Material taking method and material taking equipment

Abstract

The invention belongs to the technical field of semiconductor manufacturing, and discloses a material taking method and a material taking device.The material taking method comprises the steps that constant-flow gas is conveyed to the surfaces of crystal grains; shortening the distance between a gas outlet of the constant-flow gas and the surface of the crystal grain, and detecting a real-time gas flow value between the gas outlet and the surface of the crystal grain; when the real-time gas flow value reaches a preset value, the constant-flow gas is stopped from being conveyed to the surfaces of the crystal grains; and constant-flow suction gas is used at the position of the gas outlet to adsorb the crystal grains. According to the material taking method, the gas flow value between the constant flow gas and the crystal grains is detected in real time, and the reference position for assembling the suction nozzle is obtained according to the calculated reference preset value, so that the fitting degree between the suction nozzle assembled at the reference position and the crystal grains is in a reasonable range; the crystal grains are successfully transferred, and meanwhile the crystal grains are prevented from being damaged due to overlarge pressure.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a material taking method and material taking equipment. Background Art

[0002] In semiconductor production, crystals are generally transported by negative pressure adsorption. To avoid abrasion of the crystal surface during the transport process, a suction nozzle is provided at the suction port of the suction mechanism to protect the crystal surface from abrasion. Most existing suction mechanisms have a constant adsorption force, so the fit between the suction nozzle and the crystal is particularly important. If the fit between the suction nozzle and the crystal is too small, the suction mechanism cannot absorb the crystal for a long time, and the crystal is easy to fall during transport. If the suction nozzle fits the crystal too tightly, the adsorption force will be too large, and the crystal will be damaged due to excessive pressure during the adsorption process.

[0003] Currently, most of the methods are to set a distance sensor at the suction port to help judge the distance between the suction nozzle and the grain. However, the suction nozzle will wear out after long-term use. The staff will replace the suction nozzle regularly, but there are differences in size between different suction nozzles, that is, there are thickness differences between different suction nozzles. When adsorbing the grain, the staff still judges the fit between the suction nozzle and the grain based on the previously predetermined data. After replacing the suction nozzle, the grain often falls during transportation or is damaged due to excessive pressure.

[0004] Therefore, there is an urgent need for a material taking method and material taking equipment to solve the above technical problems. Summary of the invention

[0005] The first object of the present invention is to provide a material taking method, which can accurately judge the distance between the suction nozzle and the grain, so as to avoid the problem that the grain falls during transportation or is damaged due to excessive pressure after the suction nozzle is replaced.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] A method for collecting grains, comprising the following steps:

[0008] delivering a constant flow of gas to the surface of the grain;

[0009] shortening the distance between the gas outlet of the constant flow gas and the surface of the grain, and detecting the real-time gas flow value between the gas outlet and the surface of the grain;

[0010] When the real-time gas flow value reaches a predetermined value, stopping supplying the constant flow gas to the surface of the grain;

[0011] A constant flow rate of suction gas is used at the gas outlet to adsorb the grains.

[0012] As a preferred technical solution of the material taking method, the gas outlet is provided with a flow sensor, and the flow sensor is used to detect the real-time gas flow value between the gas outlet and the surface of the grain.

[0013] As a preferred technical solution for the material taking method, the outlet of the constant flow gas and the suction port of the constant flow suction gas are the same port.

[0014] The second object of the present invention is to provide a material taking device. To achieve this object, the present invention adopts the following technical solutions:

[0015] A material taking device, which takes materials using any of the above-mentioned material taking methods, the material taking device comprising:

[0016] An air outlet mechanism and a suction mechanism, wherein the air outlet mechanism is used to output a constant flow of gas to the surface of the crystal grain, and the suction mechanism is used to suck gas at a constant flow rate to adsorb the crystal grain;

[0017] A pushing mechanism, the pushing mechanism is drivingly connected to the gas outlet mechanism, and the pushing mechanism is used to make the gas outlet mechanism move toward the grain at a constant speed;

[0018] A flow sensor is arranged at the air outlet of the air outlet mechanism, and the flow sensor is electrically connected to the pushing mechanism. When the value detected by the flow sensor is a predetermined value, the flow sensor transmits a first electrical signal to the pushing mechanism to stop the pushing mechanism.

[0019] As an optimal technical solution for the material taking equipment, the flow sensor is electrically connected to the gas outlet mechanism. When the value detected by the flow sensor is a predetermined value, the flow sensor simultaneously outputs a second electrical signal to the gas outlet mechanism to stop the gas outlet mechanism from outputting constant flow gas.

[0020] As an optimal technical solution for the material picking equipment, the air outlet mechanism includes a first main body and a first pipeline, the suction mechanism includes a second main body and a second pipeline, one end of the first pipeline is connected to the first main body, and the other end is connected to the second pipeline, one end of the second pipeline is connected to the second main body, and the other end is toward the end actuator.

[0021] As a preferred technical solution of the material taking device, the air outlet mechanism also includes a solenoid valve, the solenoid valve is placed in the first pipeline, and the flow sensor is electrically connected to the solenoid valve.

[0022] As a preferred technical solution of the material taking device, the material taking device further comprises a bracket, and the bracket connects the first main body and one end of the second pipeline facing the grain.

[0023] As a preferred technical solution of the material taking device, the material taking device also includes a suction nozzle, which is placed at the suction port of the suction mechanism.

[0024] As a preferred technical solution for the material picking equipment, the material picking equipment also includes a scanning sensor, which is placed at the suction nozzle. The grain is adhered to a multi-degree-of-freedom carrier, and the scanning sensor is used to scan the posture of the grain. The scanning sensor is communicatively connected to the multi-degree-of-freedom carrier, and the multi-degree-of-freedom carrier can adjust its own angle according to the scanning result of the scanning sensor communication so that the center of the grain is opposite to the suction nozzle.

[0025] The beneficial effects of the present invention are:

[0026] The material taking method provided by the present invention detects the gas flow value between the constant flow gas and the crystal grain in real time by assembling the suction nozzle at the constant flow gas outlet, and obtains the relative position of the gas outlet and the crystal grain according to the calculated reference predetermined value. At this time, the position of the gas outlet is the reference position for assembling the suction nozzle, that is, the degree of fit between the suction nozzle and the crystal grain is at a reasonable level when the suction nozzle is installed at the gas outlet position, and then the suction port of the constant flow suction gas can be adjusted to the reference position, which can realize the successful transfer of the crystal grain without causing damage to the crystal grain. When the staff replaces the suction nozzle, even if the thickness of the suction nozzle changes, since the predetermined value is a fixed value, the reference position will change accordingly due to the thickness of the suction nozzle, which can ensure that the fit between the suction nozzle and the crystal grain is always at a reasonable level, and realize the successful transfer of the crystal grain.

[0027] The material taking equipment provided by the present invention has a simple overall structure, and can accurately determine the distance between the suction nozzle and the grains, stably transport the grains, and will not cause the grains to deform or wear during transportation, thereby ensuring the performance of the grains. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic flow chart of the material taking method provided by the present invention;

[0029] Figure 2 It is a schematic diagram of the material taking device and the carrying plate provided by the present invention.

[0030] In the figure:

[0031] 100, a carrier plate;

[0032] 1. Air outlet mechanism; 11. First body; 12. First pipeline; 2. Suction mechanism; 21. Second body; 22. Second pipeline; 3. Flow sensor; 4. Bracket; 5. Suction nozzle. DETAILED DESCRIPTION

[0033] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0034] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0036] In the description of this embodiment, the terms "upper", "lower", "right", etc., directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0037] Embodiment 1

[0038] like Figure 1 As shown in , this embodiment provides a material taking method for taking material from a grain, wherein the material taking method comprises the following steps:

[0039] A constant flow of gas is delivered to the surface of the grain, the distance between the outlet of the constant flow of gas and the surface of the grain is shortened, and the real-time gas flow value between the outlet and the surface of the grain is detected. Since the outlet delivers a constant flow of gas to the surface of the grain, as the distance between the outlet and the surface of the grain gradually shortens, the real-time flow value between the outlet and the surface of the grain will gradually decrease, that is, the real-time gas flow value between the outlet and the surface of the grain gradually decreases. Therefore, when adsorbing the grain, the nozzle can be installed at the position of the outlet, and the degree of fit between the nozzle and the surface of the grain can be judged according to the size of the real-time gas flow value.

[0040] When the real-time gas flow rate reaches a predetermined value, stop delivering constant flow gas to the surface of the grain. Since the thickness and specifications of different grains are different, the adsorption distance required between different types of grains is different, where the predetermined value is the real-time flow value of the constant flow gas when the nozzle and the grain are in reasonable fit, calculated based on the required adsorption distance, constant flow gas velocity value and constant adsorption force value. When the real-time gas flow rate reaches a predetermined value, it can be determined that the nozzle and the grain are in reasonable fit. At this time, the distance between the gas outlet and the grain can be stopped from being shortened, and the delivery of constant flow gas can be stopped at the same time to reduce the waste of resources.

[0041] Use constant flow suction gas at the outlet position to adsorb the die. At this time, the outlet position is the reference position of the nozzle assembly, that is, when the nozzle is assembled at the outlet position, the fit between the nozzle and the die is at a reasonable level, and the die can be successfully transported without causing damage to the die. Specifically, the suction port position of the constant flow suction gas can be adjusted to the reference position, and then the die is sucked.

[0042] The material taking method provided in this embodiment, by assembling the suction nozzle at the constant flow gas outlet, real-time detection of the gas flow value between the constant flow gas and the crystal grain, and obtaining the relative position of the gas outlet and the crystal grain according to the calculated reference predetermined value, the position of the gas outlet is the reference position for assembling the suction nozzle, that is, the degree of fit between the suction nozzle and the crystal grain is at a reasonable level when the suction nozzle is installed at the gas outlet position, and then the suction port of the constant flow suction gas can be adjusted to the reference position, which can achieve successful transfer of the crystal grain without causing damage to the crystal grain. When the staff replaces the suction nozzle, even if the thickness of the suction nozzle changes, since the predetermined value is a fixed value, the reference position will change accordingly due to the thickness of the suction nozzle, which can ensure that the degree of fit between the suction nozzle and the crystal grain is always at a reasonable level, and achieve successful transfer of the crystal grain.

[0043] Furthermore, a flow sensor is provided at the gas outlet, wherein the flow sensor is used to detect the real-time gas flow value between the gas outlet of the constant flow gas and the die. By detecting the real-time gas flow value to determine the reference position of the nozzle assembly, even if the flow sensor changes its posture during assembly and disassembly, it does not affect the accuracy of the flow sensor detection. Compared with the method of directly using a distance sensor to determine the distance between the gas outlet and the die, the detection accuracy is higher.

[0044] Preferably, the outlet of the constant flow gas and the suction port of the constant flow suction gas are the same port. In this way, after the reference position of the assembly suction nozzle is determined according to the preset value, the constant flow suction gas can be directly used to suck the die, eliminating the process of adjusting the suction port to the reference position, thereby improving the efficiency of picking up the die.

[0045] Embodiment 2

[0046] like Figure 2 As shown in , this embodiment provides a material picking device, which uses the material picking method in embodiment one to pick up the grains, wherein the material picking device includes an air outlet mechanism 1, a suction mechanism 2, a pushing mechanism and a flow sensor 3, the air outlet mechanism 1 is used to deliver a constant flow of gas to the grains, the suction mechanism 2 is used to suck gas at a constant flow rate to adsorb the grains, and the pushing mechanism is drivingly connected to the air outlet mechanism 1, and is used to push the air outlet mechanism 1 to move toward the grains at a constant speed. As the pushing mechanism gradually brings the air outlet mechanism 1 closer to the grains, the gas flow value between the air outlet of the air outlet mechanism 1 for delivering a constant flow of gas and the grains gradually becomes smaller. In this embodiment, the pushing mechanism can use a telescopic cylinder, that is, the output end of the telescopic cylinder is connected to the air outlet mechanism 1. Of course, other telescopic devices can also be selected, and there is no specific restriction on the choice of the pushing mechanism.

[0047] The flow sensor 3 is arranged at the outlet of the constant flow gas, and is used to detect the gas flow value between the outlet and the grain in real time. At the same time, the suction nozzle 5 is installed at the outlet. A preset value is stored inside the flow sensor 3. When the value detected by the flow sensor 3 is the preset value, the flow sensor 3 transmits a first electrical signal to the push mechanism 1, and the push mechanism stops running. At this time, the position of the outlet of the outlet mechanism 1 is the reference position for assembling the suction nozzle 5. The staff can choose to power off the outlet mechanism 1 to stop the outlet mechanism 1 from outputting the constant flow gas. When the value detected by the flow sensor 3 is the preset value, the fit between the suction nozzle 5 and the grain at the outlet is in a reasonable range, and the outlet position is at the reference position for assembling the suction nozzle 5. Then the position of the suction mechanism 2 can be adjusted so that the suction port of the suction mechanism 2 is flush with the outlet of the outlet mechanism 1 in the first direction. Specifically, the first direction is the direction of the suction port and the outlet toward the grain, so that when the outlet mechanism 1 stops working, the reference position of the suction port of the suction mechanism 2 for assembling the suction nozzle 5 can be determined. Since the replaced suction nozzle 5 is first installed at the air outlet, after the reference position is determined, the suction port is adjusted to the reference position and then the suction nozzle 5 is installed at the suction port. Even if the replaced suction nozzle 2 is inconsistent with the replacement thickness, since the predetermined value remains unchanged, the reference position will change according to the thickness of the suction nozzle 5, so that the replaced suction nozzle 5 and the grain are in a reasonable fit.

[0048] At the same time, after replacing the suction nozzle 5 and determining the reference position, the staff can calibrate the reference position after transferring the grains multiple times. It is not necessary to start the gas outlet mechanism 1 every time the grains are transferred, which reduces the workload of the staff while ensuring the stable transfer of the grains. Furthermore, when the material taking device is placing the grains, the gas outlet mechanism 1 can also be turned on, and the flow sensor 3 is used to detect the gas flow value between the gas outlet and the table receiving the grains in real time. The distance between the suction nozzle 5 and the table is determined based on the detected gas flow value to ensure that the suction nozzle 5 will not squeeze the grains when the material taking device is placing the grains, so that the performance of the grains can be further guaranteed.

[0049] The working principle of the material taking equipment provided in this embodiment is as follows: a constant flow rate of gas is delivered to the grains through the gas outlet mechanism 1, and the pushing mechanism pushes the gas outlet mechanism 1 to move in the direction of the grains. As the gas outlet mechanism 1 approaches the grains, the gas flow value between the two gradually decreases. The flow sensor 3 is placed at the gas outlet of the gas outlet mechanism 1, and can detect the gas flow value between the gas outlet and the grains in real time. At the same time, the replaced suction nozzle is assembled at the gas outlet. A predetermined value is set in the flow sensor 3. When the detected gas flow value is consistent with the predetermined value, the position of the gas outlet is the reference position for installing the suction nozzle 5. The suction port of the suction mechanism 2 is adjusted to be flush with the gas outlet in the direction toward the grains, that is, the suction port is adjusted to the reference position for assembling the suction nozzle 5. The flow sensor 3 outputs an electrical signal to the gas outlet mechanism 1 to stop delivering gas, and the suction nozzle 5 is assembled to the suction port. Then, the suction mechanism 2 is started, so that the grains can be successfully adsorbed and transported.

[0050] Preferably, the flow sensor 3 is electrically connected to the gas outlet mechanism 1 at the same time. When the value detected by the flow sensor 3 is a predetermined value, the flow sensor 3 simultaneously outputs a second electrical signal to the gas outlet mechanism 1, so that the gas outlet mechanism 1 stops delivering the constant flow gas. In this way, the staff does not need to operate the gas outlet mechanism 1 alone, thereby reducing the workload of the staff and improving the efficiency of picking up the grains.

[0051] Further, the gas outlet mechanism 1 includes a first body 11 and a first pipeline 12, and the suction mechanism 2 includes a second body 21 and a second pipeline 22. Preferably, one end of the first pipeline 12 is connected to the first body 11, and the other end is connected to the second pipeline 22. One end of the second pipeline 22 is connected to the second body 21, and the other end faces the grain. The gas outlet of the gas outlet mechanism 1 and the suction port of the suction mechanism 2 are realized as one port, which saves the process of adjusting the position of the suction port in the suction mechanism by the staff, so that the structure of the material taking device is more reasonable. Further, the gas outlet mechanism 1 also includes a solenoid valve, wherein the solenoid valve is placed at the position of the first pipeline 12, and specifically, the flow sensor 3 is electrically connected to the solenoid valve. When the flow sensor 3 detects a value that is a predetermined value, the flow sensor 3 transmits a second electrical signal to the solenoid valve, the solenoid valve is powered on, and the gas outlet no longer outputs a constant flow gas. Compared with powering off the first body 11, the solenoid valve has a faster response speed, which can improve the transportation efficiency of the grains. Then the staff can selectively power off the first body 11. The structure and specific principle of the solenoid valve can be referred to the prior art, and no further details will be given here. The second pipeline 22 can be a telescopic tube. When the pushing mechanism pushes the gas outlet mechanism 1 to move toward the grain, the second body 21 can be kept in place, and the end of the second pipeline 22 facing the grain can also move toward the grain as the gas outlet mechanism 1 moves, further improving the rationality of the design of the material taking equipment.

[0052] For example, the first body 11 may use a centrifugal fan or an air compressor, which is not specifically limited here. The second body 21 may use a suction fan, which is not specifically limited here.

[0053] In another embodiment, the material taking device includes an air source mechanism, wherein the air source mechanism uses a positive and negative pressure generating device, the suction nozzle 5 is installed at the outlet position of the positive and negative pressure generating device, and the pushing mechanism is drivingly connected to the air source mechanism. When the assembly position of the suction nozzle 5 is determined, the air source mechanism outputs a constant flow of positive pressure gas, and the reference position of the suction nozzle 5 is determined according to the predetermined value in the flow detector 3, and then the air source mechanism is controlled to generate a constant flow of suction gas to suck the grains, which can further reduce the difficulty of operating the material taking device. Regarding the positive and negative pressure generating device, it is a commonly used device in industrial production and does not belong to the key protection content of the present invention.

[0054] In this embodiment, the scanning device also includes a bracket 4, wherein the bracket 4 is used to connect the first main body 11 and the port of the second pipeline 22 facing the grain. The bracket 4 fixes the port of the second pipeline 22 facing the grain to avoid the position of the port of the second pipeline 22 facing the grain being offset when the suction mechanism 2 is working, thereby affecting the accuracy of the suction nozzle 5 relative to the grain.

[0055] Preferably, the pushing mechanism pushes the exhaust mechanism 1 to move toward the grain at a constant speed of 1cm / s-2cm / s. If the constant speed is too high, the accuracy of the value detected by the flow sensor 3 will be affected. If the constant speed is too low, the efficiency of the material taking device for the grain will be affected.

[0056] In this embodiment, the material taking device further includes a suction nozzle 5, wherein the suction nozzle 5 is placed at the suction port. When the suction mechanism 2 adsorbs the grains, the suction nozzle 5 can protect the grains and further avoid damage to the grains.

[0057] Preferably, the material picking device also includes a scanning sensor, which is arranged at the suction nozzle 5, wherein the grain is adhered to the multi-degree-of-freedom carrier, and the scanning sensor is used to scan the posture of the grain. At the same time, the scanning sensor is connected to the multi-degree-of-freedom carrier in communication, and the scanning sensor can communicate the scanned grain posture data to the multi-degree-of-freedom carrier. The multi-degree-of-freedom carrier can adjust its own angle according to the scanning structure communicated by the scanning sensor, and adjust it to the center of the wafer relative to the suction nozzle 5, so that there is a larger fitting area on the basis of ensuring that the suction nozzle 5 and the wafer are reasonably fitted, so that the material picking device can transfer the grain more stably. The specific structure and working principle of the scanning sensor can refer to the existing technology, and no more details will be given here. Among them, the multi-degree-of-freedom carrier includes a multi-degree-of-freedom mechanical arm and a carrier plate 100, and an adhesive film is attached to the carrier plate 100, and the grain is attached to the adhesive film. Regarding the multi-degree-of-freedom mechanical arm, its specific structure and working principle can refer to the existing technology, and no more details will be given here.

[0058] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A method for collecting grains, characterized in that: The material taking method comprises the following steps: delivering a constant flow of gas to the surface of the grain; shortening the distance between the gas outlet of the constant flow gas and the surface of the grain, and detecting the real-time gas flow value between the gas outlet and the surface of the grain; When the real-time gas flow value reaches a predetermined value, stopping supplying the constant flow gas to the surface of the grain; A constant flow rate of suction gas is used at the gas outlet to adsorb the grains.

2. The material taking method according to claim 1, characterized in that: The gas outlet is provided with a flow sensor (3), and the flow sensor (3) is used to detect the real-time gas flow value between the gas outlet and the surface of the crystal grain.

3. The material taking method according to claim 2, characterized in that: The gas outlet of the constant flow gas and the suction port of the constant flow suction gas are the same port.

4. A material taking device, characterized in that: The material is taken using the material taking method according to any one of claims 1 to 3, wherein the material taking equipment comprises: An air outlet mechanism (1) and a suction mechanism (2), wherein the air outlet mechanism (1) is used to output a constant flow of gas to the surface of the crystal grain, and the suction mechanism (2) is used to suck the gas at a constant flow rate to adsorb the crystal grain; A pushing mechanism, the pushing mechanism being drivingly connected to the gas outlet mechanism (1), the pushing mechanism being used to enable the gas outlet mechanism (1) to move toward the crystal grain at a constant speed; A flow sensor (3) is arranged at the air outlet of the air outlet mechanism (1), and the flow sensor (3) is electrically connected to the pushing mechanism. When the value detected by the flow sensor (3) is a predetermined value, the flow sensor (3) transmits a first electrical signal to the pushing mechanism to stop the operation of the pushing mechanism.

5. The material taking device according to claim 4, characterized in that: The flow sensor is electrically connected to the gas outlet mechanism (1); when the value detected by the flow sensor (3) is a predetermined value, the flow sensor (3) simultaneously outputs a second electrical signal to the gas outlet mechanism (1), causing the gas outlet mechanism (1) to stop outputting constant flow gas.

6. The material taking device according to claim 4, characterized in that: The gas outlet mechanism (1) comprises a first body (11) and a first pipeline (12); the suction mechanism (2) comprises a second body (21) and a second pipeline (22); one end of the first pipeline (12) is connected to the first body (11), and the other end is connected to the second pipeline (22); one end of the second pipeline (22) is connected to the second body (21), and the other end faces the crystal grain.

7. The material taking device according to claim 6, characterized in that: The gas outlet mechanism (1) further comprises a solenoid valve, the solenoid valve is disposed in the first pipeline (12), and the flow sensor (3) is electrically connected to the solenoid valve.

8. The material taking device according to claim 6, characterized in that: The material taking device further comprises a bracket (4), wherein the bracket (4) connects the first main body (11) and an end of the second pipeline (22) facing the crystal grain.

9. The material taking device according to any one of claims 4 to 8, characterized in that: The material taking device also comprises a suction nozzle (5), and the suction nozzle (5) is placed at the suction port of the suction mechanism (2).

10. The material taking device according to claim 9, characterized in that: The material picking device also includes a scanning sensor, which is placed at the suction nozzle (5). The grain is adhered to a multi-degree-of-freedom carrier. The scanning sensor is used to scan the posture of the grain. The scanning sensor is communicatively connected to the multi-degree-of-freedom carrier. The multi-degree-of-freedom carrier can adjust its own angle according to the scanning result of the scanning sensor communication so that the center of the grain is opposite to the suction nozzle (5).

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