Dynamic laser beam splitting method, system and equipment and storage medium

By performing phase modulation and phase hologram generation of the laser output beam, dynamic beam splitting and shaping of the laser beam is achieved, solving the problems of complex lens installation and adjustment in the prior art and the inability to adjust the beam splitting spacing in real time, and realizing dynamic regulation of multi-beam arrays.

CN119703339AActive Publication Date: 2025-03-28XIAN MICROMACH TECH CO LTD
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Patent Information

Application Number
CN202510057807.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-01-14
Publication Date
2025-03-28
Estimated Expiration
2045-01-14

AI Technical Summary

Technical Problem

In the existing laser beam splitting and shaping technology, lens assembly and adjustment are complex, debugging is difficult, spacing accuracy is difficult, and beam splitting spacing cannot be adjusted in real time, making it difficult to meet the application needs of dynamic regulation.

Method used

By phase modulating the laser output beam, a beam splitting phase is generated, and a phase hologram is generated based on the beam splitting phase, the laser output beam is divided to generate a multi-beam array. Use weighting functions to regulate the energy distribution of each beam of light in a multi-beam array to achieve dynamic real-time regulation.

Benefits of technology

Dynamic regulation of the number, position and energy distribution of multi-beam arrays is realized, and the application needs of dynamic regulation are met without the need for complex beam splitters.

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Abstract

The invention relates to a laser beam dynamic splitting method, system and device and a storage medium, and belongs to the technical field of laser processing, in the method, a beam splitting phase is obtained through phase modulation, and a phase hologram is generated based on the beam splitting phase, so that beams output by a laser are split, and a multi-beam array is generated; in the process of modulating the multi-beam array, beam splitting phases meeting quantity and position distribution are obtained through loop iteration, and the energy distribution of each beam in the multi-beam array is regulated and controlled by using a weighting function, so that the quantity, position and energy distribution of the generated multi-beam array are all adjustable; dynamic real-time regulation and control can be carried out according to actual needs without the aid of a complex beam splitter group, and the method has wide application applicability.
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Description

Technical Field

[0001] The present invention belongs to the technical field of laser processing, and in particular relates to a laser beam dynamic splitting method, system, equipment and storage medium. Background Art

[0002] Laser technology is a technology that uses high-energy-density laser beams to process materials. It is widely used in manufacturing, medical treatment, scientific research and other fields. Laser beam shaping is an important part of laser technology, which is used to control the shape, quantity and energy distribution of laser beams to meet different application requirements. Figure 1 As shown, the existing laser beam splitting and shaping technology is realized by combining a shaping mirror group and a beam splitting mirror group. The incident light speed is first shaped by the shaping mirror group, and then the beam is split by the beam splitting mirror group. However, this solution is complicated in lens assembly and adjustment, and requires multiple groups of lenses to cooperate in debugging, which makes debugging difficult and the spacing accuracy difficult to guarantee. In addition, due to the use of a complex combination of mirror groups, the spacing of the split beams cannot be adjusted in real time, resulting in a single beam spacing and energy distribution, which is difficult to meet some application requirements that require dynamic regulation. Therefore, a laser beam dynamic splitting method, system, device and storage medium are needed. Summary of the invention

[0003] In order to solve the above problems existing in the prior art, the present invention provides a laser beam dynamic splitting method, system, device and storage medium. The technical problem to be solved by the present invention is achieved through the following technical solutions:

[0004] The present invention provides a laser beam dynamic splitting method, comprising:

[0005] Step 1: obtaining a laser actual amplitude function according to a laser output beam mode, and obtaining a first incident beam complex amplitude function according to the laser actual amplitude function;

[0006] Step 2: performing a positive Fourier transform on the complex amplitude function of the first incident light beam to obtain a first focal plane complex amplitude function, wherein the actual amplitude function of the laser is subjected to a positive Fourier transform to obtain an actual amplitude function of the focal plane;

[0007] Step 3: establishing a light intensity error index function according to the focal plane actual amplitude function, and determining the light intensity error index; when the function value of the light intensity error index function is less than the light intensity error index, sequentially executing step 4; when the function value of the light intensity error index function is greater than or equal to the light intensity error index, jumping to execute step 7;

[0008] Step 4: Obtain a focal plane target beam amplitude function according to the required light intensity and position distribution of the multi-beam array, and use the focal plane target beam amplitude function and a weight function to replace the focal plane actual amplitude function to obtain a second focal plane complex amplitude function;

[0009] Step 5: performing an inverse Fourier transform on the second focal plane complex amplitude function to obtain a second incident light beam complex amplitude function;

[0010] Step 6: using the actual amplitude function of the laser to replace the focal plane target beam amplitude function and the weight function in the second incident beam complex amplitude function after inverse Fourier transformation, to obtain a third incident beam complex amplitude function to replace the first incident beam complex amplitude function, and jump to step 2;

[0011] Step 7: Extract the phase of the complex amplitude function of the first incident light beam to obtain the splitting phase, generate a phase hologram according to the splitting phase, and split the laser output beam according to the phase hologram to obtain a multi-beam array.

[0012] In one embodiment of the present invention, the expression of the first incident light beam amplitude function A is:

[0013] A=A(x,y)*exp(i*phase 2 );

[0014] Where A is the complex amplitude function of the first incident beam; A(x,y) is the actual amplitude function of the laser; x is the abscissa of the coordinate system on the object plane; y is the ordinate of the coordinate system on the object plane; exp is the exponential function with the natural constant e as the base; i is an imaginary number; phase 2 is the phase of the incident light beam.

[0015] In one embodiment of the present invention, the expression of the first focal plane complex amplitude function B is:

[0016] B=B(x 1 ,y 1 )*exp(i*phase 1 );

[0017] Where B is the complex amplitude function of the first focal plane; B(x 1 ,y 1 ) is the actual amplitude function of the focal plane; x 1 is the horizontal coordinate of the coordinate system on the focal plane; 1 is the ordinate of the coordinate system on the focal plane; phase 1 is the phase of the beam at the focal plane.

[0018] In one embodiment of the present invention, the light intensity error index β is obtained through experiments according to the consistency requirements of actual processing;

[0019] The expression of the light intensity error index function is:

[0020]

[0021] Among them, max is the maximum value function and min is the minimum value function.

[0022] In one embodiment of the present invention, the second focal plane complex amplitude function B 1 The expression is:

[0023] B 1 =B design (x 1 ,y 1 )*ω(x 1 ,y 1 )*exp(i*phase 1 );

[0024] B 1 is the complex amplitude function of the second focal plane; B design (x 1 ,y 1 ) is the focal plane target beam amplitude function; ω(x 1 ,y 1 ) is the weight function, and its expression is:

[0025]

[0026] Wherein, the weight function ω(x 1 ,y 1 ) is used to enhance the focal plane actual amplitude function B(x 1 ,y 1 ) is below the focal plane target beam amplitude function B design (x 1 ,y 1 ) and weaken the actual amplitude function B(x 1 ,y 1 ) is below the focal plane target beam amplitude function B design (x 1 ,y 1 ) amplitude.

[0027] In one embodiment of the present invention, the complex amplitude function A of the second incident light beam is 1 The expression is:

[0028] A 1 =A 1 (x,y)*exp(i*phase 2 );

[0029] Among them, A 1 is the complex amplitude function of the second incident beam; A 1(x, y) is the focal plane target beam amplitude function B design (x 1 ,y 1 ) and the weight function ω(x 1 ,y 1 ) is the amplitude function obtained after inverse Fourier transformation.

[0030] In one embodiment of the present invention, the complex amplitude function A of the third incident light beam is 2 The expression is:

[0031] A 2 =A(x,y)*exp(i*phase 2 );

[0032] Among them, A 2 is the complex amplitude function of the third incident light beam.

[0033] In one embodiment of the present invention, the step 7 further includes:

[0034] Step 8: Generate a shaping phase according to the required beam shape and size, and add the shaping phase to the beam splitting phase to obtain a beam splitting shaping phase, generate a phase hologram according to the beam splitting shaping phase, and split and shape the laser output beam according to the phase hologram to obtain a multi-beam shaping array; wherein the beam splitting phase is used to control the number and position of the beam; and the shaping phase is used to control the shape and size of the beam.

[0035] The present invention also provides a laser beam dynamic splitting system, comprising: an output beam mode acquisition module, a focal plane transformation module, a light intensity error judgment module, a target beam balance module, an object plane transformation module, an actual amplitude function conversion module, a beam splitting phase acquisition module, a shaping phase acquisition module and a beam array generation module; wherein,

[0036] The output beam mode acquisition module is used to acquire the actual amplitude function of the laser according to the output beam mode of the laser, and obtain the complex amplitude function of the first incident beam according to the actual amplitude function of the laser;

[0037] The focal plane transformation module is used to perform a positive Fourier transform on the complex amplitude function of the first incident light beam to obtain a first focal plane complex amplitude function, wherein the actual amplitude function of the laser is subjected to a positive Fourier transform to obtain an actual amplitude function of the focal plane;

[0038] The light intensity error judgment module is used to establish a light intensity error index function according to the actual amplitude function of the focal plane, and determine the light intensity error index;

[0039] The target beam balancing module is used to obtain a focal plane target beam amplitude function according to the required light intensity and position distribution of the multi-beam array, and use the focal plane target beam amplitude function and a weight function to replace the focal plane actual amplitude function to obtain a second focal plane complex amplitude function;

[0040] The object plane transformation module is used to perform an inverse Fourier transform on the second focal plane complex amplitude function to obtain a second incident light beam complex amplitude function;

[0041] The actual amplitude function conversion module is used to use the laser actual amplitude function to replace the focal plane target beam amplitude function and the weight function in the second incident beam complex amplitude function after inverse Fourier transformation, so as to obtain a third incident beam complex amplitude function to replace the first incident beam complex amplitude function;

[0042] The beam splitting phase acquisition module is used to extract the phase of the complex amplitude function of the first incident light beam to obtain the beam splitting phase, generate a phase hologram according to the beam splitting phase, and split the laser output beam according to the phase hologram to obtain a multi-beam array; the beam splitting phase is used to control the number and position of the light beams;

[0043] The shaping phase acquisition module is used to obtain the shaping phase according to the required beam shape and size; the shaping phase is used to control the shape and size of the beam;

[0044] The beam array generation module is used to add the shaping phase to the beam splitting phase to obtain the beam splitting shaping phase; the beam array generation module is also used to generate a phase hologram according to the beam splitting shaping phase, and to split and shape the laser output beam according to the phase hologram to obtain a multi-beam shaping array.

[0045] The present invention also provides an electronic device, comprising: a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the above-mentioned laser beam dynamic splitting method when executing the computer program.

[0046] The present invention also provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the above-mentioned laser beam dynamic splitting method is implemented.

[0047] Compared with the prior art, the present invention has the following beneficial effects:

[0048] The present invention obtains the splitting phase by modulating the phase, and generates a phase hologram based on the splitting phase, thereby splitting the laser output light beam to generate a multi-beam array; in the process of modulating the multi-beam array, the splitting phase that satisfies the quantity and position distribution is obtained through cyclic iteration, and the weight function is used to control the energy distribution of each beam in the multi-beam array, so that the quantity, position and energy distribution of the generated multi-beam array are all adjustable, and dynamic real-time control can be performed according to actual needs without the aid of a complex beam splitter group.

[0049] The present invention generates a shaping phase and a beam splitting phase, adds the shaping phase to the beam splitting phase to obtain a beam splitting shaping phase, generates a phase hologram according to the beam splitting shaping phase, and splits and shapes the laser output beam according to the phase hologram to obtain a multi-beam shaping array. The shaping based on phase modulation is combined with beam splitting to realize the function of beam splitting shaping, and the number of beam splitting, spacing and spot shaping shape can be dynamically adjusted, which has wide application applicability.

[0050] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following specifically cites a preferred embodiment and describes it in detail with the accompanying drawings as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Figure 1 It is a light path diagram of an existing laser beam splitting and shaping device;

[0052] Figure 2 is a flow chart of a laser beam dynamic splitting method provided by an embodiment of the present invention;

[0053] Figure 3 is a workflow diagram of a laser beam dynamic splitting method provided by an embodiment of the present invention;

[0054] Figure 4 is a schematic structural diagram of a laser beam dynamic splitting system provided by an embodiment of the present invention;

[0055] Figure 5 is a schematic diagram of the optical path structure of a laser beam dynamic splitting system provided by an embodiment of the present invention;

[0056] Figure 6a This is a rendering of a 1*3 circular beam array provided by an embodiment of the present invention;

[0057] Figure 6b This is a rendering of a 1*3 square beam array provided by an embodiment of the present invention;

[0058] Figure 6cThis is a rendering of a 3*3 circular beam array provided by an embodiment of the present invention;

[0059] Figure 6d This is a rendering of a 3*3 square beam array provided by an embodiment of the present invention;

[0060] Figure 7 It is a structural schematic diagram of an electronic device provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0061] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined purpose of the invention, a laser beam dynamic splitting method, system, device and storage medium proposed in accordance with the present invention are described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0062] The above and other technical contents, features and effects of the present invention are clearly presented in the following detailed description of the specific implementation modes in conjunction with the accompanying drawings. Through the description of the specific implementation modes, the technical means and effects adopted by the present invention to achieve the predetermined purpose can be more deeply and specifically understood. However, the attached drawings are only for reference and explanation purposes and are not used to limit the technical solutions of the present invention.

[0063] Embodiment 1

[0064] like Figure 1 As shown, Figure 1 This is an optical path diagram of an existing laser beam splitting and shaping device. The existing laser beam splitting and shaping technology is achieved by combining a shaping lens group and a beam splitting lens group, which is difficult to meet the application requirements of dynamic regulation. In view of this, this embodiment provides a laser beam dynamic splitting method.

[0065] like Figure 2 and Figure 3 As shown, Figure 2 is a flow chart of a laser beam dynamic splitting method provided by an embodiment of the present invention; Figure 3 It is a working flow chart of a laser beam dynamic splitting method provided by an embodiment of the present invention.

[0066] The laser beam dynamic splitting method of this embodiment includes:

[0067] Step 1: Obtain the actual amplitude function of the laser according to the laser output beam mode, and obtain the complex amplitude function of the first incident light beam according to the actual amplitude function of the laser.

[0068] It can be understood that the laser output beam modes generally include: basic mode and advanced mode, and each mode amplitude function has its beam expression. Since the overall complex amplitude function of the incident light beam is subjected to a fast Fourier transform (FFT) in this embodiment, the difference in beam expressions does not affect the specific implementation of the method; and the beam expressions of different laser output beam modes can also be implemented by referring to relevant existing technologies, so they will not be described in detail.

[0069] Specifically, the expression of the first incident light beam amplitude function A is:

[0070] A=A(x,y)*exp(i*phase 2 ) (1);

[0071] Where A is the complex amplitude function of the first incident beam; A(x,y) is the actual amplitude function of the laser; x is the abscissa of the coordinate system on the object plane; y is the ordinate of the coordinate system on the object plane; exp is the exponential function with the natural constant e as the base; i is an imaginary number; phase 2 is the phase of the incident light beam, that is, the phase of the complex amplitude function A of the first incident light beam.

[0072] Furthermore, the phase of the incident beam 2 In the subsequent iterative process, in the first iterative process, that is, in the first incident beam amplitude function A established based on the laser output beam mode, a random value can be taken, and its expression is:

[0073] phase 2 =rand(m,n) (2);

[0074] Among them, rand is a random number function; (m,n) is the resolution of the modulator target surface, such as 1980*1024.

[0075] Step 2: Perform a positive Fourier transform on the complex amplitude function of the first incident light beam to obtain a first focal plane complex amplitude function, wherein the actual amplitude function of the laser is subjected to a positive Fourier transform to obtain an actual amplitude function of the focal plane.

[0076] Specifically, the expression of the complex amplitude function B of the first focal plane is:

[0077] B=B(x 1 ,y 1 )*exp(i*phase 1 ) (3);

[0078] Where B is the complex amplitude function of the first focal plane; B(x 1 ,y 1 ) is the actual amplitude function of the focal plane; x1 is the horizontal coordinate of the coordinate system on the focal plane; 1 is the ordinate of the coordinate system on the focal plane; phase 1 is the phase of the light beam on the focal plane, that is, the phase of the complex amplitude function B of the first focal plane.

[0079] Step 3: Establish a light intensity error index function according to the actual amplitude function of the focal plane, and determine the light intensity error index; when the function value of the light intensity error index function is less than the light intensity error index, execute step 4 sequentially; when the function value of the light intensity error index function is greater than or equal to the light intensity error index, jump to step 7.

[0080] like Figure 6a As shown, Figure 6a This is a rendering of a 1*3 circular beam array provided by an embodiment of the present invention.

[0081] For example, the light intensity error index β is obtained through experiments based on the consistency requirements of actual processing. When the experiment outputs a 1*3 circular beam array, it is required that the line width consistency is above 90% when the three beams are used for marking. However, the light intensity error of the three beams (indicating the consistency of the light intensity) is not necessarily 90%. Therefore, it is necessary to use a single beam of light to control the laser to output different light intensities. For example, when the function value of the light intensity error index function is within 95%, the marking consistency can be within 90%. In this case, the light intensity error index β is set to 95%.

[0082] Specifically, the physical meaning of the light intensity error index function is the actual amplitude function B(x 1 ,y 1 ) is the difference between the strongest point and the weakest point in the amplitude divided by the sum of the strongest point and the weakest point. The expression is:

[0083]

[0084] Among them, max is the maximum value function and min is the minimum value function.

[0085] Furthermore, when When, it represents the actual amplitude function B(x 1 ,y 1 ) and the focal plane target beam amplitude function B design (x 1 ,y 1 ), so the phase of the complex amplitude function A of the first incident light beam can be directly extracted to obtain the splitting phase, a phase hologram is generated according to the splitting phase, and the laser output beam is split according to the phase hologram to obtain a multi-beam array. In other words, the core purpose of the laser beam dynamic splitting method of this embodiment is to find the phase phase of the complex amplitude function A of the first incident light beam. 2, at this phase 2 Under this condition, the required multi-beam array can be obtained at the focal plane after focusing by the field lens.

[0086] When When , it means that it is necessary to iterate and continue to find the phase phase of the complex amplitude function A of the first incident light beam. 2 , proceed to step 4.

[0087] Step 4: Obtain the focal plane target beam amplitude function according to the required light intensity and position distribution of the multi-beam array, and use the focal plane target beam amplitude function and the weight function to replace the focal plane actual amplitude function to obtain the second focal plane complex amplitude function.

[0088] Specifically, the second focal plane complex amplitude function B 1 The expression is:

[0089] B 1 =B design (x 1 ,y 1 )*ω(x 1 ,y 1 )*exp(i*phase 1 ) (5);

[0090] Among them, B 1 is the complex amplitude function of the second focal plane; B design (x 1 ,y 1 ) is the focal plane target beam amplitude function;

[0091] ω(x 1 ,y 1 ) is the weight function, and its expression is:

[0092]

[0093] Among them, the weight function ω(x 1 ,y 1 ) is used to enhance the actual amplitude function B(x 1 ,y 1 ) Below the focal plane target beam amplitude function B design (x 1 ,y 1 ) and weaken the actual amplitude function B(x 1 ,y 1 ) Below the focal plane target beam amplitude function B design (x 1 ,y 1 ) amplitude.

[0094] The principle is that the core purpose of the laser beam dynamic splitting method of this embodiment is to find the phase phase of the complex amplitude function A of the first incident light beam. 2 , the complex amplitude function A of the first incident beam is in phase 2 Under the condition of focusing by field lens, the target light intensity (i.e. the number of split beams and the position of each beam) can be obtained at the focal plane. The amplitude function reflects the actual light intensity. At this time, the phase of the light beam on the focal plane is 1 No processing is required (remains unchanged). Similarly, the actual laser amplitude function A(x,y) needs to remain unchanged in the object plane. Therefore, the focal plane target beam amplitude function B is used design (x 1 ,y 1 ) instead of the actual amplitude function B(x 1 ,y 1 ), and introduce the weight function ω(x 1 ,y 1 ) Enhanced focal plane actual amplitude function B(x 1 ,y 1 ) Below the focal plane target beam amplitude function B design (x 1 ,y 1 ) and weaken the actual amplitude function B(x 1 ,y 1 ) Below the focal plane target beam amplitude function B design (x 1 ,y 1 ) amplitude.

[0095] like Figure 6b As shown, Figure 6b This is a rendering of a 1*3 square beam array provided by an embodiment of the present invention.

[0096] For example, when outputting a 1*3 square beam array, the focal plane target beam amplitude function B design (x 1 ,y 1 ) is 1:1:1 in intensity ratio at the three target points, but the actual amplitude function B(x 1 ,y 1 ) is 1:0.5:1, then we need to use the weight function ω(x 1 ,y 1 ) multiplies the middle target point by a coefficient of 2, that is, 1:2:1, to obtain a new focal plane complex amplitude function (the second focal plane complex amplitude function B 1 ).

[0097] Step 5: Perform an inverse Fourier transform on the second focal plane complex amplitude function to obtain the second incident light beam complex amplitude function.

[0098] Specifically, the complex amplitude function A of the second incident beam is 1 The expression is:

[0099] A 1 =A 1 (x,y)*exp(i*phase 2 ) (7);

[0100] Among them, A 1 is the complex amplitude function of the second incident beam; A 1 (x,y) is the amplitude function B of the target beam in the focal plane design (x 1 ,y 1 ) and the weight function ω(x 1 ,y 1 ) is the amplitude function obtained after inverse Fourier transformation.

[0101] Step 6: Use the actual amplitude function of the laser to replace the focal plane target beam amplitude function and weight function after inverse Fourier transformation in the complex amplitude function of the second incident beam, obtain the complex amplitude function of the third incident beam to replace the complex amplitude function of the first incident beam, and jump to step 2.

[0102] Specifically, the actual amplitude function A(x, y) of the laser is used instead of the complex amplitude function A of the second incident beam. 1 The amplitude function A in 1 (x,y), while maintaining phase 2 The complex amplitude function A of the third incident beam is obtained by performing an inverse Fourier transform on the whole. 2 , whose expression is:

[0103] A 2 =A(x,y)*exp(i*phase 2 ) (8);

[0104] Among them, A 2 is the complex amplitude function of the third incident light beam.

[0105] Furthermore, the obtained complex amplitude function A of the third incident beam is 2 Substitute into step 2, perform a forward Fourier transform, and sequentially execute step 3, and make a judgment based on the light intensity error index β until the actual amplitude function B(x 1 ,y 1 ) and the focal plane target beam amplitude function B design (x 1 ,y 1) are close, that is, the judgment condition is met, and the phase can be extracted to obtain the beam splitting phase.

[0106] Step 7: Extract the phase of the complex amplitude function of the first incident light beam to obtain the splitting phase, generate a phase hologram according to the splitting phase, and split the laser output beam according to the phase hologram to obtain a multi-beam array.

[0107] The laser beam dynamic splitting method of the present invention obtains the splitting phase by modulating the phase, and generates a phase hologram based on the splitting phase, thereby splitting the laser output beam to generate a multi-beam array; in the process of modulating the multi-beam array, the splitting phase that satisfies the quantity and position distribution is obtained through cyclic iteration, and the weight function is used to control the energy distribution of each beam in the multi-beam array, so that the quantity, position and energy distribution of the generated multi-beam array are all adjustable, and dynamic real-time control can be performed according to actual needs without the aid of a complex beam splitter group.

[0108] In an optional embodiment, step 7 further includes:

[0109] Step 8: Generate a shaping phase according to the required beam shape and size, and add the shaping phase to the beam splitting phase to obtain a beam splitting shaping phase, generate a phase hologram according to the beam splitting shaping phase, and split and shape the laser output beam according to the phase hologram to obtain a multi-beam shaping array;

[0110] Among them, the beam splitting phase is used to control the number and position of the light beam; the shaping phase is used to control the shape and size of the light beam.

[0111] like Figures 6a to 6d As shown, Figure 6c This is a rendering of a 3*3 circular beam array provided by an embodiment of the present invention; Figure 6d This is a rendering of a 3*3 square beam array provided by an embodiment of the present invention.

[0112] For example, the expression for a circular (top hat) beam is:

[0113]

[0114] Among them, phase 3 ′ is the shaping phase of the circular flat-top beam; (γ, ρ) is the coordinate point of the polar coordinate system; R is the required size of the circular flat-top beam, that is, the size of the circular flat-top beam is controlled by R; w 0 is the incident beam waist radius; λ is the wavelength of the incident beam; f is the focal length of the field lens.

[0115] Similarly, the expression for a square (flat-top) beam is:

[0116]

[0117] Among them, phase 3 ″ is the phase of the square flat-top beam; erf is the error function in mathematics; t is the coordinate point, t = (x, y); L is the side length of the square spot.

[0118] The shape and size of the beam will be controlled by the phase 3 and the phase of the beam splitter used to control the number and position of the beam 2 Adding them together, we get the beam shaping phase phase, which is expressed as:

[0119] phase=phase 2 +phase 3 (11);

[0120] Among them, phase is the beam shaping phase; phase 2 is the beam splitting phase; phase 3 The shaping phase.

[0121] Then, a phase hologram is generated according to the phase of the beam splitting and shaping, and the phase of the laser output beam is changed according to the phase hologram to split and shape the beam. Finally, after focusing, a multi-beam shaping array is obtained. The effect diagram is as follows: Figures 6a to 6d shown.

[0122] The present invention generates a shaping phase and a beam splitting phase, adds the shaping phase to the beam splitting phase to obtain a beam splitting shaping phase, generates a phase hologram according to the beam splitting shaping phase, and splits and shapes the laser output beam according to the phase hologram to obtain a multi-beam shaping array. The shaping based on phase modulation is combined with beam splitting to realize the function of beam splitting shaping, and the number of beam splitting, spacing and spot shaping shape can be dynamically adjusted, which has wide application applicability.

[0123] Embodiment 2

[0124] like Figure 4 As shown, Figure 4 It is a structural schematic diagram of a laser beam dynamic splitting system provided by an embodiment of the present invention.

[0125] This embodiment provides a laser beam dynamic splitting system, including: an output beam mode acquisition module 100, a focal plane transformation module 200, a light intensity error judgment module 300, a target beam balance module 400, an object plane transformation module 500, an actual amplitude function conversion module 600, a beam splitting phase acquisition module 700, a shaping phase acquisition module 800 and a beam array generation module 900; wherein,

[0126] The output beam mode acquisition module 100 is used to acquire the actual amplitude function of the laser according to the output beam mode of the laser, and obtain the complex amplitude function of the first incident beam according to the actual amplitude function of the laser;

[0127] A focal plane transformation module 200 is used to perform a positive Fourier transform on the complex amplitude function of the first incident light beam to obtain a first focal plane complex amplitude function, wherein the actual amplitude function of the laser is subjected to a positive Fourier transform to obtain an actual amplitude function of the focal plane;

[0128] The light intensity error judgment module 300 is used to establish a light intensity error index function according to the actual amplitude function of the focal plane and determine the light intensity error index;

[0129] The target beam balancing module 400 is used to obtain a focal plane target beam amplitude function according to the required light intensity and position distribution of the multi-beam array, and use the focal plane target beam amplitude function and the weight function to replace the focal plane actual amplitude function to obtain a second focal plane complex amplitude function;

[0130] The object plane transformation module 500 is used to perform an inverse Fourier transform on the second focal plane complex amplitude function to obtain a second incident light beam complex amplitude function;

[0131] The actual amplitude function conversion module 600 is used to replace the focal plane target beam amplitude function and the weight function in the second incident beam complex amplitude function after inverse Fourier transformation with the laser actual amplitude function, so as to obtain a third incident beam complex amplitude function to replace the first incident beam complex amplitude function;

[0132] The beam splitting phase acquisition module 700 is used to extract the phase of the complex amplitude function of the first incident light beam to obtain the beam splitting phase, generate a phase hologram according to the beam splitting phase, and split the laser output beam according to the phase hologram to obtain a multi-beam array; the beam splitting phase is used to control the number and position of the light beams;

[0133] The shaping phase acquisition module 800 is used to obtain the shaping phase according to the required beam shape and size; the shaping phase is used to control the shape and size of the beam;

[0134] The beam array generation module 900 is used to add the shaping phase to the beam splitting phase to obtain the beam splitting shaping phase; the beam array generation module is also used to generate a phase hologram according to the beam splitting shaping phase, and to split and shape the laser output beam according to the phase hologram to obtain a multi-beam shaping array.

[0135] It is worth noting that by generating the shaping phase and the beam splitting phase, a multi-beam shaping array is obtained. There is no need to control complex beam splitting mirror groups or shaping mirror groups, thus realizing dynamic control of beam splitting and shaping, which has wide application applicability.

[0136] For example, the optical path structure of the laser beam dynamic splitting system of this embodiment is as follows: Figure 5 As shown, Figure 5 The diagram is a schematic diagram of the optical path structure of a laser beam dynamic splitting system provided in an embodiment of the present invention.

[0137] The optical path structure of the laser beam dynamic splitting system of this embodiment includes: a laser 1, a beam expander 2, a half-wave plate 3, a polarization beam splitter prism 4, a beam modulation module 8, a beam scanning system 9 and a focusing system 10;

[0138] Among them, the laser 1 is used to output a light beam; the beam expander 2 is arranged behind the laser 1, and is used to expand the diameter of the incident light beam; the half-wave plate 3 is arranged behind the beam expander 2, and is used to improve the polarization ratio of the horizontally polarized light in the incident light beam; the polarization beam splitter prism 4 is arranged behind the half-wave plate 3, and is used to filter out the vertically polarized light in the incident light beam to obtain a horizontally polarized light beam; the light beam modulation module 8 is arranged behind the polarization beam splitter prism 4, and is used to adopt the laser beam dynamic beam splitting method of embodiment 1 to phase modulate the horizontally polarized light beam to obtain a modulated multi-beam array; the light beam scanning system 9 is arranged behind the light beam modulation module 8, and is used to reflect and deflect the modulated multi-beam array so that the light beam enters the focusing system 10; the focusing system 10 is arranged behind the light beam scanning system 9, and is used to focus the output light beam onto the focal plane 11.

[0139] Exemplarily, the beam scanning system 9 is used to control the beam scanning trajectory, and the focusing system 10 is used for focusing and shaping.

[0140] Exemplarily, the beam scanning system 9 includes a scanning head, a galvanometer or a reflective mirror.

[0141] Exemplarily, the focusing system 10 includes a lens, a telecentric field lens or an objective lens.

[0142] In this embodiment, the light beam modulation module 8 includes: a liquid crystal light valve 5, a liquid crystal light valve drive control board 6 and a computer 7; wherein the liquid crystal light valve 5, the liquid crystal light valve drive control board 6 and the computer 7 are arranged in sequence; the computer 7 is used to adopt the laser beam dynamic splitting method of embodiment 1 to obtain the splitting phase and generate a phase hologram according to the splitting phase; the liquid crystal light valve drive control board 6 is used to display the phase hologram on the liquid crystal light valve 5 to form a phase diagram; the liquid crystal light valve 5 is arranged behind the polarization splitting prism 4 to phase modulate the horizontally polarized light beam through the phase diagram to obtain a multi-beam array.

[0143] Its working principle is that the laser 1 generates laser light and passes through the beam expander 2, and then the polarization ratio is adjusted through the half-wave plate 3 so that the horizontal polarized light (P light) in the laser beam accounts for the highest proportion, and the vertical polarized light (S light) is filtered out through the polarization beam splitter prism 4, so that the horizontally polarized light beam enters the beam modulation module 8. In the beam modulation module 8, the laser beam dynamic splitting method in the first embodiment is run based on the computer 7 to generate a beam shaping phase hologram, and the beam shaping phase hologram is displayed on the liquid crystal light valve 5 through the liquid crystal light valve driving control board 6, and a phase diagram is formed on the liquid crystal light valve 5. When the laser beam is irradiated on the phase diagram displayed on the liquid crystal light valve 5, a phase delay is generated to achieve shaping and splitting. Finally, the beam after shaping and splitting passes through the beam scanning system 9 and the focusing system 10 in turn, and a multi-beam shaping array is formed on the focal plane 11, as shown in FIG. Figures 6a to 6d shown.

[0144] Depend on Figures 6a to 6d , it can be seen that it can achieve better beam splitting and shaping effects.

[0145] It is worth noting that there is no need to first use a shaping lens group to shape the incident light beam and then split the incident laser beam through a beam splitting lens group after shaping. Instead, the phase diagram on the liquid crystal light valve 5 can be used to achieve beam splitting and shaping, so there is no need to use multiple sets of functional lenses for coordination and debugging. At the same time, through phase adjustment, the spatial position, number of beam splitting, shaping shape and energy distribution of the light beam can be adjusted to meet the needs of dynamic regulation. In other words, by using the beam modulation module 8 to modulate the light beam to generate a phase hologram, there is no need to set a lens group for phase modulation. Only the phase hologram needs to be adjusted to meet the application needs of regulation.

[0146] Embodiment 3

[0147] This embodiment provides an electronic device 01, including: a processor 011, a memory 012, and a computer program stored in the memory 012 and executable on the processor 011. When the processor 011 executes the computer program, the laser beam dynamic splitting method of the first embodiment is implemented.

[0148] like Figure 7 As shown, Figure 7 It is a structural schematic diagram of an electronic device provided by an embodiment of the present invention.

[0149] Exemplarily, the electronic device 01 may be in the form of a general computing device, for example, it may be a server device. The components of the electronic device 011 may include but are not limited to: at least one processor 011, at least one memory 012 and a bus 013. The bus 013 includes a data bus, an address bus and a control bus.

[0150] Exemplarily, the memory 012 may include a volatile memory, such as a random access memory (RAM) 0121 and / or a cache memory 0122 , and may further include a read-only memory (ROM) 0123 .

[0151] Exemplarily, the memory 012 may also include a program tool 0125 having a group (at least one) of program modules 0124 , wherein the program modules 0124 include but are not limited to: an operating system, one or more application programs, other program modules, and program data.

[0152] Exemplarily, the processor 011 executes various functional applications and data processing by running a computer program stored in the memory 012 , such as that in the first embodiment.

[0153] Exemplarily, the electronic device 01 may also communicate with one or more external devices 014 (e.g., a keyboard, a pointing device, etc.), and the communication may be performed through an input / output (I / O) interface 015; and, may also communicate with one or more networks (e.g., a local area network (LAN), a wide area network (WAN), and / or a public network) through a network adapter 016, and the network adapter 016 may also communicate with other modules through a bus 015.

[0154] It should be noted that Figure 7 The electronic device 01 is merely an example and should not bring any limitation to the functions and scope of use of the embodiments of the present invention.

[0155] Embodiment 4

[0156] This embodiment provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the laser beam dynamic splitting method of the first embodiment is implemented.

[0157] The readable storage medium may include but is not limited to: a portable disk, a hard disk, a random access memory, a read-only memory, an erasable programmable read-only memory, an optical storage device, a magnetic storage device or any suitable combination of the above.

[0158] In an optional embodiment, the present invention can also be implemented in the form of a program product, which includes program code. When the program product is run on a terminal device, the program code is used to enable the terminal device to execute the steps of the laser beam dynamic splitting method of embodiment 1.

[0159] Among them, the program code for executing the present invention can be written in any combination of one or more programming languages, and the program code can be executed completely on the user device, partially on the user device, as an independent software package, partially on the user device and partially on a remote device, or completely on the remote device.

[0160] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the term "include", "comprise" or any other variant is intended to cover non-exclusive inclusion, so that the article or device including a series of elements includes not only those elements, but also other elements that are not explicitly listed. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the article or device including the elements. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The orientation or position relationship indicated by "up", "down", "left", "right", etc. is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention.

[0161] The above contents are further detailed descriptions of the present invention in combination with specific preferred embodiments, and it cannot be determined that the specific implementation of the present invention is limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions or substitutions can be made without departing from the concept of the present invention, which should be regarded as falling within the protection scope of the present invention.

Claims

1. A laser beam dynamic splitting method, characterized in that: include: Step 1: obtaining a laser actual amplitude function according to a laser output beam mode, and obtaining a first incident beam complex amplitude function according to the laser actual amplitude function; Step 2: performing a positive Fourier transform on the complex amplitude function of the first incident light beam to obtain a first focal plane complex amplitude function, wherein the actual amplitude function of the laser is subjected to a positive Fourier transform to obtain an actual amplitude function of the focal plane; Step 3: establishing a light intensity error index function according to the focal plane actual amplitude function, and determining the light intensity error index; when the function value of the light intensity error index function is less than the light intensity error index, sequentially executing step 4; when the function value of the light intensity error index function is greater than or equal to the light intensity error index, jumping to execute step 7; Step 4: Obtain a focal plane target beam amplitude function according to the required light intensity and position distribution of the multi-beam array, and use the focal plane target beam amplitude function and a weight function to replace the focal plane actual amplitude function to obtain a second focal plane complex amplitude function; Step 5: performing an inverse Fourier transform on the second focal plane complex amplitude function to obtain a second incident light beam complex amplitude function; Step 6: using the actual amplitude function of the laser to replace the focal plane target beam amplitude function and the weight function in the second incident beam complex amplitude function after inverse Fourier transformation, to obtain a third incident beam complex amplitude function to replace the first incident beam complex amplitude function, and jump to step 2; Step 7: Extract the phase of the complex amplitude function of the first incident light beam to obtain the splitting phase, generate a phase hologram according to the splitting phase, and split the laser output beam according to the phase hologram to obtain a multi-beam array.

2. The laser beam dynamic splitting method according to claim 1, characterized in that: The expression of the first incident light beam amplitude function A is: A=A(x,y)*exp(i*phase2); Wherein, A is the complex amplitude function of the first incident light beam; A(x,y) is the actual amplitude function of the laser; x is the horizontal coordinate of the coordinate system on the object plane; y is the vertical coordinate of the coordinate system on the object plane; exp is the exponential function with the natural constant e as the base; i is an imaginary number; phase2 is the phase of the incident light beam.

3. The laser beam dynamic splitting method according to claim 1, characterized in that: The expression of the first focal plane complex amplitude function B is: B=B(x1,y1)*exp(i*phase1); Among them, B is the complex amplitude function of the first focal plane; B(x1,y1) is the actual amplitude function of the focal plane; x1 is the abscissa of the coordinate system on the focal plane; y1 is the ordinate of the coordinate system on the focal plane; phase1 is the phase of the light beam on the focal plane.

4. The laser beam dynamic splitting method according to claim 1, characterized in that: The light intensity error index β is obtained through experiments according to the consistency requirements of actual processing; The expression of the light intensity error index function is: Among them, max is the maximum value function and min is the minimum value function.

5. The laser beam dynamic splitting method according to claim 1, characterized in that: The expression of the second focal plane complex amplitude function B1 is: B1=B design (x1,y1)*ω(x1,y1)*exp(i*phase1); B1 is the complex amplitude function of the second focal plane; B design (x1, y1) is the amplitude function of the target beam in the focal plane; ω(x1, y1) is the weight function, and its expression is: The weight function ω(x1, y1) is used to enhance the actual amplitude function B(x1, y1) of the focal plane to be lower than the target beam amplitude function B of the focal plane. design (x1, y1), and weaken the actual amplitude function B(x1, y1) of the focal plane to be lower than the amplitude function B of the target beam of the focal plane design The amplitude of (x1,y1).

6. The laser beam dynamic splitting method according to claim 1, characterized in that: The expression of the complex amplitude function A1 of the second incident light beam is: A1=A1(x,y)*exp(i*phase2); A1 is the complex amplitude function of the second incident beam; A1(x, y) is the amplitude function B of the focal plane target beam design The amplitude function is obtained by inverse Fourier transforming (x1, y1) and the weight function ω(x1, y1). The expression of the complex amplitude function A2 of the third incident light beam is: A2=A(x,y)*exp(i*phase2); Wherein, A2 is the complex amplitude function of the third incident light beam.

7. The laser beam dynamic splitting method according to claim 1, characterized in that: The step 7 further includes: Step 8: obtaining a shaping phase according to the desired beam shape and size, and adding the shaping phase to the beam splitting phase to obtain a beam splitting shaping phase, generating a phase hologram according to the beam splitting shaping phase, and splitting and shaping the laser output beam according to the phase hologram to obtain a multi-beam shaping array; The beam splitting phase is used to control the quantity and position of the light beam; and the shaping phase is used to control the shape and size of the light beam.

8. A laser beam dynamic splitting system, characterized in that: include: Output beam mode acquisition module, focal plane transformation module, light intensity error judgment module, target beam balance module, object plane transformation module, actual amplitude function conversion module, beam splitting phase acquisition module, shaping phase acquisition module and beam array generation module; wherein, The output beam mode acquisition module is used to acquire the actual amplitude function of the laser according to the output beam mode of the laser, and obtain the complex amplitude function of the first incident beam according to the actual amplitude function of the laser; The focal plane transformation module is used to perform a positive Fourier transform on the complex amplitude function of the first incident light beam to obtain a first focal plane complex amplitude function, wherein the actual amplitude function of the laser is subjected to a positive Fourier transform to obtain an actual amplitude function of the focal plane; The light intensity error judgment module is used to establish a light intensity error index function according to the actual amplitude function of the focal plane, and determine the light intensity error index; The target beam balancing module is used to obtain a focal plane target beam amplitude function according to the required light intensity and position distribution of the multi-beam array, and use the focal plane target beam amplitude function and a weight function to replace the focal plane actual amplitude function to obtain a second focal plane complex amplitude function; The object plane transformation module is used to perform an inverse Fourier transform on the second focal plane complex amplitude function to obtain a second incident light beam complex amplitude function; The actual amplitude function conversion module is used to use the laser actual amplitude function to replace the focal plane target beam amplitude function and the weight function in the second incident beam complex amplitude function after inverse Fourier transformation, so as to obtain a third incident beam complex amplitude function to replace the first incident beam complex amplitude function; The beam splitting phase acquisition module is used to extract the phase of the complex amplitude function of the first incident light beam to obtain the beam splitting phase, generate a phase hologram according to the beam splitting phase, and split the laser output beam according to the phase hologram to obtain a multi-beam array; the beam splitting phase is used to control the number and position of the light beams; The shaping phase acquisition module is used to obtain the shaping phase according to the required beam shape and size; the shaping phase is used to control the shape and size of the beam; The beam array generation module is used to add the shaping phase to the beam splitting phase to obtain the beam splitting shaping phase; the beam array generation module is also used to generate a phase hologram according to the beam splitting shaping phase, and to split and shape the laser output beam according to the phase hologram to obtain a multi-beam shaping array.

9. An electronic device, characterized in that: include: A memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the laser beam dynamic splitting method according to any one of claims 1 to 7 when executing the computer program.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the laser beam dynamic splitting method according to any one of claims 1 to 7 is implemented.

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