Circulating water cooling deposition base station

Abstract

The invention discloses a circulating water cooling deposition base station, and aims to overcome the defect of poor cooling effect of a deposition base station. The base station comprises a base station body, a mounting cavity is formed in the base station body, a first layer plate and a second layer plate are mounted in the mounting cavity to divide the mounting cavity into a first cooling cavity, a ventilation cavity and a second cooling cavity which are sequentially adjacent, a top blind plate is mounted at one end of the base station body, and a blind plate cooling cavity is formed between the top blind plate and the base station body; a combined pipe is mounted at the other end of the abutment body and comprises a water inlet pipe, an air outlet pipe and a water outlet pipe which are sequentially sleeved, the water inlet pipe, the blind plate cooling cavity, the first cooling cavity, the second cooling cavity and the water outlet pipe are sequentially communicated, and the ventilation cavity is communicated with the air outlet pipe. According to the circulating water cooling deposition base station, high-temperature gas in the gas channel is subjected to multi-layer cooling through water circulation, the cooling effect is good, gas entering the vacuum pump is normal-temperature gas, and pollution and damage of the high-temperature gas to the environment and equipment are reduced.

Description

Technical Field

[0001] The invention relates to the technical field of chemical vapor deposition, and more particularly to a circulating water-cooled deposition base. Background Art

[0002] Deposition bases are often used in equipment for preparing diamond films by microwave plasma chemical vapor deposition (MPCVD). During the process of synthesizing single-crystal diamonds using MPCVD technology, high-temperature gases inside the equipment need to be discharged from the vacuum chamber. Due to the high temperature of the gas, it cannot be discharged directly and needs to be cooled. At present, the common single-layer base only retains airway circulation without water circulation, and the multi-layer welded plates have problems such as processing accuracy, cylindricality, and sealing. During its processing, due to multi-layer welding, there are many welding positions, and the entire base is close to 1m high and a large round table with a diameter of about 800mm. In addition, due to the influence of water channels and air channels, it is difficult to achieve high-precision processing with a coaxiality of 0.1mm in a long-walled tube with a length of about 800mm and a wall thickness of only 5mm. The existing bases cannot achieve the defect of base water cooling, and some bases are designed for cooling. The product is inefficient during cooling, which seriously affects the working speed or insufficient cooling, resulting in damage to the equipment and pollution of the environment. Summary of the invention

[0003] In order to overcome the above-mentioned shortcomings, the present invention provides a circulating water-cooled deposition base, which utilizes water circulation to perform multi-layer cooling on the high-temperature gas in the airway, with good cooling effect. The high-temperature gas can be fully cooled when being drawn out of the vacuum chamber, so that the gas entering the vacuum pump is room temperature gas, reducing the pollution and damage of the high-temperature gas to the environment and equipment.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions: a circulating water-cooled deposition base, including a base body, an installation cavity is arranged in the base body, a first layer plate and a second layer plate are installed in the installation cavity to divide the installation cavity into a first cooling cavity, a ventilation cavity and a second cooling cavity adjacent to each other in sequence, a top blind plate is installed at one end of the base body, a blind plate cooling cavity is arranged between the top blind plate and the base body, a combination pipe is installed at the other end of the base body, the combination pipe includes a water inlet pipe, an air outlet pipe and a water outlet pipe which are sequentially mounted, the water inlet pipe, the blind plate cooling cavity, the first cooling cavity, the second cooling cavity and the water outlet pipe are sequentially connected, and the ventilation cavity is connected to the air outlet pipe.

[0005] During operation, air is evacuated from the air outlet pipe, and the air flows from the ventilation cavity toward the air outlet pipe. Circulating cooling water enters the blind plate cooling cavity from the water inlet pipe. During the process of preparing diamond crystals by MPCVD, the substrate placed on the top of the base for the growth of single crystal diamond will be accompanied by high temperature, so the substrate needs to be cooled. The first cooling cavity directly cools the top blind plate, thereby cooling the substrate, and the cooling effect is good.

[0006] The circulating cooling water flows from the blind plate cooling cavity to the first cooling cavity, and from the first cooling cavity to the second cooling cavity, and the ventilation cavity is sandwiched between the first cooling cavity and the second cooling cavity. The high-temperature gas in the ventilation cavity is cooled by the circulating cooling water in a sandwiched manner, with a large heat exchange area and a good cooling effect.

[0007] The circulating cooling water flows from the second cooling chamber to the water outlet pipe, and the air outlet pipe is arranged between the water inlet pipe and the water outlet pipe. The gas in the air outlet pipe is cooled by the circulating cooling water in a sandwiched manner, with a large heat exchange area and a good cooling effect.

[0008] During the operation of the MPCVD equipment, the high-temperature gas in the vacuum chamber can be fully cooled through the ventilation chamber and the exhaust pipe when it is pumped out of the vacuum chamber, so that the gas entering the vacuum pump is room temperature gas, reducing the pollution and damage of the high-temperature gas to the environment and equipment. In addition, this cooling method through the circulation of cooling water is more cost-effective, and the cooling water can be reused, reducing the waste of resources. In addition, this sandwich cooling method allows the high-temperature gas to be greatly cooled in a short time, which can effectively increase the gas flow rate, improve work efficiency, and reduce working time.

[0009] Preferably, a water passage with a spiral structure is provided in the blind plate cooling cavity.

[0010] The spiral water flow channel has a long path, can also slow down the flow rate of water, prolong the heat exchange time, and is conducive to improving the cooling effect of the top blind plate. Moreover, the spiral water flow channel can make the water flow fully fill the entire space, achieving sufficient cooling of the top blind plate.

[0011] Preferably, a top boss is mounted on the base body and the top blind plate correspondingly, and a spiral water baffle is arranged on the end surface of the top boss to form a water flow channel between the top boss and the top blind plate.

[0012] A spiral water baffle is arranged on the top boss to facilitate the formation of a water flow channel.

[0013] Preferably, the inner end of the water passage is connected to the water inlet pipe, and a plurality of arc-shaped slots are arranged at intervals in the circumferential direction on the outer edge of the blind plate cooling cavity, and the arc-shaped slots are connected to the first cooling cavity.

[0014] The circulating cooling water enters the water flow channel from the inner end thereof, flows out from the outer end thereof after passing through the water flow channel, and then flows into the first cooling cavity through the arc-shaped slots. A plurality of arc-shaped slots are evenly distributed around the circumference, which is conducive to the uniform flow of water to the first cooling cavity and ensures the cooling effect.

[0015] Preferably, a plurality of hollow air inlet columns are installed on the base body, the air inlet columns are connected to the ventilation cavity, and positioning convex rings are arranged on the outer walls of the air inlet columns, and the convex rings are supported between the first layer plate and the inner wall of the first cooling cavity.

[0016] The hollow air inlet column is provided to facilitate the airflow to enter the ventilation cavity. The convex ring is supported between the first layer plate and the inner wall of the first cooling cavity, so as to realize the reliable positioning of the first layer plate.

[0017] Preferably, a plurality of hollow water-through connecting columns are connected between the first cooling cavity and the second cooling cavity, and positioning bosses are provided on the outer walls of the water-through connecting columns, and the positioning bosses are supported between the first layer of plates and the second layer of plates.

[0018] The hollow water-through connecting column realizes the connection between the first cooling cavity and the second cooling cavity, and the positioning boss realizes the positioning of the first layer of plate and the second layer of plate, thereby ensuring the spacing between the first layer of plate and the second layer of plate, thereby ensuring the space size of the ventilation cavity.

[0019] Preferably, the base body comprises a positioning circular plate, one end of which is fastened to the bottom plate, and the other end of which is fastened to the air intake plate, and the first layer plate and the second layer plate are both placed between the bottom plate and the air intake plate.

[0020] The base body is composed of a positioning circular plate, a bottom plate and an air inlet plate connected together, which is convenient for processing.

[0021] Preferably, a plurality of inner positioning columns and a plurality of outer positioning columns are installed on the bottom plate, the inner positioning columns are plug-in connected to the first layer plate and the second layer plate, and the outer positioning columns are plug-in connected to the first layer plate, the second layer plate and the air intake plate.

[0022] The setting of the inner positioning column and the outer positioning column realizes the accuracy and reliability of the connection position of the air intake plate, the first layer plate, the second layer plate and the bottom plate.

[0023] Preferably, the outer end of the combined pipe is connected to a diverter plug, a water outlet hole is provided on the outlet pipe, a water inlet hole and an air outlet hole are provided on the diverter plug, the water inlet hole is connected to the water inlet pipe, and the air outlet hole is connected to the air outlet pipe.

[0024] A diversion plug is installed at the end of the combined pipe to facilitate water inlet and air outlet, and a water outlet hole is arranged on the water outlet pipe to facilitate water outlet.

[0025] Preferably, a step surface is provided on the inner wall of the installation cavity, and the first layer of the board and the second layer of the board are respectively installed on the two step surfaces.

[0026] The setting of the step surface enables the first and second layers of boards to be reliably positioned after being installed in the installation cavity, thereby ensuring the accuracy of the connection position and the space of the ventilation cavity between the first and second layers of boards.

[0027] Compared with the prior art, the beneficial effects of the present invention are as follows: (1) The circulating water-cooled deposition base of the present patent application utilizes water circulation to perform multi-layer cooling on the high-temperature gas in the airway, and the cooling effect is good. The high-temperature gas can be fully cooled when it is extracted from the vacuum chamber, so that the gas entering the vacuum pump is room temperature gas, reducing the pollution and damage of the high-temperature gas to the environment and equipment; (2) A spiral water flow channel is arranged in the blind plate cooling chamber, and the water flow channel has a long path, which can slow down the flow rate of the water flow, prolong the heat exchange time, and is beneficial to improving the cooling effect of the top blind plate; and the spiral water flow channel can make the water flow fully spread throughout the entire space, so as to achieve sufficient cooling of the top blind plate; (3) The gas in the ventilation chamber is sandwiched and cooled by the cooling water in the first cooling chamber and the second cooling chamber, and the gas in the air outlet pipe is sandwiched and cooled by the cooling water in the water inlet pipe and the water outlet pipe, so that the high-temperature gas can be greatly cooled in a short time. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a cross-sectional view of the present invention.

[0029] Figure 2 It is an exploded view of the present invention.

[0030] Figure 3 It is a partial cross-sectional view of the position of the diverter plug of the present invention.

[0031] Figure 4 It is a schematic diagram of the end face of the top boss of Example 1 of the present invention.

[0032] Figure 5 It is a schematic diagram of the end face of the top boss of Example 2 of the present invention.

[0033] Figure 6 It is a schematic diagram of the connection of the rotating seat of Example 2 of the present invention.

[0034] In the figure: 1, base body, 2, first layer plate, 3, second layer plate, 4, first cooling cavity, 5, ventilation cavity, 6, second cooling cavity, 7, top blind plate, 8, blind plate cooling cavity, 9, water flow channel, 10, top boss, 11, water retaining plate, 12, arc-shaped slot hole, 13, connecting hole, 14, descaling scraper, 15, rotating seat, 16, rotating column, 17, connecting plate, 18, inner sinking groove, 19, outer sinking groove, 20, flange, 21, rotating head, 22, sealing hole , 23. combined pipe, 24. water inlet pipe, 25. air outlet pipe, 26. water outlet pipe, 27. first mounting hole, 28. second mounting hole, 29. diverter plug, 30. water outlet hole, 31. water inlet hole, 32. air outlet hole, 33. air inlet column, 34. positioning convex ring, 35. water connecting column, 36. positioning boss, 37. positioning circular plate, 38. bottom plate, 39. third mounting hole, 40. air inlet plate, 41. outer positioning column, 42. inner positioning column, 43. step surface. DETAILED DESCRIPTION

[0035] The technical solution of the present invention is further described in detail below through specific embodiments and in conjunction with the accompanying drawings: Example 1: A circulating water-cooled deposition platform (see attached Figure 1 To Attachment Figure 4 ), including a base body 1, the base body 1 is a circular structure, an installation cavity is arranged in the base body 1, a first layer plate 2 and a second layer plate 3 are installed in the installation cavity to divide the installation cavity into a first cooling cavity 4, a ventilation cavity 5 and a second cooling cavity 6 which are adjacent to each other in sequence, the first cooling cavity 4 is close to the top of the base body 1, and the second cooling cavity 6 is close to the bottom of the base body 1.

[0036] A top blind plate 7 is installed at one end of the base body 1, a blind plate cooling cavity 8 is arranged between the top blind plate 7 and the base body, and a water channel 9 with a spiral structure is arranged in the blind plate cooling cavity 8. One end of the water channel 9 is connected to the water inlet pipe 24, and the other end of the water channel 9 is connected to the first cooling cavity 4. A top boss 10 is installed on the base body 1 and corresponds to the top blind plate 7, and a spiral water baffle 11 is arranged on the end surface of the top boss 10 to form a water channel 9 between the top boss 10 and the top blind plate 7. The spiral water channel 9 has a long path, can also slow down the flow rate of the water flow, prolong the heat exchange time, and is conducive to improving the cooling effect of the top blind plate 7. Moreover, the spiral water channel 9 can make the water flow fully fill the entire space, so as to achieve sufficient cooling of the top blind plate 7.

[0037] The inner end of the water channel 9 is connected to the water inlet pipe 24, and a plurality of arc-shaped slots 12 are arranged at intervals on the outer edge of the blind plate cooling chamber 8, and the arc-shaped slots 12 are connected to the first cooling chamber 4. A connecting hole 13 is arranged at the center of the top boss 10, and the end of the water inlet pipe 24 is tightly connected to the connecting hole 13, and eight arc-shaped slots 12 are evenly arranged on the circumference. The top boss 10 and the top blind plate 7 are detachably connected by screws, and a sealing ring is installed between the top boss 10 and the top blind plate 7, and the sealing ring is close to the outer edge of the top boss 10. This design allows timely replacement of parts when the surface roughness of the top blind plate 7 is poor or other defects occur during use, without replacing the entire device, thereby improving the service life of the product. The circulating cooling water enters the water channel 9 from the inner end of the water channel 9, flows through the water channel 9 and then flows out from the outer end of the water channel 9, and then flows into the first cooling chamber 4 through the arc-shaped slots 12. A plurality of arc-shaped slots 12 are evenly distributed around the circumference, which is conducive to the uniform flow of water to the first cooling chamber 4 and ensures the cooling effect.

[0038] A combined pipe 23 is installed at the other end of the base body 1. The combined pipe 23 includes a water inlet pipe 24, an air outlet pipe 25 and a water outlet pipe 26 which are sequentially mounted. The air outlet pipe 25 is placed between the water inlet pipe 24 and the water outlet pipe 26. The cavity between the inner wall of the water outlet pipe 26 and the outer wall of the air outlet pipe 25 is used for water outlet. The cavity between the inner wall of the air outlet pipe 25 and the outer wall of the water inlet pipe 24 is used for air outlet. The water inlet pipe 24 is used for circulating cooling water. The water inlet pipe 24, the blind plate cooling cavity 8, the first cooling cavity 4, the second cooling cavity 6, and the water outlet pipe 26 are sequentially connected, and the ventilation cavity 5 is connected with the air outlet pipe 25. A first mounting hole 27 is provided on the first layer board 2, and a second mounting hole 28 is provided on the second layer board 3. The water inlet pipe 24 passes through the first mounting hole 27, and the water inlet pipe 24 is sealed and connected to the first mounting hole 27. The air outlet pipe 25 is sealed and connected to the second mounting hole 28 so that the air outlet pipe 25 is connected with the ventilation cavity 5.

[0039] The outer end of the combined pipe 23 is connected to the diverter plug 29, and a water outlet hole 30 is provided on the water outlet pipe 26. A water inlet hole 31 and an air outlet hole 32 are provided on the diverter plug 29. The water inlet hole 31 is connected to the water inlet pipe 24, and the air outlet hole 32 is connected to the air outlet pipe 25. The water inlet hole 31 is provided at the end of the diverter plug 29, and a plurality of air outlet holes 32 are evenly arranged around the circumference. The air outlet holes 32 are L-shaped structures, and one end of the air outlet hole 32 extends to the side wall of the diverter plug 29, and the other end of the air outlet hole 32 extends to the inner end of the diverter plug 29 to communicate with the air outlet pipe 25. A plurality of water outlet pipes 26 are evenly arranged around the circumference.

[0040] A number of hollow air inlet columns 33 are installed on the base body 1, and the air inlet columns 33 are connected to the ventilation cavity 5. A positioning convex ring 34 is set on the outer wall of the air inlet column 33, and the convex ring is supported between the first layer plate 2 and the inner wall of the first cooling cavity 4. Six air inlet columns 33 are evenly arranged in the circumference, and the ventilation cavity 5 is connected to the air inlet columns 33 near the outer edge. A number of hollow water-passing connecting columns 35 are connected between the first cooling cavity 4 and the second cooling cavity 6. A positioning boss 36 is set on the outer wall of the water-passing connecting column 35, and the positioning boss 36 is supported between the first layer plate 2 and the second layer plate 3. Twelve water-passing connecting columns 35 are evenly arranged in the circumference, and the water-passing connecting columns 35 are connected to the first cooling cavity 4 and the second cooling cavity 6 near the outer edge. The setting of the hollow air inlet column 33 is conducive to the airflow entering the ventilation cavity 5. The convex ring is supported between the first layer plate 2 and the inner wall of the first cooling cavity 4, realizing the reliable positioning of the first layer plate 2. The hollow water-through connecting column 35 realizes the connection between the first cooling cavity 4 and the second cooling cavity 6, and the positioning boss 36 realizes the positioning of the first layer board 2 and the second layer board 3, ensuring the distance between the first layer board 2 and the second layer board 3, thereby ensuring the space size of the ventilation cavity 5.

[0041] The base body 1 includes a positioning circular plate 37, which is an annular structure. One end of the positioning circular plate 37 is fastened to the bottom plate 38. The bottom plate 38 is provided with a third mounting hole 39. The end of the water outlet pipe 26 is fastened to the third mounting hole 39. The other end of the positioning circular plate 37 is fastened to the air inlet plate 40. The air inlet plate 40 is an annular structure. The outer edge of the air inlet plate 40 is fastened to the positioning circular plate 37. The inner edge of the air inlet plate 40 is fastened to the top boss 10. A convex ring is provided on the edge of the top boss 10. The top boss 10 is fastened to the inner edge of the air inlet plate 40 through the convex ring. The first layer plate 2 and the second layer plate 3 are both placed between the bottom plate 38 and the air inlet plate 40. A plurality of inner positioning columns 42 and a plurality of outer positioning columns 41 are installed on the bottom plate 38. The inner positioning columns 42 are plug-connected with the first layer plate 2 and the second layer plate 3. The outer positioning columns 41 are plug-connected with the first layer plate 2, the second layer plate 3 and the air inlet plate 40. A step surface 43 is provided on the inner wall of the installation cavity, and the first layer board 2 and the second layer board 3 are respectively installed at the two step surfaces 43. The setting of the step surface 43 enables the first layer board 2 and the second layer board 3 to be reliably positioned after being installed in the installation cavity, ensuring the accuracy of the connection position and the space of the ventilation cavity 5 between the first layer board 2 and the second layer board 3. The setting of the inner positioning column 42 and the outer positioning column 41 realizes the accuracy and reliability of the connection position of the air intake plate 40, the first layer board 2, the second layer board 3, and the bottom plate 38.

[0042] like Figure 1 , Figure 2 As shown in the figure, the scheme of the present invention is an umbrella-shaped multi-layer structure scheme, which is divided into two parts. The first part is the base body 1, and the second part is the circulating water cooling water flow channel and the gas flow channel. The base body 1 has a maximum outer diameter of 850mm and a height of 130mm. The height of the whole scheme is about 954mm. The top blind plate 7 and the top boss 10 form an internally closed blind plate cooling chamber 8, as shown in FIG. Figure 4 As shown, a water baffle 11 is arranged on the top boss 10 to form a spiral water passage 9, so that water can flow in a rotating manner along the water baffle 11 in sequence when flowing in.

[0043] During operation, air is evacuated from the air outlet pipe 25, and the air flows from the ventilation cavity 5 toward the air outlet pipe 25. Circulating cooling water enters the blind plate cooling cavity 8 from the water inlet pipe 24. During the process of preparing diamond crystals by MPCVD, the substrate placed on the top of the base for the growth of single crystal diamond will be accompanied by high temperature, so the substrate needs to be cooled. The first cooling cavity 4 directly cools the top blind plate 7, thereby cooling the substrate, and the cooling effect is good.

[0044] The circulating cooling water flows from the blind plate cooling chamber 8 to the first cooling chamber 4, and from the first cooling chamber 4 to the second cooling chamber 6, and the ventilation chamber 5 is sandwiched between the first cooling chamber 4 and the second cooling chamber 6. The high-temperature gas in the ventilation chamber 5 is cooled by the circulating cooling water in a sandwiched manner, so the heat exchange area is large and the cooling effect is good.

[0045] The circulating cooling water flows from the second cooling chamber 6 to the water outlet pipe 26, and the air outlet pipe 25 is arranged between the water inlet pipe 24 and the water outlet pipe 26. The gas in the air outlet pipe 25 is sandwiched and cooled by the circulating cooling water, so the heat exchange area is large and the cooling effect is good.

[0046] During the operation of the MPCVD equipment, the high-temperature gas in the vacuum chamber can be fully cooled through the ventilation chamber 5 and the exhaust pipe 25 when being drawn out of the vacuum chamber, so that the gas entering the vacuum pump is room temperature gas, reducing the pollution and damage of the high-temperature gas to the environment and equipment. In addition, this cooling method through the circulation of cooling water is more cost-effective, and the cooling water can be reused, reducing the waste of resources. In addition, this sandwich cooling method enables the high-temperature gas to be greatly cooled in a short time, which can effectively increase the gas flow rate, improve work efficiency, and reduce working time.

[0047] Example 2: A circulating water-cooled deposition platform (see attached Figure 5 , Attachment Figure 6 ), including a base body 1, the base body 1 is a circular structure, an installation cavity is arranged in the base body 1, a first layer plate 2 and a second layer plate 3 are installed in the installation cavity to divide the installation cavity into a first cooling cavity 4, a ventilation cavity 5 and a second cooling cavity 6 which are adjacent to each other in sequence, the first cooling cavity 4 is close to the top of the base body 1, and the second cooling cavity 6 is close to the bottom of the base body 1.

[0048] A top blind plate 7 is installed at one end of the base body 1, a blind plate cooling cavity 8 is arranged between the top blind plate 7 and the base body, and a water channel 9 with a spiral structure is arranged in the blind plate cooling cavity 8. One end of the water channel 9 is connected to the water inlet pipe 24, and the other end of the water channel 9 is connected to the first cooling cavity 4. A top boss 10 is installed on the base body 1 and corresponds to the top blind plate 7, and a spiral water baffle 11 is arranged on the end surface of the top boss 10 to form a water channel 9 between the top boss 10 and the top blind plate 7. The spiral water channel 9 has a long path, can also slow down the flow rate of the water flow, prolong the heat exchange time, and is conducive to improving the cooling effect of the top blind plate 7. Moreover, the spiral water channel 9 can make the water flow fully fill the entire space, so as to achieve sufficient cooling of the top blind plate 7.

[0049] The inner end of the water channel 9 is connected to the water inlet pipe 24, and a plurality of arc-shaped slots 12 are arranged at intervals on the outer edge of the blind plate cooling chamber 8, and the arc-shaped slots 12 are connected to the first cooling chamber 4. A connecting hole 13 is arranged at the center of the top boss 10, and the end of the water inlet pipe 24 is tightly connected to the connecting hole 13, and eight arc-shaped slots 12 are evenly arranged on the circumference. The top boss 10 and the top blind plate 7 are detachably connected by screws, and a sealing ring is installed between the top boss 10 and the top blind plate 7, and the sealing ring is close to the outer edge of the top boss 10. This design allows timely replacement of parts when the surface roughness of the top blind plate 7 is poor or other defects occur during use, without replacing the entire device, thereby improving the service life of the product. The circulating cooling water enters the water channel 9 from the inner end of the water channel 9, flows through the water channel 9 and then flows out from the outer end of the water channel 9, and then flows into the first cooling chamber 4 through the arc-shaped slots 12. A plurality of arc-shaped slots 12 are evenly distributed around the circumference, which is conducive to the uniform flow of water to the first cooling chamber 4 and ensures the cooling effect.

[0050] A spiral descaling scraper 14 is arranged on the rear side of the top blind plate 7, and the descaling scraper 14 is fitted with the water retaining plate 11 on the top boss 10. A rotating seat 15 is rotatably installed on the top blind plate 7, and the two ends respectively pass through the two ends of the top blind plate 7, and the descaling scraper 14 is tightly connected to the rotating seat 15. The rotating seat 15 includes a rotating column 16 and a connecting plate 17, and an inner sinking groove 18 and an outer sinking groove 19 are respectively arranged on both sides of the top blind plate 7, and a sealing hole 22 is provided between the inner sinking groove 18 and the outer sinking groove 19, and the connecting plate 17 is installed in the inner sinking groove 18, and a flange 20 is arranged on the edge of the connecting plate 17, and the flange 20 is tightly connected to the descaling scraper 14, and the rotating column 16 is sealed and connected to the sealing hole 22, and a rotating head 21 is tightly connected to the rotating column 16, and the rotating head 21 is arranged in the outer sinking groove 19. Since the gap between the top blind plate 7 and the top boss 10 is small, the axial distance of the water channel 9 is small and blockage is prone to occur. The rotating head 21 is rotated to rotate the descaling scraper 14, thereby scraping off the scale in the water channel 9 to prevent the scale from clogging the water channel 9.

[0051] A combined pipe 23 is installed at the other end of the base body 1. The combined pipe 23 includes a water inlet pipe 24, an air outlet pipe 25 and a water outlet pipe 26 which are sequentially mounted. The air outlet pipe 25 is placed between the water inlet pipe 24 and the water outlet pipe 26. The cavity between the inner wall of the water outlet pipe 26 and the outer wall of the air outlet pipe 25 is used for water outlet. The cavity between the inner wall of the air outlet pipe 25 and the outer wall of the water inlet pipe 24 is used for air outlet. The water inlet pipe 24 is used for circulating cooling water. The water inlet pipe 24, the blind plate cooling cavity 8, the first cooling cavity 4, the second cooling cavity 6, and the water outlet pipe 26 are sequentially connected, and the ventilation cavity 5 is connected with the air outlet pipe 25. A first mounting hole 27 is provided on the first layer board 2, and a second mounting hole 28 is provided on the second layer board 3. The water inlet pipe 24 passes through the first mounting hole 27, and the water inlet pipe 24 is sealed and connected to the first mounting hole 27. The air outlet pipe 25 is sealed and connected to the second mounting hole 28 so that the air outlet pipe 25 is connected with the ventilation cavity 5.

[0052] The outer end of the combined pipe 23 is connected to the diverter plug 29, and a water outlet hole 30 is provided on the water outlet pipe 26. A water inlet hole 31 and an air outlet hole 32 are provided on the diverter plug 29. The water inlet hole 31 is connected to the water inlet pipe 24, and the air outlet hole 32 is connected to the air outlet pipe 25. The water inlet hole 31 is provided at the end of the diverter plug 29, and a plurality of air outlet holes 32 are evenly arranged around the circumference. The air outlet holes 32 are L-shaped structures, and one end of the air outlet hole 32 extends to the side wall of the diverter plug 29, and the other end of the air outlet hole 32 extends to the inner end of the diverter plug 29 to communicate with the air outlet pipe 25. A plurality of water outlet pipes 26 are evenly arranged around the circumference.

[0053] A number of hollow air inlet columns 33 are installed on the base body 1, and the air inlet columns 33 are connected to the ventilation cavity 5. A positioning convex ring 34 is set on the outer wall of the air inlet column 33, and the convex ring is supported between the first layer plate 2 and the inner wall of the first cooling cavity 4. Six air inlet columns 33 are evenly arranged in the circumference, and the ventilation cavity 5 is connected to the air inlet columns 33 near the outer edge. A number of hollow water-passing connecting columns 35 are connected between the first cooling cavity 4 and the second cooling cavity 6. A positioning boss 36 is set on the outer wall of the water-passing connecting column 35, and the positioning boss 36 is supported between the first layer plate 2 and the second layer plate 3. Twelve water-passing connecting columns 35 are evenly arranged in the circumference, and the water-passing connecting columns 35 are connected to the first cooling cavity 4 and the second cooling cavity 6 near the outer edge. The setting of the hollow air inlet column 33 is conducive to the airflow entering the ventilation cavity 5. The convex ring is supported between the first layer plate 2 and the inner wall of the first cooling cavity 4, realizing the reliable positioning of the first layer plate 2. The hollow water-through connecting column 35 realizes the connection between the first cooling cavity 4 and the second cooling cavity 6, and the positioning boss 36 realizes the positioning of the first layer board 2 and the second layer board 3, ensuring the distance between the first layer board 2 and the second layer board 3, thereby ensuring the space size of the ventilation cavity 5.

[0054] The base body 1 includes a positioning circular plate 37, which is an annular structure. One end of the positioning circular plate 37 is fastened to the bottom plate 38. The bottom plate 38 is provided with a third mounting hole 39. The end of the water outlet pipe 26 is fastened to the third mounting hole 39. The other end of the positioning circular plate 37 is fastened to the air inlet plate 40. The air inlet plate 40 is an annular structure. The outer edge of the air inlet plate 40 is fastened to the positioning circular plate 37. The inner edge of the air inlet plate 40 is fastened to the top boss 10. A convex ring is provided on the edge of the top boss 10. The top boss 10 is fastened to the inner edge of the air inlet plate 40 through the convex ring. The first layer plate 2 and the second layer plate 3 are both placed between the bottom plate 38 and the air inlet plate 40. A plurality of inner positioning columns 42 and a plurality of outer positioning columns 41 are installed on the bottom plate 38. The inner positioning columns 42 are plug-connected with the first layer plate 2 and the second layer plate 3. The outer positioning columns 41 are plug-connected with the first layer plate 2, the second layer plate 3 and the air inlet plate 40. A step surface 43 is provided on the inner wall of the installation cavity, and the first layer board 2 and the second layer board 3 are respectively installed at the two step surfaces 43. The setting of the step surface 43 enables the first layer board 2 and the second layer board 3 to be reliably positioned after being installed in the installation cavity, ensuring the accuracy of the connection position and the space of the ventilation cavity 5 between the first layer board 2 and the second layer board 3. The setting of the inner positioning column 42 and the outer positioning column 41 realizes the accuracy and reliability of the connection position of the air intake plate 40, the first layer board 2, the second layer board 3, and the bottom plate 38.

[0055] like Figure 1 , Figure 2 As shown in the figure, the scheme of the present invention is an umbrella-shaped multi-layer structure scheme, which is divided into two parts. The first part is the base body 1, and the second part is the circulating water cooling water flow channel and the gas flow channel. The base body 1 has a maximum outer diameter of 850mm and a height of 130mm. The height of the whole scheme is about 954mm. The top blind plate 7 and the top boss 10 form an internally closed blind plate cooling chamber 8, as shown in FIG. Figure 4 As shown, a water baffle 11 is arranged on the top boss 10 to form a spiral water passage 9, so that water can flow in a rotating manner along the water baffle 11 in sequence when flowing in.

[0056] During operation, air is evacuated from the air outlet pipe 25, and the air flows from the ventilation cavity 5 toward the air outlet pipe 25. Circulating cooling water enters the blind plate cooling cavity 8 from the water inlet pipe 24. During the process of preparing diamond crystals by MPCVD, the substrate placed on the top of the base for the growth of single crystal diamond will be accompanied by high temperature, so the substrate needs to be cooled. The first cooling cavity 4 directly cools the top blind plate 7, thereby cooling the substrate, and the cooling effect is good.

[0057] The circulating cooling water flows from the blind plate cooling chamber 8 to the first cooling chamber 4, and from the first cooling chamber 4 to the second cooling chamber 6, and the ventilation chamber 5 is sandwiched between the first cooling chamber 4 and the second cooling chamber 6. The high-temperature gas in the ventilation chamber 5 is cooled by the circulating cooling water in a sandwiched manner, so the heat exchange area is large and the cooling effect is good.

[0058] The circulating cooling water flows from the second cooling chamber 6 to the water outlet pipe 26, and the air outlet pipe 25 is arranged between the water inlet pipe 24 and the water outlet pipe 26. The gas in the air outlet pipe 25 is sandwiched and cooled by the circulating cooling water, so the heat exchange area is large and the cooling effect is good.

[0059] During the operation of the MPCVD equipment, the high-temperature gas in the vacuum chamber can be fully cooled through the ventilation chamber 5 and the exhaust pipe 25 when being drawn out of the vacuum chamber, so that the gas entering the vacuum pump is room temperature gas, reducing the pollution and damage of the high-temperature gas to the environment and equipment. In addition, this cooling method through the circulation of cooling water is more cost-effective, and the cooling water can be reused, reducing the waste of resources. In addition, this sandwich cooling method enables the high-temperature gas to be greatly cooled in a short time, which can effectively increase the gas flow rate, improve work efficiency, and reduce working time.

[0060] The above-described embodiments are only preferred solutions of the present invention and are not intended to limit the present invention in any form. Other variations and modifications are possible without exceeding the technical solutions described in the claims.

Claims

1. A circulating water-cooled deposition base, comprising a base body, characterized in that: An installation cavity is arranged in the base body, and a first layer plate and a second layer plate are installed in the installation cavity to divide the installation cavity into a first cooling cavity, a ventilation cavity and a second cooling cavity which are adjacent to each other in sequence. A top blind plate is installed at one end of the base body, and a blind plate cooling cavity is arranged between the top blind plate and the base body. A combined pipe is installed at the other end of the base body, and the combined pipe includes a water inlet pipe, an air outlet pipe and a water outlet pipe which are sequentially mounted. The water inlet pipe, the blind plate cooling cavity, the first cooling cavity, the second cooling cavity and the water outlet pipe are sequentially connected, and the ventilation cavity is connected to the air outlet pipe.

2. The circulating water-cooled deposition platform according to claim 1, characterized in that: A water passage with a spiral structure is arranged in the blind plate cooling cavity.

3. The circulating water-cooled deposition platform according to claim 2, characterized in that: A top boss is mounted on the base body and the top blind plate correspondingly, and a spiral water baffle is arranged on the end surface of the top boss to form a water flow channel between the top boss and the top blind plate.

4. The circulating water-cooled deposition platform according to claim 2, characterized in that: The inner end of the water passage is communicated with the water inlet pipe, and a plurality of arc-shaped slots are arranged at intervals on the outer edge of the blind plate cooling cavity in the circumferential direction, and the arc-shaped slots are communicated with the first cooling cavity.

5. The circulating water-cooled deposition platform according to claim 1, characterized in that: A plurality of hollow air inlet columns are installed on the base body, the air inlet columns are connected with the ventilation cavity, and a positioning convex ring is arranged on the outer wall of the air inlet column, and the convex ring is supported between the first layer plate and the inner wall of the first cooling cavity.

6. The circulating water-cooled deposition platform according to claim 1, characterized in that: A plurality of hollow water-through connecting columns are connected between the first cooling cavity and the second cooling cavity. Positioning bosses are arranged on the outer walls of the water-through connecting columns. The positioning bosses are supported between the first and second layers of the plate.

7. The circulating water-cooled deposition platform according to claim 1, characterized in that: The base body comprises a positioning circular plate, one end of which is fastened to the bottom plate, and the other end of which is fastened to the air intake plate. The first layer plate and the second layer plate are both arranged between the bottom plate and the air intake plate.

8. The circulating water-cooled deposition platform according to claim 7, characterized in that: A plurality of inner positioning columns and a plurality of outer positioning columns are installed on the bottom plate. The inner positioning columns are plug-in connected with the first layer plate and the second layer plate, and the outer positioning columns are plug-in connected with the first layer plate, the second layer plate and the air intake plate.

9. A circulating water-cooled deposition platform according to any one of claims 1 to 8, characterized in that: The outer end of the combined pipe is connected to a diversion plug, a water outlet hole is arranged on the water outlet pipe, a water inlet hole and an air outlet hole are arranged on the diversion plug, the water inlet hole is communicated with the water inlet pipe, and the air outlet hole is communicated with the air outlet pipe.

10. A circulating water-cooled deposition platform according to any one of claims 1 to 8, characterized in that: A step surface is arranged on the inner wall of the installation cavity, and the first layer of the board and the second layer of the board are respectively installed on the two step surfaces.

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