Vacuum coating equipment for silicon oxide high-barrier film

Abstract

The invention discloses vacuum coating equipment for a silicon oxide high-barrier film, and relates to the technical field of vacuum coating equipment for the silicon oxide high-barrier film. The vacuum coating equipment for the silicon oxide high-barrier film comprises a box body, a sealing door is hinged to the front face of the box body through hinges, and a handle is fixed to the front face of the sealing door; and a vacuumizing device is fixed on the upper surface of the inner wall of the box body. According to the vacuum coating equipment for the silicon oxide high-barrier film, a motor drives a driving shaft to rotate and drives a gear to rotate, when the gear rotates, a movable plate is driven to move up and down, a movable rod is driven to move up and down in cooperation with rotation of a first hinge rod and a second hinge rod, and when moving up and down, the movable rod drives a stirring plate to swing in cooperation with a telescopic rod; the stirring plate swings to flap silicon oxide molecules, the movement speed of the silicon oxide molecules is increased, the silicon oxide molecules can be better diffused in the box body, the thickness of a workpiece coating is more uniform, and the coating quality is improved.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum coating equipment for silicon oxide high-barrier films, and in particular to vacuum coating equipment for silicon oxide high-barrier films. Background Art

[0002] As the modern packaging industry's requirements for product freshness, shelf life and quality protection continue to increase, the demand for high-barrier packaging materials is growing. Silicon oxide films have excellent gas barrier properties, such as good barrier effects against oxygen and water vapor, and are widely used in many fields such as food, medicine, and electronics.

[0003] The patent announcement number is CN221777975U, which is an easy-to-operate vacuum coating equipment. The above application includes a vacuum coating box, the front of the vacuum coating box is rotatably connected to a box door, and a heating component is arranged on the top of the inner cavity of the vacuum coating box. A first motor is bolted to the bottom of the right side of the vacuum coating box, and the output shaft of the first motor is fixedly connected to a first rotating shaft, the left side of the first rotating shaft is bolted to a box body, and the left side of the box body is bolted to a second rotating shaft, and the left side of the second rotating shaft is rotatably connected to the bottom of the left side of the inner cavity of the vacuum coating box through a bearing, and the inner cavity of the box body is provided with a fixing component, and workpieces of different sizes are fixed by the cooperation of the second motor, the driving gear, the driven gear, the threaded rod, the threaded block and the limit plate, so as to facilitate the coating operation, facilitate the coating, and avoid the workpiece from falling during the coating.

[0004] When the above-mentioned vacuum coating equipment fixes the workpiece, it will inevitably block part of the workpiece, making it impossible to coat the blocked part, and the workpiece does not move during coating, making it difficult to ensure the uniformity of the film layer. The deposition of the coating material at different positions will be different, and it is easy for some parts of the workpiece to have thick films and some parts to have thin films, affecting the coating quality and performance, and local defects may occur. In a fixed position, it is easy for factors such as airflow and evaporation source angle to cause impurity accumulation and incomplete film layers in some parts, reducing the qualified rate of finished products. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides a vacuum coating device for a silicon oxide high-barrier film, which solves the problems raised in the above-mentioned background technology.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: a vacuum coating device for silicon oxide high barrier film, comprising a box body, a sealed door hinged on the front of the box body by hinges, a handle fixed on the front of the sealed door, a vacuum device fixed on the upper surface of the inner wall of the box body, a heating evaporation component fixed on the bottom surface of the vacuum device, a cylinder fixed on the side wall of the inner wall of the box body, a piston rod connected to the cylinder piston, a motor fixed to the end point of the piston rod, a fixing plate fixed to the inner wall of the box body, a driving shaft at the output end of the motor passes through the fixing plate, and the passing part is in contact, the motor is slidably mounted on the inner wall of the box body, and when the cylinder is started, the piston rod can drive the motor to move, and when the motor is started, it can The motor is capable of driving the driving shaft to rotate, the box body is provided with a spoiler component for accelerating the movement of silicon oxide vapor molecules, the box body is provided with a clamp component for driving the coated object to rotate, and the clamp component is provided with a positioning component for instantly pushing the coated object; wherein the spoiler component includes a gear, a saw plate, a movable plate, a first hinged rod, a second hinged rod, a movable rod, a telescopic rod, a stirrer, a cross bar, a first slide groove, a slider, a spoiler, a connecting rod and a sliding ball, the gear is slidably installed on the outer wall of the driving shaft, and the gear is rotatably installed on the side wall of the fixed plate, the side wall of the fixed plate is slidably provided with a saw plate, the saw plate is meshed with the gear, the bottom surface of the saw plate is fixed with a movable plate, and the bottom surface of the movable plate is hinged with the first hinged rod.

[0007] According to the above technical solution, one end of the first hinged rod away from the movable plate is hinged to the second hinged rod, and one end of the second hinged rod away from the first hinged rod is hinged to the bottom surface of the inner wall of the box body, and a movable rod passes through the hinge of the first hinged rod and the second hinged rod, and the penetration is rotatably connected. When the tooth part of the gear rotates to the saw tooth of the saw plate, it drives the saw plate to slide upward. When the saw plate slides upward, it drives the movable plate fixedly connected to its bottom surface to move upward. When the movable plate moves upward, it drives the end of the first hinged rod hinged to the movable plate to move upward. The second hinged rod is hinged to the first hinged rod, driving the hinge of the first hinged rod to rotate while moving.

[0008] According to the above technical solution, the movable rod passes through the telescopic rod and is slidably connected at the penetration point. The bottom surface of the inner wall of the box body is hinged with a stirrer plate, and a cross bar is fixed to the side wall of the stirrer plate. The cross bar passes through one end of the telescopic rod away from the movable rod and is slidably connected at the penetration point. The side wall of the stirrer plate is provided with a first sliding groove.

[0009] According to the above technical solution, a slider is sliding on the inner wall of the first slide groove, a spoiler is hinged on the bottom surface of the inner wall of the box body, a connecting rod is fixed to the side wall of the spoiler, a sliding ball is fixed to the end of the connecting rod away from the spoiler, the outer wall of the sliding ball is slidably connected to the inner wall of the slider, the swing of the spoiler can drive the connecting rod to move up and down, the up and down movement of the connecting rod drives the spoiler to rotate, and the rotation of the spoiler fans the silicon oxide molecules at the bottom of the coated workpiece to move upward.

[0010] According to the above technical solution, the clamp assembly includes a clamp block, a push rod, a rotating shaft, a torsion spring, a baffle, a second slide groove, a first spring, a knocking block and a protrusion. The clamp block is fixedly connected to the end of the drive shaft away from the cylinder, the push rod is fixed to the upper surface of the movable plate, the rotating shaft passes through the clamp block, and the penetration point is rotationally connected.

[0011] According to the above technical solution, a torsion spring is rotated on the outer wall of the rotating shaft, and a baffle is fixed on the outer wall of the rotating shaft, one end of the torsion spring passes through the side wall of the clamping block and is fixedly connected at the penetration point, and the other end of the torsion spring passes through the baffle and is fixedly connected at the penetration point. When the movable plate moves upward, it drives the push rod to move upward. When the push rod moves upward, it slides along the angle formed by the baffle and the clamping block, lifts the baffle, and folds the baffle. When the push rod moves to the highest point, the clamping block rotates to the vertical direction, the baffle is at a right angle to the clamping block, and the baffle supports the workpiece being coated at the bottom end of the clamping block.

[0012] According to the above technical solution, a second slide groove is opened on the side wall of the clamping block, a first spring is fixed to the upper and lower end surfaces of the inner wall of the second slide groove, a knocking block is fixed to one end of the first spring away from the upper and lower end surfaces of the second slide groove, and protrusions are fixed to the outer walls at both ends of the rotating shaft.

[0013] According to the above technical solution, the positioning assembly includes a rolling rod, a third hinged rod, a second spring and a positioning block. The rolling rod is rotatably connected to the inner wall of the clamping block, the third hinged rod is hinged on the side of the knocking block away from the first spring, the second spring is fixed to the side wall of the clamping block, and the positioning block is fixed to the end of the second spring away from the clamping block.

[0014] The present invention provides a vacuum coating device for silicon oxide high barrier film, which has the following beneficial effects:

[0015] 1. The present invention drives the driving shaft to rotate through a motor, which drives the gear to rotate. When the gear rotates, it drives the movable plate to move up and down, and cooperates with the rotation of the first hinged rod and the second hinged rod to drive the movable rod to move up and down. When the movable rod moves up and down, it cooperates with the telescopic rod to drive the stirring plate to swing. The swing of the stirring plate fans the silicon oxide molecules, accelerates the movement speed of the silicon oxide molecules, and enables the silicon oxide molecules to be better diffused inside the box, so that the thickness of the workpiece coating is more uniform, and the coating quality is improved; through the swing of the stirring plate, in conjunction with the linkage of the slider and the sliding ball, the connecting rod is driven to move up and down, and the up and down movement of the connecting rod drives the spoiler to rotate. The rotation of the spoiler fans the silicon oxide molecules at the bottom of the coated workpiece to move upward, thereby preventing the silicon oxide molecules from moving along a certain trajectory, resulting in the deposition of the coating material in a relatively concentrated manner and uneven coating of the workpiece.

[0016] 2. The present invention drives the push rod to move upward by the movement of the movable plate. When the baffle rotates to the downward position, the push rod pushes the baffle upward to fold the baffle, and supports the workpiece being coated at the bottom to prevent the workpiece from falling when the clamp rotates. The baffle is deployed in cooperation with the torsion spring when it rotates upward to avoid blocking the coating area of ​​the workpiece, affecting the coating of the workpiece and reducing the integrity of the coating. The baffle drives the rotating shaft to rotate, and the rotation of the rotating shaft drives the protrusion to rotate. The protrusion lifts the knocking block when it rotates, and cooperates with the elastic force of the first spring to make the knocking block knock on the baffle, so that impurities that may exist on the workpiece fall off, and impurities that may exist on the workpiece are prevented from affecting the silicon oxide molecules adhering to the workpiece and affecting the coating effect.

[0017] 3. The present invention drives the third hinged rod to rotate by sliding the knocking block up and down, pushing the positioning block to move toward the center. The positioning blocks on both sides cooperate with the rolling rod to push the workpiece being coated toward the center to prevent the workpiece from falling from the side. After the pushing is completed, the workpiece is reset by the elastic force of the second spring to avoid obstruction of the side of the workpiece and affect the coating of the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 It is a schematic diagram of the internal structure of the present invention;

[0020] Figure 3 It is a schematic diagram of the structure of the spoiler assembly of the present invention;

[0021] Figure 4 For the present invention Figure 3 A schematic diagram of the local enlarged structure of area A;

[0022] Figure 5 It is a schematic diagram of the internal single-side structure of the present invention;

[0023] Figure 6This is a schematic diagram of the positioning assembly structure of the present invention;

[0024] Figure 7 It is a schematic diagram of the structure of the clamp assembly of the present invention.

[0025] In the figure: 1, box body; 2, sealing door; 3, handle; 4, vacuum device; 5, heating evaporation component; 6, cylinder; 7, piston rod; 8, motor; 9, fixed plate; 10, spoiler component; 101, gear; 102, saw plate; 103, movable plate; 104, first hinge rod; 105, second hinge rod; 106, movable rod; 107, telescopic rod; 108, agitator plate; 109, cross bar; 1010, first slide; 10 11. Sliding block; 1012. Spoiler; 1013. Connecting rod; 1014. Sliding ball; 11. Clamp assembly; 111. Clamp block; 112. Push rod; 113. Rotating shaft; 114. Torsion spring; 115. Baffle; 116. Second slide groove; 117. First spring; 118. Knocking block; 119. Bump; 12. Positioning assembly; 121. Rolling rod; 122. Third hinged rod; 123. Second spring; 124. Positioning block. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] See also Figure 1-Figure 7One embodiment of the present invention is: a vacuum coating device for silicon oxide high barrier film, comprising a box body 1, a sealed door 2 is hinged on the front of the box body 1 through a hinge, after the sealed door 2 is closed, the sealed door 2 prevents external air from entering the box body 1, a handle 3 is fixed on the front of the sealed door 2, a vacuum device 4 is fixed on the upper surface of the inner wall of the box body 1, the vacuum device 4 extracts the air inside the box body 1, so that the inside of the box body 1 is infinitely close to a vacuum state, a heating evaporation component 5 is fixed on the bottom surface of the vacuum device 4, the heating evaporation component 5 heats the silicon oxide to make steam molecules output downward for coating, the inner wall of the box 1 A cylinder 6 is fixed to the side wall, and a piston rod 7 is connected to the piston of the cylinder 6. The driving cylinder 6 drives the piston rod 7 to move closer to the middle to clamp the workpiece to be coated. A motor 8 is fixed to the end point of the piston rod 7. The driving shaft of the output end of the motor 8 passes through the fixed plate 9, and the penetration is fitted. The fixed plate 9 is fixed to the inner wall of the box body 1, and the motor 8 is slidably installed on the inner wall of the box body 1. The box body 1 is provided with a spoiler component 10 for accelerating the movement of silicon oxide vapor molecules. The box body 1 is provided with a clamp component 11 for driving the coated object to rotate. The clamp component 11 is provided with a positioning component 12 for instantly pushing the coated object.

[0028] Among them, the spoiler assembly 10 includes a gear 101, a saw plate 102, a movable plate 103, a first hinged rod 104, a second hinged rod 105, a movable rod 106, a telescopic rod 107, a stirrer 108, a cross bar 109, a first slide groove 1010, a slider 1011, a spoiler 1012, a connecting rod 1013 and a sliding ball 1014. The gear 101 is slidably mounted on the outer wall of the drive shaft, and the gear 101 is rotatably mounted on the side wall of the fixed plate 9. When the drive shaft rotates, the gear 101 is driven to rotate. The side wall of the fixed plate 9 slides with the saw plate 102, and the saw plate 102 is meshed with the gear 101. When the gear tooth part of the gear 101 rotates to the saw teeth of the saw plate 102, it drives the saw plate 102 to slide upward. The bottom surface of the saw plate 102 is fixed with a movable When the saw plate 102 slides upward, the movable plate 103 fixedly connected to its bottom surface is driven to move upward. The bottom surface of the movable plate 103 is hinged with a first hinged rod 104. When the movable plate 103 moves upward, it drives the first hinged rod 104 and one end of the movable plate 103 hinged to move upward. The end of the first hinged rod 104 away from the movable plate 103 is hinged with a second hinged rod 105. The end of the second hinged rod 105 away from the first hinged rod 104 is hinged to the bottom surface of the inner wall of the box body 1. The second hinged rod 105 is hinged to the first hinged rod 104 and drives the hinge of the first hinged rod 104 to rotate while moving. The hinge of the first hinged rod 104 and the second hinged rod 105 is penetrated by a movable rod 106, and the penetration is rotatably connected. When one end of the hinged rod 104 moves upward, its other end also moves upward, driving the movable rod 106 to move upward. The movable rod 106 penetrates the telescopic rod 107 and is slidably connected at the penetration point. When the movable rod 106 moves upward, the telescopic rod 107 whose outer wall slides also moves upward with the movable rod 106. The bottom surface of the inner wall of the box body 1 is hinged with a stirrer plate 108, and the side wall of the stirrer plate 108 is fixed with a cross bar 109. The bottom end of the stirrer plate 108 is hinged to the bottom surface of the inner wall of the box body 1, so the cross bar 109 moves upward to drive the stirrer plate 108 to rotate toward the center around the hinge with the box body 1. The cross bar 109 penetrates one end of the telescopic rod 107 away from the movable rod 106, and is slidably connected at the penetration point. When the telescopic rod 107 moves upward, it drives the cross bar 109 When the spoiler 108 moves upward, a first slide groove 1010 is provided on the side wall of the spoiler 108, and a slider 1011 slides on the inner wall of the first slide groove 1010. When the spoiler 108 rotates toward the center, the slider 1011 is driven to rotate together by the first slide groove 1010 slidably connected with the slider 1011. A spoiler 1012 is hinged on the bottom surface of the inner wall of the box body 1, and a connecting rod 1013 is fixed to the side wall of the spoiler 1012. When the connecting rod 1013 moves upward, the spoiler 1012 is driven to move upward at one end away from the box body 1. Therefore, when the connecting rod 1013 moves upward, the spoiler 1012 is driven to rotate toward the center. A sliding ball 1014 is fixed on the end of the connecting rod 1013 away from the spoiler 1012, and the outer wall of the sliding ball 1014 is slidably connected to the inner wall of the slider 1011.The spoiler assembly 10 drives the driving shaft to rotate through the motor 8, which drives the gear 101 to rotate. When the gear 101 rotates, it drives the movable plate 103 to move up and down, and cooperates with the rotation of the first hinge rod 104 and the second hinge rod 105 to drive the movable rod 106 to move up and down. When the movable rod 106 moves up and down, it cooperates with the telescopic rod 107 to drive the agitator plate 108 to swing. The swing of the agitator plate 108 fans the silicon oxide molecules, accelerates the movement speed of the silicon oxide molecules, and allows the silicon oxide molecules to be better diffused inside the box 1, so that the thickness of the workpiece coating is more uniform and the coating quality is improved; through the swing of the agitator plate 108, in conjunction with the linkage of the slider 1011 and the sliding ball 1014, the connecting rod 1013 is driven to move up and down, and the up and down movement of the connecting rod 1013 drives the spoiler plate 1012 to rotate. The spoiler plate 1012 rotates at the bottom of the coated workpiece to fan the silicon oxide molecules upward to prevent the silicon oxide molecules from moving along a certain trajectory, resulting in the deposition of the coating material in a relatively concentrated manner and uneven coating of the workpiece.

[0029] When this embodiment is working: the workpiece to be coated is placed in the middle, and the driving cylinder 6 drives the piston rod 7 to approach the middle, which can drive the motor 8 and the driving shaft to move, so that the driving shaft drives the clamping block 111 to move, so that the clamping block 111 clamps the workpiece to be coated. After closing the sealing door 2, the vacuum device 4 is first used to extract the air inside the box 1 to make the inside of the box 1 infinitely close to a vacuum state, and then the silicon oxide is heated by the heating evaporation component 5 to make steam molecules output downward for coating. During the coating process, the motor 8 is always running, the driving shaft rotates, and the clamping block 111 drives the workpiece to be coated to rotate.

[0030] The motor 8 drives the drive shaft to rotate, driving the gear 101 to rotate, and the gear teeth of the gear 101 mesh with the saw plate 102. Therefore, when the gear teeth of the gear 101 rotate to the saw teeth of the saw plate 102, the saw plate 102 is driven to slide upward. When the saw plate 102 slides upward, the movable plate 103 fixedly connected to its bottom surface is driven to move upward. When the movable plate 103 moves upward, the end of the first hinge rod 104 hinged to the movable plate 103 is driven upward, and the second hinge rod 104 is driven to move upward. The connecting rod 105 is hinged thereto, so the end of the second hinged rod 105 hinged thereto moves upward with the first hinged rod 104, and the other end of the second hinged rod 105 is hinged to the bottom surface of the inner wall of the box body 1, so the hinge between the second hinged rod 105 and the first hinged rod 104 rotates while moving. When one end of the first hinged rod 104 moves upward, the other end thereof also moves upward, driving the movable rod 106 to move upward. When the movable rod 106 moves upward, its outer wall slides. The telescopic rod 107 also moves upward with the movable rod 106, and a cross bar 109 runs through the telescopic rod 107. When the telescopic rod 107 moves upward, it drives the cross bar 109 to move upward. The bottom end of the agitator plate 108 is hinged to the bottom surface of the inner wall of the box body 1, so the cross bar 109 moves upward to drive the agitator plate 108 to rotate toward the center around the hinge with the box body 1. When the agitator plate 108 rotates toward the center, it drives the first slide groove 1010 slidably connected to the slider 1011 to move. The slider 1011 rotates together, and the length of the spoiler 1012 and the connecting rod 1013 remains unchanged. Therefore, when the spoiler 108 rotates toward the center, the connecting rod 1013 needs to move upward to adapt to the change in the distance between the two sets of sliders 1011. The bottom end of the spoiler 1012 is hinged to the box body 1, so when the connecting rod 1013 moves upward, it drives the spoiler 1012 to rotate toward the center. Therefore, when the spoiler 108 rotates toward the center, it drives the spoiler 1012 to rotate toward the center.When the tooth part of the gear 101 leaves the sawtooth of the saw plate 102, the saw plate 102 slides downward under the influence of gravity. When the saw plate 102 slides downward, it drives the movable plate 103 fixedly connected to its bottom surface to move downward. When the movable plate 103 moves downward, it drives the first hinge rod 104 and the end of the movable plate 103 hinged to move downward. The second hinge rod 105 is hinged to it, so the end of the second hinge rod 105 hinged to it moves downward with the first hinge rod 104, and the hinge of the second hinge rod 105 and the first hinge rod 104 rotates while moving. When one end of the first hinge rod 104 moves downward, its other end also moves downward, driving the movable rod 106 to move downward. When the movable rod 106 moves downward, the telescopic rod 107 sliding on the outer wall also moves with the movable rod 1 06 moves downward, and a cross bar 109 runs through the telescopic rod 107. When the telescopic rod 107 moves downward, the cross bar 109 is driven to move downward. Therefore, the cross bar 109 moves downward and drives the agitator plate 108 to rotate to both sides around the hinge with the box body 1. When the agitator plate 108 rotates to both sides, the first slide groove 1010 slidably connected with the slider 1011 drives the slider 1011 to rotate together, and the length of the spoiler plate 1012 and the connecting rod 1013 remains unchanged. Therefore, when the agitator plate 108 rotates to both sides, the connecting rod 1013 needs to move downward to adapt to the change in the distance between the two sets of sliders 1011. When the connecting rod 1013 moves downward, it drives the spoiler plate 1012 to rotate to both sides. Therefore, when the agitator plate 108 rotates to both sides, it drives the spoiler plate 1012 to rotate to both sides. ;

[0031] See also Figure 5-Figure 7On the basis of the above embodiment, in another embodiment of the present invention, the clamp assembly 11 includes a clamp block 111, a push rod 112, a rotating shaft 113, a torsion spring 114, a baffle 115, a second slide groove 116, a first spring 117, a knocking block 118 and a protrusion 119. The clamp block 111 is fixedly connected to the end of the driving shaft away from the cylinder 6. The push rod 112 is fixed to the upper surface of the movable plate 103. When the movable plate 103 moves upward, the push rod 112 is driven to move upward. The clamp block 111 is penetrated by the rotating shaft 113, and the penetration is rotatably connected. The outer wall of the rotating shaft 113 is rotated with a torsion spring 114, and the outer wall of the rotating shaft 113 is rotated. A baffle 115 is fixed, and when the push rod 112 moves upward, it slides along the angle formed by the baffle 115 and the clamping block 111, and lifts up the baffle 115 to fold it. One end of the torsion spring 114 penetrates the side wall of the clamping block 111, and is fixedly connected at the penetration point. The other end of the torsion spring 114 penetrates the baffle 115, and is fixedly connected at the penetration point. When the push rod 112 no longer pushes the baffle 115 to fold, the baffle 115 is expanded by the thrust of the torsion spring 114. A second sliding groove 116 is provided on the side wall of the clamping block 111. The upper and lower end surfaces of the inner wall of the second sliding groove 116 are fixed with a first spring 117. The first spring 117 is away from the second A knocking block 118 is fixed at one end of the upper and lower ends of the slide groove 116. When the knocking block 118 slides upward, the first spring 117 is stretched. The outer walls of the two ends of the rotating shaft 113 are fixed with protrusions 119. When the rotating shaft 113 rotates, it drives the protrusions 119 at both ends to rotate. When the protrusions 119 rotate to the knocking block 118, they push the knocking block 118 to slide upward. The clamp assembly 11 drives the push rod 112 to move upward through the movement of the movable plate 103. When the baffle 115 rotates to the bottom, the push rod 112 cooperates to push the baffle 115 upward, so that the baffle 115 is folded, and the workpiece being coated is supported at the bottom to avoid The workpiece is prevented from falling when the clamp block 111 rotates, and the torsion spring 114 is cooperated to make the baffle 115 unfold when it rotates to the upper side, so as to avoid blocking the coating area of ​​the workpiece, affecting the coating of the workpiece, and reducing the integrity of the coating; the baffle 115 drives the rotating shaft 113 to rotate, and the rotation of the rotating shaft 113 drives the protrusion 119 to rotate. The protrusion 119 lifts the knocking block 118 when rotating, and cooperates with the elastic force of the first spring 117 to make the knocking block 118 knock on the baffle 115, so that impurities that may exist on the workpiece fall off, and it is prevented that the impurities that may exist on the workpiece affect the silicon oxide molecules from adhering to the workpiece, affecting the coating effect.

[0032] The positioning assembly 12 includes a rolling rod 121, a third hinge rod 122, a second spring 123 and a positioning block 124. The rolling rod 121 is rotatably connected to the inner wall of the clamping block 111. The friction force of the rolling rod 121 on the workpiece is smaller to avoid affecting the movement of the workpiece toward the center. The side of the knocking block 118 away from the first spring 117 is hinged with the third hinge rod 122. When the knocking block 118 slides upward, it drives the third hinge rod 122 to move upward. The knocking block 118 and the third hinge rod 122 above it are immovable. Therefore, the third hinge rod 122 moves upward while rotating. The hinge of the two sets of third hinge rods 122 moves to the side with the rotation. The side wall of the clamping block 111 is fixed with the second spring 1 23. A positioning block 124 is fixed at one end of the second spring 123 away from the clamping block 111. When the hinge moves to the side, the positioning block 124 is pushed to move in the direction of the clamping block 111, compressing the second spring 123. The positioning blocks 124 on both sides move toward the center, pushing the workpiece being coated toward the center. The positioning assembly 12 drives the third hinged rod 122 to rotate by the up and down sliding of the knocking block 118, pushing the positioning block 124 to move toward the center. The positioning blocks 124 on both sides cooperate with the rolling rod 121 to push the workpiece being coated toward the center to prevent the workpiece from falling from the side, and after the pushing is completed, it is reset by the elastic force of the second spring 123 to avoid blocking the side of the workpiece and affecting the coating of the workpiece.

[0033] When the present embodiment is working, when the movable plate 103 moves upward, the push rod 112 is driven to move upward. When the push rod 112 moves upward, it slides along the angle formed by the baffle 115 and the clamping block 111, and lifts up the baffle 115, so that the baffle 115 is folded. When the push rod 112 moves to the highest point, the clamping block 111 rotates to the vertical direction, and the baffle 115 is at a right angle to the clamping block 111. The baffle 115 supports the workpiece being coated at the bottom end of the clamping block 111. The driving shaft drives the clamping block 111 to continue to rotate, and the gear teeth of the gear 101 leave the saw plate 102. The saw plate 102 slides downward under the influence of gravity, and the push rod 112 no longer pushes the baffle 115 to fold. At this time, the baffle 115 is expanded by the thrust of the torsion spring 114. When the baffle 115 is fully expanded, the clamping block 111 is rotated 180° compared to the folded state of the baffle 115; the baffle 115 drives the rotating shaft 113 to rotate when it is folded or unfolded. When the rotating shaft 113 rotates, it drives the protrusions 119 at both ends to rotate. When the protrusion 119 rotates to the knocking block 118, it pushes the knocking block 118 to slide upward. When the knocking block 118 slides upward, the first spring 117 is stretched. When the protrusion 119 leaves the knocking block 118, the knocking block 118 slides downward due to the pulling force of the first spring 117, and knocks the baffle 115 when it slides to the lowest point.

[0034] When the knocking block 118 slides upward, it drives the third hinged rod 122 to move upward with one end hinged with it, and the knocking block 118 and the third hinged rod 122 above it do not move, so the third hinged rod 122 moves upward and rotates at the same time, and the hinges of the two groups of third hinged rods 122 move sideways with the rotation, and the hinges move sideways to push the positioning block 124 to move in the direction of the clamping block 111, compressing the second spring 123 during the movement, and the positioning blocks 124 on both sides move toward the center, pushing the workpiece being coated toward the center, and when the knocking block 118 slides downward, it drives the third hinged rod 122 to move downward, and the third hinged rod 122 rotates while moving downward, and the positioning block 124 is no longer subjected to the thrust of the hinge of the third hinged rod 122, but is subjected to the thrust of the second spring 123, so that the positioning block 124 is reset.

[0035] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum coating device for silicon oxide high barrier film, comprising a housing (1), characterized in that: The front of the box (1) is hingedly connected to a sealed door (2), the front of the sealed door (2) is fixed with a handle (3), the upper surface of the inner wall of the box (1) is fixed with a vacuum device (4), the bottom surface of the vacuum device (4) is fixed with a heating evaporation component (5), the side wall of the inner wall of the box (1) is fixed with a cylinder (6), the piston of the cylinder (6) is connected to a piston rod (7), the end point of the piston rod (7) is fixed with a motor (8), and the inner wall of the box (1) is fixed with a vacuum device (4). A fixing plate (9) is fixed to the wall, a driving shaft at the output end of the motor (8) passes through the fixing plate (9), and the passing portion is in close contact, the motor (8) is slidably mounted on the inner wall of the box (1), the box (1) is provided with a spoiler component (10) for accelerating the movement of silicon oxide vapor molecules, the box (1) is provided with a clamp component (11) for driving the coating object to rotate, and the clamp component (11) is provided with a positioning component (12) for instantly pushing the coating object; The spoiler assembly (10) comprises a gear (101), a saw plate (102), a movable plate (103), a first hinged rod (104), a second hinged rod (105), a movable rod (106), a telescopic rod (107), a spoiler (108), a cross bar (109), a first slide groove (1010), a slider (1011), a spoiler (1012), a connecting rod (1013) and a sliding ball (1014); the gear (101) is slidably mounted on the outer wall of the drive shaft, and the gear (101) is rotatably mounted on the side wall of the fixed plate (9); the side wall of the fixed plate (9) is slidably provided with a saw plate (102); the saw plate (102) and the gear (101) are meshed; the bottom surface of the saw plate (102) is fixed with a movable plate (103); the bottom surface of the movable plate (103) is hinged with the first hinged rod (104).

2. The vacuum coating equipment for silicon oxide high barrier film according to claim 1, characterized in that: One end of the first hinged rod (104) away from the movable plate (103) is hinged to a second hinged rod (105), and one end of the second hinged rod (105) away from the first hinged rod (104) is hinged to the bottom surface of the inner wall of the box body (1), and a movable rod (106) passes through the hinge between the first hinged rod (104) and the second hinged rod (105), and the penetration is rotatably connected.

3. The vacuum coating equipment for silicon oxide high barrier film according to claim 2, characterized in that: The movable rod (106) passes through the telescopic rod (107) and is slidably connected at the penetration point. The bottom surface of the inner wall of the box body (1) is hinged with a flow-stirring plate (108). The side wall of the flow-stirring plate (108) is fixed with a cross bar (109). The cross bar (109) passes through one end of the telescopic rod (107) away from the movable rod (106) and is slidably connected at the penetration point. The side wall of the flow-stirring plate (108) is provided with a first sliding groove (1010).

4. The vacuum coating equipment for silicon oxide high barrier film according to claim 3, characterized in that: A slider (1011) slides on the inner wall of the first sliding groove (1010); a spoiler (1012) is hinged on the bottom surface of the inner wall of the box body (1); a connecting rod (1013) is fixed to the side wall of the spoiler (1012); a sliding ball (1014) is fixed to the end of the connecting rod (1013) away from the spoiler (1012); and the outer wall of the sliding ball (1014) is slidably connected to the inner wall of the slider (1011).

5. The vacuum coating equipment for silicon oxide high barrier film according to claim 4, characterized in that: The clamp assembly (11) comprises a clamp block (111), a push rod (112), a rotating shaft (113), a torsion spring (114), a baffle (115), a second slide groove (116), a first spring (117), a knocking block (118) and a protrusion (119); the clamp block (111) is fixedly connected to an end of the drive shaft away from the cylinder (6); the push rod (112) is fixed to the upper surface of the movable plate (103); the rotating shaft (113) passes through the clamp block (111), and the passing point is rotatably connected.

6. The vacuum coating equipment for silicon oxide high barrier film according to claim 5, characterized in that: A torsion spring (114) is rotatably mounted on the outer wall of the rotating shaft (113), and a baffle (115) is fixedly mounted on the outer wall of the rotating shaft (113). One end of the torsion spring (114) penetrates through the side wall of the clamping block (111) and is fixedly connected at the penetration point, and the other end of the torsion spring (114) penetrates through the baffle (115) and is fixedly connected at the penetration point.

7. The vacuum coating equipment for silicon oxide high barrier film according to claim 6, characterized in that: The side wall of the clamping block (111) is provided with a second sliding groove (116), the upper and lower end surfaces of the inner wall of the second sliding groove (116) are fixed with a first spring (117), one end of the first spring (117) away from the upper and lower end surfaces of the second sliding groove (116) is fixed with a knocking block (118), and the outer walls at both ends of the rotating shaft (113) are fixed with protrusions (119).

8. The vacuum coating equipment for silicon oxide high barrier film according to claim 7, characterized in that: The positioning assembly (12) comprises a rolling rod (121), a third hinge rod (122), a second spring (123) and a positioning block (124); the rolling rod (121) is rotatably connected to the inner wall of the clamping block (111); the third hinge rod (122) is hingedly connected to a side of the knocking block (118) away from the first spring (117); the second spring (123) is fixed to a side wall of the clamping block (111); and the positioning block (124) is fixed to an end of the second spring (123) away from the clamping block (111).

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