Wafer transmission robot test system and method

Abstract

The invention discloses a wafer transmission robot testing system and method, and belongs to the field of transmission robot testing, the wafer transmission robot testing system comprises a touch screen, a PLC processor, a driver, a positioning detector and a manipulator body, the touch screen is a human-computer interaction interface, and can set operation parameters of a robot body, such as robot cycle index, joint movement speed and the like; according to the wafer transmission robot testing system, detection parameters can be input through a touch screen, and a detection result can be visualized or abnormal alarm reminding can be achieved. A use method of the wafer transmission robot testing system comprises the following steps that a robot body is disassembled, specifically, after a transmission robot breaks down, the robot body needs to be disassembled from equipment, and the robot body is taken down; the robot body is separated from the driver; the PLC processor is connected with the robot driver, and the driver is connected with the robot body; and installing a positioning detector. The system can be compatible with test systems of robots of different models, and the system has the function of detecting the position precision, abnormal sound or vibration and other abnormal phenomena of the manipulator.

Description

Technical Field

[0001] The present invention relates to the field of transfer robot testing, and in particular to a wafer transfer robot testing system and method. Background Art

[0002] In semiconductor processing factories, each device is equipped with a key transmission component - the transmission robot. The transmission robot has been transmitting wafers or chips at a high frequency, which is prone to downtime. The downtime of the transmission robot will cause the entire equipment to fail to operate normally, thereby affecting the processing efficiency of wafers or chips. Therefore, the transmission robot needs to be repaired as soon as possible to reduce downtime and improve equipment utilization.

[0003] During the robot maintenance process, the robot body and the driver are usually separated, and the driver is the core control component of the robot. In addition, the current manufacturers' drivers and robots are one-to-one, and the compatibility between them is poor. Without the driver, the robot's functional performance cannot be fully tested and verified. In addition, the existing test system has a relatively single test function. Summary of the invention

[0004] The purpose of the present invention is to provide a wafer transfer robot testing system and method to solve the problem that the current manufacturers' drivers and robots are one-to-one corresponding to each other and have poor compatibility with each other. Without the driver, the functional performance of the robot cannot be fully tested and verified. In addition, the existing test system has a relatively single test function.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a wafer transfer robot testing system, including a touch screen, a PLC processor, a driver, a positioning detector and a manipulator body.

[0006] As a further preferred embodiment of the present technical solution: the touch screen is a human-machine interaction interface, and the operating parameters of the robot body can be set, such as the number of robot cycles, joint movement speed, etc., and the detection parameters can be input through the touch screen, and the detection results can be visualized or abnormal alarm reminders can be issued;

[0007] As a further preferred embodiment of the present technical solution: the PLC processor is used to process and analyze the signal, issue a detection execution instruction according to the parameters set by the touch screen, and transmit the detection result to the touch screen for display through the touch screen;

[0008] As a further preferred embodiment of the present technical solution: the PLC processor and the touch screen, and the PLC processor and the driver communicate using the TCP / IP protocol to achieve signal interconnection.

[0009] As a further preferred embodiment of the present technical solution: a method for using a wafer transfer robot test system comprises the following steps:

[0010] S1. Disassemble the robot body: When the transmission robot fails, the robot body needs to be disassembled from the equipment. The robot body and the drive are separated;

[0011] S2, the PLC processor is connected to the robot driver, and the driver is connected to the robot body;

[0012] S3. Install positioning detector;

[0013] As a further preferred embodiment of the present technical solution: when the robot body is repaired, an additional driver needs to be installed, and the driver can match robot bodies of different models, thereby improving the compatibility of robot body testing;

[0014] As a further preferred embodiment of the present technical solution: the PLC processor transmits a pulse control signal to the driver, and the driver processes the pulse signal and drives the motor on the robot body to realize the movement of the robot body;

[0015] As a further preferred embodiment of the present technical solution: according to the movement requirements of the robot body, a positioning detector is provided on the position node of the robot body to detect whether the position accuracy of the robot body is accurate, so as to determine whether the robot body meets the maintenance requirements;

[0016] As a further preferred embodiment of the present technical solution: the positioning detector is a laser precision testing instrument, which performs position precision detection on the robot body, collects the detected position information and feeds it back to the PLC processor, and the PLC processor processes the position information and feeds back the position precision result to the touch screen;

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] The present invention is compatible with the testing systems of robots of different models, and the system has the function of detecting abnormal phenomena such as the position accuracy, abnormal sound or vibration of the manipulator. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of a wafer transfer robot test system module of the present invention;

[0020] Figure 2 The figure is a schematic diagram of the operation of a wafer transfer robot testing system of the present invention. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] Example

[0023] See also Figure 1-Figure 2 As shown, the present invention provides a technical solution: a wafer transfer robot testing system, including a touch screen, a PLC processor, a driver, a positioning detector and a manipulator body.

[0024] In this embodiment, specifically: the touch screen is a human-computer interaction interface, which can set the operating parameters of the robot body, such as the number of robot cycles, joint movement speed, etc., and the detection parameters can be input through the touch screen, and the detection results can be visualized or abnormal alarm reminders can be issued.

[0025] In this embodiment, specifically: the PLC processor is used to process and analyze the signal, issue a detection execution instruction according to the parameters set by the touch screen, and transmit the detection result to the touch screen for display via the touch screen.

[0026] In this embodiment, specifically: the TCP / IP protocol is used to communicate between the PLC processor and the touch screen, and between the PLC processor and the driver to achieve signal interconnection.

[0027] In this embodiment, specifically: a method for using a wafer transfer robot testing system includes the following steps:

[0028] S1. Disassemble the robot body: When the transmission robot fails, the robot body needs to be disassembled from the equipment. The robot body and the drive are separated;

[0029] S2, the PLC processor is connected to the robot driver, and the driver is connected to the robot body;

[0030] S3. Install the positioning detector.

[0031] In this embodiment, specifically: when repairing the robot body, an additional driver needs to be installed, and the driver can match robot bodies of different models, thereby improving the compatibility of robot body testing.

[0032] In this embodiment, specifically: the PLC processor transmits a pulse control signal to the driver, and the driver processes the pulse signal and drives the motor on the robot body to realize the movement of the robot body.

[0033] In this embodiment, specifically: according to the movement requirements of the robot body, a positioning detector is provided on the position node of the robot body to detect whether the position accuracy of the robot body is accurate, so as to determine whether the robot body meets the maintenance requirements.

[0034] In this embodiment, specifically: the positioning detector is a laser precision testing instrument, the positioning detector performs position accuracy detection on the robot body, collects the detected position information and feeds back the detected position information to the PLC processor, the PLC processor processes the position information and feeds back the position accuracy result to the touch screen.

[0035] The positioning detector is a laser precision testing instrument. The positioning detector detects the position accuracy of the robot body, collects the detected position information and feeds it back to the PLC processor, which processes the position information and feeds back the position accuracy results to the touch screen.

[0036] The wafer transfer test system also includes vibration sensors, vacuum sensors and other sensors for detecting abnormal movements of the robot body. For example, a vacuum sensor is installed on the air path of the robot body. During the operation of the robot body, the opening and closing of the solenoid valve is controlled, and the air path is detected by checking whether the vacuum sensor detects gas.

[0037] The abnormal movement sensor is used to detect whether there is any abnormality in the robot body. The abnormal movement sensor feeds back the detected abnormal information to the PLC processor, and the PLC processor processes the feedback information and displays the detection results through the touch screen.

[0038] Working principle or structural principle: After a transmission robot fails, the robot body needs to be removed from the equipment. The robot body and the driver are separated. When repairing the robot body, an additional driver is required. The driver can match robot bodies of different models, which improves the compatibility of robot body testing. The PLC processor is connected to the robot driver, and the driver is connected to the robot body. The PLC processor transmits a pulse control signal to the driver, and the driver processes the pulse signal and drives the motor on the robot body to realize the movement of the robot body. According to the movement requirements of the robot body, a positioning detector is set on the robot body position node to detect whether the position accuracy of the robot body is accurate, so as to determine whether the robot body meets the maintenance requirements.

[0039] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A wafer transfer robot testing system, characterized in that: It includes a touch screen, a PLC processor, a driver, a positioning detector and a robot body.

2. A wafer transfer robot testing system according to claim 1, characterized in that: The touch screen is a human-machine interaction interface, which can be used to set the operating parameters of the robot body, such as the number of robot cycles, joint movement speed, etc., and the detection parameters can be input through the touch screen, and the detection results can be visualized or abnormal alarm reminders can be issued.

3. The wafer transfer robot testing system according to claim 1, characterized in that: The PLC processor is used to process and analyze the signal, issue detection execution instructions according to the parameters set by the touch screen, and transmit the detection results to the touch screen for display via the touch screen.

4. The wafer transfer robot testing system according to claim 1, characterized in that: The PLC processor and the touch screen, and the PLC processor and the driver communicate using the TCP / IP protocol to achieve signal interconnection.

5. The method for using a wafer transfer robot test system according to claim 1, characterized in that: The following steps are involved: S1. Disassemble the robot body: When the transmission robot fails, the robot body needs to be disassembled from the equipment. The robot body and the drive are separated; S2, the PLC processor is connected to the robot driver, and the driver is connected to the robot body; S3. Install the positioning detector.

6. The method for using a wafer transfer robot test system according to claim 4, characterized in that: When the robot body is repaired, an additional driver needs to be installed, and the driver can match robot bodies of different models, thereby improving the compatibility of robot body testing.

7. The method for using a wafer transfer robot test system according to claim 4, characterized in that: The PLC processor transmits a pulse control signal to the driver, and the driver processes the pulse signal and drives the motor on the robot body to realize the movement of the robot body.

8. The method for using a wafer transfer robot testing system according to claim 4, characterized in that: According to the movement requirements of the robot body, a positioning detector is provided on the position node of the robot body to detect whether the position accuracy of the robot body is accurate, so as to determine whether the robot body meets the maintenance requirements.

9. The method for using a wafer transfer robot testing system according to claim 4, characterized in that: The positioning detector is a laser precision testing instrument, which performs position precision detection on the robot body, collects the detected position information and feeds back the detected position information to the PLC processor, and the PLC processor processes the position information and feeds back the position precision result to the touch screen.

Images