Linkage transmission method and device and computer readable storage medium

Abstract

The invention provides a linkage conveying method and device and a computer readable storage medium, the method is applied to a vacuum conveying system, the vacuum conveying system comprises a main cavity and an exchange bin, a displacement table and a main cavity conveying device are arranged in the main cavity, a sample seat is placed on the exchange bin conveying device, a to-be-operated sample is placed in the sample seat, and the to-be-operated sample is placed in the exchange bin conveying device. An exchange bin conveying device is arranged in the exchange bin, and the method comprises the following steps: moving a sample seat to a position above the main chamber conveying device through the exchange bin conveying device; the sample seat is taken down from the exchange bin conveying device through the main chamber conveying device; and the sample seat is moved to the loading plate of the displacement table through the main chamber conveying device. According to the linkage conveying method provided by the invention, the distance of single-stage conveying can be shortened through multi-stage conveying, so that the length of the guide rail of each conveying device is shortened, the reduction of conveying precision caused by deformation due to overlong guide rails can be reduced, and the conveying precision and stability of the to-be-operated sample in the vacuum conveying system are improved.

Description

Technical Field

[0001] The present application belongs to the field of vacuum transmission technology, and specifically relates to a linkage transmission method, device and computer-readable storage medium. Background Art

[0002] As the size of silicon wafers or other samples to be operated in the vacuum transmission system continues to increase, the chamber where the samples to be operated are placed also becomes larger accordingly, resulting in a longer transmission distance for the samples to be operated, which in turn leads to reduced accuracy and stability in the transmission of the samples to be operated.

[0003] Therefore, how to improve the transmission accuracy and stability of samples to be operated in the vacuum transmission system is an urgent problem to be solved. Summary of the invention

[0004] In view of the problems existing in the above-mentioned prior art, a linkage transmission method, device and computer-readable storage medium are proposed. By using this method, device and computer-readable storage medium, the transmission accuracy and stability of samples to be operated in a vacuum transmission system can be improved.

[0005] This application provides the following solution.

[0006] In a first aspect, the present application provides a linkage transmission method, which is applied to a vacuum transmission system, wherein the vacuum transmission system comprises: a main chamber and an exchange chamber, wherein a translation stage and a main chamber transmission device are arranged in the main chamber, an exchange chamber transmission device is arranged in the exchange chamber, a sample holder is placed on the exchange chamber transmission device, and a sample to be operated is placed in the sample holder, wherein the method comprises:

[0007] The sample holder is moved to above the main chamber conveyor by the exchange chamber conveyor;

[0008] The sample holder is removed from the exchange chamber conveyor by the main chamber conveyor;

[0009] The sample holder is moved to the sample carrier of the translation stage by the main chamber transfer device.

[0010] In some possible embodiments, a conical positioning portion is provided on the object carrier of the translation stage, and a positioning hole corresponding to the conical positioning portion is provided at the lower portion of the sample holder;

[0011] The sample holder is moved to the stage's loading plate via the main chamber transfer mechanism, including:

[0012] The sample holder is moved to the conical positioning portion of the object carrier plate of the translation stage by the main chamber conveying device, and the conical positioning portion is inserted into the positioning hole of the sample holder.

[0013] In some possible embodiments, a plurality of steps at different levels are arranged on the conical surface of the conical positioning portion.

[0014] In some possible embodiments, the height difference between the steps at different levels is less than or equal to 0.1 mm.

[0015] In some possible embodiments, the exchange chamber conveying device includes a conveying upper plate and a conveying bottom plate disposed below the conveying upper plate, and a sample holder is placed on the conveying upper plate;

[0016] The sample holder is moved to the upper part of the main chamber conveyor by the exchange chamber conveyor, including:

[0017] The sample holder is moved to above the main chamber conveying device by relative sliding of the conveying upper plate and the conveying bottom plate.

[0018] In some possible embodiments, a U-shaped portion is provided at one end of the upper conveying plate close to the main chamber, a sample holder is placed on the U-shaped portion, and the main chamber conveying device includes a lifting base and a conveying upper portion provided above the lifting base;

[0019] Remove the sample holder from the exchange chamber carousel through the main chamber carousel, including:

[0020] The upper part of the transmission is driven to rise by the lifting base, so that the upper part of the transmission lifts the sample holder from the gap in the U-shaped part.

[0021] In some possible embodiments, the main chamber transfer device moves the sample holder to the object carrier of the translation stage, including:

[0022] The lifting base and the upper part of the transmission are relatively slidable, so that the upper part of the transmission moves toward the direction close to the translation stage to the first target position;

[0023] The upper part of the transmission is lowered by the lifting base, so that the sample holder on the upper part of the transmission is placed on the conical positioning part of the object carrier plate of the displacement stage, and the conical positioning part is inserted into the positioning hole of the sample holder.

[0024] In some possible embodiments, before the lifting base lowers the upper portion of the conveyor, the method further includes:

[0025] The carrier plate moves to a second target position in a direction close to the main chamber conveying device.

[0026] In some possible embodiments, an isolation valve is provided between the main chamber and the exchange chamber;

[0027] Before the exchange chamber conveyor moves the sample holder to above the main chamber conveyor, the method further includes:

[0028] Open the isolation valve;

[0029] After the main chamber conveyor removes the sample holder from the exchange chamber conveyor, the method further includes:

[0030] The exchange bin conveyor moves back to the exchange bin;

[0031] After the main chamber transfer device moves the sample holder to the object carrier of the translation stage, the method further includes:

[0032] Close the isolation valve.

[0033] In some possible embodiments, the vacuum transfer system includes an electron beam exposure system or an electron microscope system.

[0034] In a second aspect, the present application provides a linkage transmission device, comprising:

[0035] At least one processor; and a memory in communication with the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can execute the above-mentioned linkage transmission method.

[0036] In a third aspect, the present application provides a computer-readable storage medium storing a program, which, when executed by a multi-core processor, enables the multi-core processor to execute the above-mentioned linkage transmission method.

[0037] The linkage transmission method provided in the embodiment of the present application transmits the sample to be operated for the first time through the exchange chamber transmission device, and after the sample to be operated is removed by the main chamber transmission device, the sample to be operated is transmitted for the second time. In this way, the linkage transmission method provided in the embodiment of the present application sets up multi-stage transmission, which can shorten the distance of single-stage transmission, thereby shortening the length of the guide rail of each transmission device, and can reduce the decrease in transmission accuracy caused by deformation of the guide rail due to excessive length, thereby improving the transmission accuracy and stability of the sample to be operated in electron beam exposure.

[0038] Other advantages of the present application will be explained in more detail with reference to the following description and drawings.

[0039] It should be understood that the above description is only an overview of the technical solution of the present application, so that the technical means of the present application can be more clearly understood and implemented according to the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are specifically described below by way of example. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] The advantages and benefits described herein and other advantages and benefits will be apparent to those skilled in the art by reading the detailed description of the exemplary embodiments below. The accompanying drawings are only used for the purpose of illustrating the exemplary embodiments and are not to be considered as limiting the present application. In the accompanying drawings:

[0041] Figure 1A flowchart of a linkage transmission method provided in an embodiment of the present application;

[0042] Figure 2 A schematic diagram of a linkage transmission device provided in an embodiment of the present application;

[0043] Figure 3 A schematic diagram of another linkage transmission device provided in an embodiment of the present application;

[0044] Figure 4 A schematic diagram of a conical positioning portion provided in an embodiment of the present application.

[0045] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0046] Exchange chamber 10; main chamber 20; sample holder 100; exchange chamber conveyor 200; conveying upper plate 201; conveying bottom plate 202; main chamber conveyor 300; lifting base 301; conveying upper part 302; translation stage 400; conical positioning part 401; loading plate 402; isolation valve 500.

[0047] In the drawings, the same or corresponding reference numerals represent the same or corresponding parts. DETAILED DESCRIPTION

[0048] The exemplary embodiments of the present application will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present application and to fully convey the scope of the present application to those skilled in the art.

[0049] In the description of the embodiments of the present application, it should be understood that terms such as "including" or "having" are intended to indicate the presence of disclosed features, numbers, steps, behaviors, components, parts, or a combination thereof in the present specification, and do not exclude the possibility of the presence of one or more other features, numbers, steps, behaviors, components, parts, or a combination thereof.

[0050] Unless otherwise specified, “ / ” means or. For example, A / B can mean A or B. The “and / or” in this article is merely a way to describe the association relationship of associated objects, indicating that three relationships can exist. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone.

[0051] The terms "first", "second", etc. are used only to distinguish the same or similar technical features for the convenience of description, and should not be understood as indicating or implying the relative importance or quantity of these technical features. Thus, the features defined by "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the embodiments of the present application, unless otherwise specified, the term "plurality" means two or more than two.

[0052] It should also be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0053] Electron beam lithography is a micro-nano processing technology that uses a focused electron beam to write patterns directly on electron beam sensitive materials (resists). It is one of the key technologies in the fields of semiconductor manufacturing, nanotechnology and microelectronics. The advantages of electron beam lithography are its extremely high resolution and flexibility, which can produce very fine patterns and is suitable for the research and development and production of complex micro-nano electronic devices. The interaction between the electron beam and the resist in electron beam lithography is called exposure. The exposed resist can be developed to remove the parts not irradiated by the electron beam, thereby forming the desired micro-nano structure on the silicon wafer or other substrate.

[0054] See also Figure 1 , which is a schematic diagram of a linkage transmission method provided in an embodiment of the present application.

[0055] The method provided in the embodiment of the present application can be applied to a vacuum transmission system. The vacuum transmission system includes an electron beam exposure system, an electron microscope system or other systems that require vacuum transmission. For ease of understanding, the electron beam exposure system is introduced as an example below. The vacuum transmission system includes: a main chamber and an exchange chamber, a displacement stage and a main chamber conveying device are provided in the main chamber, and an exchange chamber conveying device is provided in the exchange chamber. Under normal circumstances, the main chamber and the exchange chamber of the vacuum transmission system are both vacuum. A sample holder is placed on the exchange chamber conveying device, and a sample to be operated is placed in the sample holder. In actual applications, the sample to be operated in this application can be a wafer, a silicon wafer, a chip substrate, etc., which is not limited in the embodiment of the present application.

[0056] like Figure 1 As shown, the linkage transmission method provided in the embodiment of the present application includes:

[0057] S101: Move the sample holder to above the main chamber conveying device through the exchange chamber conveying device.

[0058] In the embodiment of the present application, the controller corresponding to the exchange chamber conveying device can move the sample holder to the top of the main chamber conveying device through the exchange chamber conveying device. Figure 2 As shown, a translation stage and a main chamber conveying device 300 are provided in the main chamber 20, and an exchange chamber conveying device 200 is provided in the exchange chamber 10. The exchange chamber conveying device 200 may include an upper conveying plate 201 and a lower conveying plate 202 provided below the upper conveying plate 201, and a sample holder 100 is placed on the upper conveying plate 201. In the embodiment of the present application, the upper conveying plate 201 and the lower conveying plate 202 can slide relative to each other, so that the upper conveying plate 201 moves toward the main chamber conveying device 200 until the sample holder 100 moves to the top of the main chamber conveying device 300, so as to facilitate the subsequent removal of the sample holder 100 by the main chamber conveying device 300.

[0059] In some possible embodiments, an isolation valve 500 is provided between the main chamber and the exchange chamber. Before the exchange chamber conveying device 200 moves the sample holder 100 to above the main chamber conveying device 300, the present application may open the isolation valve 500 so that the exchange chamber conveying device 200 passes through the isolation valve 500 to move the sample holder 100 to above the main chamber conveying device 300.

[0060] S102: The sample holder is removed from the exchange chamber conveying device through the main chamber conveying device.

[0061] In the embodiment of the present application, the controller corresponding to the main chamber conveying device can remove the sample holder from the exchange chamber conveying device through the main chamber conveying device. Figure 2 As shown, a U-shaped portion may be provided at one end of the upper conveying plate 201 close to the main chamber, and a sample holder 100 is placed on the U-shaped portion. The main chamber conveying device 300 includes a lifting base 301 and a conveying upper portion 302 provided above the lifting base 301. As a possible implementation, the method provided in the embodiment of the present application can drive the conveying upper portion 302 to rise through the lifting base 301, so that the conveying upper portion 302 lifts the sample holder 100 from the gap in the U-shaped portion, thereby removing the sample holder 100 from the exchange chamber conveying device 200.

[0062] As a possible implementation, after the main chamber conveying device 300 can remove the sample holder 100 from the exchange chamber conveying device 200, the embodiment of the present application can control the exchange chamber conveying device 200 to move back to the exchange chamber. Specifically, the exchange chamber conveying device 200 in the embodiment of the present application can move the conveying upper plate 201 and the conveying bottom plate 202 relative to each other, so that the conveying upper plate 201 moves away from the main chamber conveying device 200 until the conveying upper plate 201 reaches the conveying chamber 10. It should be noted that after the conveying upper plate 201 reaches the conveying chamber 10, if the sample to be operated and the sample holder 10 have completely passed through the isolation valve 500, then the isolation valve 500 can be closed at this time. However, in some embodiments, due to the large size of the sample to be operated, although the conveying upper part 302 has lifted the sample holder, the sample holder or the sample to be operated has not completely passed through the isolation valve 500, so the isolation valve 500 cannot be closed at this time.

[0063] S103: Move the sample holder to the object carrier of the translation stage through the main chamber conveying device.

[0064] It should be noted that the controller corresponding to the main chamber conveying device can move the sample holder to the carrier plate of the displacement stage through the main chamber conveying device. If the size of the sample to be operated in the embodiment of the present application is large, after the main chamber conveying device moves the sample holder to the carrier plate of the displacement stage, the carrier plate can be moved to perform multiple exposures on the sample to be operated on the sample holder. If the sample to be operated has a slight relative sliding when the carrier plate moves, it will affect the effect of splicing the multiple exposure results. Moreover, after the relative sliding is formed, it takes a long time to recover stability, and this time is usually more than 30 minutes, which leads to extremely serious splicing errors and time waiting for samples to be operated that are spliced ​​for large-area exposure such as silicon wafers.

[0065] like Figure 2 As shown, in order to suppress the slight relative sliding of the sample holder on the carrier plate 402, a conical positioning portion 401 is provided on the carrier plate 402 of the translation stage 400 in the embodiment of the present application, and a positioning hole corresponding to the conical positioning portion 401 is provided at the lower part of the sample holder. Figure 3 As shown, three conical positioning portions 401 may be provided on the loading plate 402 provided in the embodiment of the present application, and the three conical positioning portions 401 are arranged in a triangular shape.

[0066] As a possible implementation, the main chamber conveying device in the embodiment of the present application can move the sample holder to the conical positioning portion 401 of the carrier plate 402 of the translation stage 400, and the conical positioning portion 401 is inserted into the positioning hole of the sample holder. It should be noted that the combination of the conical positioning portion and the positioning hole in the embodiment of the present application can suppress the relative sliding of the sample holder when the carrier plate 402 moves, thereby reducing the stitching error after exposure and the waiting time during exposure.

[0067] As a possible implementation, Figure 4 As shown, the conical surface of the conical positioning portion 401 provided in the embodiment of the present application may be provided with multiple steps at different levels. The applicant has found that the conical surface provided with multiple steps at different levels has a better effect of suppressing the relative sliding of the sample holder when the carrier plate 402 moves than the smooth conical surface. The present application provides multiple steps at different levels on the conical surface of the conical positioning portion 401, which can further reduce the stitching error after exposure and the waiting time during exposure. As an example, the height difference between the multiple steps at different levels can be less than or equal to 0.1 mm.

[0068] In the embodiment of the present application, the main chamber conveying device 300 can slide relative to the conveying upper part 302 through the lifting base 301, so that the conveying upper part 302 moves to the first target position in the direction close to the translation stage 400. The embodiment of the present application can also control the carrier plate 402 to move to the second target position in the direction close to the main chamber conveying device 300. After the conveying upper part 302 moves to the first target position and the carrier plate 402 moves to the second target position, the sample holder 100 is located above the conical positioning portion 401. Then the present application can also control the lifting base 301 to lower the conveying upper part 302, so that the sample holder 100 on the conveying upper part 302 is placed on the conical positioning portion 401 of the carrier plate 402 of the translation stage 400, and the conical positioning portion 401 is inserted into the positioning hole of the sample holder 100.

[0069] In actual applications, the upper conveyor portion 302 may not move, and the sample holder 100 may move to the top of the conical positioning portion 401 only by moving the carrier plate 402 to the second target position. Alternatively, the carrier plate 402 may not move, and the sample holder 100 may move to the top of the conical positioning portion 401 only by moving the upper conveyor portion to the first target position, which is not limited in the present embodiment.

[0070] In some possible embodiments, after the main chamber conveying device moves the sample holder 100 onto the carrier plate 402 of the translation stage 400, the embodiment of the present application may close the isolation valve 500. It should be noted that after the sample holder 100 is moved onto the carrier plate 402 of the translation stage 400, the sample to be operated and the sample holder 10 have completely passed through the isolation valve 500, and the isolation valve 500 may be closed at this time.

[0071] In summary, the linkage transmission method provided in the embodiment of the present application is to transmit the sample to be operated for the first time through the exchange chamber transmission device, and the main chamber transmission device is provided with a lifting function. By using the lifting function of the main chamber transmission device and the U-shaped portion on the exchange chamber transmission device, the main chamber transmission device in the embodiment of the present application can remove the sample to be operated on the exchange chamber transmission device and transmit the sample to be operated for the second time. In this way, the linkage transmission method provided in the embodiment of the present application is provided with multi-stage transmission, and the multi-stage transmission can shorten the distance of single-stage transmission, thereby shortening the guide rail length of each transmission device, and can reduce the transmission accuracy caused by deformation of the guide rail due to excessive length, thereby improving the transmission accuracy and stability of the sample to be operated in electron beam exposure. Moreover, the embodiment of the present application is provided with a conical positioning portion on the carrier plate with a conical surface having multiple steps at different levels, and the positioning portion can better move the relative sliding of the sample holder when the carrier plate moves, thereby reducing the splicing error after exposure and the waiting time during exposure.

[0072] In the description of this specification, the description with reference to the terms "some possible embodiments", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application, and the above terms do not necessarily represent the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0073] About the method flow chart of the present application embodiment, some operations are described as different steps performed in a certain order. Such flow chart belongs to illustrative and non-restrictive. Some steps described in this article can be grouped together and performed in a single operation, or some steps can be divided into multiple sub-steps and can be performed in an order different from that shown in this article. Each step shown in the flow chart can be realized in any way by any circuit structure and / or tangible mechanism (for example, by software, hardware (for example, the logical function realized by processor or chip) etc. running on computer equipment and / or any combination thereof).

[0074] Those skilled in the art will appreciate that, in the method described in the above specific implementation, the writing order of each step does not mean a strict execution order, and the specific execution order of each step should be determined by its function and possible internal logic.

[0075] According to some embodiments of the present application, a linkage transmission device according to an embodiment of the present application is provided for performing Figure 1 The linkage transmission method shown, the device includes: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can execute the method described in the above embodiment.

[0076] According to some embodiments of the present application, a non-volatile computer storage medium of a linkage transmission method is provided, on which computer executable instructions are stored, and the computer executable instructions are configured to execute the method described in the above embodiments when executed by a processor.

[0077] Computer-readable media include permanent and non-permanent, removable and non-removable media, and information storage can be achieved by any method or technology. Information can be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer-readable storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory, read-only memory, electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, CD-ROM, digital versatile disc (DVD) or other optical storage, magnetic cassettes, tape disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device. In addition, although the operations of the method of the present application are described in a specific order in the accompanying drawings, this does not require or imply that these operations must be performed in this specific order, or that all the operations shown must be performed to achieve the desired results. In addition, some steps can be omitted, multiple steps can be combined into one step, and / or one step can be decomposed into multiple sub-steps.

[0078] Although the spirit and principle of the present application have been described above with reference to several specific embodiments, it should be understood that the present application is not limited to the disclosed specific embodiments, and the division of various aspects does not mean that the features in these aspects cannot be combined. The present application is intended to cover various modifications and equivalent arrangements included in the spirit and scope of the attached claims.

Claims

1. A linkage transmission method, characterized in that: The method is applied to a vacuum transmission system, the vacuum transmission system comprising: a main chamber and an exchange chamber, the main chamber is provided with a displacement stage and a main chamber conveying device, the exchange chamber is provided with an exchange chamber conveying device, a sample holder is placed on the exchange chamber conveying device, and a sample to be operated is placed in the sample holder, the method comprises: Moving the sample holder to above the main chamber conveying device via the exchange chamber conveying device; Removing the sample holder from the exchange chamber conveying device via the main chamber conveying device; The sample holder is moved to the object carrier of the translation stage by the main chamber transfer device.

2. The method according to claim 1, characterized in that A conical positioning portion is provided on the object carrier plate of the displacement stage, and a positioning hole corresponding to the conical positioning portion is provided at the lower part of the sample holder; The method comprises: moving the sample holder to the object carrier of the translation stage through the main chamber conveying device, comprising: The sample holder is moved to the conical positioning portion of the object carrier plate of the translation stage by the main chamber conveying device, and the conical positioning portion is inserted into the positioning hole of the sample holder.

3. The method according to claim 2, characterized in that A plurality of steps at different levels are arranged on the conical surface of the conical positioning portion.

4. The method according to claim 3, characterized in that The height difference between the steps at different levels is less than or equal to 0.1 mm.

5. The method according to claim 2, characterized in that: The exchange chamber conveying device comprises a conveying upper plate and a conveying bottom plate arranged below the conveying upper plate, and the sample holder is placed on the conveying upper plate; The method of moving the sample holder to above the main chamber conveying device by the exchange chamber conveying device comprises: The sample holder is moved to above the main chamber conveying device by the relative sliding of the conveying upper plate and the conveying bottom plate.

6. The method according to claim 1, characterized in that The upper conveying plate is provided with a U-shaped portion at one end close to the main chamber, the sample holder is placed on the U-shaped portion, and the main chamber conveying device comprises a lifting base and a conveying upper portion provided above the lifting base; Removing the sample holder from the exchange chamber conveying device by the main chamber conveying device comprises: The upper conveying part is driven to rise by the lifting base, so that the upper conveying part lifts up the sample holder from the gap in the U-shaped part.

7. The method according to claim 6, characterized in that The method comprises: moving the sample holder to the object carrier of the translation stage through the main chamber conveying device, comprising: The lifting base and the upper transmission part slide relative to each other, so that the upper transmission part moves toward the direction close to the translation stage to a first target position; The upper conveying part is lowered by the lifting base, so that the sample holder on the upper conveying part is placed on the conical positioning part of the object carrier plate of the translation stage, and the conical positioning part is inserted into the positioning hole of the sample holder.

8. The method according to claim 7, characterized in that Before the lifting base lowers the conveying upper part, the method further comprises: The carrier plate moves to a second target position in a direction close to the main chamber conveying device.

9. The method according to claim 1, characterized in that: An isolation valve is provided between the main chamber and the exchange chamber; Before the exchange chamber conveyor moves the sample holder to above the main chamber conveyor, the method further comprises: opening the isolation valve; After the main chamber conveying device removes the sample holder from the exchange chamber conveying device, the method further includes: The exchange bin conveying device moves back to the exchange bin; After the main chamber transfer device moves the sample holder to the object carrier of the translation stage, the method further includes: Close the isolation valve.

10. The method according to claim 1, characterized in that The vacuum transfer system includes an electron beam exposure system or an electron microscope system.

11. A linkage transmission device, characterized in that: include: at least one processor; And, a memory communicatively connected to at least one processor; wherein the memory stores instructions executable by at least one processor, and the instructions are executed by at least one processor to enable at least one processor to execute: a method as described in any one of claims 1-10.

12. A computer-readable storage medium storing a program, wherein when the program is executed by a multi-core processor, the multi-core processor executes the method according to any one of claims 1 to 10.

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