Simple assembling mechanism for single crystal furnace

Abstract

The invention provides a simple assembly mechanism for a single crystal furnace, and belongs to the technical field of semiconductor manufacturing equipment.The simple assembly mechanism comprises a lifting mechanism, a rotating mechanism and a clamping mechanism, the lifting mechanism comprises a mounting column, a stepping motor is fixedly mounted at the top end of the mounting column, and the output end of the stepping motor is in transmission connection with a driving straight gear through a coupler; the front side of the driving straight gear is in meshed connection with a driven straight gear, the bottom end of the driven straight gear is fixedly connected with a threaded rod, the surface of the threaded rod is in threaded connection with a lifting block, and the front end of the lifting block is fixedly connected with a lifting frame. According to the invention, the problems of complex operation, low efficiency and insufficient safety of the traditional single crystal furnace in installation, overhaul and maintenance are solved, and efficient, safe and stable operation is realized through height adjustment, direction adjustment, damping buffering and automatic limiting clamping.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor manufacturing equipment, in particular to a simple assembly mechanism for a single crystal furnace. Background Art

[0002] The single crystal furnace is a key equipment for producing semiconductor materials. It is mainly used to melt polysilicon materials and generate high-purity, non-dislocation single crystal materials by controlling parameters such as temperature and stretching speed. These single crystal materials are widely used in the semiconductor and photovoltaic industries, directly affecting the performance and quality of products such as chips and solar cells. The operation of the single crystal furnace is usually carried out in an inert gas environment and is equipped with a complex heating and temperature control system to ensure the stability and consistency of the crystal growth process.

[0003] However, traditional single crystal furnaces are mostly fixed on a fixed frame. When regular inspection or maintenance is required, due to its large size and heavy weight, it is extremely inconvenient to carry and operate. Workers usually need to dismantle the equipment before moving it, which is not only time-consuming and labor-intensive, but also increases safety risks. Summary of the invention

[0004] The purpose of this section is to summarize some aspects of embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the specification abstract and the invention title of this application to avoid blurring the purpose of this section, the specification abstract and the invention title, and such simplifications or omissions cannot be used to limit the scope of the present invention.

[0005] In view of the above problems and / or the problems existing in the prior art, the present invention is proposed.

[0006] Therefore, the technical problem to be solved by the present invention is to provide a simple assembly mechanism that can realize vertical lifting and rotation of a single crystal furnace, reduce the complexity of disassembly and transportation, improve the convenience of inspection and maintenance, and ensure the safety of operation and the stability of the equipment.

[0007] In order to solve the above technical problems, the present invention provides the following technical solutions: a simple assembly mechanism for a single crystal furnace, comprising a lifting mechanism, a rotating mechanism and a clamping mechanism, wherein:

[0008] The lifting mechanism comprises a mounting column, a stepper motor is fixedly mounted on the top of the mounting column, an output end of the stepper motor is connected to a driving spur gear through a coupling, a driven spur gear is meshedly connected to the front side of the driving spur gear, a threaded rod is fixedly connected to the bottom end of the driven spur gear, a lifting block is threadedly connected to the surface of the threaded rod, and a lifting frame is fixedly connected to the front end of the lifting block;

[0009] The rotating mechanism comprises a buffer assembly fixedly mounted on the outside of the lifting frame, wherein the buffer assembly is provided with four groups in total, the top ends of the four groups of buffer assemblies are fixedly connected to a placement plate, a protective cylinder is fixedly connected to the center of the bottom end of the placement plate, four connecting rods are distributed in a circular array at the bottom end of the placement plate and around the outside of the protective cylinder, the bottom ends of the four connecting rods are fixedly connected to a mounting plate, a servo motor is fixedly mounted on the rear side of the mounting plate, the output end of the servo motor is connected to a driving bevel gear through a coupling transmission, the front side of the driving bevel gear is meshedly connected to a driven bevel gear, the top end of the driven bevel gear is fixedly connected to a rotating shaft, the top end of the rotating shaft passes through the mounting plate and the protective cylinder and extends to the top end of the placement plate; and,

[0010] The clamping mechanism includes a fixed plate fixedly installed on the top of the lifting frame, and the fixed plate is sleeved on the outside of the protective tube. The top of the fixed plate is rotatably connected to a sleeve, and fan-shaped plates are obliquely symmetrically installed on the left and right sides of the top of the sleeve. The tops of the two fan-shaped plates are connected to baffles through transmission rods, and the two baffles are slidably connected to the front and back sides of the top of the placement plate.

[0011] As a preferred solution of the simple assembly mechanism for a single crystal furnace described in the present invention, there are two lifting blocks in total, and rollers are rotatably connected to the left and right sides of the two lifting blocks, sliding grooves are provided on the inner walls of the left and right ends of the mounting column, and the two groups of rollers are slidably connected in the two sliding grooves respectively.

[0012] As a preferred solution of the simple assembly mechanism for a single crystal furnace described in the present invention, the lifting frame includes support plates fixedly installed on the left and right sides of the front end of the two lifting blocks, the front ends of the two support plates are fixedly connected by a connecting plate, and the protective tube and the four connecting rods are arranged between the two support plates.

[0013] As a preferred solution of the simple assembly mechanism for a single crystal furnace described in the present invention, the four groups of buffer components respectively include fixed blocks fixedly installed on the left and right ends of the outer sides of the two support plates, the top ends of the four fixed blocks are telescopically connected to the limiting rods, the outer surfaces of the four limiting rods are sleeved with buffer springs, the bottom ends of the four buffer springs are respectively fixedly connected to the upper surfaces of the four fixed blocks, and the bottom end of the placing plate is fixedly connected to the four limiting rods and the top ends of the buffer springs.

[0014] As a preferred solution of the simple assembly mechanism for a single crystal furnace described in the present invention, the rotating shaft is rotatably connected to the center of the protective tube and the placement plate through a bearing.

[0015] As a preferred solution of the simple assembly mechanism for a single crystal furnace described in the present invention, wherein: toggle rods are symmetrically installed at the front and rear ends of the outer side wall of the protective tube, and the front and rear sides of the sleeve are symmetrically provided with first arc grooves compatible with the two toggle rods, and the outermost ends of the two toggle rods are respectively slidably connected to the top ends of the two first arc grooves.

[0016] As a preferred solution of the simple assembly mechanism for a single crystal furnace described in the present invention, second arc grooves are arranged in the same direction inside the two fan-shaped plates, straight grooves are symmetrically opened at the front and rear ends of the placement plate, and the ends of the two straight grooves are on the same axis as the ends of the two second arc grooves, the bottom ends of the two transmission rods are respectively slidably connected in the two second arc grooves, and the top ends of the two transmission rods respectively penetrate the two straight grooves and extend to the top of the placement plate and are fixedly connected to the bottom ends of the two baffles.

[0017] As a preferred solution of the simple assembly mechanism for a single crystal furnace described in the present invention, balls are arranged on opposite surfaces of the two baffles, and part of the balls are rollingly connected inside the baffles, and part are arranged outside the baffles.

[0018] Beneficial effects of the present invention:

[0019] 1. The stepper motor drives the active spur gear to move the threaded rod up and down, thereby driving the vertical lifting of the lifting frame and the single crystal furnace. At the same time, the rotating mechanism drives the shaft to drive the single crystal furnace to rotate smoothly in the horizontal direction through the cooperation of the servo motor, the active bevel gear and the driven bevel gear. This synergistic function of lifting and rotating significantly improves the convenience and flexibility of the operation of the single crystal furnace during the inspection and maintenance process.

[0020] 2. The present invention provides four groups of buffer components to effectively absorb the impact force generated by the downward pressure of the single crystal furnace, play a buffering and shock-absorbing effect, and protect the placement plate and related mechanical structures to avoid equipment damage or structural instability caused by sudden force. The design of the buffer component improves the operating reliability and service life of the overall device.

[0021] 3. During the downward movement of the placement plate, the protective tube and the toggle rod move vertically downward, and the toggle rod drives the sleeve and the fan-shaped plate to rotate a certain angle, and further drives the two baffles to move horizontally toward the center through the transmission rod, so as to realize the automatic clamping of the single crystal furnace. During the clamping process, a ball bearing is arranged on the inner side of the baffle, which can firmly clamp the single crystal furnace and allow it to rotate freely, ensuring that the lifting and rotating functions do not interfere with each other. This design effectively prevents the single crystal furnace from falling or shaking during the movement, and ensures the safety of operation and the overall stability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. Among them:

[0023] Figure 1 It is a three-dimensional front view of the overall structure of the present invention;

[0024] Figure 2 It is a three-dimensional side cross-sectional view of the connection between the lifting block and the threaded rod of the present invention;

[0025] Figure 3 It is a three-dimensional enlarged view of the connection between the rotating mechanism and the lifting frame of the present invention;

[0026] Figure 4 It is a first stereoscopic view of the connection between the rotating mechanism, the clamping mechanism and the lifting frame of the present invention;

[0027] Figure 5 A second stereoscopic view of the connection between the rotating mechanism, the clamping mechanism and the lifting frame of the present invention;

[0028] Figure 6 A bottom view of the connection between the clamping mechanism and the placement plate of the present invention;

[0029] Figure 7 For the present invention Figure 6 A schematic diagram of the structure enlargement at the center A;

[0030] Figure 8 It is a side sectional view of the connection between the rotating mechanism, the clamping mechanism and the lifting frame of the present invention;

[0031] Fig. 9 For the present invention Fig. 9 A schematic diagram of the structure enlarged at B in the middle;

[0032] Fig.10 It is a top sectional view of the protective tube of the present invention;

[0033] Fig.11 It is a bottom sectional view of the protective tube of the present invention.

[0034] Numbers in the figure: 100, lifting mechanism; 101, mounting column; 101a, slide; 102, stepping motor; 103, driving spur gear; 104, driven spur gear; 105, threaded rod; 106, lifting block; 107, lifting frame; 107a, support plate; 107b, connecting plate; 108, roller; 200, rotating mechanism; 201, buffer assembly; 201a, fixing block; 201b, limiting rod; 201c, buffer spring; 202, placing plate ; 202a, linear groove; 203, protective tube; 204, connecting rod; 205, mounting plate; 206, servo motor; 207, active bevel gear; 208, driven bevel gear; 209, rotating shaft; 210, bearing; 211, toggle rod; 300, clamping mechanism; 301, fixed plate; 302, sleeve; 302a, first arc groove; 303, fan-shaped plate; 303a, second arc groove; 304, transmission rod; 305, baffle; 306, ball. DETAILED DESCRIPTION

[0035] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below in conjunction with the accompanying drawings.

[0036] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0037] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments.

[0038] Example 1

[0039] Reference Figure 1 to Figure 3 , which is the first embodiment of the present invention, and this embodiment provides a simple assembly mechanism for a single crystal furnace, including a lifting mechanism 100 and a rotating mechanism 200, wherein the lifting mechanism 100 is used to adjust the height of the single crystal furnace, and meets the operation requirements under different working conditions through the vertical lifting function, which is convenient for the installation, inspection and maintenance of the single crystal furnace, while ensuring the stability and safety of the lifting process; the rotating mechanism 200 is used to adjust the direction of the single crystal furnace, and realizes multi-angle operation and precise positioning through the rotation function, thereby improving the operational flexibility and convenience of the single crystal furnace. At the same time, the stability of the rotation process is effectively enhanced through the structural design, and the shaking or deviation of the equipment during operation is avoided.

[0040] Specifically, the lifting mechanism 100 includes a mounting column 101, which serves as a fixed support component of the entire lifting mechanism 100 and provides a stable foundation for the installation of other structures. A stepper motor 102 is fixedly installed on the top of the mounting column 101. The stepper motor 102 serves as a power source, and its output end is connected to a driving spur gear 103 through a coupling transmission. The function of the coupling is to achieve stable power transmission and absorb axial deviations that may be caused by installation errors. The front side of the driving spur gear 103 is meshedly connected to a driven spur gear 104, which amplifies the stability and accuracy of the power output through gear transmission. The bottom end of the driven spur gear 104 is fixedly connected to a threaded rod 105, and the threaded rod 105 is fixedly connected to the bottom end of the driven spur gear 104. The threaded rod 105 is threadedly connected to the surface of the lifting block 106, and the conversion of rotational motion into linear motion is realized through the threaded pair, thereby driving the lifting block 106 to move up and down along the mounting column 101. The front end of the lifting block 106 is fixedly connected with a lifting frame 107. The function of the lifting frame 107 is to drive the rotating mechanism 200 and the single crystal furnace to move up and down with the lifting block 106, thereby realizing height adjustment. The rotating mechanism 200 is fixedly installed at the front end of the lifting frame 107, as a bearing and connecting component of the single crystal furnace, providing support and power transmission for the rotation of the single crystal furnace, so that the single crystal furnace can achieve precise adjustment of direction while being lifted and lowered, further improving the flexibility and convenience of operation.

[0041] Furthermore, the rotating mechanism 200 includes a buffer assembly 201 fixedly mounted on the outside of the lifting frame 107. The function of the buffer assembly 201 is to provide support for the rotating mechanism 200, while absorbing the vibration and gravity impact during the operation of the single crystal furnace to ensure the stability of the placement plate 202. The buffer assembly 201 is provided with four groups, and the top end thereof is fixedly connected to a placement plate 202. The placement plate 202 serves as a supporting platform for the single crystal furnace. A protective cylinder 203 is fixedly connected to the center of the bottom end of the placement plate 202. The protective cylinder 203 is used to protect the rotating shaft 209 and provide structural support and guiding functions for its rotation. At the bottom end of the placement plate 202, four connecting rods 204 are distributed in a circular array around the outside of the protective cylinder 203. The connecting rods 204 connect the placement plate 202 and the mounting plate 20 5. To ensure the stability of the placement plate 202 and the supporting effect of the mounting plate, a servo motor 206 is fixedly installed on the rear side of the mounting plate 205. The servo motor 206 serves as the power source of the rotating mechanism 200. Its output end is connected to the active bevel gear 207 through a coupling transmission. The coupling smoothly transmits the power of the servo motor to the active bevel gear and buffers the deviation that may occur during the rotation. The front side of the active bevel gear 207 is meshed with the driven bevel gear 208. The top of the driven bevel gear 208 is fixedly connected with a rotating shaft 209. The top of the rotating shaft 209 passes through the mounting plate 205 and the protective tube 203 and extends to the top of the placement plate 202, and is rotatably connected to the placement plate 202. The rotating shaft 209 is only used to drive the single crystal furnace to rotate, while the placement plate 202 remains stationary. Figure 3As shown, a square notch is provided on one side of the rotating shaft 209, and a plug-in structure corresponding to the rotating shaft 209 is provided at the bottom of the single crystal furnace. A stable connection between the single crystal furnace and the rotating shaft 209 is achieved through plug-in, ensuring that the single crystal furnace remains firm during rotation while meeting the stability and reliability of its operation.

[0042] Furthermore, there are two lifting blocks 106, which are arranged on the left and right sides of the mounting column 101 respectively. As the core moving parts of the lifting mechanism 100, their function is to realize lifting movement through threaded connection with the threaded rod 105. The left and right sides of the two lifting blocks 106 are rotatably connected with rollers 108, and the rollers 108 are slidably connected to the slide grooves 101a opened on the inner walls of the left and right ends of the mounting column 101. The slide grooves 101a provide a guiding and limiting function for the rollers 108 to ensure that the lifting blocks 106 remain stable and do not deviate during the vertical movement. Through the coordinated design of the rollers 108 and the slide grooves 101a, the stability and accuracy of the lifting movement are improved, and the operating accuracy of the rotating mechanism 200 and the single crystal furnace is avoided to be affected by lateral shaking.

[0043] It should be noted that the lifting frame 107 includes support plates 107a fixedly installed on the left and right sides of the front end of the two lifting blocks 106. The support plates 107a serve as the main bearing structure of the lifting frame 107 and are responsible for supporting and fixing the rotating mechanism 200 and the single crystal furnace. The front ends of the two support plates 107a are fixedly connected by connecting plates 107b. The connecting plates 107b ensure the rigidity and stability of the overall structure of the lifting frame 107. The setting of the support plates 107a makes the center of the lifting frame 107 hollow, thereby providing space for some components in the rotating mechanism 200 (such as the protective cylinder 203 and the connecting rod 204) to move downward, avoiding them from being blocked by the overall structure of the lifting frame 107 during movement. The protective cylinder 203 and the four connecting rods 204 are fixed between the support plates 107a, and are linked with the mounting plate 205 and the placement plate 202 to form a complete rotating support system. The linkage design of the support plate 107a and the lifting block 106 enables the entire lifting frame 107 to move up and down synchronously with the lifting block 106, realizing flexible adjustment of the height of the single crystal furnace while maintaining the normal operation of the rotating mechanism 200. Such a design not only improves the functionality of the overall device, but also ensures the coordinated operation and efficiency improvement of each module.

[0044] Furthermore, the four groups of buffer components 201 respectively include fixed blocks 201a fixedly installed on the left and right ends of the outer sides of the two support plates 107a. The fixed blocks 201a serve as the basic supporting components of the buffer components 201 and are responsible for firmly fixing the structure of the buffer components 201 on the outer sides of the support plates of the lifting frame 107, thereby providing a stable installation foundation for the entire buffer system. The top ends of the four fixed blocks 201a are telescopically connected to the limit rod 201b. The limit rod 201b, through its telescopic structure, works together with the buffer spring 201c to guide and limit the movement range of the buffer component 201, ensuring that the placement plate 202 moves up and down smoothly and orderly. The outer surfaces of the four limit rods 201b are sleeved with buffer springs 201c. The main function of the buffer spring 201c is to absorb the gravity impact force during the placement of the single crystal furnace, provide effective shock absorption and buffering effects for the placement plate 202, and protect the placement plate 202 and other components of the rotating mechanism 200 from damage by excessive impact force. The bottom ends of the four buffer springs 201c are respectively fixedly connected to the upper surfaces of the four fixed blocks 201a to form a stable support base, while ensuring that the compression and recovery actions of the buffer spring 201c can be accurately transmitted to the limit rod 201b and the placement plate 202. The bottom end of the placement plate 202 is fixedly connected to the top ends of four limit rods 201b and buffer springs 201c. As the direct supporting platform of the single crystal furnace in the rotating mechanism 200, the placement plate 202 effectively reduces the vibration and impact caused by the gravity of the single crystal furnace through the linkage of the buffer assembly 201, thereby improving the overall operating stability of the device. In addition, the buffer assembly 201 ensures that the placement plate 202 can float up and down to adapt to the gravity changes of the single crystal furnace through the cooperation of the fixed block 201a, the limit rod 201b and the buffer spring 201c, while providing reliable support for the rotation operation, thereby ensuring the safety and stability of the single crystal furnace during operation.

[0045] Preferably, the rotating shaft 209 is rotatably connected to the center of the protective tube 203 and the placement plate 202 through a bearing 210. The function of the bearing 210 is to provide low-friction rotation support for the rotating shaft 209, ensuring that the rotating shaft 209 runs smoothly and efficiently during the rotation process. By setting the bearing 210, the direct friction between the rotating shaft 209 and the protective tube 203 and the placement plate 202 can be effectively reduced, the wear caused by long-term rotation can be reduced, and the service life of the rotating shaft and related components can be extended.

[0046] This embodiment realizes the height adjustment, direction adjustment and shock absorption functions of the single crystal furnace through the coordinated cooperation of the lifting mechanism 100, the rotating mechanism 200 and the buffer assembly 201. The lifting function is driven by the stepping motor 102 to rotate the active spur gear 103, and the power is transmitted to the threaded rod 105 through the meshing connected driven spur gear 104. The rotation of the threaded rod 105 is converted into the linear motion of the lifting block 106 through the thread pair with the lifting block 106. The lifting block 106 moves up and down along the mounting column 101, and the rollers 108 on both sides thereof are embedded in the slide groove 101a to provide guidance, ensuring smooth movement and no deviation, and at the same time driving the lifting frame 107 fixed at the front end of the lifting block 106 and the single crystal furnace to rise and fall synchronously. The rotation function is powered by the servo motor 206, which transmits the rotation to the active bevel gear 207 through the coupling, and drives the driven bevel gear 208 to rotate through meshing, further driving the rotating shaft 209 fixed at its top to rotate. The rotating shaft 209 directly drives the single crystal furnace to adjust the direction through the plug-in structure, while the placement plate 202 remains stationary to ensure that other components are not disturbed during the rotation process. The shock absorption function is achieved through the buffer component 201. The gravity of the single crystal furnace causes the placement plate 202 and the buffer component 201 to move downward. The extension and retraction action of the limit rod 201b is absorbed by the buffer spring 201c to protect the placement plate 202 and the rotating mechanism 200 from excessive impact, thereby improving the stability and safety of the overall operation. Through the above design, each component is precisely linked to achieve high flexibility, stability and reliability in the operation of the single crystal furnace.

[0047] Example 2

[0048] Reference Figures 4 to 11 The second embodiment of the present invention adds a clamping mechanism 300 on the basis of the first embodiment, which is used to realize automatic clamping and stabilization of the single crystal furnace.

[0049] Specifically, the clamping mechanism 300 includes a fixed plate 301 fixedly mounted on the top of the lifting frame 107. The fixed plate 301 is sleeved on the outside of the protective tube 203 to play the role of limiting support, providing a stable foundation and guide for the movement of the sleeve 302 and the fan-shaped plate 303. The top of the fixed plate 301 is rotatably connected to the sleeve 302. The sleeve 302 can realize the rotation function at the top of the fixed plate 301. Its rotation is driven by the overall linkage of the clamping mechanism 300, thereby driving the two fan-shaped plates 303 symmetrically mounted on the left and right sides of the top of the sleeve 302 to rotate synchronously. The rotation of the fan-shaped plate 303 is the key to the action of the clamping mechanism 300. The top ends of the two fan-shaped plates 303 are respectively connected to the two baffles 305 through the transmission rod 304. The rotational movement of the fan-shaped plate 303 is converted into horizontal linear motion through the transmission rod 304, pushing the transmission rod 304 to move relatively horizontally. The horizontal movement of the transmission rod 304 further drives the two baffles 305 to slide on the front and rear sides of the top of the placement plate 202. The baffles 305 gradually approach each other during the sliding process, and the single crystal furnace placed on the placement plate 202 is limitedly clamped through their relative sliding.

[0050] More specifically, the front and rear ends of the outer wall of the protective tube 203 are symmetrically provided with toggle rods 211, and the front and rear sides of the sleeve 302 are symmetrically provided with first arc grooves 302a adapted to the two toggle rods 211, and the outermost ends of the two toggle rods 211 are respectively slidably connected to the tops of the two first arc grooves 302a. When the single crystal furnace is placed on the placement plate 202, due to the gravity of the single crystal furnace itself, the placement plate 202 will compress the buffer spring 201c downward, and at the same time, the protective tube 203 will be driven to move vertically downward during the downward movement of the placement plate 202. The downward movement of the protective tube 203 further drives the toggle rods 211 to move vertically downward, and the outer ends of the two toggle rods 211 are slidably connected in the first arc grooves 302a. Since the groove wall of the first arc groove 302a is designed to be arc-shaped, when the toggle rod 211 moves vertically downward, its outer end is horizontally offset under the guidance of the first arc groove 302a, forming a certain rotational torque, thereby causing the sleeve 302 to rotate around its connection point.

[0051] Furthermore, second arc grooves 303a are arranged in the same direction inside the two fan-shaped plates 303, and straight grooves 202a are symmetrically opened at the front and rear ends of the placement plate 202, and the ends of the two straight grooves 202a are on the same axis as the ends of the two second arc grooves 303a, and the bottom ends of the two transmission rods 304 are respectively slidably connected in the two second arc grooves 303a, and the top ends thereof pass through the straight grooves 202a and extend to the top end of the placement plate 202, and are fixedly connected to the bottom ends of the two baffles 305. When the sleeve 302 rotates, it drives the two fan-shaped plates 303 to rotate synchronously. The second arc groove 303a inside the fan-shaped plate 303 guides the movement of the slidingly connected transmission rod 304, and converts the rotational movement of the fan-shaped plate into the movement of the transmission rod 304. Due to the arc design of the second arc groove 303a, the bottom end of the transmission rod 304 will approach the center of the fan-shaped plate 303. However, since the top end of the transmission rod 304 is limited in the straight groove 202a, its movement trajectory is limited to straight line motion rather than arc motion. Therefore, the transmission rod 304 completes the straight line motion under the guidance of the straight groove 202a, thereby driving the two baffles 305 to approach each other, thereby clamping and fixing the single crystal furnace.

[0052] In this process, the fan-shaped plate 303, as the motion transmission component of the sleeve 302, provides the motion path of the transmission rod 304 through the second arc groove 303a, and converts the rotational motion into linear motion; the linear groove 202a limits the motion trajectory of the transmission rod 304, ensuring the stability and accuracy of the motion direction; the transmission rod 304, as a key transmission component, finally drives the baffle 305 to complete the clamping action. This design effectively utilizes the linkage characteristics of the arc groove and the linear groove 202a, realizes the efficient conversion from rotational motion to linear motion, ensures the stability and reliability of the clamping process, and improves the accuracy and practicality of the device operation.

[0053] Preferably, the opposing surfaces of the two baffles 305 are provided with balls 306, part of the balls 306 are rollingly connected to the inside of the baffle 305, and part of them are arranged on the outside of the baffle 305. The function of the balls 306 is to provide a flexible contact surface for the clamping of the single crystal furnace, so as to avoid damage to the surface of the single crystal furnace due to excessive friction during the clamping process. At the same time, the balls 306 can reduce the contact resistance between the baffle 305 and the single crystal furnace, so that the single crystal furnace can maintain smooth movement during rotation without being affected by the clamping force. The rolling design of the balls 306 also ensures the stability of the clamping action. Even under a higher clamping pressure, the flexibility of the balls 306 can alleviate the concentration of local stress, thereby improving the reliability and service life of the device.

[0054] The clamping function of this embodiment is realized by gravity drive and mechanical linkage. When the single crystal furnace is placed on the placement plate 202, due to its gravity, the placement plate 202 compresses the buffer spring 201c downward and drives the protective tube 203 to move downward, further driving the toggle rod 211 to move vertically downward. The outer end of the toggle rod 211 is slidably connected in the first arc groove 302a of the sleeve 302. Under the guidance of the arc groove, the downward movement of the toggle rod 211 is converted into the rotation of the sleeve 302. The rotation of the sleeve 302 simultaneously drives the two fan-shaped plates 303 to rotate synchronously. The second arc groove 303a inside the fan-shaped plate 303 guides the slidingly connected transmission rod 304 to move inward. The top end of the transmission rod 304 is restricted by the constraint of the straight groove 202a, and its movement trajectory is limited to straight line motion, thereby driving the two baffles 305 to approach each other to complete the clamping and fixation of the single crystal furnace. In addition, the ball 306 arranged on the inner side of the baffle 305 provides a flexible contact surface during the clamping process, which not only protects the surface of the single crystal furnace from damage, but also ensures that the single crystal furnace can maintain smooth movement during rotation, ultimately achieving a safe and reliable limit clamping function.

[0055] Importantly, it should be noted that the construction and arrangement of the present application shown in a plurality of different exemplary embodiments are only exemplary. Although only a few embodiments are described in detail in this disclosure, it should be readily understood by those who refer to this disclosure that many modifications are possible (e.g., the size, scale, structure, shape and proportion of various elements, and parameter values ​​(e.g., temperature, pressure, etc.), installation arrangement, use of materials, color, directional changes, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in the application. For example, the element shown as integrally formed can be composed of multiple parts or elements, the position of the element can be inverted or otherwise changed, and the nature or number or position of the discrete element can be changed or changed. Therefore, all such modifications are intended to be included in the scope of the present invention. The order or sequence of any process or method steps can be changed or reordered according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure of performing the function described herein, and is not only structurally equivalent but also equivalent structure. Without departing from the scope of the present invention, other replacements, modifications, changes and omissions can be made in the design, operating conditions and arrangement of the exemplary embodiments. Therefore, the invention is not limited to a specific embodiment, but extends to numerous modifications still falling within the scope of the appended claims.

[0056] Additionally, in order to provide a concise description of exemplary embodiments, all features of an actual embodiment (ie, those features that are not relevant to the best mode presently contemplated for carrying out the invention or those that are not relevant to implementing the invention) may not be described.

[0057] It will be appreciated that in the development of any actual implementation, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will be a routine task of design, fabrication, and production for those of ordinary skill having the benefit of this disclosure without undue experimentation.

[0058] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. A simple assembly mechanism for a single crystal furnace, characterized in that: include, The lifting mechanism (100) comprises a mounting column (101), a stepper motor (102) is fixedly mounted on the top of the mounting column (101), an output end of the stepper motor (102) is connected to a driving spur gear (103) through a coupling, a front side of the driving spur gear (103) is meshedly connected to a driven spur gear (104), a bottom end of the driven spur gear (104) is fixedly connected to a threaded rod (105), a surface of the threaded rod (105) is threadedly connected to a lifting block (106), and a front end of the lifting block (106) is fixedly connected to a lifting frame (107); The rotating mechanism (200) comprises a buffer assembly (201) fixedly mounted on the outside of the lifting frame (107), wherein the buffer assembly (201) is provided in four groups, wherein the top ends of the four groups of buffer assemblies (201) are fixedly connected to a placement plate (202), the center of the bottom end of the placement plate (202) is fixedly connected to a protective tube (203), and the bottom end of the placement plate (202) and the outer side of the protective tube (203) are arranged with four connecting rods (204) in a circular array, and the bottom ends of the four connecting rods (204) are fixedly connected to A mounting plate (205) is provided, a servo motor (206) is fixedly mounted on the rear side of the mounting plate (205), an output end of the servo motor (206) is connected to a driving bevel gear (207) through a coupling, a front side of the driving bevel gear (207) is meshedly connected to a driven bevel gear (208), a top end of the driven bevel gear (208) is fixedly connected to a rotating shaft (209), a top end of the rotating shaft (209) passes through the mounting plate (205) and the protective tube (203) and extends to the top end of the placement plate (202); and, The clamping mechanism (300) comprises a fixed plate (301) fixedly mounted on the top of the lifting frame (107), and the fixed plate (301) is sleeved on the outer side of the protective tube (203), the top of the fixed plate (301) is rotatably connected to a sleeve (302), and fan-shaped plates (303) are obliquely symmetrically mounted on the left and right sides of the top of the sleeve (302), the tops of the two fan-shaped plates (303) are both connected to baffles (305) through transmission rods (304), and the two baffles (305) are slidably connected to the front and rear sides of the top of the placement plate (202).

2. The simple assembly mechanism for a single crystal furnace according to claim 1, characterized in that: There are two lifting blocks (106) in total, and the left and right sides of the two lifting blocks (106) are rotatably connected with rollers (108), the inner side walls of the left and right ends of the mounting column (101) are provided with sliding grooves (101a), and the two groups of rollers (108) are respectively slidably connected in the two sliding grooves (101a).

3. The simple assembly mechanism for a single crystal furnace according to claim 2, characterized in that: The lifting frame (107) comprises support plates (107a) fixedly mounted on the left and right sides of the front ends of the two lifting blocks (106); the front ends of the two support plates (107a) are fixedly connected via a connecting plate (107b); and the protective tube (203) and the four connecting rods (204) are arranged between the two support plates (107a).

4. The simple assembly mechanism for a single crystal furnace according to claim 3, characterized in that: The four groups of buffer components (201) respectively include fixed blocks (201a) fixedly mounted on the left and right ends of the outer sides of the two support plates (107a); the top ends of the four fixed blocks (201a) are telescopically connected to the limiting rods (201b); the outer surfaces of the four limiting rods (201b) are sleeved with buffer springs (201c); the bottom ends of the four buffer springs (201c) are respectively fixedly connected to the upper surfaces of the four fixed blocks (201a); and the bottom end of the placement plate (202) is fixedly connected to the four limiting rods (201b) and the top ends of the buffer springs (201c).

5. The simple assembly mechanism for a single crystal furnace according to claim 4, characterized in that: The rotating shaft (209) is rotatably connected to the center of the protective tube (203) and the placement plate (202) via a bearing (210).

6. The simple assembly mechanism for a single crystal furnace according to claim 5, characterized in that: The front and rear ends of the outer wall of the protective tube (203) are symmetrically provided with toggle rods (211), and the front and rear sides of the sleeve (302) are symmetrically provided with first arc grooves (302a) adapted to the two toggle rods (211), and the outermost ends of the two toggle rods (211) are respectively slidably connected to the top ends of the two first arc grooves (302a).

7. The simple assembly mechanism for a single crystal furnace according to claim 6, characterized in that: The two fan-shaped plates (303) are provided with second arc grooves (303a) in the same direction, and the front and rear ends of the placement plate (202) are symmetrically provided with straight grooves (202a), and the ends of the two straight grooves (202a) and the ends of the two second arc grooves (303a) are on the same axis, the bottom ends of the two transmission rods (304) are respectively slidably connected in the two second arc grooves (303a), and the top ends of the two transmission rods (304) respectively penetrate the two straight grooves (202a) and extend to the top end of the placement plate (202) and are fixedly connected to the bottom ends of the two baffles (305).

8. The simple assembly mechanism for a single crystal furnace according to claim 7, characterized in that: Ball bearings (306) are arranged on opposite surfaces of the two baffles (305), and part of the ball bearings (306) is rollingly connected inside the baffle (305), and part of the ball bearings (306) is arranged outside the baffle (305).

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