Immersion head detection device and method for immersion lithography machine

Abstract

The present invention discloses an immersion head detection device and method for an immersion lithography machine, relating to the technical field of immersion head detection; comprising an outer box, a detection and maintenance mechanism is provided at one end of the inner part of the outer box, a detection execution mechanism is slidably provided inside the outer box, the detection execution mechanism comprises an operating table, on the two end faces of the operating table, one end face is provided with an ultrasonic cleaning mechanism, the other end face is provided with a sample tray, a flow field detection camera is provided inside the operating table, and a shooting hole is arranged on the sample tray, and the lens of the flow field detection camera is provided in the shooting hole on the sample tray; the detection part is used for performing maintenance and detection on the sample tray; the present invention can facilitate the detection of bubbles in the medium flow field, the detection process does not require excessive human participation, simulates the operation form during wafer lithography, realizes efficient detection, has rich functions, and can facilitate maintenance.

Description

Technical Field

[0001] The present invention relates to the technical field of immersion head detection, and in particular to an immersion head detection device and method for an immersion lithography machine. Background Art

[0002] The immersion head of a photolithography machine is a key component in photolithography and is widely used in semiconductor manufacturing. Immersion lithography is one of the most advanced photolithography techniques currently available. It improves resolution by inserting a liquid medium between the objective lens and the silicon wafer during the lithography process. Immersion lithography aims to overcome the resolution limitations of traditional photolithography. Traditional dry photolithography uses air as the medium between the lens and the silicon wafer, but air has a relatively low refractive index, which prevents sufficiently high resolution. To create smaller circuit structures, immersion lithography has emerged, leveraging the higher refractive index of the liquid medium to improve resolution. Current immersion heads are extremely inconvenient to inspect, requiring cumbersome manual operation and prone to damage to photolithography components. This is particularly true for detecting bubbles in the media flow field, which requires an extremely complex inspection process. Therefore, the present invention proposes an immersion head inspection device that facilitates bubble detection in the media flow field. The inspection process requires minimal human intervention, mimics the operations used in wafer lithography, and achieves efficient inspection. It is also versatile and easy to maintain. Summary of the Invention

[0003] In response to the above technical problems, the present invention can facilitate the detection of bubbles in the medium flow field. The detection process does not require excessive human participation, simulates the operation form during wafer lithography, achieves efficient detection, has rich functions, and can facilitate maintenance.

[0004] The solution used in the present invention is: an immersion head detection device for an immersion lithography machine, comprising an outer box, an inspection and maintenance mechanism is provided at one end inside the outer box, the inspection and maintenance mechanism comprises a gear disk rotatably mounted on the outer box, an inspection disk is slidably provided on the gear disk, and an inspection piece is slidably provided on the inspection disk; a detection actuator is slidably provided inside the outer box, the inspection actuator comprises a moving frame slidably mounted on the outer box, a mounting ring is rotatably mounted on the moving frame, a position seat is slidably provided on the mounting ring, a lifting electric cylinder is provided on the position seat, a workbench is rotatably provided on the telescopic rod of the lifting electric cylinder, an ultrasonic cleaning mechanism is provided on one of the two end faces of the workbench, and a sample tray is provided on the other end face, a flow field detection camera is provided inside the workbench, and a shooting hole is arranged on the sample tray, and the lens of the flow field detection camera is cooperated and provided in the shooting hole on the sample tray; the inspection piece is used for maintenance and inspection of the sample tray.

[0005] Furthermore, a moving belt and a moving motor are provided at the bottom end of the inner portion of the outer box. The moving motor is used to drive the moving belt, and the moving belt is used to control the movement of the detection actuator.

[0006] Furthermore, the detection actuator includes a mounting frame arranged on the mobile frame, the mounting frame is attached to the mobile belt; and a motor three is arranged on the mobile frame, a gear three is arranged on the output shaft of the motor three, and the gear three is engaged with the mounting ring; a motor four, a screw rod four and a guide rod four are arranged on the mounting ring, and the motor four is used to drive the screw rod four; the position seat is movably arranged on the screw rod four and the guide rod four, and the position seat and the screw rod four form a spiral pair.

[0007] Furthermore, two transmission mechanisms are provided on the position seat, one of which is used to transmit cleaning liquid to the ultrasonic cleaning mechanism, and the other is used to transmit the cleaning liquid collected in the ultrasonic cleaning mechanism; the transmission mechanism includes a cleaning transmission box and a docking electric cylinder arranged on the position seat, and a docking joint is provided on the telescopic rod of the docking electric cylinder, and the docking joint is connected to the cleaning transmission box.

[0008] Furthermore, the ultrasonic cleaning mechanism includes a cleaning tank arranged on the end surface of the workbench, and an ultrasonic controller arranged inside the workbench. A connecting ring is attached to the outside of the cleaning tank, and two transmission docking parts are provided on the outside of the connecting ring. The two transmission docking parts are respectively connected to the docking parts on the transmission mechanism to transmit the cleaning liquid.

[0009] Furthermore, a deflection motor is provided on the telescopic rod of the lifting electric cylinder, and the deflection motor is used to drive the workbench; a fixing mechanism is arranged on the workbench for fixing the sample tray; the fixing mechanism includes a control ring rotatably arranged inside the workbench, and an angle electric cylinder rotatably arrayed and installed inside the workbench, the telescopic rod of the angle electric cylinder is rotatably connected to the control ring to control the rotation of the control ring, a pushing part is arranged on the circumference of the control ring, and a fixed L rod is arrayed and slidably arranged on the workbench, a spring for providing elastic force is connected between the fixed L rod and the workbench, a push wheel is provided at one end of the fixed L rod, and the push wheel is pushed by the pushing part to move the fixed L rod, and the sample tray is fixed by the fixed L rod.

[0010] Furthermore, an insertion shaft is arranged on the sample tray, and the insertion shaft is inserted on the end surface of the workbench and fixed by a fixed L rod.

[0011] Furthermore, the detection and maintenance mechanism includes a motor 1 arranged on the outer box, a gear 1 is arranged on the output shaft of the motor 1, the gear 1 is engaged with the gear disc, and a control electric cylinder is arranged on the gear disc, and the control electric cylinder is used to control the movement of the detection disc; a motor 2 and a screw rod 2 are arranged on the detection disc, and the motor 2 is used to drive the screw rod 2; the detection part is driven by the screw rod 2; a cleaning transmission cylinder is arranged in the central area of ​​the gear disc for transmitting clean water.

[0012] Furthermore, the detection part includes a detection seat that forms a spiral pair with the second screw rod, and a nozzle is provided on the detection seat, which is connected to the cleaning transmission cylinder; and a cleaning motor is provided on the detection seat, and a cleaning part is provided on the output shaft of the cleaning motor for cleaning and maintaining the sample plate; a detection camera is provided at one end of the detection seat for detecting the surface quality of the sample plate; a protective motor is provided on the detection seat, and a protective electric cylinder is provided on the output shaft of the protective motor, and a protective cover is provided on the telescopic rod of the protective electric cylinder, and the protective cover is used to cover the detection camera.

[0013] A method for detecting an immersion head comprises the following steps:

[0014] S10: The sample tray is mounted on the workbench, and the detection actuator is controlled to be located below the immersion head assembly, and the height of the sample tray is adjusted and the distance from the immersion head assembly is controlled;

[0015] S20: The liquid medium is transmitted through the immersion head assembly, and the liquid medium forms a medium flow field between the objective lens and the sample plate. The flow field detection camera is used to capture the image to detect whether bubbles are generated in the medium flow field.

[0016] S30: Control the movement of the sample tray to photograph and detect the medium flow field while the sample tray is moving;

[0017] S40: By turning the workbench around, the immersion head is cleaned and maintained by an ultrasonic cleaning mechanism to remove dust and impurities;

[0018] S50: Control the movement of the sample tray to move and deflect the sample tray toward the detection and maintenance mechanism, so as to perform surface detection on the sample tray and perform a cleaning operation.

[0019] Compared with the prior art, the present invention has the following advantages: (1) the sample tray is mounted on the end face of the workbench, and the lens of the flow field detection camera is cooperatively mounted in the shooting hole on the sample tray. The control ring is rotated by the sample tray, and the push part pushes the push wheel to move the fixed L rod and fix the plug shaft, thereby fixing the sample tray, and convenient assembly and disassembly; (2) the situation of the wafer under photolithography is simulated by the sample tray, that is, the position of the sample tray is controlled, the moving belt drives the moving frame to move, and then the height of the workbench and the sample tray is controlled by the lifting electric cylinder to adjust the distance between the sample tray and the immersion head assembly; the medium is transmitted by the medium transmission system to form a medium flow field between the objective lens and the sample tray, and the medium flow field is photographed by the flow field detection camera, that is, whether bubbles are generated in the flow field; (3) the docking head is controlled by the docking electric cylinder Move and dock with the transmission docking part, transmit the cleaning liquid through the cleaning transmission box, that is, transmit it to the inside of the cleaning tank, and operate the ultrasonic controller to perform ultrasonic cleaning on the immersion head assembly; (4) make the sample disk face the detection part; specifically, the cleaning liquid can be transmitted through the cleaning transmission cylinder, released through the nozzle, and the gear disk is rotated by the motor 1, and the electric cylinder is controlled to control the extension and retraction distance of the detection disk. The detection seat is moved by the motor 2, and the screw rod 2 is rotated. The cleaning motor controls the cleaning part to clean the surface of the sample disk, and the detection camera can detect the surface of the sample disk. When replacement is required, the fixed L rod releases the fixation of the plug shaft to remove the sample disk; the protective motor controls the rotation of the protective electric cylinder, and the protective electric cylinder controls the movement of the protective cover to cover the detection camera lens to achieve a protective effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0021] Figure 2 This is a schematic diagram of the inner structure of the outer box of the present invention.

[0022] Figure 3 This is a structural diagram of the detection and maintenance mechanism of the present invention.

[0023] Figure 4 Schematic diagram of the detection component structure of the present invention.

[0024] Figure 5 This is a schematic diagram of the bottom structure of the detection actuator of the present invention.

[0025] Figure 6 This is a schematic diagram of the mounting structure of the mounting ring of the present invention.

[0026] Figure 7 This is a schematic diagram of the installation structure of the position seat of the present invention.

[0027] Figure 8 Schematic diagram of the internal structure of the workbench of the present invention.

[0028] Figure 9 This is a schematic diagram of the installation structure of the ultrasonic cleaning mechanism of the present invention.

[0029] Figure 10 This is a schematic diagram of the installation structure of the fixing mechanism of the present invention.

[0030] Figure 11 It is a schematic diagram of the local structure of the fixing mechanism of the present invention.

[0031] Figure 12 It is a cross-sectional schematic diagram of the fixing mechanism of the present invention.

[0032] Figure 13 For the present invention Figure 12 A mark in the middle is an enlarged schematic diagram.

[0033] Figure numerals: 1-outer box; 2-control panel; 3-objective lens; 4-immersion head; 5-medium transmission system; 6-moving belt; 7-moving motor; 8-guide plate; 9-motor 1; 10-gear 1; 11-toothed disc; 12-cleaning transmission cylinder; 13-control electric cylinder; 14-detection disk; 15-motor 2; 16-screw rod 2; 17-detection seat; 18-spray head; 19-cleaning part; 20-cleaning motor; 21-protective motor; 22-protective electric cylinder; 23-detection camera; 24-protective cover; 25-movable frame; 26-mounting frame; 27-motor 3; 28-Gear 3; 29-Mounting ring; 30-Motor 4; 31-Screw rod 4; 32-Guide rod 4; 33-Position seat; 34-Lifting electric cylinder; 35-Deflection motor; 36-Workbench; 37-Sample tray; 3701-Plug shaft; 38-Cleaning transmission box; 39-Docking joint; 40-Docking electric cylinder; 41-Ultrasonic controller; 42-Flow field detection camera; 43-Transmission docking part; 44-Connecting ring; 45-Cleaning tank; 46-Control ring; 4601-Pushing part; 47-Angle electric cylinder; 48-Fixed L rod; 49-Spring; 50-Push wheel. DETAILED DESCRIPTION

[0034] Example: Figures 1 to 13As shown, a control panel 2 is provided on the outside of the outer box 1, and an immersion head assembly is provided above the outer box 1. The immersion head assembly includes an objective lens 3, an immersion head 4, and a medium transmission system 5. The medium transmission system 5 is used to transmit the medium to form a medium flow field. A guide plate 8 is provided at one end of the inner side of the outer box 1; a detection and maintenance mechanism is provided at one end inside the outer box 1. The detection and maintenance mechanism includes a toothed disc 11 rotatably mounted on the outer box 1, a detection disc 14 is slidably provided on the toothed disc 11, and a detection member is slidably provided on the detection disc 14; a detection actuator is slidably provided inside the outer box 1, and the detection actuator includes a toothed disc 11 slidably mounted on the outer box 1 The movable frame 25 has a mounting ring 29 rotatably mounted on the movable frame 25, a position seat 33 is slidably mounted on the mounting ring 29, a lifting electric cylinder 34 is mounted on the position seat 33, and a workbench 36 is rotatably mounted on the telescopic rod of the lifting electric cylinder 34. On the two end faces of the workbench 36, an ultrasonic cleaning mechanism is mounted on one end face, and a sample tray 37 is matched with the other end face. A flow field detection camera 42 is arranged inside the workbench 36, and a shooting hole is arranged on the sample tray 37. The lens of the flow field detection camera 42 is matched with the shooting hole on the sample tray 37; the detection part is used to perform maintenance and detection on the sample tray 37.

[0035] A moving belt 6 and a moving motor 7 are provided at the bottom end of the inner part of the outer box 1. The moving motor 7 is used to drive the moving belt 6, and the moving belt 6 is used to control the movement of the detection actuator; the detection actuator includes a mounting frame 26 arranged on the moving frame 25, and the mounting frame 26 is attached to the moving belt 6; and a motor three 27 is provided on the moving frame 25, and a gear three 28 is provided on the output shaft of the motor three 27, and the gear three 28 is engaged with the mounting ring 29; a motor four 30, a screw rod four 31 and a guide rod four 32 are provided on the mounting ring 29, and the motor four 30 is used to drive the screw rod four 31; the position seat 33 is movably provided on the screw rod four 31 and the guide rod four 32, and the position seat 33 and the screw rod four 31 form a spiral pair.

[0036] Two transmission mechanisms are provided on the position seat 33, one of which is used to transmit cleaning liquid to the ultrasonic cleaning mechanism, and the other is used to transmit the cleaning liquid collected in the ultrasonic cleaning mechanism; the transmission mechanism includes a cleaning transmission box 38 and a docking electric cylinder 40 provided on the position seat 33, and a docking joint 39 is provided on the telescopic rod of the docking electric cylinder 40, and the docking joint 39 is connected to the cleaning transmission box 38; the ultrasonic cleaning mechanism includes a cleaning tank 45 provided on the end face of the workbench 36, and an ultrasonic controller 41 provided inside the workbench 36, and a connecting ring 44 is attached to the outside of the cleaning tank 45, and two transmission docking parts 43 are provided on the outside of the connecting ring 44, and the two transmission docking parts 43 are respectively connected to the docking joint 39 on the transmission mechanism to transmit the cleaning liquid.

[0037] A deflection motor 35 is provided on the telescopic rod of the lifting electric cylinder 34, and the deflection motor 35 is used to drive the workbench 36; a fixing mechanism is arranged on the workbench 36 for fixing the sample tray 37; the fixing mechanism includes a control ring 46 rotatably arranged inside the workbench 36, and an angle electric cylinder 47 rotatably arrayed and installed inside the workbench 36, the telescopic rod of the angle electric cylinder 47 is rotatably connected to the control ring 46 to control the rotation of the control ring 46, a pushing portion 4601 is arranged on the circumference of the control ring 46, and a fixed L rod 48 is arrayed and slidably arranged on the workbench 36, a spring 49 for providing elastic force is connected between the fixed L rod 48 and the workbench 36, a push wheel 50 is provided at one end of the fixed L rod 48, and the push wheel 50 is pushed by the pushing portion 4601 to move the fixed L rod 48, and the sample tray 37 is fixed by the fixed L rod 48; an insertion shaft 3701 is arranged on the sample tray 37, the insertion shaft 3701 is inserted on the end face of the workbench 36, and is fixed by the fixed L rod 48.

[0038] The detection and maintenance mechanism includes a motor 9 provided on the outer box 1, a gear 10 provided on the output shaft of the motor 9, the gear 10 meshing with the toothed disc 11, the toothed disc 11 provided with a control electric cylinder 13, the control electric cylinder 13 is used to control the movement of the detection disc 14; the detection disc 14 is provided with a motor 2 15 and a screw 2 16, the motor 2 15 is used to drive the screw 2 16; the detection member is driven by the screw 2 16; a cleaning transmission cylinder 12 is provided in the central area of ​​the toothed disc 11 for transmitting clean water; the detection member includes a detection seat 17 forming a spiral pair with the screw 2 16 A nozzle 18 is provided on the detection seat 17, and the nozzle 18 is connected to the cleaning transmission cylinder 12; and a cleaning motor 20 is provided on the detection seat 17, and a cleaning part 19 is provided on the output shaft of the cleaning motor 20 for cleaning and maintaining the sample tray 37; a detection camera 23 is provided at one end of the detection seat 17 for detecting the surface quality of the sample tray 37; a protective motor 21 is provided on the detection seat 17, and a protective electric cylinder 22 is provided on the output shaft of the protective motor 21, and a protective cover 24 is provided on the telescopic rod of the protective electric cylinder 22, and the protective cover 24 is used to cover the detection camera 23.

[0039] The principle of the present invention is as follows: the outer box 1 is placed under the immersion head assembly, the sample tray 37 is mounted on the end surface of the workbench 36, and the lens of the flow field detection camera 42 is matched and installed in the shooting hole on the sample tray 37. The control ring 46 is controlled to rotate by the sample tray 37, and the pushing part 4601 pushes the push wheel 50 to move the fixed L rod 48 and fix the plug shaft 3701, thereby fixing the sample tray 37; the sample tray 37 is used to simulate the situation of the wafer under lithography, that is, the position of the sample tray 37 is controlled, the moving belt 6 drives the moving frame 25 to move, and then the lifting cylinder 34 is used to control the workbench 36, The height of the sample tray 37 is adjusted to adjust the distance between the sample tray 37 and the immersion head assembly; the medium is transmitted through the medium transmission system 5 to form a medium flow field between the objective lens 3 and the sample tray 37, and the medium flow field is photographed by the flow field detection camera 42, that is, whether bubbles are generated in the flow field; further, the motor three 27 can be operated to rotate the mounting ring 29, and the motor four 30 can be operated to rotate the screw four 31, that is, the position seat 33 is moved, thereby controlling the adjustment of the sample tray 37 at different positions to simulate the movement of the wafer during lithography, that is, whether bubbles are generated in the flow field under moving conditions.

[0040] Furthermore, the deflection of the workbench 36 can be controlled by the deflection motor 35, so that the cleaning tank 45 is directed toward the immersion head assembly, and the immersion head assembly is located inside the cleaning tank 45. At this time, the access end of the transmission docking part 43 is directed toward the docking head 39, and the docking head 39 is controlled by the docking electric cylinder 40 to move and dock with the transmission docking part 43. The cleaning liquid is transmitted through the cleaning transmission box 38, that is, transmitted to the inside of the cleaning tank 45, and the ultrasonic controller 41 is operated to perform ultrasonic cleaning on the immersion head assembly.

[0041] Furthermore, the position of the movable rack 25 is transferred, and the orientation of the sample tray 37 is adjusted so that the sample tray 37 faces the detection part; specifically, the cleaning liquid can be transmitted through the cleaning transmission cylinder 12, released through the nozzle 18, and operated by the motor 19 to rotate the gear disk 11, and the electric cylinder 13 is controlled to control the extension and retraction distance of the detection tray 14. The motor 2 15 is operated and the screw 2 16 is rotated to move the detection seat 17. The cleaning motor 20 controls the cleaning part 19 to clean the surface of the sample tray 37, and the surface of the sample tray 37 can be detected by the detection camera 23. When replacement is required, the fixed L rod 48 releases the fixation of the plug shaft 3701 to remove the sample tray 37; the protection motor 21 controls the protection electric cylinder 22 to rotate, and the protection electric cylinder 22 controls the movement of the protection cover 24, which can cover the lens of the detection camera 23 to achieve a protective effect.

Claims

1. An immersion head detection device for an immersion lithography machine, comprising an outer box (1), characterized in that: A detection and maintenance mechanism is provided at one end of the inner portion of the outer box (1), the detection and maintenance mechanism comprises a toothed disc (11) rotatably mounted on the outer box (1), a detection disc (14) is slidably mounted on the toothed disc (11), and a detection member is slidably mounted on the detection disc (14); a detection actuator is slidably mounted inside the outer box (1), the detection actuator comprises a moving frame (25) slidably mounted on the outer box (1), a mounting ring (29) is rotatably mounted on the moving frame (25), a position seat (33) is slidably mounted on the mounting ring (29), and the position seat (33) A lifting electric cylinder (34) is provided on the lifting electric cylinder (34), and a workbench (36) is rotatably provided on the telescopic rod of the lifting electric cylinder (34). On the two end faces of the workbench (36), one end face is provided with an ultrasonic cleaning mechanism, and the other end face is provided with a sample tray (37). A flow field detection camera (42) is provided inside the workbench (36), and a shooting hole is arranged on the sample tray (37). The lens of the flow field detection camera (42) is provided in the shooting hole on the sample tray (37); and the detection component is used to perform maintenance and detection on the sample tray (37).

2. The immersion head detection device for an immersion lithography machine according to claim 1, characterized in that: A moving belt (6) and a moving motor (7) are provided at the bottom of the inner portion of the outer box (1); the moving motor (7) is used to drive the moving belt (6); and the moving belt (6) is used to control the movement of the detection actuator.

3. The immersion head detection device for an immersion lithography machine according to claim 2, characterized in that: The detection actuator comprises a mounting frame (26) arranged on a mobile frame (25), the mounting frame (26) being attached to a mobile belt (6); a motor (27) being arranged on the mobile frame (25), a gear (28) being arranged on an output shaft of the motor (27), the gear (28) being meshed with a mounting ring (29); a motor (30), a screw rod (31) and a guide rod (32) being arranged on the mounting ring (29), the motor (30) being used to drive the screw rod (31); a position seat (33) being movably arranged on the screw rod (31) and the guide rod (32), and the position seat (33) and the screw rod (31) forming a spiral pair.

4. The immersion head detection device for an immersion lithography machine according to claim 3, characterized in that: Two transmission mechanisms are provided on the position seat (33), one of which is used to transmit cleaning liquid to the ultrasonic cleaning mechanism, and the other is used to transmit the cleaning liquid collected in the ultrasonic cleaning mechanism; the transmission mechanism comprises a cleaning transmission box (38) and a docking electric cylinder (40) provided on the position seat (33), a docking joint (39) is provided on the telescopic rod of the docking electric cylinder (40), and the docking joint (39) is connected to the cleaning transmission box (38).

5. The immersion head detection device for an immersion lithography machine according to claim 4, characterized in that: The ultrasonic cleaning mechanism comprises a cleaning tank (45) arranged on the end surface of the working table (36), and an ultrasonic controller (41) arranged inside the working table (36). A connecting ring (44) is attached and connected to the outside of the cleaning tank (45). Two transmission docking parts (43) are connected to the outside of the connecting ring (44). The two transmission docking parts (43) are respectively connected to the docking heads (39) on the transmission mechanism to transmit the cleaning liquid.

6. The immersion head detection device for an immersion lithography machine according to claim 1, characterized in that: The telescopic rod of the lifting electric cylinder (34) is provided with a deflection motor (35), which is used to drive the working table (36); a fixing mechanism is arranged on the working table (36) for fixing the sample plate (37); the fixing mechanism includes a control ring (46) rotatably arranged inside the working table (36), and an angle electric cylinder (47) rotatably arranged inside the working table (36); the telescopic rod of the angle electric cylinder (47) is rotatably connected to the control ring (46) to control the control ring (46) The control ring (46) is rotated, and a pushing portion (4601) is arranged on the circumference of the control ring (46), and a fixed L rod (48) is arranged in an array and slidingly on the workbench (36), and a spring (49) for providing elastic force is connected between the fixed L rod (48) and the workbench (36), and a push wheel (50) is provided at one end of the fixed L rod (48), and the push wheel (50) is pushed by the pushing portion (4601) to move the fixed L rod (48), and the sample tray (37) is fixed by the fixed L rod (48).

7. The immersion head detection device for an immersion lithography machine according to claim 6, characterized in that: The sample tray (37) is provided with an insertion shaft (3701), which is inserted into the end surface of the workbench (36) and fixed by a fixed L rod (48).

8. The immersion head detection device for an immersion lithography machine according to claim 1, characterized in that: The detection and maintenance mechanism comprises a motor (9) arranged on an outer box (1); a gear (10) is arranged on the output shaft of the motor (9); the gear (10) is meshed with a toothed disc (11); a control electric cylinder (13) is arranged on the toothed disc (11); the control electric cylinder (13) is used to control the movement of the detection disc (14); a motor (15) and a screw rod (16) are arranged on the detection disc (14); the motor (15) is used to drive the screw rod (16); the detection member is driven by the screw rod (16); and a cleaning transmission cylinder (12) is arranged in the central area of ​​the toothed disc (11) for transmitting clean water.

9. The immersion head detection device for an immersion lithography machine according to claim 8, characterized in that: The detection component comprises a detection seat (17) which forms a spiral pair with a second screw rod (16); a nozzle (18) is provided on the detection seat (17), and the nozzle (18) is connected to the cleaning transmission cylinder (12); a cleaning motor (20) is provided on the detection seat (17), and a cleaning part (19) is provided on the output shaft of the cleaning motor (20) for cleaning and maintaining the sample disk (37); a detection camera (23) is provided at one end of the detection seat (17) for detecting the surface quality of the sample disk (37); a protection motor (21) is provided on the detection seat (17), a protection electric cylinder (22) is provided on the output shaft of the protection motor (21), and a protection cover (24) is provided on the telescopic rod of the protection electric cylinder (22), and the protection cover (24) is used to cover the detection camera (23).

10. A method for detecting an immersion head, characterized in that The following steps are involved: S10: The sample tray (37) is mounted on the workbench (36), and the detection actuator is controlled to be located below the immersion head assembly, and the height of the sample tray (37) is adjusted and the distance from the immersion head assembly is controlled; S20: The liquid medium is transmitted through the immersion head assembly, and the liquid medium forms a medium flow field between the objective lens and the sample plate (37), and the flow field detection camera (42) is used to take pictures to detect whether bubbles are generated in the medium flow field; S30: Controlling the movement of the sample tray (37) to photograph and detect the medium flow field while in motion; S40: by turning the working table (36) around, the immersion head is cleaned and maintained by an ultrasonic cleaning mechanism to remove dust and impurities; S50: Control the movement of the sample tray (37), so that the sample tray (37) moves and deflects toward the detection and maintenance mechanism, so as to perform surface detection on the sample tray (37) and perform a cleaning operation.

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