A nickel plating device for an electroplating bottom plate

Abstract

The present invention discloses a nickel plating device for an electroplating bottom plate, which includes a nickel plating table. A number of working pools are arranged on the nickel plating table, and a conveying mechanism is provided. The conveying mechanism is used to drive the hanging rack to move to a designated working pool. A closed space is arranged inside the nickel plating table, and each working pool and the conveying mechanism are located inside the closed space for working; a door plate is arranged at the opening of each working pool, and the door plate is configured to seal the working pool when the hanging rack is completely placed inside the working pool; a diversion channel is opened near the opening in each working pool, and an exhaust gas treatment device is arranged inside the nickel plating table. The exhaust gas treatment device is communicated with the diversion channel. The entire nickel plating work is completed inside the closed space, realizing fully automatic closed production. Through the cooperation of the arranged diversion channel, air flow recovery passage and exhaust gas treatment device, the exhaust gas inside the working pool and the exhaust gas overflowing outside the working pool are guided and treated in all directions, realizing zero-pollution emission and improving the safety of the working environment.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor nickel plating, and specifically to a nickel plating device for an electroplating bottom plate. Background Art

[0002] Semiconductors refer to materials whose electrical conductivity at room temperature is between that of conductors and insulators; semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors; regardless of the perspective of technology or economic development, the importance of semiconductors is extremely great. Most electronic products, such as the core units in computers, mobile phones or digital recorders, are extremely closely related to semiconductors. The raw material used is an oxygen-free copper bottom plate, the material is oxygen-free copper, and it is processed through processes such as extrusion, stamping, machining, stress relief, and cleaning; the processed oxygen-free copper bottom plate goes through: shot peening → nickel plating → machining to remove nickel → silver plating → warping → film pasting → sintering and assembly → inspection → packaging → finished product. Among them, the nickel plating process is: hanging → ultrasonic degreasing → cleaning → electrolytic degreasing → cleaning → acid activation → cleaning → impact nickel → cleaning → electroless nickel plating → cleaning → drying → unloading → drying. In the existing nickel plating process, the hanging rack is clamped and transported by a clamping and transportation device to each treatment tank for corresponding processes. During the whole process, the treatment tanks are all in an open state or a semi-open state, and the waste gas generated during the treatment process and the waste gas overflowing from the treatment tanks are not effectively treated, which is easy to cause pollution. Therefore, there is an urgent need for a nickel plating device for an electroplating bottom plate to solve the above problems. Summary of the Invention

[0003] The purpose of the present invention is to provide a nickel plating device for an electroplating bottom plate, which can effectively solve the problems existing in the above background art.

[0004] To solve the above technical problems, the present invention adopts the following technical solutions: A nickel plating device for an electroplating bottom plate includes a nickel plating table, on which several working tanks are provided, and a conveying mechanism is provided. The conveying mechanism is used to drive the hanging rack to move to the designated working tank. A closed space is provided inside the nickel plating table, and each working tank and the conveying mechanism are located inside the closed space for working; and

[0005] A door plate is provided at the opening of each working tank, and the door plate is configured to seal the working tank when the hanging rack is completely placed inside the working tank;

[0006] A diversion channel is opened near the opening of each working tank. An exhaust gas treatment device is provided inside the nickel plating table. The exhaust gas treatment device is communicated with the diversion channel and is used to guide the airflow inside the working tank to flow in a designated direction;

[0007] The conveying mechanism is arranged above the working pool and includes a circulating slideway and a plurality of sliders arranged in the circulating slideway. Each slider can slide along the circulating slideway to traverse all the working pools, and a clamping structure is installed on each slider.

[0008] A transfer mechanism is installed on one side of each working pool. The transfer mechanism includes:

[0009] A pallet for supporting the hanging rack, and the pallet is configured to be spliced with the hanging rack in the horizontal direction when it extends into the working pool.

[0010] A vibration structure configured to drive the pallet extending into the working pool to vibrate in the horizontal direction.

[0011] A sliding structure connected to the pallet for driving the pallet to extend into the working pool or move towards the conveying mechanism.

[0012] Preferably, the diversion channel includes:

[0013] An air inlet hole located at the opening of the working pool and communicating with the working pool.

[0014] A diversion chamber communicating with the air inlet hole, and two slopes are arranged in the diversion chamber. The two slopes are arranged in an inverted "entry" shape, and a break is arranged at the adjacent position of the two slopes; the air flow detaches from the diversion chamber through the break.

[0015] A connecting channel for connecting the break and the waste gas treatment equipment.

[0016] Preferably, one end of a slope far from the intersection extends to a position close to the air inlet hole, and the other end of the other slope far from the intersection extends to one side of the working pool, and a return hole is opened at the corresponding position of the working pool.

[0017] Preferably, an air flow recovery channel is opened at the top of the nickel plating table, the air flow recovery channel covers all the working pools, and the air flow recovery channel is connected to the waste gas treatment equipment through a connecting pipe.

[0018] Preferably, the clamping structure includes a U-shaped block, a limiting mechanism is arranged in the U-shaped block, a connecting rod is arranged on the hanging rack corresponding to the U-shaped block, and the limiting mechanism is configured to lock or unlock the connecting rod inserted into the U-shaped block.

[0019] Preferably, the limiting mechanism includes at least one cross bar arranged parallel to the opening of the U-shaped block. The cross bar is slidably installed in the U-shaped block, and one end of the cross bar extends into the notch of the U-shaped block. A triangular block is installed at the extending end of the U-shaped block. A spring is arranged on the cross bar, and the spring drives the cross bar to move towards the notch direction of the U-shaped block.

[0020] One end of the connecting rod towards the U-shaped block is installed with a first frustum block. A second frustum block is coaxially installed on the connecting rod below the first frustum block. The first frustum block and the second frustum block are symmetrically arranged, and the second frustum block is slidably installed on the connecting rod.

[0021] Preferably, the supporting plate is mainly composed of two symmetrically arranged supporting rods. The sliding structure includes a lead screw arranged in the vertical direction and a sliding block with a lead screw nut arranged on the lead screw. Through holes are respectively opened on the sliding block at positions corresponding to the two supporting rods. The end of the supporting rod passes through the through hole and is slidably arranged horizontally in the through hole.

[0022] Both sides of the working pool are provided with channels in the vertical direction. At least one of the channels is provided with a top splitting block, which is configured to squeeze the two supporting rods to move away from each other when the two supporting rods enter the channel. And

[0023] A splicing block is installed on each of the supporting rods. The top end of the hanging rack is in an inverted "mountain" shape structure. The two supporting rods are respectively inserted into the two notches of the "mountain" shape structure, and splicing holes are opened at the positions corresponding to the splicing blocks in the notches.

[0024] Preferably, the end of the supporting rod passes through the through hole and extends to one side of the vibrating structure. The vibrating structure includes a vibrating motor, and a cam is installed at the end of the vibrating motor. The cam is configured to periodically squeeze the supporting rod when rotating.

[0025] Preferably, the cam is staggered from the end of the supporting rod in the initial state and coincides with the end of the supporting rod after top splitting.

[0026] Preferably, a square frame is sleeved on the two supporting rods, and the square frame is used to limit the two supporting rods from sliding in the direction away from each other.

[0027] Beneficial effects: A closed space is arranged inside the nickel plating table in the present invention, and the entire nickel plating work is completed in the closed space, realizing fully automatic closed production. Through the cooperation of the arranged diversion channel, air flow recovery passage and waste gas treatment equipment, the waste gas in the working pool and the waste gas overflowing outside the working pool are guided and treated in all directions, realizing zero pollution emission and improving the safety of the working environment.

[0028] In addition, in the present invention, by arranging a limiting mechanism on the clamping structure, the locking and unlocking operations can be automatically performed according to the moving distance on the hanging rack, realizing the connection and separation of the hanging rack and the clamping structure. When used in cooperation with the transfer mechanism, the transfer mechanism is utilized to fix the hanging rack to the clamping structure or transfer it to the working pool for corresponding process treatment. Moreover, there is no need to add a power structure to the clamping structure, which saves costs and reduces the cooperative operation between power structures, improving work efficiency. Among them, through the action of the top split block, when the transfer mechanism moves down to the working pool, the two support rods are automatically separated. On the one hand, the support rods are fixed to the hanging rack to improve its stability. On the other hand, in cooperation with the vibration structure, it can drive the support plate deep into the working pool to vibrate in the horizontal direction, improving the nickel plating effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The drawings are used to provide a further understanding of the present invention and constitute a part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation to the present invention.

[0030] In the drawings:

[0031] Figure 1 is a schematic structural diagram of the nickel plating device of the present invention;

[0032] Figure 2 is a schematic structural diagram of the interior of the nickel plating device of the present invention;

[0033] Figure 3 is a schematic structural diagram of the diversion channel of the working pool of the present invention;

[0034] Figure 4 is a schematic structural diagram of the internal circulation slideway of the nickel plating device of the present invention;

[0035] Figure 5 is a schematic structural diagram of a single working pool of the present invention;

[0036] Figure 6 is a plan view of a single working pool of the present invention;

[0037] Figure 7 is a schematic structural diagram of the transfer mechanism of the present invention;

[0038] Figure 8 is a plan view of the transfer mechanism of the present invention;

[0039] Figure 9 is a schematic structural diagram of the square frame of the present invention;

[0040] Figure 10 is a schematic structural diagram of the clamping structure of the present invention;

[0041] Reference numerals in the figure: 1, nickel plating table; 2, working pool; 3, enclosed space; 4, door panel; 5, air inlet hole; 6, shunt chamber; 7, ramp; 8, fracture; 9, connection channel; 10, waste gas treatment equipment; 11, return hole; 12, air flow recovery channel; 13, circulation slideway; 14, slider; 15, support rod; 16, lead screw; 17, sliding block; 18, through hole; 19, groove; 20, top split block; 21, hanging rack; 22, notch; 23, square frame; 24, elastic structure; 25, splicing block; 26, splicing hole; 27, vibration motor; 28, cam; 29, U-shaped block; 30, cross bar; 31, spring; 32, triangular block; 33, connecting rod; 34, first frustum block; 35, second frustum block. Detailed implementation manners

[0042] The embodiments of the present invention will be described below with reference to the accompanying drawings in the embodiments of the present invention. The terms used in the implementation manners of the present invention are only used to explain the specific embodiments of the present invention, and are not intended to limit the present invention. The embodiments of the present application will be described below with reference to the accompanying drawings.

[0043] Embodiment: As Figure 1 - Figure 2 shown, a nickel plating device for an electroplating bottom plate includes a nickel plating table 1, a plurality of working pools 2 are arranged on the nickel plating table 1, and a conveying mechanism is arranged. The working pools 2 include a cleaning pool, an acid activation pool, an impact nickel pool, a chemical nickel plating pool, etc.; the conveying mechanism is used to drive the hanging rack 21 to move to a designated working pool 2 for corresponding process operations;

[0044] Refer to Figure 1 - Figure 2 shown, an enclosed space 3 is arranged inside the nickel plating table 1, and each working pool 2 and the conveying mechanism are located inside the enclosed space 3 for work; full-closed work is realized; a door panel 4 is arranged at the opening of each working pool 2, and the door panel 4 is configured to seal the working pool 2 when the hanging rack 21 is completely placed inside the working pool 2; for the drive of the door panel 4, a corresponding power structure can be configured according to requirements, such as a lead screw 16 drive structure, a hydraulic telescopic structure, etc. When the hanging rack 21 penetrates into the corresponding working pool 2 for treatment, the door panel 4 is controlled by the above power structure to close the opening of the working pool 2, and a sealed space is further formed inside the working pool 2. Refer to Figure 2 shown, a double-door structure can be adopted for the door panel 4, and door panels 4 are arranged on both sides of the working pool 2 to reduce the driving stroke of the drive structure.

[0045] Based on the above, refer to Figure 1 and 3 shown, a diversion channel is opened near the opening in each working pool 2, and waste gas treatment equipment 10 is arranged inside the nickel plating table 1. The waste gas treatment equipment 10 is communicated with the diversion channel and is used to guide the air flow inside the working pool 2 to flow in a specified direction; through the action of the diversion channel, the waste gas inside the working pool 2 is guided to the waste gas treatment equipment 10 for treatment;

[0046] In a specific embodiment, referring to Figure 3 As shown, the diversion channel includes an air inlet hole 5 located at the opening of the working pool 2 and communicating with the working pool 2, and a diversion chamber 6. The diversion chamber 6 communicates with the air inlet hole 5, and two slopes 7 are arranged in the diversion chamber 6. The two slopes 7 are arranged in an inverted "entry" shape, and a break 8 is arranged near the two slopes 7; the air flow breaks away from the diversion chamber 6 through the break 8; and a connection channel 9 for connecting the break 8 and the waste gas treatment device 10; during processing, the waste gas in the working pool 2 rises to the opening and flows into the diversion chamber 6 through the air inlet hole 5. In the diversion chamber 6, the waste gas first flows along one slope 7, that is, Figure 3 the upper slope 7 in

[0047] In the above structure, one end of a slope 7 away from the intersection extends to near the air inlet hole 5, and the other end of the other slope 7 away from the intersection extends to one side of the working pool 2, and a return hole 11 is opened at the corresponding position of the working pool 2; in addition to guiding the waste gas to flow, through the action of the two slopes 7, the waste gas can be cooled, and the liquid generated after cooling is drained to the return hole 11 through the inclined slopes 7, and then reflows into the working pool 2 through the return hole 11; and referring to Figure 3 As shown, the extended section of one slope 7 is bent upward, which can prevent the cooled liquid from entering the connection channel 9. Through the above-mentioned diversion chamber 6, the waste gas can be guided for treatment, and the temperature of the waste gas can be reduced, and the coolant can be recovered.

[0048] On the basis of the above, in a specific embodiment, an air flow recovery channel 12 is also opened at the top of the nickel plating table 1. The air flow recovery channel 12 covers all the working pools 2, and the air flow recovery channel 12 is connected to the waste gas treatment device 10 through a connecting pipe. Through the air flow recovery channel 12, the waste gas overflowing after the door panel 4 is opened can be recovered, so as to realize the all-round waste gas recovery work.

[0049] For the conveying mechanism, referring to Figure 4 As shown, it is arranged above the working pool 2 and includes a circulating slideway 13 and a plurality of sliders 14 arranged in the circulating slideway 13. The function of the circulating slideway 13 is to provide each slider 14 to slide through all the working pools 2. The circulating slideway 13 is an annular slideway, a part of which is arranged inside the nickel plating table 1 and a part faces the working pool 2. Referring to Figure 4As shown, the slideway and slider 14 facing one side of the working pool 2 are shown. The slider 14 can reciprocate on each working pool 2 along the circular slideway 13. Each slider 14 slides synchronously, and a clamping structure is installed on each slider 14. Through the clamping structure, the hanging rack 21 can be clamped and transported between each working pool 2.

[0050] For the transportation of the hanging rack 21 between the conveying mechanism and the working pool 2, in this embodiment, a transfer mechanism is installed on one side of each working pool 2. Refer to Figure 5 - Figure 6 As shown, the transfer mechanism includes a pallet and a sliding structure. The pallet is used to support the hanging rack 21, and the pallet is configured to be spliced with the hanging rack 21 in the horizontal direction when it goes deep into the working pool 2. The sliding structure is connected to the pallet and is used to drive the pallet to go deep into the working pool 2 or move towards the conveying mechanism.

[0051] In a specific embodiment, refer to Figure 3 、 Figure 7 - Figure 8 As shown, the pallet is mainly composed of two symmetrically arranged support rods 15. The sliding structure includes a lead screw 16 arranged in the vertical direction and a sliding block 17 equipped with a lead screw nut on the lead screw 16. Through holes 18 are opened at positions corresponding to the two support rods 15 on the sliding block 17. The ends of the support rods 15 pass through the through holes 18 and are slidably arranged horizontally in the through holes 18. Groove channels 19 are opened vertically on both sides of the working pool 2. At least one groove channel 19 is provided with a top splitting block 20. The top splitting block 20 is configured to squeeze the two support rods 15 to move away from each other when the two support rods 15 enter the groove channel 19. And a splicing block 25 is installed on each support rod 15. The top of the hanging rack 21 is in an inverted "mountain" - shaped structure. The two support rods 15 are respectively inserted into the two notch openings 22 of the "mountain" - shaped structure, and splicing holes 26 are opened at positions corresponding to the splicing blocks 25 in the notch openings 22.

[0052] By installing a power source such as a driving motor on the lead screw 16 to drive the lead screw 16 to rotate, the sliding block 17 is driven to move up and down. When moving up, it moves to the clamping structure to support the hanging rack 21 released from the clamping structure, that is, the hanging rack 21 is lifted by placing the two support rods 15 in the two notch openings 22 of the "mountain" - shaped structure of the hanging rack 21. With the drive of the lead screw 16, the support rods 15 and the hanging rack 21 are driven to move down into the working pool 2. As the support rods 15 move down, they will contact the top splitting block 20. The top splitting block 20 is in a conical - like structure, gradually driving the two support rods 15 to move away from each other, thereby driving the splicing blocks 25 to insert into the corresponding splicing holes 26, realizing the splicing between the support rods 15 and the hanging rack 21, and stably fixing the hanging rack 21 on the support rods 15 for corresponding processing work.

[0053] Refer to Figure 9As shown, a square frame 23 can be sleeved on the supporting rod 15. The square frame 23 is used to limit the sliding of the two supporting rods 15 in the direction away from each other, so that the two supporting rods can move stably. Corresponding to the separation between the supporting rod 15 and the hanging bracket 21, an elastic structure 24 can be arranged in the square frame 23. The elastic structure 24 is used to drive the two supporting rods 15 to move closer to each other. That is, when the supporting rod 15 moves upward and gradually disengages from the top splitting block 20, under the action of the elastic structure 24, the two supporting rods 15 can be driven to move closer and reset, and the splicing block 25 can be disengaged from the splicing hole 26, so as to facilitate the subsequent transfer of the hanging bracket 21 to the clamping structure;

[0054] In a specific embodiment, on the above basis, in this embodiment, a vibration structure is further provided, which is configured to drive the tray extending into the working pool 2 to vibrate in the horizontal direction; Refer to Figure 7 - Figure 8 As shown, the end of the supporting rod 15 passes through the through hole 18 and extends to one side of the vibration structure. The vibration structure includes a vibration motor 27, and a cam 28 is installed at the end of the vibration motor 27. The cam 28 is configured to periodically squeeze the supporting rod 15 when rotating; Refer to Figure 7 - Figure 8 As shown, vibration structures are arranged at both ends of the supporting rod 15, and the rotation of the cams 28 of the two vibration structures is staggered. On the one hand, the vibration motor 27 drives the cam 28 to rotate, periodically squeezing the supporting rod 15, so that the supporting rod 15 reciprocates in the horizontal direction, and the hanging bracket 21 vibrates synchronously. On the other hand, the cam 28 is staggered from the end of the supporting rod 15 in the initial state and coincides with the end of the supporting rod 15 after top splitting. Only after the two supporting rods 15 are separated, that is, after the supporting rod 15 is stably connected to the hanging bracket 21, can the vibration operation be carried out, avoiding vibration when the two supporting rods 15 are not in place and improving the work safety and stability.

[0055] For the clamping structure, in a specific embodiment, on the above basis, refer to Figure 10 As shown, the clamping structure includes a U-shaped block 29. A limiting mechanism is arranged in the U-shaped block 29. A connecting rod 33 is arranged at the corresponding position of the hanging bracket 21 to the U-shaped block 29. The limiting mechanism is configured to lock or unlock the connecting rod 33 inserted into the U-shaped block 29; That is, when the connecting rod 33 of the hanging bracket 21 is transferred and inserted into the U-shaped block 29 through the tray, the limiting mechanism locks the connecting rod 33, realizing the separation between the hanging bracket 21 and the supporting rod 15, and then the tray resets, and the clamping structure drives the hanging bracket 21 to transfer;

[0056] Further, refer to Figure 10As shown, in this embodiment, the limiting mechanism includes at least one cross bar 30 arranged parallel to the opening of the U-shaped block 29. In this embodiment, there are two cross bars 30, which are symmetrically arranged. The cross bar 30 is slidably installed in the U-shaped block 29, and one end of the cross bar 30 extends into the notch 22 of the U-shaped block 29. A triangular block 32 is installed at the extending end of the U-shaped block 29; a spring 31 is arranged on the cross bar 30, and the spring 31 drives the cross bar 30 to move towards the notch 22 of the U-shaped block 29; one end of the connecting rod 33 towards the U-shaped block 29 is installed with a first frustum block 34, and a second frustum block 35 is coaxially installed on the connecting rod 33 below the first frustum block 34. The first frustum block 34 and the second frustum block 35 are symmetrically arranged, and the second frustum block 35 is slidably installed on the connecting rod 33;

[0057] The hanging bracket 21 is transferred from the pallet to the clamping structure: the pallet moves upward, and the connecting rod 33 is inserted into the U-shaped block 29. At this time, the upward movement distance is controlled to be the first distance. The first frustum block 34 contacts the triangular blocks 32 on both sides, and the triangular blocks 32 compress the cross bar 30 and move towards both sides until the triangular blocks 32 are located between the first frustum block 34 and the second frustum block 35. By inserting the triangular blocks 32 below the first frustum, the upward movement ends at this time, and the hanging bracket 21 can be hung on the two triangular blocks 32 through the first frustum block 34;

[0058] The hanging bracket 21 is transferred from the clamping structure to the pallet: the pallet moves upward, and the upward movement distance is controlled to be the second distance. The supporting rod 15 is inserted into the two notches 22 of the "mountain"-shaped structure to lift the hanging bracket 21 and continue to drive the hanging bracket 21 to move upward. At this time, under the action of the second frustum block 35, the two triangular blocks 32 will be pushed to compress the cross bar 30 and move towards both sides. The two triangular blocks 32 contact the second frustum block 35, and the pallet starts to move downward. Since the second frustum block 35 is slidably installed on the connecting rod 33, the second frustum block 35 will move upward synchronously under the clamping action of the two triangular blocks 32 until it contacts the first frustum. Through the cooperation of the first frustum block 34 and the second frustum block 35, the two triangular blocks 32 will automatically disengage from the first frustum block 34 and the second frustum block 35, realizing the disconnection of the connecting rod 33 from the clamping structure;

[0059] Repeating the above operations can complete the transfer of the hanging bracket 21. There is no need to set a power structure on the clamping structure. Only the control of the upward movement distance of the working pallet is required, and the operation is simple, and the work efficiency is improved.

[0060] The above describes the embodiments of the present invention in detail with reference to the drawings. However, the present invention is not limited to the above embodiments. For those of ordinary skill in the art in this technical field, after learning the content recorded in the present invention, without departing from the principle of the present invention, several equivalent transformations and substitutions can still be made, and these equivalent transformations and substitutions should also be regarded as belonging to the protection scope of the present invention.

Claims

1. A nickel plating device for electroplating a bottom plate, comprising a nickel plating table, on which a plurality of working pools are arranged, and a conveying mechanism is arranged, wherein the conveying mechanism is used to drive a rack to move to a designated working pool, characterized in that: A closed space is provided inside the nickel plating table, and each working tank and the conveying mechanism are located and operate inside the closed space; and A door panel is provided at the opening of each working tank, and the door panel is configured to seal the working tank when the hanging rack is completely placed inside the working tank; A diversion channel is opened near the opening inside each working tank, and an exhaust gas treatment device is provided inside the nickel plating table. The exhaust gas treatment device is communicated with the diversion channel and is used to guide the air flow inside the working tank to flow in a specified direction; The conveying mechanism is arranged above the working tank and includes a circulating slideway and a plurality of sliders arranged inside the circulating slideway. Each slider can slide along the circulating slideway to traverse all the working tanks, and a clamping structure is installed on each slider; A transfer mechanism is installed on one side of each working tank. The transfer mechanism includes: A pallet for supporting the hanging rack, and the pallet is configured to be spliced with the hanging rack in the horizontal direction when it extends into the working tank; A vibration structure configured to drive the pallet extending into the working tank to vibrate in the horizontal direction; A sliding structure connected to the pallet for driving the pallet to extend into the working tank or move towards the conveying mechanism; 2. The nickel plating device for electroplating a bottom plate according to claim 1, characterized in that: The diversion channel includes: An air inlet hole located at the opening of the working tank and communicated with the working tank; A diversion chamber communicated with the air inlet hole, and two slopes are arranged inside the diversion chamber. The two slopes are arranged in an inverted "entry" character shape, and a break is arranged at the adjacent position of the two slopes; the air flow breaks away from the diversion chamber from the break; One end of one slope extends to near the air inlet hole, and the other end of the other slope extends to one side of the working tank, and a return hole is opened at the corresponding position of the working tank; A connection channel for connecting the break and the exhaust gas treatment device; 3. The nickel plating device for electroplating a bottom plate according to claim 1, characterized in that: An air flow recovery channel is opened at the top end of the nickel plating table. The air flow recovery channel covers all the working tanks, and the air flow recovery channel is connected to the exhaust gas treatment device through a connecting pipe; 4. The nickel plating device for electroplating a bottom plate according to claim 1, characterized in that: The clamping structure includes a U-shaped block, and a limiting mechanism is arranged inside the U-shaped block. A connecting rod is arranged at the corresponding position of the hanging rack with respect to the U-shaped block. The limiting mechanism is configured to lock or unlock the connecting rod inserted into the U-shaped block; 5. The nickel plating device for electroplating a bottom plate according to claim 4, characterized in that: The limiting mechanism includes at least one cross bar arranged parallel to the opening of the U-shaped block. The cross bar is slidably installed inside the U-shaped block, and one end of the cross bar extends into the notch of the U-shaped block. A triangular block is installed at the extending end of the U-shaped block; a spring is arranged on the cross bar, and the spring drives the cross bar to move towards the notch of the U-shaped block; A first frustum block is installed at one end of the connecting rod facing the U-shaped block, and a second frustum block is coaxially installed below the first frustum block on the connecting rod. The first frustum block and the second frustum block are symmetrically arranged, and the second frustum block is slidably installed on the connecting rod; 6. The nickel plating device for electroplating a bottom plate according to claim 1, characterized in that: The support plate is mainly composed of two symmetrically arranged support rods, and the sliding structure includes a screw rod arranged in the vertical direction, and a sliding block with a screw rod nut arranged on the screw rod, and through holes are opened on the sliding block at positions corresponding to the two support rods, and the ends of the support rods pass through the through holes and are slidably arranged in the through holes along the horizontal direction; Both sides of the working pool are provided with grooves in the vertical direction, at least one of the grooves is provided with a top block, and the top block is configured to squeeze the two support rods to move away from each other when the two support rods enter the groove; and A splicing block is installed on each of the support rods, and the top of the bracket is an inverted "mountain" shaped structure. The two support rods are respectively inserted into two notches of the "mountain" shaped structure, and splicing holes are opened in the notches and at the positions of the splicing blocks.

7. The nickel plating device for electroplating a bottom plate according to claim 6, characterized in that: The end of the support rod passes through the through hole and extends to one side of the vibration structure. The vibration structure includes a vibration motor. A cam is installed at the end of the vibration motor. The cam is configured to periodically squeeze the support rod when rotating.

8. The nickel plating device for electroplating a bottom plate according to claim 7, characterized in that: The cam is staggered with the end of the support rod in the initial state, and overlaps with the end of the support rod after the top is split.

9. The nickel plating device for electroplating a bottom plate according to claim 6, characterized in that: A square frame is sleeved on the two support rods, and the square frame is used to limit the two support rods from sliding in a direction away from each other.

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