Track power supply processing device based on AMHS control system and control method

Abstract

The invention relates to the technical field of semiconductor equipment, and provides a track power supply processing device based on an AMHS control system and a control method.The track power supply processing device comprises a processing device body, the processing device body comprises a vehicle body part and a polishing part, and the vehicle body part is arranged on an advancing track and used for driving the polishing part to move along the advancing track; the polishing part is located in an inner cavity of the vehicle body part and is perpendicular to the advancing track, and the processing end of the polishing part extends out of the top end of the vehicle body part to be connected with the charging contact; and the electrical storage device is electrically connected with the vehicle body part and the polishing part for discharging and power supply, and meanwhile, the treatment device body can be connected to the AMHS system to obtain a target optimal path from the AMHS system. The abnormal charging station is processed on the premise that the operation efficiency of the whole AMHS system is not affected, the charging efficiency of the charging station is improved, and the problem that the charging efficiency of a track power supply system in the AMHS system is reduced is solved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor equipment, and in particular to a track power supply processing device under an AMHS control system. Background Art

[0002] The semiconductor wafer clean automatic handling system (AMHS) can centrally manage and plan the roads for the automatic material handling vehicles under its cluster control. It can quickly and accurately transport wafers to their destination in a clean manner, greatly improving efficiency, shortening time, increasing production capacity, and improving stability. It is a control system for key handling equipment that meets the requirements of semiconductor miniaturization and liquid crystal display fine processing.

[0003] More specifically, in semiconductor wafer production and manufacturing plants, the silicon wafer boxes (FOUP, material storage boxes for wafers) are mainly transported between storage shelves and process machines, and between process equipment (such as Figure 1 as shown).

[0004] However, although the fully automatic overhead crane rail system technology is mature and is currently the standard configuration in semiconductor wafer factories, the traditional overhead rail transmission system also has serious and insurmountable shortcomings, as follows:

[0005] Since the automatic material handling vehicles in some factory areas still use their own power supply batteries for energy support, the batteries need to be charged and recharged after the automatic material handling vehicles have been running for a period of time. In order to avoid long-term downtime and charging of the automatic material handling vehicles, charging stations are often set up on the running paths of the automatic material handling vehicles. These stations are set up at the stops where the automatic material handling vehicles often stop. When the automatic material handling vehicles stop at these stations, the charging interface on the automatic material handling vehicles will extend out of the vehicle body and contact the charging interface on the track of the route to establish an electrical connection channel, and draw power from the power supply end of the track to recharge the batteries carried by the automatic material handling vehicles (such as Figure 2 As shown). Every time the automatic material handling vehicle is electrically connected to the power supply interface on the track, a momentary electric spark will be generated between the two, breaking through the air and hitting the power supply interface on the track. After a long period of accumulation, the oxide layer at the track power supply interface will thicken, causing the charging resistance at the interface to increase, seriously reducing the charging efficiency of the automatic material handling vehicle. At this time, manual intervention is required to replace or polish the power supply interface. These power supply interfaces are often set at the ceiling of the factory building, and the difficulty and danger of their handling operation cannot be ignored.

[0006] Therefore, how to safely and effectively maintain the track power supply system in the AMHS control system has become a problem that needs to be solved. Summary of the invention

[0007] The purpose of the present invention is to provide a track power supply processing device and control method based on an AMHS control system, so as to solve the technical problems in the prior art that the thickening of the oxide layer at the track power supply interface causes the increase of the electrical connection resistance, thereby reducing the charging efficiency of the automatic material handling vehicle, and when manual intervention is required to replace or polish the charging interface, the processing operation is difficult and dangerous.

[0008] In a first aspect, an embodiment of the present invention provides a track power supply processing device based on an AMHS control system, comprising:

[0009] A track system, comprising a travel track arranged parallel to the ground and a track installation unit, wherein the travel track is suspended below the ceiling of the factory through the track installation unit;

[0010] A charging station is arranged above the travel track, the charging station comprises a power supply line connected to a power source, and the other end of the power supply line is connected to a charging contact;

[0011] Features:

[0012] It also includes a processing device body, the processing device body includes a vehicle body and a grinding part, the vehicle body is arranged on the travel track, and is used to drive the grinding part to move along the travel track;

[0013] The grinding part is located in the inner cavity of the vehicle body, and the grinding part is arranged perpendicular to the travel track, and the processing end of the grinding part extends out of the top of the vehicle body and connects with the charging contact;

[0014] A power storage device, the power storage device is electrically connected to the vehicle body and the polishing part to discharge and supply power;

[0015] A charging control unit, wherein the charging control unit is installed in the vehicle body, and the top of the charging control unit can be movably extended out of the top of the vehicle body; the charging unit includes an electric push rod fixed in the inner cavity and a charging terminal, wherein the charging terminal is located at the top of the movable end of the electric push rod, and is driven by the electric push rod to approach the charging contact point, and abuts against the charging contact point to establish an electrical connection to charge the power storage device;

[0016] A communication unit, the communication unit is installed in the inner cavity of the vehicle body, and the communication unit is connected to the AMHS system control center to establish a network channel for data transmission;

[0017] The main control unit is used to receive the command information of the communication unit and control the electrical equipment group of the vehicle body and the polishing unit.

[0018] Furthermore, the grinding part includes a mounting base and a grinding drive motor, the mounting base is detachably mounted on the bottom end of the inner cavity of the vehicle body, a grinding roller is rotatably mounted on the mounting base through a rotating shaft, and the top of the grinding roller extends out of the top of the vehicle body; a driving pulley is mounted on one side of the rotating shaft, and the grinding drive motor drives the rotating shaft and the grinding roller to rotate through a transmission belt and a driving pulley; a concave splash guard is provided at the bottom of the mounting base, a protective face mask of the splash guard is provided on the grinding surface of the grinding roller, an impurity port is provided at the bottom of the splash guard, impurities polished off by the grinding roller during rotation are constrained by the splash guard and gathered at the impurity port, and a purification unit is installed at the impurity port to collect and process the impurities.

[0019] Furthermore, the grinding part also includes an adaptive component for the height of the grinding roller, at least one pair of the adaptive components are respectively arranged on both sides of the grinding roller, and both ends of the rotating shaft are respectively rotatably installed on the top of the adaptive components.

[0020] Furthermore, the adaptive component includes a fixed rod arranged perpendicular to the mounting base, the bottom of the fixed rod is fixedly connected through the fixed base, and an active area cavity is axially opened at the top of the fixed rod, a movable rod is slidably installed in the active cavity, and an adjustment spring is arranged at the bottom end of the movable rod and the bottom end of the movable cavity; the end of the movable rod away from the fixed base is rotatably connected to the rotating shaft through a connecting head.

[0021] Furthermore, a flexible dust cover is provided on the top of the vehicle body, and the cross section of the dust cover is a corrugated structure.

[0022] Furthermore, the purification unit includes an upper cavity and a lower cavity, and the upper cavity and the lower cavity are buckled together to form a box structure; the upper cavity is provided with an air inlet on one side facing the impurity port, and an air outlet on the other side, the air inlet is connected to the impurity port, and the air outlet is connected to the outside; an impeller and a wind motor for driving the impeller to rotate are installed in the lower cavity; an isolation grid is installed between the air inlet and the air outlet to isolate and adsorb impurities.

[0023] Furthermore, a magnetic adsorption plate is installed on the upper layer of the isolation grid plate.

[0024] Furthermore, the isolation grid plate and the adsorption plate are both plugged into the upper cavity.

[0025] Furthermore, the isolation grid plate and the adsorption plate are detachably installed in the upper cavity, and the inner wall of the upper cavity is provided with a drawer-type slide groove that can draw the isolation grid plate and the adsorption plate out from the air outlet.

[0026] In a second aspect, the present invention provides a track power supply processing method for an AMHS control system, comprising the following steps:

[0027] S1: The AMHS system obtains the charging efficiency of the current charging station based on the charging efficiency of the automatic material handling vehicle;

[0028] S2: The AMHS system compares and analyzes the charging efficiency of the charging station with the preset charging efficiency threshold. If the threshold is less than the preset value, it is marked as abnormal;

[0029] S3: The AMHS system sends the coordinates of the charging station with abnormal charging performance to the device body and sets a travel route for the processing device body, and dispatches the processing device body to the designated location to perform operations;

[0030] S4: The processing device body arrives at the designated location to perform operations, and uploads the operation records to the AMHS system for recording.

[0031] Specifically, the road priority of the processing device body is lower than the priority of the automatic material handling vehicle in the AMHS system.

[0032] Specifically, the AMHS system constantly obtains the position coordinates of the processing device body, and sets a safe distance for the processing device body to avoid the automatic material handling vehicle in time.

[0033] The embodiments of the present invention have at least the following technical effects:

[0034] 1. The design provided by the present invention is that the grinding device body can establish data communication with the AMHS main control system through the communication unit, connect the grinding device body to the AMHS cluster control environment, and set the road priority of the grinding device body to be second to the road priority of the automatic material handling vehicle, so that when the grinding device body encounters an automatic material handling vehicle in operation on the way to the target point, it will give priority to avoiding the automatic material handling vehicle in operation; at the same time, when the grinding device body is grinding the charging contacts, it can always communicate data with the AMHS system, obtain the vehicle positions of other automatic material handling vehicles within a preset distance range on the operating section from the AMHS system, and timely and effectively avoid the adjacent automatic material handling vehicles on the section, and complete the surface treatment of the power supply contacts on the travel track without affecting the normal passage of the automatic material handling vehicle;

[0035] 2. The charging contact grinding method in the AMHS system provided by the present invention adopts a comprehensive covering method to cover the construction position, and a corrugated flexible dust cover is set at the working point. The grinding wheel is started to grind the oxide layer at the charging contact, and then the cleaning unit negative pressure suction, magnetic plate dust suction, and filter static dust reduction combination mode can effectively clean the metal dust particles generated after the charging contact grinding, and prevent the dust from spreading to the clean environment required for semiconductor production and processing. The shortcomings of incomplete dust suction and dust reduction in traditional manual grinding are solved, and the dust collection effect of the dust generated by the charging contact grinding is greatly improved, which reduces the labor intensity of workers and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0037] Figure 1 This is a schematic diagram of the track handling system structure in the AMHS system;

[0038] Figure 2 for Figure 1 A schematic diagram of the front view structure of

[0039] Figure 3 It is a schematic diagram of the structure of the device of the present invention;

[0040] Figure 4 for Figure 3 Schematic diagram of the grinding unit structure;

[0041] Figure 5 Based Figure 4 Schematic diagram of the principle;

[0042] Figure 6 for Figure 4 Schematic diagram of the structure of the regulating component;

[0043] Figure 7 This is a schematic diagram of the purification unit structure of the device;

[0044] Figure 8 for Figure 7 Schematic diagram of some structures;

[0045] Fig. 9 It is a schematic diagram of the internal structure of the present invention;

[0046] Fig.10 This is a flow chart of the device control method provided by the present invention.

[0047] Icons: 100, track system; 110, travel track; 120, installation unit; 200, charging station; 210, power supply line; 220, charging contact; 300, device body; 310, vehicle body;

[0048] 320, grinding unit; 321, grinding roller; 323, driving pulley; 324, mounting base; 325, adaptive component; 3251, fixed base; 3252, fixed rod; 3253, movable rod; 3254, connector; 326, splash shield; 327, impurity port; 328, rotating shaft; 329, grinding drive motor; 400, communication unit; 500, charging control unit; 510, electric push rod; 520, charging terminal; 600, power storage device; 700, purification unit; 710, upper cavity; 711, air inlet; 712, air outlet; 720, lower cavity; 722, wind turbine; 730, adsorption plate; 740, isolation grid plate; 750, impeller; 800, dust cover; 900, main control unit. DETAILED DESCRIPTION

[0049] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0050] Those skilled in the art will understand that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as those generally understood by those skilled in the art in the field to which the present invention belongs. It should also be understood that terms such as those defined in common dictionaries should be understood to have meanings consistent with the meanings in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless specifically defined as here.

[0051] Those skilled in the art will appreciate that, unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present invention refers to the presence of the features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof. The term "and / or" used herein includes all or any unit and all combinations of one or more associated listed items.

[0052] For the first aspect, see Figures 1 to 6The embodiment of the present invention provides a track power supply processing device based on an AMHS control system, comprising:

[0053] The track system 100 includes a travel track 110 and a track installation unit 120 arranged parallel to the ground. The travel track 110 is laid along the path according to the placement of workshop equipment and the material transmission path, and the travel track 110 is suspended under the ceiling of the factory through the track installation unit 120;

[0054] A charging station 200 for supplying energy to the device is disposed above the travel track 110. The charging station 200 includes a power supply line 210 connected to a power source, and the other end of the power supply line 210 is connected to a charging contact 220. Figure 1 and Figure 2 As shown, the automatic material-free transport vehicle travels along the track 110; when the power of the automatic material transport vehicle is too low, in order to avoid the automatic material transport vehicle from stopping for a long time to charge and affecting the material transmission efficiency of the entire wafer factory, a plurality of charging contacts 220 are arranged at intervals on the top of the travel track 110. These charging contacts 220 are often arranged directly above the machine, so that when the automatic material transport vehicle stops above the machine to carry out material turnover on the machine, the top of the automatic material transport vehicle can extend a charging connector to abut against the charging contacts 220 above the automatic material transport vehicle to establish a passage, and the automatic material transport vehicle is temporarily charged and replenished through the charging station above the track. Generally, the automatic material transport vehicle stays above the machine for 3s to 6s, which increases the endurance of the automatic material transport vehicle. Since the electricity used in the AMHS system is high voltage, when the automatic material handling vehicle and the charging contact are in contact to establish a path, a high-temperature and high-voltage electric arc will be instantly generated between the two, hitting the contact part, and after long-term use, the surface oxide layer of the charging contact 220 will thicken, causing the resistance value to increase during charging, seriously affecting the charging efficiency of the automatic material handling vehicle, and greatly reducing its endurance. In order to solve the above problems, the device equipment provided by the present design includes a grinding device body 300, and the grinding device body 300 includes a vehicle body 310 and a grinding part 320. The vehicle body 310 is arranged on the travel track 110, and is used to drive the grinding part 320 to move along the travel track 110;

[0055] The grinding part 320 is located in the inner cavity of the vehicle body 310, and the grinding part 320 is arranged perpendicular to the travel track 110. The processing end of the grinding part 320 extends out of the top of the vehicle body 310 and connects with the charging contact 220. Preferably, a flexible dust cover 800 is arranged on the top of the vehicle body 310, and the cross-section of the dust cover 800 is a corrugated structure; the grinding part 320 is arranged on the vehicle body 310. When it is necessary to process the surface oxide layer of the charging contact 220, the grinding device body 300 is directly dispatched to travel to the work site on the AMHS track system to perform operations. The dust cover 800 is arranged at the working position to reduce the diffusion of impurities and pollutants, and avoid the traditional artificial ground carrying equipment to climb up to grind the charging contacts 220 on the aerial track. While reducing the workload of workers, it also avoids the occurrence of dangerous factors caused by the need for workers to climb up to work.

[0056] The power storage device 600 is electrically connected to the vehicle body portion 310 and the polishing portion 320 to discharge and supply power;

[0057] The charging control unit 500 is installed in the vehicle body 310, and the top of the charging control unit 500 can be movably extended out of the top of the vehicle body 310. The charging unit 500 includes an electric push rod 510 fixed in the inner cavity and a charging terminal 520. The charging terminal 520 is located at the top of the movable end of the electric push rod 510. The electric push rod 510 drives it close to the charging contact 220, and abuts against the charging contact 220 to establish an electrical connection to charge the power storage device 600. Since the grinding device body 300 itself needs to be driven by electricity, its own endurance is also particularly critical. In addition to carrying the necessary power storage device 600 to power the electrical components, the grinding device body 300 itself needs to be able to replenish the power in time according to the stored electricity. Charging is performed to avoid the grinding device body 300 crashing on the AMHS track system, causing large-scale traffic jams and paralysis of the system, affecting the normal passage of the automatic material handling vehicle. Therefore, its own charging method must also be optimized: when the storage capacity is lower than the threshold, the charging terminal 520 on the top of the grinding device body 300 is gradually raised under the drive of the electric push rod 510 until it abuts against the charging contact 220 to establish a path for charging the storage device 600 and increase the battery life. The power of the grinding device itself is much smaller than that of the automatic material handling vehicle. Therefore, the total charging time of the storage device 600 is much smaller than that of the automatic material handling vehicle, so that the device itself can complete its own power replenishment without affecting the normal operation of the automatic material handling vehicle.

[0058] The communication unit 400 is installed in the inner cavity of the vehicle body 310, and the communication unit 400 is connected to the AMHS system control center for communication to establish a network channel for data transmission;

[0059] The main control unit 900 is used to receive command information from the communication unit 400 and control the electrical components of the vehicle body unit 310 and the polishing unit 320. By receiving and transmitting signals, the electrical components in the equipment can work in coordination.

[0060] The grinding device body 300 cooperates with the main control unit 900 through the communication unit 400 to complete the sending and receiving of the overall information. The main function of the communication unit 400 is to establish communication between the grinding device body 300 and the AMHS system center, and temporarily incorporate the grinding device body 300 into the AMHS cluster control system. Since the grinding device body 300 itself is a non-transportation device and does not participate in the material scheduling operation in the workshop, the AMHS system will allocate suboptimal road priority to the grinding device body 300, and when the grinding device body 300 is traveling on the travel track 110, if it encounters an automatic material handling vehicle in operation, the grinding device body 300 will slow down or stop to avoid it, giving priority to the automatic material handling vehicle to pass normally.

[0061] At the same time, after the grinding device body 300 is connected to the AMHS system, the grinding device body 300 can obtain the optimal road path design through the AMHS system for passage. At the same time, when the grinding device body 300 is operating on the charging contact 220, it can always monitor the vehicles on the same track and make timely avoidance. The grinding time of the grinding device body 300 on the charging contact 220 is 2~4s. When facing a road section that cannot be avoided, and when the operation time is greater than 2s, the grinding device body 300 will give priority to the operation and remind the adjacent automatic material transport vehicle to slow down. When the operation time does not exceed 2s, the grinding device body 300 will suspend the operation, first avoid the adjacent automatic material vehicle, and then re-process the operation position after it passes.

[0062] See Figure 4 and Figure 5 As shown, the preferred grinding part 320 includes a mounting base 324 and a grinding drive motor 329. The mounting base 324 is detachably mounted on the bottom end of the inner cavity of the vehicle body 310. A grinding roller 321 is rotatably mounted on the mounting base 324 through a rotating shaft 328. The top of the grinding roller 321 extends out of the top of the vehicle body 310. A driving pulley 323 is mounted on one side of the rotating shaft 328. The grinding drive motor 329 drives the grinding roller 321 through a transmission belt and a driving pulley 323. The rotating shaft 328 and the grinding roller 321 rotate; a concave splash shield 326 is provided at the bottom of the mounting base, and the protective mask of the splash shield 326 is provided on the grinding surface of the grinding roller 321. An impurity port 327 is provided at the bottom of the splash shield 326. The impurities polished off by the grinding roller 321 are restrained by the splash shield 326 and gathered at the impurity port 327. A purification unit 700 is installed at the impurity port 327 to collect and process the impurities. Figure 4 and Figure 5 As shown, the grinding drive motor 329 drives the grinding roller 321 to rotate to grind the surface oxide layer of the charging contact 220. Under the action of the rotation inertia of the grinding roller 321, the peeled oxide layer particle powder will move along the tangential direction of the grinding roller 321. In order to avoid irregular diffusion of impurities, a splash shield 326 is set to constrain the path. The negative pressure generated at the impurity port 327 generates suction on the inner cavity of the splash shield 326, which adsorbs the impurities in the inner cavity for centralized treatment to avoid diffusion into the workshop environment of semiconductor production and processing, which affects the quality of the wafer.

[0063] See Figure 4 and Figure 6 As shown, at least one pair of adaptive components 325 are respectively arranged on both sides of the grinding roller 321, and the two ends of the rotating shaft 328 are respectively rotatably installed on the top of the adaptive component 325; preferably, the adaptive component 325 includes a fixed rod 3252 arranged perpendicular to the mounting base 324, the bottom of the fixed rod 3252 is fixedly connected through the fixed base 3251, and an active area cavity is axially opened at the top of the fixed rod 3252, a movable rod 3253 is slidably installed in the active cavity, and an adjustment spring is arranged between the bottom end of the movable rod 3253 and the bottom end of the active cavity; the end of the movable rod 3253 away from the fixed base 3251 is rotatably connected to the rotating shaft 328 through a connector 3254. Through this design, the grinding roller 321 can be operated in a floating manner. Because when the charging contacts 220 are installed in the early stage, there is no way to ensure that the distance between all the charging contacts 220 and the travel track 110 is consistent. Therefore, the grinding roller 321 needs to be able to adaptively identify the height of the charging contacts 200, which increases the versatility during the grinding operation. At the same time, it can also always maintain the contact pressure between the grinding roller 321 and the charging contacts 220 to avoid omissions caused by the inability to contact the operating point due to wear on the surface of the grinding roller 321.

[0064] The second aspect is Figure 7 and Figure 8As shown, the purification unit 700 includes an upper cavity 710 and a lower cavity 720, which are buckled together to form a box structure; an air inlet 711 is provided on one side of the upper cavity 710 facing the impurity port 327, and an air outlet 712 is provided on the other side, the air inlet 711 is connected to the impurity port 327, and the air outlet 712 is connected to the outside; an impeller 750 and a wind motor 722 for driving the impeller 750 to rotate are installed in the lower cavity 720; an isolation grid plate 740 is installed between the air inlet 711 and the air outlet 712 to isolate and adsorb impurities, and the isolation grid plate A magnetic adsorption plate 730 is installed on the upper layer of 740; by setting a purification unit at the impurity port 327, the wind motor 722 drives the impeller 750 to rotate to generate negative pressure, and the impurities generated during grinding at the working position are sucked into the inner cavity of the purification box by the negative pressure, reducing the diffusion of pollutants. At the same time, the magnetic adsorption plate 730 in the purification box can adsorb metal impurity pollution particles with larger diameters, and impurities that cannot be magnetically adsorbed will be isolated by the more dense isolation grid plate 740, and at the same time, the clean air after purification and filtration is discharged from the body through the air outlet 712 to complete the purification cycle. Preferably, the isolation grid plate 740 and the adsorption plate 730 are both plugged into the upper cavity 710; preferably, the isolation grid plate 740 and the adsorption plate 730 can be detachably installed in the upper cavity 710, and the inner wall of the upper cavity 710 is provided with a drawer-type slide that can pull the isolation grid plate 740 and the adsorption plate 730 out of the air outlet 712. The isolation grid plate 740 and the adsorption plate 730 can be drawn out from the cavity for cleaning, thereby increasing the cleaning ability and recyclability of the purification unit 700.

[0065] In a third aspect, the present invention further discloses a track power supply processing method for an AMHS control system, comprising the following steps:

[0066] S1: The AMHS system obtains the charging efficiency of the current charging station 200 based on the charging power of the automatic material handling vehicle;

[0067] S2: The AMHS system compares and analyzes the charging efficiency of the charging station 200 with the preset charging efficiency threshold;

[0068] S3: The AMHS system sends the coordinates of the charging station 200 with abnormal charging performance to the device body 300, and dispatches the device body 300 to the designated location to perform operations;

[0069] S4: The device arrives at the designated location for operation and uploads the operation record to the AMHS system for recording.

[0070] Preferably, the road priority of the device body 300 is lower than the priority of the automatic material handling vehicle in the AMHS system.

[0071] Similarly, the AMHS system can always obtain the position coordinates of the device body 300, and set a safe distance for the device body to avoid the automatic material handling vehicle in time. By controlling the equipment through the control method, the grinding device is managed online, and the operation is performed according to the planned path given by the AMHS system, which can minimize the number of automatic material handling vehicles on the travel path, reduce the travel time, and increase work efficiency.

[0072] Since the device needs to provide power support, although it carries its own power storage device 600, when the power of the power storage device 600 is lower than the threshold, it needs to be replenished; therefore, when the device body needs to be replenished, it is processed through the charging control unit 500 on the top of the device, and its working principle is: the electric push rod 510 pushes the top charging terminal 520 to rise and approach the charging contact 220 until the two are offset to establish an electrical connection relationship, and electricity is taken from the power grid and transmitted to the power storage device 600 for energy storage.

[0073] More specifically, since the device can communicate interactively with the AMHS system, the device mainly has two operating modes:

[0074] Form 1: Single-point operation mode

[0075] The AMHS system monitors the charging status of the automatic material handling vehicle controlled by the cluster. When the automatic material handling vehicle is charging at the charging contact point, the AMHS system detects the charging efficiency of the automatic material handling vehicle through the on-board controller. When the AMHS system detects that the charging efficiency is lower than the preset threshold, the AMHS system records the charging station at the coordinates and sends the coordinate position of the location to the device body through the communication unit 400. After the device body receives the AMHS dispatch instruction through the communication unit 400, it goes to the destination to perform operations. More specifically, the device body follows the operation route to the target point. The routes are uniformly planned by the AMHS system to avoid the device body affecting the normal operation of the automatic material handling vehicle on other routes; at the same time, since the road priority of the device is lower than the road priority of the automatic material handling vehicle, this means that when the passing sequence of the device body and the automatic material handling vehicle needs to be adjusted, the automatic material handling vehicle will be given priority to pass, minimizing the impact on the general operation function of the AMHS system; when the device body reaches the target point, the grinding drive motor 329 is started, and the drive belt drives the pulley 323 to drive the grinding roller 321 to rotate, and the rough surface of the grinding roller 321 is The charging contact 220 contacts the charging contact, and the oxide layer on the surface of the charging contact is stripped to form oxide particles and powder; since a flexible equation cover 900 is provided on the top of the device body, and its cross section is corrugated, it can well cover the working point to prevent the impurities stripped by grinding from diffusing. At the same time, a purification unit 700 is provided in the device, and the impurity port 327 is connected to the purification unit 700, that is, when the wind motor 722 drives the impeller 750 to rotate and generate negative pressure, the impurity particles at the working point can be extracted and adsorbed through the impurity port 722, so that the pollution can enter the air inlet 71 1 is used for filtering to reduce the diffusion of pollutants and the impact on the cleanliness of the semiconductor production and processing workshop; when these impurities and pollutants are sucked into the inner cavity, the larger metal impurity particles will be adsorbed by the magnetic adsorption plate 730, and the impurities that cannot be magnetically adsorbed will be isolated by the isolation grid plate 740, and then the filtered air will be discharged from the air outlet 712 to complete the polishing and purification of the working point, and the operation information will be uploaded to the AMHS system for marking and clearing abnormal data; since the adsorption plate 730 and the isolation grid plate 740 are detachable, they can be disassembled and cleaned for continued use after long-term use.

[0076] Form 2: Multi-point operation mode

[0077] When the AMHS system track system is undergoing unified maintenance, since all automatic material handling vehicles are offline for maintenance, the device body has the highest road priority when traveling; in this mode, the device body travels along all tracks and performs unified maintenance operations on all charging contacts 220 on the road section.

[0078] Those skilled in the art will appreciate that the various operations, methods, steps, measures, and schemes discussed in the present invention may be alternated, modified, combined, or deleted. Further, other steps, measures, and schemes in the various operations, methods, and schemes discussed in the present invention may also be alternated, modified, rearranged, decomposed, combined, or deleted. Further, the steps, measures, and schemes in the prior art that are similar to those disclosed in the present invention may also be alternated, modified, rearranged, decomposed, combined, or deleted.

[0079] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0080] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0081] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific conditions.

[0082] In the description of this specification, specific features, structures, materials or characteristics may be combined in an appropriate manner in any one or more embodiments or examples.

[0083] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A track power supply processing device based on an AMHS control system, comprising: A track system (100) comprising a travel track (110) arranged parallel to the ground and a track installation unit (120), wherein the travel track (110) is suspended below a factory ceiling via the track installation unit (120); A charging station (200) disposed above the travel track (110), the charging station (200) comprising a power supply line (210) connected to a power source, the other end of the power supply line (210) being connected to a charging contact (220); Features: It also includes a processing device body (300), the processing device body (300) including a vehicle body (310) and a grinding part (320), the vehicle body (310) being arranged on the travel track (110) and driving the grinding part (320) to move; The grinding part (320) is located in the inner cavity of the vehicle body (310), and the grinding part (320) is arranged perpendicular to the travel track (110), and the processing end of the grinding part (320) extends out of the top end of the vehicle body (310) and connects with the charging contact (220); A power storage device (600), the power storage device (600) being electrically connected to the vehicle body portion (310) and the polishing portion (320) for discharging and supplying power; a charging control unit (500), the charging control unit (500) being installed in the vehicle body (310), and the top of the charging control unit (500) being able to movably extend out of the top of the vehicle body (310); the charging control unit (500) comprising an electric push rod (510) fixed in the inner cavity and a charging terminal (520), the charging terminal (520) being located at the top of the movable end of the electric push rod (510), and being driven by the electric push rod (510) to approach the charging contact (220), and abutting against the charging contact (220) to establish an electrical connection to charge the power storage device (600); A communication unit (400), the communication unit (400) being installed in the inner cavity of the vehicle body (310), the communication unit (400) being communicatively connected with the AMHS system control center to establish a network channel for data transmission; A main control unit (900) is used to receive command information from the communication unit (400) and control the electrical equipment of the vehicle body unit (310) and the polishing unit (320).

2. The track power supply processing device based on the AMHS control system according to claim 1 is characterized in that: The grinding part (320) comprises a mounting base (324) and a grinding drive motor (329); the mounting base (324) can be detachably mounted on the bottom end of the inner cavity of the vehicle body (310); a grinding roller (321) is rotatably mounted on the mounting base (324) via a rotating shaft (328); the top of the grinding roller (321) extends out of the top end of the vehicle body (310); a driving pulley (323) is mounted on one side of the rotating shaft (328); the grinding drive motor (329) drives the rotating shaft (328) via a transmission belt and the driving pulley (323). The shaft (328) and the grinding roller (321) rotate; a concave splash shield (326) is provided at the bottom of the mounting base (324); a protective face shield of the splash shield (326) is provided on the grinding surface of the grinding roller (321); an impurity opening (327) is provided at the bottom of the splash shield (326); impurities ground off by the grinding roller (321) during rotation are restrained by the splash shield (326) and gathered at the impurity opening (327); a purification unit (700) is installed at the impurity opening (327) to collect and process the impurities.

3. The track power supply processing device based on the AMHS control system according to claim 2 is characterized in that: The grinding portion (320) further comprises an adaptive component (325) for adjusting the height of the grinding roller (321), wherein at least one pair of the adaptive components (325) are respectively arranged on both sides of the grinding roller (321), and both ends of the rotating shaft (328) are respectively rotatably mounted on the top ends of the adaptive components (325).

4. The track power supply processing device based on the AMHS control system according to claim 3 is characterized in that: The adaptive component (325) comprises a fixed rod (3252) arranged perpendicular to the mounting base (324); the bottom of the fixed rod (3252) is fixedly connected via the fixed base (3251); an active area cavity is axially provided at the top of the fixed rod (3252); a movable rod (3253) is slidably installed in the active cavity; an adjustment spring is arranged between the bottom end of the movable rod (3253) and the bottom end of the active cavity; and one end of the movable rod (3253) away from the fixed base (3251) is rotatably connected to the rotating shaft (328) via a connector (3254).

5. The track power supply processing device based on the AMHS control system according to claim 1 is characterized in that: A flexible dust cover (800) is provided on the top of the vehicle body (310), and the cross section of the dust cover (800) is a corrugated structure.

6. The track power supply processing device based on the AMHS control system according to claim 2 is characterized in that: The purification unit (700) comprises an upper cavity (710) and a lower cavity (720), wherein the upper cavity (710) and the lower cavity (720) are buckled together to form a box structure; an air inlet (711) is provided on one side of the upper cavity (710) facing the impurity port (327), and an air outlet (712) is provided on the other side; the air inlet (711) is connected to the impurity port (327), and the air outlet (712) is connected to the outside; an impeller (750) and a wind motor (722) for driving the impeller (750) to rotate are installed in the lower cavity (720); and an isolation grid plate (740) is installed between the air inlet (711) and the air outlet (712) to isolate and adsorb impurities.

7. The track power supply processing device based on the AMHS control system according to claim 6 is characterized in that: A magnetic adsorption plate (730) is installed on the upper layer of the isolation grid plate (740).

8. The track power supply processing device based on the AMHS control system according to claim 7 is characterized in that: The isolation grid plate (740) and the adsorption plate (730) are both plugged into the upper cavity (710).

9. The track power supply processing device based on the AMHS control system according to claim 8, characterized in that: The isolation grid plate (740) and the adsorption plate (730) can be detachably installed in the upper cavity (710), and the inner wall of the upper cavity (710) is provided with a drawer-type slide groove capable of pulling the isolation grid plate (740) and the adsorption plate (730) out from the air outlet (712).

10. A track power supply processing method for an AMHS control system, based on the track power supply processing device for an AMHS control system according to claim 1, characterized in that: The steps include: S1: The AMHS system obtains the charging efficiency of the current charging station (200) based on the charging efficiency of the automatic material handling vehicle; S2: The AMHS system compares and analyzes the charging efficiency of the charging station (200) with a preset charging efficiency threshold, and marks it as abnormal if the threshold is less than the preset value; S3: The AMHS system sends the coordinates of the charging site (200) with abnormal charging performance to the device body (300) and sets a travel route for the processing device body (300), and dispatches the processing device body (300) to a designated location to perform operations; S4: the processing device body (300) arrives at the designated location to perform operations, and uploads the operation records to the AMHS system for recording; The road priority of the processing device body (300) is lower than the priority of the automatic material transport vehicle in the AMHS system, and the AMHS system can always obtain the position coordinates of the processing device body (300) and set a safe distance for the processing device body (300) to avoid the automatic material transport vehicle.

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