Loudspeaker and electronic equipment

Abstract

The invention provides a loudspeaker and electronic equipment. The loudspeaker comprises a supporting wall, a plurality of first cantilever beams and a driver. The supporting wall surrounds in the circumferential direction to form a cylindrical cavity. The multiple first cantilever beams are sequentially arranged at one end of the supporting wall in the circumferential direction of the supporting wall. Each first cantilever beam comprises a fixed end and a free end. The driver is installed on the first cantilever beam and used for driving the first cantilever beam to swing. A separation area is arranged between any two adjacent first cantilever beams, the distance between the two adjacent first cantilever beams in the separation area is far, mechanical decoupling of the two adjacent first cantilever beams is achieved, and the problem of acoustic short circuit is not prone to occurring. The separation area is defined by the edges of the two adjacent first cantilever beams and the edge of the supporting wall, and the separation area is located at the roots, close to the fixed ends, of the first cantilever beams. According to the scheme, the sound pressure levels of high-frequency audio and low-frequency audio of the loudspeaker are improved, and the sound quality of the loudspeaker is improved.

Description

Technical Field

[0001] The present application relates to the technical field of electronic equipment, and in particular to a speaker and an electronic device. Background Art

[0002] As an important electroacoustic device, speakers are widely used in electronic devices such as mobile terminals. Traditional speakers can be divided into dynamic micro speakers and balanced iron micro speakers according to their technical types. They both use electromagnetic force to drive the vibration structure to stimulate sound. However, these speakers require precise processing and assembly, and their size is difficult to further miniaturize. They are also affected by external magnetic fields during operation, which affects their performance.

[0003] Therefore, the research on micro electro-mechanical systems (MEMS) speakers is becoming more and more in-depth. In the prior art, it is difficult for MEMS speakers to take into account the sound pressure level (SPL) of both high-frequency audio and low-frequency audio, and it is difficult to improve the sound quality of the speakers. Summary of the invention

[0004] The present application provides a loudspeaker and an electronic device, which improve the effective displacement of a first cantilever beam of the loudspeaker during vibration, improve the sound pressure level of high-frequency audio and low-frequency audio of the loudspeaker, and improve the sound quality of the loudspeaker.

[0005] In a first aspect, the present application provides a loudspeaker, which includes a supporting wall, a plurality of first cantilever beams and a driver. The supporting wall is surrounded by a cylindrical cavity in the circumferential direction. The plurality of first cantilever beams are fixed to one end of the supporting wall in the axial direction, and are suspended in the cavity so as to facilitate the swinging of the first cantilever beams. Specifically, the plurality of first cantilever beams are arranged in sequence along the circumferential direction of the supporting wall. Each of the first cantilever beams includes a fixed end and a free end, wherein the fixed end of the first cantilever beam is fixedly connected to one end of the supporting wall in the axial direction, and the free ends of the plurality of first cantilever beams are opposite. The driver is mounted on the first cantilever beam, and the driver is used to drive the first cantilever beam to swing according to an audio signal. There is a separation area between any two adjacent first cantilever beams, and the distance between the two adjacent first cantilever beams in the separation area is relatively far, so that the mechanical decoupling of the two adjacent first cantilever beams can be achieved, so that the mutual influence between the two adjacent first cantilever beams is small, and the problem of acoustic short circuit is not easy to occur. In addition, the above-mentioned separation area is formed by the edges of the two adjacent first cantilever beams and the edges of the supporting wall, and the separation area is located at the root of the first cantilever beam close to the fixed end, or the separation area is located on the side of the first cantilever beam close to the fixed end. The root of the first cantilever beam has a small vibration amplitude when vibrating, and even if the separation area is not set, the amplitude of the vibration of the root of the first cantilever beam corresponding to the above-mentioned separation area is small. Therefore, setting the separation area at the root of the first cantilever beam has a small effect on the vibration of the first cantilever beam of the speaker, which is conducive to improving the effective displacement of the first cantilever beam during the vibration process, improving the sound pressure level of the high-frequency audio and low-frequency audio of the speaker, and improving the sound quality of the speaker.

[0006] In one technical solution, the separation area may be a hollow structure. Alternatively, in another technical solution, the separation area may further include a second cantilever beam, a first gap is provided between the second cantilever beam and the first cantilever beam, and the width of the first gap is less than a first preset value. The side surfaces of the first cantilever beam and the second cantilever beam are opposite, and the first gap is small, so that the acoustic short circuit problem is less likely to occur.

[0007] In order to transmit the audio signal to the speaker, the speaker also includes a soldering pad, which is connected to an external electronic device to transmit the audio signal to the speaker. The soldering pad is connected to the driver, so that the driver drives the first cantilever beam to vibrate according to the audio signal and drives the speaker to make a sound. The soldering pad is arranged on the second cantilever beam, but does not need to be arranged on the supporting wall. The supporting wall does not need to be made wider to accommodate the soldering pad, so that the supporting wall can be narrower, which is conducive to reducing the volume of the speaker.

[0008] There is also a second gap between any two adjacent first cantilever beams, the second gap is located on one side of the first cantilever beam close to the free end, and the second gap is connected to the separation area, that is, the second gap and the separation area are located between the two adjacent first cantilever beams. The width of the second gap is less than the first preset value.

[0009] In a possible technical solution, the first preset value may be 30 um to 50 um, and the width of the second gap may be less than or equal to 50 um. Furthermore, the width of the second gap may be less than or equal to 30 um.

[0010] The shape of the separation area can have multiple options. In one possible technical solution, the edge of the first cantilever beam facing the separation area is a curved edge. The transition of the curved edge is relatively soft, which is conducive to stress release and is not prone to stress concentration, which is conducive to improving the reliability of the first cantilever beam.

[0011] In another possible technical solution, the edge of the first cantilever beam facing the separation area is a straight edge, and the angle between the straight edges of two adjacent first cantilever beams is greater than 0°.

[0012] In a technical solution, each first cantilever beam of the above-mentioned loudspeaker includes a first vibration zone and a second vibration zone arranged away from the fixed end, and the first vibration zone and the second vibration zone respectively refer to different areas of the first cantilever beam. The driver of the loudspeaker includes a first driver and a second driver, the first driver is arranged in the first vibration zone of the first cantilever beam, and the first driver is used to drive the first vibration zone to vibrate; the second driver is arranged in the second vibration zone of the first cantilever beam, and the second driver is used to drive the second vibration zone to vibrate. This solution can enrich the application scenarios of the loudspeaker. For example, in an application scenario, the driving signal of the first driver and the driving signal of the second driver are audio signals with the same signal source but different phases, for example, a phase difference of 180°. This solution can convert the inner area of ​​the diaphragm from an out-of-plane flip vibration mode to a piston translation vibration mode, further improving the overall effective displacement integral to increase the sound pressure level SPL output of the loudspeaker.

[0013] There are many options for the type of driver of the above-mentioned loudspeaker, for example, it can be a piezoelectric driver, an electrostatic driver or an electromagnetic driver.

[0014] In one technical solution, the above-mentioned driver is a piezoelectric driver, which includes a first electrode, a piezoelectric layer and a second electrode stacked in sequence, and the piezoelectric layer includes at least one of lead zirconate titanate, lead magnesium niobate, aluminum nitride, scandium-doped aluminum nitride, barium calcium zirconate titanate and zinc oxide.

[0015] The separation area extends from the fixed end of the first support beam, and the extension length or position also has multiple options. For example, in a possible technical solution, the separation area extends from the support wall to the adjacent boundary of the first vibration zone and the second vibration zone. The distance between the first vibration zones of adjacent first cantilever beams is relatively far.

[0016] In another possible technical solution, the separation area extends from the supporting wall to the second vibration area, so that the distance between the first vibration area and part of the second vibration area of ​​adjacent first cantilever beams is relatively far, and the separation area is separated by a relatively far distance, so that the mechanical coupling between adjacent first cantilever beams is relatively small.

[0017] In one technical solution, the above-mentioned speaker further includes a flexible membrane. The free ends of the plurality of first cantilever beams are surrounded by a hollow structure, the flexible membrane is connected to the free end of each first cantilever beam, and the flexible membrane at least covers the hollow structure. The flexible membrane has good flexibility, has less restriction on the vibration of the first cantilever beam, and is also conducive to improving the effective displacement of the first cantilever beam during the vibration process, thereby improving the sound quality of the speaker. In addition, the flexible membrane and the first cantilever beam together serve as a diaphragm of the speaker, which is conducive to improving the sound quality and sound pressure level of the speaker.

[0018] In a further technical solution, the flexible membrane can also cover the separation area. The distance between adjacent first cantilever beams in the separation area is large, and the same strain can provide a larger absolute elongation for the flexible membrane, so that the flexible membrane can play a better role, so that the adjacent first cantilever beams have less mutual constraints during the vibration process, which is conducive to improving the effective displacement of the first cantilever beam during the vibration process.

[0019] In a specific implementation, the flexible film can cover the entire cavity of the supporting wall, thereby facilitating simplification of the preparation process of the flexible film.

[0020] In an optional technical solution, the material of the flexible film may have multiple options. For example, the flexible film includes at least one of polyparaxylene, polyimide, polydimethylsiloxane and polypropylene.

[0021] There are many options for the shape of the cavity enclosed by the above-mentioned supporting wall. In a possible technical solution, the above-mentioned supporting wall includes a plurality of sub-walls, and the plurality of sub-walls are sequentially connected to form a polygonal cylindrical cavity, and a first cantilever beam is fixedly connected to a sub-wall. For example, the cavity of the supporting wall can be a square cylinder, a regular pentagonal cylinder, a regular hexagonal cylinder, or an irregular polygonal cylinder, etc. A first cantilever beam is fixedly connected to a sub-wall, and the first cantilever beam is not located at the connection between two adjacent sub-walls, or in other words, the first cantilever beam is not located at the turning point of the supporting wall. In this solution, the connection portion between the first cantilever beam and the supporting wall is a linear connection portion, which is conducive to reducing the constraint on the first cantilever beam and increasing the swing amplitude of the first cantilever beam.

[0022] In a second aspect, the present application further provides an electronic device, which includes a circuit board assembly and the speaker provided in the first aspect, wherein the circuit board assembly is connected to a driver of the speaker, and the circuit board assembly is used to provide a driving signal to the driver of the speaker to drive the speaker to produce sound. This solution can improve the effective displacement of the first cantilever beam of the speaker during vibration, improve the sound pressure level of the high-frequency audio and low-frequency audio of the speaker, and improve the sound quality of the speaker. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic diagram of the structure of an electronic device in an embodiment of the present application;

[0024] Figure 2 A schematic diagram of a partial top view of the structure of the speaker in the embodiment of the present application;

[0025] Figure 3 A cross-sectional view of a loudspeaker in an embodiment of the present application;

[0026] Figure 4 Another cross-sectional view of the speaker in the embodiment of the present application;

[0027] Figure 5 is another cross-sectional view of the loudspeaker in the embodiment of the present application;

[0028] Figure 6 A schematic diagram of a partial structure of an electronic device in an embodiment of the present application;

[0029] Figure 7 A schematic diagram of a partial top view of the structure of the speaker in the embodiment of the present application;

[0030] Figure 8 A schematic diagram of a partial top view of the structure of the speaker in the embodiment of the present application;

[0031] Fig. 9 A schematic diagram of a partial top view of the structure of the speaker in the embodiment of the present application;

[0032] Fig.10 A schematic diagram of a partial top view of the structure of the speaker in the embodiment of the present application;

[0033] Fig.11 A schematic diagram of a partial top view of the structure of the speaker in the embodiment of the present application;

[0034] Fig.12 A schematic diagram of a partial top view of the structure of the speaker in the embodiment of the present application;

[0035] Fig.13 A schematic diagram of a partial top view of the structure of the speaker in the embodiment of the present application;

[0036] Fig.14 A schematic diagram of a partial top view of the structure of the speaker in the embodiment of the present application;

[0037] Fig.15 A schematic diagram of a partial top view of the structure of the speaker in the embodiment of the present application;

[0038] Figure 16a to Figure 16h This is a process flow chart for preparing a loudspeaker in an embodiment of the present application.

[0039] Reference numerals:

[0040] 00-circuit board assembly; 01-speaker;

[0041] 1-supporting wall; 11-cavity;

[0042] 2-driver; 21-first driver;

[0043] 22-second driver; 23-third driver;

[0044] 24-first electrode; 25-piezoelectric layer;

[0045] 26-second electrode; 3-first cantilever beam;

[0046] 31-fixed end; 32-free end;

[0047] 33-first vibration zone; 34-second vibration zone;

[0048] 35-third vibration zone; 4-separation zone;

[0049] 5-second cantilever beam; 6-soldering pad;

[0050] 7-flexible film; Z-first direction;

[0051] 100-bulk silicon layer; 200-buried oxide layer;

[0052] 300-top silicon; 400-first electrode layer;

[0053] 500 - piezoelectric material layer; 600 - second electrode layer. DETAILED DESCRIPTION

[0054] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings.

[0055] The terms used in the following embodiments are only for the purpose of describing specific embodiments and are not intended to be limiting of the present application. As used in the specification and appended claims of the present application, the singular expressions "a", "an", "above", "the" and "this" are intended to also include expressions such as "one or more", unless there is a clear contrary indication in the context.

[0056] References to "one embodiment" or "a specific embodiment" described in this specification mean that one or more embodiments of the present application include a particular feature, structure or characteristic described in conjunction with the embodiment. The terms "include", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized.

[0057] In order to facilitate understanding of the loudspeaker and electronic device provided in the embodiments of the present application, the application scenarios thereof are first introduced below. At present, many electronic devices have functions such as call function, video playback function and audio playback function, and these functions require the electronic device to include a loudspeaker. With the development of technology, electronic devices are gradually becoming miniaturized, such as mobile terminals. Therefore, loudspeakers are also gradually developing in the direction of miniaturization.

[0058] Traditional micro speakers can be divided into dynamic speakers and balanced armature speakers according to their technical types. They both use electromagnetic force to drive the vibration structure to stimulate sound. The difference is that the coil in the dynamic speaker drives the cone paper cone with an elastic support structure to vibrate and produce sound. Its mechanical quality factor (Q value) is very low, and it has good mid- and low-frequency characteristics; while the balanced armature speaker uses a thin armature spring to vibrate and produce sound under the magnetic force of the coil, and has good mid- and high-frequency characteristics. However, whether it is a dynamic speaker or a balanced armature speaker, these traditional speakers require precision processing and assembly, and the size is difficult to further miniaturize. In addition, when working, they will be disturbed by external magnetic fields and affect their performance.

[0059] Compared with the above-mentioned traditional micro speakers, MEMS speakers have many advantages such as low power consumption, low cost, small size and high consistency, and are the development direction of the next generation of micro speakers. However, MEMS speakers are difficult to balance the sound pressure levels of high-frequency audio and low-frequency audio, and it is difficult to improve the sound quality of the speakers.

[0060] To this end, the present application provides a speaker and an electronic device, and the specific type of the electronic device is not limited, and any electronic device that needs to play sound can apply the technical solution provided by the present invention. For example, the electronic device can be a mobile phone, a laptop computer, a speaker, or a robot. Figure 1 is a schematic diagram of a structure of an electronic device in an embodiment of the present application, such as Figure 1As shown, taking the electronic device as a mobile phone as an example, the electronic device in the embodiment of the present application includes a circuit board assembly 00 and a speaker 01, and the circuit board assembly 00 and the driver of the speaker 01 are connected. The circuit board assembly 00 controls the movement of the driver according to the audio signal to be transmitted, and the driver drives the speaker 01 to vibrate and sound, so that the speaker 01 plays the sound.

[0061] The above-mentioned circuit board assembly 00 includes a driving circuit, and the specific form of the driving circuit can have multiple options. For example, the driving circuit can be a circuit board level circuit directly formed on the circuit board; or, the driving circuit can also be an integrated circuit (application specific integrated circuit, ASIC) chip for special applications. The above-mentioned driving circuit can include circuit structures such as a power amplifier circuit and an inverter circuit. For some specific drivers, such as lead zirconate titanate (Pb-Zr-Ti, PZT) piezoelectric drivers, the driving circuit needs to provide a bias voltage, or it can also provide a DC bias function.

[0062] Figure 2 This is a partial top view of the structure of the speaker in the embodiment of the present application. Figure 3 This is a cross-sectional view of a speaker in an embodiment of the present application. Specifically, Figure 3 for Figure 2 The cross-sectional structure diagram of AA is shown in FIG. Figure 2 and Figure 3As shown, in the embodiment of the present application, the speaker 01 includes a supporting wall 1, a driver 2 and a plurality of first cantilever beams 3. The supporting wall 1 is surrounded along the circumferential direction to form a cylindrical cavity 11. Specifically, the cylindrical cavity 11 extends along the first direction Z, and the supporting wall 1 is surrounded along the circumferential side of the first direction Z to form the above-mentioned cavity 11. Each first cantilever beam 3 is fixedly connected to one end of the above-mentioned supporting wall 1 along the first direction Z, and the plurality of first cantilever beams 3 are arranged in sequence along the circumferential direction of the above-mentioned supporting wall 1, so that the above-mentioned cavity 11 is located on the back side of the plurality of first cantilever beams 3. The above-mentioned first cantilever beam 3 specifically includes a fixed end 31 and a free end 32, wherein the fixed end 31 is fixedly connected to the supporting wall 1, and the free end 32 is in a free state, so that the free end 32 of the first cantilever beam 3 can swing. In order to realize the swing of the free end 32 of the above-mentioned first cantilever beam 3, the speaker 01 also includes a driver 2, which is installed on the first cantilever beam 3, and the driver 2 is used to drive the first cantilever beam 3 to swing according to the audio signal. There is a separation area 4 between any two adjacent first cantilever beams 3, and the two adjacent first cantilever beams 3 have a preset distance in the separation area 4. The distance between the two adjacent first cantilever beams 3 in the separation area 4 is relatively far, which can achieve mechanical decoupling of the two adjacent first cantilever beams 3, so that the mutual influence between the two adjacent first cantilever beams 3 is small, and the problem of acoustic short circuit is not easy to occur. In addition, the separation area 4 is formed by the edges of the two adjacent first cantilever beams 3 and the edges of the supporting wall 1, then the separation area 4 is located at the root of the first cantilever beam 3, or the separation area 4 is located on the side of the first cantilever beam 3 close to the fixed end 31, and the root of the first cantilever beam 3 is the part of the first cantilever beam 3 close to the fixed end 31. The root of the first cantilever beam 3 has a small vibration amplitude when vibrating. Even if the separation area 4 is not set, the root of the first cantilever beam 3 corresponding to the above-mentioned separation area 4 participates in the vibration with a small amplitude. Therefore, setting the separation area 4 at the root of the first cantilever beam 3 has a small effect on the vibration of the first cantilever beam 3 of the speaker 01, which is beneficial to improving the effective displacement of the first cantilever beam 3 during the vibration process, improving the sound pressure level of the high-frequency audio and low-frequency audio of the speaker 01, and improving the sound quality of the speaker 01.

[0063] In a specific technical solution, Figure 3 As shown, the surface of the support wall 1 facing the cavity 11 is parallel to the first direction Z, so that the inner cavity is a uniform structure along the first direction Z. Specifically, in this embodiment, the cross section of the cavity 11 at any position along the direction perpendicular to the first direction Z remains unchanged. Or, Figure 4 Another cross-sectional view of the speaker in the embodiment of the present application is shown in FIG. Figure 4 As shown, in a specific technical solution, the surface of the supporting wall 1 facing the cavity 11 intersects with the first direction Z, and the cross section of the cavity 11 perpendicular to the first direction Z gradually increases in the direction toward the first cantilever beam 3. Or, Figure 5 FIG. 2 is another cross-sectional view of the loudspeaker in the embodiment of the present application. Figure 5 As shown, in a specific technical solution, the surface of the supporting wall 1 facing the cavity 11 intersects with the first direction Z, and the cross section of the cavity 11 perpendicular to the first direction Z gradually becomes smaller in the direction toward the first cantilever beam 3.

[0064] Please continue to refer to Figure 2 In one embodiment, each first cantilever beam 3 of the loudspeaker 01 includes a first vibration zone 33 and a second vibration zone 34 arranged away from the fixed end 31, and the first vibration zone 33 and the second vibration zone 34 respectively refer to different areas of the first cantilever beam 3. The driver 2 of the loudspeaker 01 includes a first driver 21 and a second driver 22, the first driver 21 is arranged in the first vibration zone 33 of the first cantilever beam 3, and the first driver 21 is used to drive the first vibration zone 33 to vibrate; the second driver 22 is arranged in the second vibration zone 34 of the first cantilever beam 3, and the second driver 22 is used to drive the second vibration zone 34 to vibrate.

[0065] The type of the driver of the speaker provided in the embodiment of the present application can have a variety of options, such as a piezoelectric driver, an electrostatic driver, or an electromagnetic driver. For example, please continue to refer to Figure 3 The driver may be a piezoelectric driver, which includes a first electrode 24, a piezoelectric layer 25, and a second electrode 26 stacked in sequence, wherein the first electrode 24 and the second electrode 26 are at both ends of the piezoelectric layer 25 so that the piezoelectric layer is connected to the circuit. When the driver includes a first driver 21 and a second driver 22, the piezoelectric layer 25 of the first driver 21 and the piezoelectric layer 25 of the second driver 22 may be an integrated structure, and the second electrode 26 of the first driver 21 and the second electrode 26 of the second driver 22 may also be an integrated structure, and only the first electrode 24 of the first driver 21 and the first electrode 24 of the second driver 22 are disconnected to form two drivers that can be driven separately.

[0066] In a specific embodiment, the material of the piezoelectric layer 25 has multiple options. For example, the piezoelectric layer includes at least one of lead zirconate titanate PZT, lead magnesium niobate PNZT, aluminum nitride AlN, scandium-doped aluminum nitride AlScN, barium calcium zirconate titanate BCZT and zinc oxide ZnO.

[0067] Figure 6 This is a partial structural diagram of an electronic device in an embodiment of the present application. Figure 2 and Figure 6In actual application, the audio signal source is transmitted to the circuit board assembly 00, and the circuit board assembly 00 includes devices such as a power amplifier and an inverter, and pre-processes the audio signal source to generate a first drive signal and a second drive signal. The above-mentioned circuit board assembly 00 is electrically connected to the speaker 01, so that the first drive signal and the second drive signal are transmitted to the speaker 01, and the above-mentioned first driver 21 is used to drive the first vibration area 33 of the first cantilever beam 3 to vibrate according to the first drive signal, and the second driver 22 is used to drive the second vibration area 34 of the first cantilever beam 3 to vibrate according to the second drive signal. The first drive signal and the second drive signal can be audio signals with the same signal source but different phases. For example, the phase of the first drive signal and the phase of the second drive signal differ by 180°. After the anti-phase drive, the deformation direction of the first vibration zone 33 and the deformation direction of the second vibration zone 34 are opposite. For example, starting from the fixed end 31, it first bends upward (the first vibration zone 33) and then flips downward (the second vibration zone 34). The first cantilever beam 3 is an S-shaped as a whole, so that the second vibration zone 34 near the free end is lifted upward approximately horizontally, that is, the piston translation vibration mode. Therefore, this scheme can make the inner area of ​​the diaphragm change from the vibration mode of the out-of-plane flip to the piston translation vibration mode, further improve the overall effective displacement integral, so as to increase the sound pressure level SPL output of the speaker 01.

[0068] Alternatively, in other application scenarios, the first drive signal and the second drive signal may be specifically audio signals with the same signal source and the same phase. The corresponding first drive signal and the second drive signal may be output according to actual needs. The speaker 01 in the embodiment of the present application has many application scenarios.

[0069] When forming the above-mentioned first cantilever beam 3, the above-mentioned first vibration zone 33 and the second vibration zone 34 can be an integral structure, or the first vibration zone 33 and the second vibration zone 34 can also be separate structures, which are fixedly connected to form the first cantilever beam 3; the material of the first vibration zone 33 and the second vibration zone 34 can be the same, or, according to different actual sound requirements, the material of the first vibration zone 33 and the second vibration zone 34 can be different.

[0070] Figure 7 FIG. 1 is a partial top view of the structure of the speaker in the embodiment of the present application. Figure 7 As shown, in a further embodiment, the first cantilever beam 3 includes a plurality of vibration zones arranged away from the fixed end 31, and the specific number can be designed according to the requirements. Figure 7In the illustrated embodiment, the first cantilever beam 3 includes a first vibration zone 33, a second vibration zone 34 and a third vibration zone 35 arranged away from the fixed end 31. The driver 2 includes a first driver 21, a second driver 22 and a third driver 23. The first driver 21 is arranged in the first vibration zone 33, and the first driver 21 is used to drive the first vibration zone 33 to vibrate; the second driver 22 is arranged in the second vibration zone 34, and the second driver 22 is used to drive the second vibration zone 34 to vibrate; the third driver 23 is arranged in the third vibration zone 35, and the third driver 23 is used to drive the third vibration zone 35 to vibrate. The first driver 21 is used to drive the first vibration zone 33 to vibrate according to the first drive signal, the second driver 22 is used to drive the second vibration zone 34 to vibrate according to the second drive signal, and the third driver 23 is used to drive the third vibration zone 35 to vibrate according to the third drive signal. The first drive signal, the second drive signal and the third drive signal can be audio signals with the same signal source but different phases. For example, the phase of the first drive signal, the phase of the second drive signal and the phase of the third drive signal are all different, and the phases increase or decrease successively; or, the phase of the first drive signal and the phase of the second drive signal differ by 180°, and the phase of the second drive signal and the phase of the third drive signal differ by 180°. With this solution, the drive signal input to the speaker 01 can have more abundant matching options.

[0071] When the partition area 4 is specifically formed, the partition area 4 is adjacent to the support wall 1 and extends from the support wall 1 toward the central area. In different embodiments, there are many options for the position where the partition area 4 extends from the support wall 1 toward the central area. Figure 2 As shown, in one embodiment, the separation area 4 extends from the supporting wall 1 to the second vibration area 34. The distance between the first vibration area 33 and part of the second vibration area 34 of the adjacent first cantilever beams 3 is relatively far, and the separation distance of the separation area 4 is relatively far, so that the mechanical coupling between the adjacent first cantilever beams 3 is less.

[0072] Figure 8 FIG. 1 is a partial top view of the structure of the speaker in the embodiment of the present application. Figure 8 As shown, in another embodiment, the separation area 4 extends from the supporting wall 1 to the adjacent boundary of the first vibration area 33 and the second vibration area 34. In this embodiment, the distance between the first vibration areas 33 of adjacent first cantilever beams 3 is relatively far.

[0073] like Figure 2As shown, in a specific embodiment, the speaker 01 further includes a flexible membrane 7. The free ends 32 of the plurality of first cantilever beams 3 form a hollow structure, the flexible membrane 7 is connected to the free ends 32 of each first cantilever beam 3, and the flexible membrane 7 at least covers the hollow structure. The flexible membrane 7 has good flexibility, has less restriction on the vibration of the first cantilever beam 3, and is also beneficial to improving the effective displacement of the first cantilever beam 3 during the vibration process, thereby improving the sound quality of the speaker 01. In addition, the flexible membrane 7 and the first cantilever beam 3 together serve as the diaphragm of the speaker 01, which is beneficial to improving the sound quality and sound pressure level of the speaker 01.

[0074] Please continue to refer to Figure 7 In a further embodiment, the flexible membrane 7 also covers the separation area 4. The distance between adjacent first cantilever beams 3 in the separation area 4 is large, and a larger absolute elongation can be provided to the flexible membrane 7 under the same strain amount, so that the flexible membrane 7 can play a better role, so that the adjacent first cantilever beams 3 have less mutual constraints during the vibration process, which is conducive to improving the effective displacement of the first cantilever beam 3 during the vibration process.

[0075] When the flexible film 7 is specifically arranged, the flexible film 7 can cover the entire cavity 11 of the supporting wall 1 , thereby facilitating the simplification of the preparation process of the flexible film 7 .

[0076] The Young's modulus of the flexible membrane 7 is lower than that of the first cantilever beam 3. Specifically, the Young's modulus of the flexible membrane 7 may be 0.1 MPa to 10 GPa. In an optional embodiment, the material of the flexible membrane 7 may include at least one of organic polymer materials such as parylene, polypropylene (PP), polydimethylsiloxane (PDMS) and polyimide (PI). There are many options for forming the flexible membrane 7, such as spin coating curing, chemical vapor deposition and direct lamination of the finished film.

[0077] Please continue to refer to Figure 8In another embodiment, a second cantilever beam 5 may be arranged in the separation area 4, and at least part of the structure of the second cantilever beam 5 and the first cantilever beam 3 are located in the same plane, or in other words, the side of the second cantilever beam 5 facing the first cantilever beam 3 is at least partially opposite to the side of the first cantilever beam 3 facing the second cantilever beam 5. In a possible embodiment, the first cantilever beam 3 includes a first surface and a second surface arranged opposite to each other, wherein the first surface faces the direction of the cavity 11, and the second surface faces away from the direction of the cavity 11. The second cantilever beam 5 includes a third surface and a fourth surface arranged opposite to each other, wherein the third surface faces the direction of the cavity 11, and the fourth surface faces away from the direction of the cavity 11. In a possible implementation, the first surface and the third plane may be located in the same plane; in another possible implementation, the second surface and the fourth surface are located in the same plane; in another possible implementation, the first surface and the third plane are located in the same plane, and the second surface and the fourth surface are located in the same plane. A first gap is provided between the first cantilever beam 3 and the second cantilever beam 5, and the width of the first gap is less than the first preset value. In this solution, the side surfaces of the first cantilever beam 3 and the second cantilever beam 5 are opposite, and the first gap is small, so the problem of acoustic short circuit is not easy to occur. In the prior art, when two adjacent cantilever beams vibrate at the same time, the gap between the cantilever beams increases to a large extent, and acoustic short circuit is easy to occur. In this embodiment, during the vibration of the first cantilever beam 3, the second cantilever beam 5 remains stationary. The first gap between the first cantilever beam 3 and the second cantilever beam 5 increases to a small extent with the vibration of the first cantilever beam 3, and acoustic short circuit is not easy to occur.

[0078] In a specific embodiment, the first preset value may be 30 um to 50 um, and the width of the first gap may be less than or equal to 50 um. Furthermore, the width of the first gap may be less than or equal to 30 um.

[0079] When the speaker 01 includes the second cantilever beam 5, the flexible membrane 7 can also cover the first gap between the first cantilever beam 3 and the second cantilever beam 5, thereby reducing the acoustic short circuit of the speaker 01. Specifically, the flexible membrane 7 can cover the entire cavity 11 of the supporting wall 1. In this solution, although the flexible membrane 7 connects the first cantilever beam 3 and the second cantilever beam 5, the second cantilever beam 5 does not vibrate with the vibration of the first cantilever beam 3, so the vibration of the second cantilever beam 5 is less constrained, so that the first cantilever beam 3 still has a large displacement.

[0080] Fig. 9 FIG. 1 is a partial top view of the structure of the speaker in the embodiment of the present application. Fig. 9As shown, in order to transmit the audio signal to the speaker 01, the speaker 01 also includes a pad 6, which is connected to an external electronic device by the pad 6, so as to transmit the audio signal to the speaker 01. The pad 6 is connected to the driver 2, so that the driver 2 drives the first cantilever beam 3 to vibrate according to the audio signal, and drives the speaker 01 to make a sound. The pad 6 is arranged on the second cantilever beam 5. In this embodiment, the pad 6 does not need to be arranged on the supporting wall 1, and the supporting wall 1 does not need to be made wider to accommodate the pad 6, so that the supporting wall 1 can be narrower, which is conducive to reducing the volume of the speaker 01.

[0081] Please continue to refer to Figure 8 and Fig. 9 In one embodiment, there is a second gap between any two adjacent first cantilever beams 3, the second gap is connected to the separation area 4, and the width of the second gap is less than the first preset value. The second gap is located on the side of the first cantilever beam 3 close to the free end 32, and the separation area 4 is located on the side of the first cantilever beam 3 close to the fixed end 31, so that the adjacent first cantilever beams 3 are separated by the second gap and the separation area 4.

[0082] In a specific embodiment, the first preset value may be 30 um to 50 um, and the width of the second gap may be less than or equal to 50 um. Furthermore, the width of the second gap may be less than or equal to 30 um.

[0083] The specific shape of the partition area 4 is not limited, and the partition area 4 is formed by the edges of the adjacent first cantilever beams 3 and the edges of the supporting wall 1. Figure 8 and Fig. 9 In the embodiment shown, the edge of the first cantilever beam 3 facing the separation area 4 is a straight edge, and the angle between the straight edges of two adjacent first cantilever beams 3 is greater than 0°. Figure 8 and Fig. 9 As shown, in a possible embodiment, the above-mentioned angle is an acute angle. Fig.10 and Fig.11 Two other partial top view structural diagrams of the loudspeaker in the embodiments of the present application are shown in FIG. Fig.10 As shown, in another possible embodiment, the angle between the straight edges of the two adjacent first cantilever beams 3 can also be a right angle; Fig.11 As shown, in another possible embodiment, the angle between the straight edges of the two adjacent first cantilever beams 3 may also be an obtuse angle.

[0084] In another embodiment, the edge of the first cantilever beam 3 facing the separation area 4 may also be a fold line edge, and the fold line edge may be bent once, twice or multiple times.

[0085] Fig.12FIG. 1 is another partial top view of the structure of the speaker in the embodiment of the present application. Fig.12 As shown, the edge of the first cantilever beam 3 toward the separation area 4 can also be a curved edge. The transition of the curved edge is relatively gentle, which is conducive to stress release and is not prone to stress concentration, which is conducive to improving the reliability of the first cantilever beam 3.

[0086] There are many possibilities for the shape of the cavity 11 of the loudspeaker 01 improved in the present application. Specifically, the supporting wall 1 includes a plurality of sub-walls, and the plurality of sub-walls are connected in sequence to form a cylindrical cavity 11, and the plurality of sub-walls may be an integral structure. Specifically, the plurality of sub-walls are connected in sequence to form a polygonal cylindrical cavity 11, and each sub-wall forms one side of the polygonal cylindrical cavity 11. A first cantilever beam 3 is fixedly connected to a sub-wall, and the first cantilever beam 3 is not located at the connection between two adjacent sub-walls, or in other words, the first cantilever beam 3 is not located at the turning point of the supporting wall 1. In this solution, the connection portion between the first cantilever beam 3 and the supporting wall 1 is a linear connection portion, which is conducive to reducing the constraint on the first cantilever beam 3 and increasing the swing amplitude of the first cantilever beam 3. Figure 6 to Figure 12 In the illustrated embodiment, the supporting wall 1 includes four sub-walls, which enclose a square cylindrical cavity 11, and each sub-wall forms one side of the square cylindrical cavity 11. The loudspeaker 01 includes four first cantilever beams 3, each of which is fixed to a sub-wall, and the four first cantilever beams 3 are evenly arranged along the circumference of the cylindrical cavity 11 in the positive direction to improve the sound quality of the loudspeaker 01.

[0087] Fig.13 FIG. 1 is another partial top view of the structure of the speaker in the embodiment of the present application. Fig.13 As shown, in another embodiment, the supporting wall 1 includes five sub-walls, and the five sub-walls enclose a pentagonal cylindrical cavity 11, which can be a regular pentagonal cylindrical cavity 11. The loudspeaker 01 includes five first cantilever beams 3, each of which is fixed to a sub-wall, and the five first cantilever beams 3 are evenly arranged along the circumference of the positive cylindrical cavity 11 to improve the sound quality of the loudspeaker 01. Fig.14 FIG. 1 is another partial top view of the structure of the speaker in the embodiment of the present application. Fig.14 As shown, in another embodiment, the supporting wall 1 includes six sub-walls, and the six sub-walls enclose a hexagonal cylindrical cavity 11, which can be a regular hexagonal cylindrical cavity 11. The loudspeaker 01 includes six first cantilever beams 3, each of which is fixed to a sub-wall, and the six first cantilever beams 3 are evenly arranged along the circumference of the square cylindrical cavity 11 to improve the sound quality of the loudspeaker 01.

[0088] or, Fig.15 FIG. 1 is another partial top view of the structure of the speaker in the embodiment of the present application. Fig.15As shown, in another embodiment, the above-mentioned supporting wall 1 can also enclose a cylindrical cavity 11, and the number of first cantilever beams 3 included in the speaker 01 is not limited. Multiple first cantilever beams 3 are evenly arranged along the circumference of the cylindrical cavity 11 to improve the sound quality of the speaker 01.

[0089] The outer peripheral shape of the supporting wall 1 may be consistent with or inconsistent with the shape of the cylindrical cavity 11. In order to reduce the volume of the loudspeaker 01, the outer peripheral shape of the supporting wall 1 may be consistent with the shape of the cylindrical cavity 11. The specific shape may be designed according to actual needs. For example, if the outer peripheral shape of the supporting wall 1 and the shape of the cylindrical cavity 11 are both hexagonal, the loudspeaker 01 may form a honeycomb dense structure, which is beneficial to improving the utilization rate of the installation area.

[0090] Figure 16a to Figure 16h FIG. 1 is a flow chart of a manufacturing process of a speaker in an embodiment of the present application. The following is an example of a manufacturing process of a speaker in conjunction with the accompanying drawings. Fig.16a As shown, a SOI wafer is used to prepare a speaker. The SOI wafer includes a bulk silicon layer 100, a buried oxide layer 200 and a top silicon layer 300. The bulk silicon layer 100 of the SOI wafer provides a substrate for forming a support wall 1 and a cavity 11, the top silicon layer 300 is used to prepare the first cantilever beam 3 of the speaker, and the buried oxide layer 200 between the bulk silicon layer 100 and the top silicon layer 300 acts as an electrical isolation layer. Fig.16b As shown, a driver 2 is prepared on the surface of the SOI wafer. The driver 2 may be a piezoelectric driver, which is a piezoelectric film. The piezoelectric film includes a first electrode layer 400, a piezoelectric material layer 500, and a second electrode layer 600 stacked in sequence. Fig.16c As shown, the first electrode layer 400 of the piezoelectric film is etched to form a plurality of first electrodes 24, so that different first electrodes 24 cover different vibration areas respectively. Fig.16d As shown, the piezoelectric material layer 500 of the piezoelectric film is etched to form a plurality of piezoelectric layers 25, so that different piezoelectric layers 25 cover different first cantilever beams 3. Fig.16e As shown, the second electrode layer 600 of the piezoelectric film is etched to form a plurality of second electrodes, so that different second electrodes cover different first cantilever beams; and the top silicon layer 300 of the SOI wafer is etched to form different first cantilever beams. Fig.16f As shown, a flexible film 7 is formed, and the flexible film can be formed by a deposition process or a spin coating process. Specifically, the flexible film 7 covers the entire surface of the speaker. Figure 16g As shown, the bulk silicon layer 100 is etched to form the support wall 1 and the cavity 11 of the speaker. Figure 16h As shown, the buried oxide layer 200 in the cavity 11 is removed. Specifically, the buried oxide layer 200 can be removed by etching or chemical corrosion to form the speaker in the embodiment of the present application.

[0091] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A loudspeaker, characterized in that: include: The supporting wall surrounds the cylindrical cavity in the circumferential direction; A plurality of first cantilever beams are sequentially arranged along the circumference of the support wall; each of the first cantilever beams comprises a fixed end and a free end, the fixed end being fixedly connected to one end of the support wall; a separation area is provided between any two adjacent first cantilever beams, the two first cantilever beams have a preset distance in the separation area, and the separation area is surrounded by the edges of the two adjacent first cantilever beams and the edge of the support wall; A driver is located on the first cantilever beam, and is used to drive the first cantilever beam to swing.

2. The loudspeaker according to claim 1, characterized in that The separation area includes a second cantilever beam, a first gap is defined between the second cantilever beam and the first cantilever beam, and a width of the first gap is smaller than a first preset value.

3. The loudspeaker according to claim 2, characterized in that The speaker further includes a soldering pad, which is connected to the driver and is disposed on the second cantilever beam.

4. The loudspeaker according to any one of claims 1 to 3, characterized in that: A second gap is further provided between any two adjacent first cantilever beams, the second gap is connected to the separation area, and the width of the second gap is smaller than a first preset value.

5. The loudspeaker according to any one of claims 1 to 4, characterized in that: The edge of the first cantilever beam facing the separation area is a curved edge.

6. The loudspeaker according to any one of claims 1 to 5, characterized in that: The edge of the first cantilever beam facing the separation area is a straight edge, and the angle between the straight edges of two adjacent first cantilever beams is greater than 0°.

7. The loudspeaker according to any one of claims 1 to 6, characterized in that: Each of the first cantilever beams includes a first vibration zone and a second vibration zone arranged away from the fixed end; the driver includes a first driver and a second driver, the first driver is arranged in the first vibration zone, and the second driver is arranged in the second vibration zone.

8. The loudspeaker according to claim 7, characterized in that The separation area extends from the supporting wall to a boundary where the first vibration zone and the second vibration zone are adjacent to each other.

9. The loudspeaker according to claim 8, characterized in that The separation area extends from the support wall to the second vibration zone.

10. The loudspeaker according to any one of claims 1 to 9, characterized in that: The loudspeaker further includes a flexible membrane, the free ends of the plurality of first cantilever beams form a hollow structure, and the flexible membrane is connected to the free end of each of the first cantilever beams to at least cover the hollow structure.

11. The loudspeaker according to claim 10, characterized in that The flexible film also covers the separation area.

12. The loudspeaker according to claim 11, characterized in that The flexible membrane covers the entire cavity of the supporting wall.

13. The loudspeaker according to any one of claims 10 to 12, characterized in that: The flexible film includes at least one of parylene, polyimide, polydimethylsiloxane, and polypropylene.

14. The loudspeaker according to any one of claims 1 to 13, characterized in that: The supporting wall comprises a plurality of sub-walls, and the plurality of sub-walls are sequentially connected to form a polygonal cylindrical cavity, and one of the first cantilever beams is fixedly connected to one of the sub-walls.

15. The loudspeaker according to any one of claims 1 to 14, characterized in that: The driver is a piezoelectric driver, which includes a first electrode, a piezoelectric layer and a second electrode stacked in sequence, and the piezoelectric layer includes at least one of lead zirconate titanate, lead magnesium niobate, aluminum nitride, scandium-doped aluminum nitride, barium calcium zirconate titanate and zinc oxide.

16. An electronic device, characterized in that: It comprises a circuit board assembly and a loudspeaker as claimed in any one of claims 1 to 15, wherein the circuit board assembly is connected to the driver of the loudspeaker.

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