Leveling method and device of probe card, equipment and storage medium

Abstract

The embodiment of the invention discloses a probe card leveling method, device and equipment and a storage medium, a probe card fitting plane is obtained based on the probe point position of a probe card, the probe card is installed on a probe bearing device, and the probe bearing device comprises at least one movement unit used for leveling the probe card plane of the probe card; determining a motion amount corresponding to the at least one motion unit based on the parallelism between the needle card fitting plane and a reference plane; and in response to the condition that the movement amount corresponding to the at least one movement unit meets the movement coplanar condition, the at least one movement unit is controlled to move based on the corresponding movement amount, so that the probe card plane of the probe card is leveled, and automatic leveling of the probe card plane can be realized. And the leveling accuracy and the adjustment efficiency of the probe card can be improved.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor technology, and in particular to a leveling method, device, equipment and storage medium for a probe card. Background Art

[0002] The probe card is an interface that connects the test equipment and the semiconductor wafer. The probes in the probe card contact the surface of the wafer to transmit the test signals output by the test equipment to the wafer.

[0003] Before using the probe card for testing, the probes in the probe card need to be aligned to facilitate the use of the probe card to test the wafer under test. The horizontality of the probe card's needle plane will affect the probe's alignment effect, so the probe card's needle plane needs to be leveled before using it.

[0004] In the related art, the height of the panel where the probe card is located is manually adjusted to adjust the plane of the probe card. However, the manual adjustment method has low efficiency and adjustment accuracy, which affects the needle alignment effect of the probe. Summary of the invention

[0005] The embodiments of the present disclosure provide a leveling method, device, equipment and storage medium for a probe card to solve the above technical problems to a certain extent.

[0006] According to one aspect of an embodiment of the present disclosure, a method for leveling a probe card is provided, comprising: Acquiring a probe card fitting plane based on a probe card tip position, wherein the probe card is mounted on a probe carrier, and the probe carrier includes at least one motion unit for leveling a probe card plane of the probe card; Determining the movement amount corresponding to the at least one movement unit based on the parallelism between the needle card fitting plane and the reference plane; In response to the corresponding movement amount of the at least one movement unit satisfying the movement coplanarity condition, the at least one movement unit is controlled to move based on the corresponding movement amount to level the probe card plane of the probe card.

[0007] Another aspect of the embodiments of the present disclosure provides a leveling device for a probe card, comprising: a plane fitting module, for obtaining a probe card fitting plane based on a probe card needle tip position, wherein the probe card is mounted on a probe carrier, and the probe carrier includes at least one motion unit for leveling a probe card plane of the probe card; A movement amount determination module, used to determine the movement amount corresponding to the at least one movement unit based on the parallelism between the needle card fitting plane and the reference plane; The motion control module is used to control the at least one motion unit to move based on the corresponding motion amount in response to the motion amount corresponding to the at least one motion unit satisfying the motion coplanarity condition, so as to level the needle card plane of the probe card.

[0008] Another aspect of the embodiments of the present disclosure provides a probe station device, the device comprising a host computer and a probe carrying device, the host computer running a leveling device of a probe card, the probe carrying device comprising a loading structure for mounting the probe card, and at least one motion unit for leveling a needle card plane of the probe card; The leveling device is used to obtain a probe card fitting plane based on the probe card needle tip position; determine the movement amount corresponding to the at least one motion unit based on the parallelism between the probe card fitting plane and the reference plane; and control the at least one motion unit to move based on the corresponding movement amount in response to the corresponding movement amount of the at least one motion unit satisfying the motion coplanarity condition; The at least one motion unit is used to move based on a corresponding motion amount to level the probe card plane of the probe card.

[0009] Another aspect of the embodiments of the present disclosure provides an electronic device, comprising: a memory for storing a computer program; a processor for executing the computer program stored in the memory, and when the computer program is executed, the leveling method of the probe card described in any of the above embodiments is implemented.

[0010] Another aspect of the embodiments of the present disclosure provides a computer-readable storage medium having a computer program stored thereon, and when the computer program is executed by a processor, the leveling method of the probe card described in any of the above embodiments is implemented.

[0011] Another aspect of the embodiments of the present disclosure provides a computer program product, including a computer program, and when the computer program is executed by a processor, the leveling method of the probe card described in any of the above embodiments is implemented.

[0012] In the embodiment of the present disclosure, at least one motion unit included in the probe carrier is used to level the needle card plane of the probe card installed on the probe carrier. For the probe card placed on the probe carrier, the needle card fitting plane can be determined based on the needle tip position of the probe card, and the movement amount corresponding to at least one motion unit used to level the probe card can be determined according to the parallelism between the needle card fitting plane and the reference plane. When the corresponding movement amount of at least one motion unit meets the motion coplanarity condition, the motion unit can be controlled to move based on the corresponding movement amount to achieve automatic leveling of the needle card plane of the probe card, which helps to improve the accuracy of the probe card leveling and the adjustment efficiency, so that the probes in the probe card are easy to identify or focus, which helps to improve the needle alignment effect of the probe. In addition, when ensuring that the corresponding movement amount of at least one motion unit meets the motion coplanarity condition, controlling the motion unit to move can ensure that the coplanar state is maintained during the motion process and after the motion of the motion unit, avoiding the problem of damage to the loading structure of the probe carrier device due to the irregular movement of different motion units, which helps to improve the safety of the automatic leveling process.

[0013] The technical solution of the present disclosure is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The accompanying drawings, which constitute a part of the specification, illustrate embodiments of the present disclosure and, together with the description, serve to explain the principles of the present disclosure.

[0015] The present disclosure may be more clearly understood from the following detailed description with reference to the accompanying drawings, in which: Figure 1 is a schematic structural diagram of a probe station device provided by an exemplary embodiment of the present disclosure; Figure 2 is a flow chart of a method for leveling a probe card provided by an exemplary embodiment of the present disclosure; Figure 3 is a flow chart of a process for determining an amount of exercise provided by an exemplary embodiment of the present disclosure; Figure 4 is a schematic diagram of a needle card fitting plane and a reference plane provided by an exemplary embodiment of the present disclosure; Figure 5 is a flow chart of a process of weakening initial motion provided by an exemplary embodiment of the present disclosure; Figure 6 is a flow chart of a method for leveling a probe card provided by another exemplary embodiment of the present disclosure; Figure 7 is a schematic structural diagram of a leveling device for a probe card provided by an exemplary embodiment of the present disclosure; Figure 8 It is a schematic diagram of the structure of an electronic device provided by an exemplary embodiment of the present disclosure. DETAILED DESCRIPTION

[0016] Various exemplary embodiments of the present disclosure will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangement of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present disclosure unless otherwise specifically stated.

[0017] The embodiments of the present disclosure can be applied to electronic devices such as terminal devices, computer systems, servers, etc., which can operate with many other general or special computing system environments or configurations. Examples of well-known terminal devices, computing systems, environments and / or configurations suitable for use with electronic devices such as terminal devices, computer systems, servers, etc. include, but are not limited to: personal computer systems, server computer systems, thin clients, thick clients, handheld or laptop devices, microprocessor-based systems, set-top boxes, programmable consumer electronics, network personal computers, small computer systems, large computer systems, and distributed cloud computing technology environments including any of the above systems, etc.

[0018] Electronic devices such as terminal devices, computer systems, servers, etc. can be described in the general context of computer system executable instructions (such as program modules) executed by computer systems. Generally, program modules can include routines, programs, object programs, components, logic, data structures, etc., which perform specific tasks or implement specific abstract data types. Computer systems / servers can be implemented in distributed cloud computing environments, where tasks are performed by remote processing devices linked through a communication network. In a distributed cloud computing environment, program modules can be located on local or remote computing system storage media including storage devices.

[0019] The probe station equipment includes a wafer carrier to be tested and a probe carrier. The probe carrier includes a loading structure for loading a probe card. The probe card can be placed on the loading structure. The wafer to be tested can be placed on the wafer carrier to be tested. One end of the probe of the probe card is docked with the wafer to be tested, and the other end is docked with the test equipment, thereby realizing information exchange between the probe station equipment and the test equipment. The test equipment outputs the test signal through the probe card to the wafer to be tested. Before using the probe card to connect with the wafer to be tested, the probe in the probe card needs to be accurately aligned with the wafer to be tested, that is, the probe in the probe card needs to be aligned. During the alignment process, a camera is usually used to focus the needle tip or identify the probe. When the probe card is tilted or uneven, the probe in the probe card is not easy to identify or focus. In order to ensure that the probe can be identified or focused, the horizontality of the probe card's needle card plane needs to be ensured. In the related art, after the probe card is placed on the loading structure, the height of the loading structure is manually adjusted. After the loading structure is leveled, it is considered that the probe card is leveled, that is, the probe card's needle card plane is leveled. However, the manual leveling method has low accuracy and low efficiency.

[0020] In the embodiment of the present disclosure, the automatic leveling of the probe card can be realized to improve the accuracy and efficiency of the leveling of the probe card. It can be known to those skilled in the art that the leveling of the probe card in the embodiment of the present disclosure is the leveling of the needle card plane of the probe card.

[0021] like Figure 1 As shown, a probe station device provided by an exemplary embodiment of the present disclosure is shown, the device includes a host computer 11 and a probe carrying device 12, wherein a leveling device 110 for a probe card is running in the host computer 11, the probe carrying device 12 includes at least one motion unit 121 for leveling the needle card plane of the probe card and a loading structure 122 for loading the probe card, each motion unit 121 in the at least one motion unit 121 is respectively connected to the loading structure 122 for loading the probe card, when at least one motion unit 121 moves, the plane state of the loading structure 122 changes accordingly, and by controlling the movement of at least one motion unit 121, the plane of the loading structure 122 can be adjusted, so that the probe card loaded on the loading structure 122 can be leveled. Optionally, the host computer 11 may be the above-mentioned electronic device, in which a leveling device 110 for a probe card is running, wherein the leveling device 110 is used to control the movement of a motion unit 121 in the probe carrier 12, thereby adjusting the probe carrier, and further realizing automatic leveling of the probe card installed on the loading structure 122 of the probe carrier 12. In a possible embodiment, when the probe card is placed on the loading structure 122, the leveling device 110 may determine a leveling method according to the plane state of the probe card placed on the loading structure 122, and control the movement of the motion unit 121 to realize leveling of the probe card.

[0022] Optionally, the probe carrier 12 is provided with motion units 121 at different positions, and by controlling the motion units 121 at different positions, the heights of the loading structure 122 at different positions can be adjusted respectively, thereby adjusting the heights of the probe card at different positions, thereby realizing automatic leveling of the probe card. Figure 1 As shown, the probe carrying device 12 is respectively provided with motion units 121 located at orientation A, orientation B, and orientation C. By controlling the motion of the motion units 121 located at orientation A, orientation B, and orientation C, the height of the probe card installed on the loading structure 122 in directions A, B, and C can be adjusted, thereby realizing automatic leveling of the probe card.

[0023] In an exemplary embodiment, the leveling device is used to obtain a needle card fitting plane based on the probe card needle tip position; determine the movement amount corresponding to at least one motion unit based on the parallelism between the needle card fitting plane and the reference plane; in response to the corresponding movement amount of at least one motion unit satisfying the motion coplanarity condition, control at least one motion unit to move based on the corresponding movement amount. At least one motion unit is used to move based on the movement amount to level the needle card plane of the probe card.

[0024] like Figure 2 As shown, it shows a flow chart of a probe card leveling method provided by an exemplary embodiment of the present disclosure, the method can be used in a host computer, and exemplarily, can be used in a leveling device 110 running in the host computer, the method includes steps 210-230: Step 210 , obtaining a probe card fitting plane based on the probe card tip position, wherein the probe card is mounted on a probe carrier, and the probe carrier includes at least one motion unit for leveling the probe card plane of the probe card.

[0025] When a probe card is placed on the probe carrier, the needle card fitting plane corresponding to the probe card can be determined, wherein the needle card fitting plane can be obtained by fitting according to the needle tip positions of multiple probes in the probe card, and is used to represent the plane where multiple probes in the probe card are located. The needle card plane is the real plane corresponding to the probe card, and by leveling the needle card plane of the probe card, all probes in the probe card at the same focusing height can be easily identified or focused.

[0026] In a possible implementation, a high-power camera can be used to focus and obtain the positions of the tips of multiple probes in the probe card. Specifically, the three-dimensional coordinate information of the tips of multiple probes in the target space coordinate system can be obtained, including the position information in the X and Y directions and the height information in the Z direction. The target space coordinate system can be a preset space coordinate system, which is a space coordinate system established based on a preset reference plane, with the reference plane as the coordinate system base.

[0027] According to the positions of the tips of the multiple probes (i.e., the three-dimensional coordinate information), a needle card fitting plane based on the positions of the tips can be fitted. For example, the positions of the tips of three probes in the probe card can be obtained, and a needle card fitting plane can be fitted based on the positions of the tips of the three probes.

[0028] Optionally, multiple probes located at different positions may be selected to obtain the positions of the needle tips of the multiple probes located at different positions, and the needle card fitting plane may be obtained by fitting based on the positions of the needle tips of the multiple probes located at different positions. Figure 1 As shown, the needle tip positions of multiple probes located in the A direction, the B direction and the C direction can be obtained, and the needle card fitting plane is obtained based on the fitting of the multiple needle tip positions.

[0029] Step 220: Determine the movement amount corresponding to at least one movement unit based on the parallelism between the needle card fitting plane and the reference plane.

[0030] The reference plane is a reference plane for leveling the probe card, and the reference plane is a plane infinitely close to the horizontal plane. Optionally, the reference plane can be obtained by manually debugging the motion unit of the probe carrier, and after the probe carrier is leveled, the reference position corresponding to the motion unit is obtained.

[0031] In this embodiment, the motion unit includes a motion motor. After the motion motor moves to a certain position, the step position of the corresponding motion motor is obtained. When the spatial planes formed by multiple reference points on the loading structure of the probe card are coplanar and nearly parallel, the spatial plane formed by the multiple reference points is the reference plane, wherein the multiple reference points are points on the loading structure corresponding to the step position of the motion motor. The reference position corresponding to the motion unit is the reference point corresponding to the step position of the motion motor on the loading structure, which can also be regarded as the intersection of the straight line perpendicular to the plane of the loading structure after leveling and the plane of the loading structure after leveling where the motion unit is located.

[0032] After the needle card fitting plane of the probe card is determined, the movement amount corresponding to the at least one motion unit can be determined according to the difference in parallelism between the needle card fitting plane of the probe card and the reference plane. Optionally, the at least one motion unit includes motion units located at different positions of the probe card, and the height of the probe card at different positions can be adjusted by the motion units at different positions, thereby achieving leveling of the probe card.

[0033] In a possible implementation, the movement amount corresponding to each motion unit can be determined according to the difference in parallelism between the probe card fitting plane and the reference plane, that is, the movement amount corresponding to at least one motion unit can be determined. The determined movement amount includes the movement amount of motion units in different directions, and the motion of motion units in different directions can be controlled according to the movement amount of each motion unit.

[0034] Step 230 , in response to the corresponding movement amount of at least one movement unit satisfying the movement coplanarity condition, respectively controlling at least one movement unit to move based on the corresponding movement amount to level the probe card plane of the probe card.

[0035] When the motion unit performs irregular motion, such as motion units located in different directions moving in opposite directions or the motion gap is too large, the motion process of the motion unit and the motion position after the motion are not coplanar, which may cause the risk of damage to the loading structure of the probe carrier. In order to improve the safety of the leveling process, after determining the motion amount corresponding to at least one motion unit, it is possible to determine whether the at least one motion unit is coplanar after the movement based on the corresponding motion amount of the at least one motion unit. If the corresponding motion amount of the at least one motion unit meets the preset motion coplanarity condition corresponding to at least one motion unit, each motion unit in the at least one motion unit is controlled to move based on its respective corresponding motion amount.

[0036] In one possible embodiment, the motion coplanarity condition is a preset condition related to the motion amount, wherein the motion coplanarity condition is related to the motion amount corresponding to each motion unit. When the relationship between the motion amounts corresponding to at least one motion unit satisfies the motion coplanarity condition, the motion of the corresponding motion unit can be controlled based on each motion amount to level the needle card plane of the probe card.

[0037] Indicative, combined Figure 1 As shown, after the probe card is placed on the probe carrier, the motion amounts of the motion unit A located at position A, the motion unit B located at position B, and the motion unit C located at position C can be determined respectively according to the difference in parallelism between the needle card fitting plane and the reference plane. When the three motion amounts meet the motion coplanarity condition, the motion of the motion unit A can be controlled based on the motion amount of the motion unit A, the motion of the motion unit B can be controlled based on the motion amount of the motion unit B, and the motion of the motion unit C can be controlled based on the motion amount of the motion unit C. Of course, those skilled in the art will know that there may also be a situation where only one motion unit needs to be adjusted to achieve the parallelism of the needle card plane of the probe card.

[0038] In one possible case, after the probe card is placed on the probe carrier, it may be in a horizontal state and does not need to be leveled. When it is determined that the needle card plane of the probe card is in a non-horizontal state, the probe card is leveled.

[0039] In an exemplary embodiment, if the probe card fitting plane is parallel to the reference plane, and / or the height difference of the probe tips in the probe card is less than the tip height difference threshold, it can be determined that the probe card is in a horizontal state. Wherein, whether the probe card fitting plane is parallel to the reference plane can be determined based on the calculated motion amount of at least one motion unit, and if the motion amount of at least one motion unit is less than the preset motion threshold, it can be determined that the probe card fitting plane is parallel to the reference plane.

[0040] In the embodiment of the present disclosure, at least one motion unit included in the probe carrier is used to level the needle card plane of the probe card installed on the probe carrier. For the probe card placed on the probe carrier, the needle card fitting plane of the probe card can be determined based on the position of the needle tip of the probe card. According to the difference in parallelism between the needle card fitting plane and the reference plane, the corresponding movement amount of at least one motion unit used to level the probe card is determined. When the corresponding movement amount of at least one motion unit meets the motion coplanarity condition, the motion unit is controlled to move based on the corresponding movement amount to achieve automatic leveling of the needle card plane of the probe card, which helps to improve the accuracy of the probe card leveling and the adjustment efficiency, so that the probes in the probe card are easy to identify or focus, which helps to improve the needle alignment effect of the probe. In addition, when ensuring that the corresponding movement amount of at least one motion unit meets the motion coplanarity condition, controlling the motion unit to move can ensure that the coplanar state is maintained during and after the motion of the motion unit, avoiding the problem of damage to the loading structure due to irregular motion of different motion units, and helping to improve the safety of the automatic leveling process.

[0041] like Figure 3 As shown, it shows a flow chart of a leveling method of a probe card provided by another exemplary embodiment of the present disclosure, the method can be used in a host computer, and exemplarily, can be used in a leveling device 11 running in the host computer, the method includes the following steps 310-360: Step 310 , obtaining a reference position corresponding to at least one motion unit after the probe carrying device is leveled.

[0042] Optionally, at least one motion unit may be manually debugged in advance to level the probe bearing device. In a possible implementation, the level of the probe bearing device corresponding to the bearing plane may be detected by a level meter, and whether the probe bearing device has been leveled may be determined based on the detected level.

[0043] In another possible implementation, a tooling device may be pre-installed on the loading structure of the probe carrier. After installation, at least one motion unit is manually debugged, and the height difference of multiple focus positions in the tooling device is obtained. When the height difference of the focus position is not greater than the focus height difference threshold, it can be determined that the probe carrier has been leveled.

[0044] Those skilled in the art will know that the tooling equipment is a debugging equipment, including focus points arranged in multiple directions. The process of leveling the probe carrier device using the debugging equipment may include the following steps one to two: Step 1: in the process of leveling the probe carrying device using at least one motion unit, the motor torque of the motion motor included in each of the at least one motion unit is obtained, and the height difference of multiple focusing points included in the debugging device is obtained.

[0045] During the movement of the motion unit, the motor torque of the motion motor included in the motion unit needs to be monitored to ensure that the motor torque of the motion motor is within a second preset torque range to ensure leveling accuracy, wherein the second preset torque range is much smaller than the first preset torque range.

[0046] The debugging device includes a plurality of focus points at a plurality of positions, and whether the probe carrier device has been leveled can be determined based on the height difference of the plurality of focus points. The height difference of the plurality of focus points is the height difference between the highest point and the lowest point among the plurality of focus points, and can be determined based on the z-direction height information of the focus points collected by the camera.

[0047] Step 2: In response to the motor torques of the motion motors being within a second preset torque range and the height differences of the multiple focus points being no greater than a focus point height difference threshold, determining that the probe carrier device is leveled.

[0048] While ensuring that the motor torque of each motion motor is always within the second preset torque range, the height difference of multiple focal points can be obtained in real time. When the height difference of multiple focal points is not greater than the focus point height difference threshold, it is determined that the probe carrier device has been leveled, and the reference position corresponding to at least one motion unit can be obtained.

[0049] Step 320: Determine a reference plane based on a reference position corresponding to at least one motion unit.

[0050] According to the reference position corresponding to at least one motion unit, a reference plane can be determined. Figure 1 As shown, according to the reference positions corresponding to the motion unit A located at the orientation A (the intersection of the straight line perpendicular to the leveling loading structure plane and the leveling loading structure plane where the motion unit A is located), the reference position corresponding to the motion unit B located at the orientation B (the intersection of the straight line perpendicular to the leveling loading structure plane and the leveling loading structure plane where the motion unit B is located), and the reference position corresponding to the motion unit C located at the orientation C (the intersection of the straight line perpendicular to the leveling loading structure plane and the leveling loading structure plane where the motion unit C is located), a reference plane is determined.

[0051] In a possible implementation, a preset spatial coordinate system may be determined based on a reference plane and a preset fixed point, wherein the preset spatial coordinate system takes the preset fixed point as the origin and the reference plane as the coordinate system base. Figure 4 As shown, the preset spatial coordinate system takes the preset fixed point D as the origin, and the reference plane A1B1C1D as the base of the coordinate system.

[0052] Step 330: Determine an initial movement amount corresponding to at least one movement unit based on the parallelism between the needle card fitting plane and the reference plane.

[0053] According to the difference in parallelism between the needle card fitting plane and the reference plane, the movement amount that needs to be adjusted for at least one motion unit, i.e., the initial movement amount, can be determined. The process of determining the initial movement amount may include the following steps 3301-3303: Step 3301, determine the plane normal vector of the needle card fitting plane.

[0054] In a possible implementation, the distance between the reference plane and the needle card fitting plane on the target straight line where the moving unit is located can be determined according to the intersection position of the target straight line where the moving unit is located and the needle card fitting plane, so as to determine the movement amount corresponding to the moving unit. The target straight line where the moving unit is located is a straight line perpendicular to the reference plane. In this process, the plane normal vector of the needle card fitting plane can be determined first. In a possible implementation, the normal vector of the needle card fitting plane can be determined after the needle card fitting plane is obtained by fitting based on the needle tip positions of multiple probes. The plane normal vector of the needle card fitting plane can also be directly calculated based on the needle tip positions of multiple probes. Schematically, the plane normal vector of the needle card fitting plane can be calculated based on the needle tip positions of three probes.

[0055] Optionally, the needle card fitting plane and the reference plane may be located in the same spatial coordinate system, specifically, may be located in the above-mentioned preset spatial coordinate system, and the plane normal vector of the needle card fitting plane in the preset spatial coordinate system may be determined.

[0056] Step 3302, based on the plane normal vector and the target reference position corresponding to the target motion unit on the reference plane, determine the initial intersection position of the target straight line where the target motion unit is located and the needle card fitting plane.

[0057] The target motion unit is any motion unit among the at least one motion unit.

[0058] In the disclosed embodiment, the parallelism difference between the reference plane and the needle card fitting plane is determined based on a preset spatial coordinate system. Specifically, the reference positions corresponding to at least one motion unit on the reference plane are first obtained to obtain at least one reference position, wherein the reference position corresponding to the motion unit on the reference plane is the position coordinate corresponding to the motion unit based on the preset spatial coordinate system. According to the reference position corresponding to the motion unit, a target straight line (i.e., the target straight line where the motion unit is located) passing through the reference position and perpendicular to the reference plane can be determined, so that the initial intersection position of the target straight line and the needle card fitting plane can be determined.

[0059] In a possible implementation, after determining the target reference position corresponding to the target motion unit, the initial intersection position of the target straight line where the target motion unit is located and the needle card fitting plane can be determined in combination with the plane normal vector of the needle card fitting plane. The initial intersection position refers to the spatial position of the intersection of the target straight line where the motion unit is located and the needle card fitting plane in the preset spatial coordinate system.

[0060] Indicatively, Figure 4 As shown, the normal vector coordinates of the needle card fitting plane ABCD obtained by fitting are (m, n, p), and the plane equation of the needle card fitting plane is mX+nY+pZ+d=0, where the needle card fitting plane ABCD always passes through the origin D, d=0. The reference position corresponding to the motion unit A is A1, the reference position corresponding to the motion unit B is B1, and the reference position corresponding to the motion unit C is C1. The coordinates of the reference position A1 in the preset space coordinate system are (a, 0, 0), the coordinates of the reference position B1 in the preset space coordinate system are (a, b, 0), and the coordinates of the reference position C1 in the preset space coordinate system are (0, b, 0), where a and b are fixed values, a is the distance between the preset fixed point D and the reference position corresponding to the motion unit A in the x-axis direction, and b is the distance between the reference position corresponding to the motion unit A and the reference position corresponding to the motion unit B in the y-axis direction. The three straight lines passing through points A1, B1, and C1 are perpendicular to the XY plane (reference plane), and their corresponding direction vectors are (0, 0, 1). Based on point A1 and the direction vectors of the straight lines, the parametric equation of the straight line passing through point A1 and perpendicular to the reference plane can be determined as shown in the following formula (1): (1) Substituting the straight line equation (1) into the plane equation of the needle card plane, we can obtain equation (2): (2) Right now , so the coordinates of the intersection point A of the straight line and the needle card fitting plane are (a, 0, ), point A is the initial intersection position of the target straight line where the motion unit A is located and the needle card fitting plane.

[0061] Referring to the above method, the coordinates of point B and point C can be determined. Point B is the initial intersection position of the target straight line where the motion unit B is located and the needle card fitting plane, and point C is the initial intersection position of the target straight line where the motion unit C is located and the needle card fitting plane.

[0062] Step 3303: determine the initial projection distance from the initial intersection position to the reference plane as the target initial motion amount corresponding to the target motion unit.

[0063] For the target motion unit, the initial projection distance from the initial intersection position corresponding to the target motion unit to the reference plane can be determined as the target initial motion amount of the target motion unit. That is, after the initial intersection position corresponding to each motion unit is determined, the initial projection distance from the initial intersection position to the reference plane can be determined as the initial motion amount corresponding to the motion unit.

[0064] Indicative, combined Figure 4 As shown, is the coordinate value of point A in the Z direction, and is also the initial projection distance d1 from the initial intersection position A corresponding to the motion unit A to the reference plane. The initial projection distance can be determined as the initial motion amount corresponding to the motion unit A. Combined with the above example, the initial motion amount of the motion unit A is determined to be ; The initial motion of motion unit B is (is the initial projection distance d2 from the initial intersection position B corresponding to the motion unit B to the reference plane); the motion amount of the motion unit C is (is the initial projection distance d3 from the initial intersection position C corresponding to the motion unit C to the reference plane), where p≠0.

[0065] Step 340 , respectively determine an initial movement position of at least one movement unit after movement based on the corresponding initial movement amount.

[0066] After calculating each initial movement amount, the initial movement position of at least one movement unit after movement based on the corresponding initial movement amount can be calculated first. In this process, the initial movement position of each movement unit after movement based on the corresponding initial movement amount can be calculated based on the initial movement amount corresponding to each movement unit.

[0067] In a possible implementation, the initial motion position of a motion unit after the motion is the sum of the current motion position of the motion unit and the initial motion amount corresponding to the motion unit. The current motion position of the motion unit can be directly obtained through an encoder.

[0068] Step 350 , in response to the initial movement positions being within a preset limit range, determining the initial movement amount corresponding to at least one movement unit as the movement amount of at least one movement unit, wherein the preset limit range is a position limit range within which the movement unit is allowed to move.

[0069] Since the motion position of the motion unit is limited, when the initial motion position of the motion unit after the motion based on the initial motion amount does not exceed the position limit range allowed for motion, that is, the initial motion position of each motion unit is within the preset limit range, the initial motion amount of the motion unit can be determined as the motion amount of the motion unit, that is, the actual motion amount of the motion unit during the leveling process. The preset limit range can be set in advance.

[0070] In combination with the above example, based on the current motion position of the motion unit A and the corresponding initial motion amount Determine the initial motion position of motion unit A after motion, based on the current motion position of motion unit B and the corresponding initial motion amount Determine the initial motion position of motion unit B after motion, based on the current motion position of motion unit C and the corresponding initial motion amount The initial motion position of the motion unit C after movement is determined. If the initial motion positions of the motion units A, B and C after movement are all within the preset limit range, the initial motion amount of the motion unit A can be determined as the motion amount corresponding to the motion unit A, the initial motion amount of the motion unit B can be determined as the motion amount corresponding to the motion unit B, and the initial motion amount of the motion unit C can be determined as the motion amount of the motion unit C.

[0071] Step 360 , in response to at least one initial motion position being outside a preset limit range, weakening an initial motion amount corresponding to at least one motion unit, and determining a weakened motion amount corresponding to at least one motion unit as the motion amount of the motion unit.

[0072] When the initial movement position of a movement unit after movement is outside the preset limit range, the initial movement amount corresponding to at least one movement unit may be weakened. In one possible implementation, the initial movement amount corresponding to the target movement unit corresponding to the target movement position may be weakened, wherein the target movement position is the initial movement position outside the preset limit range. In another possible implementation, the initial movement amounts corresponding to each movement unit may be weakened at the same time. In another possible implementation, the initial movement amounts corresponding to at least two movement units may be weakened at the same time.

[0073] In one possible implementation, a fixed weakening amount may be preset, and the fixed weakening amount is within an allowable weakening range, and the initial motion amount of at least one motion unit is weakened based on the fixed weakening amount. In another possible implementation, a weakening ratio may be automatically calculated according to the initial motion amount, and the weakening is performed based on the weakening ratio to reduce the leveling error after the initial motion amount is weakened.

[0074] After the initial movement amount of the motion unit is weakened, the weakened movement amount corresponding to the motion unit can be obtained, and the weakened movement amount can be determined as the movement amount of the motion unit.

[0075] In the disclosed embodiment, a preset spatial coordinate system is determined with a preset fixed point as the origin and a reference plane as the base of the coordinate system. The intersection of the straight line passing through the reference position and the needle card fitting plane is calculated through the positional relationship between the straight line and the plane, and the projection distance from the intersection position to the reference plane is obtained. The movement amount of the motion unit is determined based on the projection distance, which can ensure the accuracy of the initial movement amount.

[0076] In the embodiments of the present disclosure, the movement amount of the motion unit is determined in combination with the position limit range of the motion unit's allowed movement. When the movement position of the motion unit after movement based on the initial movement amount is within the preset limit range, the initial movement amount can be determined as the final actual movement amount. When there is a movement position outside the preset limit range, the initial movement amount can be weakened to avoid the situation where the motion unit exceeds the movement limit and cannot move, which helps to improve the accuracy and effectiveness of the determined movement amount and helps to improve the accuracy of automatic leveling.

[0077] In a possible implementation, Figure 5 As shown, the process of weakening the initial movement amount corresponding to at least one movement unit includes steps 510-540: Step 510: weaken the initial motion amount corresponding to at least one motion unit for the i-th time to obtain the i-th weakened motion amount, where i is a positive integer not less than 1.

[0078] In a possible implementation, the weakening ratio can be automatically calculated according to the initial movement volume, and the weakening is performed based on the weakening ratio. The weakened movement volume may still not ensure that the movement unit is within the preset limit range after movement, and the initial movement volume may need to be weakened multiple times.

[0079] After the initial movement amount is weakened for the ith time, the ith weakened movement amount can be obtained. Schematically, after the initial movement amount is weakened for the first time, the first weakened movement amount can be obtained.

[0080] Step 520 , respectively determine the i th weakened motion position of at least one motion unit after the motion of the at least one motion unit based on the corresponding i th weakened motion amount.

[0081] When the i-th weakening movement amount is obtained after the i-th weakening, it is necessary to determine whether the i-th weakening movement amount meets the movement limit of the motion unit. In a possible implementation, the i-th weakened movement position of each motion unit after movement based on the i-th weakening movement amount can be determined, and the i-th weakened movement position is the sum of the current movement position of the motion unit and the i-th weakening movement amount.

[0082] Step 530: In response to the i-th weakened motion positions being all within the preset limit range, determining the i-th weakened motion amount corresponding to at least one motion unit as the weakened motion amount corresponding to at least one motion unit.

[0083] When the i-th weakened motion position corresponding to each motion unit is within the preset limit range, the i-th weakened motion amount corresponding to the motion unit can be determined as the weakened motion amount corresponding to the motion unit. The weakened motion amount is the final motion amount after the initial motion amount is successfully weakened. After obtaining the weakened motion amount, the weakened motion amount can be determined as the actual motion amount of the motion unit.

[0084] Step 540: In response to at least one i-th weakening movement position being outside a preset limit range, performing an i+1-th weakening based on the i-th weakening movement amount.

[0085] When there is at least one i-th weakened motion position outside the preset limit range, the i-th weakened motion amount can continue to be weakened, that is, the initial motion amount can be weakened for the i+1th time. If the corresponding i+1-th weakened motion position after the i+1-th weakening is still outside the preset limit range, the i+1-th weakened motion amount obtained by the i+1-th weakening can continue to be weakened. Through the above-mentioned cycle process, the weakened motion amount allowed for the motion unit to move is obtained.

[0086] In a possible implementation, there may be a situation where multiple weakenings still cannot meet the motion limit of the motion unit. A threshold number of weakenings may be preset to limit the number of weakenings. When the number of weakenings reaches the preset threshold number of times, an abnormal prompt message may be generated to prompt the user to intervene. In this embodiment, the generated abnormal prompt message may be a software interface prompt message or a log prompt message, which is not limited here, as long as it can prompt the user to intervene.

[0087] Optionally, during the i-th weakening, in response to the weakening times not being greater than the times threshold, the initial movement amount corresponding to the at least one movement unit is weakened for the i-th time. That is, when i≤time threshold, the initial movement amount corresponding to the at least one movement unit may be weakened for the i-th time. Schematically, the times threshold may be 100.

[0088] Optionally, in response to the number of weakening times being greater than the number threshold, an abnormal prompt message is generated, and the abnormal prompt message is used to indicate that a weakening method for the initial amount of motion needs to be set. When i> the number threshold, an abnormal prompt message may be generated to instruct the user to manually set a weakening method for the initial amount of motion. The weakening of the initial amount of motion may be achieved by weakening the plane normal vector. The weakening method may include a weakening ratio of the plane normal vector and a specific weakening direction. The weakening direction may be a direction axis corresponding to a target component of the plane normal vector to be weakened, such as when the weakening direction is x, the target component is m.

[0089] In a possible implementation, the process of weakening the initial movement amount for the i-th time may include steps 5101-5103: Step 5101, perform the i-th weakening on the i-1th weakening plane normal vector to obtain the i-th weakening plane normal vector.

[0090] The initial movement of the motion unit is determined based on the plane normal vector of the needle card fitting plane, and weakening the initial movement can be achieved by weakening the plane normal vector. The essence of weakening the plane normal vector is to modify the size of a single direction component in the plane normal vector of the needle card fitting plane, that is, to adjust the position of the needle card fitting plane.

[0091] In the process of weakening the initial motion amount for the i-th time, the plane normal vector may be weakened for the i-th time. The process of weakening the plane normal vector for the i-th time is essentially to weaken the i-1th weakened plane normal vector obtained by the i-1th weakening. When weakening the i-1th weakened plane normal vector, the target component in the i-1th weakened plane normal vector may be weakened, wherein the target component may be any component in the plane normal vector. In a possible implementation, it may be any preset component, such as the normal vector component m corresponding to the X-axis direction, and the target component is the same each time it is weakened.

[0092] In another possible implementation, the target component to be weakened may be determined according to the i-1th target motion position outside the preset limit range, and the target component to be weakened each time may be different. The process includes steps 1-3: Step 1: determine at least one i-1th weakened motion amount corresponding to at least one i-1th target motion position, where the i-1th target motion position is the i-1th weakened motion position outside a preset restriction range.

[0093] Among them, the i-1th target motion position located outside the preset limit range includes at least one motion position. When an i-1th target motion position is included, the i-1th weakened motion amount corresponding to the i-1th target motion position can be determined.

[0094] When the i-1th target motion position outside the preset restriction range includes a plurality of i-1th target motion positions, the i-1th weakened motion amounts corresponding to the i-1th target motion positions may be determined respectively.

[0095] Step 2: Determine at least one weakening ratio based on the at least one i-1th weakened motion amount and the i-1th target motion position corresponding to each of them.

[0096] When an i-1th target motion position is included, a weakening ratio can be determined according to the i-1th target motion position and the corresponding i-1th weakened motion amount.

[0097] When multiple i-1th target motion positions are included, multiple weakening ratios may be determined based on each i-1th target motion position and the corresponding i-1th weakened motion amount.

[0098] The weakening ratio is the i-1th weakened movement amount / i-1th target movement position.

[0099] Schematically, when the initial motion amount is weakened for the first time, the i-1th weakened motion amount is the initial motion amount. When the initial motion position of the motion unit A after the motion based on the initial motion amount is outside the preset limit range, the initial motion position of the motion unit A after the motion is the initial target motion position, and the corresponding initial motion amount is , a weakening ratio can be determined based on the initial target motion position and the corresponding initial motion amount.

[0100] When the initial motion positions of motion unit A and motion unit B after movement based on the initial motion amount are both outside the preset limit range, the initial motion position of motion unit A after movement and the initial motion position of motion unit B after movement are both initial target motion positions, and a weakening ratio can be calculated based on the initial motion position of motion unit A after movement and the corresponding initial motion amount, which is the initial motion amount of motion unit A / initial motion position of motion unit A, and another weakening ratio can be calculated based on the initial motion position of motion unit B after movement and the corresponding initial motion amount, which is the initial motion amount of motion unit B / initial motion position of motion unit B.

[0101] Step 3: based on the maximum weakening ratio among at least one weakening ratio, weaken the target normal vector component corresponding to the maximum weakening ratio, wherein the target normal vector component corresponding to the maximum weakening ratio is the normal vector component corresponding to the target motion unit corresponding to the maximum weakening ratio, and different motion units correspond to different normal vector components.

[0102] In a possible implementation, when there is an i-1th target motion position, a weakening ratio can be determined, and the target normal vector component corresponding to the weakening ratio is determined based on the weakening ratio, and the target normal vector component corresponding to the weakening ratio is the normal vector component corresponding to the target motion unit corresponding to the weakening ratio.

[0103] Different motion units correspond to different normal vector components. Schematically, motion unit A corresponds to normal vector component m, motion unit B corresponds to normal vector component n, and motion unit C corresponds to normal vector component p.

[0104] Illustratively, when the weakening ratio is determined based on the i-1th weakened motion position corresponding to the motion unit A and the corresponding i-1th weakened motion amount, the normal vector component m corresponding to the motion unit A can be weakened based on the weakening ratio.

[0105] When the target normal vector component is weakened based on the weakening ratio, the weakened normal vector component = the current value of the target normal vector component / the weakening ratio, where the weakening ratio is greater than 1.

[0106] In another possible implementation, when there are multiple (i-1)th target motion positions, multiple weakening ratios may be determined, a maximum weakening ratio may be selected from the multiple weakening ratios, and the corresponding target normal vector component may be weakened based on the maximum weakening ratio.

[0107] Schematically, when a first weakening ratio is calculated based on the i-1th weakened motion position after the movement of motion unit A and the corresponding i-1th weakened motion amount, and a second weakening ratio is calculated based on the i-1th weakened motion position after the movement of motion unit B and the corresponding i-1th weakened motion amount, if the second weakening ratio is greater than the first weakening ratio, the normal vector component n corresponding to the motion unit B can be weakened based on the second weakening ratio.

[0108] After weakening the target normal vector component of the i-1 weakened plane normal vector, the weakened target normal vector component and other unweakened original normal vector components can be determined as the i-th weakened plane normal vector. Schematically, during the first weakening, the initial plane normal vector of the needle card fitting plane is weakened, and the initial plane normal vector is (m, n, p). After weakening the target normal vector component m, the weakened target component m1 is obtained, and the first weakened plane normal vector can be (m1, n, p).

[0109] The size of the weakened normal vector component is negatively correlated with the weakening ratio. When the weakening ratio is smaller, the weakened normal vector component is larger. There may be a situation where the calculated weakening ratio cannot weaken the normal vector component. In this case, the normal vector component can be weakened based on the preset value.

[0110] In a possible implementation, in response to at least one weakening ratio being not greater than a preset ratio threshold, the weakening ratio is set to a preset value, and the preset value is greater than the preset ratio threshold.

[0111] The preset ratio threshold may be a threshold corresponding to a normal vector component that cannot be weakened. Schematically, the preset ratio threshold may be 1. When at least one weakening ratio calculated is less than or equal to 1, the current normal vector component cannot be weakened. The weakening ratio may be set to a preset value, such as 2.

[0112] After the weakening ratio is set to a preset value, the normal vector component corresponding to the motion unit corresponding to the i-1th target motion position may be weakened based on the weakening ratio set to the preset value. Optionally, any target motion position may be randomly selected from the i-1th target motion position, and the normal vector component corresponding to the motion unit corresponding to the selected target motion position may be weakened.

[0113] Schematically, when the i-1th target motion position includes the i-1th weakened motion position corresponding to motion unit A and motion unit B, any normal vector component can be selected from the normal vector component m corresponding to motion unit A and the normal vector component n corresponding to motion unit B for weakening.

[0114] Step 5102, based on the normal vector of the i-th weakening plane and the target reference position corresponding to the target motion unit on the reference plane, determine the i-th intersection position of the target straight line where the target motion unit is located and the i-th needle card fitting plane.

[0115] The target straight line is perpendicular to the reference plane, and the target motion unit is any motion unit of the at least one motion unit.

[0116] After obtaining the i-th weakened plane normal vector, the i-th intersection position of the target motion unit and the i-th needle card fitting plane can be re-determined. The weakening of the plane normal vector is essentially the adjustment of the needle card fitting plane position. The i-th needle card fitting plane is the plane corresponding to the i-th weakened plane normal vector.

[0117] The method for calculating the position of the i-th intersection point can refer to the method for calculating the position of the initial intersection point mentioned above, which will not be repeated here.

[0118] Step 5103: determine the i-th projection distance from the i-th intersection position to the reference plane as the i-th weakened motion amount corresponding to the target motion unit.

[0119] After the i-th intersection position corresponding to the target motion unit is determined, the i-th projection distance from the i-th intersection position to the reference plane is determined as the i-th weakened motion amount corresponding to the target motion unit.

[0120] In another possible implementation, the weakening method can be manually set, and during the automatic leveling process of the probe card, the movement amount can be weakened based on the manually set weakening method. After determining the needle card fitting plane corresponding to the probe card in the probe carrier, the preset leveling pass ratio and leveling correction direction can be obtained.

[0121] The leveling pass ratio is used to weaken the normal vector, and the leveling correction direction is used to indicate the weakened normal vector component, that is, the axial component.

[0122] After the plane normal vector of the needle card fitting plane is determined, the correction normal vector component corresponding to the leveling correction direction in the plane normal vector can be corrected based on the leveling pass ratio to obtain the correction normal vector.

[0123] In a possible implementation, the corrected normal vector component = the current component of the plane normal vector Leveling pass ratio, where the leveling pass ratio is less than or equal to 1. The current component of the plane normal vector is the corrected normal vector component.

[0124] The corrected normal vector component corresponding to the leveling correction direction is the normal vector component corresponding to the direction axis indicated by the leveling correction direction. Schematically, when the leveling correction direction is the X axis, the normal vector component m can be corrected, and the corrected normal vector component m2=m×leveling pass ratio.

[0125] After the correction of the correction normal vector component, the corrected correction normal vector component and other uncorrected original normal vector components can be determined as the correction normal vector. Schematically, the plane normal vector is (m, n, p), and the correction normal vector component m is corrected to obtain the correction normal vector component m2, then the correction normal vector can be (m2, n, p).

[0126] After obtaining the corrected normal vector, the corrected intersection position of the target straight line where the target motion unit is located and the corrected needle card fitting plane can be determined based on the corrected normal vector and the target reference position corresponding to the target motion unit on the reference plane, and the corrected projection distance from the corrected intersection position to the reference plane can be determined as the target initial motion amount corresponding to the target motion unit. The target straight line is perpendicular to the reference plane, and the target motion unit is any motion unit among at least one motion unit.

[0127] After obtaining the corrected normal vector, the corrected intersection position of the target straight line where the target motion unit is located and the corrected needle card fitting plane can be determined. The corrected needle card fitting plane is the plane corresponding to the corrected normal vector. The calculation method of the corrected intersection position can refer to the above method of calculating the initial intersection position, which will not be repeated here.

[0128] After determining the corrected intersection position corresponding to the target motion unit, the corrected projection distance from the corrected intersection position to the reference plane is determined as the target initial motion amount corresponding to the target motion unit.

[0129] That is, after obtaining the plane normal vector of the needle card fitting plane, if there is a pre-set leveling correction direction and leveling pass ratio, the plane normal vector is first corrected to obtain a corrected normal vector, and the target initial motion amount of the target motion unit is determined based on the corrected normal vector.

[0130] In the embodiment of the present disclosure, when the movement position of the motion unit exceeds a preset limit range, that is, exceeds the movement limit, the movement amount of the motion unit can be weakened by weakening the normal vector. When weakening the normal vector, weakening one component at a time can reduce the error caused by weakening the normal vector, thereby improving the accuracy of leveling while ensuring that the motion unit can move.

[0131] In addition, in the embodiment of the present disclosure, the weakening ratio can be automatically calculated based on the movement position exceeding the preset limit range and the corresponding movement amount, and the corresponding normal vector component can be weakened, so that the movement amount of the movement unit exceeding the preset limit range can be weakened so that it is within the preset limit range, which can improve the effectiveness and accuracy of the weakening.

[0132] In a possible implementation, in response to at least one movement position of at least one motion unit being coplanar after movement based on corresponding movement quantities, at least one movement quantity is determined to satisfy a movement coplanarity condition, and movement of at least one motion unit is controlled based on the at least one movement quantity.

[0133] The motion coplanarity condition is a condition corresponding to the coplanarity of the motion units after motion. When the motion positions of the motion units after motion based on the corresponding motion amounts are coplanar, it can be determined that the motion coplanarity condition is satisfied. The motion coplanarity condition is related to the motion amounts of the motion units.

[0134] Indicatively, in combination with the above example, point D is the origin, A, B and C are the spatial positions of motion unit A, motion unit B and motion unit C respectively, and the coordinates of each point are D: (0, 0, 0); A: (x, 0, Z1); B: (x, y, Z2); C: (0, y, Z3); Among them, the four points are coplanar conditions: , according to the above coordinate positions, the following vectors can be obtained:

[0135] Substituting the above vectors into the four-point coplanarity condition, the coplanarity condition of the motion unit can be calculated as: Z3-Z2+Z1=0, that is, Z3+ Z1= Z2. The sum of the projection distance from the intersection of the target straight line where the motion unit C is located and the needle card fitting plane to the reference plane and the projection distance from the intersection of the target straight line where the motion unit A is located and the needle card fitting plane to the reference plane must be equal to the projection distance from the intersection of the target straight line where the motion unit B is located and the needle card fitting plane to the reference plane.

[0136] Furthermore, the sum of the motion amount of motion unit C and the motion amount of motion unit A is equal to the motion amount of motion unit B. By calculating whether the motion units are coplanar after movement based on the motion amounts of the motion units, irregular movement of the motion units based on the motion amounts can be avoided, thereby reducing the risk of damage to the loading structure.

[0137] In a possible implementation, the motion process of the motion unit can also be monitored. The motion unit includes a motion motor, and the motor torque of the motion motor during the motion of the motion unit can be obtained. In response to the motor torque being within a first preset torque range, the motion unit is controlled to move. The second preset torque range is much smaller than the first preset torque range.

[0138] In order to ensure the normal movement of the motion unit, the motor torque of the motion motor during the motion of the motion unit can be obtained. The motor torque represents the torque generated by the motor on the object when the motor moves. The greater the motor torque, the greater the torque generated on the object. The motor torque can be monitored to avoid damage to the loading structure caused by the motor movement. Optionally, if the motor torque is within the first preset torque range, the motion of the motion unit can be continuously controlled. If it is outside the first preset torque range, it is determined that the motion motor is operating abnormally and there may be irregular movement. An abnormal alarm message can be generated to stop the motion of the motion unit to avoid damage to the loading structure.

[0139] In one possible embodiment, after controlling the movement of the motion unit to level the needle card fitting plane, the leveled needle card fitting plane can be obtained based on the probe card tip position after leveling, and in response to the leveled needle card fitting plane and the reference plane not satisfying the parallel condition, and / or in response to the height difference of the probe tips in the probe card after leveling being greater than the tip height difference threshold, the needle card plane of the probe card is leveled for the next time.

[0140] Among them, the parallel condition may be that the initial movement amount of at least one moving unit is less than a preset movement threshold. When the initial movement amount of at least one moving unit is less than the preset movement threshold, it can be considered that the needle card fitting plane after leveling and the reference plane meet the parallel condition. In a possible implementation, whether the needle card plane has been leveled is determined based on whether the needle card fitting plane after leveling and the reference plane meet the parallel condition. After the needle card plane is leveled once, the initial movement amount of at least one moving unit can be calculated based on the needle card fitting plane after leveling. When the maximum movement amount among the initial movement amounts of at least one moving unit is less than the preset movement threshold, it is determined that the needle card plane after leveling and the reference plane meet the parallel condition, and the leveling process of the needle card plane can be ended. If the maximum movement amount among the movement amounts of at least one moving unit is greater than the preset movement threshold, the needle card plane needs to be leveled again.

[0141] Alternatively, it is also possible to determine whether the probe card plane is leveled based on the height difference of the probe tips in the probe card after leveling. After leveling the probe card plane once, the height difference of the probe tips of multiple probes in different orientations in the probe card plane can be obtained. If the height difference of the probe tips is not greater than a needle tip height difference threshold, it is determined that the probe card plane is leveled, and the leveling process of the probe card plane can be ended. If the height difference of the probe tips is greater than the needle tip height difference threshold, the probe card plane needs to be leveled again.

[0142] In another possible implementation, when the leveled needle card fitting plane and the reference plane meet the parallel condition and the height difference of the probe tips in the probe card after leveling is not greater than the tip height difference threshold, it is determined that the needle card plane has been leveled, and the leveling process of the needle card plane is ended. If the leveled needle card fitting plane and the reference plane do not meet the parallel condition and the height difference of the probe tips in the probe card after leveling is greater than the preset difference, the needle card plane needs to be leveled again.

[0143] In the disclosed embodiment, after the probe card plane is leveled once, the horizontality of the probe card plane after leveling can be determined. When the needle card fitting plane and the reference plane meet the parallel condition, and / or the height difference of the probe needle tips in the probe card after leveling is not greater than the needle tip height difference threshold, the leveling process of the probe card plane is terminated. Otherwise, the next leveling of the probe card plane can improve the leveling accuracy.

[0144] In a possible implementation, Figure 6 As shown, the leveling method of the probe card includes the following steps 610-6100: Step 610, determining the probe card fitting plane of the probe card.

[0145] Step 620: Obtain the leveling correction direction and the leveling pass ratio.

[0146] Step 630: Calculate the initial movement amount of at least one movement unit.

[0147] Step 640 , determining whether the initial movement position of the movement unit is outside the preset limit range, if so, executing step 660 , if not, executing step 650 .

[0148] The initial movement position is determined based on the initial movement amount of the movement unit.

[0149] Step 650: determine the initial motion amount as the motion amount corresponding to the motion unit.

[0150] Step 660, weakening the initial movement amount.

[0151] Step 670 , determining whether there is a weakened motion position of the motion unit that is outside the preset limit range, if so, executing step 690 , if not, executing step 680 .

[0152] The weakened movement position is determined based on the movement amount after the latest weakening.

[0153] Step 680: determine the weakened motion amount as the motion amount corresponding to the motion unit.

[0154] If the weakened motion positions are all within the preset limit range, the motion amount obtained after the latest weakening can be determined as the post-weakening motion amount.

[0155] Step 690, determine whether the number of weakening times is not greater than the number threshold, if so, execute step 6100, if not, execute step 6110.

[0156] Step 6100, weaken the initial movement amount for the next time.

[0157] Each time the initial motion amount is weakened, step 670 is re-executed to determine whether the motion restriction condition of the motion unit is satisfied.

[0158] Step 6110, reset the amount of exercise and generate abnormal prompt information.

[0159] Step 6120, determine whether the movement amount of at least one motion unit meets the motion coplanarity condition, if so, execute step 6130, if not, end.

[0160] After the motion amount of the motion unit is determined, it can be determined whether the motion coplanarity condition is met.

[0161] Step 6130, controlling at least one motion unit to move based on the corresponding motion amount.

[0162] The implementation of steps 610-6130 may refer to the above embodiments and will not be described in detail here.

[0163] like Figure 7 As shown, it shows a schematic structural diagram of a probe card leveling device provided by an exemplary embodiment of the present disclosure, the device comprising: A plane fitting module 710, for obtaining a probe card fitting plane based on a probe card tip position, wherein the probe card is mounted on a probe carrier, and the probe carrier includes at least one motion unit for leveling a probe card plane of the probe card; A movement amount determination module 720, configured to determine the movement amount corresponding to the at least one movement unit based on the parallelism between the needle card fitting plane and the reference plane; The motion control module 730 is used to control the at least one motion unit to move based on the corresponding motion amount in response to the motion amount corresponding to the at least one motion unit satisfying the motion coplanarity condition, so as to level the needle card plane of the probe card.

[0164] The leveling device of the probe card in the embodiment of the present disclosure corresponds to the embodiment of the leveling method of the probe card in the present disclosure, and the relevant contents can be referenced to each other, which will not be repeated here. The beneficial technical effects corresponding to the leveling device of the probe card in the embodiment of the present disclosure can refer to the corresponding beneficial technical effects of the corresponding exemplary method part above, which will not be repeated here.

[0165] In addition, an embodiment of the present disclosure further provides an electronic device, including: Memory for storing computer programs; The processor is used to execute the computer program stored in the memory, and when the computer program is executed, the leveling method of the probe card described in any of the above embodiments of the present disclosure is implemented.

[0166] Figure 8 is a schematic diagram of the structure of an electronic device provided by an exemplary embodiment of the present disclosure, such as Figure 8 As shown, the electronic device includes one or more processors and memory.

[0167] The processor may be a central processing unit (CPU) or other forms of processing units having data processing capabilities and / or instruction execution capabilities, and may control other components in the electronic device to perform desired functions.

[0168] The memory may store one or more computer program products, and the memory may include various forms of computer-readable storage media, such as volatile memory and / or non-volatile memory. The volatile memory may include, for example, a random access memory (RAM) and / or a cache memory (cache), etc. The non-volatile memory may include, for example, a read-only memory (ROM), a hard disk, a flash memory, etc. One or more computer program products may be stored on the computer-readable storage medium, and the processor may run the computer program product to implement the leveling method of the probe card of each embodiment of the present disclosure described above and / or other desired functions.

[0169] In one example, the electronic device may further include: an input device and an output device, and these components are interconnected via a bus system and / or other forms of connection mechanisms (not shown).

[0170] In addition, the input device may also include, for example, a keyboard, a mouse, and the like.

[0171] The output device can output various information to the outside, including determined distance information, direction information, etc. The output device can include, for example, a display, a speaker, a printer, a communication network and a remote output device connected thereto, and the like.

[0172] Of course, to simplify, Figure 8 Only some of the components related to the present disclosure in the electronic device are shown, and components such as a bus, an input / output interface, etc. are omitted. In addition, according to specific application situations, the electronic device may further include any other appropriate components.

[0173] In addition to the above-mentioned methods and devices, an embodiment of the present disclosure may also be a computer program product, which includes computer program instructions, which, when executed by a processor, enable the processor to execute the steps of the leveling method of the probe card according to various embodiments of the present disclosure described in the above part of this specification.

[0174] The computer program product may be written in any combination of one or more programming languages ​​to write program code for performing the operations of the disclosed embodiments, including object-oriented programming languages ​​such as Java, C++, etc., and conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user computing device, partially on the user device, as a separate software package, partially on the user computing device and partially on a remote computing device, or entirely on a remote computing device or server.

[0175] In addition, an embodiment of the present disclosure may also be a computer-readable storage medium having computer program instructions stored thereon, which, when executed by a processor, enable the processor to execute the steps of the leveling method of the probe card according to various embodiments of the present disclosure described in the above part of this specification.

[0176] The computer readable storage medium can adopt any combination of one or more readable media. The readable medium can be a readable signal medium or a readable storage medium. The readable storage medium can include, for example, but is not limited to, a system, device or device of electricity, magnetism, light, electromagnetic, infrared, or semiconductor, or any combination of the above. More specific examples (non-exhaustive list) of readable storage media include: an electrical connection with one or more wires, a portable disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above.

[0177] The basic principles of the present disclosure are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present disclosure are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present disclosure. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, and are not limitations. The above details do not limit the present disclosure to the necessity of adopting the above specific details to be implemented.

[0178] Each embodiment in this specification is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the system embodiment, since it basically corresponds to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0179] The block diagrams of the devices, apparatuses, equipment, and systems involved in this disclosure are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including," "comprising," "having," and the like are open words, referring to "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or," and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.

[0180] The method and apparatus of the present disclosure may be implemented in many ways. For example, the method and apparatus of the present disclosure may be implemented by software, hardware, firmware, or any combination of software, hardware, and firmware. The above order of steps for the method is for illustration only, and the steps of the method of the present disclosure are not limited to the order specifically described above, unless otherwise specifically stated. In addition, in some embodiments, the present disclosure may also be implemented as a program recorded in a recording medium, which includes machine-readable instructions for implementing the method according to the present disclosure. Therefore, the present disclosure also covers a recording medium storing a program for executing the method according to the present disclosure.

[0181] It should also be noted that in the apparatus, device and method of the present disclosure, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present disclosure.

[0182] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0183] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A method for leveling a probe card, characterized in that: The method comprises: Acquiring a probe card fitting plane based on a probe card tip position, wherein the probe card is mounted on a probe carrier, and the probe carrier includes at least one motion unit for leveling a probe card plane of the probe card; Determining the movement amount corresponding to the at least one movement unit based on the parallelism between the needle card fitting plane and the reference plane; In response to the corresponding movement amount of the at least one movement unit satisfying the movement coplanarity condition, the at least one movement unit is controlled to move based on the corresponding movement amount to level the probe card plane of the probe card.

2. The method according to claim 1, characterized in that The step of determining the movement amount corresponding to the at least one movement unit based on the parallelism between the needle card fitting plane and the reference plane comprises: Determining an initial movement amount corresponding to the at least one movement unit based on the parallelism between the needle card fitting plane and the reference plane; respectively determining an initial movement position of the at least one movement unit after movement based on the corresponding initial movement amount; In response to the initial movement positions being all within a preset limit range, determining the initial movement amount corresponding to the at least one movement unit as the movement amount of the at least one movement unit, the preset limit range being a position limit range within which the movement unit is allowed to move; In response to at least one of the initial movement positions being outside a preset limit range, the initial movement amount corresponding to the at least one movement unit is weakened, and the weakened movement amount corresponding to the at least one movement unit is determined as the movement amount of the movement unit.

3. The method according to claim 2, characterized in that The needle card fitting plane and the reference plane are located in the same spatial coordinate system; The determining of the initial movement amount corresponding to the at least one movement unit based on the parallelism between the needle card fitting plane and the reference plane comprises: Determining the plane normal vector of the needle card fitting plane; Based on the plane normal vector and the target reference position corresponding to the target motion unit on the reference plane, determine the initial intersection position of the target straight line where the target motion unit is located and the needle card fitting plane, the target straight line is perpendicular to the reference plane, and the target motion unit is any one of the at least one motion unit; An initial projection distance from the initial intersection position to the reference plane is determined as the target initial motion amount corresponding to the target motion unit.

4. The method according to claim 2, characterized in that: The weakening of the initial movement amount corresponding to the at least one movement unit comprises: Performing an i-th weakening on the initial motion amount corresponding to the at least one motion unit to obtain an i-th weakened motion amount, wherein i is a positive integer not less than 1; respectively determining an i-th weakened motion position of the at least one motion unit after the at least one motion unit moves based on the corresponding i-th weakened motion amount; In response to the i-th weakened motion position being within the preset limit range, determining the i-th weakened motion amount corresponding to the at least one motion unit as the weakened motion amount corresponding to the at least one motion unit; In response to at least one of the i-th weakening movement positions being outside a preset limit range, an i+1-th weakening is performed based on the i-th weakening movement amount.

5. The method according to claim 4, characterized in that The initial movement amount of the motion unit is determined based on the plane normal vector of the needle card fitting plane; The step of weakening the initial motion amount corresponding to the at least one motion unit for the i-th time to obtain the i-th weakened motion amount includes: Perform the i-th weakening of the normal vector of the i-1 weakening plane to obtain the i-th weakening plane normal vector; Based on the i-th weakening plane normal vector and the target reference position corresponding to the target motion unit on the reference plane, determine the i-th intersection position of the target straight line where the target motion unit is located and the i-th needle card fitting plane, the target straight line is perpendicular to the reference plane, and the target motion unit is any motion unit among the at least one motion unit; The i-th projection distance from the i-th intersection position to the reference plane is determined as the i-th weakened motion amount corresponding to the target motion unit.

6. The method according to claim 5, characterized in that The step of performing the i-th weakening on the normal vector of the i-1 weakening plane comprises: Determine at least one i-1th weakened movement amount corresponding to at least one i-1th target movement position, wherein the i-1th target movement position is an i-1th weakened movement position outside a preset restriction range; Determine at least one weakening ratio based on the at least one i-1th weakened motion amount and the i-1th target motion position corresponding to each of them; Based on the maximum weakening ratio among the at least one weakening ratio, the target normal vector component corresponding to the maximum weakening ratio is weakened, and the target normal vector component corresponding to the maximum weakening ratio is the normal vector component corresponding to the target motion unit corresponding to the maximum weakening ratio, and different motion units correspond to different normal vector components.

7. The method according to claim 6, characterized in that After determining and obtaining at least one weakening ratio, the method further includes: In response to the at least one weakening ratio not being greater than a preset ratio threshold, setting the weakening ratio to a preset value, the preset value being greater than the preset ratio threshold; Based on the weakening ratio set to the preset value, the normal vector component corresponding to the motion unit corresponding to the (i-1)th target motion position is weakened.

8. The method according to claim 4, characterized in that The step of weakening the initial movement amount corresponding to the at least one movement unit for the i-th time includes: In response to the weakening number being not greater than the number threshold, weakening the initial movement amount corresponding to the at least one movement unit for an i-th time; The method further comprises: In response to the weakening times being greater than the times threshold, abnormal prompt information is generated, where the abnormal prompt information is used to indicate that a weakening method for the initial exercise amount needs to be set.

9. The method according to claim 3, characterized in that: Before determining the plane normal vector of the needle card fitting plane, the method further includes: Get the preset leveling pass ratio and leveling correction direction; After determining the plane normal vector of the needle card fitting plane, the method further includes: Based on the leveling pass ratio, a correction normal vector component corresponding to the leveling correction direction in the plane normal vector is corrected to obtain a correction normal vector; Based on the corrected normal vector and the target reference position corresponding to the target motion unit on the reference plane, determining the corrected intersection position of the target straight line where the target motion unit is located and the corrected needle card fitting plane, the target straight line is perpendicular to the reference plane, and the target motion unit is any one of the at least one motion unit; The corrected projection distance from the corrected intersection position to the reference plane is determined as the target initial motion amount corresponding to the target motion unit.

10. The method according to any one of claims 1 to 9, characterized in that: The motion unit includes a motion motor; The respectively controlling the at least one motion unit to move based on the corresponding motion amount comprises: Acquiring the motor torque of the motion motor during the motion of the motion unit; In response to the motor torque being within a first preset torque range, the motion unit is controlled to move.

11. The method according to any one of claims 1 to 9, characterized in that: After respectively controlling the at least one motion unit to move based on the corresponding motion amount, the method further includes: Obtaining a probe card fitting plane after leveling based on the probe card tip position after leveling; In response to the probe card fitting plane and the reference plane not satisfying the parallel condition after the leveling, and / or in response to the height difference of the probe tips in the probe card after the leveling being greater than the tip height difference threshold, the probe card plane of the probe card is leveled again.

12. The method according to any one of claims 1 to 9, characterized in that: Before acquiring the probe card fitting plane based on the probe card needle tip position, the method further includes: Acquire a reference position corresponding to the at least one motion unit after the probe carrying device is leveled; The reference plane is determined based on a reference position corresponding to the at least one motion unit.

13. The method according to claim 12, characterized in that The probe carrying device is leveled based on a debugging device, and the debugging device is installed on the probe carrying device when leveling the probe carrying device; The method further comprises: In the process of leveling the probe carrying device by using the at least one motion unit, obtaining the motor torque of the motion motor respectively included in the at least one motion unit, and obtaining the height difference of the multiple focus points included in the debugging device; In response to the motor torques of the motion motors being within a second preset torque range and the height differences of the plurality of focus points being no greater than a focus point height difference threshold, it is determined that the probe carrying device is leveled.

14. A probe card leveling device, characterized in that: The device comprises: a plane fitting module, for obtaining a probe card fitting plane based on a probe card needle tip position, wherein the probe card is mounted on a probe carrier, and the probe carrier includes at least one motion unit for leveling a probe card plane of the probe card; A movement amount determination module, used to determine the movement amount corresponding to the at least one movement unit based on the parallelism between the needle card fitting plane and the reference plane; The motion control module is used to control the at least one motion unit to move based on the corresponding motion amount in response to the motion amount corresponding to the at least one motion unit satisfying the motion coplanarity condition, so as to level the needle card plane of the probe card.

15. A probe station device, characterized in that: The device comprises a host computer and a probe carrying device, wherein the host computer runs a leveling device of a probe card, and the probe carrying device comprises a loading structure for loading the probe card and at least one motion unit for leveling a needle card plane of the probe card; The leveling device is used to obtain a probe card fitting plane based on the probe card needle tip position; determine the movement amount corresponding to the at least one motion unit based on the parallelism between the probe card fitting plane and the reference plane; and control the at least one motion unit to move based on the corresponding movement amount in response to the corresponding movement amount of the at least one motion unit satisfying the motion coplanarity condition; The at least one motion unit is used to move based on a corresponding motion amount to level the probe card plane of the probe card.

16. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the probe card leveling method described in any one of claims 1 to 13 is implemented.

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