Large-flow high-stability saturated gas generating device

Abstract

The invention discloses a large-flow high-stability saturated gas generating device which comprises a constant-temperature water tank, a circulating water inlet pipeline, a circulating water outlet pipeline, a bubble generator, a heat and mass transfer device, a gas-liquid separator, a gas inlet pipeline and a gas outlet pipeline. The constant-temperature water tank is used for generating constant-temperature and adjustable circulating water, the circulating water inlet pipeline and the circulating water outlet pipeline are used for connecting the constant-temperature water tank and the heat and mass exchanger, and the gas inlet pipeline is used for enabling unsaturated gas to flow into the heat and mass exchanger and the bubble generator. The bubble generator is used for enabling flowing-in unsaturated gas to form bubbles, the heat and mass transfer device is used for making contact with liquid water through the bubbles to generate saturated moisture, the gas-liquid separator is used for blocking liquid drops carried in the supersaturated moisture, and the gas outlet pipeline is used for enabling the saturated moisture to flow out. According to the invention, saturated moisture with wide dew point range, large flow and high stability can be generated.

Description

Technical Field

[0001] The invention belongs to the technical field of thermal metrology, and in particular relates to a large-flow and high-stability saturated gas generating device. Background Art

[0002] Humidity generator is a widely used measuring device in the process of verifying or calibrating humidity measuring instruments. The gas saturation device is its core component, which is used to pass the unsaturated gas through the saturation device to make it reach water vapor saturation under certain temperature and pressure conditions.

[0003] With the rise of high-end chip mass production and special gas manufacturing industries in my country, gas humidity measurement and calibration have become increasingly important, and new requirements have been put forward for saturated gas generators, which are required to have wide dew point range, ultra-large flow, high stability, high response and long-term continuous operation. The existing saturated gas generators have a narrow dew point range, small flow, and slow dew point switching speed, which cannot meet the large-scale, high-efficiency and high-stability humidity calibration needs of high-end chip mass production, special gas manufacturing and other industries. Summary of the invention

[0004] The object of the present invention is to provide a high-flow and high-stability saturated gas generating device capable of generating saturated wet gas with a wide dew point range, a large flow rate and high stability.

[0005] In order to achieve the above-mentioned object, one aspect of the present invention provides a high-flow and high-stability saturated gas generating device, comprising a constant temperature water tank, a circulating water inlet pipeline, a circulating water outlet pipeline, a bubble generator, a heat and mass exchanger, a gas-liquid separator, an air inlet pipeline, and an air outlet pipeline;

[0006] The constant temperature water tank is used to produce circulating water with a constant and adjustable temperature, the circulating water inlet pipeline and the circulating water outlet pipeline are used to connect the constant temperature water tank and the heat and mass exchanger, the air inlet pipeline is used to flow unsaturated gas into the heat and mass exchanger and the bubble generator, the bubble generator is used to form bubbles from the flowing unsaturated gas, the heat and mass exchanger is used to generate saturated moisture through the contact between the bubbles and liquid water, the gas-liquid separator is used to block the droplets entrained in the supersaturated moisture, and the air outlet pipeline is used to flow out the saturated moisture;

[0007] The gas-liquid separator comprises a flow port, a plurality of baffles, a top cover and a bottom plate, each baffle plate is welded by three vertical thin plates, the angle between each thin plate is 120 degrees, the top of the baffle plate is connected to the top cover, and the bottom is connected to the bottom plate, the supersaturated moisture enters the gas-liquid separator from the flow port, and flows out after being blocked by the baffle plate;

[0008] The circulating water inlet pipeline is located lower than the bubble generator, the circulating water outlet pipeline is located lower than the bottom plate of the gas-liquid separator, and the gas outlet pipeline is located higher than the top of the baffle plate of the gas-liquid separator.

[0009] Preferably, the bubble generator is an open-hole coil structure, including a coil and a plurality of air holes, the diameter of the coil is smaller than the diameter of the air inlet pipeline, and the number of the air holes is between 200 and 500.

[0010] Preferably, there are 24 blocking plates, which are evenly distributed around the top cover.

[0011] Preferably, the large-flow and high-stability saturated gas generating device further comprises a water inlet valve and a water return valve, the water inlet valve is installed on the circulating water inlet pipeline, and the water return valve is installed on the circulating water outlet pipeline.

[0012] The high-flow, high-stability saturated gas generating device of the above aspect of the present invention can generate saturated wet gas with a wide dew point range, a large flow rate, and high stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solution of the present invention, the following briefly introduces the drawings used in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work:

[0014] Figure 1 It is a schematic structural diagram of a high-flow and high-stability saturated gas generating device according to an embodiment of the present invention;

[0015] Figure 2 is a schematic structural diagram of a gas-liquid separator according to an embodiment of the present invention;

[0016] Figure 3 It is a schematic structural diagram of a bubble generator according to an embodiment of the present invention. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0018] The embodiment of the present invention provides a high-flow and high-stability saturated gas generating device. Figure 1 , Figure 2 and Figure 3 As shown, the large-flow and high-stability saturated gas generating device of an embodiment of the present invention includes a constant temperature water tank 1, a circulating water inlet pipeline 2, a circulating water outlet pipeline 3, a bubble generator 4, a heat and mass exchanger 5, a gas-liquid separator 6, an air inlet pipeline 7, an air outlet pipeline 8, a water inlet valve 15 and a return valve 16.

[0019] The thermostatic water tank 1 is used to produce circulating water with a constant and adjustable temperature. The circulating water inlet pipeline 2 and the circulating water outlet pipeline 3 are used to connect the thermostatic water tank 1 and the heat and mass exchanger 5. The water inlet valve 15 is installed on the circulating water inlet pipeline 2, and the water return valve 16 is installed on the circulating water outlet pipeline 3. The air inlet pipeline 7 is used to flow unsaturated gas into the heat and mass exchanger 5 and the bubble generator 4. The bubble generator 4 is used to form bubbles of a certain diameter from the inflowing unsaturated gas. The heat and mass exchanger 5 is used to generate saturated moisture at a certain temperature and pressure through the contact between the bubbles and liquid water. The gas-liquid separator 6 is used to block the liquid droplets entrained in the supersaturated moisture. The air outlet pipeline 7 is used to flow out the saturated moisture.

[0020] The bubble generator 4 is an open-hole coil structure, including a coil 9 and a plurality of air holes 10. The bubble generator 4 is connected to the air intake pipeline 7. The diameter of the coil 9 is smaller than the diameter of the air intake pipeline 7. In this embodiment, the diameter of the coil 9 is selected to be 6 mm, the diameter of the air intake pipeline 7 is 10 mm, and the bubble generator 4 is welded to the air intake pipeline 9. The number of air holes 10 is between 200 and 500, and the number of air holes 10 in this embodiment is 200.

[0021] The gas-liquid separator 6 includes a top cover 11, a plurality of baffles 12, a bottom plate 13 and a flow port 14. Each baffle is welded by three vertical thin plates. The angle between each thin plate is 120 degrees. The top of the baffle 12 is connected to the top cover 11, and the bottom is connected to the bottom plate 13. In this embodiment, a total of 24 baffles are arranged and evenly distributed around the top cover 11. The supersaturated moisture enters the gas-liquid separator 6 from the flow port 14, flows out after the baffle 12 blocks the droplets, and finally flows out from the gas outlet pipe 8.

[0022] The circulating water inlet pipeline 2 is located lower than the bubble generator 4 , the circulating water outlet pipeline 3 is located lower than the bottom plate 13 of the gas-liquid separator 6 , and the gas outlet pipeline 8 is higher than the top of the blocking plate 12 of the gas-liquid separator 6 .

[0023] Taking the generation of saturated moisture with a dew point temperature of 80°C as an example, first set the temperature of the thermostatic water tank 1 to 80°C, and after the water temperature in the thermostatic water tank 1 reaches the set value and stabilizes, open the water inlet valve 15 and the water return valve 16. At this time, the temperature of the thermostatic water tank 1 will fluctuate. After its temperature stabilizes, the unsaturated gas will enter the heat and mass exchanger 5 through the air inlet pipe 7, and the unsaturated gas will flow into the coil 9 and then flow out through the air hole 10. At this time, the unsaturated gas forms a large number of bubbles, which become supersaturated moisture after contacting with high-temperature liquid water. The supersaturated moisture quickly sweeps the blocking plate 12 through the flow port 14, and the liquid water droplets are blocked at this time. The supersaturated moisture becomes saturated moisture and then flows out through the outlet pipe 8.

[0024] The high-flow and high-stability saturated gas generating device of the embodiment of the present invention can generate saturated wet gas with a wide dew point range, a large flow rate and high stability.

[0025] The above description is only by way of illustration of certain exemplary embodiments of the present invention. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A high-flow, high-stability saturated gas generating device, characterized in that: It includes a constant temperature water tank, a circulating water inlet pipeline, a circulating water outlet pipeline, a bubble generator, a heat and mass exchanger, a gas-liquid separator, an air inlet pipeline, and an air outlet pipeline; The constant temperature water tank is used to produce circulating water with a constant and adjustable temperature, the circulating water inlet pipeline and the circulating water outlet pipeline are used to connect the constant temperature water tank and the heat and mass exchanger, the air inlet pipeline is used to flow unsaturated gas into the heat and mass exchanger and the bubble generator, the bubble generator is used to form bubbles from the flowing unsaturated gas, the heat and mass exchanger is used to generate saturated moisture through the contact between the bubbles and liquid water, the gas-liquid separator is used to block the droplets entrained in the supersaturated moisture, and the air outlet pipeline is used to flow out the saturated moisture; The gas-liquid separator comprises a flow port, a plurality of baffles, a top cover and a bottom plate, each baffle plate is welded by three vertical thin plates, the angle between each thin plate is 120 degrees, the top of the baffle plate is connected to the top cover, and the bottom is connected to the bottom plate, the supersaturated moisture enters the gas-liquid separator from the flow port, and flows out after being blocked by the baffle plate; The circulating water inlet pipeline is located lower than the bubble generator, the circulating water outlet pipeline is located lower than the bottom plate of the gas-liquid separator, and the gas outlet pipeline is located higher than the top of the baffle plate of the gas-liquid separator.

2. The high-flow and high-stability saturated gas generating device according to claim 1 is characterized in that: The bubble generator is an open-hole coil structure, including a coil and a plurality of air holes. The diameter of the coil is smaller than the diameter of the air inlet pipeline, and the number of the air holes is between 200 and 500.

3. The high-flow, high-stability saturated gas generating device according to claim 1 or 2, characterized in that: There are 24 blocking plates, which are evenly distributed around the top cover.

4. The high-flow, high-stability saturated gas generating device according to claim 1 or 2, characterized in that: It also includes a water inlet valve and a water return valve, wherein the water inlet valve is installed on the circulating water inlet pipeline, and the water return valve is installed on the circulating water outlet pipeline.

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