from the top of the support frame 1. At this time, the second spring 464 pushes the second toothed disc 463 to engage with the first toothed disc 462. At this time, the rotating wheel 461 can be fixed to prevent the rotating wheel 461 from rolling when the clamp 46 clamps the silicon wafer carrier 2. When the feeding plate 111 drives the silicon wafer carrier 2 to move, the clamp 46 will return to the lowest point, so the rotating wheel 461 is in a rollable state, which does not affect the feeding plate 111 driving the silicon wafer carrier 2 to feed.

[0031] like Figure 8 As shown, the bottom end of the extension rod 467 is rotatably connected with a ball 468; When the clamp 46 clamps the silicon wafer carrier 2 and adjusts the angle, the bottom end of the extension rod 467 may contact the top of the support frame 1. At this time, the ball 468 can roll on the bottom end of the extension rod 467 to reduce the friction between the extension rod 467 and the top of the support frame 1.

[0032] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A loading and unloading device for coating equipment, characterized in that: The invention comprises a support frame (1), wherein a lifting mechanism (12) is installed inside the support frame (1), a feeding and retrieving mechanism (11) is installed above the lifting mechanism (12), a feeding plate (111) is installed at the top of the feeding and retrieving mechanism (11), a silicon wafer carrier (2) is arranged above the feeding plate (111), a coating assembly (3) is installed on the side of the top of the support frame (1) away from the feeding and retrieving mechanism (11), a placement tray (31) is arranged inside the coating assembly (3), a trough body inside the placement tray (31) matches the shape of the silicon wafer carrier (2), a fixing frame (4) is arranged above the feeding and retrieving mechanism (11), the bottom end of the fixing frame (4) is fixedly connected to the support frame (1), a mounting frame (41) is fixed at the top of the fixing frame (4), and the mounting frame (41) is slidably connected inside. A first lifting frame (42), a first motor (411) is installed at the top of the mounting frame (41), a threaded column (412) is fixed to the end of the rotating shaft of the first motor (411), the threaded column (412) and the first lifting frame (42) are threadedly connected, the bottom end of the first lifting frame (42) is rotatably connected to a steering column (425), a second motor (424) is installed on one side of the steering column (425), a gear is fixed to the end of the rotating shaft of the second motor (424), a gear is also fixed to the top of the steering column (425), the gear of the second motor (424) is meshedly connected with the gear of the steering column (425), a lifting plate (44) is fixed to the bottom end of the steering column (425), a camera (45) is installed at the bottom end of the lifting plate (44), and clamping plates (46) are provided on both sides of the lifting plate (44).

2. The loading and unloading device for coating equipment according to claim 1, characterized in that: An active cavity (441) is provided inside the lifting plate (44), a telescopic plate (442) is slidably connected inside the active cavity (441), and one end of the telescopic plate (442) is fixedly connected to the clamping plate (46).

3. The loading and unloading device for coating equipment according to claim 2, characterized in that: A second oil cylinder (445) is arranged inside the lifting plate (44), a second piston (444) is slidably connected inside the second oil cylinder (445), a second telescopic rod (443) is fixed to one end of the second piston (444), the other end of the second telescopic rod (443) is fixedly connected to a side of the top of the telescopic plate (442) close to the clamping plate (46), a first oil cylinder (43) is installed on a side of the first lifting frame (42) away from the mounting frame (41), a liquid infusion tube (431) is fixed to the bottom end of the first oil cylinder (43), and the liquid infusion tube (431) is fixed to the bottom end of the first oil cylinder (43). ) is connected to the top of the lifting plate (44); the first oil cylinder (43) is slidably connected to the inside of the first piston (432); the top of the first piston (432) is fixed with a first telescopic rod (434); the first telescopic rod (434) passes through the top of the first oil cylinder (43); the outside of the first telescopic rod (434) is sleeved with a first spring (433); the bottom end of the first spring (433) is fixedly connected to the top of the first piston (432); the top of the first spring (433) is fixedly connected to the top of the inside of the first oil cylinder (43).

4. The loading and unloading device for coating equipment according to claim 3 is characterized in that: A lifting block (435) is fixed to the top of the first telescopic rod (434), and pull rods are fixed to both sides of the lifting block (435). A plurality of teeth (414) are fixed at equal intervals on both sides of the mounting frame (41) at one end away from the first lifting frame (42), and the teeth (414) are arranged in the upper area of ​​the mounting frame (41). A winding gear (421) is rotatably connected to both sides of the first lifting frame (42), and the winding gear (421) can be meshed with the teeth (414). A winding disk (422) is fixed to one end of the winding gear (421) away from the first lifting frame (42), and a pull rope (423) is wound around the outside of the winding disk (422). Pulley guide blocks (413) are fixed to both sides of the top of the mounting frame (41), and the pull rope (423) runs through the inside of the pulley guide block (413), and the other end of the pull rope (423) is fixedly connected to the end of the pull rod of the lifting block (435).

5. The loading and unloading device for coating equipment according to claim 3 is characterized in that: A slot (436) is provided on one side of the lifting block (435); a support plate (47) is fixed on one side of the first oil cylinder (43) close to the slot (436); a block (473) is provided on the top of the support plate (47) close to the lifting block (435); the block (473) can be engaged with the slot (436); a telescopic column is fixed on one end of the block (473) close to the support plate (47); the telescopic column runs through the interior of the support plate (47); a third spring (474) is sleeved on the outside of the telescopic column; one end of the third spring (474) is fixedly connected to the block (473); and the other end of the third spring (474) is fixedly connected to the support plate (47).

6. The loading and unloading device for coating equipment according to claim 5, characterized in that: A connecting frame (471) is provided on one side of the support plate (47) away from the clamping block (473); the other end of the telescopic column of the clamping block (473) is fixedly connected to the connecting frame (471); push blocks (472) are fixedly provided on both sides of the bottom end of the connecting frame (471); and top columns (415) are provided on both sides of the first lifting frame (42); the top columns (415) are fixedly connected to the mounting frame (41).

7. The loading and unloading device for coating equipment according to claim 1, characterized in that: Limiting blocks (21) are fixed on both sides of the bottom of the silicon wafer carrier (2), and limiting grooves (112) are provided on both sides of one end of the feeding plate (111), and a snap-fit ​​connection can be formed between the limiting blocks (21) and the limiting grooves (112).

8. The loading and unloading device for coating equipment according to claim 1, characterized in that: A rotating wheel (461) is rotatably connected to one side of the clamping plate (46) close to the camera (45), a first toothed disc (462) is fixed to the top of the rotating wheel (461), a second toothed disc (463) is arranged above the first toothed disc (462), and the second toothed disc (463) is slidably connected to the inside of the clamping plate (46).

9. The loading and unloading device for coating equipment according to claim 8, characterized in that: A third telescopic rod (465) is fixed to the top of the second toothed disc (463), a second spring (464) is sleeved on the outside of the third telescopic rod (465), a bottom end of the second spring (464) is fixedly connected to the top of the second toothed disc (463), a top end of the second spring (464) is fixedly connected to the clamping plate (46), a second lifting frame (466) is fixed to the top of the third telescopic rod (465), one end of the second lifting frame (466) is slidably connected to the inside of the clamping plate (46), and an extension rod (467) is fixed to one end of the second lifting frame (466) away from the clamping plate (46).

10. The loading and unloading device for coating equipment according to claim 9, characterized in that: The bottom end of the extension rod (467) is rotatably connected to a ball bearing (468).

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