Cleaning method for removing pollutants deposited on ceramic surface

Abstract

The invention relates to a cleaning method for removing pollutants deposited on a ceramic surface. The cleaning method comprises the following specific steps: receiving inspection; measuring quality; blowing through an air gun; performing IPA wiping; a black adhesive tape is used for protecting the sealing surface, a bubble pad is used for protecting the heat preservation coating, and then the black adhesive tape is used for tightly winding the bubble pad; first sand blasting is conducted, specifically, sand materials in the special sand blasting machine are replaced, and new white corundum sand materials are used; the sand blasting method comprises the steps that the part is divided into six angles, and transverse sweeping sand blasting and then vertical sweeping sand blasting are conducted on each face; measuring quality; replacing a sand material; blasting sand for the second time; quality measurement: sand material replacement; blasting sand for the third time; measuring quality; protection is removed; first-time high-pressure water washing; soaking with pure water; second-time high-pressure water washing; overflowing pure water; soaking with pure water; taking a water sample; and blow-drying and drying. Particle pollutants and deposited pollutants on the surface of the component can be completely removed, a heat preservation coating and a copper pipe are not damaged, the use frequency of the component is increased, and the use cost of a client side is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of cleaning precision parts of semiconductor equipment, and in particular to a cleaning method for removing pollutants deposited on ceramic surfaces. Background Art

[0002] For the cleaning of ceramics in semiconductor chemical vapor deposition equipment, most of the existing cleaning processes are chemical immersion + sandblasting + high temperature, which is cumbersome and not suitable for cleaning coated ceramics. However, some ceramic parts have thermal insulation coatings on the surface and are not suitable for contamination by chemicals; and there are copper pipes inside and outside, which cannot be heated to high temperatures, so traditional cleaning methods cannot be used. Summary of the invention

[0003] The present invention aims to solve the deficiencies of the prior art and provide a cleaning method for removing pollutants deposited on the surface of ceramics.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] A cleaning method for removing deposited pollutants on a ceramic surface, comprising the following specific steps:

[0006] S1. Incoming inspection:

[0007] Put on gloves and take out the parts and place them on a special turnover vehicle. Observe whether the parts are damaged or missing and take photos.

[0008] S2. Quality measurement:

[0009] Use a laser roughness measuring instrument to measure the parts, and measure 8 points each at the top, middle, and bottom as required;

[0010] S3, air gun purge:

[0011] Use an air gun to blow the external copper tube at a pressure of 30±5Psi, and there should be no residual moisture in the copper tube;

[0012] S4, IPA wiping:

[0013] Use a dust-free cloth dipped in IPA to wipe the sealing surface;

[0014] S5. Protection:

[0015] Use 2.5cm black tape to protect the sealing surface, then use bubble pad to protect the thermal insulation coating, and then use 5cm black tape to tightly wrap the bubble pad;

[0016] S6, first sandblasting:

[0017] Replace the sand material in the special sandblasting machine with new WA220# white corundum sand material; the sandblasting pressure is 3-5Kg / cm2 , the sandblasting gun head is 5cm away from the surface of the component; sandblasting technique: divide the component into 6 angles, that is, 60° is one surface, a total of 6 surfaces, each surface is first subjected to horizontal sandblasting and then vertical sandblasting, the sandblasting time is 1.5-2min, to ensure the uniformity of each surface;

[0018] S7. Quality measurement:

[0019] Use a laser roughness measuring instrument to measure the parts, and measure 8 points each at the top, middle, and bottom as required;

[0020] S8. Replacement of sand material:

[0021] Pour out the old sand material from the first sandblasting, purge the sandblasting machine, and replace with new WA220# white corundum sand material;

[0022] S9, Second sandblasting:

[0023] Perform a second sandblasting operation;

[0024] S10, Quality Measurement:

[0025] Use a laser roughness measuring instrument to measure the parts, and measure 8 points each at the top, middle, and bottom as required;

[0026] S11. Replacement of abrasive materials:

[0027] Pour out the old sand material from the second sandblasting, purge the sandblasting machine, and replace with new WA220# white corundum sand material;

[0028] S12, the third sandblasting:

[0029] Perform the third sandblasting;

[0030] S13, Quality Measurement:

[0031] Use a laser roughness measuring instrument to measure the parts, and measure 8 points on the top, middle, bottom and 8 points on the bottom annular area as required;

[0032] S14, remove protection:

[0033] Remove tape and bubble wrap;

[0034] S15, first high pressure water washing:

[0035] For high-pressure water washing of components, use the maximum pressure when washing the inner wall of the component, the water gun head is 20-40cm away from the inner wall of the component, and the washing time is ≥5min; use the minimum pressure when washing the thermal insulation coating on the outer wall of the component, the water gun head is 30-50cm away from the thermal insulation coating, and wash for 30s;

[0036] S16, pure water immersion:

[0037] Place the component upright on the fixture, fill it with pure water, cover the top with a clean bubble pad, let it stand for 1 hour, then pour out the pure water;

[0038] S17, Second high pressure water washing:

[0039] When washing the inner wall of the component, use a high-pressure water gun with maximum pressure, 20-40cm away from the inner wall, and rinse for 1 minute; when washing the thermal insulation coating on the outer wall of the component, use minimum pressure, 30-50cm away from the thermal insulation coating, and rinse for 30 seconds;

[0040] S18, Pure water overflow:

[0041] Place the component upright on the fixture and rinse it with running pure water for 1 hour;

[0042] S19, pure water immersion:

[0043] Place the component upright on the fixture, fill it with pure water, and let it stand for 1 hour;

[0044] S20, water sampling:

[0045] Use a special sampler to take water samples from the bottom of the component, and then pour out the water inside the component;

[0046] S21, Blow Drying:

[0047] Use an air gun to blow the outer copper tube until no water vapor is ejected from the copper tube. The pressure is 30±5Psi. Then put N 2 Dry the moisture in the oven, set the program to 90℃, and bake for 2h; take out the components after they cool naturally.

[0048] In step S5, the copper tube cannot be bent during protection and must remain in its original state.

[0049] In step S9, the second sandblasting requirement is consistent with the first sandblasting requirement.

[0050] In step S12, the third sandblasting requirement is consistent with the first sandblasting requirement.

[0051] In step S15, high-pressure water washing is performed on a special fixture.

[0052] In step S20, the taken water sample is stored for testing.

[0053] In step S21, the temperature is naturally cooled to below 40°C.

[0054] The beneficial effects of the present invention are as follows: the present invention can completely remove the particulate pollutants and deposited pollutants on the surface of the component without damaging the thermal insulation coating and the copper tube, thereby increasing the number of times such components can be used and reducing the use cost of the client. DETAILED DESCRIPTION

[0055] The principles and features of the present invention are described below in conjunction with specific embodiments. The embodiments are only used to explain the present invention and are not used to limit the scope of the present invention. The advantages and features of the present invention will become more apparent from the following description.

[0056] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0057] The present invention will be further described below in conjunction with specific embodiments:

[0058] A cleaning method for removing deposited pollutants on a ceramic surface, comprising the following specific steps:

[0059] S1. Incoming inspection:

[0060] Put on gloves and take out the parts and place them on a special turnover vehicle. Observe whether the parts are damaged or missing, and take photos.

[0061] S2. Quality measurement:

[0062] Use a laser roughness measuring instrument to measure the parts, and measure 8 points each at the top, middle, and bottom as required;

[0063] S3, air gun purge:

[0064] Use an air gun to blow the external copper tube at a pressure of 30±5Psi, and there should be no residual moisture in the copper tube;

[0065] S4, IPA wiping:

[0066] Use a dust-free cloth dipped in IPA to wipe the sealing surface;

[0067] S5. Protection:

[0068] Use 2.5cm black tape to protect the sealing surface, then use bubble pad to protect the thermal insulation coating (note that the copper tube should not be bent during protection and should be kept as it is), and then use 5cm black tape to tightly wrap the bubble pad;

[0069] S6, first sandblasting:

[0070] Replace the sand material in the special sandblasting machine with new WA220# white corundum sand material; the sandblasting pressure is 3-5Kg / cm 2 , the sandblasting gun head is 5cm away from the surface of the component; sandblasting technique: divide the component into 6 angles, that is, 60° is one surface, a total of 6 surfaces, each surface is first subjected to horizontal sandblasting and then vertical sandblasting, the sandblasting time is 1.5-2min, to ensure the uniformity of each surface;

[0071] S7. Quality measurement:

[0072] Use a laser roughness measuring instrument to measure the parts, and measure 8 points each at the top, middle, and bottom as required;

[0073] S8. Replacement of sand material:

[0074] Pour out the old sand material from the first sandblasting, purge the sandblasting machine, and replace with new WA220# white corundum sand material;

[0075] S9, Second sandblasting:

[0076] The first sandblasting removes about 70% of the deposits, and the second sandblasting is performed (the sandblasting requirements are the same as the first);

[0077] S10, Quality Measurement:

[0078] Use a laser roughness measuring instrument to measure the parts, and measure 8 points each at the top, middle, and bottom as required;

[0079] S11. Replacement of sand material:

[0080] Pour out the old sand material from the second sandblasting, purge the sandblasting machine, and replace with new WA220# white corundum sand material;

[0081] S12, the third sandblasting:

[0082] The second sandblasting removes about 95% of the deposits, and the third sandblasting is carried out (the sandblasting requirements are the same as the first time). The third sandblasting can completely remove the internal deposits;

[0083] S13, Quality Measurement:

[0084] Use a laser roughness measuring instrument to measure the parts, and measure 8 points on the top, middle, bottom and 8 points on the bottom annular area as required;

[0085] S14, remove protection:

[0086] Remove tape and bubble wrap;

[0087] S15, first high pressure water washing:

[0088] For high-pressure water washing of components, use the maximum pressure when washing the inner wall of the component, the water gun head is 20-40cm away from the inner wall of the component, and the washing time is ≥5min; use the minimum pressure when washing the thermal insulation coating on the outer wall of the component, the water gun head is 30-50cm away from the thermal insulation coating, and wash for 30s (this process is carried out on a special fixture);

[0089] S16, pure water immersion:

[0090] Place the component upright on the fixture, fill it with pure water, cover the top with a clean bubble pad, let it stand for 1 hour, then pour out the pure water;

[0091] S17, Second high pressure water washing:

[0092] When washing the inner wall of the component, use a high-pressure water gun with maximum pressure, 20-40cm away from the inner wall, and rinse for 1 minute; when washing the thermal insulation coating on the outer wall of the component, use minimum pressure, 30-50cm away from the thermal insulation coating, and rinse for 30 seconds;

[0093] S18, Pure water overflow:

[0094] Place the component upright on the fixture and rinse it with running pure water for 1 hour;

[0095] S19, pure water immersion:

[0096] Place the component upright on the fixture, fill it with pure water, and let it stand for 1 hour;

[0097] S20, water sampling:

[0098] Use a special sampler to take a water sample from the bottom of the component (this water sample is saved for testing), and then pour out the water inside the component;

[0099] S21, Blow Drying:

[0100] Use an air gun to blow the outer copper tube until no water vapor is ejected from the copper tube. The pressure is 30±5Psi. Then put N 2 Dry the moisture in the oven, set the program to 90℃, and bake for 2h; after the parts have cooled naturally (below 40℃), take them out.

[0101] The present invention uses white corundum sand material to perform three sandblasting and film removal treatments on the surface of the component, which can quickly remove the deposits on the surface of the component and ensure that the surface of the component remains uniform; the internal roughness is measured once after each sandblasting, effectively controlling the quality requirements and achieving customer satisfaction; the tape and bubble pad can effectively protect the external thermal insulation coating.

[0102] The present invention can completely remove particulate pollutants and deposited pollutants on the surface of components (substrate: ceramic + thermal insulation coating + copper tube) without damaging the thermal insulation coating and the copper tube, thereby increasing the number of uses of such components and reducing the use cost of the client.

[0103] The present invention has been exemplarily described above in conjunction with specific embodiments. It is obvious that the specific implementation of the present invention is not limited to the above-mentioned methods. As long as various improvements are made using the method concept and technical solution of the present invention, or they are directly applied to other occasions without improvement, they are all within the protection scope of the present invention.

Claims

1. A cleaning method for removing deposited pollutants on a ceramic surface, characterized in that: The specific steps are: S1. Incoming inspection: Put on gloves and take out the parts and place them on a special turnover vehicle. Observe whether the parts are damaged or missing and take photos. S2. Quality measurement: Use a laser roughness measuring instrument to measure the parts, and measure 8 points each at the top, middle, and bottom as required; S3, air gun purge: Use an air gun to blow the external copper tube at a pressure of 30±5Psi, and there should be no residual moisture in the copper tube; S4, IPA wiping: Use a dust-free cloth dipped in IPA to wipe the sealing surface; S5. Protection: Use 2.5cm black tape to protect the sealing surface, then use bubble pad to protect the thermal insulation coating, and then use 5cm black tape to tightly wrap the bubble pad; S6, first sandblasting: Replace the sand material in the special sandblasting machine with new WA220# white corundum sand material; the sandblasting pressure is 3-5Kg / cm 2 , the sandblasting gun head is 5cm away from the surface of the component; sandblasting technique: divide the component into 6 angles, that is, 60° is one surface, a total of 6 surfaces, each surface is first subjected to horizontal sandblasting and then vertical sandblasting, the sandblasting time is 1.5-2min, to ensure the uniformity of each surface; S7. Quality measurement: Use a laser roughness measuring instrument to measure the parts, and measure 8 points each at the top, middle, and bottom as required; S8. Replacement of sand material: Pour out the old sand material from the first sandblasting, purge the sandblasting machine, and replace with new WA220# white corundum sand material; S9, Second sandblasting: Perform a second sandblasting operation; S10, Quality Measurement: Use a laser roughness measuring instrument to measure the parts, and measure 8 points each at the top, middle, and bottom as required; S11. Replacement of abrasive materials: Pour out the old sand material from the second sandblasting, purge the sandblasting machine, and replace with new WA220# white corundum sand material; S12, the third sandblasting: Perform the third sandblasting; S13, Quality Measurement: Use a laser roughness measuring instrument to measure the parts, and measure 8 points on the top, middle, bottom and 8 points on the bottom annular area as required; S14, remove protection: Remove tape and bubble wrap; S15, first high pressure water washing: For high-pressure water washing of components, use the maximum pressure when washing the inner wall of the component, the water gun head is 20-40cm away from the inner wall of the component, and the washing time is ≥5min; use the minimum pressure when washing the thermal insulation coating on the outer wall of the component, the water gun head is 30-50cm away from the thermal insulation coating, and wash for 30s; S16, pure water immersion: Place the component upright on the fixture, fill it with pure water, cover the top with a clean bubble pad, let it stand for 1 hour, then pour out the pure water; S17, Second high pressure water washing: When washing the inner wall of the component, use a high-pressure water gun with maximum pressure, 20-40cm away from the inner wall, and rinse for 1 minute; when washing the thermal insulation coating on the outer wall of the component, use minimum pressure, 30-50cm away from the thermal insulation coating, and rinse for 30 seconds; S18, Pure water overflow: Place the component upright on the fixture and rinse it with running pure water for 1 hour; S19, pure water immersion: Place the component upright on the fixture, fill it with pure water, and let it stand for 1 hour; S20, water sampling: Use a special sampler to take water samples from the bottom of the component, and then pour out the water inside the component; S21, Blow Drying: Use an air gun to blow the external copper tube until no water vapor is sprayed out of the copper tube, the pressure is 30±5Psi, and then put it into a N2 oven to dry out the moisture. The program is set to 90℃ and the baking time is 2h; after the component cools down naturally, take it out.

2. A cleaning method for removing deposited pollutants on a ceramic surface according to claim 1, characterized in that: In step S5, the copper tube cannot be bent during protection and must remain in its original state.

3. A cleaning method for removing deposited pollutants on a ceramic surface according to claim 2, characterized in that: In step S9, the second sandblasting requirement is consistent with the first sandblasting requirement.

4. A cleaning method for removing deposited pollutants on a ceramic surface according to claim 3, characterized in that: In step S12, the third sandblasting requirement is consistent with the first sandblasting requirement.

5. A cleaning method for removing deposited pollutants on a ceramic surface according to claim 4, characterized in that: In step S15, high-pressure water washing is performed on a special fixture.

6. A cleaning method for removing deposited pollutants on a ceramic surface according to claim 5, characterized in that: In step S20, the taken water sample is stored for testing.

7. A cleaning method for removing deposited pollutants on a ceramic surface according to claim 6, characterized in that: In step S21, the temperature is naturally cooled to below 40°C.