System and method for detecting performance of electromagnetic element, and storage medium

Abstract

The invention discloses a system and method for detecting the performance of an electromagnetic element and a storage medium, and relates to the technical field of electron optics, and the system comprises a first support arm, a second support arm, a cylindricity instrument probe, a gauss meter probe and a processing unit. The first support arm and the second support arm are connected with each other and form a specific angle; the cylindricity instrument probe is arranged below the first support arm and is used for acquiring coordinate data of different positions on the surface of the electromagnetic element; the gauss meter probe is arranged below the second support arm and is used for acquiring magnetic field data of the electromagnetic element; and the processing unit is connected to the cylindricity instrument probe and the gauss meter probe and is used for receiving the coordinate data and the magnetic field data and detecting the performance of the electromagnetic element according to the coordinate data and the magnetic field data. Through the system, the performance of the electromagnetic element can be accurately and comprehensively measured and evaluated.

Description

Technical Field

[0001] The present invention relates generally to the field of electronic optics technology and more specifically to a system, method and storage medium for detecting the performance of an electromagnetic component. Background Art

[0002] Electromagnetic optical devices composed of electromagnetic coils and magnetic materials, such as magnetic lenses, magnetic deflectors, and magnetic stigmators, often play a vital role in electronic optical systems. The performance of these electromagnetic components is closely related to their application effects in electronic optical systems. The performance evaluation of electromagnetic components mainly focuses on whether the distribution of the magnetic field they generate in space conforms to specific geometric properties.

[0003] At present, the method used for electromagnetic component performance testing is usually to use different measuring devices to measure the mechanical accuracy and magnetic field respectively and analyze the measured data separately. However, there is no unified measurement system for this method. This makes it impossible to effectively connect the mechanical dimension data and magnetic field data of the electromagnetic component. It may happen that the mechanical dimension measurement results are good but the magnetic field characteristics do not meet the requirements, or the magnetic field measurement results are normal but there are problems with the mechanical assembly accuracy. That is, the above measurement and evaluation methods have certain limitations and cannot accurately and comprehensively measure the mechanical accuracy of the electromagnetic component assembly process and the axial symmetry of the magnetic field.

[0004] In view of this, there is an urgent need to provide a system, method and storage medium for detecting the performance of electromagnetic devices, so as to accurately and comprehensively measure and evaluate the performance of electromagnetic components. Summary of the invention

[0005] In order to at least solve one or more of the technical problems mentioned above, the present application proposes a system, method and storage medium for detecting the performance of an electromagnetic component in multiple aspects.

[0006] In a first aspect, the present application provides a system for detecting the performance of an electromagnetic component, comprising: a first arm, a second arm, a cylindricity meter probe, a Gaussmeter probe, and a processing unit; the first arm and the second arm are interconnected and at a specific angle; the cylindricity meter probe is arranged below the first arm, for obtaining coordinate data of different positions on the surface of the electromagnetic component; the Gaussmeter probe is arranged below the second arm, for obtaining magnetic field data of the electromagnetic component; the processing unit is connected to the cylindricity meter probe and the Gaussmeter probe, for receiving the coordinate data and the magnetic field data, and detecting the performance of the electromagnetic component based on the coordinate data and the magnetic field data.

[0007] In some embodiments, it also includes: a main platform, an air floating platform, and a measuring arm; the air floating platform is arranged on the main platform to carry the electromagnetic element; the measuring arm is vertically arranged on the main platform, and is connected to the first support arm and the second support arm, and is used to switch the cylindricity meter probe and the Gaussmeter probe.

[0008] In some embodiments, it is characterized in that it also includes: a limit device and a locking device; the limit device and the locking device are arranged inside the measuring arm, wherein the limit device is used to control the measuring range of the cylindricity meter probe and the gaussmeter probe, and the locking device is used to prevent the cylindricity meter probe and the gaussmeter probe from offset.

[0009] In some embodiments, it further includes: a main shaft; the main shaft is arranged inside the air floating platform, and is used to drive the electromagnetic element to rotate.

[0010] In some embodiments, it further includes: a current source unit; the current source unit is connected to the processing unit and is used to provide current excitation for the electromagnetic element.

[0011] In some embodiments, acquiring the coordinate data of different positions on the surface of the electromagnetic element includes: the cylindricity meter probe contacts the surface of the electromagnetic element, and when the electromagnetic element rotates, the cylindricity meter probe moves on the surface of the electromagnetic element to measure the coordinate data at different positions.

[0012] In some embodiments, acquiring the magnetic field data of the electromagnetic element includes: the Gauss meter probe senses a magnetic field when the electromagnetic element is powered on, so as to measure the magnetic field data of the electromagnetic element.

[0013] In some embodiments, detecting the performance of the electromagnetic element based on the coordinate data and the magnetic field data includes: determining shape and position error data of the electromagnetic element based on the coordinate data; and detecting the performance of the electromagnetic element based on the shape and position error data and the magnetic field data.

[0014] In a second aspect, the present application also provides a method for detecting the performance of an electromagnetic component, comprising: obtaining coordinate data of different positions on the surface of the electromagnetic component measured by a cylindricity meter probe; switching the cylindricity meter probe to a Gaussmeter probe; obtaining magnetic field data of the electromagnetic component measured by the Gaussmeter probe; and detecting the performance of the electromagnetic component based on the coordinate data and the magnetic field data.

[0015] In some embodiments, detecting the performance of the electromagnetic element according to the coordinate data and the magnetic field data includes: According to the coordinate data, the shape and position error data of the electromagnetic element are determined; according to the magnetic field data, the magnetic field strength distribution state of the electromagnetic element is determined; according to the shape and position error data and the magnetic field strength distribution state, the mechanical accuracy and magnetic field performance of the electromagnetic element are evaluated.

[0016] In some embodiments, before detecting the performance of the electromagnetic element according to the coordinate data and the magnetic field data, the method further includes: controlling a current source unit to provide current excitation to the electromagnetic element.

[0017] In some embodiments, the magnetic field data includes at least: the distribution of the magnetic field in the axisymmetric space, the axial distribution of the magnetic field on the main axis, the relationship between the magnetic field strength and the current excitation, and the linearity.

[0018] In a third aspect, the present application further provides a computer-readable storage medium storing computer program instructions for detecting performance of an electromagnetic element. When the computer program instructions are executed by a processor, any of the methods described above is implemented.

[0019] Through the system, method and storage medium for detecting the performance of electromagnetic components provided above, the embodiment of the present application first provides a system for detecting the performance of electromagnetic components, and uses the first arm and the second arm to connect the cylindrical meter probe and the Gauss meter probe together, so that during the measurement process, it is possible to quickly switch between mechanical dimension measurement and magnetic field measurement, thereby improving the measurement efficiency. Further, in some embodiments, the embodiment of the present application also provides a method for detecting the performance of electromagnetic components, first obtaining the coordinate data measured by the cylindrical meter probe, switching the cylindrical meter probe to the Gauss meter probe, and then obtaining the magnetic field data measured by the Gauss meter probe. Then, based on the above two data, a comprehensive analysis of the performance of the electromagnetic component is performed, thereby achieving the purpose of detecting the performance of the electromagnetic component. The method can be implemented based on the above system. Through the above method, the measurement of the shape and position error data and the magnetic field data can be combined for comprehensive analysis, which is convenient for studying the relationship between the magnetic field properties of the electromagnetic component and the mechanical structure parameters, and can achieve accurate and comprehensive measurement and evaluation of the performance of the electromagnetic component. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] By reading the detailed description below with reference to the accompanying drawings, the above and other purposes, features and advantages of the exemplary embodiments of the present application will become easy to understand. In the accompanying drawings, several embodiments of the present application are shown in an exemplary and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein: Figure 1 A schematic diagram showing the structure of a system for detecting the performance of an electromagnetic component according to an embodiment of the present application is shown; Exemplary application scenarios of the embodiments; Figure 2 A partial schematic diagram of a system shape and position measurement mode for detecting the performance of an electromagnetic component according to an embodiment of the present application is shown; Figure 3 A partial schematic diagram of a system magnetic measurement mode for detecting the performance of an electromagnetic element according to an embodiment of the present application is shown; Figure 4 A block diagram of a system for detecting the performance of an electromagnetic component according to an embodiment of the present application is shown; Figure 5 An exemplary flow chart of a method 50 for detecting the performance of an electromagnetic component according to some embodiments of the present application is shown; Figure 6 An exemplary flow chart showing a method 60 for detecting the performance of an electromagnetic component according to some other embodiments of the present application; Figure 7 A schematic diagram showing an exemplary application scenario of the electromagnetic lens according to an embodiment of the present application is shown; Figure 8 A schematic diagram showing the distribution relationship of the magnetic field on the electromagnetic lens axis along the Z axis in an embodiment of the present application is shown; Fig. 9 A schematic diagram showing the relationship between the off-axis magnetic field and the rotation angle of the electromagnetic lens in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0022] It should be understood that the terms "include" and "comprising" used in the specification and claims of the present application indicate the presence of described features, wholes, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or collections thereof.

[0023] It should also be understood that the terms used in this application specification are only for the purpose of describing specific embodiments and are not intended to limit the present application. As used in this application specification and claims, unless the context clearly indicates otherwise, the singular forms of "a", "an" and "the" are intended to include plural forms. It should also be further understood that the term "and / or" used in this application specification and claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes these combinations.

[0024] As used in this specification and claims, the term "if" can be interpreted as "when" or "upon" or "in response to determining" or "in response to detecting," depending on the context. Similarly, the phrases "if it is determined" or "if [described condition or event] is detected" can be interpreted as meaning "upon determination" or "in response to determining" or "upon detection of [described condition or event]" or "in response to detecting [described condition or event]," depending on the context.

[0025] The specific implementation of the present application is described in detail below with reference to the accompanying drawings.

[0026] Combination Figure 1 , to introduce the system of the present application for detecting the performance of electromagnetic components (hereinafter referred to as the system). The system includes a first arm 1, a second arm 2, a cylindricity meter probe 3, a gaussmeter probe 4 and a processing unit. In some embodiments, the first arm 1 and the second arm 2 are connected to each other and face different directions at specific angles. The cylindricity meter probe 3 is arranged under the first arm 1, and is used to obtain coordinate data of different positions on the surface of the electromagnetic component. The gaussmeter probe 4 is arranged under the second arm 2, and is used to obtain magnetic field data of the electromagnetic component. The processing unit is connected to the cylindricity meter probe 3 and the gaussmeter probe 4 at the same time, and is used to receive coordinate data and magnetic field strength, and detect and analyze the performance of the electromagnetic component based on the coordinate data and magnetic field strength.

[0027] In a feasible embodiment, the specific angle between the first arm 1 and the second arm 2 can be set according to the size of the cylindricity meter probe 3 and the gaussmeter probe 4, such as 90° or 120°. At a specific angle, the cylindricity meter probe 3 and the gaussmeter probe 4 do not affect each other's measurement function. As a feasible implementation method, the first arm 1 and the second arm 2 can be two secondary branches of a Y-shaped connector. The two secondary branches are connected to each other on the main trunk of the Y-shaped connector, and the main trunk is connected to the measuring arm 7, thereby fixing the cylindricity meter probe 3 and the gaussmeter probe 4 on the measuring arm.

[0028] Furthermore, in the system, the cylindricity meter and the Gauss meter system are integrated into the same measuring device. The cylindricity meter is used to measure the shape and position error data such as roundness, cylindricity, and coaxiality of the electromagnetic component. The cylindricity meter probe 3 is arranged below the first arm 1, and has a certain inclination angle. In the process of obtaining the coordinate data of different positions on the surface of the electromagnetic component, the cylindricity meter probe 3 needs to contact the surface of the electromagnetic component. The electromagnetic component placed on the air floating platform 6 is driven by the main shaft to rotate, and the cylindricity meter probe 3 measures the coordinate data of different positions on the surface of the electromagnetic component from multiple tangential positions and different radial positions. In some scenarios, the contact surface of the cylindricity meter probe 3 may be a special position such as the inner wall of the electromagnetic component. The cylindricity meter probe 3 is tilted below the first arm, which makes it easier to contact the surface of the electromagnetic component and makes the contact more stable. In the case where the geometric shape of some electromagnetic components is not completely ideal, or the surface of the electromagnetic component is irregular, the tilted cylindricity meter probe 3 can also effectively reduce the measurement deviation, thereby obtaining more reliable measurement data. In addition, in order to ensure the accuracy of the measurement results, the cylindricity meter probe 3 can use a high-precision measurement method such as taking an average value of multiple measurements to measure the electromagnetic component.

[0029] The gaussmeter is used to measure the magnetic field strength of the electromagnetic element. The gaussmeter probe 4 contains a Hall element. Based on the Hall effect principle, the magnetic field strength of the electromagnetic element is determined by measuring the effect of the magnetic field on the Hall element. The gaussmeter probe 4 is vertically arranged below the second arm 2. When measuring the magnetic field strength, it is necessary to switch from the first arm 1 to the second arm 2 through the measuring arm 7. After switching, the gaussmeter probe 4 will be directly above the electromagnetic element. When the electromagnetic element is excited by current to generate a magnetic field, the gaussmeter probe 4 can sense the magnetic field and generate a Hall voltage (i.e., an induced voltage). After the Hall voltage is processed by a signal processing circuit, the magnetic field strength can be calculated.

[0030] Reference Figure 4It should be noted that in order to provide complete measurement functions of the cylindricity meter and the Gaussmeter, the system also includes components such as a high-precision spindle, an angle position encoder, a Gaussmeter signal processing module and a control circuit, and a cylindricity meter signal processing module and a control circuit. Among them, the high-precision spindle is arranged inside the air-floating platform for carrying the electromagnetic element, and is used to provide high-precision rotational motion. The electromagnetic element is installed on the high-precision spindle and can rotate with it; the angle position encoder is used to accurately measure the rotation angle of the spindle so as to determine the position of the cylindricity meter probe on the surface of the object being measured; the Gaussmeter signal processing module is used to amplify, filter, digitize and process the induced voltage to calculate the magnetic field strength; the cylindricity meter signal processing module can determine the coordinate data of the force of the cylindricity meter probe. In a feasible embodiment, the system can also include a display device and a software interactive interface. The display device can not only be used to display the measured magnetic field strength, but also to display the software interactive interface. The user can control each hardware in the system through the software interactive interface and receive hardware measurement data for analysis.

[0031] Furthermore, the processing unit in the system is mainly responsible for the operation of each sub-module in the system. Figure 4 ,exist Figure 4 In the system framework diagram shown, the processing unit can perform multiple tasks such as high-precision current output control, spindle motor and angle position encoder control, signal processing and circuit control, user interaction, etc. At the same time, the processing unit is also responsible for receiving the coordinate data and magnetic field data measured by the cylindrical meter probe and the Gauss meter probe respectively, and then combining these two data to perform a comprehensive analysis of the performance of the electromagnetic component. In a feasible embodiment, the processing unit can be a control host, and the host-type processing unit can be set in such as Figure 1 In the cabinet 8 shown. The connection method between it and the cylindrical meter probe 3 and the Gauss meter probe 4 can be a wired connection or a wireless connection based on a data communication protocol. Optionally, taking the wired connection method as an example, in a short-distance data transmission scenario, RS-232 / RS-485 serial port or CAN bus connection can be used. In a long-distance data transmission scenario, a wired transmission medium such as optical fiber can be used for connection. The wireless connection method can be WiFi, low-power wide area network, etc. In practical applications, it can be flexibly selected in combination with transmission distance and environmental factors. After establishing the connection, the processing unit can receive coordinate data and magnetic field data. When analyzing the performance of the electromagnetic component, the processing unit fits the cylindrical surface model of the electromagnetic component according to the coordinate data, and calculates the shape and position error parameters such as roundness, cylindricity, and coaxiality. Then, a specific algorithm model is used to evaluate the mechanical accuracy and magnetic field performance of the electromagnetic component in combination with the shape and position error data and the magnetic field strength.

[0032] Continue to refer to Figure 1, the system for detecting the performance of electromagnetic components in the present application also includes: a main platform 5, an air-floating platform 6, and a measuring arm 7. The air-floating platform 6 is arranged on the main platform 5 and is used to carry the electromagnetic components. The measuring arm 7 is vertically arranged on the main platform 5, which is connected to the first arm 1 and the second arm 2, and is used to switch the cylindrical instrument probe 3 and the Gauss meter probe 4. In some embodiments, the main platform 5 is a reference platform of the measuring device, which has a high flatness and is used to ensure the stability during the measurement process and the accurate placement of the electromagnetic components. An air-floating platform 6 is also arranged on the main platform 5. The air-floating platform 6 is a device that uses the principle of air flotation to achieve precision measurement. When carrying the electromagnetic components, the electromagnetic workpiece can float on the platform by releasing gas. In this system, the cylindrical instrument probe 3 and the Gauss meter probe 4 share the same air-floating platform 6 for measurement. When measuring the coordinate data of different positions on the surface of the electromagnetic component, the electromagnetic component will be installed on the high-precision spindle (not shown in the figure) of the air-floating platform 6. The high-precision spindle drives the electromagnetic element to rotate together, and the cylindrical meter probe 3 moves on the surface of the electromagnetic element to measure the coordinate data of different positions. Similarly, when using a Gaussmeter to measure the magnetic field strength of the electromagnetic element, the cylindrical meter probe is switched to the Gaussmeter probe 4 before the measurement can be started. During the overall measurement process, the air floating platform 6 can provide stable support and high-precision motion guidance for the electromagnetic element. At the same time, it can also reduce the impact of friction and vibration on the measurement results.

[0033] Furthermore, on the main platform 5, a measuring arm 7 is vertically arranged on one side of the air-floating platform 6. The measuring arm 7 is a mechanical arm with a precise rotating or sliding mechanism, which is responsible for controlling the cylindrical meter probe 3 and the Gauss meter probe 4 to be accurately placed at different measuring positions. Figure 1 As shown, there is a support rod on the measuring arm 7, which is connected to the trunk of the Y-shaped connector. The trunk is connected to the first arm 1 and the second arm 2 of the Y-shaped connector. The first arm 1 and the second arm 2 are connected to the measuring arm 7 based on the above connection relationship, and the measuring arm 7 can thus realize the switching of the cylindricity meter probe 3 and the gauss meter probe 4. In a feasible embodiment, the first arm 1 and the second arm 2 can be connected to the trunk of the Y-shaped connector through a rotating bearing, and the first arm 1 and the second arm 2 can rotate clockwise or counterclockwise with the rotating bearing as the center, thereby driving the switching of the cylindricity meter probe 3 and the gauss meter probe 4. The above switching process can be controlled by the processing unit, that is, the processing unit can drive the measuring arm 7 to drive the first arm 1 and the second arm 2 to rotate according to the requirements of different measurement modes through the electric actuator or servo motor inside the measuring arm 7 to complete the switching of the cylindricity meter probe 3 and the gauss meter probe 4.

[0034] For example, refer to Figure 2 , Figure 2This is a partial view of the shape and position measurement mode. If the system is currently in the shape and position measurement mode, the measuring arm responds to the control signal output by the processing unit and adjusts the first arm so that the cylindrical meter probe 3 is in the proper measurement position. After the shape and position error data measurement is completed, it enters the magnetic measurement mode and continues to refer to Figure 3 , Figure 3 Partial view of the magnetic measurement mode. The measuring arm responds to the control signal output by the processing unit again, and rotates the first arm and the second arm counterclockwise, thereby switching the Gaussmeter probe 4 to the measuring position. Optionally, the switching of the cylindricity meter probe 3 and the Gaussmeter probe 4 can also be achieved by manual plugging or rotation. In the above embodiment, by connecting the first arm 1 and the second arm 2 to the measuring arm 7, the cylindricity meter probe 3 and the Gaussmeter probe 4 share a set of air floating platform 6, high-precision spindle and angle position encoder, which can achieve rapid switching between mechanical dimension measurement and magnetic field measurement of electromagnetic components during the measurement process, thereby improving the measurement efficiency.

[0035] Next, the system for detecting the performance of electromagnetic components in the present application also includes: a limit device and a locking device, both of which are arranged inside the measuring arm. In other embodiments, the limit device is used to control the range of motion of the cylindricity meter probe and the Gauss meter probe to ensure that they do not exceed the predetermined range of motion. The locking device is used to ensure that the Gauss meter probe or the cylindricity meter probe does not deviate due to external interference or its own gravity when it is in a fixed position. Optionally, the limit device can be a mechanical limit device such as a physical baffle, a slide rail or a stop device. In addition, it can also be composed of a sensor and an electronic control system to monitor the position of the probe and the probe in real time and stop automatically when the limit is reached. The locking device can be implemented by a pneumatic, hydraulic or electrical control system. It can be understood that by arranging the limit device and the locking device inside the measuring arm, the stability and accuracy during the measurement process can be ensured, and unnecessary displacement or error during the measurement process can be avoided.

[0036] Furthermore, the system for detecting the performance of the electromagnetic element in the present application also includes: a current source unit, which is connected to the processing unit and is used to provide current excitation for the electromagnetic element. In some embodiments, the current source unit is also a set of high-precision current systems, which can achieve precise regulation of the current through a high-precision digital-to-analog converter, and maintain a stable output of the current for the electromagnetic element. When providing current excitation for the electromagnetic element, the current source unit can provide a constant current excitation, or it can gradually increase or decrease the current excitation for the electromagnetic element at a specific rate. Figure 1 The current source unit can be arranged in the cabinet 8 together with the processing unit, the Gauss meter signal processing circuit, the probe force sensor circuit module, etc.

[0037] The electromagnetic element will generate a magnetic field when it is excited by the current output by the current source unit, and the Gauss meter probe can measure the magnetic field data of the electromagnetic element. In the magnetic field measurement mode, the current source unit connected to the processing unit can exchange data with the angle position encoder and signal processing circuit in the system through the processing unit. In addition, the current source unit can also communicate with the angle position encoder of the measuring device through the processing unit to ensure that the magnetic field measurement and current excitation can be carried out synchronously. For example, when the angle position encoder detects that the spindle rotates to a specific angle, the current source unit outputs the corresponding current intensity to perform multi-mode magnetic field measurement. In addition, the current source unit can also output different current intensities according to a pre-written program, thereby exciting the electromagnetic element to generate different magnetic field intensities. In this way, the system can study the relationship and linearity between the magnetic field intensity and current excitation of the electromagnetic element based on the output current intensity and the measured magnetic field data.

[0038] It can be understood that, based on the above-mentioned system for detecting the performance of electromagnetic components, it is possible to comprehensively and accurately evaluate the mechanical precision and magnetic field performance of the electromagnetic components.

[0039] Reference Figure 5 , to introduce the method 50 for detecting the performance of an electromagnetic component of the present application. It can be understood that the method can be implemented based on the system described above. Therefore, the description of each component in the system in the above text can also be applied to the following. Figure 5 As shown: In step S501, the coordinate data of different positions on the surface of the electromagnetic component measured by the cylindricity meter probe are obtained. In some embodiments, the electromagnetic component is mounted on the high-precision spindle of the air-floating platform. When the measurement program is started, the electromagnetic component rotates with the spindle. The angular position encoder in the system records the rotation angle of the spindle in real time to determine the position of the cylindricity meter probe on the surface of the object being measured. The cylindricity meter probe moves on the surface of the electromagnetic component according to the parameters set by the program. Its own force sensor converts the position of its contact point into an electrical signal. After the electrical signal is processed by the signal processing circuit, the coordinate data (X, Y, Z coordinates) of different positions on the surface of different electromagnetic components can be obtained. Among them, different positions on the electromagnetic surface can be understood as several different measurement points on the surface of the electromagnetic component. The measured coordinate data will be transmitted to the processing unit of the system. After the processing unit obtains the coordinate data, it can obtain the shape and position error data such as roundness, cylindricity, coaxiality, etc. of the area of ​​interest for electromagnetic component measurement through calculation and processing.

[0040] It should be noted that before measurement, some mechanical components in the system need to be mechanically calibrated to ensure the position accuracy of the cylindricity meter probe and the Gaussmeter probe during the measurement process. During the calibration process, standard parts can be placed on the air-floating platform for comparative measurement to verify the accuracy and stability of the system. Standard parts can be understood as components whose dimensions and physical characteristics have been accurately measured and calibrated, and their mechanical dimensions, magnetic field strength and other data are known. If the data measured by the system is the same as the known standard data, it can be proved that the positions of the mechanical components in the system are accurate. Otherwise, calibration is required, that is, by adjusting the air-floating platform, high-precision master and other components, the cylindricity meter probe and the Gaussmeter probe can be accurately aligned with the measurement area of ​​the electromagnetic component.

[0041] Next, in step S502, the cylindricity meter probe is switched to a Gaussmeter probe. In some embodiments, the cylindricity meter probe and the Gaussmeter probe are respectively fixed under the first arm and the second arm, and are connected to the same measuring arm through the first arm and the second arm. In addition, the Gaussmeter probe and the cylindricity meter probe also share a set of air floating platform, high-precision spindle and angle position encoder. After the coordinate data measurement is completed, the magnetic field data of the electromagnetic component needs to be measured. At this time, the cylindricity meter probe needs to be switched so that the Gaussmeter probe is in the measuring position to measure the magnetic field data of the electromagnetic component.

[0042] In a feasible implementation, the switching from the cylindricity meter probe to the Gaussmeter probe can be achieved by the processing unit outputting a control signal to the electric actuator or servo motor of the measuring arm to drive the measuring arm. That is, the processing unit outputs a control signal, the electric actuator or servo motor of the mechanical arm responds to the control signal, the first arm is switched to the second arm, and the Gaussmeter probe is switched to the measuring position. It can be understood that in another embodiment, the measurement order of the coordinate data and the magnetic field data may be opposite, that is, the magnetic field data is measured first and then the coordinate data is measured. At this time, the switching action to be performed should be to switch the Gaussmeter probe to the cylindricity meter probe. During the switching process, the first arm and the second arm can be rotated clockwise or counterclockwise with the common connection as the center.

[0043] Optionally, after switching, the position of the Gaussmeter probe can be fine-tuned according to the measurement requirements of the magnetic field data to place it in the correct measurement position. For example, if it is currently necessary to measure the distribution of the magnetic field of the electromagnetic element along the main axis, it is necessary to fine-tune the position of the Gaussmeter probe so that its center coincides with the main axis of the electromagnetic element; if it is currently necessary to measure the distribution of the magnetic field of the electromagnetic element in the axisymmetric space, it is necessary to fine-tune the position of the Gaussmeter probe so that its center is staggered with the main axis of the electromagnetic element; if it is currently necessary to measure the relationship and linearity between the magnetic field strength and current excitation of the electromagnetic element, it is necessary to adjust the measurement position of the Gaussmeter probe so that it is in the area with the strongest magnetic field on the main axis of the electromagnetic element.

[0044] In the above embodiment, rapid switching between mechanical dimension measurement and magnetic field measurement can be achieved, thereby improving measurement efficiency.

[0045] Further, at step S503, the magnetic field data of the electromagnetic element measured by the Gaussmeter probe is obtained. In some embodiments, the switched Gaussmeter probe will measure the magnetic field data of the electromagnetic element. In this process, the angle position encoder works with the current source unit and the Gaussmeter to ensure the accuracy and synchronization of the magnetic field measurement at different angles. The current source unit provides current excitation to the electromagnetic element, so that the electromagnetic element generates a magnetic field. The Gaussmeter probe senses the magnetic field to generate a Hall voltage, and the Gaussmeter signal processing circuit processes the Hall voltage to calculate the magnetic field strength (i.e., the magnetic field data).

[0046] When acquiring the magnetic field data, the processing unit can record the magnetic field data measured by the Gaussmeter probe at a specific time interval, a specific distance interval, or a specific rotation angle interval. For example, when measuring the distribution of the magnetic field of the electromagnetic element along the axis of the main shaft, the measuring arm will drive the Gaussmeter probe to move along the axis, and the processing unit can record the magnetic field data once based on a specific distance interval (such as every 0.2mm). When measuring the distribution of the magnetic field of the electromagnetic element in the axisymmetric space, the electromagnetic element will rotate around the main axis, and the processing unit can record the magnetic field data once according to the specific rotation angle interval of the electromagnetic element (such as every 0.5 degrees). Alternatively, when measuring the relationship and linearity between the magnetic field strength and current excitation of the electromagnetic element, the current source unit will gradually increase the current excitation to the electromagnetic element at a specific rate, and the processing unit can record the magnetic field data measured by the Gaussmeter probe once at a specific time interval (such as the time interval between two measurements> 0.5s) until the magnetic field size almost no longer changes with the change of the current.

[0047] Furthermore, at step S504, the performance of the electromagnetic component is detected based on the coordinate data and the magnetic field data. In some embodiments, the coordinate data can be calculated to obtain the form and position error data. After the magnetic field data is measured, the form and position error data such as roundness, cylindricity, and coaxiality are combined to comprehensively analyze the performance of the electromagnetic component from the level of mechanical dimensions and even magnetic field performance. Exemplarily, by comparing the measured form and position error data with the standard value, it can be judged whether the assembly accuracy of the electromagnetic component meets the requirements; by analyzing the axial symmetry of the magnetic field, the distribution along the axis, and the relationship with the current excitation, it is evaluated whether the magnetic field generated by the electromagnetic component meets the design requirements. In a feasible embodiment, a specific algorithm and model can be used to evaluate the mechanical accuracy and magnetic field performance of the electromagnetic component. The results of the analysis can generate a detailed statistical analysis report, which will provide an objective and accurate basis for the evaluation of the mechanical dimensions and even the magnetic field performance of the electromagnetic component.

[0048] In the above embodiment, the measurement of the shape and position error data and the magnetic field data are combined for comprehensive analysis, which facilitates the study of the relationship between the magnetic field properties of the electromagnetic element and the mechanical structure parameters, and can achieve accurate and comprehensive measurement and evaluation of the performance of the electromagnetic element.

[0049] Figure 6 An exemplary flow chart of a method 60 for detecting the performance of an electromagnetic component according to another embodiment of the present application is shown. It can be understood that method 60 is a specific implementation of the aforementioned step S504, so the features described above can be similarly applied here. At step S601, the shape and position error data of the electromagnetic component are determined based on the coordinate data. In some embodiments, the coordinate data of different positions on the surface of the electromagnetic component can be used to fit the cylindrical surface model of the electromagnetic component using mathematical algorithms such as the least squares method. After fitting the cylindrical surface, shape and position error data such as roundness, cylindricity, and coaxiality can be calculated. Among them, roundness is used to measure the geometric error of the circularity of the electromagnetic component; cylindricity is used to measure the overall shape deviation of the electromagnetic component; and coaxiality reflects the assembly relationship between the shaft and the hole, or multiple shafts, and can be used to analyze the symmetry of the electromagnetic component. By calculating these shape and position error data, it is convenient to evaluate the mechanical accuracy of the electromagnetic component in the future.

[0050] Subsequently, at step S602, the magnetic field intensity distribution state of the electromagnetic element is determined according to the magnetic field data. In some embodiments, the magnetic field data measured by the Gaussmeter probe may include at least three types: the distribution of the magnetic field in the axisymmetric space, the distribution of the magnetic field along the axis of the main shaft, and the relationship and linearity between the magnetic field intensity and the current excitation. Through these three types of data, the magnetic field intensity distribution state of the electromagnetic element can be further determined, wherein the distribution of the magnetic field in the axisymmetric space mainly reflects the symmetry and spatial distribution characteristics of the magnetic field of the electromagnetic element. The distribution of the magnetic field along the axis of the main shaft mainly reveals the changes in the magnetic field in the axial direction, reflecting the uniformity and stability of the magnetic field of the electromagnetic element. The relationship and linearity between the magnetic field intensity and the current excitation reflect the relationship between the current and the magnetic field intensity, which can be used to evaluate whether the electromagnetic element can operate stably.

[0051] In a feasible implementation, the magnetic field intensity distribution state can be generated into a visual chart. Figure 8 and Fig. 9 , Figure 8 The magnetic field strength of the magnetic field on the main axis of the electromagnetic lens (an electromagnetic element) along the Z axis is shown. Fig. 9 The relationship between the off-axis magnetic field of the electromagnetic lens and the rotation angle is shown. By generating the above-mentioned visualization chart, the magnetic field intensity distribution state of the electromagnetic element can be presented more clearly, which is more conducive to subsequent analysis and comparison.

[0052] Finally, at step S603, the mechanical accuracy and magnetic field performance of the electromagnetic component are evaluated based on the shape and position error data and the magnetic field strength distribution state. In some embodiments, the error in the mechanical accuracy of the electromagnetic component may affect the geometric shape of the electromagnetic component, and then affect the uniformity and strength of the magnetic field distribution. Therefore, the performance of the electromagnetic component needs to be comprehensively analyzed in combination with the shape and position error data and the magnetic field strength distribution state. As a feasible implementation method, the analysis at the mechanical accuracy level can compare the shape and position error data with the predetermined standard value of the electromagnetic component to determine whether the geometry of the electromagnetic component is regular. For the analysis at the magnetic field performance level, the previously generated visualization chart can be compared with the simulation data of the electromagnetic component to evaluate the gap between the actual performance of the electromagnetic component and the ideal value.

[0053] Furthermore, if the above comparison results show that the geometry of the electromagnetic element is irregular, and the magnetic field intensity distribution state is also far from the ideal value, the electromagnetic element can be subjected to finite element analysis to simulate the influence of shape and position errors on the magnetic field, such as how the geometric irregularity of the electromagnetic element affects the magnetic field distribution, and the influence of the cylindrical surface that deviates from the ideal circle on the magnetic flux density. In this process, the shape and position error data can be used as input, and a geometric model of the electromagnetic element can be generated through a modeling tool. The model can reflect the surface irregularity of the electromagnetic element, and then the magnetic field distribution under different shape and position errors can be simulated in combination with the magnetic field data. Evaluate the uniformity of the magnetic field in the action area of ​​the electromagnetic element. For electromagnetic elements with complex structures, the spatial gradient of the magnetic flux density can be calculated, and then the subtle influence of shape and position errors on the magnetic field performance can be evaluated. By calculating the above parameters, the specific influence of shape and position errors on the magnetic field performance can be obtained and compared with the design requirements. Optionally, tolerance analysis can also be performed to determine whether the magnetic field performance can still meet the design requirements within the allowable shape and position error range.

[0054] In the above-mentioned embodiments, the mechanical precision and magnetic field performance of the electromagnetic element can be comprehensively measured and evaluated, which has the advantages of accurate, comprehensive and efficient measurement, and provides strong technical support for the development of the electronic optical manufacturing field.

[0055] To facilitate understanding of the technical solution of the present application, the following is a more specific explanation using the performance test of an electromagnetic lens as an example. The electromagnetic lens is one of the important components in an electronic optical system, and is mainly composed of an electromagnetic coil, a magnetic material, and a housing. Figure 7 , Figure 7 This is a schematic diagram of the electromagnetic lens and its magnetic field. It can be seen that the Z axis is also the center axis of the electron beam and is also the axis of rotational symmetry. Figure 7 The electromagnetic lens magnetic field, the electromagnetic lens pole shoe area, and the electromagnetic lens coil are also marked. Before testing the electromagnetic lens, the electromagnetic lens is first installed in the system used in this application to detect the performance of electromagnetic components for mechanical position calibration. Ensure that the cylindrical meter probe and the Gauss meter probe can be accurately aligned with the measurement area of ​​the electromagnetic lens. In this example, the Gauss meter probe uses a three-dimensional Gauss meter probe that can simultaneously measure magnetic fields in three directions. Next, the cylindrical meter probe is used to measure the roundness, cylindricity, coaxiality and other form and position error data of the electromagnetic lens. Taking into account that the electromagnetic lens has high precision requirements, this example adopts the method of taking the average value of multiple measurements to improve the accuracy of the measurement results.

[0056] After the measurement is completed, switch the cylindrical instrument probe to the Gaussmeter probe and enter the magnetic measurement mode. In this example, three measurement steps are required for the magnetic field data of the electromagnetic lens. In the first measurement step, the main focus is on measuring the along-axis distribution of the electromagnetic lens magnetic field on the spindle axis. First, fine-tune the position of the Gaussmeter probe so that its center coincides with the spindle axis of the electromagnetic lens. Control the current source unit to provide a constant current excitation to the electromagnetic coil in the electromagnetic lens, and also control the locking device inside the measuring arm to lock the spindle motor to stabilize it. Subsequently, control the measuring arm so that the Gaussmeter probe completely passes through the pole shoe area along the Z-axis direction, and record the magnetic intensity data measured by the Gaussmeter probe every 0.2 mm. Reference Figure 8 In an ideal state, the distribution relationship along the Z axis on the electromagnetic lens axis should present a bell-shaped distribution. Figure 8 By comparing with the simulation data, we can know the difference between the real performance of the electromagnetic lens and the actual value.

[0057] After the measurement is completed, enter the second measurement step, which mainly measures the distribution of the electromagnetic lens magnetic field in the axisymmetric space. Fine-tune the position of the Gaussmeter probe on the Z-axis again so that its center is offset from the main axis of the electromagnetic lens, while ensuring that it does not touch the pole shoe area. Control the current source unit to provide a constant current excitation to the coil in the electromagnetic lens again, turn on the spindle motor and the angle position sensor, so that the electromagnetic lens rotates at a constant speed around the main axis. Record the magnetic field data measured by the Gaussmeter probe every 0.5 degrees of rotation. Ideally, the Y-axis (tangential component) magnetic field data of the three-dimensional Gaussmeter is close to 0, while the X-axis (radial component) and Z-axis (axial component) magnetic fields do not change with changes in angle, presenting a relatively constant result, which can be compared with simulation data. Reference Fig. 9 In the ideal simulation data, the distribution relationship between the electromagnetic lens's off-axis magnetic field and the rotation angle should be a straight line. Fig. 9 If the distribution of the magnetic field generated by the electromagnetic lens is consistent with that shown in Figure 1, it can be determined that the magnetic field generated by the electromagnetic lens has a completely circularly symmetrical distribution outside the axis.

[0058] The last measurement step is to measure the relationship and linearity between the magnetic field strength and current excitation of the electromagnetic lens. Adjust the Gaussmeter probe to the magnetic field measurement position, which is the area with the strongest magnetic field on the axis. Lock the spindle motor to stabilize it. Control the current source unit to gradually increase the current excitation given to the coil in the electromagnetic lens from 0 at a specific rate. At the same time, the Gaussmeter probe measures the magnetic field and records the measurement data of the Gaussmeter probe once every specific time interval (the time interval between two measurements is > 0.5s) until the magnetic field size hardly changes with the change of current. At this time, the magnetic material of the electromagnetic lens is completely saturated. Obtain the current and magnetic field data at this time and compare them with the simulation results. If the magnetic field of the electromagnetic lens shows a nonlinear relationship with the change of current excitation, and the magnetic field strength no longer increases with the increase of current, but shows a phenomenon of maintenance or even attenuation, it can be determined that the magnetic saturation performance of the electromagnetic lens is close to the ideal state.

[0059] After the above measurement steps, the shape and position error data and magnetic field data of the electromagnetic lens will be obtained. Then the two data are combined for comprehensive analysis, and the analysis results are output in the form of a statistical analysis report. The report includes the assembly accuracy evaluation of the electromagnetic lens, the magnetic field performance evaluation, and the correlation analysis between the two. For example, if it is found during the analysis that the roundness error of the electromagnetic lens is large and the axial symmetry of the magnetic field is also affected, then the statistical analysis report can be marked that the assembly accuracy problem may have caused the magnetic field performance to deteriorate. In addition, the measured data can be compared with the simulation data in the statistical analysis report, so that users can further evaluate the gap between the actual performance of the electromagnetic lens and the ideal value.

[0060] The present application also discloses a computer-readable storage medium, in which program instructions are stored, and the program instructions are suitable for being loaded and executed by a processor: obtaining coordinate data of different positions on the surface of an electromagnetic component measured by a cylindricity meter probe; switching the cylindricity meter probe to a Gauss meter probe; obtaining magnetic field data of the electromagnetic component measured by the Gauss meter probe; and detecting the performance of the electromagnetic component according to the coordinate data and the magnetic field data. Based on this, when the scheme of the present application is embodied in the form of a software product (computer-readable storage medium), the software product can be stored in a memory, which can include several instructions to enable a computer device (such as a personal computer, a server or a network device, etc.) to perform some or all steps of the method described in the embodiment of the present application. The aforementioned memory may include, but is not limited to, various media that can store program codes, such as a U disk, a flash drive, a read-only memory ROM, a random access memory ("Random Access Memory", abbreviated as RAM), a mobile hard disk, a magnetic disk or an optical disk.

[0061] Although multiple embodiments of the present application have been shown and described herein, it is obvious to those skilled in the art that such embodiments are provided only by way of example. Those skilled in the art can think of many changes, modifications and alternatives without departing from the thought and spirit of the present application. It should be understood that in the process of practicing the present application, various alternatives to the embodiments of the present application described herein can be adopted. The attached claims are intended to limit the scope of protection of the present application, and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A system for detecting the performance of an electromagnetic component, characterized in that: include: A first arm, a second arm, a cylindricity meter probe, a Gauss meter probe, and a processing unit; The first arm and the second arm are connected to each other and form a specific angle; The cylindricity meter probe is arranged below the first arm and is used to obtain coordinate data of different positions on the surface of the electromagnetic component; The Gauss meter probe is arranged below the second arm and is used to obtain magnetic field data of the electromagnetic element; The processing unit is connected to the cylindrical measuring needle and the Gauss meter probe, and is used to receive the coordinate data and the magnetic field data, and detect the performance of the electromagnetic element according to the coordinate data and the magnetic field data.

2. The system according to claim 1, characterized in that Also includes: Main platform, air flotation platform, and measuring arm; The air floating platform is arranged on the main platform and is used to carry the electromagnetic element; The measuring arm is vertically arranged on the main platform, connected with the first support arm and the second support arm, and is used for switching the cylindricity meter probe and the Gauss meter probe.

3. The system according to claim 2, characterized in that Also includes: A limit device and a locking device; the limit device and the locking device are arranged inside the measuring arm, wherein the limit device is used to control the measuring range of the cylindricity meter probe and the Gaussmeter probe, and the locking device is used to prevent the cylindricity meter probe and the Gaussmeter probe from deviating.

4. The system according to claim 2, characterized in that Also includes: The main shaft is arranged inside the air floating platform and is used to drive the electromagnetic element to rotate.

5. The system according to claim 1, characterized in that Also includes: A current source unit; the current source unit is connected to the processing unit and is used to provide current excitation for the electromagnetic element.

6. The system according to claim 1, characterized in that The step of acquiring coordinate data of different positions on the surface of the electromagnetic element comprises: The cylindricity meter probe is in contact with the surface of the electromagnetic element. When the electromagnetic element rotates, the cylindricity meter probe moves on the surface of the electromagnetic element to measure the coordinate data at different positions.

7. The system according to claim 1, characterized in that The acquiring of the magnetic field data of the electromagnetic element comprises: the Gauss meter probe senses a magnetic field when the electromagnetic element is powered on, so as to measure the magnetic field data of the electromagnetic element.

8. The system according to claim 1, characterized in that The detecting the performance of the electromagnetic element according to the coordinate data and the magnetic field data comprises: Determine shape and position error data of the electromagnetic element according to the coordinate data; The performance of the electromagnetic element is detected based on the shape and position error data and the magnetic field data.

9. A method for detecting the performance of an electromagnetic component, characterized in that: include: Obtaining coordinate data of different positions on the surface of the electromagnetic component measured by the cylindricity meter probe; Switching the cylindricity meter probe to a Gaussmeter probe; Acquiring magnetic field data of the electromagnetic element measured by the Gaussmeter probe; The performance of the electromagnetic element is detected according to the coordinate data and the magnetic field data.

10. The method according to claim 9, characterized in that Detecting the performance of the electromagnetic element according to the coordinate data and the magnetic field data includes: Determining shape and position error data of the electromagnetic element according to the coordinate data; Determining the magnetic field intensity distribution state of the electromagnetic element according to the magnetic field data; The mechanical accuracy and magnetic field performance of the electromagnetic element are evaluated according to the shape and position error data and the magnetic field intensity distribution state.

11. The method according to claim 9, characterized in that Before detecting the performance of the electromagnetic element according to the coordinate data and the magnetic field data, the method further includes: The current source unit is controlled to provide current excitation to the electromagnetic element.

12. The method according to claim 9, characterized in that The magnetic field data at least includes: The distribution of magnetic field in axisymmetric space, the distribution of magnetic field along the main axis, the relationship between magnetic field intensity and current excitation and its linearity.

13. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer program instructions for detecting performance of an electromagnetic component. When the computer program instructions are executed by a processor, the method according to any one of claims 9 to 12 is implemented.

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