Metal machining tool for ceramic edge ring and using method of metal machining tool

Abstract

The invention discloses a ceramic edge ring metal machining tool which comprises a first machining tool and a second machining tool, the first machining tool comprises a first base, a first backing ring and a pressing ring, the first backing ring and the pressing ring are used for clamping a part blank on the upper surface of the first base, and the second machining tool comprises a second base. The positioning ring, the second backing ring and the pressure plate are used for clamping a part blank on the upper surface of the second base; the part blank is pressed and clamped through the annular pressing ring, the machining area of the part blank is exposed, interference between a tool and a machining tool is avoided, feature machining of one face of the part blank is completed, the inner area and the outer area of the surface of the part are pressed at the same time through the pressing disc and the positioning ring, the part is prevented from moving, and machining coordinates are prevented from being lost; and the precision of the machining size is improved.

Description

Technical Field

[0001] The invention relates to the technical field of edge ring processing, and in particular to a metal processing tool for a ceramic edge ring and a use method thereof. Background Art

[0002] The edge ring (also called Edge Ring) is an important structural component in direct contact with the wafer in the wafer rapid thermal processing (RTP) equipment. It is made of ceramic and its main function is to support the wafer during the thermal treatment process of rapid temperature rise and fall. The key technologies such as the development and production of this component are still in the hands of foreign technology companies. Therefore, the ceramic edge rings used by domestic equipment manufacturers are still highly dependent on imports. With the rapid and vigorous development of the semiconductor market, the demand for the localization of ceramic edge rings is becoming more and more urgent.

[0003] Rapid thermal processing (RTP) equipment is a type of wafer heat treatment equipment that can quickly raise the temperature of the wafer to the temperature required by the process (200-1300°C) and can quickly cool it down, with a heating / cooling rate of 20-250°C / s.

[0004] Ceramics, as a structural and functional integrated material with various material advantages such as low density, high temperature resistance, oxidation resistance, high rigidity, and wide bandgap, is recognized as the most promising alternative material for the next generation of semiconductor wafers and core components. Its comprehensive performance indicators can well meet the production and preparation requirements of higher process chips, and gradually replace oxide ceramics and nitride ceramics in traditional structural components, becoming the preferred material for high temperature resistance in chip manufacturing equipment.

[0005] Ceramic edge rings have the characteristics of thin wall, hardness, brittleness and variability. As a thin-walled part, it is necessary to complete the processing of all features on one surface first, and then turn over to process all features on the second surface. The use of gluing or waxing has the advantages of strong bonding reliability and the workpiece is not easy to fall off during processing, but the amount of glue and wax is not easy to control. And the difference in the thickness of the glue or wax layer between each bonding position will cause the workpiece to be unable to be completely glued flat, resulting in poor flatness and parallelism on the upper and lower surfaces of the processed workpiece. At the same time, the bonding method will cause the risk of part breakage or damage during the removal process. As a thin-walled part, it is also difficult to fix it by clamping the tool. Except for the bottom surface in contact with the tool, the rest of the part is the processing surface. Therefore, when the conventional metal tool is used to clamp the part, the tool will interfere with the tool during the processing, resulting in some morphological features cannot be processed. When the internal and external tooling are used to alternately clamp, there is a problem of part displacement and loss of processing coordinates or accuracy when the tooling is switched. At the same time, when the clamping force of the tooling is too large, the parts will be deformed due to prestress before processing, affecting the dimensional accuracy after processing. At the same time, due to the existence of prestress, internal defects are very likely to occur during the processing, resulting in the scrapping of parts. When the clamping force of the tooling is too small, the workpiece cannot be completely fixed, resulting in cracks in the workpiece due to vibration during the processing. Therefore, it is necessary to propose a method that can solve the interference between the tooling and the processing tool during the edge ring processing, the easy displacement of parts during the tooling replacement process, resulting in the loss of processing coordinates or accuracy, and the problem of poor dimensional accuracy of parts processing due to the uncontrollable amount of glue or wax glue and the poor thickness difference of the glue or wax layer. Summary of the invention

[0006] In view of the above problems in the prior art, the present invention provides a metal processing tool for a ceramic edge ring and a method for using the same, which solves the problem of interference between the tool and the processing tool during edge ring processing in a traditional processing tool.

[0007] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0008] On the one hand, a metal processing tool for a ceramic edge ring is provided, which includes a first processing tool and a second processing tool, the first processing tool includes a first base, and a first gasket and a pressure ring for clamping the part blank on the upper surface of the first base, and the second processing tool includes a second base, and a positioning ring, a second gasket, and a pressure plate for clamping the part blank on the upper surface of the second base.

[0009] The present invention clamps the part blank by an annular pressing ring to expose the processing area of ​​the part blank, avoids interference between the tooling and the processing tool, and completes the feature processing of one side of the part blank. The inner and outer areas of the part surface are pressed simultaneously by the pressure plate and the positioning ring to prevent the part from being displaced and causing the loss of the processing coordinates, thereby improving the accuracy of the processing size.

[0010] Furthermore, a supporting platform for supporting the part blank is provided in the middle of the upper surface of the second base; a limiting groove which matches with the limiting block on the lower surface of the pressure plate is opened in the middle of the supporting platform.

[0011] Furthermore, a plurality of mounting holes are evenly arranged on the upper surface of the supporting platform, and a through hole matching with the mounting holes is arranged on the pressure plate.

[0012] Furthermore, a positioning groove is provided on the circumference of the upper surface of the supporting platform.

[0013] Furthermore, the positioning ring includes two positioning sub-rings arranged opposite to each other; connecting blocks are provided at both ends of the positioning sub-rings, threaded holes are opened on the connecting blocks, and the two positioning sub-rings are assembled into a positioning ring in a circular shape by docking the connecting blocks.

[0014] Furthermore, a positioning boss is provided on the inner side of the positioning sub-ring.

[0015] Furthermore, the first base, the second base, the pressure ring, the positioning ring and the pressure plate are all made of metal materials.

[0016] Furthermore, the first gasket ring and the second gasket ring are both made of high molecular polymer material.

[0017] In another aspect, a method for using a metal processing tool according to a ceramic edge ring is provided, comprising the following steps:

[0018] Step S1, fixing the first base on the machine tool table, and clamping the edge ring part blank, the first gasket and the pressure ring on the upper surface of the first base from bottom to top in sequence, so that the pressing plate of the machine tool is evenly pressed on the upper surface of the pressure ring along the circumferential direction, and then performing the first feature processing on the part blank;

[0019] Step S2, after the first feature processing is completed, the first processing tool is removed, the second base of the second processing tool is fixed on the machine table, and then the part blank is turned over and placed on the second base;

[0020] Step S3, sleeve the positioning ring on the outer circle of the part blank, and press the part blank onto the supporting platform of the second base;

[0021] Step S4, placing a second gasket and a pressure plate on the upper surface of the part blank in sequence, embedding a limit block on the lower surface of the pressure plate into the limit groove, and connecting the limit block with the mounting hole through a screw passing through the through hole to fix the inner circle area on the upper surface of the part blank;

[0022] Step S5, performing the second feature processing on the part blank to process the bottom groove feature;

[0023] Step S6, remove the second gasket and the pressure plate, and place the first gasket and the pressure ring in the bottom groove processed in step S5, and use the pressure plate of the machine tool to press the pressure ring, and then perform the second feature processing on the part blank to process the small platform area feature;

[0024] Step S7, after completing the processing of the small platform area features, remove the pressure ring and the first gasket ring in sequence, then loosen the positioning ring, and remove the finished edge ring parts after processing.

[0025] The present invention discloses a metal processing tool for a ceramic edge ring and a method for using the same, and the beneficial effects thereof are:

[0026] 1. The present invention clamps the part blank by an annular pressure ring to expose the processing area of ​​the part blank, avoids interference between the tooling and the processing tool, and completes the feature processing of one side of the part blank. The pressure plate and the positioning ring simultaneously press the inner and outer areas of the part surface to prevent the part from being displaced, resulting in the loss of the processing coordinates, thereby improving the accuracy of the processing size.

[0027] 2. The positioning ring in the present invention adopts a split structure, which can press the part blank in the horizontal direction and the height direction at the same time during the part processing to prevent the part from being displaced and causing the loss of the processing coordinates. At the same time, it is also convenient for removing the part after the processing is completed. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of the first base of the present invention.

[0029] Figure 2 It is a schematic structural diagram of the first gasket of the present invention.

[0030] Figure 3 It is a schematic structural diagram of the pressure ring of the present invention.

[0031] Figure 4 It is a structural schematic diagram of the second base of the present invention.

[0032] Figure 5 It is a schematic structural diagram of the positioning ring of the present invention.

[0033] Figure 6 It is a structural schematic diagram of the pressure plate of the present invention.

[0034] Figure 7 It is a schematic diagram of the cross-sectional structure of the pressure plate of the present invention.

[0035] Figure 8 It is a schematic structural diagram of the second gasket of the present invention.

[0036] Fig. 9 It is a schematic structural diagram of the first processing tool clamping a part blank of the present invention.

[0037] Fig.10 It is a schematic diagram of the cross-sectional structure of the first processing tool clamping a part blank of the present invention.

[0038] Fig.11 It is a schematic diagram of the cross-sectional structure of the second processing tool clamping a part blank of the present invention.

[0039] Fig.12 It is a structural schematic diagram of bottom groove processing in the second feature processing of the present invention.

[0040] Fig.13 It is a structural schematic diagram of the processing of the small platform area in the second characteristic processing of the present invention.

[0041] Among them, 1. the first processing tooling; 2. the second processing tooling; 3. the part blank; 4. the first base; 5. the first gasket; 6. the pressure ring; 7. the second base; 71. the supporting platform; 72. the limiting groove; 73. the mounting hole; 74. the positioning groove; 8. the positioning ring; 81. the positioning sub-ring; 82. the connecting block; 83. the positioning boss; 9. the pressure plate; 91. the limiting block; 92. the through hole; 10. the second gasket; 11. the bottom groove. DETAILED DESCRIPTION

[0042] The specific embodiments of the present invention are described to facilitate those skilled in the art to understand the present invention. However, it should be clear that the present invention is not limited to the scope of the specific embodiments. For those of ordinary skill in the art, as long as various changes are within the spirit and scope of the present invention as defined and determined by the attached claims, these changes are obvious, and all inventions and creations utilizing the concept of the present invention are protected.

[0043] Example 1

[0044] This embodiment provides a metal processing tool for a ceramic edge ring, the purpose of which is to solve the problem of interference between the tool and the processing tool during the edge ring processing of the traditional processing tool. Figure 1-Figure 8 , the specific structure of this embodiment will be described in detail below.

[0045] A metal processing tool for a ceramic edge ring, comprising a first processing tool 1 and a second processing tool 2;

[0046] The first processing tool 1 includes a first base 4, and a first gasket 5 and a pressure ring 6 for clamping the part blank 3 on the upper surface of the first base 4;

[0047] The second processing tool 2 includes a second base 7 , and a positioning ring 8 , a second gasket 10 , and a pressure plate 9 for clamping the part blank 3 on the upper surface of the second base 7 .

[0048] In this embodiment, the first base 4, the second base 7, the pressure ring 6, the positioning ring 8 and the pressure plate 9 are all made of metal materials, such as steel, cast iron, etc. The first gasket 5 and the second gasket 10 are all made of high molecular polymer materials, such as polytetrafluoroethylene, polyoxymethylene resin, etc.

[0049] The first gasket 5 and the pressure ring 6 are both annular. The part blank 3 is clamped on the upper surface of the second base 7 by the annular pressure ring 6. The first gasket 5 is placed between the pressure ring 6 and the part blank 3 to expose the processing area of ​​the part blank 3 to avoid interference between the tooling and the processing tool, thereby completing the feature processing of one side (side A) of the part blank 3.

[0050] After the first feature processing is completed, the part blank 3 is turned over and placed on the second base 7. The second gasket 10 is placed between the pressure plate 9 and the part blank 3. The inner and outer circular areas of the surface of the part blank 3 are simultaneously pressed by the pressure plate 9 and the positioning ring 8 to limit the position in the horizontal and height directions to prevent the part blank 3 from displacement, and then complete the feature processing of the other side (side B) of the part blank 3. There is no need to change the tooling to prevent the loss of processing coordinates, thereby improving the accuracy of the processing size. There is no need to use gluing or wax gluing, which eliminates the problem of poor part processing size accuracy caused by uncontrollable gluing or wax gluing dosage and poor differences in glue or wax layer thickness.

[0051] Specifically, a support platform 71 for supporting the part blank 3 is provided in the middle of the upper surface of the second base 7; a limiting groove 72 is provided in the middle of the support platform 71 to match the limiting block 91 on the lower surface of the pressure plate 9. A plurality of mounting holes 73 are evenly provided on the upper surface of the support platform 71, and a through hole 92 matching the mounting hole 73 is provided on the pressure plate 9.

[0052] In this embodiment, when the part blank is placed on the support platform 71, the second gasket 10 is placed between the pressure plate 9 and the part blank 3, and is embedded in the limiting groove 72 on the upper surface of the support platform 71 through the limiting block 91 on the lower surface of the pressure plate 9. The limiting groove 72 provides a limit for the pressure plate 9, thereby limiting the part blank 3 in the inner circle area of ​​the part blank 3. At the same time, the pressure plate 9 is installed on the support platform 71 by connecting it to the mounting hole 73 through a bolt passing through the through hole 92 through a thread.

[0053] A positioning groove 74 is provided on the circumference of the upper surface of the supporting platform 71. The positioning groove 74 is used to support the A surface of the part blank 3 after feature processing.

[0054] Specifically, the positioning ring 8 includes two positioning sub-rings 81 arranged opposite to each other; connecting blocks 82 are provided at both ends of the positioning sub-ring 81, and threaded holes are opened on the connecting blocks 82. The two positioning sub-rings 81 are assembled into the positioning ring 8 in a circular shape by docking the connecting blocks 82.

[0055] A positioning boss 83 is provided on the inner side of the positioning sub-ring 81 .

[0056] In this embodiment, the positioning ring 8 is composed of two semicircular positioning sub-rings 81 arranged opposite to each other, and connecting blocks 82 are provided at both ends of the positioning sub-rings 81. The two positioning sub-rings 81 are sleeved on the supporting platform 71, and bolts are passed through the threaded holes on the connecting blocks 82 at the ends of the two positioning sub-rings 81, so that the two positioning sub-rings 81 are assembled into a circular positioning ring 8 to limit the part blank 3 in the horizontal direction. At the same time, a positioning boss 83 is opened on the inner side of the positioning sub-ring 81, and the positioning boss 83 can be pressed on the edge of the part blank 3, so as to limit the part blank 3 in the height direction.

[0057] Example 2

[0058] Based on Example 1, this embodiment provides a method for using a metal processing tooling according to a ceramic edge ring, the purpose of which is to solve the problem of interference between the tooling and the processing tool during the edge ring processing of the traditional processing tooling, referring to Figure 9-13 , the specific steps in this embodiment will be described in detail below.

[0059] A method for using a metal processing tool based on a ceramic edge ring comprises the following steps:

[0060] Step S1, fix the first base 4 on the machine tool table, and clamp the edge ring part blank 3, the first gasket 5 and the pressure ring 6 on the upper surface of the first base 4 from bottom to top in sequence, so that the pressure plate of the machine tool is evenly pressed on the upper surface of the pressure ring 6 along the circumferential direction, clamp the part blank 3 by the pressure ring 6, and expose the processing area of ​​the A surface on the part blank 3 to avoid interference between the tooling and the processing tool, and then perform the first feature processing on the A surface of the part blank 3. Since the thickness dimension of the part blank 3 is already the thickness of the finished part, it is only necessary to process the inner circle, outer circle and inner step circle of the part blank 3 to complete the feature processing of one side (A surface) of the part blank 3.

[0061] Step S2, after the first feature processing is completed, remove the first processing tool 1, fix the second base 7 of the second processing tool 2 on the machine tool table, and then turn the part blank 3 over and place it on the second base 7, that is, place the part blank 3 on the second base 7 with the A side facing down after processing and the unprocessed B side facing up.

[0062] Step S3 , sleeve the positioning ring 8 onto the outer circle of the part blank 3 , and press the part blank 3 onto the supporting platform 71 of the second base 7 .

[0063] In this embodiment, two positioning sub-rings 81 are sleeved on the supporting platform 71, and bolts are passed through the threaded holes on the connecting blocks 82 at the ends of the two positioning sub-rings 81, so that the two positioning sub-rings 81 are assembled into a circular positioning ring 8 to limit the outer circle of the part blank 3 in the horizontal direction. At the same time, the positioning boss 83 can be pressed on the edge of the part blank 3, so as to limit the part blank 3 in the height direction, and then the part blank 3 is pressed tightly onto the supporting platform 71 by limiting and fixing the outer circle area of ​​the part blank 3.

[0064] Step S4, placing the second gasket 10 and the pressure plate 9 on the upper surface of the part blank 3 in sequence, the limit block 91 on the lower surface of the pressure plate 9 is embedded in the limit groove 72, and is connected to the mounting hole 73 through the screw passing through the through hole 92 to fix the inner circle area of ​​the upper surface of the part blank 3;

[0065] Step S5, performing the second feature processing on the part blank 3 to process the bottom groove 11 feature;

[0066] Step S6, remove the second gasket 10 and the pressure plate 9, and place the first gasket 5 and the pressure ring 6 in the bottom groove 11 processed in step S5, and use the pressure plate of the machine tool to press the pressure ring 6, and then perform the second feature processing on the part blank 3 to process the small platform area feature;

[0067] Step S7, after completing the processing of the small platform area features, remove the pressing ring 6 and the first gasket 5 in sequence, then loosen the positioning ring 8, and remove the finished edge ring part after processing.

[0068] Although the 7 specific implementation methods of the invention are described in detail in conjunction with the drawings, it should not be understood as limiting the scope of protection of this patent. Within the scope described in the claims, various modifications and variations that can be made by those skilled in the art without creative work still fall within the scope of protection of this patent.

Claims

1. A metal processing tool for a ceramic edge ring, characterized in that: It comprises a first processing tool (1) and a second processing tool (2); The first processing tool (1) comprises a first base (4), and a first gasket (5) and a pressure ring (6) for clamping the part blank (3) on the upper surface of the first base (4); The second processing tool (2) comprises a second base (7), and a positioning ring (8), a second gasket (10), and a pressure plate (9) for clamping the part blank (3) on the upper surface of the second base (7).

2. The metal processing tool for ceramic edge ring according to claim 1, characterized in that: A support platform (71) for supporting the part blank (3) is provided in the middle of the upper surface of the second base (7); a limiting groove (72) is provided in the middle of the support platform (71) to match the limiting block (91) on the lower surface of the pressure plate (9).

3. The metal processing tool for ceramic edge ring according to claim 2, characterized in that: A plurality of mounting holes (73) are evenly arranged on the upper surface of the supporting platform (71), and a through hole (92) matching with the mounting holes (73) is arranged on the pressure plate (9).

4. The metal processing tool for ceramic edge ring according to claim 2, characterized in that: A positioning groove (74) is provided on the circumference of the upper surface of the supporting platform (71).

5. The metal processing tool for ceramic edge ring according to claim 1, characterized in that: The positioning ring (8) comprises two positioning sub-rings (81) arranged opposite to each other; both ends of the positioning sub-ring (81) are provided with connecting blocks (82), and threaded holes are provided on the connecting blocks (82); the two positioning sub-rings (81) are assembled into a circular shape to form the positioning ring (8) by butting the connecting blocks (82).

6. The metal processing tool for ceramic edge ring according to claim 5, characterized in that: A positioning boss (83) is provided on the inner side of the positioning sub-ring (81).

7. The metal processing tool for ceramic edge ring according to claim 1, characterized in that: The first base (4), the second base (7), the pressure ring (6), the positioning ring (8) and the pressure plate (9) are all made of metal materials.

8. The metal processing tool for ceramic edge ring according to claim 1, characterized in that: The first gasket ring (5) and the second gasket ring (10) are both made of high molecular polymer material.

9. A method for using a metal processing tool for a ceramic edge ring according to any one of claims 1 to 8, characterized in that: The following steps are involved: Step S1, fixing the first base (4) on the machine table, and clamping the edge ring part blank (3), the first gasket (5) and the pressure ring (6) on the upper surface of the first base (4) from bottom to top in sequence, so that the pressure plate of the machine tool is evenly pressed on the upper surface of the pressure ring (6) along the circumferential direction, and then performing the first feature processing on the part blank (3); Step S2, after the first feature processing is completed, the first processing tool (1) is removed, the second base (7) of the second processing tool (2) is fixed on the machine table, and then the part blank (3) is turned over and placed on the second base (7); Step S3, fitting the positioning ring (8) onto the outer circle of the part blank (3), and pressing the part blank (3) onto the supporting platform (71) of the second base (7); Step S4, placing a second gasket (10) and a pressure plate (9) on the upper surface of the part blank (3) in sequence, the limit block (91) on the lower surface of the pressure plate (9) is embedded in the limit groove (72), and is connected to the mounting hole (73) by screws passing through the through hole (92), so as to fix the inner circle area of ​​the upper surface of the part blank (3); Step S5, performing a second feature processing on the part blank (3) to process the bottom groove feature; Step S6, remove the second gasket (10) and the pressure plate (9), and place the first gasket (5) and the pressure ring (6) in the bottom groove processed in step S5, and use the pressure plate of the machine tool to press the pressure ring (6), and then perform the second feature processing on the part blank (3) to process the small platform area feature; Step S7: After the processing of the features of the small platform area is completed, the pressure ring (6) and the first gasket ring (5) are removed in sequence, and then the positioning ring (8) is loosened to remove the finished edge ring part after the processing is completed.

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