A semiconductor thin-wall stainless steel cavity welding process

Abstract

The present invention relates to the field of welding technology. The present invention discloses a semiconductor thin-walled stainless steel cavity welding process, comprising the following steps: Step 1, product preparation, unfolding and sizing, reserving welding shrinkage, and sizing the side panels, bottom panel, and upper flange parts of the cavity; Step 2, performing tailored spot welding on the side panels and bottom panel, the bottom panel and the upper flange, the cooling water channel and the side panels to obtain a blank; Step 3, providing rigid support for the blank obtained in Step 2; Step 4, setting welding parameters, and welding the side panels, bottom panel, upper flange, and cooling water channel obtained in Step 3 to obtain a cavity; Step 5, performing tempering heat treatment on the cavity in Step 4. The welding process of the present invention reduces the influence of welding shrinkage deformation, improves welding quality, adds rigid support before welding, increases strength, and reduces welding deformation, and performs tempering heat treatment after welding to eliminate residual stress in the cavity weld and improve the processing accuracy of the product after welding.

Description

Technical Field

[0001] The invention relates to the field of welding, and in particular to a semiconductor thin-wall stainless steel cavity welding process. Background Art

[0002] With the rapid development of the domestic semiconductor industry, semiconductor equipment is constantly being upgraded. As a core component of semiconductors, vacuum chambers have complex structures and manufacturing processes. This is especially true for thin-walled stainless steel welded chambers, where welding cooling channels is particularly critical. Therefore, a new technical solution is urgently needed to address at least one of the above technical issues. Summary of the Invention

[0003] The purpose of the present invention is to provide a semiconductor thin-walled stainless steel cavity welding process, in which product preparation reserves welding shrinkage, reduces the influence of welding shrinkage deformation, improves welding quality, increases rigid support before welding, increases strength, reduces welding deformation of side plates, bottom plates, flanges, and cooling water channels, and adopts tempering heat treatment after welding to eliminate residual stress in the cavity weld and improve the processing accuracy of the product after welding.

[0004] In order to achieve the above technical objectives and meet the above technical requirements, the technical solution adopted by the present invention is: a semiconductor thin-walled stainless steel cavity welding process, characterized by comprising the following steps:

[0005] Step 1: Prepare the product and expand the size. By calculating the deformation trend of the cavity after welding and reserving the welding shrinkage, the side panels, bottom panel, and upper flange parts of the cavity are expanded.

[0006] Step 2: perform tailor welding and spot welding on the side panels and the bottom panel, the bottom panel and the upper flange, and the cooling water channel and the side panels to obtain an embryonic body;

[0007] Step 3: providing rigid support to the embryo obtained in step 2;

[0008] Step 4: Set welding parameters and weld the side panels, bottom panel, upper flange, and cooling water channel obtained in step 3 to obtain the cavity;

[0009] Step 5: Perform tempering heat treatment on the cavity of step 4.

[0010] As a preferred technical solution, the welding shrinkage in step 1 includes the transverse shrinkage of the double-sided V-groove without gap and the transverse shrinkage of the double-sided fillet weld. The transverse shrinkage of the double-sided V-groove without gap is 0.5mm-0.7mm, and the transverse shrinkage of the double-sided fillet weld is 0.3mm-0.5mm.

[0011] As a preferred technical solution, in step 1, when the upper flange is enlarged, the length, width and height are increased by 1.5mm on each side; when the bottom plate is enlarged, the length and width are increased by 1.5mm on each side; when the side plate is enlarged, the length direction is increased by 2-3.5mm, the width direction is increased by 2-3mm, and the height direction is increased by 2-2.5mm.

[0012] As a preferred technical solution, the spot welding length in step 2 is 15-20 mm and the spacing is 120-150 mm.

[0013] As a preferred technical solution, the rigid support adopts a support frame, which includes a plurality of support tubes.

[0014] As a preferred technical solution, the welding method of the square tube to the side plate and the bottom plate is symmetrical intermittent welding, with a weld length of 40 mm and a spacing of 100 mm.

[0015] As a preferred technical solution, the welds welded in step 4 include intermittent welds between the bottom plate and the outer side of the side plate, intermittent welds between the upper flange and the outer side of the side plate, butt welds of the cooling water channel, fillet welds between the cooling water channel and the side plate, welds between the bottom plate and the inner side of the side plate, and welds between the side plate and the inner side of the upper flange.

[0016] As a preferred technical solution, the welding parameters in step 4 are specifically as follows: the bottom welding current of the intermittent weld between the bottom plate and the outer side plate is 110-140A, the voltage is 9-15V, the welding speed is 8-12cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ1.6mm, the tungsten electrode type is WC-20, the size is φ2.4mm, and the bottom welding heat input is 0.53KJ / mm; the cover welding current of the intermittent weld between the bottom plate and the outer side plate is 110-140A, the voltage is 9-15V, the welding speed is 6.5-10.8cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0mm, the tungsten electrode type is WC-20, the size is φ2.4mm, and the cover welding heat input is 0.63 KJ / mm;

[0017] The welding current of the intermittent welds between the upper flange and the outer side of the side plate, the butt welds of the cooling water channel, the welds between the bottom plate and the inner side of the side plate, and the welds between the side plate and the inner side of the upper flange is 130-170A, the voltage is 10-15V, the welding speed is 8-12cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0mm, the tungsten electrode type is WC-20, the size is φ2.4mm, and the welding heat input is 0.66 KJ / mm;

[0018] The welding current of the cooling water channel butt weld and the cooling water channel and side plate fillet weld is 80-110V, the voltage is 9-13V, the welding speed is 6-9cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0mm, the tungsten electrode type is WC-20, the size is φ1.6mm, and the welding heat input is 0.50KJ / mm.

[0019] As a preferred technical solution, the welding sequence in step 4 is: intermittent welds between the bottom plate and the outside of the side plate, symmetrical welding of the intermittent welds between the upper flange and the outside of the side plate and the intermittent welds of the cooling water channel butt welds, welding of the cooling water channel fillet welds on the outside of the cavity side plate, and symmetrical welding of the four sides of the horizontal cooling water channel welds from the middle to both sides. The length of the single-sided welding weld is less than 200mm, and the symmetrical position is first front and back and then left and right. Then, the vertical cooling water channel is welded in the same order as above, and finally the butt welds of the cooling water channel and the welds of the transition R angle at the bend are welded.

[0020] As an optimal technical solution, the stainless steel cavity and support frame are stabilized and tempered together. The furnace heating rate is 100±2℃ / h, the parts heating temperature is 860±2℃, the holding time is 1.5-2.5 hours, and the cooling rate is furnace cooling. After the cavity and support frame are cooled to 300±2℃, they are aerated and cooled before the furnace is opened for cooling.

[0021] The beneficial effects of the present invention are:

[0022] 1) Reserve welding shrinkage in product preparation to reduce the impact of welding shrinkage deformation and improve welding quality. Add rigid support before welding to increase strength and reduce welding deformation of side panels, bottom panels, flanges, and cooling water channels. After welding, use tempering heat treatment to eliminate residual stress in the cavity weld and improve the processing accuracy of the product after welding.

[0023] 2) Strictly control welding shrinkage according to weld structure to improve welding quality;

[0024] 3) Optimize the welding sequence to prevent serious local deformation caused by incorrect welding sequence;

[0025] 4) Strictly control welding parameters to significantly reduce welding deformation and improve welding quality;

[0026] 5) Stabilization tempering heat treatment can release welding internal stress, reduce welding deformation, prevent cracking at the weld, and improve dimensional stability after welding. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a three-dimensional diagram of a cavity provided by one embodiment of the present invention;

[0028] Figure 2 yes Figure 1A view from another direction;

[0029] Figure 3 yes Figure 1 A view from another direction;

[0030] Figure 4 yes Figure 1 of views in one direction.

[0031] exist Figures 1-4 Among them, 1. first side panel; 2. second side panel; 3. bottom panel; 4. upper flange; 5. cooling water channel; 6. first support pipe; 7. second support pipe; 8. third support pipe; 9. fourth support pipe; 10. fifth support pipe; 11. sixth support pipe; 12. seventh support pipe; 13. eighth support pipe; 14. ninth support pipe; 15. tenth support pipe; 16. eleventh support pipe; 17. twelfth support pipe; 18. thirteenth support pipe; 19. reinforcing rib. DETAILED DESCRIPTION

[0032] The present invention will be further described below with reference to the accompanying drawings.

[0033] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "head", "tail", "top", "bottom", "left", "right", "front", "back", "inside", "outside" and the like appear to indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, they are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0034] See also Figures 1-4 One embodiment of the present invention provides a semiconductor thin-walled stainless steel cavity welding process, comprising the following steps:

[0035] Step 1: Prepare the product and expand the size. By calculating the deformation trend of the cavity after welding and reserving the welding shrinkage, the side panels, bottom panel 3, and upper flange 4 of the cavity are expanded.

[0036] Step 2: perform tailor-welding and spot welding on the side panels and the bottom panel 3, the bottom panel 3 and the upper flange 4, and the cooling water channel 5 and the side panels to obtain an embryonic body;

[0037] Step 3: providing rigid support to the embryo obtained in step 2;

[0038] Step 4: Set welding parameters and weld the side panels, bottom panel 3, upper flange 4 and cooling water channel 5 obtained in step 3 to obtain the cavity;

[0039] Step 5: Perform tempering heat treatment on the cavity of step 4.

[0040] The product preparation reserves welding shrinkage to reduce the impact of welding shrinkage deformation and improve welding quality. Rigid support is added before welding to increase strength and reduce welding deformation of the side panels, bottom plate 3, upper flange 4, and cooling water channel 5. After welding, tempering heat treatment is used to eliminate residual stress in the cavity weld and improve the processing accuracy of the product after welding.

[0041] like Figures 1-4 As shown, the welding shrinkage in step 1 includes the transverse shrinkage of the double-sided V-groove without gap and the transverse shrinkage of the double-sided fillet weld. The transverse shrinkage of the double-sided V-groove without gap is 0.5mm-0.7mm, and the transverse shrinkage of the double-sided fillet weld is 0.3mm-0.5mm. The product parts are processed in bulk and prepared. The deformation of the weldment during the welding process needs to be considered. The welding residual deformation includes longitudinal shrinkage deformation, transverse shrinkage deformation, angular deformation, bending deformation, twisting deformation and wave deformation, a total of six deformation modes, among which the longitudinal shrinkage deformation and transverse shrinkage deformation of the weld are the basic deformation forms. The shrinkage deformation of the butt weld is related to the groove form of the butt weld, butt gap, welding line energy, thickness of the steel plate and cross-sectional area of ​​the weld. The deformation size of other factors is proportional to the filler metal and heat input of the weld. The lateral shrinkage increases with the increase of weld angle height K and decreases with the increase of plate thickness S. The welding shrinkage allowance calculation formula △L=a△TL0+KE△λl0 and the empirical value show that the lateral shrinkage of the 6mm double-sided V-shaped groove without gap is 0.5mm-0.7mm, and the lateral shrinkage of the double-sided fillet weld is 0.3mm-0.5mm. The product preparation reserves welding shrinkage to reduce the influence of welding shrinkage deformation and improve welding quality. Rigid support is added before welding to increase strength and reduce welding deformation of side panels, bottom plate 3, upper flange 4, and cooling water channel 5. Tempering heat treatment is used after welding to eliminate residual stress in the cavity weld and improve the processing accuracy of the product after welding.

[0042] like Figures 1-4 As shown, in step 1, when the upper flange 4 is enlarged, the length, width and height are increased by 1.5 mm on each side, and when the bottom plate 3 is enlarged, the length and width are increased by 1.5 mm on each side. When the side plate is enlarged, the length, width and height of the unfolded side plate are 676 + (2-3.5) mm, 530 + (2-3.0) mm in width and 238 + (2-2.5) mm in height respectively.

[0043] like Figures 1-4As shown, the spot welding length in step 2 is 15-20mm, and the spacing is 120-150mm. Specifically, there are two side panels, namely the first side panel 1 and the second side panel 2. When tailoring spot welding, the side panel, the bottom panel 3, and the upper flange 4 are assembled using a T-type step structure, and the assembly steps are processed by mechanical processing. The assembly gap between the bottom panel 3, the upper flange 4 and the side panel is required to be controlled to be less than 0.3mm. The spot welding weld position is assembled, the spot welding length is 15-20mm, and the spacing is 120-150mm. The cooling water channel 5 outside the first side panel 1 and the second side panel 2 is assembled and assembled spot welding is performed according to the laser marking position. The cooling water channel 5 fillet weld assembly gap requirement is less than 0.3mm, and the butt and R fillet weld splicing gap requirement is less than 0.5mm. The spot welding is required to be symmetrical spot welding, the spot welding length is 5-10mm, and the spacing is 30-50mm. By controlling the assembly gap and spot welding length of the parts, it is avoided that the parts are excessively deformed due to excessive local heat input during welding due to excessive assembly gap.

[0044] like Figures 1-4 As shown, the rigid support adopts a support frame, which includes multiple support tubes. The support tubes are 40*40*5mm square tubes. Due to the serious welding deformation between the side plate and the cooling water channel 5 and the difficulty in shape correction, after the process optimization, the cavity is spot welded as a whole and then fixed with square tube rigid support before welding.

[0045] The support frame includes a first support tube 6, a second support tube 7, a third support tube 8, and a fourth support tube 9 which are sequentially arranged along the inner upper part of the side plate. The first support tube 6 and the third support tube 8 are arranged in parallel, and the second support tube 7 and the fourth support tube 9 are arranged in parallel. A fifth support tube 10 is vertically welded between the second support tube 7 and the fourth support tube 9, a sixth support tube 11 and a seventh support tube 12 are vertically welded between the first support tube 6 and the fifth support tube 10, an eighth support tube 13 and a ninth support tube 14 are vertically welded between the third support tube 8 and the fifth support tube 10, a tenth support tube 15 is welded on the upper side of the bottom plate 3, and an eleventh support tube 16, a twelfth support tube 17 and a thirteenth support tube 18 are vertically and equidistantly welded between the fifth support tube 10 and the tenth support tube 15. The support frame structure is stable and has high rigidity.

[0046] like Figures 1-4 As shown, the spot welding requirement of the support pipe is that the weld of the upper flange 4 is 15-20mm lower, and the welding method of the support pipe and the side plate and bottom plate 3 is symmetrical intermittent welding. The weld length is 40mm and the spacing is 100mm. The butt weld size of the supporting square tube and the supporting square tube must meet the assembly size requirements of the cavity. The assembly gap of the support pipe is less than 0.2mm, and the upper and lower symmetrical welds are fully welded. This support frame ensures rigid support during welding, increases strength, and reduces the deformation of the cavity caused by the welds of the cavity bottom plate 3, the upper flange 4, and the cooling water channel 5.

[0047] like Figures 1-4 As shown, the welds welded in step 4 include the side panel butt weld W1, the bottom plate and the side panel outer intermittent weld W2, the upper flange and the side panel outer intermittent weld W3, the cooling water channel butt weld W4, the cooling water channel and the side panel fillet weld W5, the bottom plate and the side panel inner weld W6, and the side panel and the upper flange inner weld W7. The side panel butt weld W1 is a double-sided V-shaped groove, the bottom plate and the side panel outer intermittent weld W2, the upper flange and the side panel outer intermittent weld W3, the bottom plate and the side panel inner weld W6, and the side panel and the upper flange inner weld W7 are double-sided fillet welds. After the first side panel 1 and the second side panel 2 are welded together, they form a rectangular structure with four outer side surfaces, of which two corners on the same side are chamfered to control the length of the single-sided weld to increase the cooling time of the weld and reduce welding deformation. The welding sequence is as follows: 1) Weld the cavity side panel butt weld W1; 2) Symmetrically weld the bottom plate and side panel outer intermittent weld W2, and the upper flange and side panel outer intermittent weld W3, with a length of 50mm and a spacing of 120mm; 3) Weld the cooling water channel and side panel fillet weld W4; 4) Weld the four outer side transverse cooling water channel and side panel fillet welds W5 symmetrically from the middle to the sides, with the single-side welding weld length less than 200mm, and the symmetrical position is first front to back and then left to right; 5) Weld the cooling water channel butt weld W4 and the cooling water channel and side panel corner (R corner) welds at the bend; 6) Weld the bottom plate and side panel inner side weld W6, and the side panel and upper flange inner side weld W7.

[0048] like Figures 1-4As shown, the welding parameters in step 4 are as follows: the bottom welding current of the side plate butt weld is 110-140A, the voltage is 9-15V, the welding speed is 8-12cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ1.6mm, the tungsten electrode type is WC-20, the size is φ2.4mm, and the bottom welding heat input is 0.53KJ / mm. The cover welding current of the side plate butt weld is 110-140A, the voltage is 9-15V, the welding speed is 6.5-10.8cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0mm, the tungsten electrode type is WC-20, the size is φ2.4mm, and the cover welding heat input is 0.63 KJ / mm, the welding current of the intermittent weld W2 between the bottom plate and the outside of the side plate, the intermittent weld W3 between the upper flange and the outside of the side plate, the weld W6 between the bottom plate and the inside of the side plate, and the weld W7 between the side plate and the inside of the upper flange is 130-170A, the voltage is 10-15V, the welding speed is 8-12cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0mm, the tungsten electrode type is WC-20, the size is φ2.4mm, and the welding heat input is 0.66 KJ / mm. The welding current of the cooling water channel butt weld W4 and the cooling water channel and side plate fillet weld W5 is 80-110V, the voltage is 9-13V, the welding speed is 6-9cm / min, the gas flow rate is 6-12L / min, and the welding wire is ER316L φ2.0mm, tungsten electrode type WC-20 size φ1.6mm, welding heat input 0.50KJ / mm, strictly control welding parameters, and significantly reduce welding deformation and improve welding quality by controlling welding parameters.

[0049] like Figures 1-4 As shown, the stainless steel cavity and the support frame are stabilized and tempered together. The furnace heating rate is 100±2℃ / h, the part heating temperature is 860±2℃, the holding time is 1.5-2.5 hours, and the cooling rate is furnace cooling. After the workpiece is cooled to 300±2℃, it is cooled by aeration and then the furnace is opened for cooling. This can completely release the internal stress of the welding, accurately control the heating and cooling cycles, ensure the best material properties and the surface is not oxidized and the necessary smoothness is guaranteed, and more thoroughly release the internal stress of the welding to ensure the processing accuracy of the cavity.

[0050] In order to strengthen the bottom plate 3, a plurality of reinforcing ribs 19 need to be welded on the bottom plate 3. The welding requirements of the reinforcing ribs 19 are as follows: the weld length is 50 mm, the spacing is 150 mm, and the end of the reinforcing rib 1 is filled with fillet welding.

[0051] Example 1

[0052] See also Figures 1-4 , a semiconductor thin-walled stainless steel cavity welding process, comprising the following steps:

[0053] Step 1: Prepare the product and expand the size. By calculating the deformation trend of the cavity after welding and reserving the welding shrinkage, the side panels, bottom panel 3, and upper flange 4 of the cavity are expanded.

[0054] Step 2: perform tailor-welding and spot welding on the side panels and the bottom panel 3, the bottom panel 3 and the upper flange 4, and the cooling water channel 5 and the side panels to obtain an embryonic body;

[0055] Step 3: providing rigid support to the embryo obtained in step 2;

[0056] Step 4: Set welding parameters and weld the side panels, bottom panel 3, upper flange 4 and cooling water channel 5 obtained in step 3 to obtain the cavity;

[0057] Step 5: Perform tempering heat treatment on the cavity of step 4.

[0058] The welding shrinkage in step 1 includes the transverse shrinkage of the double-sided V-groove without gap and the transverse shrinkage of the double-sided fillet weld. The transverse shrinkage of the double-sided V-groove without gap is 0.5mm, and the transverse shrinkage of the double-sided fillet weld is 0.3mm. The transverse shrinkage of the 6mm double-sided V-groove without gap is 0.5mm, and the transverse shrinkage of the double-sided fillet weld is 0.3mm.

[0059] The length, width and height of the upper flange 4 are each increased by 1.5mm on one side, and the length and width of the base plate 3 are enlarged by 1.5mm on one side. When the upper flange 4 is enlarged, the length, width and height of the upper flange 4 are each increased by 1.5mm on one side, and the length and width of the base plate 3 are enlarged by 1.5mm on one side.

[0060] The spot welding length in step 2 is 15mm and the spacing is 120mm. Specifically, there are two side panels, namely the first side panel 1 and the second side panel 2. During tailored spot welding, the side panel, the bottom panel 3 and the upper flange 4 are assembled with a T-step structure. The T-step structure is assembled by mechanical processing. The assembly gap between the bottom panel 3, the upper flange 4 and the side panel is required to be controlled at 0.2mm. The spot welding weld position is assembled, the spot welding length is 15mm, and the spacing is 120mm. The cooling water channel 5 outside the first side panel 1 and the second side panel 2 is assembled and spot welding is performed according to the laser marking position. The cooling water channel 5 fillet weld assembly gap is required to be 0.2mm, and the butt and fillet weld splicing gap is required to be 0.4mm. The spot welding is required to be symmetrical spot welding, the spot welding length is 5mm, and the spacing is 30mm.

[0061] The rigid support adopts a support frame, which includes multiple support tubes. The support tubes are 40*40*5mm square tubes. The support frame includes a first support tube 6, a second support tube 7, a third support tube 8, and a fourth support tube 9 arranged in sequence along the upper inner side of the side plate. The first support tube 6 and the third support tube 8 are arranged in parallel, and the second support tube 7 and the fourth support tube 9 are arranged in parallel. The fifth support tube 10 is vertically welded between the second support tube 7 and the fourth support tube 9, the sixth support tube 11 and the seventh support tube 12 are vertically welded between the first support tube 6 and the fifth support tube 10, the eighth support tube 13 and the ninth support tube 14 are vertically welded between the third support tube 8 and the fifth support tube 10, the tenth support tube 15 is welded on the upper side of the bottom plate 3, and the eleventh support tube 16, the twelfth support tube 17 and the thirteenth support tube 18 are vertically and equidistantly welded between the fifth support tube 10 and the tenth support tube 15.

[0062] The spot welding requirements for the support pipe are that the weld of the upper flange 4 is 15mm lower, the welding method of the support pipe and the side plate and bottom plate 3 fitting surface is symmetrical intermittent welding, the weld length is 40mm, the spacing is 100mm, the support pipe assembly gap is 0.1mm, and the upper and lower symmetrical welds are fully welded.

[0063] The welds welded in step 4 include the side panel butt weld, the bottom plate and the side panel outer intermittent weld W2, the upper flange and the side panel outer intermittent weld W3, the cooling water channel butt weld W4, the cooling water channel and the side panel fillet weld W5, the bottom plate and the side panel inner weld W6, and the side panel and the upper flange inner weld W7. The side panel butt weld is a double-sided V-shaped groove, the bottom plate and the side panel outer intermittent weld W2, the upper flange and the side panel outer intermittent weld W3, the bottom plate and the side panel inner weld W6, and the side panel and the upper flange inner weld W7 are double-sided fillet welds. After the first side panel 1 and the second side panel 2 are welded together, they form a rectangular structure with four outer side surfaces, of which two corners on the same side are chamfered. The welding sequence is as follows: 1) welding the butt weld of the cavity side panel W1; 2) symmetrically welding the intermittent weld W2 between the bottom panel and the outer side of the side panel, and the intermittent weld W3 between the upper flange and the outer side of the side panel, with a length of 50mm and a spacing of 120mm; 3) welding the cooling water channel and the side panel fillet weld W5; 4) symmetrically welding the transverse cooling water channel and the side panel fillet weld W5 on the four outer sides from the middle to the sides, with the single-side welding weld length less than 200mm, and the symmetrical position is first front to back and then left to right; 5) welding the cooling water channel butt weld W4 and the cooling water channel 5 and the side panel corner (R corner) weld at the bend; 6) welding the inner side weld W6 between the bottom panel and the side panel, and the inner side weld W7 between the side panel and the upper flange.

[0064] The specific welding parameters in step 4 are as follows: the bottom welding current of the side plate butt weld is 110A, the voltage is 9V, the welding speed is 8cm / min, the gas flow rate is 6L / min, the welding wire is ER316L φ1.6mm, the tungsten electrode type is WC-20, the size is φ2.4mm, and the bottom welding heat input is 0.53KJ / mm. The cover welding current of the side plate butt weld is 110A, the voltage is 9V, the welding speed is 6.5cm / min, the gas flow rate is 6L / min, the welding wire is ER316L φ2.0mm, the tungsten electrode type is WC-20, the size is φ2.4mm, and the cover welding heat input is 0.63 KJ / mm, the welding current of the intermittent weld W2 between the bottom plate and the outside of the side plate, the intermittent weld W3 between the upper flange and the outside of the side plate, the weld W6 between the bottom plate and the inside of the side plate, and the weld W7 between the side plate and the inside of the upper flange are 130A, 10V, 8cm / min, gas flow rate 6L / min, welding wire ER316L φ2.0mm, tungsten electrode type WC-20 size φ2.4mm, and welding heat input 0.66 KJ / mm. The welding current of the butt weld W4 of the cooling water channel and the fillet weld W5 of the cooling water channel and the side plate are 80V, 9V, 6cm / min, gas flow rate 6L / min, welding wire ER316L φ2.0mm, tungsten electrode type WC-20 size φ1.6mm, and welding heat input 0.50KJ / mm. Strictly control the welding parameters to significantly reduce welding deformation and improve welding quality.

[0065] The stainless steel cavity and support frame are stabilized and tempered together. The furnace heating rate is 98℃ / h, the parts heating temperature is 858℃, the holding time is 1.8 hours, and the cooling rate is furnace cooling. After the cavity and support frame are cooled to 298℃, they are aerated and cooled, and then the furnace is opened for cooling, and the support frame is removed.

[0066] Example 2

[0067] See also Figures 1-4 , a semiconductor thin-walled stainless steel cavity welding process, comprising the following steps:

[0068] Step 1: Prepare the product and expand the size. By calculating the deformation trend of the cavity after welding and reserving the welding shrinkage, the side panels, bottom panel 3, and upper flange 4 of the cavity are expanded.

[0069] Step 2: perform tailor-welding and spot welding on the side panels and the bottom panel 3, the bottom panel 3 and the upper flange 4, and the cooling water channel 5 and the side panels to obtain an embryonic body;

[0070] Step 3: providing rigid support to the embryo obtained in step 2;

[0071] Step 4: Set welding parameters and weld the side panels, bottom panel 3, upper flange 4 and cooling water channel 5 obtained in step 3 to obtain the cavity;

[0072] Step 5: Perform tempering heat treatment on the cavity of step 4.

[0073] The welding shrinkage in step 1 includes the transverse shrinkage of the double-sided V-groove without gap and the transverse shrinkage of the double-sided fillet weld. The transverse shrinkage of the double-sided V-groove without gap is 0.7mm, and the transverse shrinkage of the double-sided fillet weld is 0.5mm. The transverse shrinkage of the 6mm double-sided V-groove without gap is 0.7mm, and the transverse shrinkage of the double-sided fillet weld is 0.5mm.

[0074] The length, width and height of the upper flange 4 are each increased by 1.5mm on one side, and the length and width of the base plate 3 are enlarged by 1.5mm on one side. When the upper flange 4 is enlarged, the length, width and height of the upper flange 4 are each increased by 1.5mm on one side, and the length and width of the base plate 3 are enlarged by 1.5mm on one side.

[0075] Specifically, there are two side panels, namely the first side panel 1 and the second side panel 2. When spot welding, the side panel, the bottom panel 3 and the upper flange 4 are assembled using a T-shaped step structure, and the assembly steps are processed by mechanical processing. The assembly gap between the bottom panel 3, the upper flange 4 and the side panel is required to be controlled at 0.2mm, and the spot welding weld position is assembled. The spot welding length is 20mm and the spacing is 150mm. The cooling water channels 5 on the outside of the first side panel 1 and the second side panel 2 are assembled and spot welded according to the laser marking position. The assembly gap of the cooling water channel 5 fillet weld is required to be 0.2mm, and the gap between the butt joint and fillet weld is required to be 0.4mm. The spot welding is required to be symmetrical spot welding, the spot welding length is 10mm, and the spacing is 50mm.

[0076] The rigid support adopts a support frame, which includes multiple support tubes. The support tubes are 40*40*5mm square tubes. The support frame includes a first support tube 6, a second support tube 7, a third support tube 8, and a fourth support tube 9 arranged in sequence along the upper inner side of the side plate. The first support tube 6 and the third support tube 8 are arranged in parallel, and the second support tube 7 and the fourth support tube 9 are arranged in parallel. The fifth support tube 10 is vertically welded between the second support tube 7 and the fourth support tube 9, the sixth support tube 11 and the seventh support tube 12 are vertically welded between the first support tube 6 and the fifth support tube 10, the eighth support tube 13 and the ninth support tube 14 are vertically welded between the third support tube 8 and the fifth support tube 10, the tenth support tube 15 is welded on the upper side of the bottom plate 3, and the eleventh support tube 16, the twelfth support tube 17 and the thirteenth support tube 18 are vertically and equidistantly welded between the fifth support tube 10 and the tenth support tube 15.

[0077] The spot welding requirements for the support pipe are that the weld of the upper flange 4 is 20mm lower, the welding method of the support pipe and the side plate and bottom plate 3 fitting surface is symmetrical intermittent welding, the weld length is 40mm, the spacing is 100mm, the support pipe assembly gap is 0.1mm, and the upper and lower symmetrical welds are fully welded.

[0078] The welds welded in step 4 include the side panel butt weld, the bottom plate and the side panel outer intermittent weld W2, the upper flange and the side panel outer intermittent weld W3, the cooling water channel butt weld W4, the cooling water channel and the side panel fillet weld W5, the bottom plate and the side panel inner weld W6, and the side panel and the upper flange inner weld W7. The side panel butt weld is a double-sided V-shaped groove, the bottom plate and the side panel outer intermittent weld W2, the upper flange and the side panel outer intermittent weld W3, the bottom plate and the side panel inner weld W6, and the side panel and the upper flange inner weld W7 are double-sided fillet welds. After the first side panel 1 and the second side panel 2 are welded together, they form a rectangular structure with four outer side surfaces, of which two corners on the same side are chamfered. The welding sequence is as follows: 1) welding the butt weld of the cavity side panel W1; 2) symmetrically welding the intermittent weld W2 between the bottom panel and the outer side of the side panel, and the intermittent weld W3 between the upper flange and the outer side of the side panel, with a length of 50mm and a spacing of 120mm; 3) welding the cooling water channel and the side panel fillet weld W5; 4) symmetrically welding the transverse cooling water channel and the side panel fillet weld W5 on the four outer sides from the middle to the sides, with the single-side welding weld length less than 200mm, and the symmetrical position is first front to back and then left to right; 5) welding the cooling water channel butt weld W4 and the cooling water channel 5 and the side panel corner (R corner) weld at the bend; 6) welding the inner side weld W6 between the bottom panel and the side panel, and the inner side weld W7 between the side panel and the upper flange.

[0079] The specific welding parameters in step 4 are as follows: the bottom welding current of the side plate butt weld is 140A, the voltage is 15V, the welding speed is 12cm / min, the gas flow rate is 12L / min, the welding wire is ER316L φ1.6mm, the tungsten electrode type is WC-20, the size is φ2.4mm, and the bottom welding heat input is 0.53KJ / mm. The cover welding current of the side plate butt weld is 140A, the voltage is 15V, the welding speed is 10.8cm / min, the gas flow rate is 12L / min, the welding wire is ER316L φ2.0mm, the tungsten electrode type is WC-20, the size is φ2.4mm, and the cover welding heat input is 0.63 KJ / mm, the welding current of the intermittent weld W2 between the bottom plate and the outside of the side plate, the intermittent weld W3 between the upper flange and the outside of the side plate, the weld W6 between the bottom plate and the inside of the side plate, and the weld W7 between the side plate and the inside of the upper flange are 170A, 15V, 12cm / min, gas flow rate 12L / min, welding wire ER316L φ2.0mm, tungsten electrode type WC-20 size φ2.4mm, and welding heat input 0.66 KJ / mm. The welding current of the butt weld W4 of the cooling water channel and the fillet weld W5 of the cooling water channel and the side plate are 110V, 13V, 9cm / min, gas flow rate 12L / min, welding wire ER316L φ2.0mm, tungsten electrode type WC-20 size φ1.6mm, and welding heat input 0.50KJ / mm. Strictly control the welding parameters to significantly reduce welding deformation and improve welding quality.

[0080] The stainless steel cavity and support frame are stabilized and tempered together. The furnace heating rate is 100℃ / h, the parts heating temperature is 860℃, the holding time is 2 hours, and the cooling rate is furnace cooling. After the cavity and support frame are cooled to 300℃, they are aerated and cooled, and then the furnace is opened for cooling, and the support frame is removed.

[0081] Three points were randomly selected from the cavities of Example 1 and Example 2, and the dimensions of the three points were measured. The measurement results are shown in Table 1.

[0082] Table 1

[0083]

[0084] As can be seen from Table 1, the dimensional change of the cavity before and after welding is within 2 mm, and the welding deformation is small, which meets the welding size requirements of semiconductor equipment for parts.

[0085] The above embodiments are merely descriptions for the purpose of clearly illustrating the present invention, and are not limitations on the implementation methods. Those skilled in the art may make other different forms of changes or modifications based on the above descriptions. It is not necessary and impossible to enumerate all implementation methods here, and the obvious changes or modifications derived therefrom are still within the scope of protection of the present invention.

Claims

1. A semiconductor thin-wall stainless steel cavity welding process, characterized in that , including the following steps: Step 1: Prepare the product and expand the size. By calculating the deformation trend of the cavity after welding and reserving the welding shrinkage, the side panels, bottom panel, and upper flange parts of the cavity are expanded. Step 2: perform tailor welding and spot welding on the side panels and the bottom panel, the bottom panel and the upper flange, and the cooling water channel and the side panels to obtain an embryonic body; Step 3: providing rigid support to the embryo obtained in step 2; Step 4: Set the welding parameters and weld the side plate, bottom plate, upper flange and cooling water channel obtained in step 3 to obtain the cavity. The welds include the intermittent welds between the bottom plate and the outer side of the side plate, the intermittent welds between the upper flange and the outer side of the side plate, the butt welds between the cooling water channel, the fillet welds between the cooling water channel and the side plate, the inner welds between the bottom plate and the side plate, and the inner welds between the side plate and the upper flange. The bottom welding current of the intermittent welds between the bottom plate and the outer side of the side plate is 110-140A, the voltage is 9-15V, the welding speed is 8-12cm / min, the gas flow rate is 6-12L / min, and the welding wire is ER316L φ1.6mm. Tungsten electrode type WC-20 size φ2.4mm, bottom welding heat input 0.53KJ / mm, cover welding current of intermittent welds between bottom plate and side plate outer side is 110-140A, voltage is 9-15V, welding speed is 6.5-10.8cm / min, gas flow rate is 6-12L / min, welding wire ER316L φ2.0mmm, tungsten electrode type WC-20 size φ2.4mm, cover welding heat input is 0.63 KJ / mm; The welding current of the intermittent welds between the upper flange and the outer side of the side plate, the butt welds of the cooling water channel, the welds between the bottom plate and the inner side of the side plate, and the welds between the side plate and the inner side of the upper flange is 130-170A, the voltage is 10-15V, the welding speed is 8-12cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0mm, the tungsten electrode type is WC-20, the size is φ2.4mm, and the welding heat input is 0.66 KJ / mm; The welding current of the cooling water channel butt weld and the cooling water channel and side plate fillet weld is 80-110V, the voltage is 9-13V, the welding speed is 6-9cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0mm, the tungsten electrode type is WC-20, the size is φ1.6mm, and the welding heat input is 0.50KJ / mm; Step 5: Perform tempering heat treatment on the cavity of step 4.

2. The semiconductor thin-wall stainless steel cavity welding process according to claim 1, characterized in that: The welding shrinkage in step 1 includes the transverse shrinkage of the double-sided V-groove without gap and the transverse shrinkage of the double-sided fillet weld. The transverse shrinkage of the double-sided V-groove without gap is 0.5mm-0.7mm, and the transverse shrinkage of the double-sided fillet weld is 0.3mm-0.5mm.

3. The semiconductor thin-wall stainless steel cavity welding process according to claim 1, characterized in that: In step 1, when the upper flange is enlarged, the length, width and height are increased by 1.5mm on each side. When the bottom plate is enlarged, the length and width are increased by 1.5mm on each side. When the side plate is enlarged, the length direction is increased by 2-3.5mm, the width direction is increased by 2-3mm, and the height direction is increased by 2-2.5mm.

4. The semiconductor thin-wall stainless steel cavity welding process according to claim 1, characterized in that: The spot welds in step 2 are 15-20mm long and 120-150mm apart.

5. The semiconductor thin-wall stainless steel cavity welding process according to claim 1, characterized in that: The rigid support adopts a support frame, which includes multiple support pipes.

6. The semiconductor thin-wall stainless steel cavity welding process according to claim 5, characterized in that: The welding method of the supporting tube to the side plate and bottom plate is symmetrical intermittent welding, with a weld length of 40mm and a spacing of 100mm.

7. The semiconductor thin-wall stainless steel cavity welding process according to claim 1, characterized in that: The welding sequence in step 4 is: intermittent welds between the bottom plate and the outside of the side plate, symmetrical welding of the intermittent welds between the upper flange and the outside of the side plate and the intermittent welds of the cooling water channel, welding of the cooling water channel fillet welds on the outside of the cavity side plate, and symmetrical welding of the horizontal cooling water channel welds on the four sides from the middle to the sides. The length of the single-sided welding weld is less than 200mm, and the symmetrical position is first front and back and then left and right. Then weld the vertical cooling water channel in the same order as above, and finally weld the butt welds of the cooling water channel and the welds of the transition R angle at the bend.

8. The semiconductor thin-wall stainless steel cavity welding process according to claim 1, characterized in that: The stainless steel cavity and support frame are stabilized and tempered together. The furnace heating rate is 100±2℃ / h, the parts heating temperature is 860±2℃, the holding time is 1.5-2.5 hours, and the cooling rate is furnace cooling. After the cavity and support frame are cooled to 300±2℃, they are aerated and then opened for furnace cooling.

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