Corrosion-resistant, low-outgassing-rate and anti-suffocation electric connector

By using stainless steel locking components, low-release upper and lower bases and rivet connecting nuts in the electrical connector, the problems of air release and corrosion in the vacuum environment are solved, achieving a more stable semiconductor manufacturing environment and reducing production costs.

CN119674606APending Publication Date: 2025-03-21GUIZHOU SPACE APPLIANCE CO LTD
View PDF 1 Cites 0 Cited by

Patent Information

Application Number
CN202411594502.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-11-09
Publication Date
2025-03-21

AI Technical Summary

Technical Problem

Existing electrical connectors are prone to gas release in vacuum environments, resulting in corrosion and leakage of semiconductor materials, increasing the stability risks of semiconductor manufacturing.

Method used

The structural design of stainless steel locking components, low-release upper and lower bases, rivet connecting nuts and deflated locking components is adopted to replace the traditional bonding glue to reduce the impact on the vacuum environment and reduce the probability of virtual leakage through the hollow locking components.

Benefits of technology

It effectively reduces the air release rate and corrosion risks of the connector in a vacuum environment, improves the stability of semiconductor manufacturing and the stability of vacuum environment, and reduces production costs.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119674606A_ABST
    Figure CN119674606A_ABST
Patent Text Reader

Abstract

The invention provides a corrosion-resistant, low-outgassing-rate and anti-suffocation electric connector which comprises an upper base, a lower base and a tail cover, a butt-joint plate and the end face of the lower base are the same in shape, the end face, back to a plug, of the butt-joint plate is connected with the lower base and then installed on a base installation table after being connected, and the two ends of the lower base make contact with two connecting lugs respectively; the number and the positions of the upper base jacks correspond to those of the lead connecting holes; locking screws are installed in the counterbores, the lower screw holes and the upper screw holes, and the threaded ends of the locking screws extend out of the upper screw holes. The use requirement of bonding of the upper base and the lower base for glue liquid is replaced by using the turning riveting connecting nut, and media influencing the vacuum environment are reduced; and the hollow locking assembly plays a role of a bleed screw, so that the probability of virtual leakage is further reduced, and a complex and stable ultrahigh vacuum environment can be quickly constructed.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The invention relates to a corrosion-resistant, low-gassing-rate and air-holding-proof electrical connector. Background Art

[0002] At present, with the continuous upgrading of the development scale and speed of the domestic chip and semiconductor industries, the domestic chip and semiconductor industries are constantly developing towards independence, high-end and complexity. A stable, clean and complex vacuum environment is crucial for semiconductor manufacturing. The existing connectors are bonded to the base by glue, and most glues will release gas in a vacuum environment and pollute the vacuum environment, causing the semiconductor material to be corroded and leak, resulting in a sharp decline in the stability of the semiconductor. For example, a converging electrical connector disclosed in CN115764389A has a mortise and tenon structure processed between the upper base and the lower base, and the mortise and tenon structure is connected by an adhesive. Although the mortise and tenon structure and the adhesive increase the pressure resistance of the connector in a vacuum environment, in order to avoid the adhesive from releasing gas in a vacuum environment, the adhesive has extremely high requirements, which will greatly increase the manufacturing cost of the connector. Summary of the invention

[0003] In order to solve the above technical problems, the present invention provides a corrosion-resistant, low-gassing and air-holding-proof electrical connector.

[0004] The present invention is achieved through the following technical solutions.

[0005] The present invention provides a corrosion-resistant, low-gassing, and air-holding-proof electrical connector, comprising:

[0006] The upper base includes a docking plate and a plug. The plug is fixed at the center of the docking plate. An upper screw hole is processed at both ends of the docking plate. The plug is processed with a plurality of upper base jacks that penetrate the docking plate and the plug.

[0007] The lower base has several lead holes in the center and two lower screw holes at both ends.

[0008] The tail cover has a fixed wire groove and a wiring groove at both ends of one end surface of the tail cover, and a base mounting platform is fixedly connected to one end of the tail cover, and the end surface of the base mounting platform is flush with the bottom of the wiring groove. A connecting ear is fixedly connected to both sides of the tail cover and adjacent to the end of the wiring groove, and a countersunk hole is processed on the connecting ear;

[0009] The end faces of the docking plate and the lower base have the same shape, the end face of the docking plate facing away from the plug is connected to the lower base and is installed on the base mounting platform after the connection, and the two ends of the lower base are respectively in contact with two connecting ears; the number and position of the upper base jacks correspond to the lead connection holes; locking screws are installed in the countersunk holes, the lower screw holes, and the upper screw holes, and the threaded ends of the locking screws extend out of the upper screw holes.

[0010] The wire fixing groove and the wiring groove are also covered with a tail cover.

[0011] A tail cover limiting groove is also processed on both sides of the wire fixing groove. The bottom height of the tail cover limiting groove is higher than the wire fixing groove and a threaded hole is processed in the center. The shape of the tail cover is the same as the shape formed by connecting the tail cover limiting groove and the wiring groove and is fixed to the tail cover limiting groove by bolts.

[0012] Connecting nuts are also installed in the upper screw hole and the lower screw hole. The small diameter section at one end of the connecting nut extends into the upper screw hole, and the large diameter section at the other end of the connecting nut is placed in the lower screw hole, and its end is placed in the countersunk hole. A notch is also processed on the side of the lower screw hole, and the side of the large diameter section protrudes out of the notch. An internal thread is processed inside the connecting nut, and the locking screw is placed in the connecting nut.

[0013] The edges of the opposite surfaces of the docking plate and the lower base are also processed with positioning holes and positioning columns respectively. The positioning holes and positioning columns are respectively provided on the docking plate and the lower base and are not in a straight line. The positioning holes and positioning columns of the lower base are relatively positioned.

[0014] The connecting ears and the two sides of the lower base are also processed with through holes and base connecting internal threaded holes respectively and are connected by screws.

[0015] The beneficial effects of the present invention are as follows: by using the riveted connecting nut to replace the need for the use of glue for bonding the upper and lower bases, the medium affecting the vacuum environment is reduced; and by using the hollow locking component to act as a bleed screw, the probability of virtual leakage is further reduced, which is conducive to the rapid construction of a complex and stable ultra-high vacuum environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the present invention;

[0017] Figure 2 It is a schematic diagram of the upper base structure of the present invention;

[0018] Figure 3 It is a schematic diagram of the upper base docking surface of the present invention;

[0019] Figure 4 It is a schematic diagram of the lower base structure of the present invention;

[0020] Figure 5It is a schematic diagram of the structure of the lower base docking surface of the present invention;

[0021] Figure 6 It is a schematic diagram of the tail cover structure of the present invention;

[0022] Figure 7 It is a schematic diagram of the structure of the connecting nut of the present invention;

[0023] Figure 8 It is a schematic diagram of the locking screw structure of the present invention;

[0024] In the figure: 1-upper base, 11-docking plate, 12-nut groove, 13-upper screw hole, 14-plug, 15-upper base jack, 16-bucket hole, 17-positioning hole, 2-locking screw, 21-locking thread, 22-connecting rod, 23-screw head, 3-lower base, 31-notch, 32-positioning column, 33-base connecting internal thread hole, 34-lower screw hole, 35-lead connection hole, 4-connecting nut, 41-small diameter section, 42-large diameter section, 43-internal thread, 5-tail cover, 51-fixed wire groove, 52-tail cover limiting groove, 53-mounting hole, 54-connecting ear, 55-countersunk hole, 56-through hole, 57-wiring groove, 58-base mounting platform, 6-tail cover. DETAILED DESCRIPTION

[0025] The technical solution of the present invention is further described below, but the scope of protection claimed is not limited to the description.

[0026] like Figure 1 As shown, a corrosion-resistant, low-gassing, and air-holding-proof electrical connector comprises:

[0027] The upper base 1 includes a docking plate 11 and a plug 14. The plug 14 is fixed at the center of the docking plate 11. An upper screw hole 13 is processed at both ends of the docking plate 11. The plug 14 is processed with a plurality of upper base jacks 15 that penetrate the docking plate 11 and the plug 14.

[0028] The lower base 3 has a plurality of lead holes 35 processed in the center thereof, and two lower screw holes 34 processed at both ends of the lower base 3; the upper and lower bases are made of polyetheretherketone material, which has good corrosion resistance, hydrolysis resistance, low outgassing rate and good electrical properties, so that the product state is stable and the performance is good. It is used in vacuum products, which is beneficial to the stability of the vacuum environment.

[0029] The tail cover 5 has a wire fixing groove 51 and a wiring groove 57 at both ends of one end face thereof, and a base mounting platform 58 is fixedly connected to one end of the tail cover 5, and the end face of the base mounting platform 58 is flush with the bottom of the wiring groove 57, and a connecting ear 54 is fixedly connected to the ends of the two sides of the tail cover 5 and adjacent to the wiring groove 57, and a countersunk hole 55 is processed on the connecting ear 54; the tail cover is made of stainless steel material to further reduce the degree to which the oxidation and corrosion of the connector material itself affect the vacuum environment.

[0030] Furthermore, the end faces of the docking plate 11 and the lower base 3 have the same shape, and the end face of the docking plate 11 facing away from the plug 14 is connected to the lower base 3 and installed on the base mounting platform 58 after the connection, and the two ends of the lower base 3 are respectively in contact with the two connection ears 54; the number and position of the upper base jacks 15 correspond to the lead connection holes 35; the locking screws 2 are installed in the countersunk holes 55, the lower screw holes 34, and the upper screw holes 13, and the threaded ends of the locking screws 2 extend out of the upper screw holes 13. The docking plate 11 and the lower base 3 are installed on the connection ears in sequence, and the locking screws pass through the connection ears, the docking plate, and the two sides of the lower base in sequence, and the threaded ends thereof extend out to cooperate with the socket, and are used to fix the connector when the connector is assembled.

[0031] Furthermore, the wire fixing groove 51 and the wiring groove 57 are also covered with a tail cover 6. The tail cover 6 is used to close the connection between the lead wire and the base, and to press the lead wire into the wire fixing groove.

[0032] Furthermore, a tail cover limiting groove 52 is processed on both sides of the wire fixing groove 51, the bottom height of the tail cover limiting groove 52 is higher than the wire fixing groove 51 and a threaded hole is processed in the center, and the shape of the tail cover 6 is the same as the shape formed by the connection of the tail cover limiting groove 52 and the wiring groove 57 and is fixed to the tail cover limiting groove 52 by bolts. The tail cover is embedded in the tail cover to prevent the edge of the tail cover from protruding out of the connector.

[0033] Furthermore, a connecting nut 4 is installed in the upper screw hole 13 and the lower screw hole 34, a small diameter section 41 at one end of the connecting nut 4 extends into the upper screw hole 13, a large diameter section 42 at the other end of the connecting nut 4 is placed in the lower screw hole 34, and its end is placed in the countersunk hole 55, a notch 31 is processed on the side of the lower screw hole 34, and the side of the large diameter section 42 protrudes out of the notch 31, an internal thread 43 is processed in the connecting nut 4, and the locking screw 2 is placed in the connecting nut 4. The end of the connecting nut extending into the upper screw hole connects and fixes the upper base and the lower base through a riveting structure.

[0034] Furthermore, positioning holes 17 and positioning columns 32 are also processed on the edges of the opposite surfaces of the docking plate 11 and the lower base 3, respectively. The positioning holes 17 and positioning columns 32 are respectively provided with three lower bases on the docking plate 11 and the lower base 3 and are not in a straight line to form a three-point positioning structure to prevent the upper base and the lower base from rotating after positioning. The three positioning holes 17 and positioning columns 32 of the lower base are relatively positioned.

[0035] Furthermore, through holes 56 and base connection internal thread holes 33 are processed on both sides of the connecting ear 54 and the lower base 3 and connected by screws. The connecting ear fixes the lower base on the tail cover by bolts.

[0036] The present invention adopts a structural design of a stainless steel locking component, low-outgassing upper and lower bases, a riveted connecting nut, and a bleed locking component to reduce the degree to which the vacuum environment of the product is affected by oxidation and corrosion of the components of the connector itself under a vacuum environment. The use of the riveted connecting nut replaces the need for the use of glue for bonding the upper and lower bases, thereby reducing the medium that affects the vacuum environment; and the hollow locking component acts as a bleed screw, further reducing the probability of virtual leakage, which is conducive to the rapid construction of a complex and stable ultra-high vacuum environment.

Claims

1. A corrosion-resistant, low-outgassing, and air-holding-proof electrical connector, characterized in that: include: An upper base (1), the upper base (1) comprising a docking plate (11) and a plug (14), the plug (14) being fixed at the center of the docking plate (11), an upper screw hole (13) being processed at both ends of the docking plate (11), and a plurality of upper base plug holes (15) penetrating the docking plate (11) and the plug (14) being processed on the plug (14); A lower base (3), wherein a plurality of lead holes (35) are processed at the center of the lower base (3), and two lower screw holes (34) are processed at both ends of the lower base (3); A tail cover (5), wherein two ends of one end surface of the tail cover (5) are respectively processed with a wire fixing groove (51) and a wiring groove (57), one end of the tail cover (5) is also fixedly connected to a base mounting platform (58), the end surface of the base mounting platform (58) is flush with the bottom of the wiring groove (57), and two sides of the tail cover (5) and the ends adjacent to the wiring groove (57) are respectively fixedly connected with a connecting ear (54), and a countersunk hole (55) is processed on the connecting ear (54); The end faces of the docking plate (11) and the lower base (3) have the same shape. The end face of the docking plate (11) facing away from the plug (14) is connected to the lower base (3) and is mounted on a base mounting platform (58) after the connection. The two ends of the lower base (3) are respectively in contact with two connecting ears (54). The number and position of the upper base jacks (15) correspond to the lead wire connection holes (35). Locking screws (2) are installed in the countersunk holes (55), the lower screw holes (34) and the upper screw holes (13), and the threaded ends of the locking screws (2) extend out of the upper screw holes (13).

2. The corrosion-resistant, low-outgassing, and air-holding-proof electrical connector according to claim 1, characterized in that: The wire fixing groove (51) and the wiring groove (57) are also covered with a tail cover (6).

3. The corrosion-resistant, low outgassing, and air-holding-proof electrical connector according to claim 1, characterized in that: A tail cover limiting groove (52) is also processed on both sides of the wire fixing groove (51), the bottom height of the tail cover limiting groove (52) is higher than the wire fixing groove (51) and a threaded hole is processed at the center. The shape of the tail cover (6) is the same as the shape formed by connecting the tail cover limiting groove (52) and the wiring groove (57) and is fixed to the tail cover limiting groove (52) by bolts.

4. The corrosion-resistant, low outgassing, and air-holding-proof electrical connector according to claim 1, characterized in that: A connecting nut (4) is also installed in the upper screw hole (13) and the lower screw hole (34); a small diameter section (41) at one end of the connecting nut (4) extends into the upper screw hole (13); a large diameter section (42) at the other end of the connecting nut (4) is placed in the lower screw hole (34) and its end is placed in the countersunk hole (55); a notch (31) is also machined on the side of the lower screw hole (34); a side of the large diameter section (42) protrudes out of the notch (31); an internal thread (43) is machined inside the connecting nut (4); and the locking screw (2) is placed in the connecting nut (4).

5. The corrosion-resistant, low outgassing, and air-holding-proof electrical connector according to claim 1, characterized in that: The edges of the opposite surfaces of the docking plate (11) and the lower base (3) are further processed with positioning holes (17) and positioning columns (32), respectively. The positioning holes (17) and positioning columns (32) are respectively provided on the docking plate (11) and the lower base (3) and are not in a straight line. The positioning holes (17) and positioning columns (32) of the lower base (3) are positioned relative to each other.

6. The corrosion-resistant, low outgassing, and air-holding-proof electrical connector according to claim 1, characterized in that: The connecting ear (54) and the two sides of the lower base (3) are also respectively processed with through holes (56) and base connecting internal threaded holes (33) and are connected by screws.

Citation Information

Patent Citations

  • Convergence electric connector

    CN115764389A