Optical monitoring system, method and equipment for optical filter production

Abstract

The invention discloses an optical monitoring system, method and equipment for optical filter production, and relates to the technical field of optical filter production, the optical monitoring system comprises an optical monitoring module, a data analysis module, a control adjustment module and a display and early warning module, and the optical monitoring system is used for monitoring the coating quality of an optical filter. By arranging the optical monitoring system comprising the optical monitoring module, the data analysis module, the control adjustment module and the similarity and early warning module, the purpose of conveniently monitoring the uniformity and thickness of each plating layer of the optical filter is achieved, and the purpose of intelligently adjusting uneven plating layers and plating layers with unqualified thicknesses is achieved; and the coating uniformity and the coating qualification rate of the optical filter are improved.

Description

[0001] The present invention relates to the technical field of optical filter production, and in particular to an optical monitoring system, method and equipment for optical filter production. Background Art

[0002] An optical filter is composed of a substrate and an optical film system on the substrate. When the filter is vacuum coated, the different coating thicknesses will cause changes in the optical filter's ability to absorb light bands. Therefore, optical monitoring is required during the vacuum coating of the filter during the production process. Currently, the commonly used monitoring methods are visual method and wavelength modulation method. However, the existing optical monitoring methods have low accuracy and the monitoring system is relatively complex, which is not convenient for accurate monitoring of coating thickness and uniformity.

[0003] The defects of the existing monitoring system for filter production are:

[0004] 1. The patent document US20050095730A1 mainly considers how to monitor and detect film thickness through spectral characteristics and theoretical distribution of spectrum, which is inconvenient to accurately monitor the thickness and uniformity of the coating, and to make feedback adjustments based on the monitoring and detection results;

[0005] 2. The patent document US09460973B2 mainly considers how to monitor the film thickness through the reflection intensity of light on the substrate, but does not consider the problem of preprocessing and converting the data to avoid errors that reduce the monitoring accuracy;

[0006] 3. The patent document CN219223643U mainly considers how to improve the accuracy of monitoring film thickness, but does not consider the issue of adjusting and supplementing the coating;

[0007] 4. Patent document CN218232560U mainly considers how to facilitate the monitoring of coating thickness of optical filters with regular film systems, but does not consider the issues of monitoring information display, reminders and remote monitoring. Summary of the invention

[0008] The object of the present invention is to provide an optical monitoring system, method and equipment for optical filter production to solve the problems raised in the above background technology.

[0009] To achieve the above-mentioned object, the present invention provides the following technical solutions: an optical monitoring system for optical filter production, comprising an optical monitoring module, a data analysis module, a control and adjustment module, and a display and early warning module, wherein the optical monitoring system is used to monitor the coating quality of the optical filter;

[0010] The optical monitoring module is used to collect images of optical filters and optical characteristic data of the filters, and process the collected images and optical characteristic data; the data analysis and prediction module is used to extract actual coating quality parameters from the processed images, analyze the filter quality according to the actual coating quality parameters and optical characteristic data, and output the quality analysis results; the control and adjustment module is used to analyze and obtain the position information of unqualified parts according to the quality analysis results, and output adjustment instructions to adjust the unqualified parts; the display and warning module is used to receive, store and display the quality analysis results, the position information of unqualified parts and the output adjustment instruction information, and is used to issue an alarm prompt when the position information of unqualified parts is received.

[0011] Preferably, the optical monitoring module includes an image acquisition unit, an image preprocessing unit and an image conversion unit;

[0012] The image acquisition unit includes an industrial camera, and the image acquisition unit is used to obtain a monitoring image of the optical filter and transmit the monitoring image to the image preprocessing unit;

[0013] The image preprocessing unit is used to preprocess the monitoring image through a histogram equalization algorithm and an adaptive filtering processing algorithm, and output a target detection image, wherein the histogram equalization algorithm is used to adjust the brightness of the monitoring image uniformly, and the adaptive filtering processing algorithm is used to smooth and reduce noise on the monitoring image;

[0014] The image conversion unit is used to convert the target detection image into an RGB color space image, and further transmit and convert the RGB color space image, including transmitting the RGB image to the data analysis and prediction module, and converting the RGB color space image into an HSI color space image, and transmitting the HSI color space image to the data analysis and prediction module;

[0015] The conversion of the target detection image into the RGB color space image includes the following steps: the target detection image acquired by the industrial camera is subjected to color separation processing, pixel point magnification processing and correction processing to obtain the RHB color space image. The conversion formula for converting the RGB color space image into the HSI color space image is:

[0016]

[0017] Preferably, the data analysis module includes a uniformity analysis unit, a target thickness setting unit, and a coating thickness detection unit;

[0018] The uniformity analysis unit receives an RGB color space image and an HSV color space image, extracts an image pixel constituent point i from the RGB color space image, and obtains Ri, Gi, and Bi values ​​of the pixel constituent point, and then extracts a pixel constituent point p from the HSV color space image corresponding to the RGB color space image, and obtains Hp, Sp, and Vp values ​​of the pixel constituent point, wherein i and p are pixel constituent points at the same position in the two color space images, respectively, and the Ri, Gi, Bi values ​​and the Hp, Sp, and Vp values ​​are actual thickness characteristic values ​​of the filter coating. By comparing the R, G, B values ​​and H, S, and V values ​​of different pixel constituent points, it is analyzed whether the colors and saturations of the image pixel constituent points are the same, and it is judged whether the coating of the optical filter is uniform. When the R, G, and B values ​​of different pixel constituent points i are different, and the H, S, and V values ​​of different pixel constituent points p are different, a judgment result of "uneven optical filter coating thickness" is output;

[0019] The target thickness setting unit is used to set and store the standard thickness characteristic value of the optical filter coating, and the standard thickness characteristic value of the coating is represented by the R, G, B values ​​and H, S, V values ​​of the target coating, and is recorded as R0, G0, B0 and H0, S0, V0;

[0020] The coating thickness detection unit is used to compare R0, G0, B0 and H0, S0, V0 with Ri, Gi, Bi and Hp, Sp, Vp to determine whether the coating thickness of the optical filter meets the target thickness of the coating. When the comparison result is Ri<R0, Gi<G0, Bi<B0 or ​​Hp<H0, Sp<S0, Vp<V0, the judgment result of "the coating thickness is thin and unqualified" is output.

[0021] Preferably, the control and adjustment module is used to receive the coating uniformity judgment result and the coating thickness judgment result, and receive the RGB color space image and the HSV color space image;

[0022] The control and regulation module includes a positioning supplement unit, a regulation calculation unit and an instruction output unit;

[0023] The positioning supplement unit is used to obtain the regional position of the thinner coating thickness when the coating is unevenly distributed, and the steps for obtaining the regional position are as follows:

[0024] A regional positioning coordinate system is set on the target detection image, and the RGB color space image and the HSV color space image are output to the regional positioning coordinate system respectively;

[0025] Obtain pixel constituent points whose actual thickness characteristic value of the filter coating is less than the standard thickness characteristic value, and mark them. The marked pixel constituent points constitute a part of the area where the coating thickness is thinner;

[0026] The coordinate positions of the edge pixel constituent points of the area with thinner coating thickness are obtained through the area positioning coordinate system, and recorded as the coordinate positions of the area with thinner coating thickness;

[0027] The adjustment calculation unit is used to calculate the supplementary sputtering coating time Tn for the thinner coating thickness portion according to the Ri, Gi, Bi, Hp, Sp, Vp values ​​of the pixel points and the quality analysis judgment result, wherein the calculation steps of the supplementary sputtering coating time Tn are as follows:

[0028] Obtain the known sputtering ion plating speed D and the detection ion plating time Tm corresponding to the plating areas with different thicknesses, and calculate the first functional relationship between the speed D, time Tm and the pixel constituent points Hp, Sp, and Vp, f(Tm, D)=FHp+GSp+KVp, where F, G, and K are constants obtained by the undetermined coefficient method, and m is the serial number of the partial area of ​​the plating with different thicknesses;

[0029] According to the first functional relationship, a second functional relationship between the construction time T, the speed D and the H, S, and V of the pixel constituent point is obtained, and the second functional relationship is f(T, D)=FH+GS+KV;

[0030] The time Tn for the additional sputtering coating of the thinner coating thickness is calculated by the second functional relationship, f(Tn, D)=FHj+GSj+KVj, where n is the number of the area with the thinner coating thickness to be additionally sputtered, and Hj, Sj, and Vj satisfy the following formula:

[0031] Hj=H0-Hp Gp≤G0

[0032] Hj=H0-Hp Gp≤G0

[0033] Vj=V0-Vp Vp≤V0;

[0034] The instruction output unit is used to output position movement drive instructions, supplementary sputtering coating time control instructions and monitoring drive instructions.

[0035] Preferably, the display and warning module includes a result display unit, a warning monitoring unit and a cloud platform storage unit;

[0036] The cloud platform storage unit is electrically connected to the optical detection module, the data analysis and prediction module, and the control and adjustment module, and is used to classify and store monitoring images, target detection images, RGB color space images, HSV color space images, actual thickness characteristic values, coating uniformity judgment results, coating thickness detection judgment results, coordinate positions of areas with thinner coating thickness, position movement drive adjustment instructions, and supplementary sputtering coating time control instructions;

[0037] The result display unit includes a large visual human-computer interface screen, a mobile phone and a computer. The large visual human-computer interface screen displays the information in the cloud platform storage unit in the form of text, charts or models, and is connected to a mobile phone or computer via the network for remote monitoring and viewing.

[0038] An optical monitoring device for optical filter production, the optical monitoring device comprising an industrial camera, a large visual human-machine interface screen, a mobile phone and a computer terminal used in an optical monitoring system, the optical monitoring device also comprising a vacuum sputtering coating component for coating the optical filter, and a sealing component for sealing the vacuum sputtering coating component;

[0039] The vacuum sputtering coating component includes a coating box, the bottom wall of the coating box is provided with a filter fixture for placing the optical filter to be coated, the inner wall of the coating box is provided with an adjustment component, the adjustment component includes a first protective box installed on the inner wall of the coating box and a servo motor 1 inside the first protective box, the output end of the servo motor 1 is connected to a screw 1, the outer wall of the screw 1 is sleeved with a support frame, the top of the support frame is installed with a servo motor 2, the output end of the servo motor 2 is connected to a screw 2, the outer wall of the screw 2 is sleeved with a mounting frame, a sputtering ion source generator is installed on the front of the mounting frame, and the sputtering ion source generator is used to coat the optical filter, a timer is installed on the outer wall of the adjustment component, and the timer is electrically connected to the servo motor 1 and the servo motor 2, the timer is used to obtain the sputtering ion plating time Tm corresponding to the coating areas with different thicknesses, and the sputtering ion source generator and the adjustment component are both electrically connected to the control and adjustment module.

[0040] Preferably, the optical monitoring device also includes a lifting assembly for adjusting the industrial camera, the lifting assembly includes a support frame arranged on the top of the coating box and a hydraulic rod arranged on the top of the support frame, the output end of the hydraulic rod is connected to a mounting plate, the mounting plate is used to install the industrial camera, the lifting assembly is electrically connected to the command output unit, and the lifting assembly receives the monitoring drive command and performs lifting action.

[0041] Preferably, the optical monitoring device also includes a sealing assembly for sealing the vacuum sputtering coating assembly, the sealing assembly includes an electric push rod installed inside the coating box and a sealing plate connected to the output end of the electric push rod, and the sealing plate is located below the hydraulic rod. The sealing assembly is electrically connected to the command output unit, and the sealing assembly receives the monitoring drive command and performs a sealing opening action.

[0042] An optical monitoring method for producing an optical filter, the optical monitoring method comprising the following steps:

[0043] S1. Setting the standard thickness characteristic value of the optical filter coating through the data analysis module, placing the optical filter to be coated in the coating box for coating;

[0044] S2. After the coating action is completed, the control and adjustment module outputs the monitoring drive command through the command output unit, the electric push rod drives the sealing plate to move right, and the hydraulic rod pushes the mounting plate to drive the industrial camera to move down to the rear of the optical filter;

[0045] S3, the industrial camera collects the filter monitoring image after coating, and pre-processes and transforms it through the image pre-processing unit and the image transformation unit to obtain the target detection image, the RGB color space image and the HSI color space image, and transmits them to the data analysis module;

[0046] S4, the data analysis module obtains the actual thickness characteristic value of the filter coating through the pixel characteristic value of the image, determines whether the coating thickness is uniform, and outputs the judgment result, determines whether the coating thickness is the target coating thickness, and outputs the judgment result;

[0047] S5, the control and adjustment module receives the judgment result of the control and adjustment module and the image of the optical monitoring module, obtains the position coordinates of the area to be supplemented with coating and the time for supplementing coating through the positioning and supplementing unit and the adjustment and calculation unit, and outputs the position movement driving instruction and the supplementary sputtering coating time control instruction to drive the adjustment component and the sputtering ion source generator to supplement coating;

[0048] S5, the output results of the optical monitoring module, the data analysis module and the control and adjustment module are all transmitted to the display and early warning module for storage and display, and early warning and remote early warning monitoring are performed according to the judgment results.

[0049] Preferably, in step S1, the following steps are also included:

[0050] S11, fix the optical filter to be coated by a filter fixture, and then place it in a coating box.

[0051] Compared with the prior art, the present invention has the following beneficial effects:

[0052] 1. The present invention achieves the purpose of accurately monitoring the uniformity and thickness of each coating layer of the optical filter by setting up an optical monitoring system including an optical monitoring module, a data analysis module, a control and adjustment module, and a similarity and early warning module, and achieves the purpose of intelligently adjusting the uneven coating layer and the coating layer with unqualified thickness, thereby improving the uniformity of the optical filter coating and the coating qualification rate.

[0053] 2. The present invention collects monitoring images of filters by arranging a lifting assembly to drive the optical monitoring module, thereby avoiding the steps of taking out the filter for detection and reinstalling it, and preprocessing and image conversion are performed on the monitoring image, so as to facilitate the acquisition of characteristic data of image pixel points for uniformity and thickness judgment, which is beneficial to improving the production efficiency of optical filters and improving monitoring accuracy.

[0054] 3. The present invention is provided with a control and adjustment module and an adjustment component, which facilitates obtaining the position of the uneven filter coating and calculating the coating replenishment time required to achieve the target coating. By driving the adjustment component to move the sputtering ion source generator, the purpose of accurately replenishing the optical filter coating is achieved.

[0055] 4. The present invention is provided with a display and early warning module for storing monitoring images, uniformity and thickness judgment results, and drive instructions output by the control and adjustment module, and displays the stored information in a variety of forms, which is convenient for intuitively displaying and discovering problems in the production of optical filter coating, and is convenient for improving the coating process, while achieving the purpose of remote monitoring and early warning. BRIEF DESCRIPTION OF THE DRAWINGS

[0056] Figure 1 It is a schematic diagram of the overall structure of the optical monitoring device of the present invention;

[0057] Figure 2 It is a schematic diagram of the front structure of the optical monitoring device of the present invention;

[0058] Figure 3 It is a schematic diagram of the side structure of the optical monitoring device of the present invention;

[0059] Figure 4 It is a diagram of the optical monitoring system of the present invention;

[0060] Figure 5 It is a diagram showing the structure of the optical monitoring module and the data analysis module of the present invention;

[0061] Figure 6 This is a diagram showing the structure of the control and regulation module of the present invention;

[0062] Figure 7 This is a flow chart of the optical monitoring method of the present invention.

[0063] In the picture: 1. Vacuum sputtering coating component; 2. Adjustment component; 3. Lifting component; 4. Sealing component; 5. Industrial camera; 6. Visual human-machine interface large screen. DETAILED DESCRIPTION

[0064] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0065] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0066] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0067] See also Figure 1 , Figure 4 and Figure 5 , an embodiment provided by the present invention: an optical monitoring system for optical filter production, comprising an optical monitoring module, a data analysis module, a control and adjustment module, and a display and early warning module, the optical monitoring system is used to monitor the coating quality of the optical filter in real time;

[0068] The optical monitoring module is used to collect images of optical filters and optical characteristic data of the filters, and process the collected images and optical characteristic data; the data analysis and prediction module is used to extract actual coating quality parameters from the processed images, and analyze the filter quality according to the actual coating quality parameters and optical characteristic data, and output the quality analysis results; the control and adjustment module is used to analyze and obtain the position information of the unqualified part according to the quality analysis results, and output the adjustment instructions to adjust the unqualified part; the display and warning module is used to receive, store and display the quality analysis results, the position information of the unqualified part and the output adjustment instruction information, and is used to issue an alarm prompt when the position information of the unqualified part is received;

[0069] The optical monitoring module includes an image acquisition unit, an image preprocessing unit and an image conversion unit;

[0070] The image acquisition unit includes an industrial camera, and the image acquisition unit is used to obtain a monitoring image of the optical filter and transmit the monitoring image to the image preprocessing unit;

[0071] The image preprocessing unit is used to preprocess the monitoring image through a histogram equalization algorithm and an adaptive filtering processing algorithm, and output a target detection image, wherein the histogram equalization algorithm is used to adjust the brightness of the monitoring image uniformly, and the adaptive filtering processing algorithm is used to smooth and reduce noise on the monitoring image;

[0072] The image conversion unit is used to convert the target detection image into an RGB color space image, and further transmit and convert the RGB color space image, including transmitting the RGB image to the data analysis and prediction module, and converting the RGB color space image into an HSI color space image, and transmitting the HSI color space image to the data analysis and prediction module;

[0073] Furthermore, the target detection image is converted into an RGB color space image, including the following steps: the target detection image acquired by the industrial camera is subjected to color separation processing, pixel point magnification processing and correction processing to obtain an RHB color space image. The conversion formula for converting the RGB color space image into the HSI color space image is:

[0074]

[0075] An industrial camera is set up to collect monitoring images of optical filters after coating, and the monitoring images are preprocessed and converted through an image preprocessing unit and an image conversion unit, so as to improve the accuracy of the monitoring images, facilitate accurate acquisition of feature data of pixel constituent points in the coating target detection image, and improve the accuracy of data analysis.

[0076] See also Figure 5 , Figure 6 and Figure 7 , an embodiment provided by the present invention: an optical monitoring system for optical filter production, the data analysis module includes a uniformity analysis unit, a target thickness setting unit, and a coating thickness detection unit;

[0077] The uniformity analysis unit receives an RGB color space image and an HSV color space image, extracts an image pixel constituent point i from the RGB color space image, and obtains Ri, Gi, and Bi values ​​of the pixel constituent point, and then extracts a pixel constituent point p from the HSV color space image corresponding to the RGB color space image, and obtains Hp, Sp, and Vp values ​​of the pixel constituent point, wherein i and p are pixel constituent points at the same position in the two color space images, respectively, and the Ri, Gi, Bi values ​​and the Hp, Sp, and Vp values ​​are actual thickness characteristic values ​​of the filter coating. By comparing the R, G, B values ​​and H, S, and V values ​​of different pixel constituent points, it is analyzed whether the colors and saturations of the image pixel constituent points are the same, and it is judged whether the coating of the optical filter is uniform. When the R, G, and B values ​​of different pixel constituent points i are different, and the H, S, and V values ​​of different pixel constituent points p are different, a judgment result of "uneven optical filter coating thickness" is output;

[0078] The target thickness setting unit is used to set and store the standard thickness characteristic value of the optical filter coating, and the standard thickness characteristic value of the coating is represented by the R, G, B values ​​and H, S, V values ​​of the target coating, and is recorded as R0, G0, B0 and H0, S0, V0;

[0079] The coating thickness detection unit is used to compare R0, G0, B0 and H0, S0, V0 with Ri, Gi, Bi and Hp, Sp, Vp to determine whether the coating thickness of the optical filter meets the target coating thickness. When the comparison result is Ri<R0, Gi<G0, Bi<B0 or ​​Hp<H0, Sp<S0, Vp<V0, the judgment result of "the coating thickness is thin and unqualified" is output;

[0080] Further, the control and adjustment module is used to receive the coating uniformity judgment result and the coating thickness judgment result, and receive the RGB color space image and the HSV color space image;

[0081] The control and regulation module includes a positioning supplement unit, a regulation calculation unit and an instruction output unit;

[0082] The positioning supplement unit is used to obtain the regional position of the thinner coating thickness when the coating is unevenly distributed, and the steps for obtaining the regional position are as follows:

[0083] A regional positioning coordinate system is set on the target detection image, and the RGB color space image and the HSV color space image are output to the regional positioning coordinate system respectively;

[0084] Obtain pixel constituent points whose actual thickness characteristic value of the filter coating is less than the standard thickness characteristic value, and mark them. The marked pixel constituent points constitute a part of the area where the coating thickness is thinner;

[0085] The coordinate positions of the edge pixel constituent points of the area with thinner coating thickness are obtained through the area positioning coordinate system, and recorded as the coordinate positions of the area with thinner coating thickness;

[0086] The adjustment calculation unit is used to calculate the supplementary sputtering coating time Tn for the thinner coating thickness portion according to the Ri, Gi, Bi, Hp, Sp, Vp values ​​of the pixel points and the quality analysis judgment result, wherein the calculation steps of the supplementary sputtering coating time Tn are as follows:

[0087] Obtain the known sputtering ion plating speed D and the detection ion plating time Tm corresponding to the plating areas with different thicknesses, and calculate the first functional relationship between the speed D, time Tm and the pixel constituent points Hp, Sp, and Vp, f(Tm, D)=FHp+GSp+KVp, where F, G, and K are constants obtained by the undetermined coefficient method, and m is the serial number of the partial area of ​​the plating with different thicknesses;

[0088] According to the first functional relationship, a second functional relationship between the construction time T, the speed D and the H, S, and V of the pixel constituent point is obtained, and the second functional relationship is f(T, D)=FH+GS+KV;

[0089] The time Tn for the additional sputtering coating of the thinner coating thickness is calculated by the second functional relationship, f(Tn, D)=FHj+GSj+KVj, where n is the number of the area with the thinner coating thickness to be additionally sputtered, and Hj, Sj, and Vj satisfy the following formula:

[0090] Hj=H0-Hp Gp≤G0

[0091] Hj=H0-Hp Gp≤G0

[0092] Vj=V0-Vp Vp≤V0;

[0093] The command output unit is used to output position movement drive commands, supplementary sputtering coating time control commands and monitoring drive commands;

[0094] By setting up a data analysis module, the characteristic data of the image pixel points is obtained and compared with the standard thickness characteristic value of the coating, so as to judge the uniformity and thickness of the optical filter coating, thereby facilitating the monitoring of the uniformity and thickness of each layer of the optical filter coating. By setting up a control and adjustment module and an adjustment component, it is convenient to obtain the position of the uneven filter coating and calculate the coating replenishment time required to reach the target coating. By driving the adjustment component to move the sputtering ion source generator, the purpose of accurately replenishing the optical filter coating is achieved.

[0095] See also Figure 2 and Figure 4, an embodiment provided by the present invention: an optical monitoring system for optical filter production, the display and warning module includes a result display unit, a warning monitoring unit and a cloud platform storage unit;

[0096] The cloud platform storage unit is electrically connected to the optical detection module, the data analysis and prediction module, and the control and adjustment module, and is used to classify and store monitoring images, target detection images, RGB color space images, HSV color space images, actual thickness characteristic values, coating uniformity judgment results, coating thickness detection judgment results, coordinate positions of areas with thinner coating thickness, position movement drive adjustment instructions, and supplementary sputtering coating time control instructions;

[0097] The result display unit includes a large visual human-machine interface screen, a mobile phone and a computer. The large visual human-machine interface screen displays the information in the cloud platform storage unit in the form of text, charts or models, and is connected to a mobile phone or computer through the network for remote monitoring and viewing;

[0098] Furthermore, a display and early warning module is provided to store monitoring images, uniformity and thickness judgment results, and drive instructions output by the control and adjustment module, and to display the stored information in a variety of forms, so as to facilitate intuitive display and discovery of problems in the production of optical filter coating, and to facilitate improvement of the coating process, while achieving the purpose of remote monitoring and early warning.

[0099] See also Figure 2 and Figure 3 , an embodiment provided by the present invention: an optical monitoring device for optical filter production, the optical monitoring device includes an industrial camera, a large visual human-machine interface screen, a mobile phone and a computer terminal used in an optical monitoring system, and the optical monitoring device also includes a vacuum sputtering coating component for coating the optical filter, and a sealing component for sealing the vacuum sputtering coating component;

[0100] The vacuum sputtering coating component includes a coating box, the bottom wall of the coating box is provided with a filter fixture for placing the optical filter to be coated, the inner wall of the coating box is provided with an adjustment component, the adjustment component includes a first protective box installed on the inner wall of the coating box and a servo motor 1 inside the first protective box, the output end of the servo motor 1 is connected to a screw 1, the outer wall of the screw 1 is sleeved with a support frame, the top of the support frame is installed with a servo motor 2, the output end of the servo motor 2 is connected to a screw 2, the outer wall of the screw 2 is sleeved with a mounting frame, a sputtering ion source generator is installed on the front of the mounting frame, and the sputtering ion source generator is used to coat the optical filter, a timer is installed on the outer wall of the adjustment component, and the timer is electrically connected to the servo motor 1 and the servo motor 2, the timer is used to obtain the sputtering ion plating time Tm corresponding to the coating areas with different thicknesses, and the sputtering ion source generator and the adjustment component are both electrically connected to the control and adjustment module;

[0101] Furthermore, the optical monitoring device also includes a sealing component for sealing the vacuum sputtering coating component, the sealing component includes an electric push rod installed inside the coating box and a sealing plate connected to the output end of the electric push rod, and the sealing plate is located below the hydraulic rod, the sealing component is electrically connected to the command output unit, and the sealing component receives the monitoring drive command;

[0102] When the coating action is completed, the electric push rod in the sealing component receives the monitoring drive instruction output by the control and regulation module, and drives the sealing plate to move to the right, so that the industrial camera can enter the vacuum sputtering coating component for optical monitoring;

[0103] Furthermore, the optical monitoring device also includes a lifting assembly for adjusting the industrial camera, the lifting assembly includes a support frame arranged on the top of the coating box and a hydraulic rod arranged on the top of the support frame, the output end of the hydraulic rod is connected to a mounting plate, the mounting plate is used to mount the industrial camera, and a light source is installed on the front of the mounting plate, the light source is located around the industrial camera, the lifting assembly is electrically connected to the command output unit, and the lifting assembly receives the monitoring drive command;

[0104] After the sealing plate moves to the right, the hydraulic rod in the lifting assembly pushes the mounting plate to drive the industrial camera to move downward to the rear of the optical filter, and the industrial camera collects the monitoring image of the filter. After the collection is completed, the hydraulic rod pulls the mounting plate to drive the industrial camera to move up to the support frame, and the electric push rod pushes the sealing plate to the left to seal the top of the coating box. When the adjustment assembly receives the position movement drive instruction, servo motor 1 drives screw 1 to rotate, so that the support frame drives servo motor 2 to move up and down, and servo motor 2 drives screw 2 to rotate, so that the mounting frame drives the sputtering ion source generator to move left and right. The sputtering ion source generator receives the time control instruction for supplementing the sputtering coating and supplements the coating of the optical filter.

[0105] Working principle: The standard thickness characteristic value of the optical filter coating is set through the data analysis module, and the optical filter to be coated is placed in the coating box for coating. After the coating action is completed, the control and adjustment module outputs the monitoring drive command through the command output unit, and the electric push rod drives the sealing plate to move right, and the hydraulic rod pushes the mounting plate to drive the industrial camera to move down to the back of the optical filter. The industrial camera collects the monitoring image of the filter after coating, and performs preprocessing and conversion, and then transmits it to the data analysis module to obtain the actual thickness characteristic value of the filter coating, and judge whether the coating thickness is uniform and whether the coating thickness is the target coating. The layer thickness is determined and the judgment result is outputted. The control and adjustment module receives the judgment result of the control and adjustment module and the image of the optical monitoring module, and obtains the position coordinates of the area to be supplemented with coating and the time for supplementing coating through the positioning and replenishing unit and the adjustment and calculation unit respectively, and outputs the position movement driving instruction and the supplementary sputtering coating time control instruction to drive the adjustment component and the sputtering ion source generator to supplement coating. The output results of the optical monitoring module, the data analysis module and the control and adjustment module are all transmitted to the display and early warning module for storage and display, and early warning and remote early warning monitoring are performed according to the judgment result.

[0106] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. An optical monitoring system for optical filter production, characterized in that: It includes an optical monitoring module, a data analysis module, a control and adjustment module, and a display and early warning module. The optical monitoring system is used to monitor the coating quality of the optical filter; The optical monitoring module is used to collect images of optical filters and optical characteristic data of the filters, and process the collected images and optical characteristic data; the data analysis and prediction module is used to extract actual coating quality parameters from the processed images, analyze the filter quality according to the actual coating quality parameters and optical characteristic data, and output the quality analysis results; the control and adjustment module is used to analyze and obtain the position information of unqualified parts according to the quality analysis results, and output adjustment instructions to adjust the unqualified parts; the display and warning module is used to receive, store and display the quality analysis results, the position information of unqualified parts and the output adjustment instruction information, and is used to issue an alarm prompt when the position information of unqualified parts is received.

2. The optical monitoring system for optical filter production according to claim 1, characterized in that: The optical monitoring module includes an image acquisition unit, an image preprocessing unit and an image conversion unit; The image acquisition unit comprises an industrial camera (5), and the image acquisition unit is used to obtain a monitoring image of the optical filter and transmit the monitoring image to the image preprocessing unit; The image preprocessing unit is used to preprocess the monitoring image through a histogram equalization algorithm and an adaptive filtering processing algorithm, and output a target detection image, wherein the histogram equalization algorithm is used to adjust the brightness of the monitoring image uniformly, and the adaptive filtering processing algorithm is used to smooth and reduce noise on the monitoring image; The image conversion unit is used to convert the target detection image into an RGB color space image, and further transmit and convert the RGB color space image, including transmitting the RGB image to the data analysis and prediction module, and converting the RGB color space image into an HSI color space image, and transmitting the HSI color space image to the data analysis and prediction module; The conversion of the target detection image into the RGB color space image includes the following steps: the target detection image acquired by the industrial camera (5) is subjected to color separation processing, pixel point magnification processing and correction processing to obtain an RHB color space image. The conversion formula for converting the RGB color space image into the HSI color space image is:

3. The optical monitoring system for optical filter production according to claim 1, characterized in that: The data analysis module includes a uniformity analysis unit, a target thickness setting unit, and a coating thickness detection unit; The uniformity analysis unit receives the RGB color space image and the HSV color space image, extracts the image pixel constituent point i from the RGB color space image, and obtains the Ri, Gi, and Bi values ​​of the pixel constituent point, then extracts the pixel constituent point p from the HSV color space image corresponding to the RGB color space image, and obtains the Hp, Sp, and Vp values ​​of the pixel constituent point, wherein i and p are pixel constituent points at the same position in the two color space images, respectively, and the Ri, Gi, and Bi values ​​and the Hp, Sp, and Vp values ​​are the actual thickness characteristic values ​​of the filter coating. By comparing the R, G, and B values ​​and the H, S, and V values ​​of different pixel constituent points, it is analyzed whether the colors and saturations of the image pixel constituent points are the same, and it is judged whether the coating of the optical filter is uniform. When the R, G, and B values ​​of different pixel constituent points i are different, and the H, S, and V values ​​of different pixel constituent points p are different, a judgment result of "uneven optical filter coating thickness" is output; The target thickness setting unit is used to set and store the standard thickness characteristic value of the optical filter coating, and the standard thickness characteristic value of the coating is represented by the R, G, B values ​​and H, S, V values ​​of the target coating, and is recorded as R0, G0, B0 and H0, S0, V0; The coating thickness detection unit is used to compare R0, G0, B0 and H0, S0, V0 with Ri, Gi, Bi and Hp, Sp, Vp to determine whether the coating thickness of the optical filter meets the target coating thickness. When the comparison result is Ri<R0, Gi<G0, Bi<B0 or ​​Hp<H0, Sp<S0, Vp<V0, the judgment result of "the coating thickness is thin and unqualified" is output.

4. The optical monitoring system for optical filter production according to claim 1, characterized in that: The control and adjustment module is used to receive the coating uniformity judgment result and the coating thickness judgment result, and receive the RGB color space image and the HSV color space image; The control and regulation module includes a positioning supplement unit, a regulation calculation unit and an instruction output unit; The positioning supplement unit is used to obtain the regional position of the thinner coating thickness when the coating is unevenly distributed, and the steps for obtaining the regional position are as follows: A regional positioning coordinate system is set on the target detection image, and the RGB color space image and the HSV color space image are output to the regional positioning coordinate system respectively; Obtain pixel constituent points whose actual thickness characteristic value of the filter coating is less than the standard thickness characteristic value, and mark them. The marked pixel constituent points constitute a part of the area where the coating thickness is thinner; The coordinate positions of the edge pixel constituent points of the area with thinner coating thickness are obtained through the area positioning coordinate system, and recorded as the coordinate positions of the area with thinner coating thickness; The adjustment calculation unit is used to calculate the supplementary sputtering coating time Tn for the thinner coating thickness portion according to the Ri, Gi, Bi, Hp, Sp, Vp values ​​of the pixel points and the quality analysis judgment result, wherein the calculation steps of the supplementary sputtering coating time Tn are as follows: Obtain the known sputtering ion plating speed D and the detection ion plating time Tm corresponding to the different thickness plating areas, and calculate the first functional relationship between the speed D, time Tm and the pixel constituent points Hp, Sp, Vp, f(Tm, D)=FHp+GSp+KVp, where F, G, K are constants obtained by the undetermined coefficient method, and m is the serial number of the partial area of ​​the plating with different thicknesses; According to the first functional relationship, a second functional relationship between the construction time T, the speed D and the H, S, and V of the pixel constituent point is obtained, and the second functional relationship is f(T, D)=FH+GS+KV; The time Tn for the additional sputtering coating of the thinner coating thickness is calculated by the second functional relationship, f(Tn, D)=FHj+GSj+KVj, where n is the number of the area with the thinner coating thickness to be additionally sputtered, and Hj, Sj, and Vj satisfy the following formula: Hj=H0-Hp Gp≤G0 Hj=H0-Hp Gp≤G0 Vj=V0-Vp Vp≤V0; The instruction output unit is used to output position movement drive instructions, supplementary sputtering coating time control instructions and monitoring drive instructions.

5. The optical monitoring system for optical filter production according to claim 1, characterized in that: The display and warning module includes a result display unit, a warning monitoring unit and a cloud platform storage unit; The cloud platform storage unit is electrically connected to the optical detection module, the data analysis and prediction module, and the control and adjustment module, and is used to classify and store monitoring images, target detection images, RGB color space images, HSV color space images, actual thickness characteristic values, coating uniformity judgment results, coating thickness detection judgment results, coordinate positions of areas with thinner coating thickness, position movement drive adjustment instructions, and supplementary sputtering coating time control instructions; The result display unit includes a large visual human-machine interface screen (6), a mobile phone and a computer. The large visual human-machine interface screen (6) displays the information in the cloud platform storage unit in the form of text, charts or models, and is connected to the mobile phone or computer via a network for remote monitoring and viewing.

6. An optical monitoring device for optical filter production, applied to an optical monitoring system for optical filter production according to any one of claims 1 to 5, characterized in that: The optical monitoring device comprises an industrial camera (5) used in an optical monitoring system, a large visual human-machine interface screen (6), a mobile phone and a computer terminal, and the optical monitoring device also comprises a vacuum sputtering coating component (1) for coating an optical filter, and a sealing component (4) for sealing the vacuum sputtering coating component (1); The vacuum sputtering coating component (1) comprises a coating box, the bottom wall of the coating box is provided with a filter fixture for placing an optical filter to be coated, the inner wall of the coating box is provided with an adjustment component (2), the adjustment component (2) comprises a first protective box installed on the inner wall of the coating box and a servo motor 1 inside the first protective box, the output end of the servo motor 1 is connected to a screw 1, the outer wall of the screw 1 is sleeved with a support frame, the top of the support frame is installed with a servo motor 2, the output end of the servo motor 2 is connected to a screw 2, the outer wall of the screw 2 is sleeved with a mounting frame, a sputtering ion source generator is installed on the front of the mounting frame, and the sputtering ion source generator is used to coat the optical filter, a timer is installed on the outer wall of the adjustment component (2), and the timer is electrically connected to the servo motor 1 and the servo motor 2, the timer is used to obtain the sputtering ion plating time Tm corresponding to the coating areas with different thicknesses, and the sputtering ion source generator and the adjustment component (2) are both electrically connected to the control and adjustment module.

7. The optical monitoring device for optical filter production according to claim 6, characterized in that: The optical monitoring device also includes a lifting component (3) for adjusting the industrial camera (5), the lifting component (3) includes a support frame arranged on the top of the coating box and a hydraulic rod arranged on the top of the support frame, the output end of the hydraulic rod is connected to a mounting plate, the mounting plate is used to install the industrial camera (5), the lifting component (3) is electrically connected to the command output unit, and the lifting component (3) receives the monitoring drive command and performs a lifting action.

8. The optical monitoring device for optical filter production according to claim 6, characterized in that: The optical monitoring device also includes a sealing component (4) for sealing the vacuum sputtering coating component (1), the sealing component (4) includes an electric push rod installed inside the coating box and a sealing plate connected to the output end of the electric push rod, and the sealing plate is located below the hydraulic rod. The sealing component (4) is electrically connected to the command output unit, and the sealing component (4) receives the monitoring drive command and performs a sealing opening action.

9. An optical monitoring method for optical filter production, applicable to an optical monitoring device for optical filter production as claimed in any one of claims 6 to 8, characterized in that: The optical monitoring method comprises the following steps: S1. Setting the standard thickness characteristic value of the optical filter coating through the data analysis module, placing the optical filter to be coated in the coating box for coating; S2. After the coating action is completed, the control and adjustment module outputs a monitoring drive command through the command output unit, the electric push rod drives the sealing plate to move right, and the hydraulic rod pushes the mounting plate to drive the industrial camera (5) to move down to the rear of the optical filter; S3, the industrial camera (5) collects the filter monitoring image after coating, and pre-processes and transforms it through the image pre-processing unit and the image transformation unit to obtain the target detection image, the RGB color space image and the HSI color space image, and transmits them to the data analysis module; S4, the data analysis module obtains the actual thickness characteristic value of the filter coating through the pixel characteristic value of the image, determines whether the coating thickness is uniform, and outputs the judgment result, determines whether the coating thickness is the target coating thickness, and outputs the judgment result; S5, the control and adjustment module receives the judgment result of the control and adjustment module and the image of the optical monitoring module, obtains the position coordinates of the area to be supplemented with coating and the time for supplementing coating through the positioning and supplementing unit and the adjustment and calculation unit, and outputs the position movement driving instruction and the supplementary sputtering coating time control instruction to drive the adjustment component (2) and the sputtering ion source generator to supplement coating; S5, the output results of the optical monitoring module, the data analysis module and the control and adjustment module are all transmitted to the display and early warning module for storage and display, and early warning and remote early warning monitoring are performed according to the judgment results.

10. The optical monitoring method for optical filter production according to claim 9, characterized in that: In the step S1, the following steps are also included: S11, fix the optical filter to be coated by a filter fixture, and then place it in a coating box.

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