Leveling Method, Device, Equipment and Storage Medium of Probe Card

Abstract

An embodiment of the present disclosure discloses a method, device, equipment, and storage medium for leveling a probe card. By obtaining a needle card fitting plane based on the positions of the tips of the probe card, wherein the probe card is installed on a probe carrying device, and the probe carrying device includes at least one motion unit for leveling the needle card plane of the probe card; determining the amount of motion corresponding to the at least one motion unit based on the parallelism between the needle card fitting plane and a reference plane; and in response to the amount of motion corresponding to the at least one motion unit satisfying the condition of coplanar motion, respectively controlling the at least one motion unit to move based on the corresponding amount of motion to level the needle card plane of the probe card, automatic leveling of the needle card plane of the probe card can be achieved, which helps to improve the accuracy and adjustment efficiency of probe card leveling.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor technology, and in particular, to a leveling method, device, equipment and storage medium for a probe card. Background Art

[0002] A probe card is an interface connecting a test device and a semiconductor wafer. The probes in the probe card contact the surface of the wafer to transmit the test signals output by the test device to the wafer.

[0003] Before using the probe card for testing, it is necessary to align the probes in the probe card to facilitate testing the wafer under test using the probe card. The flatness of the needle card plane of the probe card will affect the alignment effect of the probes. Therefore, it is necessary to level the needle card plane before using the probe card.

[0004] In the related art, the height of the panel where the probe card is located is manually adjusted to adjust the needle card plane, but the manual adjustment method has low efficiency and adjustment accuracy, which affects the alignment effect of the probes. Summary of the Invention

[0005] Embodiments of the present disclosure provide a leveling method, device, equipment and storage medium for a probe card to solve the above technical problems to a certain extent.

[0006] One aspect of the embodiments of the present disclosure provides a leveling method for a probe card, including:

[0007] Obtaining a needle card fitting plane based on the positions of the probe tips of the probe card, where the probe card is installed on a probe carrying device, and the probe carrying device includes at least one motion unit for leveling the needle card plane of the probe card;

[0008] Determining the amount of movement corresponding to the at least one motion unit based on the parallelism between the needle card fitting plane and a reference plane;

[0009] In response to the amount of movement corresponding to the at least one motion unit satisfying the motion coplanarity condition, respectively controlling the at least one motion unit to move based on the corresponding amount of movement to level the needle card plane of the probe card.

[0010] Another aspect of the embodiments of the present disclosure provides a leveling device for a probe card, including:

[0011] A plane fitting module for obtaining a needle card fitting plane based on the positions of the probe tips of the probe card, where the probe card is installed on a probe carrying device, and the probe carrying device includes at least one motion unit for leveling the needle card plane of the probe card;

[0012] An amount of movement determining module for determining the amount of movement corresponding to the at least one motion unit based on the parallelism between the needle card fitting plane and a reference plane;

[0013] A motion control module, configured to, in response to the motion amounts corresponding to the at least one motion unit satisfying a motion coplanarity condition, respectively control the at least one motion unit to move based on the corresponding motion amounts, so as to level the needle card plane of the probe card.

[0014] Another aspect of the embodiments of the present disclosure provides a probe station device, which includes a host computer and a probe carrier device. The host computer runs a leveling device for a probe card. The probe carrier device includes a loading structure for installing the probe card and at least one motion unit for leveling the needle card plane of the probe card.

[0015] The leveling device is configured to obtain a needle card fitting plane based on the tip positions of the probe card; determine the motion amounts corresponding to the at least one motion unit based on the parallelism between the needle card fitting plane and a reference plane; and in response to the motion amounts corresponding to the at least one motion unit satisfying the motion coplanarity condition, respectively control the at least one motion unit to move based on the corresponding motion amounts.

[0016] The at least one motion unit is respectively configured to move based on the corresponding motion amounts to level the needle card plane of the probe card.

[0017] Another aspect of the embodiments of the present disclosure provides an electronic device, including: a memory for storing a computer program; and a processor for executing the computer program stored in the memory, and when the computer program is executed, implementing the probe card leveling method according to any one of the above embodiments.

[0018] Another aspect of the embodiments of the present disclosure provides a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, implementing the probe card leveling method according to any one of the above embodiments.

[0019] Another aspect of the embodiments of the present disclosure provides a computer program product, including a computer program, and when the computer program is executed by a processor, implementing the probe card leveling method according to any one of the above embodiments.

[0020] In the embodiments of the present disclosure, at least one motion unit included in the probe carrier device is used to level the needle card plane of the probe card mounted on the probe carrier device. For the probe card placed on the probe carrier device, based on the needle card fitting plane determined by the tip positions of the probe card, the amount of motion corresponding to at least one motion unit for leveling the probe card is determined according to the parallelism between the needle card fitting plane and the reference plane. When the amounts of motion corresponding to at least one motion unit satisfy the motion coplanarity condition, the motion unit can be controlled to move based on the corresponding amount of motion, realizing the automatic leveling of the needle card plane of the probe card, which helps to improve the accuracy and adjustment efficiency of probe card leveling, so that the probes in the probe card are easy to identify or focus, and helps to improve the needle alignment effect of the probes. In addition, when ensuring that the amounts of motion corresponding to at least one motion unit satisfy the motion coplanarity condition, controlling the motion unit to move can ensure that the coplanar state is maintained during and after the movement of the motion unit, avoiding the problem of damage to the loading structure of the probe carrier device caused by the irregular movement of different motion units, and helping to improve the safety of the automatic leveling process.

[0021] The technical solutions of the present disclosure will be further described in detail below with reference to the drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings forming a part of the specification depict embodiments of the present disclosure and, together with the description, are used to explain the principles of the present disclosure.

[0023] Referring to the drawings, the present disclosure can be more clearly understood from the following detailed description, wherein:

[0024] Figure 1 is a schematic structural diagram of a probe station device provided by an exemplary embodiment of the present disclosure;

[0025] Figure 2 is a flowchart of a method for leveling a probe card provided by an exemplary embodiment of the present disclosure;

[0026] Figure 3 is a flowchart of a process for determining the amount of motion provided by an exemplary embodiment of the present disclosure;

[0027] Figure 4 is a schematic diagram of a needle card fitting plane and a reference plane provided by an exemplary embodiment of the present disclosure;

[0028] Figure 5 is a flowchart of a process for weakening the initial amount of motion provided by an exemplary embodiment of the present disclosure;

[0029] Figure 6 is a flowchart of a method for leveling a probe card provided by another exemplary embodiment of the present disclosure;

[0030] Figure 7It is a schematic structural diagram of a leveling device of a probe card provided by an exemplary embodiment of the present disclosure;

[0031] Figure 8 It is a schematic structural diagram of an electronic device provided by an exemplary embodiment of the present disclosure. Detailed implementation manners

[0032] Now, various exemplary embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. It should be noted that: unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present disclosure.

[0033] Embodiments of the present disclosure can be applied to electronic devices such as terminal devices, computer systems, servers, etc., which can operate together with many other general-purpose or special-purpose computing system environments or configurations. Examples of well-known terminal devices, computing systems, environments, and / or configurations suitable for use with electronic devices such as terminal devices, computer systems, servers, etc. include, but are not limited to: personal computer systems, server computer systems, thin clients, thick clients, handheld or laptop devices, microprocessor-based systems, set-top boxes, programmable consumer electronics, network personal computers, minicomputer systems, mainframe computer systems, and distributed cloud computing technology environments including any of the above systems, and so on.

[0034] Electronic devices such as terminal devices, computer systems, servers, etc. can be described in the general context of computer system-executable instructions (such as program modules) executed by a computer system. Generally, program modules can include routines, programs, object programs, components, logics, data structures, and so on, which perform specific tasks or implement specific abstract data types. The computer system / server can be implemented in a distributed cloud computing environment where tasks are executed by remote processing devices linked through a communication network. In a distributed cloud computing environment, program modules can be located on local or remote computing system storage media including storage devices.

[0035] The probe station device includes a wafer to be measured carrier stage and a probe carrier device. The probe carrier device includes a loading structure for loading a probe card. The probe card can be placed on the loading structure. The wafer to be measured can be placed on the wafer to be measured carrier stage. One end of the probe of the probe card is docked with the wafer to be measured, and the other end is docked with the test device, so as to realize the information interaction between the probe station device and the test device. The test device outputs a test signal to the wafer to be measured through the probe card. Before connecting the probe card to the wafer to be measured, it is necessary to accurately align the probes in the probe card with the wafer to be measured, that is, it is necessary to perform needle alignment on the probes in the probe card. During the needle alignment process, a camera is usually used to focus on the tip of the needle or identify the probe. When the probe card is tilted or uneven, the probes in the probe card are not easily identified or focused. To ensure that the probes can be identified or focused, it is necessary to ensure the levelness of the needle card plane of the probe card. In the related art, after the probe card is placed on the loading structure, the height of the loading structure is manually adjusted. After the loading structure is leveled, it is considered that the probe card is leveled, that is, the needle card plane of the probe card is leveled. However, the manual leveling method has low accuracy and low efficiency.

[0036] In the embodiments of the present disclosure, automatic leveling of the probe card can be realized to improve the leveling accuracy and efficiency of the probe card. Those skilled in the art know that in the embodiments of the present disclosure, leveling the probe card means leveling the needle card plane of the probe card.

[0037] As Figure 1 shown, it shows a probe station device provided by an exemplary embodiment of the present disclosure. The device includes a host computer 11 and a probe carrier device 12. Among them, a leveling device 110 for the probe card runs in the host computer 11. The probe carrier device 12 includes at least one motion unit 121 for leveling the needle card plane of the probe card and a loading structure 122 for loading the probe card. Each motion unit 121 in the at least one motion unit 121 is respectively connected to the loading structure 122 for loading the probe card. When the at least one motion unit 121 moves, the plane state of the loading structure 122 changes accordingly. By controlling the movement of the at least one motion unit 121, the plane of the loading structure 122 can be adjusted, so that the probe card loaded on the loading structure 122 can be leveled. Optionally, the host computer 11 can be the above-mentioned electronic device, in which a leveling device 110 for the probe card runs. Among them, the leveling device 110 is used to control the movement of the motion unit 121 in the probe carrier device 12, so as to adjust the probe carrier device, and further realize the automatic leveling of the probe card installed on the loading structure 122 of the probe carrier device 12. In a possible implementation manner, after the probe card is placed on the loading structure 122, the leveling device 110 can determine the leveling method according to the plane state of the probe card placed on the loading structure 122, and control the motion unit 121 to move to realize the leveling of the probe card.

[0038] Optionally, the probe carrier device 12 is provided with motion units 121 at different orientations. By controlling the motion of the motion units 121 at different orientations, the height of different orientations of the loading structure 122 can be adjusted respectively, and then the height of different orientations of the probe card can be adjusted to achieve automatic leveling of the probe card. As Figure 1 shown, the probe carrier device 12 is respectively provided with motion units 121 at orientation A, orientation B, and orientation C. By controlling the motion of the motion units 121 at orientation A, orientation B, and orientation C, the height adjustment of the probe cards on the loading structure 122 on the A, B, and C sides of the probe card can be realized, so as to realize automatic leveling of the probe card.

[0039] In an exemplary embodiment, the leveling device is configured to obtain a needle card fitting plane based on the tip positions of the probe card; determine the amount of motion corresponding to at least one motion unit based on the parallelism between the needle card fitting plane and a reference plane; and in response to the amount of motion corresponding to at least one motion unit satisfying the motion coplanarity condition, respectively control at least one motion unit to move based on the corresponding amount of motion. At least one motion unit is respectively configured to move based on the amount of motion to level the needle card plane of the probe card.

[0040] As Figure 2 shown, it shows a flowchart of a method for leveling a probe card provided by an exemplary embodiment of the present disclosure. This method can be used for a host computer. Exemplarily, it can be used for a leveling device 110 running in the host computer. This method includes steps 210-230:

[0041] Step 210, obtain a needle card fitting plane based on the tip positions of the probe card, where the probe card is installed on a probe carrier device, and the probe carrier device includes at least one motion unit for leveling the needle card plane of the probe card.

[0042] After a probe card is placed on the probe carrier device, the needle card fitting plane corresponding to the probe card can be determined. The needle card fitting plane can be obtained by fitting the tip positions of multiple probes in the probe card and is used to represent the plane where multiple probes in the probe card are located. The needle card plane is the real plane corresponding to the probe card. By leveling the needle card plane of the probe card, all probes in the probe card can be easily identified or focused at the same focusing height.

[0043] In a possible implementation manner, a high-magnification camera can be used to focus to obtain the tip positions of multiple probes in the probe card. Specifically, the three-dimensional coordinate information of the tips of multiple probes in the target space coordinate system can be obtained, including the position information in the X and Y directions and the height information in the Z direction. The target space coordinate system can be a preset space coordinate system, and the preset space coordinate system is a space coordinate system established based on a preset reference plane with the reference plane as the coordinate base.

[0044] Based on the tip positions (i.e., three-dimensional coordinate information) of multiple probes, a probe card fitting plane based on the tip positions can be fitted. Exemplarily, the tip positions of three probes in the probe card can be obtained, and a probe card fitting plane can be fitted based on the tip positions of the three probes.

[0045] Optionally, multiple probes located in different orientations can be selected, the tip positions of the multiple probes located in different orientations can be obtained, and a probe card fitting plane can be fitted based on the tip positions of the multiple probes in different orientations. Schematically, as shown in Figure 1 shown, the tip positions of multiple probes located in the A direction, B direction, and C direction respectively can be obtained, and a probe card fitting plane can be fitted based on the multiple tip positions.

[0046] Step 220, determine the amount of movement corresponding to at least one motion unit based on the parallelism between the probe card fitting plane and the reference plane.

[0047] The reference plane is the reference plane for leveling the probe card, and the reference plane is a plane infinitely close to the horizontal plane. Optionally, the reference plane can be obtained based on the reference position corresponding to the motion unit after manually debugging the motion unit of the probe carrier device until the probe carrier device is leveled.

[0048] In this embodiment, the motion unit includes a motion motor. After the motion motor moves to a certain position, the step position corresponding to the motion motor is obtained. When the spatial plane formed by multiple reference points on the loading structure for loading the probe card is coplanar and nearly parallel, the spatial plane formed by the multiple reference points is the reference plane, where the multiple reference points are the points corresponding to the step position of the motion motor on the loading structure. The reference position corresponding to the motion unit is the reference point corresponding to the step position of the motion motor on the loading structure, and can also be regarded as the intersection point of the straight line perpendicular to the plane of the leveled loading structure where the motion unit is located and the plane of the leveled loading structure.

[0049] After determining the probe card fitting plane of the probe card, the amount of movement corresponding to at least one motion unit can be determined according to the parallelism difference between the probe card fitting plane of the probe card and the reference plane. Optionally, at least one motion unit includes motion units located in different orientations of the probe card, and the heights of different orientations of the probe card can be adjusted through the motion units in different orientations, thereby realizing the leveling of the probe card.

[0050] In a possible implementation manner, the amount of movement corresponding to each motion unit can be determined respectively according to the parallelism difference between the probe card fitting plane of the probe card and the reference plane, that is, the amount of movement corresponding to at least one motion unit is determined respectively. Among them, the determined amount of movement includes the amount of movement of the motion units in different orientations, and the motion units in different orientations can be controlled to move respectively according to the amount of movement of each motion unit.

[0051] Step 230: In response to the amount of movement corresponding to at least one movement unit satisfying the movement coplanarity condition, control at least one movement unit to move based on the corresponding amount of movement respectively, so as to level the needle card plane of the probe card.

[0052] When the movement unit performs irregular movements, such as movement units in different orientations moving in opposite directions or having too large a movement gap, the movement process and the movement positions after movement of the movement units are not coplanar, which may cause a risk of damage to the loading structure of the probe carrier device. To improve the safety of the leveling process, after determining the amount of movement corresponding to at least one movement unit, it is possible to determine whether at least one movement unit is coplanar after movement according to the amount of movement corresponding to at least one movement unit. If the amount of movement corresponding to at least one movement unit satisfies the preset movement coplanarity condition for at least one movement unit, then control each movement unit in at least one movement unit to move based on their respective corresponding amounts of movement.

[0053] In a possible implementation manner, the movement coplanarity condition is a preset condition related to the amount of movement. Among them, the movement coplanarity condition is related to the amount of movement corresponding to each movement unit. When the relationship between the amounts of movement corresponding to at least one movement unit satisfies the movement coplanarity condition, the corresponding movement unit can be controlled to move based on each amount of movement respectively, so as to level the needle card plane of the probe card.

[0054] Schematically, in combination with Figure 1 As shown, after the probe card is placed on the probe carrier device, the amounts of movement of movement unit A located at orientation A, movement unit B located at orientation B, and movement unit C located at orientation C can be determined respectively according to the parallelism difference between the needle card fitting plane and the reference plane. When the three amounts of movement satisfy the movement coplanarity condition, control movement unit A to move based on the amount of movement of movement unit A, control movement unit B to move based on the amount of movement of movement unit B, and control movement unit C to move based on the amount of movement of movement unit C. Of course, those skilled in the art know that there may also be a situation where only one movement unit needs to be adjusted to achieve the parallelism of the needle card plane of the probe card.

[0055] In a possible situation, after the probe card is placed on the probe carrier device, it may already be in a horizontal state and no leveling is required. When it is determined that the needle card plane of the probe card is in a non-horizontal state, level the probe card.

[0056] In an exemplary embodiment, if the needle card fitting plane is parallel to the reference plane, and / or the height difference between the tips of the probes in the probe card is less than the tip height difference threshold, it can be determined that the probe card is in a horizontal state. Among them, whether the needle card fitting plane is parallel to the reference plane can be determined according to the movement amounts of at least one motion unit calculated. If the movement amounts of at least one motion unit are all less than the preset movement threshold, it can be determined that the needle card fitting plane is parallel to the reference plane.

[0057] In the embodiments of the present disclosure, at least one motion unit included in the probe carrier device is used to level the needle card plane of the probe card installed on the probe carrier device. For the probe card placed on the probe carrier device, the needle card fitting plane of the probe card can be determined based on the positions of the probe tips of the probe card. According to the parallelism difference between the needle card fitting plane and the reference plane, the movement amounts corresponding to at least one motion unit for leveling the probe card are determined. When the movement amounts corresponding to at least one motion unit satisfy the motion coplanarity condition, the motion unit is controlled to move based on the corresponding movement amounts, so as to realize the automatic leveling of the needle card plane of the probe card, which helps to improve the accuracy and adjustment efficiency of the probe card leveling, so that the probes in the probe card are easy to identify or focus, and helps to improve the needle alignment effect of the probes. In addition, when ensuring that the movement amounts corresponding to at least one motion unit satisfy the motion coplanarity condition, controlling the motion unit to move can ensure that the coplanar state is maintained during and after the movement of the motion unit, and avoid the problem of damage to the loading structure caused by the irregular movement of different motion units, which helps to improve the safety of the automatic leveling process.

[0058] As Figure 3 shown, it shows a flowchart of a method for leveling a probe card provided by another exemplary embodiment of the present disclosure. This method can be used for a host computer. Exemplarily, it can be used for a leveling device 11 running in the host computer. The method includes the following steps 310-360:

[0059] Step 310, obtain the reference positions corresponding to at least one motion unit after the probe carrier device is leveled.

[0060] Optionally, at least one motion unit can be manually debugged in advance to level the probe carrier device. In a possible implementation manner, the levelness of the corresponding bearing plane of the probe carrier device can be detected by a level, and it can be determined whether the probe carrier device has been leveled according to the detected levelness.

[0061] In another possible implementation manner, a tooling device can be pre-installed on the loading structure of the probe carrier device. After installation, at least one motion unit is manually debugged, and the height differences of multiple focusing point positions in the tooling device are obtained. When the height differences of the focusing point positions are not greater than the focusing point height difference threshold, it can be determined that the probe carrier device has been leveled.

[0062] As is known to those skilled in the art, the tooling equipment is debugging equipment, including focal points set in multiple directions. The process of leveling the probe carrier device using the debugging equipment may include the following steps 1 to 2:

[0063] Step 1, during the process of leveling the probe carrier device using at least one motion unit, obtain the motor torque of each motion motor included in at least one motion unit, and obtain the height difference between multiple focal points included in the debugging equipment.

[0064] During the movement of the motion unit, it is necessary to monitor the motor torque of the motion motor included in the motion unit, and ensure that the motor torque of the motion motor is within the second preset torque range to ensure the leveling accuracy, where the second preset torque range is much smaller than the first preset torque range.

[0065] The debugging equipment includes multiple focal points located in multiple directions, and it is possible to determine whether the probe carrier device has been leveled based on the height difference between the multiple focal points. The height difference between the multiple focal points is the height difference between the highest point and the lowest point among the multiple focal points, and can be determined based on the z-direction height information of the focal points collected by the camera.

[0066] Step 2, in response to the motor torques of the motion motors all being within the second preset torque range and the height difference between the multiple focal points not being greater than the focal point height difference threshold, determine that the probe carrier device is leveled.

[0067] Under the condition of ensuring that the motor torque of each motion motor is always within the second preset torque range, it is possible to obtain the height difference between the multiple focal points in real time. When the height difference between the multiple focal points is not greater than the focal point height difference threshold, it is determined that the probe carrier device has been leveled, and the reference position corresponding to at least one motion unit can be obtained.

[0068] Step 320, determine a reference plane based on the reference positions corresponding to at least one motion unit.

[0069] Based on the reference positions corresponding to at least one motion unit, a reference plane can be determined. Schematically, as shown in Figure 1 As shown, based on the reference position corresponding to motion unit A located in direction A (the intersection point of the straight line perpendicular to the leveled loading structure plane where motion unit A is located and the leveled loading structure plane), the reference position corresponding to motion unit B located in direction B (the intersection point of the straight line perpendicular to the leveled loading structure plane where motion unit B is located and the leveled loading structure plane), and the reference position corresponding to motion unit C located in direction C (the intersection point of the straight line perpendicular to the leveled loading structure plane where motion unit C is located and the leveled loading structure plane), a reference plane is determined.

[0070] In a possible implementation manner, a preset space coordinate system can be determined based on a reference plane and a preset fixed point. The preset space coordinate system takes the preset fixed point as the origin and the reference plane as the coordinate system base. Schematically, as Figure 4 shown, the preset space coordinate system takes the preset fixed point D as the origin and the reference plane A1B1C1D as the coordinate system base.

[0071] Step 330: Determine the initial motion amount corresponding to at least one motion unit based on the parallelism between the needle card fitting plane and the reference plane.

[0072] According to the parallelism difference between the needle card fitting plane and the reference plane, the motion amount that at least one motion unit needs to be adjusted, that is, the initial motion amount, can be determined. The process of determining the initial motion amount can include the following steps 3301-3303:

[0073] Step 3301: Determine the plane normal vector of the needle card fitting plane.

[0074] In a possible implementation manner, the distance between the reference plane and the needle card fitting plane on the target straight line where the motion unit is located can be determined according to the intersection position of the target straight line where the motion unit is located and the needle card fitting plane, so as to determine the motion amount corresponding to the motion unit. The target straight line where the motion unit is located is a straight line perpendicular to the reference plane. In this process, the plane normal vector of the needle card fitting plane can be determined first. In a possible implementation manner, after the needle card fitting plane is fitted based on the tip positions of multiple probes, the normal vector of the needle card fitting plane can be determined, or the plane normal vector of the needle card fitting plane can be directly calculated based on the tip positions of multiple probes. Schematically, the plane normal vector of the needle card fitting plane can be calculated based on the tip positions of three probes.

[0075] Optionally, the needle card fitting plane and the reference plane can be located in the same space coordinate system. Specifically, it can be located in the above-mentioned preset space coordinate system, and the plane normal vector of the needle card fitting plane in the preset space coordinate system can be determined.

[0076] Step 3302: Based on the plane normal vector and the target reference position corresponding to the target motion unit on the reference plane, determine the initial intersection position of the target straight line where the target motion unit is located and the needle card fitting plane.

[0077] Wherein, the target motion unit is any one of at least one motion unit.

[0078] In the embodiments of the present disclosure, the parallelism difference between the reference plane and the needle card fitting plane is determined based on a preset spatial coordinate system. Specifically, first, the respective reference positions of at least one motion unit on the reference plane are obtained, resulting in at least one reference position. Here, the reference position of the motion unit on the reference plane is the position coordinate corresponding to the motion unit based on the preset spatial coordinate system. According to the reference position corresponding to the motion unit, a target straight line passing through the reference position and perpendicular to the reference plane (i.e., the target straight line where the motion unit is located) can be determined, and thus the initial intersection position of the target straight line and the needle card fitting plane can be determined.

[0079] In a possible implementation manner, after determining the target reference position corresponding to the target motion unit, the initial intersection position of the target straight line where the target motion unit is located and the needle card fitting plane can be determined in combination with the plane normal vector of the needle card fitting plane. The initial intersection position refers to the spatial position in the preset spatial coordinate system of the intersection point of the target straight line where the motion unit is located and the needle card fitting plane.

[0080] Schematically, as Figure 4 shown, the normal vector coordinates of the fitted needle card fitting plane ABCD are (m, n, p), and the plane equation of the needle card fitting plane is mX + nY + pZ + d = 0. Here, the needle card fitting plane ABCD always passes through the origin D, so d = 0. The reference position corresponding to motion unit A is A1, the reference position corresponding to motion unit B is B1, and the reference position corresponding to motion unit C is C1. The coordinates of the reference position A1 in the preset spatial coordinate system are (a, 0, 0), the coordinates of the reference position B1 in the preset spatial coordinate system are (a, b, 0), and the coordinates of the reference position C1 in the preset spatial coordinate system are (0, b, 0). Here, a and b are fixed values. a is the distance between the preset fixed point D and the reference position corresponding to motion unit A in the x-axis direction, and b is the distance between the reference position corresponding to motion unit A and the reference position corresponding to motion unit B in the y-axis direction. The three straight lines passing through points A1, B1, and C1 are perpendicular to the XY plane (reference plane), and their corresponding direction vector is (0, 0, 1). According to point A1 and the direction vector of the straight line, the parametric equation of the straight line passing through point A1 and perpendicular to the reference plane is shown in the following formula (1):

[0081] (1)

[0082] Substituting the straight line equation (1) into the plane equation of the needle card plane, formula (2) can be obtained:

[0083] (2)

[0084] That is , from which the coordinates of the intersection point A of the straight line and the needle card fitting plane can be obtained as (a, 0, ), point A is the initial intersection position of the target straight line where the motion unit A is located and the fitting plane of the needle holder.

[0085] Referring to the above method, the coordinates of point B and point C can be determined. Point B is the initial intersection position of the target straight line where the motion unit B is located and the fitting plane of the needle holder, and point C is the initial intersection position of the target straight line where the motion unit C is located and the fitting plane of the needle holder.

[0086] Step 3303, determine the initial projection distance from the initial intersection position to the reference plane as the target initial motion amount corresponding to the target motion unit.

[0087] For the target motion unit, the initial projection distance from the corresponding initial intersection position of the target motion unit to the reference plane can be determined as the target initial motion amount of the target motion unit. That is, after determining the initial intersection positions corresponding to each motion unit, the initial projection distance from the initial intersection position to the reference plane can be determined as the initial motion amount corresponding to the motion unit.

[0088] Schematically, combined with Figure 4 shown, where is the coordinate value of point A in the Z direction, and it is also the initial projection distance d1 from the initial intersection position A of the motion unit A to the reference plane. This initial projection distance can be determined as the initial motion amount corresponding to the motion unit A. Combining the above example, the determined initial motion amount of the motion unit A is ; the initial motion amount of the motion unit B is (which is the initial projection distance d2 from the initial intersection position B of the motion unit B to the reference plane); the motion amount of the motion unit C is (which is the initial projection distance d3 from the initial intersection position C of the motion unit C to the reference plane), where p≠0.

[0089] Step 340, respectively determine the initial motion positions of at least one motion unit after moving based on the corresponding initial motion amounts.

[0090] After calculating each initial motion amount, the initial motion positions of at least one motion unit after moving based on the corresponding initial motion amounts can be calculated first. In this process, the initial motion positions of each motion unit after moving based on the corresponding initial motion amounts can be calculated respectively according to the initial motion amounts corresponding to each motion unit.

[0091] In a possible implementation manner, the initial motion position of a motion unit after moving is the sum of the current motion position of the motion unit and the corresponding initial motion amount. Among them, the current motion position of the motion unit can be directly obtained through the encoder.

[0092] Step 350, in response to the initial movement positions all being within a preset limit range, determine the initial movement amount corresponding to at least one movement unit as the movement amount of the at least one movement unit, where the preset limit range is the position limit range within which the movement unit is allowed to move.

[0093] Since the movement positions of the movement units are limited, when the initial movement positions after the movement units move based on the initial movement amounts do not exceed the allowed movement position limit range, that is, when the initial movement positions of each movement unit are all within the preset limit range, the initial movement amount of the movement unit can be determined as the movement amount of the movement unit, that is, determined as the actual movement amount of the movement unit during the leveling process. Among them, the preset limit range can be set in advance.

[0094] Combined with the above example, based on the current movement position of movement unit A and the corresponding initial movement amount determine the initial movement position after movement unit A moves, based on the current movement position of movement unit B and the corresponding initial movement amount determine the initial movement position after movement unit B moves, based on the current movement position of movement unit C and the corresponding initial movement amount determine the initial movement position after movement unit C moves. If the initial movement positions after movement unit A, movement unit B, and movement unit C move are all within the preset limit range, the initial movement amount of movement unit A can be determined as the movement amount corresponding to movement unit A, the initial movement amount of movement unit B can be determined as the movement amount corresponding to movement unit B, and the initial movement amount of movement unit C can be determined as the movement amount of movement unit C.

[0095] Step 360, in response to at least one initial movement position being outside the preset limit range, weaken the initial movement amount corresponding to at least one movement unit, and determine the weakened movement amount corresponding to the at least one movement unit as the movement amount of the movement unit.

[0096] When there is an initial movement position of a movement unit outside the preset limit range, the initial movement amount corresponding to at least one movement unit can be weakened. In one possible implementation, the initial movement amount corresponding to the target movement unit corresponding to the target movement position can be weakened, where the target movement position is the initial movement position outside the preset limit range. In another possible implementation, the initial movement amounts corresponding to each movement unit can be weakened simultaneously. In another possible implementation, the initial movement amounts corresponding to at least two movement units can be weakened simultaneously.

[0097] In a possible implementation, a fixed weakening amount can be preset. The fixed weakening amount is within the allowable weakening range, and the initial movement amount of at least one movement unit is weakened based on the fixed weakening amount. In another possible implementation, the weakening ratio can be automatically calculated according to the initial movement amount, and the weakening is performed based on the weakening ratio to reduce the leveling error after the initial movement amount is weakened.

[0098] After the weakening of the initial movement amount of the movement unit is completed, the weakened movement amount corresponding to the movement unit can be obtained, and the weakened movement amount can be determined as the movement amount of the movement unit.

[0099] In the embodiments of the present disclosure, a preset space coordinate system with a preset fixed point as the origin and a reference plane as the coordinate system base is determined. The intersection point of the straight line passing through the reference position and the needle card fitting plane is calculated through the positional relationship between the straight line and the plane, and the projection distance from the intersection point position to the reference plane is obtained. The movement amount of the movement unit is determined according to the projection distance, which can ensure the accuracy of the initial movement amount.

[0100] In the embodiments of the present disclosure, the movement amount of the movement unit is also determined in combination with the position limit range allowed for the movement unit. When the movement position after the movement unit moves based on the initial movement amount is within the preset limit range, the initial movement amount can be determined as the final actual movement amount. When there are movement positions outside the preset limit range, the initial movement amount can be weakened to avoid the situation where the movement unit cannot move due to exceeding the movement limit, which helps to improve the accuracy and effectiveness of the determined movement amount and helps to improve the accuracy of automatic leveling.

[0101] In a possible implementation, as Figure 5 shown, the process of weakening the initial movement amount corresponding to at least one movement unit includes steps 510 - 540:

[0102] Step 510, perform the i-th weakening on the initial movement amount corresponding to at least one movement unit to obtain the i-th weakened movement amount, where i is a positive integer not less than 1.

[0103] In a possible implementation, the weakening ratio can be automatically calculated according to the initial movement amount, and the weakening is performed based on the weakening ratio. The weakened movement amount may still not ensure that the movement unit is within the preset limit range after movement, and the initial movement amount may need to be weakened multiple times.

[0104] After the i-th weakening of the initial movement amount, the i-th weakened movement amount can be obtained. Schematically, after the first weakening of the initial movement amount, the first weakened movement amount can be obtained.

[0105] Step 520, respectively determine the i-th weakened movement position after at least one movement unit moves based on the corresponding i-th weakened movement amount.

[0106] When the i-th weakening obtains the i-th weakening movement amount, it is necessary to determine whether the i-th weakening movement amount meets the movement limit of the movement unit. In a possible implementation manner, the i-th weakening movement position after each movement unit moves based on the i-th weakening movement amount can be determined. The i-th weakening movement position is the sum of the current movement position of the movement unit and the i-th weakening movement amount.

[0107] Step 530, in response to the i-th weakening movement positions all being within the preset limit range, determine the i-th weakening movement amount corresponding to at least one movement unit as the weakened movement amount corresponding to at least one movement unit.

[0108] When the i-th weakening movement positions corresponding to each movement unit are all within the preset limit range, the i-th weakening movement amount corresponding to the movement unit can be determined as the weakened movement amount corresponding to the movement unit. The weakened movement amount is the final movement amount after the initial movement amount is successfully weakened. After obtaining the weakened movement amount, the weakened movement amount can be determined as the actual movement amount of the movement unit.

[0109] Step 540, in response to at least one of the i-th weakening movement positions being outside the preset limit range, perform the (i + 1)-th weakening based on the i-th weakening movement amount.

[0110] When there is at least one of the i-th weakening movement positions outside the preset limit range, the i-th weakening movement amount can be continuously weakened, that is, the (i + 1)-th weakening of the initial movement amount is performed. If there are still positions outside the preset limit range among the (i + 1)-th weakening movement positions corresponding to the (i + 1)-th weakening, the (i + 1)-th weakening movement amount obtained from the (i + 1)-th weakening can be continuously weakened. Through the above loop process, the weakened movement amount allowed for the movement unit is obtained.

[0111] In a possible implementation manner, there may be a situation where multiple weakenings still cannot meet the movement limit of the movement unit. A preset number threshold can be used to limit the number of weakenings. When the number of weakenings reaches the preset number threshold, an abnormal prompt message can be generated to prompt the user to intervene. In this embodiment, the generated abnormal reminder message can be a software interface reminder message or a log reminder message, which is not limited here as long as it can prompt the user to intervene.

[0112] Optionally, during the i-th weakening, in response to the number of weakenings not being greater than the number threshold, perform the i-th weakening on the initial movement amount corresponding to at least one movement unit. That is, when i ≤ the number threshold, the initial movement amount corresponding to at least one movement unit can be weakened for the i-th time. Schematically, the number threshold can be 100.

[0113] Optionally, in response to the number of weakening times being greater than the threshold number of times, an abnormal prompt message is generated, and the abnormal prompt message is used to indicate that the weakening method for the initial exercise amount needs to be set. When i > the threshold number of times, an abnormal prompt message can be generated to instruct the user to manually set the weakening method for the initial exercise amount. The weakening of the initial exercise amount can be achieved by weakening the plane normal vector. The weakening method can include the weakening ratio of the plane normal vector and the specific weakening direction. The weakening direction can be the direction axis corresponding to the target component of the plane normal vector to be weakened. For example, when the weakening direction is x, the target component is m.

[0114] In a possible implementation manner, the process of performing the i-th weakening on the initial exercise amount may include steps 5101 - 5103:

[0115] Step 5101: Perform the i-th weakening on the (i - 1)-th weakened plane normal vector to obtain the i-th weakened plane normal vector.

[0116] The initial exercise amount of the motion unit is determined based on the plane normal vector of the needle card fitting plane. The weakening of the initial exercise amount can be achieved by weakening the plane normal vector. The essence of weakening the plane normal vector is to modify the magnitude of a single direction component in the plane normal vector of the needle card fitting plane, that is, to adjust the position of the needle card fitting plane.

[0117] In the process of performing the i-th weakening on the initial exercise amount, the i-th weakening of the plane normal vector can be executed. The process of the i-th weakening of the plane normal vector is essentially to weaken the (i - 1)-th weakened plane normal vector obtained from the (i - 1)-th weakening. When weakening the (i - 1)-th weakened plane normal vector, the target component in the (i - 1)-th weakened plane normal vector can be weakened. Among them, the target component can be any component in the plane normal vector. In a possible implementation manner, it can be any preset component, such as the normal vector component m corresponding to the X-axis direction, and the target component for each weakening is the same.

[0118] In another possible implementation manner, the target component to be weakened can be determined according to the (i - 1)-th target motion position located outside the preset limit range, and the target component for each weakening can be different. This process includes steps 1 - 3:

[0119] Step 1: Determine at least one (i - 1)-th weakened exercise amount corresponding to at least one (i - 1)-th target motion position, where the (i - 1)-th target motion position is the (i - 1)-th weakened motion position located outside the preset limit range.

[0120] Among them, the (i - 1)-th target motion position located outside the preset limit range includes at least one motion position. When there is one (i - 1)-th target motion position, the (i - 1)-th weakened exercise amount corresponding to this (i - 1)-th target motion position can be determined.

[0121] When there are multiple (i - 1)-th target motion positions outside the preset limit range, the (i - 1)-th weakening movement amounts corresponding to each of the (i - 1)-th target motion positions can be determined separately.

[0122] Step 2: Based on the at least one (i - 1)-th weakening movement amount and its corresponding (i - 1)-th target motion position respectively, determine at least one weakening ratio.

[0123] When there is one (i - 1)-th target motion position, one weakening ratio can be determined according to the (i - 1)-th target motion position and the corresponding (i - 1)-th weakening movement amount.

[0124] When there are multiple (i - 1)-th target motion positions, multiple weakening ratios can be determined according to each of the (i - 1)-th target motion positions and the corresponding (i - 1)-th weakening movement amount.

[0125] Among them, the weakening ratio is (i - 1)-th weakening movement amount / (i - 1)-th target motion position.

[0126] Schematically, when performing the first weakening on the initial movement amount, the (i - 1)-th weakening movement amount is the initial movement amount. When the initial motion position after the motion unit A moves based on the initial movement amount is outside the preset limit range, the initial motion position after the motion unit A moves is the initial target motion position, and the corresponding initial movement amount is , and one weakening ratio can be determined based on the initial target motion position and the corresponding initial movement amount.

[0127] When the initial motion positions after the motion unit A and the motion unit B move based on the initial movement amount are both outside the preset limit range, the initial motion position after the motion unit A moves and the initial motion position after the motion unit B moves are both the initial target motion positions. One weakening ratio can be calculated based on the initial motion position after the motion unit A moves and the corresponding initial movement amount, and this weakening ratio is the initial movement amount of the motion unit A / the initial motion position of the motion unit A. And another weakening ratio can be calculated based on the initial motion position after the motion unit B moves and the corresponding initial movement amount, and this weakening ratio is the initial movement amount of the motion unit B / the initial motion position of the motion unit B.

[0128] Step 3: Based on the maximum weakening ratio among the at least one weakening ratio, weaken the target normal vector component corresponding to the maximum weakening ratio. The target normal vector component corresponding to the maximum weakening ratio is the normal vector component corresponding to the target motion unit corresponding to the maximum weakening ratio, and different motion units correspond to different normal vector components.

[0129] In a possible implementation, when there is an (i - 1)-th target motion position, a weakening ratio can be determined, and based on the weakening ratio, the target normal vector component corresponding to the weakening ratio is determined. The target normal vector component corresponding to the weakening ratio is the normal vector component corresponding to the target motion unit corresponding to the weakening ratio.

[0130] Different motion units correspond to different normal vector components. Schematically, motion unit A corresponds to normal vector component m, motion unit B corresponds to normal vector component n, and motion unit C corresponds to normal vector component p.

[0131] Schematically, when the weakening ratio is determined based on the (i - 1)-th weakening motion position and the corresponding (i - 1)-th weakening motion amount corresponding to motion unit A, the normal vector component m corresponding to motion unit A can be weakened based on the weakening ratio.

[0132] When weakening the target normal vector component based on the weakening ratio, the weakened normal vector component = the current value of the target normal vector component / the weakening ratio. Here, the weakening ratio is greater than 1.

[0133] In another possible implementation, when there are multiple (i - 1)-th target motion positions, multiple weakening ratios can be determined, the maximum weakening ratio is selected from the multiple weakening ratios, and the corresponding target normal vector component is weakened based on the maximum weakening ratio.

[0134] Schematically, when a first weakening ratio is calculated based on the (i - 1)-th weakening motion position and the corresponding (i - 1)-th weakening motion amount after the movement of motion unit A, and a second weakening ratio is calculated based on the (i - 1)-th weakening motion position and the corresponding (i - 1)-th weakening motion amount after the movement of motion unit B, if the second weakening ratio is greater than the first weakening ratio, the normal vector component n corresponding to motion unit B can be weakened based on the second weakening ratio.

[0135] After weakening the target normal vector component of the (i - 1)-th weakening plane normal vector, the weakened target normal vector component and other unweakened original normal vector components can be determined as the i-th weakening plane normal vector. Schematically, when weakening for the first time, the initial plane normal vector of the needle card fitting plane is weakened. The initial plane normal vector is (m, n, p). After weakening the target normal vector component m, the weakened target component m1 is obtained, and the first weakening plane normal vector can be (m1, n, p).

[0136] The magnitude of the weakened normal vector component is negatively correlated with the weakening ratio. When the weakening ratio is smaller, the weakened normal vector component is larger. There may be a situation where the calculated weakening ratio cannot weaken the normal vector component. In this case, the normal vector component can be weakened based on a preset value.

[0137] In a possible implementation manner, in response to that at least one weakening ratio is not greater than a preset ratio threshold, the weakening ratio is set to a preset value, and the preset value is greater than the preset ratio threshold.

[0138] The preset ratio threshold may be a threshold corresponding to the non-weakenable normal vector component. Schematically, the preset ratio threshold may be 1. When at least one calculated weakening ratio is less than or equal to 1, the current normal vector component cannot be weakened, and the weakening ratio can be set to a preset value. For example, it can be set to 2.

[0139] After setting the weakening ratio to the preset value, based on the weakening ratio set to the preset value, the normal vector component corresponding to the motion unit at the (i - 1)-th target motion position can be weakened. Optionally, any target motion position can be randomly selected from the (i - 1)-th target motion positions, and the normal vector component corresponding to the motion unit at the selected target motion position can be weakened.

[0140] Schematically, when the (i - 1)-th target motion position includes the (i - 1)-th weakening motion positions corresponding to motion unit A and motion unit B, any one of the normal vector component m corresponding to motion unit A and the normal vector component n corresponding to motion unit B can be selected for weakening.

[0141] Step 5102: Based on the i-th weakening plane normal vector and the target reference position corresponding to the target motion unit on the reference plane, determine the i-th intersection position of the target line where the target motion unit is located and the i-th needle card fitting plane.

[0142] Wherein, the target line is perpendicular to the reference plane, and the target motion unit is any one of at least one motion unit.

[0143] After obtaining the i-th weakening plane normal vector, the i-th intersection position of the target motion unit and the i-th needle card fitting plane can be re-determined. The weakening of the plane normal vector is essentially an adjustment of the position of the needle card fitting plane, and the i-th needle card fitting plane is the plane corresponding to the i-th weakening plane normal vector.

[0144] The calculation method of the i-th intersection position can refer to the method for calculating the initial intersection position described above, and will not be elaborated here.

[0145] Step 5103: Determine the i-th weakening movement amount corresponding to the target motion unit as the i-th projection distance from the i-th intersection position to the reference plane.

[0146] After determining the i-th intersection position corresponding to the target motion unit, determine the i-th weakening movement amount corresponding to the target motion unit as the i-th projection distance from the i-th intersection position to the reference plane.

[0147] In another possible implementation, the weakening method can be manually set. During the automatic leveling process of the probe card, the amount of movement can be weakened based on the manually set weakening method. After determining the needle card fitting plane corresponding to the probe card in the probe carrier device, the preset leveling pass ratio and the leveling correction direction can be obtained.

[0148] Among them, the leveling pass ratio is used to weaken the normal vector, and the leveling correction direction is used to indicate the weakened normal vector component, that is, the axial component.

[0149] After determining the plane normal vector of the needle card fitting plane, based on the leveling pass ratio, the correction normal vector component corresponding to the leveling correction direction in the plane normal vector can be corrected to obtain the corrected normal vector.

[0150] In one possible implementation, the corrected normal vector component = the current component of the plane normal vector × the leveling pass ratio, where the leveling pass ratio is less than or equal to 1. The current component of the plane normal vector is the corrected normal vector component.

[0151] The correction normal vector component corresponding to the leveling correction direction is the normal vector component corresponding to the direction axis indicated by the leveling correction direction. Schematically, when the leveling correction direction is the X-axis, the normal vector component m can be corrected, and the corrected normal vector component m2 = m × the leveling pass ratio.

[0152] After correcting the correction normal vector component, the corrected correction normal vector component and the other uncorrected original normal vector components can be determined as the corrected normal vector. Schematically, if the plane normal vector is (m, n, p), and the corrected normal vector component m2 is obtained after correcting the correction normal vector component m, then the corrected normal vector can be (m2, n, p).

[0153] After obtaining the corrected normal vector, based on the corrected normal vector and the target reference position corresponding to the target motion unit on the reference plane, the corrected intersection position of the target straight line where the target motion unit is located and the corrected needle card fitting plane can be determined, and the corrected projection distance from the corrected intersection position to the reference plane can be determined as the target initial amount of movement corresponding to the target motion unit. The target straight line is perpendicular to the reference plane, and the target motion unit is any one of at least one motion unit.

[0154] After obtaining the corrected normal vector, the corrected intersection position of the target straight line where the target motion unit is located and the corrected needle card fitting plane can be determined. The corrected needle card fitting plane is the plane corresponding to the corrected normal vector. The calculation method of the corrected intersection position can refer to the above method for calculating the initial intersection position, which will not be elaborated here.

[0155] After determining the corrected intersection position corresponding to the target motion unit, the corrected projection distance from the corrected intersection position to the reference plane is determined as the target initial motion amount corresponding to the target motion unit.

[0156] That is, after obtaining the plane normal vector of the needle card fitting plane, if there is a preset leveling correction direction and a leveling pass ratio, the plane normal vector is first corrected to obtain a corrected normal vector, and the target initial motion amount of the target motion unit is determined based on the corrected normal vector.

[0157] In the embodiments of the present disclosure, when the motion position of the motion unit exceeds the preset limit range, that is, exceeds the motion limit, the motion amount of the motion unit can be weakened by weakening the normal vector. When weakening the normal vector, one component is weakened at a time, which can reduce the error caused by weakening the normal vector and improve the leveling accuracy while ensuring that the motion unit can move.

[0158] In addition, in the embodiments of the present disclosure, the weakening ratio can be automatically calculated according to the motion position exceeding the preset limit range and the corresponding motion amount, and the corresponding normal vector component is weakened, so as to weaken the motion amount of the motion unit exceeding the preset limit range and make it within the preset limit range, which can improve the effectiveness and accuracy of weakening.

[0159] In a possible implementation manner, in response to at least one motion position after at least one motion unit moves respectively based on the corresponding motion amount being coplanar, it is determined that at least one motion amount satisfies the motion coplanarity condition, and at least one motion unit is controlled to move based on at least one motion amount.

[0160] Among them, the motion coplanarity condition is the condition corresponding to the coplanarity after the motion of the motion unit. When the motion positions after each motion unit moves respectively based on the corresponding motion amount are coplanar, it can be determined that the motion coplanarity condition is satisfied. Among them, the motion coplanarity condition is related to the motion amounts of each motion unit.

[0161] Schematically, in combination with the above example, point D is the origin, and A, B, and C are the spatial positions of motion unit A, motion unit B, and motion unit C respectively. The coordinates of each point are D: (0, 0, 0); A: (x, 0, Z1); B: (x, y, Z2); C: (0, y, Z3);

[0162] Among them, the condition for the four points to be coplanar is: , and the following vectors can be obtained according to the above coordinate positions:

[0163]

[0164] Substituting the above vectors into the condition for four points to be coplanar, the coplanarity condition of the motion unit can be calculated as: Z3 - Z2 + Z1 = 0, that is, Z3 + Z1 = Z2. The sum of the projection distances from the intersection points of the target lines where the motion units C and A are located with the needle card fitting plane to the reference plane should be equal to the projection distance from the intersection point of the target line where the motion unit B is located with the needle card fitting plane to the reference plane.

[0165] Furthermore, the sum of the motion amounts of the motion unit C and the motion unit A is equal to the motion amount of the motion unit B. By calculating whether the motion units are coplanar after the motion units move according to the motion amounts of the motion units, the irregular motion of the motion units based on the motion amounts can be avoided, and the risk of damage to the loading structure can be reduced.

[0166] In a possible implementation manner, the motion process of the motion unit can also be monitored. The motion unit includes a motion motor, and the motor torque of the motion motor during the motion process of the motion unit can be obtained. In response to the motor torque being within the first preset torque range, the motion unit is controlled to move. Wherein the second preset torque range is much smaller than the first preset torque range.

[0167] To ensure the normal motion of the motion unit during the motion process, the motor torque of the motion motor during the motion process of the motion unit can be obtained. The motor torque represents the torque generated by the motor on the object during the motor motion. The greater the motor torque, the greater the torque generated on the object. By monitoring the motor torque, damage to the loading structure caused by the motor motion can be avoided. Optionally, if the motor torque is within the first preset torque range, the motion unit can be continuously controlled to move. If it is outside the first preset torque range, it is determined that the motion motor is operating abnormally, and there may be irregular motion. An abnormal alarm message can be generated to stop the motion of the motion unit to avoid damage to the loading structure.

[0168] In a possible implementation manner, after controlling the motion unit to move to level the needle card fitting plane, the leveled needle card fitting plane can be obtained based on the position of the probe tip of the needle card after leveling. In response to the fact that the leveled needle card fitting plane does not satisfy the parallel condition with the reference plane, and / or in response to the height difference between the probe tips inside the needle card after leveling being greater than the needle tip height difference threshold, the needle card plane of the probe card is leveled for the next time.

[0169] Among them, the parallel condition may be that the initial motion amounts of at least one motion unit are all less than a preset motion threshold. When the initial motion amounts of at least one motion unit are all less than the preset motion threshold, it can be regarded that the needle card fitting plane after leveling satisfies the parallel condition with the reference plane. In a possible implementation manner, it is determined whether the needle card plane has been leveled based on whether the needle card fitting plane after leveling satisfies the parallel condition with the reference plane. After leveling the needle card plane once, the initial motion amounts of at least one motion unit can be calculated based on the needle card fitting plane after leveling. When the maximum motion amount among the initial motion amounts of at least one motion unit is less than the preset motion threshold, it is determined that the needle card plane after leveling satisfies the parallel condition with the reference plane, and the leveling process of the needle card plane can be ended. If the maximum motion amount among the motion amounts of at least one motion unit is greater than the preset motion threshold, the needle card plane needs to be leveled next time.

[0170] Alternatively, it can also be determined whether the needle card plane is leveled based on the height difference between the tips of the probes in the probe card after leveling. After leveling the needle card plane once, the height differences between the tips of multiple probes in different orientations on the needle card plane can be obtained. If the height difference is not greater than the height difference threshold, it is determined that the needle card plane is leveled, and the leveling process of the needle card plane can be ended. If the height difference is greater than the height difference threshold, the needle card plane needs to be leveled next time.

[0171] In another possible implementation manner, when the needle card fitting plane after leveling satisfies the parallel condition with the reference plane and the height difference between the tips of the probes in the probe card after leveling is not greater than the height difference threshold, it is determined that the needle card plane has been leveled, and the leveling process of the needle card plane is ended. If the needle card fitting plane after leveling does not satisfy the parallel condition with the reference plane and the height difference between the tips of the probes in the probe card after leveling is greater than the preset difference, the needle card plane needs to be leveled next time.

[0172] In the embodiments of the present disclosure, after leveling the needle card plane once, the levelness of the needle card plane after leveling can be determined. When the needle card fitting plane satisfies the parallel condition with the reference plane, and / or the height difference between the tips of the probes in the probe card after leveling is not greater than the height difference threshold, the leveling process of the needle card plane is ended. Otherwise, the needle card plane is leveled next time, which can improve the leveling accuracy.

[0173] In a possible implementation manner, as Figure 6 shown, the leveling method of the probe card includes the following steps 610 - 6100:

[0174] Step 610, determine the needle card fitting plane of the probe card.

[0175] Step 620, obtain the leveling correction direction and the leveling pass ratio.

[0176] Step 630, calculate the initial amount of motion of at least one motion unit.

[0177] Step 640, determine whether there is an initial motion position of the motion unit outside the preset limit range. If so, execute Step 660; if not, execute Step 650.

[0178] The initial motion position is determined based on the initial amount of motion of the motion unit.

[0179] Step 650, determine the amount of motion corresponding to the motion unit as the initial amount of motion.

[0180] Step 660, weaken the initial amount of motion.

[0181] Step 670, determine whether there is a weakened motion position of the motion unit outside the preset limit range. If so, execute Step 690; if not, execute Step 680.

[0182] The weakened motion position is determined based on the amount of motion after the latest weakening.

[0183] Step 680, determine the amount of motion after weakening as the amount of motion corresponding to the motion unit.

[0184] If the weakened motion positions are all within the preset limit range, the amount of motion obtained after the latest weakening can be determined as the amount of motion after weakening.

[0185] Step 690, determine whether the number of weakenings is not greater than the number threshold. If so, execute Step 6100; if not, execute Step 6110.

[0186] Step 6100, perform the next weakening on the initial amount of motion.

[0187] After each weakening of the initial amount of motion, re - execute Step 670 to determine whether the motion limit condition of the motion unit is satisfied.

[0188] Step 6110, reset the amount of motion and generate an abnormal prompt message.

[0189] Step 6120, determine whether the amount of motion of at least one motion unit satisfies the motion coplanarity condition. If so, execute Step 6130; if not, end.

[0190] After determining the amount of motion of the motion unit, it can be first determined whether the motion coplanarity condition is satisfied.

[0191] Step 6130, control at least one motion unit to move based on the corresponding amount of motion.

[0192] Among them, the implementation manners of Steps 610 - 6130 can refer to the above - mentioned embodiments and will not be elaborated here.

[0193] As shown in Figure 7 , it shows a schematic structural diagram of a leveling device for a probe card provided by an exemplary embodiment of the present disclosure. The device includes:

[0194] A plane fitting module 710, configured to obtain a needle card fitting plane based on the positions of the tips of the probe card. Wherein, the probe card is installed on a probe carrying device, and the probe carrying device includes at least one motion unit for leveling the needle card plane of the probe card;

[0195] A motion amount determination module 720, configured to determine the motion amounts corresponding to the at least one motion unit based on the parallelism between the needle card fitting plane and a reference plane;

[0196] A motion control module 730, configured to, in response to the motion amounts corresponding to the at least one motion unit satisfying the motion coplanarity condition, respectively control the at least one motion unit to move based on the corresponding motion amounts to level the needle card plane of the probe card.

[0197] In the embodiments of the present disclosure, the leveling device of the probe card corresponds to the embodiments of the above-mentioned leveling method of the probe card of the present disclosure, and the relevant content can be referred to each other, which will not be elaborated here. The beneficial technical effects corresponding to the leveling device of the probe card in the embodiments of the present disclosure can be seen in the corresponding beneficial technical effects in the above-mentioned corresponding exemplary method part, which will not be elaborated here.

[0198] In addition, the embodiments of the present disclosure further provide an electronic device, including:

[0199] A memory, configured to store a computer program;

[0200] A processor, configured to execute the computer program stored in the memory, and when the computer program is executed, implement the leveling method of the probe card according to any one of the above embodiments of the present disclosure.

[0201] Figure 8 is a schematic structural diagram of an electronic device provided by an exemplary embodiment of the present disclosure. As shown in Figure 8 , the electronic device includes one or more processors and a memory.

[0202] The processor may be a central processing unit (CPU) or other forms of processing units with data processing capabilities and / or instruction execution capabilities, and may control other components in the electronic device to perform desired functions.

[0203] The memory can store one or more computer program products. The memory can include various forms of computer-readable storage media, such as volatile memory and / or non-volatile memory. The volatile memory can include, for example, random access memory (RAM) and / or cache memory, etc. The non-volatile memory can include, for example, read-only memory (ROM), hard disk, flash memory, etc. One or more computer program products can be stored on the computer-readable storage media, and the processor can run the computer program products to implement the leveling method of the probe card in various embodiments of the present disclosure described above and / or other desired functions.

[0204] In one example, the electronic device may further include: an input device and an output device, and these components are interconnected through a bus system and / or other forms of connection mechanisms (not shown).

[0205] In addition, the input device may further include, for example, a keyboard, a mouse, and so on.

[0206] The output device can output various information to the outside, including the determined distance information, direction information, etc. The output device can include, for example, a display, a speaker, a printer, and a communication network and its connected remote output devices, and so on.

[0207] Of course, for simplicity, Figure 8 only some of the components related to the present disclosure in the electronic device are shown, and components such as buses, input / output interfaces, etc. are omitted. In addition, according to specific application scenarios, the electronic device may further include any other appropriate components.

[0208] In addition to the above methods and devices, embodiments of the present disclosure may also be computer program products, which include computer program instructions. When the computer program instructions are run by a processor, the processor is caused to execute the steps in the leveling method of the probe card according to various embodiments of the present disclosure described in the above part of this specification.

[0209] The computer program products can be written in any combination of one or more programming languages for programming code to perform the operations of the embodiments of the present disclosure. The programming languages include object-oriented programming languages, such as Java, C++, etc., and also include conventional procedural programming languages, such as the "C" language or similar programming languages. The program code can be executed entirely on the user computing device, partially on the user device, executed as an independent software package, partially on the user computing device and partially on a remote computing device, or entirely on a remote computing device or server.

[0210] In addition, an embodiment of the present disclosure may also be a computer-readable storage medium storing computer program instructions, which, when run by a processor, cause the processor to execute the steps in the leveling method of the probe card according to various embodiments of the present disclosure described in the foregoing part of this specification.

[0211] The computer-readable storage medium may adopt any combination of one or more readable media. The readable media may be a readable signal medium or a readable storage medium. The readable storage medium may, for example, include but is not limited to an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination of the above. More specific examples (a non-exhaustive list) of the readable storage medium include: an electrical connection with one or more wires, a portable disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above.

[0212] The basic principles of the present disclosure have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, benefits, effects, etc. mentioned in the present disclosure are only examples and not limitations, and it cannot be considered that these advantages, benefits, effects, etc. are essential for each embodiment of the present disclosure. In addition, the above-disclosed specific details are only for illustrative and facilitating understanding purposes and are not limitations. The above details do not limit the present disclosure to necessarily adopt the above specific details for implementation.

[0213] Each embodiment in this specification is described in a progressive manner. The key point of each embodiment is to illustrate the differences from other embodiments. For the same or similar parts among the embodiments, reference may be made to each other. For system embodiments, since they basically correspond to method embodiments, the description is relatively simple, and reference may be made to the relevant parts of the method embodiments for the relevant content.

[0214] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present disclosure are only illustrative examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with each other. The words "or" and "and" used herein refer to the word "and / or" and can be used interchangeably with each other unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to" and can be used interchangeably with each other.

[0215] The methods and apparatuses of the present disclosure may be implemented in many ways. For example, the methods and apparatuses of the present disclosure may be implemented by software, hardware, firmware, or any combination of software, hardware, and firmware. The above order of the steps for the methods is for illustration only. The steps of the methods of the present disclosure are not limited to the specific order described above, unless otherwise specifically stated. In addition, in some embodiments, the present disclosure may also be implemented as a program recorded in a recording medium, and these programs include machine-readable instructions for implementing the methods according to the present disclosure. Therefore, the present disclosure also covers a recording medium storing a program for executing the methods according to the present disclosure.

[0216] It should also be noted that in the apparatuses, devices, and methods of the present disclosure, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present disclosure.

[0217] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0218] The above description has been presented for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of the present disclosure to the form disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and subcombinations thereof.

Claims

1. A method for leveling a probe card, characterized in that: The method comprises: Acquiring a probe card fitting plane based on a probe card tip position, wherein the probe card is mounted on a probe carrier, and the probe carrier includes at least one motion unit for leveling a probe card plane of the probe card; Based on the parallelism between the needle card fitting plane and the reference plane, determining the initial movement amount corresponding to the at least one motion unit, wherein the initial movement amount of the motion unit is determined based on the plane normal vector of the needle card fitting plane; respectively determining an initial movement position of the at least one movement unit after movement based on the corresponding initial movement amount; In response to the initial movement positions being all within a preset limit range, the initial movement amount corresponding to the at least one movement unit is determined as the movement amount of the at least one movement unit, and the preset limit range is the position limit range within which the movement unit is allowed to move; in response to at least one of the initial movement positions being outside the preset limit range, the initial movement amount corresponding to the at least one movement unit is weakened, and the weakened movement amount corresponding to the at least one movement unit is determined as the movement amount of the movement unit, the weakened movement amount is the i-th weakened movement amount after the initial movement amount corresponding to the at least one movement unit is weakened for the i-th time, and the i-th weakened movement position of the at least one movement unit after the movement based on the corresponding i-th weakened movement amount is all within the preset limit range, i is a positive integer not less than 1, wherein the i-th weakened movement amount corresponding to the target movement unit is the i-th projection distance from the i-th intersection position of the target straight line where the target movement unit is located and the i-th needle card fitting plane to the reference plane, the i-th needle card fitting plane is a plane corresponding to the i-th weakened plane normal vector obtained after the plane normal vector is weakened for the i-th time, the target straight line is perpendicular to the reference plane, and the target movement unit is any movement unit among the at least one movement unit; In response to the corresponding movement amount of the at least one movement unit satisfying the movement coplanarity condition, the at least one movement unit is controlled to move based on the corresponding movement amount to level the probe card plane of the probe card.

2. The method according to claim 1, characterized in that The needle card fitting plane and the reference plane are located in the same spatial coordinate system; The determining of the initial movement amount corresponding to the at least one movement unit based on the parallelism between the needle card fitting plane and the reference plane comprises: Determining the plane normal vector of the needle card fitting plane; Based on the plane normal vector and the target reference position corresponding to the target motion unit on the reference plane, determine the initial intersection position of the target straight line where the target motion unit is located and the needle card fitting plane, the target straight line is perpendicular to the reference plane, and the target motion unit is any one of the at least one motion unit; An initial projection distance from the initial intersection position to the reference plane is determined as the target initial motion amount corresponding to the target motion unit.

3. The method according to claim 1, characterized in that The weakening of the initial movement amount corresponding to the at least one movement unit comprises: weakening the initial motion amount corresponding to the at least one motion unit for an i-th time to obtain an i-th weakened motion amount; respectively determining an i-th weakened motion position of the at least one motion unit after the at least one motion unit moves based on the corresponding i-th weakened motion amount; In response to the i-th weakened motion position being within the preset limit range, determining the i-th weakened motion amount corresponding to the at least one motion unit as the weakened motion amount corresponding to the at least one motion unit; In response to at least one of the i-th weakening movement positions being outside a preset limit range, an i+1-th weakening is performed based on the i-th weakening movement amount.

4. The method according to claim 3, characterized in that The step of weakening the initial motion amount corresponding to the at least one motion unit for the i-th time to obtain the i-th weakened motion amount includes: Perform the i-th weakening of the normal vector of the i-1 weakening plane to obtain the i-th weakening plane normal vector; Based on the i-th weakening plane normal vector and the target reference position corresponding to the target motion unit on the reference plane, determine the i-th intersection position of the target straight line where the target motion unit is located and the i-th needle card fitting plane, the target straight line is perpendicular to the reference plane, and the target motion unit is any motion unit among the at least one motion unit; The i-th projection distance from the i-th intersection position to the reference plane is determined as the i-th weakened motion amount corresponding to the target motion unit.

5. The method according to claim 4, characterized in that The step of performing the i-th weakening on the normal vector of the i-1 weakening plane comprises: Determine at least one i-1th weakened movement amount corresponding to at least one i-1th target movement position, wherein the i-1th target movement position is an i-1th weakened movement position outside a preset restriction range; Determine at least one weakening ratio based on the at least one i-1th weakened motion amount and the i-1th target motion position corresponding to each of them; Based on the maximum weakening ratio among the at least one weakening ratio, the target normal vector component corresponding to the maximum weakening ratio is weakened, and the target normal vector component corresponding to the maximum weakening ratio is the normal vector component corresponding to the target motion unit corresponding to the maximum weakening ratio, and different motion units correspond to different normal vector components.

6. The method according to claim 5, characterized in that After determining and obtaining at least one weakening ratio, the method further includes: In response to the at least one weakening ratio not being greater than a preset ratio threshold, setting the weakening ratio to a preset value, the preset value being greater than the preset ratio threshold; Based on the weakening ratio set to the preset value, the normal vector component corresponding to the motion unit corresponding to the (i-1)th target motion position is weakened.

7. The method according to claim 3, characterized in that The step of weakening the initial movement amount corresponding to the at least one movement unit for the i-th time includes: In response to the weakening number being not greater than the number threshold, weakening the initial movement amount corresponding to the at least one movement unit for an i-th time; The method further comprises: In response to the weakening times being greater than the times threshold, abnormal prompt information is generated, where the abnormal prompt information is used to indicate that a weakening method for the initial exercise amount needs to be set.

8. The method according to claim 2, characterized in that: Before determining the plane normal vector of the needle card fitting plane, the method further includes: Get the preset leveling pass ratio and leveling correction direction; After determining the plane normal vector of the needle card fitting plane, the method further includes: Based on the leveling pass ratio, a correction normal vector component corresponding to the leveling correction direction in the plane normal vector is corrected to obtain a correction normal vector; Based on the corrected normal vector and the target reference position corresponding to the target motion unit on the reference plane, determining the corrected intersection position of the target straight line where the target motion unit is located and the corrected needle card fitting plane, the target straight line is perpendicular to the reference plane, and the target motion unit is any one of the at least one motion unit; The corrected projection distance from the corrected intersection position to the reference plane is determined as the target initial motion amount corresponding to the target motion unit.

9. The method according to any one of claims 1 to 8, characterized in that: The motion unit includes a motion motor; The respectively controlling the at least one motion unit to move based on the corresponding motion amount comprises: Acquiring the motor torque of the motion motor during the motion of the motion unit; In response to the motor torque being within a first preset torque range, the motion unit is controlled to move.

10. The method according to any one of claims 1 to 8, characterized in that: After respectively controlling the at least one motion unit to move based on the corresponding motion amount, the method further includes: Obtaining a probe card fitting plane after leveling based on the probe card tip position after leveling; In response to the probe card fitting plane and the reference plane not satisfying the parallel condition after the leveling, and / or in response to the height difference of the probe tips in the probe card after the leveling being greater than the tip height difference threshold, the probe card plane of the probe card is leveled again.

11. The method according to any one of claims 1 to 8, characterized in that: Before acquiring the probe card fitting plane based on the probe card needle tip position, the method further includes: Acquire a reference position corresponding to the at least one motion unit after the probe carrying device is leveled; The reference plane is determined based on a reference position corresponding to the at least one motion unit.

12. The method according to claim 11, characterized in that The probe carrying device is leveled based on a debugging device, and the debugging device is installed on the probe carrying device when leveling the probe carrying device; The method further comprises: In the process of leveling the probe carrying device by using the at least one motion unit, obtaining the motor torque of the motion motor respectively included in the at least one motion unit, and obtaining the height difference of the multiple focus points included in the debugging device; In response to the motor torques of the motion motors being within a second preset torque range and the height differences of the plurality of focus points being no greater than a focus point height difference threshold, it is determined that the probe carrying device is leveled.

13. A probe card leveling device, characterized in that: The device comprises: a plane fitting module, for obtaining a probe card fitting plane based on a probe card needle tip position, wherein the probe card is mounted on a probe carrier, and the probe carrier includes at least one motion unit for leveling a probe card plane of the probe card; A movement amount determination module is used to determine an initial movement amount corresponding to the at least one movement unit based on the parallelism between the needle card fitting plane and the reference plane, wherein the initial movement amount of the movement unit is determined based on the plane normal vector of the needle card fitting plane; respectively determine an initial movement position of the at least one movement unit after movement based on the corresponding initial movement amount; in response to the initial movement positions being all within a preset limit range, determine the initial movement amount corresponding to the at least one movement unit as the movement amount of the at least one movement unit, wherein the preset limit range is a position limit range within which the movement unit is allowed to move; in response to at least one of the initial movement positions being outside the preset limit range, weaken the initial movement amount corresponding to the at least one movement unit, and weaken the movement amount corresponding to the at least one movement unit after weakening. The momentum is determined as the motion amount of the motion unit, the weakened motion amount is the i-th weakened motion amount after the initial motion amount corresponding to the at least one motion unit is weakened for the i-th time, the i-th weakened motion position of the at least one motion unit after the motion based on the corresponding i-th weakened motion amount is located within the preset limit range, i is a positive integer not less than 1, wherein the i-th weakened motion amount corresponding to the target motion unit is the i-th projection distance from the i-th intersection position of the target straight line where the target motion unit is located and the i-th needle card fitting plane to the reference plane, the i-th needle card fitting plane is the plane corresponding to the i-th weakened plane normal vector obtained after the plane normal vector is weakened for the i-th time, the target straight line is perpendicular to the reference plane, and the target motion unit is any motion unit among the at least one motion unit; The motion control module is used to control the at least one motion unit to move based on the corresponding motion amount in response to the motion amount corresponding to the at least one motion unit satisfying the motion coplanarity condition, so as to level the needle card plane of the probe card.

14. A probe station device, characterized in that: The device comprises a host computer and a probe carrying device, wherein the host computer runs a leveling device of a probe card, and the probe carrying device comprises a loading structure for loading the probe card and at least one motion unit for leveling a needle card plane of the probe card; The leveling device is used to obtain a probe card fitting plane based on the probe card needle tip position; determine an initial movement amount corresponding to the at least one motion unit based on the parallelism between the probe card fitting plane and the reference plane, the initial movement amount of the motion unit being determined based on the plane normal vector of the probe card fitting plane; respectively determine an initial movement position of the at least one motion unit after movement based on the corresponding initial movement amount; in response to the initial movement positions being within a preset limit range, determine the initial movement amount corresponding to the at least one motion unit as the movement amount of the at least one motion unit, the preset limit range being the position limit range within which the motion unit is allowed to move; in response to at least one of the initial movement positions being outside the preset limit range, weaken the initial movement amount corresponding to the at least one motion unit, and determine the weakened movement amount corresponding to the at least one motion unit as the movement amount of the motion unit, The weakened movement amount is the i-th weakened movement amount after the initial movement amount corresponding to the at least one movement unit is weakened for the i-th time, and the i-th weakened movement position of the at least one movement unit after the movement based on the corresponding i-th weakened movement amount is located within the preset limit range, i is a positive integer not less than 1, wherein the i-th weakened movement amount corresponding to the target movement unit is the i-th projection distance from the i-th intersection position of the target straight line where the target movement unit is located and the i-th needle card fitting plane to the reference plane, the i-th needle card fitting plane is the plane corresponding to the i-th weakened plane normal vector obtained after the plane normal vector is weakened for the i-th time, the target straight line is perpendicular to the reference plane, and the target movement unit is any movement unit among the at least one movement unit; in response to the movement amount corresponding to the at least one movement unit satisfying the movement coplanarity condition, the at least one movement unit is controlled to move based on the corresponding movement amount respectively; The at least one motion unit is used to move based on a corresponding motion amount to level the probe card plane of the probe card.

15. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the leveling method of the probe card described in any one of claims 1 to 12 is implemented.

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