Self-cleaning reaction kettle for processing ultrapure phosphine

Abstract

The invention provides a self-cleaning type reaction kettle for ultrapure phosphine processing, and belongs to the technical field of reaction kettles.The self-cleaning type reaction kettle comprises a supporting seat, a supporting rod is welded to the supporting seat, a kettle body is welded to the upper portion of the supporting rod, a discharging pipe is arranged on the kettle body in a communicating mode, and a cover plate is rotationally installed on the discharging pipe; an electric heating cylinder is mounted on the outer side of the kettle body, a driving assembly and a top cover are mounted at the top of the kettle body, the top cover is hinged to the kettle body, a connecting handle is fixedly connected to the top cover, a lifting assembly is mounted on the driving assembly, and connecting rods are mounted on the lifting assembly and the driving assembly. And an inner groove is formed in the connecting rod. The problems that an existing reaction kettle cannot be switched between stirring and mixing, the function that multiple stirring plates stretch out and draw back synchronously cannot be achieved through single driving equipment, and switching between the stirring plates and scraping plates cannot be achieved are solved.

Description

Technical Field

[0001] The invention relates to the technical field of reactors, in particular to a self-cleaning reactor for processing ultrapure phosphine. Background Art

[0002] Ultrapure phosphine is an important semiconductor manufacturing material. Phosphine is a highly flammable, toxic and corrosive gas, so its production process requires extremely strict control and handling. To ensure the purity and safety of phosphine, a reactor is required in the production process, and the existing reactors still have some shortcomings.

[0003] For example, the invention patent with the publication number CN115569625A discloses an alkyl phosphate oligomer preparation device, including a reactor, an ethylene oxide supply device connected to the reactor, a polyphosphate mixture supply pipeline connected to the reactor, and a circulation device connected to the reactor, wherein the circulation device includes a circulation pump connected to the reactor, a material insulation part connected to the circulation pump, and a material nozzle connected to the material insulation part and the reactor; a plurality of layers of annular baffles are arranged on the inner wall of the reactor, and each layer of annular baffles is arranged on the inner wall of the reactor at intervals, and the material nozzle is arranged facing the annular baffles. The annular baffles ensure that the liquid level in the reactor always keeps the center part rising steadily, and ensure that the center part does not produce a low liquid level. Arranging the material nozzle facing the annular baffles can prevent the sprayed mist reaction liquid from falling directly into the reactor, reduce the gas absorption of the circulation pump, prevent the pump head temperature from rising, and avoid failure of the magnetic circulation pump. Although the above-mentioned device can realize the function of preventing the pump head from overheating, it cannot efficiently filter the raw materials flowing in two directions when in use, cannot use the flexible outer frame to flip and fix the filtering structure, cannot switch between stirring and mixing, cannot realize the function of synchronous extension and retraction of multiple stirring plates through a single driving device, cannot switch between the stirring plate and the scraper, and when the stirring plate is subsequently switched to the scraper, the scraper cannot be raised and lowered to realize the efficient cleaning function. Summary of the invention

[0004] In view of the problems existing in the existing reaction kettle, the present invention is proposed.

[0005] To solve the above technical problems, the present invention provides the following technical solutions: a self-cleaning reactor for ultrapure phosphine processing, comprising a support seat, a support rod welded on the support seat, a reactor body welded above the support rod, a discharge pipe connected to the reactor body, a cover plate rotatably mounted on the discharge pipe, an electric heating cylinder mounted on the outer side of the reactor body, a driving assembly and a top cover mounted on the top of the reactor body, a hinged connection between the top cover and the reactor body, a connecting handle fixedly connected to the top cover, a lifting assembly mounted on the driving assembly, a connecting rod mounted on the lifting assembly and the driving assembly, an inner groove is provided in the connecting rod, a slide plate is slidably mounted in the inner groove, a fixed block is welded on the slide plate, a chain plate is rotatably mounted on the fixed block, a connecting shell is fixedly arranged around the connecting rod, a movable plate is slidably mounted in the connecting shell, a swivel is mounted on the movable plate, the swivel is rotatably connected to the chain plate closest to the movable plate, a guide plate for guiding the chain plate is fixedly connected to the inner wall of the inner groove, and a stirring plate is fixedly arranged on the movable plate; A first mounting block is rotatably provided at the bottom of the connecting rod, a second mounting block is fixedly connected below the first mounting block, a second electric push rod is fixedly provided inside the first mounting block, the top of the second electric push rod is rotatably connected to the slide plate, and a side of the top cover close to the central axis of the kettle body is made of rubber material; An inner plate is fixedly arranged in the kettle body, a rubber connecting ring is installed on the inner plate, a rotating block is installed on the rubber connecting ring, and an activated carbon filter plate is fixedly arranged on the rotating block.

[0006] As a preferred solution of the present invention, the support seat, support rod and kettle body are fixedly connected to form an integral structure, the central axes of the support seat, electric heating tube and kettle body are collinear, a guide tube is fitted on the outer side of the second mounting block, and the guide tube and the support seat are fixedly connected.

[0007] As a preferred solution of the present invention, the driving assembly includes a bracket fixedly connected to the kettle body, a motor is fixedly mounted on the bracket, a first gear is fixedly connected to the output shaft of the motor, a second gear is meshingly connected to the side of the first gear, and the second gear and the connecting rod are fixedly connected.

[0008] As a preferred solution of the present invention, a gear ring is fitted on the outer side of the second gear, the gear ring and the kettle body are rotatably connected, the height of the gear ring is equal to the thickness of the kettle body, the height of the second gear is greater than the height of the first gear, and the first gear and the kettle body are rotatably connected.

[0009] As a preferred solution of the present invention, the lifting assembly includes a bearing installed on the outside of the connecting rod, a connecting ring is fixedly provided on the outside of the bearing, a connecting plate is fixedly connected to the connecting ring, and a first electric push rod is installed between the kettle body and the connecting plate.

[0010] As a preferred solution of the present invention, there is a gap between the connecting ring and the second gear, the connecting rod forms a lifting structure with the kettle body through the first electric push rod and the bearing, and the connecting rod forms a rotating structure with the first mounting block through the first gear and the second gear.

[0011] As a preferred solution of the present invention, two adjacent chain plates are rotatably connected, the fixed blocks are evenly spaced on the slide plate, the swivel forms a first sliding structure between the slide plate, the chain plate and the connecting shell, and the swivel and the movable plate are rotatably connected.

[0012] As a preferred solution of the present invention, the movable plate is provided with an opening, a protrusion is provided in the opening, the protrusion is fixedly connected to the connecting shell, and the movable plate forms a second sliding structure with the connecting shell through the protrusion and the opening.

[0013] As a preferred solution of the present invention, the movable plate, connecting shell and stirring plate are evenly distributed along the circumference of the connecting rod, the stirring plate forms a telescopic structure through the movable plate and the connecting shell, the outer side of the connecting rod is fixedly connected with a sealing sleeve, and the sealing sleeve and the kettle body are slidably connected.

[0014] As a preferred solution of the present invention, a cavity is provided on the rubber connecting ring, the cavity is annular, a groove for docking with the rotating block is provided on the inner plate, the rotating block is made of rubber material, and the rotating blocks are symmetrically distributed on both sides of the rubber connecting ring.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. Through the provided slide plate, fixed block, chain plate and swivel, when the slide plate moves downward, the slide plate can push each group of chain plates, so that the lowest chain plate pushes the swivel and the movable plate to slide in the connecting shell under the guidance of the guide plate, so that the stirring plate on the device extends outward, so that the reactor can not only realize the heating and mixing functions through the electric heating tube during operation, but also facilitate the subsequent extension of the stirring plate to the position of the inner wall of the reactor body, realize the automatic cleaning function, and enhance the convenience of the device when used.

[0016] 2. Through the connecting rod, the second electric push rod and the first mounting block on the device, when the second electric push rod is extended or shortened, it will not affect the normal rotation of the connecting rod, thereby ensuring the stability of the device during operation, and the device can realize the function of driving the chain plates at multiple positions to rise and fall synchronously through a single electric push rod. Compared with driving multiple stirring plates to be extended and retracted through multiple electric push rods, the device has the advantage of lower cost, and the existing stirring plates are extended and retracted through multiple connecting rod telescopic structures. The device can directly realize the telescopic function inside the connecting rod, which not only does not occupy the space inside the device but also ensures the durability of the device. Compared with resetting the stirring plate after extension and retraction through structures such as springs, the device realizes the extension and retraction of the stirring plate through multiple rotatably connected chain plates, which ensures the normal telescopic function while preventing the high temperature in the kettle from causing the spring performance to change and thus affecting the structural stability.

[0017] 3. By setting up the second gear and the gear ring, the first electric push rod on the device can drive the connecting rod and the second gear to move up and down through the bearing when it is lifted or lowered. The second gear always keeps in meshing state with the gear ring and the first gear when it moves up and down, which not only ensures the stable rotation of the stirring plate, but also ensures the sealing effect of the device. When the stirring plate is switched to the scraper, the inner wall of the kettle can be cleaned at different heights. This solves the problem that the existing reactor cannot realize efficient cleaning function of lifting and lowering the scraper when the stirring plate is switched to the scraper. The device has the advantage of stronger adaptability.

[0018] 4. The device is provided with a rubber connecting ring and an activated carbon filter plate. The raw materials flow from top to bottom or from bottom to top. The activated carbon filter plate can filter the raw materials multiple times. Subsequently, the connecting ring and the activated carbon filter plate can be turned over by rotating blocks and grooves, so that the activated carbon filter plate can be turned over for use, thereby making full use of the activated carbon filter plate to absorb impurity particles and ensuring the safety of the device during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the present invention will be described in detail below in combination with the accompanying drawings and detailed embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. Among them: Figure 1 This is a schematic diagram of the overall structure of a self-cleaning reactor for processing ultrapure phosphine according to the present invention; Figure 2 yes Figure 1 A magnified schematic diagram of the structure at center A; Figure 3 It is a schematic diagram of the internal structure of the kettle body of the present invention; Figure 4yes Figure 3 A magnified schematic diagram of the structure at B in the middle; Figure 5 yes Figure 3 A magnified schematic diagram of the structure at C in the middle; Figure 6 yes Figure 3 A magnified schematic diagram of the structure at D in the middle; Figure 7 yes Figure 3 A magnified schematic diagram of the structure at E in the middle; Figure 8 It is a schematic diagram of the connection structure of the movable plate and the stirring plate of the present invention; Fig. 9 It is a schematic diagram of the connection structure between the kettle body and the inner plate of the present invention; Fig.10 yes Fig. 9 Schematic diagram of the structure at F in the middle.

[0020] Figure numerals: 1, support seat; 2, support rod; 3, kettle body; 4, discharge pipe; 5, cover plate; 6, electric heating tube; 7, drive assembly; 701, bracket; 702, motor; 703, first gear; 704, second gear; 705, gear ring; 8, lifting assembly; 801, bearing; 802, connecting ring; 803, connecting plate; 804, first electric push rod; 9, connecting rod; 10, top cover; 11, connecting handle; 12, inner groove ; 13. Slide plate; 14. Fixed block; 15. Chain plate; 16. Guide plate; 17. Swivel; 18. Movable plate; 19. Connecting shell; 20. Opening; 21. Bump; 22. Stirring plate; 23. Sealing sleeve; 24. Second electric push rod; 25. First mounting block; 26. Second mounting block; 27. Guide cylinder; 28. Inner plate; 29. ​​Rubber connecting ring; 30. Rotating block; 31. Groove; 32. Cavity; 33. Activated carbon filter plate. DETAILED DESCRIPTION

[0021] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0022] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0023] Secondly, the present invention is described in detail with reference to schematic diagrams. When describing the embodiments of the present invention in detail, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0024] In order to make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0025] like Figure 1-Figure 9 As shown, a self-cleaning reactor for ultrapure phosphine processing comprises a support base 1, a support rod 2 is welded and installed on the support base 1, a reactor body 3 is welded and installed above the support rod 2, a discharge pipe 4 is connected to the reactor body 3, a cover plate 5 is rotatably installed on the discharge pipe 4, an electric heating cylinder 6 is installed on the outer side of the reactor body 3, a driving assembly 7 and a top cover 10 are installed on the top of the reactor body 3, the top cover 10 and the reactor body 3 are hingedly connected, a connecting handle 11 is fixedly connected to the top cover 10, a lifting assembly 8 is installed on the driving assembly 7, and the lifting assembly 8 and the driving assembly 7 are installed A connecting rod 9, an inner groove 12 is provided in the connecting rod 9, a slide plate 13 is slidably installed in the inner groove 12, a fixed block 14 is welded on the slide plate 13, a chain plate 15 is rotatably installed on the fixed block 14, a connecting shell 19 is fixedly provided around the connecting rod 9, a movable plate 18 is slidably installed in the connecting shell 19, a swivel 17 is installed on the movable plate 18, the swivel 17 is rotatably connected to the chain plate 15 closest to the movable plate 18, a guide plate 16 for guiding the chain plate 15 is fixedly connected to the inner wall of the inner groove 12, and a stirring plate 22 is fixedly provided on the movable plate 18; A first mounting block 25 is rotatably provided at the bottom of the connecting rod 9, a second mounting block 26 is fixedly connected below the first mounting block 25, a second electric push rod 24 is fixedly provided inside the first mounting block 25, and the top of the second electric push rod 24 is rotatably connected to the slide plate 13. The slide plate 13 and the second electric push rod 24 are rotatably installed, so that when the slide plate 13 rotates with the connecting rod 9, the second electric push rod 24 can remain stationary, thereby ensuring the stability of the device during operation. When the second electric push rod 24 is shortened, it will pull the slide plate 13 to move downward, thereby pushing each group of chain plates 15 downward through the fixed block 14. When the chain plates 15 move downward, they will push the swivel 17 under the guidance of the guide plate 16, and the swivel 17 will push the movable plate 18 to slide in the connecting shell 19, thereby extending the stirring plate 22 outward, so as to subsequently extend the stirring range of the device, or switch the stirring plate 22 to a scraper to clean the inner wall of the kettle body 3; An inner plate 28 is fixedly arranged in the kettle body 3, a rubber connecting ring 29 is installed on the inner plate 28, a rotating block 30 is installed on the rubber connecting ring 29, an activated carbon filter plate 33 is fixedly arranged on the rotating block 30, the activated carbon filter plate 33 can filter the raw materials flowing up and down for multiple times, and the activated carbon filter plate 33 can be turned over for use or cleaning later by the rotating block 30, and the rubber connecting ring 29 keeps the activated carbon filter plate 33 on the device pressed and fixed after turning over.

[0026] In this embodiment, the support seat 1, the support rod 2 and the kettle body 3 are fixedly connected to form an integral structure, the central axes of the support seat 1, the electric heating tube 6 and the kettle body 3 are collinear, and the side of the top cover 10 close to the central axis of the kettle body 3 is made of rubber material to ensure that the kettle body 3 remains sealed. At the same time, the rubber material part on the top cover 10 enables the top cover 10 to remain in a compressed state, and automatically opens when the air pressure in the kettle body 3 is too high, thereby realizing the protection function. A guide cylinder 27 is fitted on the outer side of the second mounting block 26, and the guide cylinder 27 and the support seat 1 are fixedly connected. The guide cylinder 27 can not only ensure that the second mounting block 26 will not rotate, but also ensure that the second mounting block 26 can move up and down stably, thereby realizing the support function of the second mounting block 26.

[0027] In this embodiment, the driving assembly 7 includes a bracket 701 fixedly connected to the kettle body 3, a motor 702 is fixedly mounted on the bracket 701, a first gear 703 is fixedly connected to the output shaft of the motor 702, a second gear 704 is meshingly connected to the side of the first gear 703, and the second gear 704 and the connecting rod 9 are fixedly connected. When the device is subsequently cleaning the inner wall or stirring the phosphine raw material, the first gear 703 can be driven to rotate by the motor 702, thereby driving the second gear 704 and the connecting rod 9 to rotate, so as to fully mix the phosphine raw material or clean the inside of the device.

[0028] In this embodiment, a toothed ring 705 is fitted on the outer side of the second gear 704, and the toothed ring 705 and the kettle body 3 are rotatably connected. The height of the toothed ring 705 is equal to the thickness of the kettle body 3, and the height of the second gear 704 is greater than the height of the first gear 703. The first gear 703 and the kettle body 3 are rotatably connected. The toothed ring 705 can maintain a fit with the second gear 704, so that the kettle body 3 always remains sealed, and will always be fitted with the first gear 703 when the second gear 704 is raised or lowered, thereby ensuring the stirring effect in the device.

[0029] In this embodiment, the lifting assembly 8 includes a bearing 801 installed on the outside of the connecting rod 9, a connecting ring 802 is fixedly provided on the outside of the bearing 801, a connecting plate 803 is fixedly connected to the connecting ring 802, and a first electric push rod 804 is installed between the kettle body 3 and the connecting plate 803. When the first electric push rod 804 is extended or shortened, it will drive the connecting plate 803, the connecting ring 802 and the bearing 801 to move up and down, thereby adjusting the position of the connecting rod 9, so as to adjust the cleaning height when cleaning the inner wall of the device later.

[0030] In this embodiment, there is a gap between the connecting ring 802 and the second gear 704, and the connecting rod 9 forms a lifting structure with the kettle body 3 through the first electric push rod 804 and the bearing 801. The connecting rod 9 forms a rotating structure with the first mounting block 25 through the first gear 703 and the second gear 704. Through the rotating structure on the device, the connecting rod 9 can realize the function of stirring or cleaning during the rotation process. The first electric push rod 804 can adjust the position of the connecting rod 9 in the kettle body 3 without affecting the rotation of the connecting rod 9. Through the lifting structure on the device, the device can clean or stir different positions of the inner wall of the kettle body 3.

[0031] In this embodiment, two adjacent chain plates 15 are rotatably connected, the fixed blocks 14 are evenly spaced on the slide plate 13, the swivel 17 forms a first sliding structure between the slide plate 13, the chain plate 15 and the connecting shell 19, and the swivel 17 and the movable plate 18 are rotatably connected. Through the first sliding structure on the device, the swivel 17 and the movable plate 18 can slide when the slide plate 13 is raised or lowered, so as to subsequently adjust the stirring range, thereby enhancing the convenience of the device when used.

[0032] In this embodiment, an opening 20 is provided on the movable plate 18, and a protrusion 21 is provided in the opening 20. The protrusion 21 is fixedly connected to the connecting shell 19. The movable plate 18 forms a second sliding structure with the connecting shell 19 through the protrusion 21 and the opening 20. The second sliding structure on the device enables the movable plate 18 to be stably sliding on the sliding rod in the connecting shell 19, and the protrusion 21 and the opening 20 ensure that the movable plate 18 will not detach from the connecting shell 19.

[0033] In this embodiment, the movable plate 18, the connecting shell 19 and the stirring plate 22 are evenly distributed along the circumference of the connecting rod 9 to ensure the stirring effect of the device. The stirring plate 22 forms a telescopic structure between the movable plate 18 and the connecting shell 19. A sealing sleeve 23 is fixedly connected to the outer side of the connecting rod 9. The sealing sleeve 23 and the kettle body 3 are slidably connected. The stirring plate 22 can extend itself through the telescopic structure on the device, thereby adjusting the stirring range of the device, or using the stirring plate 22 as a scraper.

[0034] In this embodiment, a cavity 32 is provided on the rubber connecting ring 29, and the cavity 32 is annular. A groove 31 for docking with the rotating block 30 is provided on the inner plate 28. The rotating block 30 is made of rubber material, and the rotating blocks 30 are symmetrically distributed on both sides of the rubber connecting ring 29. The rubber connecting ring 29 can be turned over for use. The rubber connecting ring 29 is rotated by the groove 31 and the rotating block 30. After turning over, the cavity 32 can tighten the rubber connecting ring 29, so that the device can remain stable when turning over for filtering.

[0035] It should be noted that the present invention is a self-cleaning reactor for ultrapure phosphine processing. First, a certain amount of water, yellow phosphorus, and lime milk are added to the reactor body 3 in sequence. Three reactor bodies 3 are used in parallel to ensure that at least one reactor body 3 is in a feeding production state; a certain amount of alkali solution is added dropwise to the reactor; and the reaction pressure and reaction temperature are maintained. Figure 1-Figure 4 As shown, the support seat 1 and the support rod 2 are used to support the kettle body 3, the electric heating tube 6 outside the kettle body 3 is used to heat the phosphine raw material in the kettle, and the phosphine raw material can be stirred and mixed when the heating is completed. The bracket 701 is used to support the motor 702, and the motor 702 on the driving component 7 drives the first gear 703 to rotate, thereby driving the second gear 704 and the connecting rod 9 to rotate. When the connecting rod 9 rotates, it can fully stir the mixed phosphine raw material in the device through the movable plate 18, the connecting shell 19 and the stirring plate 22. Since the first gear 703 and the kettle body 3 are rotatably connected, the gear ring 705 can maintain a fit state with the second gear 704. When the second gear 704 rotates, the gear ring 705 is driven to rotate, and when the second gear 704 is raised or lowered, it will always be in fit with the first gear 703, so that the top of the kettle body 3 remains sealed. Since the side of the top cover 10 close to the central axis of the kettle body 3 is made of rubber, it can ensure that the kettle body 3 remains sealed after the top cover 10 is closed. The rubber part of the top cover 10 allows the cover plate 5 to remain in a compressed state, and it will automatically open when the air pressure in the kettle body 3 is too high. Fig. 9 As shown, the activated carbon filter plate 33 can filter the raw materials flowing up and down for multiple times, and the activated carbon filter plate 33 can be turned over or cleaned later by the rotating block 30. The rubber connecting ring 29 keeps the activated carbon filter plate 33 on the device pressed and fixed after turning over. The rubber connecting ring 29 is rotated by the groove 31 and the rotating block 30, and the rubber connecting ring 29 can be turned over for use. After turning over, the air pressure in the cavity 32 can tighten the rubber connecting ring 29, so that the device remains stable when turning over for filtering.

[0036] like Figure 2-Figure 8As shown, the device can switch the stirring plate 22 to a scraper for cleaning the inner wall of the kettle body 3. By shortening the second electric push rod 24, the slide plate 13 is pulled downward, and the slide plate 13 drives the fixed blocks 14 at multiple positions to move downward. The fixed blocks 14 push each group of chain plates 15 downward to move downward. When the chain plates 15 move downward, they will push the swivel 17 laterally under the guidance of the guide plate 16. The swivel 17 pushes the movable plate 18 to slide in the connecting shell 19, so that the stirring plate 22 extends outward, so as to extend the stirring range of the device later, or switch the stirring plate 22 to a scraper to clean the inner wall of the kettle body 3. Since the top of the second electric push rod 24 is rotatably connected to the slide plate 13, when the slide plate 13 rotates with the connecting rod 9, the second electric push rod 24 can remain stationary, and the connecting rod 9 will rotate on the first mounting block 25. During the cleaning process, by extending or shortening the first electric push rod 804, the connecting plate 803, the connecting ring 802 and the bearing 801 are driven to move up and down, thereby adjusting the height of the connecting rod 9 and the stirring plates 22 around it, so as to adjust the cleaning height when cleaning the inner wall of the device later. When adjusting the cleaning height, the second mounting block 26 will slide in the guide cylinder 27, thereby realizing the support function for the bottom of the connecting rod 9.

[0037] Although the present invention has been described above with reference to the embodiments, various modifications may be made thereto and parts thereof may be replaced by equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention may be used in combination with each other in any manner, and the fact that these combinations are not exhaustively described in this specification is only for the sake of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A self-cleaning reactor for processing ultrapure phosphine, comprising a support base (1), characterized in that: A support rod (2) is welded and installed on the support seat (1), a kettle body (3) is welded and installed above the support rod (2), a discharge pipe (4) is connected to the kettle body (3), a cover plate (5) is rotatably installed on the discharge pipe (4), an electric heating cylinder (6) is installed on the outer side of the kettle body (3), a driving assembly (7) and a top cover (10) are installed on the top of the kettle body (3), the top cover (10) and the kettle body (3) are hingedly connected, a connecting handle (11) is fixedly connected to the top cover (10), a lifting assembly (8) is installed on the driving assembly (7), a connecting rod (9) is installed on the lifting assembly (8) and the driving assembly (7), and the connecting rod (9) An inner groove (12) is provided inside, a slide plate (13) is slidably installed in the inner groove (12), a fixed block (14) is welded on the slide plate (13), a chain plate (15) is rotatably installed on the fixed block (14), a connecting shell (19) is fixedly provided around the connecting rod (9), a movable plate (18) is slidably installed in the connecting shell (19), a rotating ring (17) is installed on the movable plate (18), the rotating ring (17) and the chain plate (15) closest to the movable plate (18) are rotatably connected, a guide plate (16) for guiding the chain plate (15) is fixedly connected to the inner wall of the inner groove (12), and a stirring plate (22) is fixedly provided on the movable plate (18); A first mounting block (25) is rotatably disposed at the bottom of the connecting rod (9), a second mounting block (26) is fixedly connected below the first mounting block (25), a second electric push rod (24) is fixedly disposed inside the first mounting block (25), and the top of the second electric push rod (24) is rotatably connected to the slide plate (13); An inner plate (28) is fixedly arranged inside the kettle body (3), a rubber connecting ring (29) is mounted on the inner plate (28), a rotating block (30) is mounted on the rubber connecting ring (29), and an activated carbon filter plate (33) is fixedly arranged on the rotating block (30).

2. The self-cleaning reactor for processing ultrapure phosphine according to claim 1, characterized in that: The support seat (1), the support rod (2) and the kettle body (3) are fixedly connected to form an integral structure; the central axes of the support seat (1), the electric heating tube (6) and the kettle body (3) are collinear; the side of the top cover (10) close to the central axis of the kettle body (3) is made of rubber material; a guide tube (27) is fitted on the outer side of the second mounting block (26); and the guide tube (27) and the support seat (1) are fixedly connected.

3. The self-cleaning reactor for processing ultrapure phosphine according to claim 1, characterized in that: The driving assembly (7) comprises a bracket (701) fixedly connected to the kettle body (3); a motor (702) is fixedly mounted on the bracket (701); a first gear (703) is fixedly connected to an output shaft of the motor (702); a second gear (704) is meshingly connected to a side surface of the first gear (703); and the second gear (704) and the connecting rod (9) are fixedly connected.

4. The self-cleaning reactor for processing ultrapure phosphine according to claim 3, characterized in that: A toothed ring (705) is fitted on the outer side of the second gear (704); the toothed ring (705) and the kettle body (3) are rotatably connected; the height of the toothed ring (705) is equal to the thickness of the kettle body (3); the height of the second gear (704) is greater than the height of the first gear (703); and the first gear (703) and the kettle body (3) are rotatably connected.

5. The self-cleaning reactor for processing ultrapure phosphine according to claim 3, characterized in that: The lifting assembly (8) comprises a bearing (801) mounted on the outside of a connecting rod (9); a connecting ring (802) is fixedly provided on the outside of the bearing (801); a connecting plate (803) is fixedly connected to the connecting ring (802); and a first electric push rod (804) is mounted between the kettle body (3) and the connecting plate (803).

6. A self-cleaning reactor for processing ultrapure phosphine according to claim 5, characterized in that: There is a gap between the connecting ring (802) and the second gear (704); the connecting rod (9) forms a lifting structure with the kettle body (3) through the first electric push rod (804) and the bearing (801); and the connecting rod (9) forms a rotating structure with the first mounting block (25) through the first gear (703) and the second gear (704).

7. The self-cleaning reactor for processing ultrapure phosphine according to claim 1, characterized in that: Two adjacent chain plates (15) are rotatably connected, the fixed blocks (14) are evenly spaced on the slide plate (13), the swivel (17) forms a first sliding structure between the slide plate (13) and the chain plates (15) and the connecting shell (19), and the swivel (17) and the movable plate (18) are rotatably connected.

8. The self-cleaning reactor for processing ultrapure phosphine according to claim 7, characterized in that: The movable plate (18) is provided with an opening (20), a protrusion (21) is provided in the opening (20), the protrusion (21) is fixedly connected to the connecting shell (19), and the movable plate (18) forms a second sliding structure with the connecting shell (19) via the protrusion (21) and the opening (20).

9. A self-cleaning reactor for processing ultrapure phosphine according to claim 8, characterized in that: The movable plate (18), the connecting shell (19) and the stirring plate (22) are uniformly arranged along the circumference of the connecting rod (9); the stirring plate (22) forms a telescopic structure through the movable plate (18) and the connecting shell (19); a sealing sleeve (23) is fixedly connected to the outer side of the connecting rod (9); and the sealing sleeve (23) and the kettle body (3) are slidably connected.

10. The self-cleaning reactor for processing ultrapure phosphine according to claim 1, characterized in that: The rubber connecting ring (29) is provided with a cavity (32) which is annular. The inner plate (28) is provided with a groove (31) for docking with the rotating block (30). The rotating block (30) is made of rubber. The rotating blocks (30) are symmetrically distributed on both sides of the rubber connecting ring (29).

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